Resonance drive type piezoelectric pump

Abstract

The invention discloses a novel piezoelectric pump, wherein a piezoelectric vibrator 3 is used as a drive force source, and forms a resonance system together with a resonance amplification mechanism 4, a resonance transmission mechanism 5, a fluid drive mechanism 7, a driven fluid and the like. Under an external alternating voltage, the deformation of the piezoelectric vibrator 3 acts on the driven fluid after being amplified through the resonance of the system, therefore, the one-way transmission of the fluid is realized. The piezoelectric vibrator 3 can adopt a general dual-wafer bending vibrator structure or single-wafer bending vibrator structure (seen in a picture 2), and can also adopt a single-wafer vibrator, dual-wafer vibrator parallel-connection or serial-connection combined structure.

Description

technical field [0001] The invention belongs to the field of fluid delivery, and in particular relates to a resonance-driven piezoelectric fluid delivery device. Background technique [0002] Piezoelectric pumps are fluid delivery devices that use piezoelectric vibrators as the driving force source. They generally have the advantages of small size, low power consumption, low cost, no electromagnetic interference, and precise flow control. They are used in biomedicine, precision chemistry, micro-electromechanical Engineering and other collars have a wide range of applications. [0003] When the existing piezoelectric pump is transporting gas, because the piezoelectric vibrator is in a closed space, the heat generated by its own vibration is difficult to release, so the heat is serious, which in turn reduces the output efficiency and deteriorates the transport performance. It is not suitable for transporting gas; when transporting fluid with high viscosity, due to the large f...

AI Technical Summary

Problems solved by technology

[0003] When the existing piezoelectric pump transports gas, because the piezoelectric vibrator is in a closed space, the heat generated by its own vibration is difficult to release, so the heat is serious, which in turn reduces the output efficiency and deteriorates the transport performance, etc. It is not suitable for transporting gas; when transporting fluid with high viscosity, due to the large damping of fluid flow, when the piezoelectric vibrator vibrates, the response of the fluid is seriously lagged, and at the same time, the valve plate moves slowly in the liquid with high viscosity, and its response The frequency cannot keep up with the driving frequency, and it is difficult to obtain good output capability, so it is not suitable for the transportation of liquids with much higher viscosity than water.

Images