The invention relates to a
femtosecond laser machining and monitoring method based on back light splitting
pupil differential
confocal Raman-LIBS-
mass spectroscopy detection, and belongs to the fieldsof a
laser precision detection technology and a
femtosecond laser machining and monitoring technology. The method can be used for
femtosecond laser
machining and online monitoring, and online detection of
physical property comprehensive parameters. A back light splitting
pupil laser differential
confocal axial monitoring module and a femtosecond laser
machining system are organically fused, and the axial position of a sample is subjected to high-precision in-situ monitoring and sample axial machining
size measurement by utilizing a back light splitting
pupil differential
confocal system; anda
Raman spectroscopy detection module, an LIBS
spectroscopy detection module and a
mass spectrograph are used for carrying out monitoring analysis on information such as molecular structures, elements, ions and the like of a sample material after femtosecond laser machining, and the information is fused through a computer, so that the high-precision femtosecond laser machining of a micro-structureand the in-situ monitoring analysis of the morphology performance of a micro-region are integrated, and the
controllability of the femtosecond laser machining precision of the micro-structure, the machining quality of the sample and the like are improved.