Piezoelectric stack pump provided with sensor

A piezoelectric stack and sensor technology, applied to pumps with flexible working elements, pumps, pump control, etc., can solve the problems of poor output accuracy and controllability of piezoelectric stack pumps, complex system volume, etc., and achieve easy access , the effect of accurate output flow and pressure

Inactive Publication Date: 2011-09-21
ZHEJIANG NORMAL UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The invention provides a piezoelectric stack pump with its own sensor to solve the problems of p

Method used

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  • Piezoelectric stack pump provided with sensor
  • Piezoelectric stack pump provided with sensor
  • Piezoelectric stack pump provided with sensor

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Embodiment Construction

[0014] In the present invention, the piezoelectric stack 12 used for driving and the piezoelectric sensor 13 used for measurement are installed inside the pump body 11; The sheet 14 squeezes the piezoelectric sensor 13 and the piezoelectric stack 12 on the top block 10; the top block 10 is connected with the pump cavity diaphragm 7 and the piston 5 through the screw 9, and the pump cavity diaphragm 7 is connected with the pump body 11 through the screw 8 Connected with pump cover 1; inlet valve 2 and outlet valve 3 are installed on pump cover 1; piston 5 and sealing ring 6 installed on the piston, pump cover 1, inlet valve 2 and outlet valve 3 together constitute pump chamber 4 ; The piezoelectric sensor 13 and the piezoelectric stack 12 are respectively connected to the control power supply 16 through a wire group 18 and a wire group 2 17 .

[0015] Such as figure 1 As shown, after the control power supply 20 is turned on, the piezoelectric stack 12 is subjected to voltage (...

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Abstract

The invention relates to a piezoelectric stack pump provided with a sensor, and belongs to the field of application of microfluid transmission and control. A piezoelectric stack used for driving and a piezoelectric sensor used for measuring are installed inside a pump body; one end of the pump body is provided with a tightening bolt; the piezoelectric sensor and the piezoelectric stack are pressed on an ejector block by the tightening bolt through an anti-twist baffle piece; the ejector block is connected with the diaphragm of a pump cavity and a piston through bolts; an inlet valve and an outlet valve are arranged on a pump cover; and the piezoelectric sensor and the piezoelectric stack are respectively connected with a control power supply through guide lines. In the piezoelectric stack pump, the built-in piezoelectric pressure sensor is used for detecting deformation information of the piezoelectric stack and transforming the deformation information into pump flow and pressure, the on-line monitoring on the output performance of the piezoelectric pump can be realized without other pressure/flow measurement instruments, and accurate output flow and pressure can be easily obtained.

Description

technical field [0001] The invention belongs to the field of micro-fluid transmission and control and uses a micro-small piezoelectric hydraulic pump, in particular to a precision piezoelectric stack pump with a sensor. Background technique [0002] Using the piezoelectric stack, also known as the expansion and contraction deformation of the stacked piezoelectric vibrator under the action of the electric field, people have proposed a stacked piezoelectric hydraulic pump with various structures, referred to as the piezoelectric stack pump, such as: Chinese patent 200810050240.7 , Chinese patent 200810064461.X and Chinese patent 200910146813.0, etc. Compared with traditional mechanical hydraulic pumps, piezoelectric stack pumps have many advantages such as simple structure, small size, no electromagnetic interference, and good flow / pressure controllability. Therefore, they are used in medical, chemical analysis, aerospace, automotive engine fuel Supply, micro-electro-hydrauli...

Claims

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Application Information

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IPC IPC(8): F04B43/04F04B49/06
Inventor 阚君武沈黄桥詹卓斌卓越程光明张忠华
Owner ZHEJIANG NORMAL UNIVERSITY
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