Laser micro-nano processing split-pupil differential confocal online monitoring integrated method and device

A differential confocal, micro-nano processing technology, applied in measurement devices, optical devices, laser welding equipment, etc., can solve problems such as only 2 microns, solve online detection problems, improve controllability, and solve drift problems and effects of high precision real-time fixed focus problems
CN108413867BActive Publication Date: 2020-08-04BEIJING INSTITUTE OF TECHNOLOGYGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING INSTITUTE OF TECHNOLOGYGY
Publication Date
2020-08-04

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Abstract

The invention belongs to the laser precision detection technology and laser micro-nano processing monitoring technology field and relates to a laser micro-nano processing light splitting pupil differential confocal online monitoring integration method and device which can be used for the laser micro-nano processing and online detection of a complex fine structure. In the invention, a long workingdistance and high axial resolution light splitting pupil laser differential confocal axial monitoring module is organically integrated with a femtosecond laser processing system. A light splitting pupil differential confocal system curve zero point is used to carry out nanoscale monitoring on the axial position of a sample so as to realize the real-time fixed focus of the axial position of the sample and the high precision measurement of a processed micro-nano structure size. A drift problem and a high-precision online detection problem in a measurement process are solved, and the controllability of micro-nano femtosecond laser processing precision, the processing quality of the sample and the like are improved. Before processing, a microscopic imaging module can be used to carry out coarse alignment and transverse position identification on the sample.
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Description

technical field

[0001] The invention belongs to the field of laser precision detection technology and laser micro-nano processing monitoring technology, and relates to an integrated method and device for laser micro-nano processing split-pupil differential confocal online monitoring, which can be used for laser micro-nano processing and online detection of complex micro-structures.

[0002] technical background

[0003] Complex microstructure components are widely used in aerospace, weapon industry, precision sensors, precision optical measurement, etc. Laser micro-nano machining is the most promising technical means for manufacturing complex microstructures. The high-resolution on-line detection of focal point and sample position is one of the key technologies to meet the requirements of nanoscale feature size and high aspect ratio processing / detection in the field of micro-nano manufacturing.

[0004] In the processing of complex micro-nano structures, despite the high reso...

Claims

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