Light splitting pupil confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device

A femtosecond laser processing and monitoring device technology, used in measurement devices, analytical materials, thermal excitation analysis, etc., can solve the problems of easy axial drift of samples, in-situ detection of complex morphological performance parameters of samples, etc., and achieve high precision. Real-time fixed focus problem, improve axial position monitoring ability and axial dimension detection ability, and solve the effect of drift problem

Inactive Publication Date: 2019-01-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0010] The purpose of the present invention is to solve the problems of axial drift of samples in femtosecond laser processing and in-situ detection of complex morphological performance parameters of samples after processing. The laser processing monitoring method and device can realize the online monitoring of axial drift and inclination during sample processing and the nanoscale monitoring of the axial size of the sample structure, so as to ensure the accurate real-time focusing of the sample during processing, and realize the sample processing after processing. The comprehensive detection of micro-area morphology structure and complex physical parameters can provide a technical basis for feedback correction, mechanism research and process improvement of femtosecond laser processing, and improve the controllability of laser processing accuracy and the processing quality of samples

Method used

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  • Light splitting pupil confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device
  • Light splitting pupil confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device
  • Light splitting pupil confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device

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Experimental program
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Embodiment 1

[0051] Such as figure 1 , using the split-pupil confocal axial monitoring module 1 to monitor the surface position of the sample 9 before processing and the axial position of the sample 9 during processing, the computer 33 monitors the two-dimensional scanner 18, the precision table 10, and the axial scanner 8 performs feedback control to realize three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9;

[0052] The split pupil detector 14 is composed of a spot magnifying objective lens 19 , a pinhole 20 and a light intensity detector 21 . The implementation steps of the femtosecond laser processing monitoring method with split-pupil confocal Raman-LIBS-mass detection are as follows:

[0053] Step 1: Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to scan;

[0054] Step 2: Before processing, use the split-pupil confocal axial monitoring module 1 to scan and measure the surface of ...

Embodiment 2

[0063] Such as figure 2 As shown, the split pupil detector 14 is composed of a spot enlargement objective lens 19, a detection CCD35, a detection area 37 and an image signal processor 38, wherein the detection area 37 is located at the center of the image plane of the detection CCD35; 1 When monitoring the axial position and axial size of the sample 9 during processing, the axial monitoring parallel beam 4 is reflected by the dichroic mirror A5 and transmitted by the dichroic mirror B6, and then focused onto the sample 9 by the objective lens 7, The reflected axial monitoring light beam 11 reflected by the sample 9 is converged on the detection CCD35 by the reflector 12, the detection objective lens 13, and the spot magnification objective lens 19, and the image signal processor 38 processes the signal of the detection area 37 on the image surface of the detection CCD35 , to obtain the split-pupil confocal signal of a point on the surface of sample 9.

[0064] All the other ...

Embodiment 3

[0066] Such as image 3 As shown, the laser space-time shaping module 16 is composed of a space shaper 39 and a time shaper 40, and adjusts the time domain and space domain parameters of the light beam emitted by the femtosecond laser 15, so as to optimize the femtosecond laser processing performance.

[0067] All the other are identical with embodiment 1.

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Abstract

The invention relates to a light splitting pupil confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining and monitoring method and device, and belongs to the fields of a laser precision detection technology and a femtosecond laser machining and manufacturing technology. The light splitting pupil confocal Raman-LIBS-mass spectrum detection-based femtosecond laser machining andmonitoring method and device is used for online detection of femtosecond laser machining and online monitoring and physical property comprehensive parameters. A light splitting pupil confocal axial monitoring module and a femtosecond laser machining system are organically fused, and the axial position of a sample is subjected to high-precision in-situ online monitoring and sample axial machiningsize measurement by utilizing a light splitting pupil confocal system; and a Raman spectroscopy detection module, an LIBS detection module and a mass spectrometer are used for carrying out monitoringanalysis on information such as molecular structures, elements, ions and the like of a sample material after femtosecond laser machining, and the information is fused through a computer, so that the high-precision femtosecond laser machining of a micro-structure and the in-situ monitoring analysis of the morphology performance of a micro-region are integrated, and the controllability of the femtosecond laser machining precision of the micro-structure and the machining quality of the sample are improved.

Description

technical field [0001] The invention belongs to the field of laser precision detection technology and femtosecond laser processing monitoring technology, and relates to a femtosecond laser processing monitoring method and device for split-pupil confocal Raman-LIBS-mass spectrum detection, which can be used for femtosecond laser processing and morphological properties of complex microstructures In-situ online detection of comprehensive parameters. Background technique [0002] Femtosecond laser processing is regarded as a century-old technology that "may cause a new industrial revolution" due to its remarkable advantages such as wide material adaptability, high processing precision, and no mask required, and is regarded as a macro-micro-spanning technology. The preferred method of scale micro-nano manufacturing has been given priority in the development of China, the United States and other major manufacturing countries in the world. [0003] Femtosecond laser processing is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/64G01N21/71G01N21/65G01N21/01
CPCG01N27/64G01N21/01G01N21/65G01N21/71G01N21/718
Inventor 邱丽荣王允赵维谦
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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