The invention relates to a femtosecond laser machining and monitoring method and device based on confocal Raman-LIBS-mass spectroscopy detection, and belongs to the fields of a laser precision detection technology and a femtosecond laser machining and manufacturing technology. A laser confocal axial monitoring module and a femtosecond laser machining system are organically fused, and the axial position of a sample is subjected to high-precision in-situ monitoring and sample axial machining size measurement by utilizing a curve peak point of a differential confocal system, so that the sample drift problem and the high-precision online detection problem in the measurement process are solved; and a Raman spectroscopy detection module, an LIBS spectroscopy detection module and a mass spectrograph are used for carrying out monitoring analysis on information such as molecular structures, elements, ions and the like of a sample material after femtosecond laser machining, and the information is fused through a computer, so that the high-precision femtosecond laser machining of a micro-structure and the in-situ monitoring analysis of the morphology performance of a micro-region are integrated, and the controllability of the femtosecond laser machining precision of the micro-structure, the machining quality of the sample and the like are improved.