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Femtosecond laser processing monitoring method of spectral pupil confocal Raman-LIBS spectrum detection

A technology of femtosecond laser processing and spectral detection, which is applied in the direction of measuring devices, analytical materials, thermal excitation analysis, etc., can solve the problems of in-situ detection of complex shape and performance parameters of samples, easy axial drift of samples, etc., and achieve high precision The effect of real-time fixed focus, improving the ability of axial position monitoring and axial size detection, and solving the problem of drift

Inactive Publication Date: 2019-01-11
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0010] The purpose of the present invention is to solve the problems of axial drift of samples in femtosecond laser processing and in-situ detection of complex shape and performance parameters of samples after processing, and propose a femtosecond laser processing monitoring method for split-pupil confocal Raman-LIBS spectral detection With the device, the online monitoring of axial drift and inclination during sample processing and nanoscale monitoring of the axial size of the sample structure are realized, which ensures accurate real-time focusing of the sample during processing, and realizes the micro-area of ​​the sample after processing. The comprehensive detection of morphology structure and complex physical parameters provides a technical basis for feedback correction, mechanism research and process improvement of femtosecond laser processing, and improves the controllability of laser processing accuracy and the processing quality of samples

Method used

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  • Femtosecond laser processing monitoring method of spectral pupil confocal Raman-LIBS spectrum detection
  • Femtosecond laser processing monitoring method of spectral pupil confocal Raman-LIBS spectrum detection
  • Femtosecond laser processing monitoring method of spectral pupil confocal Raman-LIBS spectrum detection

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Embodiment 1

[0051] Such as figure 1 , using the split-pupil confocal axial monitoring module 1 to monitor the surface position of the sample 9 before processing and the axial position of the sample 9 during processing, the computer 33 monitors the two-dimensional scanner 18, the precision table 10, and the axial scanner 8 performs feedback control to realize three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9;

[0052] The split-pupil detector 14 is composed of a spot magnifying objective lens 19 and a two-quadrant detector 20 . The implementation steps of the femtosecond laser processing monitoring method for split-pupil confocal Raman-LIBS spectral detection are as follows:

[0053] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perform scanning motion;

[0054] 2) Before processing, use the split-pupil confocal axial monitoring module 1 to scan and measure the surface of the sa...

Embodiment 2

[0063] Such as figure 2 As shown, the split pupil detector 14 is composed of a spot enlargement objective lens 19, a detection CCD33, a detection area 35 and an image signal processor 36, wherein the detection area 35 is located at the center of the image plane of the detection CCD33; using the split pupil confocal axial monitoring module 1 When monitoring the axial position and axial size of the sample 9 during processing, the axial monitoring parallel beam 4 is reflected by the dichroic mirror A5 and transmitted by the dichroic mirror B6, and then focused onto the sample 9 by the objective lens 7, The reflected axial monitoring light beam 11 reflected by the sample 9 is converged on the detection CCD33 by the reflector 12, the detection objective lens 13, and the spot magnification objective lens 19, and the image signal processor 36 processes the signal of the detection area 35 on the image surface of the detection CCD33 , to obtain the split-pupil confocal signal of a poi...

Embodiment 3

[0066] Such as image 3 As shown, the laser space-time shaping module 16 is composed of a space shaper 37 and a time shaper 38, and adjusts the time-domain and space-domain parameters of the light beam emitted by the femtosecond laser 15, so as to optimize the femtosecond laser processing performance.

[0067] All the other are identical with embodiment 1.

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Abstract

The invention relates to a femtosecond laser processing monitoring method of spectral pupil confocal Raman-LIBS (laser-induced breakdown spectroscopy) spectrum detection, and belongs to the technicalfields of the laser precise detection and the femtosecond laser processing monitoring. The femtosecond laser processing monitoring method can be used for femtosecond laser processing and online monitoring and physical comprehensive parameter online detection. A spectral pupil laser confocal coaxial monitoring module and a femtosecond laser processing system are organically integrated, a spectral pupil confocal system is used for performing high-precision in-situ online monitoring and sample axial processing size measurement on a sample axial location; a Raman spectrum detection module and an LIBS spectrum detection module are used for monitoring and analyzing a molecular structure, elements and ion and like information of a sample material after femtosecond laser processing, and integrating the above information through a computer, thereby realizing the microstructure femtosecond laser high-precision processing and microcell morphology performance in-situ monitoring analysis integration, and improving the controllability of the microstructure femtosecond laser processing precision and the processing quality of the sample.

Description

technical field [0001] The invention belongs to the field of laser precision detection technology and femtosecond laser processing monitoring technology, and relates to a femtosecond laser processing monitoring method and device for split-pupil confocal Raman-LIBS spectral detection, which can be used for femtosecond laser processing of complex microstructures and synthesis of morphological properties Parameter in-situ online detection. Background technique [0002] Femtosecond laser processing is regarded as a century-old technology that "may cause a new industrial revolution" due to its remarkable advantages such as wide material adaptability, high processing precision, and no mask required, and is regarded as a macro-micro-spanning technology. The preferred method of scale micro-nano manufacturing has been given priority in the development of China, the United States and other major manufacturing countries in the world. [0003] Femtosecond laser processing is to use the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65G01N21/71G01N21/01
CPCG01N21/71G01N21/01G01N21/65G01N21/718
Inventor 王允邱丽荣赵维谦
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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