hemispherical resonator gyroscope

Abstract

The application provides a hemispherical resonator gyroscope, which comprises a hemispherical resonator, a driving electric substrate and a detection electric substrate, the hemispherical resonator is of a hemispherical structure, the driving electric substrate is of a flat plate structure, and the detection electric substrate is of an inner spherical surface structure. The inner surface of the hemispherical resonator is provided with a first conductive film layer, the lip end surface is provided with a second conductive film layer, the detection electric substrate is provided with a detection electrode, and the driving electric substrate is provided with a potential electrode and a driving electrode. The detection electrode and the first conductive film layer form a detection capacitor, and the driving electrode and the second conductive film layer form a driving capacitor. The detection electrode and the driving electrode are separately arranged, so that the coupling of the driving signal and the detection signal can be reduced. The detection electric substrate is of an inner spherical surface structure, so that the area of the detection capacitor formed by the detection electrode and the first conductive film layer can be increased, and the strength of the detection signal can be improved. The driving electric substrate is of a flat plate structure, and the potential electrode and the driving electrode are arranged on the driving electric substrate, so that the processing and assembly difficulty can be reduced.

Description

Technical Field

[0001] The present application relates to the technical field of gyroscopes, and in particular to a hemispherical resonant gyroscope. Background Art

[0002] A hemispherical resonant gyroscope is a vibrating gyroscope that uses the circumferential precession of the vibration standing wave of a hemispherical resonant structure to measure the rotation of the housing. It has the advantages of few components, low power consumption, small size, low cost, and long life.

[0003] In operation, a HRG requires applying a drive signal through an excitation electrode and acquiring a vibration signal through a detection electrode. Related technologies for HRGs suffer from coupling between the drive and detection signals, and the detection signal strength is low, reducing the HRG's signal-to-noise ratio and the gyroscope's detection accuracy. Summary of the Invention

[0004] The present application provides a hemispherical resonant gyroscope to solve at least some of the problems in the related art.

[0005] The hemispherical resonant gyroscope provided in this application includes:

[0006] A hemispherical resonator having a hemispherical structure, comprising an inner surface, an outer surface, and a lip end surface connected between the inner and outer surfaces, wherein the inner surface is provided with a first conductive film layer, and the lip end surface is provided with a second conductive film layer;

[0007] The driving mechanism includes a driving electrical substrate having a flat plate structure and is located on a side of the hemispherical resonator close to the lip end surface. A potential electrode and a driving electrode are provided on a side of the driving electrical substrate facing the hemispherical resonator. The potential electrode is electrically connected to both the first conductive film layer and the second conductive film layer. The driving electrode and the second conductive film layer form a driving capacitor for driving the hemispherical resonator to vibrate.

[0008] The detection mechanism includes a detection electric substrate, which is located in the hemispherical resonator and is arranged close to the driving electric substrate. The detection electric substrate is an inner spherical structure. The detection electric substrate is provided with a detection electrode. The detection electrode and the first conductive film layer form a detection capacitor for detecting the vibration of the hemispherical resonator.

[0009] Optionally, the driving electrical substrate is provided with a connecting electrode, the connecting electrode is electrically connected to the detection electrode, and the potential electrode, the connecting electrode and the driving electrode are respectively connected to the other side of the driving electrical substrate through conductive vias.

[0010] Optionally, the hemispherical resonator comprises a hemispherical shell and a support column arranged in the hemispherical shell, the hemispherical shell comprises the inner surface, the outer surface and the lip end surface, the inner surface is provided with the first conductive film layer, the outer surface of the support column is provided with a third conductive film layer, the first conductive film layer, the second conductive film layer and the third conductive film layer are electrically connected;

[0011] The position of the support column and the position of the potential electrode are correspondingly arranged, the third conductive film layer and the potential electrode are connected, and the same potential is provided for the first conductive film layer and the second conductive film layer.

[0012] Optionally, the detection electric substrate is provided with a through hole, the position of the through hole and the position of the support column are correspondingly arranged, and the support column is inserted and fixed in the through hole; and / or

[0013] The outer wall of the hemispherical shell near the lip end surface is provided with a fourth conductive film layer, and the fourth conductive film layer and the second conductive film layer are electrically connected.

[0014] Optionally, the potential electrode is a high-voltage electrode; and / or

[0015] The materials of the hemispherical resonator, the driving electric substrate and the detection electric substrate are the same; and / or

[0016] The hemispherical resonator, the driving electric substrate and the detection electric substrate all adopt fused quartz material;

[0017] Optionally, the number of the driving electrodes is 8n, the number of the detection electrodes is 8n, and the number of the connecting electrodes is 8n, and the number of the driving electrodes, the number of the detection electrodes and the number of the connecting electrodes are the same.

[0018] A plurality of the driving electrodes are circumferentially distributed on the side of the driving electric substrate facing the hemispherical resonator, a plurality of the detection electrodes are circumferentially distributed on the side edge of the detection electric substrate facing the inner wall of the hemispherical resonator, and a plurality of the connecting electrodes are circumferentially distributed on the side of the driving electric substrate facing the hemispherical resonator.

[0019] Optionally, the potential electrode is located at the center of the side of the driving electric substrate facing the hemispherical resonator, and the connecting electrode is located between the potential electrode and the driving electrode.

[0020] Optionally, a first shielding electrode is provided between the multiple driving electrodes, a second shielding electrode is provided between the multiple connecting electrodes, a third shielding electrode is provided between the driving electrode and the connecting electrode, and the first shielding electrode and the second shielding electrode are electrically connected through the third shielding electrode; a fourth shielding electrode is provided between the multiple detection electrodes; the second shielding electrode and the fourth shielding electrode are electrically connected; the first shielding electrode and the second shielding electrode are respectively connected to the side of the driving electrical substrate away from the hemispherical resonator through conductive vias.

