Laser micro-nano machining differential confocal online monitoring integration method and device
A differential confocal and micro-nano processing technology, applied in the direction of measuring devices, optical devices, nanotechnology, etc., can solve the problem of only 2 microns, to solve the problem of online detection, improve processing ability, solve high-precision real-time The effect of the focus problem
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Embodiment 1
[0042] like figure 1 As shown, the computer 30 performs feedback control on the two-dimensional scanner 18, the precision workbench 10, and the axial scanner 8 to realize the three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9; the femtosecond laser processing system consists of a femtosecond laser 15 , laser space-time shaping module 16, two-dimensional scanner 18; 26 and a differential processing module 28; and the first intensity detector 27 and the second intensity detector 26 deviate from the focal planes of the first detection objective lens 14 and the second detection objective lens 25 by equal distances and opposite directions.
[0043] The implementation steps of the integrated method of laser micro-nano processing and laser differential confocal online monitoring are as follows:
[0044] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perform scanning motion; ...
Embodiment 2
[0053] like figure 2 As shown, the laser space-time shaping module 16 is composed of a space shaper 31 and a time shaper 32, and adjusts the time-domain and space-domain parameters of the light beam emitted by the femtosecond laser 15, so as to optimize the femtosecond laser processing performance.
[0054] All the other are identical with embodiment 1.
Embodiment 3
[0056] like image 3 As shown, before processing, after the sample 9 is placed on the precision workbench 10, the sample 9 is roughly aligned using the microscopic imaging module 24, and the light emitted by the white light source 19 passes through the illumination system 20, the beam splitter 21, the dichroic After the mirror B6 and the objective lens 7, parallel light beams are generated to uniformly irradiate the sample 9, and the illuminating light scattered by the sample 9 is reflected by the beam splitter 21 and then imaged on the CCD 23 through the imaging objective lens 22, so that the lateral position and imaging area of the sample 9 can be obtained, and then can be obtained. Determine the inclination and position of the sample 9.
[0057] All the other are identical with embodiment 1.
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