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Femtosecond laser machining and monitoring method based on back light splitting pupil differential confocal Raman-LIBS-mass spectroscopy detection

A femtosecond laser processing and differential confocal technology, which is applied to the analysis of materials, measurement devices, thermal excitation analysis, etc., can solve the problems of easy axial drift of samples and in-situ detection of complex morphological and performance parameters of samples, etc. High-precision real-time fixed focus problem, improved axial position monitoring ability and axial size detection ability, and the effect of solving drift problems

Inactive Publication Date: 2019-01-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The purpose of the present invention is to solve the problems of axial drift of samples in femtosecond laser processing and in-situ detection of complex morphological and performance parameters of samples after processing. The femtosecond laser processing monitoring method and device realize the high-spatial-resolution online monitoring of axial drift and inclination during sample processing and the nanoscale monitoring of the axial size of the sample structure, ensuring accurate real-time focus of the sample during processing. And realized the comprehensive detection of sample micro-region morphology structure and complex physical parameters after processing, which provided a technical basis for feedback correction, mechanism research and process improvement of femtosecond laser processing, and improved the controllability and sample quality of laser processing precision. processing quality

Method used

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  • Femtosecond laser machining and monitoring method based on back light splitting pupil differential confocal Raman-LIBS-mass spectroscopy detection
  • Femtosecond laser machining and monitoring method based on back light splitting pupil differential confocal Raman-LIBS-mass spectroscopy detection
  • Femtosecond laser machining and monitoring method based on back light splitting pupil differential confocal Raman-LIBS-mass spectroscopy detection

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Experimental program
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Embodiment 1

[0052] like figure 1 , using the rear split pupil differential confocal axial monitoring module 1 to monitor the surface position of the sample 9 before processing and the axial position of the sample 9 during processing, the computer 33 monitors the two-dimensional scanner 18, the precision workbench 10, The axial scanner 8 performs feedback control to realize the three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9;

[0053] The split-pupil differential detector 14 is composed of a spot magnifying objective lens 19 and a two-quadrant detector 20 . The implementation steps of the femtosecond laser processing monitoring method with post-divided pupil differential confocal Raman-LIBS-mass spectrometry detection are as follows:

[0054] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perform scanning motion;

[0055] 2) Before processing, use the rear split pupil different...

Embodiment 2

[0064] like figure 2As shown, the sub-pupil differential detector 14 is composed of a spot magnifying objective lens 19, a detection CCD35, a first detection area 37 and a second detection area 38, wherein the first detection area 37 and the second detection area 38 are located on the image plane of the detection CCD35 above, and symmetrical about the optical axis; when the axial position and axial size of the sample 9 during processing are monitored by the rear split pupil differential confocal axial monitoring module 1, the axial monitoring parallel beam 4 passes through the dichroic After being reflected by mirror A5 and transmitted by dichroic mirror B6, the objective lens 7 is focused onto the sample 9, and the reflected axial monitoring beam reflected by the sample 9 is reflected by the beam splitter 12, and passes through the rear pupil 11, the detection objective lens 13, and the light spot After the objective lens 19 is enlarged, it converges on the detection CCD 35 ...

Embodiment 3

[0067] like image 3 As shown, the laser space-time shaping module 16 is composed of a space shaper 39 and a time shaper 40, and adjusts the time domain and space domain parameters of the light beam emitted by the femtosecond laser 15, so as to optimize the femtosecond laser processing performance.

[0068] All the other are identical with embodiment 1.

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Abstract

The invention relates to a femtosecond laser machining and monitoring method based on back light splitting pupil differential confocal Raman-LIBS-mass spectroscopy detection, and belongs to the fieldsof a laser precision detection technology and a femtosecond laser machining and monitoring technology. The method can be used for femtosecond laser machining and online monitoring, and online detection of physical property comprehensive parameters. A back light splitting pupil laser differential confocal axial monitoring module and a femtosecond laser machining system are organically fused, and the axial position of a sample is subjected to high-precision in-situ monitoring and sample axial machining size measurement by utilizing a back light splitting pupil differential confocal system; anda Raman spectroscopy detection module, an LIBS spectroscopy detection module and a mass spectrograph are used for carrying out monitoring analysis on information such as molecular structures, elements, ions and the like of a sample material after femtosecond laser machining, and the information is fused through a computer, so that the high-precision femtosecond laser machining of a micro-structureand the in-situ monitoring analysis of the morphology performance of a micro-region are integrated, and the controllability of the femtosecond laser machining precision of the micro-structure, the machining quality of the sample and the like are improved.

Description

technical field [0001] The invention relates to a femtosecond laser processing and monitoring method for post-divided pupil differential confocal Raman-LIBS-mass spectrometry detection, in particular to an integrated femtosecond laser processing and monitoring method for post-divided pupil differential confocal Raman-LIBS-mass spectrometry detection The invention and device belong to the field of laser precision detection technology and femtosecond laser processing monitoring technology, and can be used for in-situ online detection of complex microstructure femtosecond laser processing and comprehensive parameters of shape and performance. Background technique [0002] Femtosecond laser processing is regarded as a century-old technology that "may cause a new industrial revolution" due to its remarkable advantages such as wide material adaptability, high processing precision, and no mask required, and is regarded as a macro-micro-spanning technology. The preferred method of s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/64G01N21/71G01N21/65G01N21/01
CPCG01N27/64G01N21/01G01N21/65G01N21/71G01N21/718
Inventor 赵维谦王允邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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