[0021] Optionally, the detection electrode includes a first detection electrode and a second detection electrode, the first detection electrode is located on the outer wall of the detection electrical substrate, and forms a detection capacitor with the first conductive film layer; the second detection electrode is located on the side of the detection electrical substrate facing the driving electrical substrate, and the second detection electrode is electrically connected to the first detection electrode and the connecting electrode.

[0022] Optionally, a side of the detection electric substrate facing the driving electric substrate is provided with an annular step, and the annular step extends from a side of the driving electric substrate close to the hemispherical resonator to a side away from the hemispherical resonator;

[0023] The detection electrode further includes a third detection electrode, which is disposed on the surface of the annular step and is electrically connected to both the first detection electrode and the second detection electrode.

[0024] The hemispherical resonator gyroscope provided in this application includes a hemispherical resonator, a driving mechanism, and a detection mechanism. The driving mechanism includes a driving electrical substrate, and the detection mechanism includes a detection electrical substrate. The hemispherical resonator has a hemispherical structure, the driving electrical substrate has a flat structure, and the detection electrical substrate has an inner spherical structure. A first conductive film layer is provided on the inner surface of the hemispherical resonator, and a second conductive film layer is provided on the lip end surface. The detection electrical substrate is provided with a detection electrode, and the driving electrical substrate is provided with a potential electrode and a drive electrode. The detection electrode and the first conductive film layer form a detection capacitor. The drive electrode and the second conductive film layer form a drive capacitor.

[0025] Compared to related devices, by providing drive electrodes on the drive electrical substrate and detection electrodes on the detection electrical substrate, the detection electrodes and drive electrodes can be separated, thereby reducing the coupling between the drive signal and the detection signal. By making the detection electrical substrate an inner spherical structure and forming a detection capacitor with the detection electrode and the first conductive film layer provided on the inner surface of the hemispherical resonator, the area of ​​the detection capacitor can be increased, the strength of the detection signal can be enhanced, and the signal-to-noise ratio of the hemispherical resonator gyroscope can be improved. By making the drive electrical substrate a flat plate structure and providing potential electrodes and drive electrodes on the drive electrical substrate, the difficulty of processing and assembly can be reduced compared to providing three-dimensional electrodes, thereby reducing the assembly defect rate and improving the quality of the hemispherical resonator. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0027] Figure 1 The figure is a schematic structural diagram of a hemispherical resonant gyroscope in the related art.

[0028] Figure 2 Schematic diagram of the structure of another hemispherical resonant gyroscope in the related art.

[0029] Figure 3 Schematic diagram of the structure of another hemispherical resonant gyroscope in related technology.

[0030] Figure 4 A three-dimensional schematic diagram of a hemispherical resonant gyroscope provided in accordance with an embodiment of the present application.

[0031] Figure 5 for Figure 4 Exploded diagram of a hemispherical resonant gyroscope shown.

[0032] Figure 6 for Figure 4 The cross-sectional view of the hemispherical resonator gyroscope along the AA direction is shown.

[0033] Figure 7 for Figure 4 FIG. 1 is a structural diagram of an embodiment of a driving mechanism in a hemispherical resonant gyroscope.

[0034] Figure 8 for Figure 4 The structure diagram of an implementation scheme of a detection mechanism in a hemispherical resonant gyroscope is shown.

[0035] Figure 9 for Figure 4 FIG. 1 is a schematic structural diagram of another embodiment of a driving mechanism in a hemispherical resonant gyroscope.

[0036] Figure 10 for Figure 4 Schematic diagram of the structure of the conductive hole in the driving mechanism of the hemispherical resonator gyroscope shown.

[0037] Figure 11 for Figure 4 FIG. 1 is a schematic structural diagram of another embodiment of a detection mechanism in a hemispherical resonant gyroscope.

[0038] Figure 1: Hemispherical resonator gyroscope 1, hemispherical resonator 10, inner surface 11, first conductive film layer 101, outer surface 12, lip end surface 13, second conductive film layer 102, hemispherical shell 14, support column 15, third conductive film layer 103, fourth conductive film layer 104, driving mechanism 20, driving electrical substrate 21, potential electrode 22, driving electrode 23, connecting electrode 24, conductive hole 25, first conductive hole 251, second conductive hole 252, third conductive hole 253, fourth conductive hole 254, fifth conductive hole 255, first shielding electrode 26, second shielding electrode 27, fourth shielding electrode 28, detection mechanism 30, detection electrical substrate 31, detection electrode 32, through hole 33, fourth shielding electrode 34, first detection electrode 321, second detection electrode 322, annular step 35, third detection electrode 323. DETAILED DESCRIPTION

[0039] The present application provides a hemispherical resonant gyroscope. The hemispherical resonant gyroscope of the present application is described in detail below with reference to the accompanying drawings. The features of the following embodiments and implementations may be combined with each other unless they conflict.

[0040] The present invention provides a hemispherical resonant gyroscope, comprising:

[0041] The hemispherical resonator is a hemispherical structure, comprising an inner surface, an outer surface and a lip end surface connected between the inner and outer surfaces. The inner surface is provided with a first conductive film layer, and the lip end surface is provided with a second conductive film layer.

[0042] The driving mechanism includes a driving electric substrate, which is a flat-plate structure and is located on the side of the hemispherical resonator close to the lip end face. The driving electric substrate is provided with a potential electrode and a driving electrode on the side facing the hemispherical resonator. The potential electrode is electrically connected to the first conductive film layer and the second conductive film layer. The driving electrode and the second conductive film layer form a driving capacitor for driving the hemispherical resonator to vibrate.

