A reflective confocal microscope based on perovskite detector

Abstract

The application relates to the technical field of microscopes, in particular to a reflection type confocal microscope based on a perovskite detector. The reflection type confocal microscope comprises a laser, a polarizer, a polarization beam splitter prism, a galvanometer, a lens unit, a mirror, a sample display unit, a focusing lens and a perovskite detector; the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the lens unit, the mirror and the sample display unit are sequentially connected to form an incident light channel; the sample display unit, the mirror, the lens unit, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form a reflected light channel. Compared with a traditional confocal microscope, the confocal microscope has the effects of high detection sensitivity, low cost and fast response speed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microscopes, in particular to a reflection confocal microscope based on a perovskite detector. BACKGROUND

[0002] In the field of microscopic imaging, confocal microscopes are widely used in biomedical, material science and other fields due to their high resolution, three-dimensional imaging capability and strong background noise suppression capability. Traditional confocal microscopes mainly rely on silicon-based detectors or other semiconductor detectors to capture the reflection or fluorescence signals of the sample. However, these detectors have limitations in performance, especially in terms of detection sensitivity, photoelectric conversion efficiency, response speed and cost control, which affects the imaging effect and application range of the microscope.

[0003] Firstly, the absorption of light signals and the photoelectric conversion efficiency of traditional silicon-based detectors are low, especially in weak light conditions, which can easily lead to a decrease in signal-to-noise ratio, thereby affecting the imaging quality. In addition, the wide band gap of silicon-based detectors results in insufficient response in the visible and near-infrared light bands, limiting the ability of multi-band confocal imaging. To improve imaging sensitivity, some high-end microscopes use special semiconductor materials or cooling devices, but these methods significantly increase the manufacturing cost and complexity of the equipment, increasing the economic burden of application.

[0004] Secondly, the response speed of traditional detectors is relatively slow, which makes it difficult to achieve ideal results in fast imaging or real-time observation. Especially when scanning the sample, the lack of response speed can cause image blurring and dynamic delay, limiting the application in dynamic observation and fast imaging fields. SUMMARY

[0005] The present application provides a reflection confocal microscope based on a perovskite detector to solve one or more technical problems existing in the prior art, at least to provide a beneficial choice or create conditions.

[0006] Other characteristics and advantages of the present application will become apparent from the following detailed description, or will be learned by practice of the present application.

[0007] According to one aspect of an embodiment of the present application, a reflection confocal microscope based on a perovskite detector is provided, comprising a laser, a polarizer, a polarization beam splitter prism, a galvanometer, a lens unit, a mirror, a sample display unit, a focusing lens and a perovskite detector; the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the lens unit, the mirror and the sample display unit are sequentially connected to form an incident light channel; the sample display unit, the mirror, the lens unit, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form a reflected light channel;

[0008] Wherein, in the incident light channel, the laser is used to output a laser signal, the polarizer is used to modulate the laser signal into a vertical linearly polarized light, and the polarization beam splitter prism is used to reflect the vertical linearly polarized light to the galvanometer and irradiate on the surface of a sample to be measured placed on the sample display unit through the galvanometer, the lens unit and the mirror, so as to form a sample image light signal;

[0009] In the reflected light channel, the sample image light signal reflected by the mirror is two-dimensionally scanned by the galvanometer or three-dimensionally scanned by the sample display unit and the galvanometer, so as to obtain a sample scanning signal, and the sample scanning signal is transmitted to the perovskite detector through the polarization beam splitter prism and the focusing lens, so as to generate a confocal image of the sample to be measured according to the sample scanning signal.

[0010] In an embodiment of the present application, based on the foregoing scheme, the lens unit comprises a scanning lens, a tube lens and a quarter wave plate, and the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the scanning lens, the tube lens, the quarter wave plate, the mirror and the sample display unit are sequentially connected to form the incident light channel; the sample display unit, the mirror, the quarter wave plate, the tube lens, the scanning lens, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form the reflected light channel.

[0011] Wherein, the scanning lens and the tube lens are both positive lenses, the focal length of the scanning lens is 39mm, and the distance between the scanning lens and the galvanometer is 39mm; the focal length of the tube lens is 180mm, the distance between the tube lens and the scanning lens is 219mm, and the tube lens and the scanning lens constitute a 4f optical system.

