Self-sensing piezoelectric diaphragm pump

Abstract

The invention relates to a self-sensing piezoelectric diaphragm pump which at least comprises a compound sheet type piezoelectric vibrator, a pump body, a pump cover, one set of one-way valves of controlling the fluid moving direction, and a control power supply. The self-sensing piezoelectric diaphragm pump is characterized in that the compound sheet type piezoelectric vibrator is formed by sequentially adhering a PZT (Piezoelectric Transducer) piezoelectric wafer (used as a driver), a metal substrate and a PVDF (Polyvinylidene Fluoride) piezoelectric film (used as a sensor), wherein the piezoelectric driver and the piezoelectric sensor are respectively connected with a control power supply through leads, when the piezoelectric driver is bent for deformation under the action of an external voltage, the piezoelectric sensor is bent for deformation and generates electric energy, a voltage signal generated by the electric energy is properly converted and processed and then is used for characterizing output pressure and flow of the piezoelectric pump. The invention has the advantages that two functions of driving and sensing monitoring are realized by using the compound sheet type piezoelectric vibrator, and the output performance of the piezoelectric pump can be monitored in real time without other pressure and flow measurer apparatuses.

Description

technical field [0001] The invention belongs to a micro precision piezoelectric pump applied in the field of microfluid transmission and control, in particular to a self-sensing piezoelectric diaphragm pump. Background technique [0002] As an important branch of piezoelectric actuators, piezoelectric diaphragm pumps have many advantages such as simple structure, small size, fast response, no electromagnetic interference, easy operation, and good flow / pressure controllability. , fuel supply of automobile engines and fuel cells, and micro-electromechanical-hydraulic systems have broad application prospects, and their research and development have attracted extensive attention from scholars all over the world. In order to meet the application requirements in different fields, piezoelectric diaphragm pumps with various structural forms have been proposed. Although the structure and performance of the proposed piezoelectric diaphragm pumps are quite different, they all use the ...

AI Technical Summary

Problems solved by technology

Therefore, simply adjusting the driving voltage and frequency cannot obtain high output accuracy, and flow and pressure measuring instruments are still required in occasions that require high flow and pressure control, such as drug controlled release, chemical analysis, and fuel cells. Real-time monitoring, which not only increases the cost of use, but also increases the volume, weight and complexity of the system, which seriously hinders the popularization and application of piezoelectric diaphragm pumps in micro-electromechanical systems and portable products

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