[0043] The detection mechanism includes a detection electric substrate, which is located in the hemispherical resonator and is arranged close to the driving electric substrate. The detection electric substrate is an inner spherical structure. The detection electric substrate is provided with a detection electrode. The detection electrode and the first conductive film layer form a detection capacitor for detecting the vibration of the hemispherical resonator.

[0044] The hemispherical resonator gyroscope provided in this application includes a hemispherical resonator, a driving mechanism, and a detection mechanism. The driving mechanism includes a driving electrical substrate, and the detection mechanism includes a detection electrical substrate. The hemispherical resonator has a hemispherical structure, the driving electrical substrate has a flat structure, and the detection electrical substrate has an inner spherical structure. A first conductive film layer is provided on the inner surface of the hemispherical resonator, and a second conductive film layer is provided on the lip end surface. The detection electrical substrate is provided with a detection electrode, and the driving electrical substrate is provided with a potential electrode and a drive electrode. The detection electrode and the first conductive film layer form a detection capacitor. The drive electrode and the second conductive film layer form a drive capacitor.

[0045] Compared to related devices, by providing drive electrodes on the drive electrical substrate and detection electrodes on the detection electrical substrate, the detection electrodes and drive electrodes can be separated, thereby reducing the coupling between the drive signal and the detection signal. By making the detection electrical substrate an inner spherical structure and forming a detection capacitor with the detection electrode and the first conductive film layer provided on the inner surface of the hemispherical resonator, the area of ​​the detection capacitor can be increased, the strength of the detection signal can be enhanced, and the signal-to-noise ratio of the hemispherical resonator gyroscope can be improved. By making the drive electrical substrate a flat plate structure and providing potential electrodes and drive electrodes on the drive electrical substrate, the difficulty of processing and assembly can be reduced compared to providing three-dimensional electrodes, thereby reducing the assembly defect rate and improving the quality of the hemispherical resonator.

[0046] Please refer to Figures 1-3 , Figure 1 The figure is a schematic structural diagram of a hemispherical resonant gyroscope in the related art. Figure 2 Schematic diagram of the structure of another hemispherical resonant gyroscope in the related art. Figure 3 Schematic diagram of the structure of another hemispherical resonant gyroscope in related technology.

[0047] exist Figure 1 In the related art shown, the hemispherical resonator gyroscope includes three parts: a hemispherical resonator A1, an excitation cover A2, and a sensitive base A3. The hemispherical resonator A1 is a hemispherical thin shell with a central support rod, including a hemispherical structure A1-2 and a support rod A1-1.

[0048] The excitation shield A2 primarily consists of excitation electrodes, including discrete excitation electrodes A2-1 and annular excitation electrodes A2-2. Discrete excitation electrodes A2-1 are used to excite the resonator and perform error correction, while annular electrodes A2-2 are used for parameter excitation. The operating gap between the hemispherical resonator A1 and the excitation shield A2 is typically several hundred microns.

[0049] Sensitive base A3 consists of eight spherical signal-detecting electrodes A3-1, which detect the vibration signal from the hemispherical resonator and, through demodulation, obtain the rotation angle signal and the error signal required for control. The operating gap between the hemispherical resonator A1 and sensitive base A3 is typically several hundred microns.

[0050] A nested arrangement of multiple electrodes—discrete excitation electrodes A2-1, annular excitation electrodes A2-2, and signal detection electrodes A3-1—allows independent operation of electrodes with different functions. This mechanically isolates the drive and detection signals, reducing coupling between them. However, this approach requires extremely high assembly precision, particularly coaxiality, and involves complex assembly lines, which presents challenges for production and assembly.

[0051] exist Figure 2 In the related art shown, the main components of the hemispherical resonator gyroscope are reduced to two: the hemispherical resonator B1 and the electrode base B2. Electrode base B1 retains only the inner spherical electrode B2-1. These eight inner spherical electrodes, combined with a circuit design, implement the electrical functions of drive, detection, and error correction.

[0052] Figure 2 In the related art shown, a single three-dimensional electrode, that is, a spherical electrode solution, is used, which is difficult to assemble. Figure 1 The hemispherical resonant gyroscope shown in the figure has been reduced, but because the number of electrodes is reduced, the same electrode needs to realize multiple functions of driving and detecting at the same time, which inevitably reduces the number of driving and detecting electrodes, reducing the gyroscope signal-to-noise ratio.

[0053] Since the driving and detection electrodes are directly adjacent to each other, electrical signal coupling is easily caused between the electrodes. It is also necessary to avoid the coupling of the driving signal and the detection signal through electrode frequency division multiplexing (the output signal of the detection electrode is the resonant frequency, and the excitation signal of the driving electrode is the frequency multiplication and division signal of the resonant frequency) or time division multiplexing (the same electrode acts as a driving electrode or a detection electrode at different working times).

[0054] exist Figure 3 In the related art shown, the hemispherical resonator gyroscope mainly consists of two parts: a hemispherical resonator C1 and an electrode base C2. The electrode base C2 is in the form of a planar electrode, on which the electrode C2-1 is mounted. This simplified structure significantly reduces manufacturing and assembly costs. However, the problem of easy coupling between the drive and detection signals still exists. In addition, the effective area of ​​the capacitor in this solution is significantly reduced by the thickness of the hemispherical resonator wall, which greatly reduces the strength of the detection signal and is very detrimental to improving the gyroscope's signal-to-noise ratio.