[0012] In an embodiment of the present application, based on the foregoing scheme, the sample display unit comprises a piezoelectric lifting stage, an objective lens and a sample stage, the sample to be measured is placed on the sample stage, the piezoelectric lifting stage can be precisely moved in the vertical direction, and the piezoelectric lifting stage is used to scan the sample image light signal of the sample to be measured and realize electric focusing.

[0013] Wherein, the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the scanning lens, the tube lens, the mirror, the piezoelectric lifting stage, the objective lens and the sample stage are sequentially connected to form the incident light channel.

[0014] The objective, the piezoelectric lifting stage, the mirror, the tube lens, the scanning lens, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form the reflected light channel.

[0015] In an embodiment of the present application, based on the foregoing scheme, the galvanometer includes an X-axis galvanometer and a Y-axis galvanometer, the X-axis galvanometer and the Y-axis galvanometer are respectively used for scanning the X-axis and the Y-axis of the sample image light signal, and the piezoelectric lifting stage is used for scanning the Z-axis of the sample image light signal.

[0016] The X-axis of the sample image light signal and the Y-axis of the sample image light signal correspond to two-dimensional coordinate axes of a horizontal plane where the sample to be measured is located, and the Z-axis of the sample image light signal is perpendicular to the horizontal plane where the sample to be measured is located.

[0017] In an embodiment of the present application, based on the foregoing scheme, the reflection confocal microscope further includes a data acquisition card, the data acquisition card is used for driving the X-axis galvanometer and the Y-axis galvanometer, and collecting signals scanned by the X-axis galvanometer and the Y-axis galvanometer.

[0018] The X-axis galvanometer is driven by a high-frequency triangular wave emitted by the data acquisition card, and the Y-axis galvanometer is driven by a low-frequency sawtooth wave signal emitted by the data acquisition card.

[0019] In an embodiment of the present application, based on the foregoing scheme, the mirror angles of the X-axis galvanometer and the Y-axis galvanometer can be adjusted.

[0020] In an embodiment of the present application, based on the foregoing scheme, a pinhole is further arranged between the focusing lens and the perovskite detector, the pinhole is 100 mm away from the focusing lens, the pinhole has a light passing diameter of 50 μm, and the pinhole is used for spatial filtering of the sample scanning signal.

[0021] In an embodiment of the present application, based on the foregoing scheme, the focusing lens has a focal length of 100 mm, and is used for focusing the sample scanning signal.

[0022] In an embodiment of the present application, based on the foregoing scheme, the perovskite detector is used for converting the sample scanning signal into a voltage signal, and the voltage signal is read by the data acquisition card to generate a confocal two-dimensional image or a confocal three-dimensional image.

[0023] The beneficial effects of the present application: by dividing the polarization beam splitter into an incident light channel and a reflected light channel, the laser signal emitted by the laser can be irradiated on the surface of the sample to be measured through the incident light channel to form a sample image light signal, and then the sample image light signal is deflected and scanned by driving the galvanometer to obtain a two-dimensional sample scanning signal, and a three-dimensional sample scanning signal can also be obtained by combining the two-dimensional scanning of the galvanometer through the sample display unit, and finally the sample scanning signal is detected by the perovskite detector and converted into a voltage signal to be collected by the data acquisition card, and finally a confocal two-dimensional image or three-dimensional image is formed. Obviously, the detection sensitivity of this method is high, and at the same time, there is no need for expensive device cost, and the imaging sample to be measured can be quickly confocally imaged through the mirror and the reflected light channel. Therefore, compared with the traditional confocal microscope, the confocal microscope of the present application has the effects of high detection sensitivity, low cost and fast response speed. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly described below. Obviously, the described drawings are only part of the embodiments of the present application, and not all embodiments. Those skilled in the art can obtain other design schemes and drawings from these drawings without creative labor.

[0025] Figure 1 The overall structure diagram of the reflection type confocal microscope based on the perovskite detector according to the embodiment of the present application is shown.

[0026] Figure 2 The driving and scanning schematic diagram of the galvanometer according to the embodiment of the present application is shown.

