Femtosecond laser machining and monitoring method and device based on confocal Raman-LIBS-mass spectroscopy detection

A femtosecond laser processing and monitoring device technology, applied in the field of femtosecond laser processing monitoring, can solve the problems of easy axial drift of samples, in-situ detection of complex morphological performance parameters of samples, etc., and achieve high-precision real-time fixed focus problems, The effect of improving the axial position monitoring ability and solving the drift problem

Inactive Publication Date: 2019-01-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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Problems solved by technology

[0010] The purpose of the present invention is to solve the problems of axial drift of samples in laser micro-nano processing and in-situ detection of complex shape and performance parameters of samples after processing. The present invention proposes femtosecond laser processing monitoring with confocal Raman-LIBS-mass spectrometry detection The method and device realize the on-line monitoring of axial drift and inclination during sample processing and the nanoscale monitoring of the axial size of the sample structure, ensuring accurate real-time focusing of the sample during processing, and realizing the microscopic measurement of the sample after processing. The comprehensive detection of area morphology structure and complex physical parameters provides a technical basis for feedback correction, mechanism research and process improvement of femtosecond laser processing, and improves the controllability of laser processing accuracy and the processing quality of samples

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  • Femtosecond laser machining and monitoring method and device based on confocal Raman-LIBS-mass spectroscopy detection
  • Femtosecond laser machining and monitoring method and device based on confocal Raman-LIBS-mass spectroscopy detection
  • Femtosecond laser machining and monitoring method and device based on confocal Raman-LIBS-mass spectroscopy detection

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Effect test

Embodiment 1

[0049] Such as figure 1 As shown, the computer 32 performs feedback control on the two-dimensional scanner 20, the precision workbench 10, and the axial scanner 8 to realize the three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9; the femtosecond laser processing system consists of a femtosecond laser 17 , a laser space-time shaping module 18, and a two-dimensional scanner 20; the confocal detection module 13 may be composed of a detection objective lens 14 and an intensity detector 15; and the intensity detector 15 is located at the focus position of the detection objective lens 14.

[0050] The implementation steps of the femtosecond laser processing monitoring method detected by confocal Raman-LIBS-mass spectrometry are as follows:

[0051] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perform scanning motion;

[0052] 2) Before processing, use the confocal axial mo...

Embodiment 2

[0061] Such as figure 2 As shown, the laser space-time shaping module 18 is composed of a space shaper 30 and a time shaper 31, and adjusts the time-domain and space-domain parameters of the beam emitted by the femtosecond laser 17, so as to optimize the femtosecond laser processing performance.

[0062] All the other are identical with embodiment 1.

Embodiment 3

[0064] Such as image 3 As shown, before processing, after the sample 9 is placed on the precision workbench 10, the sample 9 is roughly aligned using the microscopic imaging module 36, and the light emitted by the white light source 34 passes through the illumination system 35, the illumination beam splitter 37, and the After the color mirror B6 and the objective lens 7, a parallel light beam is generated to uniformly irradiate the sample 9, and the illumination light reflected by the sample 9 is reflected by the illumination beam splitter 37 and then imaged on the CCD 40 through the imaging lens 39, so that the position and imaging area of ​​the sample 9 can be obtained, and then The inclination and position of the sample 9 can be judged.

[0065] All the other are identical with embodiment 1.

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Abstract

The invention relates to a femtosecond laser machining and monitoring method and device based on confocal Raman-LIBS-mass spectroscopy detection, and belongs to the fields of a laser precision detection technology and a femtosecond laser machining and manufacturing technology. A laser confocal axial monitoring module and a femtosecond laser machining system are organically fused, and the axial position of a sample is subjected to high-precision in-situ monitoring and sample axial machining size measurement by utilizing a curve peak point of a differential confocal system, so that the sample drift problem and the high-precision online detection problem in the measurement process are solved; and a Raman spectroscopy detection module, an LIBS spectroscopy detection module and a mass spectrograph are used for carrying out monitoring analysis on information such as molecular structures, elements, ions and the like of a sample material after femtosecond laser machining, and the information is fused through a computer, so that the high-precision femtosecond laser machining of a micro-structure and the in-situ monitoring analysis of the morphology performance of a micro-region are integrated, and the controllability of the femtosecond laser machining precision of the micro-structure, the machining quality of the sample and the like are improved.

Description

technical field [0001] The invention relates to a femtosecond laser processing monitoring method and device for confocal Raman-LIBS-mass spectrometry detection, in particular to a femtosecond laser processing monitoring method and device for confocal Raman-LIBS-mass spectrometry detection, belonging to laser precision detection technology, Femtosecond laser processing and manufacturing technology field. Background technique [0002] Femtosecond laser processing is regarded as a century-old technology that "may cause a new industrial revolution" due to its remarkable advantages such as wide material adaptability, high processing precision, and no mask required, and is regarded as a macro-micro-spanning technology. The preferred method of scale micro-nano manufacturing has been given priority in the development of China, the United States and other major manufacturing countries in the world. [0003] Femtosecond laser processing is to use the nonlinear effect of laser and mat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/64G01N21/71G01N21/65G01N21/01
CPCG01N27/64G01N21/01G01N21/65G01N21/71G01N21/718
Inventor 王允邱丽荣赵维谦
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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