[0055] In order to solve the problems of high assembly difficulty, coupling of drive signal and detection signal, and low detection signal strength existing in the related art hemispherical resonant gyroscope, the present application provides a hemispherical resonant gyroscope, which solves the electrical signal coupling problem existing in the current hemispherical resonant gyroscope without increasing the difficulty of assembly and circuit design; at the same time, it improves the gyroscope detection signal strength and optimizes the gyroscope signal-to-noise ratio.

[0056] This application embodiment provides a hemispherical resonant gyroscope, please refer to Figures 4-6 , Figure 4 A three-dimensional schematic diagram of a hemispherical resonant gyroscope provided in accordance with an embodiment of the present application. Figure 5 for Figure 4 Exploded diagram of a hemispherical resonant gyroscope shown. Figure 6 for Figure 4 The cross-sectional view of the hemispherical resonator gyroscope along the AA direction is shown.

[0057] like Figures 4-6 As shown, the present application provides a hemispherical resonator gyroscope 1 including a hemispherical resonator 10, a driving mechanism 20, and a detecting mechanism 30. The hemispherical resonator 10 is a hemispherical structure, including an inner surface 11, an outer surface 12, and a lip end surface 13 connected between the inner and outer surfaces 12. The inner surface 11 is provided with a first conductive film layer 101, and the lip end surface 13 is provided with a second conductive film layer 102.

[0058] Specifically, the hemispherical resonator 10 is a hemispherical thin shell structure with a certain wall thickness. Common processing materials include high-purity, non-magnetic, low-expansion coefficient metals and alloys, such as beryllium bronze alloys, and fused quartz. Among them, fused quartz is more commonly used in the processing of high-precision hemispherical resonator gyroscopes due to its low expansion coefficient and internal friction coefficient. This hemispherical structure not only has a high degree of symmetry, but also enables the resonator to produce a stable resonant frequency during operation.

[0059] When the hemispherical resonator 10 is subjected to external excitation, such as an electrical signal or mechanical vibration, it will begin to vibrate at its natural resonant frequency. The vibration is usually manifested as a small deformation of the hemispherical shell, which can be monitored and measured by precision sensors.

[0060] In this embodiment, the hemispherical resonator 10 is made of fused quartz. Fused quartz has an extremely high quality factor and excellent vibration stability and frequency response characteristics. In addition, the thermal expansion coefficient of fused quartz is very low, which enables it to maintain a stable size and shape when the temperature changes. The excellent thermal stability and extremely high quality factor of fused quartz enable the hemispherical resonator 10 to maintain high precision and stability in various environments. Fused quartz is a brittle and hard material. Although the processing difficulty is relatively high, the desired shape and size can be achieved through precise processing technology. At the same time, its surface is easy to metallize, providing a basis for electrostatic excitation and capacitance detection of vibration.

[0061] The driving mechanism 20 includes a driving electrical substrate 21. The driving electrical substrate 21 is a flat-plate structure and is located on the side of the hemispherical resonator 10 close to the lip end face 13. The driving electrical substrate 21 is provided with a potential electrode 22 and a driving electrode 23 on the side facing the hemispherical resonator 10. The potential electrode 22 is electrically connected to both the first conductive film layer 101 and the second conductive film layer 102. The driving electrode 23 and the second conductive film layer 102 form a driving capacitor for driving the hemispherical resonator 10 to vibrate.

[0062] By providing a potential electrode 22 on the side of the driving electrical substrate 21 facing the hemispherical resonator 10, and by electrically connecting the potential electrode 22 to both the first conductive film layer 101 and the second conductive film layer 102, the same potential can be provided to the first conductive film layer 101 and the second conductive film layer 102. By providing a driving electrode 23 on the side of the driving electrical substrate 21 facing the hemispherical resonator 10, the driving electrode 23 and the second conductive film layer 102 form a driving capacitor. When a driving signal is applied to the driving electrode 23, the hemispherical resonator 10 can be driven to vibrate.

[0063] The detection mechanism 30 includes a detection electrical substrate 31. The detection electrical substrate 31 is located inside the hemispherical resonator 10 and is arranged close to the driving electrical substrate 21. The detection electrical substrate 31 is an inner spherical structure. The detection electrical substrate 31 is provided with a detection electrode 32. The detection electrode 32 and the first conductive film layer 101 form a detection capacitor for detecting the vibration of the hemispherical resonator 10.

[0064] Specifically, the detection electrode 32 is arranged corresponding to the first conductive film layer 101, but they do not contact each other and have a certain distance between them, forming a capacitor structure. When the hemispherical resonator 10 is externally excited and begins to vibrate, its surface will undergo slight deformation. This deformation will cause the distance between the plates of the detection electrode 32 and the first conductive film layer 101 to change. Since the size of the capacitor is inversely proportional to the distance between the plates, this change in distance will cause the capacitance value of the detection capacitor to change. By measuring the capacitance value of the detection capacitor and converting it into an electrical signal output, and processing and analyzing this electrical signal, the vibration signal of the hemispherical resonator 10, such as the vibration waveform and frequency parameters of the hemispherical resonator 10, can be obtained.

[0065] The hemispherical resonator gyroscope 1 provided in the embodiment of the present application has a drive electrode 23 provided on the drive electrical substrate 21 and a detection electrode 32 provided on the detection electrical substrate 31, so that the detection electrode 32 and the drive electrode 23 can be separated. This can reduce the coupling between the drive signal and the detection signal. By making the detection electrical substrate 31 an inner spherical structure and forming a detection capacitor with the detection electrode 32 and the first conductive film layer 101 provided on the inner surface 11 of the hemispherical resonator 10, the area of ​​the detection capacitor can be increased, the strength of the detection signal can be enhanced, and the signal-to-noise ratio of the hemispherical resonator gyroscope 1 can be improved. By making the drive electrical substrate 21 a flat plate structure and providing the potential electrode 22 and the drive electrode 23 on the drive electrical substrate 21, the difficulty of processing and assembly can be reduced compared to providing three-dimensional electrodes, thereby reducing the assembly defect rate and improving the quality of the hemispherical resonator 10.