[0027] Figure 3 The comparative diagram of the confocal images collected by the perovskite detector and the silicon-based detector according to the embodiment of the present application is shown.

[0028] Figure 4 The schematic diagram of the X-axis and Y-axis of the galvanometer according to the embodiment of the present application is shown.

[0029] Figure 5 The optical path diagram of the laser signal in the incident light channel according to the embodiment of the present application is shown.

[0030] Figure 6 The optical path diagram of the sample scanning signal in the reflected light channel according to the embodiment of the present application is shown.

[0031] Figure 7 The preparation material diagram of the perovskite detector according to the embodiment of the present application is shown.

[0032] The drawings are marked

[0033] Laser 1, polarizer 2, polarization beam splitter prism 3, galvanometer 4, scanning lens 5, tube lens 6, quarter wave plate 7, mirror 8, piezoelectric lifting stage 9, objective lens 10, object stage 11, focusing lens 12, pinhole 13, perovskite detector 14. DETAILED DESCRIPTION

[0034] Example implementations are now described in greater detail with reference to the figures. Like reference numerals can be used to refer to like elements throughout. The example implementations can be implemented in numerous ways, and are not limited to the examples described herein; instead, examples are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example implementations to those skilled in the art.

[0035] Furthermore, the described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the application. One skilled in the relevant art will recognize, however, that the application can be practiced without one or more of the specific details, or with other methods, components, materials, and so forth. In other instances, well-known structures, devices, implementations, and operations have not been shown or described in detail to avoid obscuring aspects of the application.

[0036] The block diagrams in the drawings show only the functionality of the embodiments and do not imply any particular physical or architectural arrangement of the devices, components, and / or modules. That is, the functionality of the embodiments can be implemented in a single device, in multiple devices, or in a single processor, or in multiple processors. Also, the functionality of the embodiments can be implemented using a combination of software and hardware, or using only hardware or only software.

[0037] The flow diagrams depicted in the figures are examples of the operations that can be performed in accordance with embodiments of the application. The operations can be performed in the order shown, in a different order, or concurrently. In addition, some operations can be performed more than once, or not at all. Also, some operations can be combined with other operations, or split into multiple operations.

[0038] It should be noted that the term "multiple" is used herein to mean two or more. The term "and / or" describes associative relationships between associated objects, which means that there can be three relationships, for example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone. The character " / " generally represents an "or" relationship between the associated objects.

[0039] The following is a detailed introduction to the background of the embodiments of the application:

[0040] The present application aims to solve the technical defects of detection sensitivity, imaging resolution and cost of the existing confocal microscope system. Traditional confocal microscopes usually rely on detectors made of silicon or other semiconductor materials, which have limited response speed and photoelectric conversion efficiency, resulting in limited detection sensitivity and imaging quality, especially in low light intensity environment, which is prone to low signal-to-noise ratio. In addition, the manufacturing process of these detectors is complex, the cost is high, and the performance in multi-band imaging is not good; at the same time, these devices are active devices that need external power supply.

[0041] To solve these problems, the present application proposes to use perovskite material as the core element of the detector to construct a reflective confocal microscope based on perovskite detector. Perovskite material has excellent light absorption and photoelectric conversion performance, and its response speed to visible light and near-infrared light is relatively fast, which can significantly improve the sensitivity of the detector and thus obtain higher imaging resolution. The preparation process of perovskite material is relatively simple and the cost is low, making the detector have high economy and scalability. Therefore, the present application can reduce the cost while maintaining high sensitivity and resolution, and is suitable for multi-band imaging applications, which is expected to promote the widespread application of confocal microscope technology in scientific research and industrial detection fields.

[0042] In the field of microscopic imaging technology, confocal microscopes are widely used in biomedical, material science and other fields due to their high resolution, three-dimensional imaging capability and strong background noise suppression capability. Traditional confocal microscopes mainly rely on silicon-based detectors or other semiconductor detectors to capture the reflection or fluorescence signals of the sample. However, these detectors have limitations in performance, especially in terms of detection sensitivity, photoelectric conversion efficiency, response speed and cost control, which affects the imaging effect and application range of the microscope.

