Piezoelectric stack pump provided with sensor
A piezoelectric stack and sensor technology, applied to pumps with flexible working elements, pumps, pump control, etc., can solve the problems of poor output accuracy and controllability of piezoelectric stack pumps, complex system volume, etc., and achieve easy access , the effect of accurate output flow and pressure
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[0014] In the present invention, the piezoelectric stack 12 used for driving and the piezoelectric sensor 13 used for measurement are installed inside the pump body 11; The sheet 14 squeezes the piezoelectric sensor 13 and the piezoelectric stack 12 on the top block 10; the top block 10 is connected with the pump cavity diaphragm 7 and the piston 5 through the screw 9, and the pump cavity diaphragm 7 is connected with the pump body 11 through the screw 8 Connected with pump cover 1; inlet valve 2 and outlet valve 3 are installed on pump cover 1; piston 5 and sealing ring 6 installed on the piston, pump cover 1, inlet valve 2 and outlet valve 3 together constitute pump chamber 4 ; The piezoelectric sensor 13 and the piezoelectric stack 12 are respectively connected to the control power supply 16 through a wire group 18 and a wire group 2 17 .
[0015] Such as figure 1 As shown, after the control power supply 20 is turned on, the piezoelectric stack 12 is subjected to voltage (...
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