[0066] Please continue to refer to Figure 6 In the hemispherical resonant gyroscope 1 provided in the embodiment of the present application, a driving electrical substrate 21 is provided with a connecting electrode 24, the connecting electrode 24 is electrically connected to the detection electrode 32, and the potential electrode 22, the connecting electrode 24 and the driving electrode 23 are respectively connected to the other side of the driving electrical substrate 21 through conductive vias.

[0067] The connection electrode 24, potential electrode 22, and drive electrode 23 are connected to the other side of the drive electrical substrate 21 via conductive vias. Specifically, the drive electrical substrate 21 is provided with conductive vias 25 corresponding to the connection electrode 24, potential electrode 22, and drive electrode 23. The conductive vias 25 include a first conductive via 251, a second conductive via 252, and a third conductive via 253. The conductive vias 25 penetrate the drive electrical substrate 21, and the inner walls of the conductive vias 25 are provided with a conductive film. Electrodes connected to the connection electrode 24, potential electrode 22, and drive electrode 23 are provided on the other side of the drive electrical substrate 21, and connections to the connection electrode 24, potential electrode 22, and drive electrode 23 are achieved through the conductive vias 25.

[0068] By providing a connecting electrode 24 on the driving electrical substrate 21 and electrically connecting the connecting electrode 24 to the detection electrode 32, the capacitive signal on the detection electrode 32 within the hemispherical resonator gyroscope 1 can be transmitted to the connecting electrode 24. The connecting electrode 24 is located on the side of the driving electrical substrate 21 facing the hemispherical resonator 10. The connecting electrode 24 is connected to the other side of the driving electrical substrate 21 through a conductive via 252. This facilitates electrical connection between the connecting electrode 24 and a detection circuit external to the hemispherical resonator gyroscope 1. The detection circuit external to the hemispherical resonator gyroscope 1 processes the capacitive signal on the detection electrode 32 to obtain vibration information of the hemispherical resonator 10.

[0069] The potential electrode 22 and the driving electrode 23 are also located on the side of the driving electrical substrate 21 facing the hemispherical resonator 10. The potential electrode 22 is connected to the other side of the driving electrical substrate 21 through the first conductive hole 251 by way of conductive vias. This facilitates applying a potential to the potential electrode 22 on the other side of the driving electrical substrate 21, so that the potential electrode 22 provides the same potential to the first conductive film layer 101 and the second conductive film layer 102 through the third conductive film layer 103.

[0070] The driving electrodes 23 are connected to the other side of the driving electrical substrate 21 through the third conductive holes 253 by means of conductive vias, so that a driving signal is applied to the driving electrodes 23 on the other side of the driving electrical substrate 21, so that the driving electrodes 23 drive the hemispherical resonator 10 to vibrate.

[0071] like Figure 6 As shown, the hemispherical resonator 10 includes a hemispherical shell 14 and a support column 15 disposed within the hemispherical shell 14. The hemispherical shell 14 includes an inner surface 11, an outer surface 12, and a lip end surface 13. The inner surface 11 is provided with a first conductive film layer 101, and the outer surface 12 of the support column 15 is provided with a third conductive film layer 103. The first conductive film layer 101, the second conductive film layer 102, and the third conductive film layer 103 are electrically connected. The position of the support column 15 corresponds to the position of the potential electrode 22. The third conductive film layer 103 is connected to the potential electrode 22 to provide the same potential to the first conductive film layer 101 and the second conductive film layer 102. The potential electrode 22 is electrically connected to the first conductive film layer 101 and the second conductive film layer 102 through the third conductive film layer 103 disposed on the surface of the support column 15.

[0072] The diameter of the hemispherical resonator 10 is 8-30 mm, and in some embodiments, can be 10 mm or 20 mm. The wall thickness can be 0.4-1 mm, and the outer diameter of the support column 15 can be 2-5 mm. The first conductive film layer 101, the second conductive film layer 102, and the third conductive film layer 103 can be made of chromium, platinum, or gold.

[0073] The support column 15 can be provided to securely support the hemispherical housing 14, ensuring that the lip end surface 13 of the hemispherical housing 14 is a certain distance away from the driving electrical substrate 21, thereby preventing the hemispherical housing 14 from being directly placed on the driving electrical substrate 21. This creates a certain distance between the second conductive film layer 102 located on the lip end surface 13 and the drive electrode 23 bracket located on the driving electrical substrate 21, thereby forming a driving capacitor. In this embodiment, the support column 15 is located at the center of the hemispherical housing 14, effectively supporting the hemispherical housing 14 and ensuring the symmetry of the hemispherical resonator 10. The position of the support column 15 corresponds to the position of the potential electrode 22, which is located at the center of the side of the driving electrical substrate 21 facing the hemispherical resonator 10.

[0074] The detection electric substrate 31 is provided with a through hole 33, the position of the through hole 33 is corresponding to the position of the support column 15, and the support column 15 is inserted and fixed in the through hole 33. Specifically, the support column 15 and the through hole 33 are fixed by welding a conductive sheet or bonding with a conductive adhesive.

