Differential confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device

A femtosecond laser processing and differential confocal technology, applied in the field of femtosecond laser processing monitoring, can solve the problems of in-situ detection of complex morphological performance parameters of samples, easy axial drift of samples, etc., and achieve high-precision real-time fixed focus. problem, improve the axial position monitoring ability, and solve the effect of drift problem

Inactive Publication Date: 2019-01-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0010] The purpose of the present invention is to solve the problem that the sample is prone to axial drift in laser micro-nano processing and the in-situ detection of complex morphological and performance parameters of the sample after processing. The present invention proposes a femtosecond laser for differential confocal Raman-LIBS-mass spectrometry detection. The processing monitoring method and device realize the on-line monitoring of axial drift and inclination during sample processing and the nanoscale monitoring of the axial size of sample structure, ensuring accurate real-time focusing of samples during processing, and realizing The comprehensive detection of sample microstructure and complex physical parameters provides a technical basis for feedback correction, mechanism research and process improvement of femtosecond laser processing, and improves the controllability of laser processing accuracy and the processing quality of samples

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  • Differential confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device
  • Differential confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device
  • Differential confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device

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Embodiment 1

[0046] Such as figure 1 As shown, the computer 33 performs feedback control on the two-dimensional scanner 24, the precision workbench 10, and the axial scanner 8 to realize the three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9; the femtosecond laser processing system consists of a femtosecond laser 21 , laser space-time shaping module 22, two-dimensional scanner 24; 18 and a differential processing module 19; and the first intensity detector 16 and the second intensity detector 18 deviate from the focal planes of the first detection objective lens 15 and the second detection objective lens 17 at equal distances but in opposite directions.

[0047] The implementation steps of the femtosecond laser processing and monitoring integrated method of differential confocal Raman-LIBS-mass detection are as follows:

[0048] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perfor...

Embodiment 2

[0058] Such as figure 2 As shown, the laser space-time shaping module 22 is composed of a space shaper 31 and a time shaper 32, and adjusts the time-domain and space-domain parameters of the light beam emitted by the femtosecond laser 21, so as to optimize the femtosecond laser processing performance.

[0059] All the other are identical with embodiment 1.

Embodiment 3

[0061] Such as image 3 As shown, before processing, after the sample 9 is placed on the precision workbench 10, the sample 9 is roughly aligned using the microscopic imaging module 40, and the light emitted by the white light source 34 passes through the illumination system 35, the illumination beam splitter 36, and the two-way After the color mirror B6 and the objective lens 7, parallel light beams are generated to uniformly irradiate the sample 9, and the illumination light reflected by the sample 9 is reflected by the illumination beam splitter 36 and imaged on the CCD 39 through the imaging lens 38, so that the position and imaging area of ​​the sample 9 can be obtained, and then The inclination and position of the sample 9 can be judged.

[0062] All the other are identical with embodiment 1.

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Abstract

The invention relates to a differential confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device, and belongs to the fields of a laser precision detection technology and a femtosecond laser machining and manufacturing technology. A laser differential confocal axial monitoring module with high axial resolution and a femtosecond laser machining system are organically fused, and the axial position of a sample is subjected to nano-scale in-situ online monitoring and sample axial machining size measurement by utilizing a curve zero point of a differential confocal system, so that the drift problem and the high-precision online detection problem in the measurement process are solved; and a differential confocal Raman spectroscopy detection module, an LIBS detection module and a mass spectrometer are used for carrying out monitoring analysis on information such as molecular structures, elements, ions and the like of a sample material afterfemtosecond laser machining, and the information is fused through a computer, so that the high-precision femtosecond laser machining of a micro-structure and the in-situ monitoring analysis of the morphology performance of a micro-region are integrated, and the controllability of the femtosecond laser machining precision of the micro-structure, the machining quality of the sample and the like areimproved.

Description

technical field [0001] The present invention relates to a femtosecond laser processing monitoring method and device for differential confocal Raman-LIBS-mass spectrometry detection, in particular to an integrated femtosecond laser processing monitoring method and device for differential confocal Raman-LIBS-mass spectrometry detection. In-situ monitoring and analysis of micro-area morphology and performance in microstructure femtosecond laser processing belongs to the field of laser precision detection technology and femtosecond laser processing and manufacturing technology. Background technique [0002] Femtosecond laser processing is regarded as a century-old technology that "may cause a new industrial revolution" due to its remarkable advantages such as wide material adaptability, high processing precision, and no mask required, and is regarded as a macro-micro-spanning technology. The preferred method of scale micro-nano manufacturing has been given priority in the develo...

Claims

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Application Information

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IPC IPC(8): G01N27/64G01N21/71G01N21/65G01N21/01
CPCG01N27/64G01N21/01G01N21/65G01N21/71G01N21/718
Inventor 赵维谦邱丽荣王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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