Multiple-cavity piezoelectric film driven pump
A film-driven, cavity-pressure technology, applied in pumps, machines/engines, pumps with flexible working elements, etc., can solve problems such as large output pulsation, reduced work reliability, unfavorable flow and precise control of pressure, etc., to reduce Effect of output pulsation and flow rate increase
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Publication Date
- 2004-12-08
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The invention belongs to a pump used in the fields of microfluid transmission and control and microelectromechanical systems, and in particular relates to a multi-cavity piezoelectric film-driven pump. Background technique
[0002] The piezoelectric film pump is another vibration energy conversion device after the piezoelectric ultrasonic motor. It directly acts on the vibration excited by the piezoelectric film on the fluid to form pressure or flow output. It has a working principle and characteristics completely different from all kinds of traditional pumps. structure. As an important branch of piezoelectric actuators, piezoelectric film pumps have a wide range of application prospects due to their simple structure, small size, fast response, no electromagnetic interference, and easy operation: in pharmaceutical, medical, trace reagent ratio or It can be applied in the field of precise control of pressure and flow, and its research and development h...
Examples
Embodiment Construction
[0017] The structure of the present invention will be further described in detail in the following embodiments given in conjunction with the accompanying drawings.
[0018] refer to figure 1 , the piezoelectric vibrator 4, 5 separates the inner cavity of the pump body 3 into closed cavities 6, 7 respectively, the fluid inlet of the cavity 6 communicates with the inlet channel 1 through the inlet valve 9, and the fluid outlet of the cavity 7 passes through the outlet The valve 11 communicates with the outlet channel 2, and the channel 8, which communicates with the cavity 6, communicates with the cavity 7 through the valve 10, and the valve 10 is not only the outlet valve of the cavity 6, but also the inlet valve of the cavity 7. This is the aforementioned Type A pump.
[0019] Its working principle is: the two ends of the piezoelectric vibrator respectively apply the AC voltage signal with a phase difference of 180°, which can ensure the pressure of the fluid to increase grad...