[0075] Support post 15 is inserted and fixed in through-hole 33. This not only connects the hemispherical resonator 10 located on one side of the detection electrical substrate 31 with the driving electrical substrate 21 located on the other side of the detection electrical substrate 31, but also secures the detection electrical substrate 31, ensuring a certain distance between the detection electrical substrate 31 and the first conductive film layer 101, thereby forming a detection capacitor. In this embodiment, support post 15 is located at the center of the hemispherical housing 14, and through-hole 33 is located at the center of the detection electrical substrate 31.

[0076] In some embodiments, the potential electrode 22 is a high-voltage electrode, which can provide a high-voltage potential to the first conductive film layer 101 and the second conductive film layer 102. From the perspective of driving the hemispherical resonator 10, the driving capacitance between the driving electrode 23 and the lip end face 13 requires a high-voltage signal to generate sufficient electrostatic force to effectively excite the resonator. The high-voltage electrode can provide sufficient voltage to ensure that the resonator can be stably and effectively excited, thereby generating the required vibration mode. From the perspective of vibration detection of the hemispherical resonator 10, the vibration frequency of the hemispherical resonator 10 is relatively high, and the vibration displacement is in the micron order. The use of a high-voltage electrode can improve the sensitivity of the signal detection unit, enabling it to more accurately detect the vibration signal of the resonator. It helps to achieve high-resolution, contactless vibration signal detection, thereby further improving the accuracy and performance of the hemispherical resonator gyroscope.

[0077] In this embodiment, a fourth conductive film layer 104 is provided on the outer wall of the hemispherical housing 14 near the lip end surface 13. The fourth conductive film layer 104 is electrically connected to the second conductive film layer 102. The potential electrode 22 can provide the same potential to the first conductive film layer 101, the second conductive film layer 102, and the fourth conductive film layer 104 via the third conductive film layer 103. In this manner, on the one hand, a portion of the fourth conductive film layer 104 is positioned opposite the drive electrode 23, which more efficiently utilizes space and increases the area of ​​the drive capacitor plate. On the other hand, the potential of the first conductive film layer 101 and the second conductive film layer 102 can be fixed, preventing potential shifts between the first conductive film layer 101 and the second conductive film layer 102.

[0078] The hemispherical resonator 10, the driving electrical substrate 21, and the detecting electrical substrate 31 are made of the same material. The hemispherical resonator 10, the driving electrical substrate 21, and the detecting electrical substrate 31 are all made of fused quartz. By making the hemispherical resonator 10, the driving electrical substrate 21, and the detecting electrical substrate 31 of the same material, the thermal expansion coefficients are made the same. When the temperature changes, the dimensional changes of the hemispherical resonator 10, the driving electrical substrate 21, and the detecting electrical substrate 31 will remain consistent, thereby reducing the mechanical stress or deformation caused by the difference in thermal expansion, which is conducive to maintaining the stability and accuracy of the system. In addition, the hemispherical resonator 10, the driving electrical substrate 21, and the detecting electrical substrate 31 are made of the same material, which ensures better consistency in physical and chemical properties and can avoid electromagnetic interference or noise that may be generated between different materials.

[0079] The driving electrical substrate 21 and the detecting electrical substrate 31 are both made of fused quartz. Fused quartz has excellent electrical insulation properties. In electronic systems, good electrical insulation properties can ensure the correct transmission and distribution of current while preventing current leakage and short circuits. The high thermal stability of fused quartz enables the driving electrical substrate 21 and the detecting electrical substrate 31 to maintain stable performance in high-temperature environments. Fused quartz has good corrosion resistance to a variety of chemical substances, allowing it to maintain stable performance in harsh chemical environments. Fused quartz has sufficient hardness and strength to withstand certain mechanical stresses and pressures. This allows the driving electrical substrate 21 and the detecting electrical substrate 31 to maintain a stable shape and size during manufacturing and use.

[0080] Please refer to Figure 7 and Figure 8 , Figure 7 for Figure 4 FIG. 1 is a schematic structural diagram of an embodiment of a driving mechanism 20 in a hemispherical resonant gyroscope 1 . Figure 8 for Figure 4 FIG. 1 is a schematic structural diagram of an embodiment of a detection mechanism 30 in a hemispherical resonant gyroscope 1 .

[0081] like Figure 7 and Figure 8 As shown, the number of driving electrodes 23 is 8n, the number of detecting electrodes 32 is 8n, and the number of connecting electrodes 24 is 8n. The number of driving electrodes 23, the number of detecting electrodes 32, and the number of connecting electrodes 24 are the same.

[0082] exist Figure 7 and Figure 8 In the embodiment shown, the number of the driving electrodes 23, the detecting electrodes 32, and the connecting electrodes 24 are all 8. In some other embodiments, the number of the driving electrodes 23, the detecting electrodes 32, and the connecting electrodes 24 may be 16 or 24, which is not limited in this application.

[0083] By making the number of drive electrodes 23 8n, the number of detection electrodes 32 8n, and the number of connection electrodes 24 8n, the 8n drive electrodes 23 can apply driving forces of different directions and types, thereby more effectively exciting the resonator to vibrate. The 8n detection electrodes 32 can detect vibration signals at different angles, which helps to more comprehensively understand the vibration state of the resonator and provide a basis for precise control. Multiple drive electrodes 23 are distributed in a circular shape on the side of the drive electrical substrate 21 facing the hemispherical resonator 10, multiple detection electrodes 32 are distributed in a circular shape on the side edge of the detection electrical substrate 31 facing the inner wall of the hemispherical resonator 10, and multiple connection electrodes 24 are distributed in a circular shape on the side of the drive electrical substrate 21 facing the hemispherical resonator 10. The drive electrodes 23, detection electrodes 32, and connection electrodes 24 can be evenly distributed around the hemispherical resonator 10, thereby improving the driving accuracy and detection accuracy of the hemispherical resonator 10.

