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Multiple-cavity piezoelectric film driven pump

A film-driven, cavity-pressure technology, applied in pumps, machines/engines, pumps with flexible working elements, etc., can solve problems such as large output pulsation, reduced work reliability, unfavorable flow and precise control of pressure, etc., to reduce Effect of output pulsation and flow rate increase

Inactive Publication Date: 2003-02-26
常州威图流体科技有限公司
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AI Technical Summary

Problems solved by technology

At present, the development of piezoelectric film pumps is still in the stage of theoretical research and experimental exploration. The main factors hindering its application process are the low output capacity (pressure, flow) (compared with traditional pumps) and insufficient stability of performance. For occasions with low flow and pressure requirements, in order to obtain higher pressure and flow, the operating voltage must be increased at the expense of greatly reducing the reliability of its work; on the other hand, the optimal operating frequency of piezoelectric pumps is still low , the output pulsation is large, which is not conducive to the precise control of flow and pressure

Method used

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Embodiment Construction

[0017] The structure of the present invention will be further described in detail in the following embodiments given in conjunction with the accompanying drawings.

[0018] refer to figure 1 , the piezoelectric vibrator 4, 5 separates the inner cavity of the pump body 3 into closed cavities 6, 7 respectively, the fluid inlet of the cavity 6 communicates with the inlet channel 1 through the inlet valve 9, and the fluid outlet of the cavity 7 passes through the outlet The valve 11 communicates with the outlet channel 2, and the channel 8, which communicates with the cavity 6, communicates with the cavity 7 through the valve 10, and the valve 10 is not only the outlet valve of the cavity 6, but also the inlet valve of the cavity 7. This is the aforementioned Type A pump.

[0019] Its working principle is: the two ends of the piezoelectric vibrator respectively apply the AC voltage signal with a phase difference of 180°, which can ensure the pressure of the fluid to increase grad...

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Abstract

The multiple-cavity piezoelectric film driven pump is used in micro fluid conveyance and control. It consists of pump body with inlet and outlet passages, piezoelectric vibrator inside the pump cavity and inlet and outlet valves. It features at least two working cavities comprising piezoelectric vibrator and pump body connected serially or parallelly. Owing to that the pump has fluid outputting performance similar to that of several single-cavity piezoelectric pump connected serially or parallelly, the present invention has obviously raised output flow rate and pressure, and when in parallel connection, there is always output fluid in each work period and thus less output fluctuation.

Description

technical field [0001] The invention belongs to a pump used in the fields of microfluid transmission and control and microelectromechanical systems, and in particular relates to a multi-cavity piezoelectric film-driven pump. Background technique [0002] The piezoelectric film pump is another vibration energy conversion device after the piezoelectric ultrasonic motor. It directly acts on the vibration excited by the piezoelectric film on the fluid to form pressure or flow output. It has a working principle and characteristics completely different from all kinds of traditional pumps. structure. As an important branch of piezoelectric actuators, piezoelectric film pumps have a wide range of application prospects due to their simple structure, small size, fast response, no electromagnetic interference, and easy operation: in pharmaceutical, medical, trace reagent ratio or It can be applied in the field of precise control of pressure and flow, and its research and development h...

Claims

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Application Information

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IPC IPC(8): F04B43/04F04B45/047
Inventor 杨志刚阚君武程光明
Owner 常州威图流体科技有限公司
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