Laser micro-nano machining differential confocal online monitoring integration method and device

A differential confocal and micro-nano processing technology, applied in the direction of measuring devices, optical devices, nanotechnology, etc., can solve the problem of only 2 microns, to solve the problem of online detection, improve processing ability, solve high-precision real-time The effect of the focus problem

Pending Publication Date: 2018-07-17
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In terms of laser manufacturing process monitoring and quality control, in-situ monitoring and detection such as accurate judgment of the focus spot position, automatic focus and sample drift are crucial to 3D micro-nano processing, and to a certain extent determine the axial processing feature size , such as the axial monitoring method based on the triangular optical displacement sensor, the confocal microscopic imaging method based on the lateral focus monitoring, and the optical coherence tomography monitoring method, etc., the resolution capabilities of which are all in the order of μm. On-line monitoring technology research, but its monitoring resolution in the x-y-z direction is only 2 microns, and new methods are still needed to realize nano-scale monitoring and positioning

Method used

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  • Laser micro-nano machining differential confocal online monitoring integration method and device
  • Laser micro-nano machining differential confocal online monitoring integration method and device
  • Laser micro-nano machining differential confocal online monitoring integration method and device

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] like figure 1 As shown, the computer 30 performs feedback control on the two-dimensional scanner 18, the precision workbench 10, and the axial scanner 8 to realize the three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9; the femtosecond laser processing system consists of a femtosecond laser 15 , laser space-time shaping module 16, two-dimensional scanner 18; 26 and a differential processing module 28; and the first intensity detector 27 and the second intensity detector 26 deviate from the focal planes of the first detection objective lens 14 and the second detection objective lens 25 by equal distances and opposite directions.

[0043] The implementation steps of the integrated method of laser micro-nano processing and laser differential confocal online monitoring are as follows:

[0044] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perform scanning motion; ...

Embodiment 2

[0053] like figure 2 As shown, the laser space-time shaping module 16 is composed of a space shaper 31 and a time shaper 32, and adjusts the time-domain and space-domain parameters of the light beam emitted by the femtosecond laser 15, so as to optimize the femtosecond laser processing performance.

[0054] All the other are identical with embodiment 1.

Embodiment 3

[0056] like image 3 As shown, before processing, after the sample 9 is placed on the precision workbench 10, the sample 9 is roughly aligned using the microscopic imaging module 24, and the light emitted by the white light source 19 passes through the illumination system 20, the beam splitter 21, the dichroic After the mirror B6 and the objective lens 7, parallel light beams are generated to uniformly irradiate the sample 9, and the illuminating light scattered by the sample 9 is reflected by the beam splitter 21 and then imaged on the CCD 23 through the imaging objective lens 22, so that the lateral position and imaging area of ​​the sample 9 can be obtained, and then can be obtained. Determine the inclination and position of the sample 9.

[0057] All the other are identical with embodiment 1.

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Abstract

The present invention belongs to the field of laser precision detection technologies and laser micro-nano machining monitoring technologies, and relates to a laser micro-nano machining differential confocal online monitoring integration method and device which can be used for laser micro-nano machining and online detection of a complex micro-nano structure. A laser differential confocal axial monitoring module with high axial resolution and a femtosecond laser machining system are organically integrated, a differential confocal system curve zero point is employed to perform nanoscale monitoring of a sample axial position and measurement of a sample axial machining size to achieve real-time fixed focus of the sample axial position and high-precision measurement of the micro-nano structure size after machining, solve the drift problem and the high-precision online detection problem in the measurement process, improve the controllability of micro-nano femtosecond laser machining precisionand sample machining quality. Prior to machining, a microimaging module is utilized to perform rough alignment and horizontal position identification of the sample.

Description

technical field [0001] The invention belongs to the fields of laser precision detection technology and laser micro-nano processing monitoring technology, and relates to an integrated method and device for laser micro-nano processing differential confocal on-line monitoring, which is used for laser micro-nano processing and on-line detection of complex microstructures. technical background [0002] Complex microstructure components are widely used in aerospace, weapon industry, precision sensors, precision optical measurement, etc. Laser micro-nano processing is the most promising technical means for manufacturing complex microstructures. High-resolution online detection of focal point and sample position is one of the key technologies to meet nano-scale feature size and high aspect ratio processing / detection in the field of micro-nano manufacturing. [0003] In terms of complex micro-nano structure processing, although near-field focusing processing has high resolution, far-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00B82Y40/00B82Y35/00
CPCG01B11/00B82Y35/00B82Y40/00
Inventor 赵维谦邱丽荣王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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