[0084] exist Figure 7 and Figure 8 In the illustrated embodiment, the detection electrode 32 is located inside the hemispherical resonator 10, and the drive electrode 23 is located on one side of the lip end surface 13 of the hemispherical resonator 10. The drive electrode 23 is located outside the hemispherical resonator gyroscope 1 relative to the detection electrode 32. The connection electrode 24 is connected to the detection electrode 32 and is therefore located between the potential electrode 22 and the drive electrode 23.

[0085] Please also refer to Figures 9 to 11 , Figure 9 for Figure 4 FIG. 1 is a schematic structural diagram of another embodiment of a driving mechanism in a hemispherical resonant gyroscope. Figure 10 for Figure 4 Schematic diagram of the structure of the conductive hole in the driving mechanism of the hemispherical resonator gyroscope shown. Figure 11 for Figure 4 FIG. 1 is a schematic structural diagram of another embodiment of a detection mechanism in a hemispherical resonant gyroscope.

[0086] like Figure 9 As shown, a first shielding electrode 26 is provided between the plurality of driving electrodes 23, and a second shielding electrode 27 is provided between the plurality of connecting electrodes 24. The first shielding electrode 26 can shield the signal interference between the plurality of driving electrodes 23, and the second shielding electrode 27 can shield the signal interference between the plurality of connecting electrodes 24.

[0087] A third shielding electrode 28 is provided between the driving electrode 23 and the connecting electrode 24 . The first shielding electrode 26 and the second shielding electrode 27 are connected via the third shielding electrode 28 , which can shield signal interference between the connecting electrode 24 and the driving electrode 23 .

[0088] In some embodiments, the first shielding electrode 26 and the second shielding electrode 27 can be grounded. In other embodiments, the first shielding electrode 26 and the second shielding electrode 27 can be connected to a DC potential. In this embodiment, the first shielding electrode 26 and the second shielding electrode 27 are respectively connected to a side of the driving electrical substrate 21 away from the hemispherical resonator 10 through conductive vias, which facilitates grounding of the first shielding electrode 26 and the second shielding electrode 27, or facilitates connecting the first shielding electrode 26 and the second shielding electrode 27 to a DC potential.

[0089] Please refer to Figure 10 , Figure 10 for Figure 1 The diagram shows the structure of the conductive vias 25 in the drive mechanism 20 of the hemispherical resonator gyroscope 1. In addition to the first conductive via 251, the second conductive via 252, and the third conductive via 253, the conductive vias 25 also include a fourth conductive via 254 and a fifth conductive via 255. The fourth conductive via 254 serves as the conductive via 25 for the first shielding electrode 26, and the fifth conductive via 255 serves as the conductive via 25 for the second shielding electrode 27. The first shielding electrode 26 is connected to the other side of the driving electrical substrate 21 via the fourth conductive via 254, and the second shielding electrode 27 is connected to the other side of the driving electrical substrate 21 via the fifth conductive via 255. The hemispherical resonator gyroscope 1 can be secured to and electrically connected to the package via the bottom of the driving electrical substrate 21, further simplifying circuit design and assembly.

[0090] like Figure 11 As shown, a fourth shielding electrode 34 is provided between the multiple detection electrodes 32. The fourth shielding electrode 34 can shield the signal interference between the multiple detection electrodes. The second shielding electrode 27 and the fourth shielding electrode 34 are electrically connected. The second shielding electrode 27 and the fourth shielding electrode 34 can jointly shield the signal interference between the multiple detection electrodes 32 and the connection electrode 24. The fourth shielding electrode 34 is grounded or connected to a DC potential through the second shielding electrode 27.

[0091] Please also refer to Figure 8 and Figure 11 ,like Figure 8 and Figure 11 As shown, the detection electrode 32 includes a first detection electrode 321 and a second detection electrode 322. The first detection electrode 321 is located on the outer wall of the detection electrical substrate 31 and forms a detection capacitor with the first conductive film layer 101. The second detection electrode 322 is located on the side of the detection electrical substrate 31 facing the driving electrical substrate 21. The second detection electrode 322 is electrically connected to both the first detection electrode 321 and the connection electrode 24. Specifically, the second detection electrode 322 and the connection electrode 24 are fixedly connected and electrically conductively connected using methods such as conductive sheet welding or conductive adhesive. This facilitates electrical connection between the detection electrode 32 and the connection electrode 24.

[0092] An annular step 35 is provided on the side of the detection electrical substrate 31 facing the driving electrical substrate 21. The annular step 35 extends from the side of the driving electrical substrate 21 closest to the hemispherical resonator 10 to the side farther away from the hemispherical resonator 10. The detection electrode 32 also includes a third detection electrode 323, which is disposed on the surface of the annular step 35 and is electrically connected to both the first detection electrode 321 and the second detection electrode 322. This increases the distance between the second detection electrode 322 and the driving electrode 23, preventing the second detection electrode 322 from being too close to the driving electrode 23 and increasing coupling between the driving signal and the detection signal.

[0093] The height of the annular step 35 cannot be set too large. If the height of the annular step 35 is set too large, the area of ​​the detection capacitor formed between the first detection electrode 321 plate and the first conductive film layer 101 will be reduced, thereby reducing the strength of the detection signal. The height of the annular step 35 cannot be set too small. If the height of the annular step 35 is set too small, the second detection electrode 322 plate and the drive electrode 23 will be too close, which will not effectively reduce the coupling between the detection signal and the drive signal. The height of the annular step 35 can be set to 1-3mm. In this embodiment, the height of the annular step 35 is set to 1.5mm, which can achieve a balance between enhancing the strength of the detection signal and reducing the coupling between the detection signal and the drive signal, thereby improving the signal-to-noise ratio of the hemispherical resonant gyroscope 1.

[0094] The hemispherical resonant gyroscope 1 provided in the embodiment of the present application can reduce the coupling between the gyroscope drive and detection signals and improve the strength of the gyroscope detection signal while having a strong process solution feasibility, high process precision, and a simple circuit solution, thereby obtaining a hemispherical resonant gyroscope with a strong error signal and a high signal-to-noise ratio, which has important application value for improving the performance indicators of the hemispherical resonant gyroscope.

[0095] Other embodiments of the present invention will readily occur to those skilled in the art after considering the specification and practicing the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of the present invention that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The description and examples are to be considered as exemplary only, and the true scope and spirit of the present invention are indicated by the following claims.

[0096] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

Claims

1. A hemispherical resonant gyroscope, characterized in that: include: A hemispherical resonator having a hemispherical structure, comprising an inner surface, an outer surface, and a lip end surface connected between the inner and outer surfaces, wherein the inner surface is provided with a first conductive film layer, and the lip end surface is provided with a second conductive film layer; The driving mechanism includes a driving electrical substrate having a flat plate structure and is located on a side of the hemispherical resonator close to the lip end surface. A potential electrode and a driving electrode are provided on a side of the driving electrical substrate facing the hemispherical resonator. The potential electrode is electrically connected to both the first conductive film layer and the second conductive film layer. The driving electrode and the second conductive film layer form a driving capacitor for driving the hemispherical resonator to vibrate. The detection mechanism includes a detection electric substrate, which is located in the hemispherical resonator and is arranged close to the driving electric substrate. The detection electric substrate is an inner spherical structure. The detection electric substrate is provided with a detection electrode. The detection electrode and the first conductive film layer form a detection capacitor for detecting the vibration of the hemispherical resonator.

2. The hemispherical resonator gyroscope according to claim 1, wherein: The driving electric substrate is provided with a connecting electrode, which is electrically connected to the detection electrode. The potential electrode, the connecting electrode and the driving electrode are respectively connected to the other side of the driving electric substrate through conductive vias.

3. The hemispherical resonator gyroscope according to claim 1, wherein: The hemispherical resonator includes a hemispherical shell and a support column arranged in the hemispherical shell, the hemispherical shell includes the inner surface, the outer surface and the lip end surface, the outer surface of the support column is provided with a third conductive film layer, and the first conductive film layer, the second conductive film layer and the third conductive film layer are electrically connected; The position of the support column is set corresponding to the position of the potential electrode, and the third conductive film layer is connected to the potential electrode to provide the same potential to the first conductive film layer and the second conductive film layer.

4. The hemispherical resonator gyroscope according to claim 3, characterized in that: The detection electrical substrate is provided with a through hole, the position of the through hole is arranged corresponding to the position of the support column, and the support column is inserted and fixed in the through hole; and / or A fourth conductive film layer is provided on the outer wall of the hemispherical shell near the lip end surface, and the fourth conductive film layer is electrically connected to the second conductive film layer.

5. The hemispherical resonator gyroscope according to claim 1, wherein: The potential electrode is a high voltage electrode; and / or The hemispherical resonator, the driving electric substrate and the detecting electric substrate are made of the same material; and / or The hemispherical resonator, the driving electric substrate and the detecting electric substrate are all made of fused quartz.

6. The hemispherical resonator gyroscope according to claim 2, wherein: The number of the driving electrodes is 8n, the number of the detecting electrodes is 8n, and the number of the connecting electrodes is 8n, and the number of the driving electrodes, the number of the detecting electrodes, and the number of the connecting electrodes are the same; The plurality of driving electrodes are distributed in a circular shape on the side of the driving electrical substrate facing the hemispherical resonator, the plurality of detection electrodes are distributed in a circular shape on the side edge of the detection electrical substrate facing the inner wall of the hemispherical resonator, and the plurality of connecting electrodes are distributed in a circular shape on the side of the driving electrical substrate facing the hemispherical resonator.

7. The hemispherical resonator gyroscope according to claim 6, wherein: The potential electrode is located at the center of a side of the driving electrical substrate facing the hemispherical resonator; and the connecting electrode is located between the potential electrode and the driving electrode.

8. The hemispherical resonator gyroscope according to claim 6, wherein: A first shielding electrode is provided between the multiple driving electrodes, a second shielding electrode is provided between the multiple connecting electrodes, a third shielding electrode is provided between the driving electrode and the connecting electrode, and the first shielding electrode and the second shielding electrode are electrically connected through the third shielding electrode; a fourth shielding electrode is provided between the multiple detection electrodes; the second shielding electrode and the fourth shielding electrode are electrically connected; the first shielding electrode and the second shielding electrode are respectively connected to a side of the driving electrical substrate away from the hemispherical resonator through conductive vias.

9. The hemispherical resonator gyroscope according to claim 2, wherein: The detection electrode includes a first detection electrode and a second detection electrode. The first detection electrode is located on the outer wall of the detection electrical substrate and forms a detection capacitor with the first conductive film layer. The second detection electrode is located on the side of the detection electrical substrate facing the driving electrical substrate, and the second detection electrode is electrically connected to the first detection electrode and the connecting electrode.

10. The hemispherical resonator gyroscope according to claim 9, characterized in that: An annular step is provided on a side of the detection electric substrate facing the driving electric substrate, and the annular step extends from a side of the driving electric substrate close to the hemispherical resonator to a side away from the hemispherical resonator; The detection electrode further includes a third detection electrode, which is disposed on the surface of the annular step and is electrically connected to both the first detection electrode and the second detection electrode.

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