[0043] Firstly, the absorption and photoelectric conversion efficiency of traditional silicon-based detectors for light signals are relatively low, especially in weak light conditions, which can easily lead to a decrease in signal-to-noise ratio and thus affect the imaging quality. In addition, the wide band gap of silicon-based detectors results in insufficient response in the visible and near-infrared light bands, limiting the ability of multi-band confocal imaging. To improve imaging sensitivity, some high-end microscopes use special semiconductor materials or cooling devices, but these methods significantly increase the manufacturing cost and complexity of the equipment, increasing the economic burden of application.

[0044] Secondly, the response speed of traditional detectors is relatively slow, which makes it difficult to achieve ideal results in fast imaging or real-time observation. Especially when scanning the sample, the lack of response speed will cause image blurring and dynamic delay, limiting the application in dynamic observation and fast imaging fields.

[0045] Based on the limitations of the above background art, the present application proposes a reflective confocal microscope based on a perovskite detector, and the preparation method of the detector is described. The perovskite material has excellent light absorption characteristics and photoelectric conversion efficiency, which can significantly improve the signal-to-noise ratio and response speed of the detector under low light conditions, thereby significantly improving the imaging quality and resolution of the confocal microscope without increasing the cost. This innovative technology is expected to solve the shortcomings of traditional microscope detectors in sensitivity, response speed and multi-band imaging, and promote the wide application of microscopic imaging technology in various disciplines.

[0046] The embodiments of the present application are described in detail as follows:

[0047] According to an aspect of an embodiment of the present application, a reflective confocal microscope based on a perovskite detector is provided, which includes a laser 1, a polarizer 2, a polarization beam splitter prism 3, a galvanometer 4, a lens unit, a mirror 8, a sample display unit, a focusing lens 12 and a perovskite detector 14; the laser 1, the polarizer 2, the polarization beam splitter prism 3, the galvanometer 4, the lens unit, the mirror 8 and the sample display unit are connected in sequence to form an incident light channel; the sample display unit, the mirror 8, the lens unit, the galvanometer 4, the polarization beam splitter prism 3, the focusing lens 12 and the perovskite detector 14 are connected in sequence to form a reflected light channel.

[0048] In the incident light channel, the laser 1 is used to output a laser signal, the polarizer 2 is used to modulate the laser signal into vertically linearly polarized light, and the polarization beam splitter prism 3 is used to reflect the vertically linearly polarized light into the galvanometer 4 and pass through the galvanometer 4, the lens unit and the mirror 8 to irradiate the surface of a sample to be measured placed on the sample display unit, so as to form a sample image light signal.

[0049] In the reflected light channel, the sample image light signal reflected by the mirror 8 is two-dimensionally scanned by the galvanometer 4 or three-dimensionally scanned by the sample display unit and the galvanometer 4, to obtain a sample scanning signal, and the sample scanning signal is transmitted to the perovskite detector 14 through the polarization beam splitter prism 3 and the focusing lens 12, so that the perovskite detector 14 generates a confocal image of the sample to be measured according to the sample scanning signal.

[0050] Specifically, after the laser 1 emits a laser signal, it can be transmitted in two channels, the first channel is the incident light channel, and the specific light path diagram of the incident light channel can be seen in Figure 5As shown, the laser signal passes through the laser 1, the polarizer 2, the polarization beam splitter prism 3, the galvanometer 4, the lens unit and the mirror 8 to finally reach the sample display unit, so that the sample to be tested placed in the sample display unit can be imaged and a sample image light signal is generated.

[0051] The second path is a reflected light channel, and the specific optical path diagram of the reflected light channel can be seen from Figure 6 As shown, the generated sample image light signal passes through the sample display unit, the mirror 8 and the lens unit in turn, and under the driving of the galvanometer 4, the sample image light signal can be deflected. Since the galvanometer 4 has vibrations in the X-axis and Y-axis directions, the sample image light signal can be scanned in two dimensions. At this time, the generated sample scanning signal can be detected by the perovskite detector 14, and finally converted into a voltage signal, which is analyzed by the voltage signal collected by the data acquisition card, and finally a confocal image is generated. The sample display unit can also scan the Z-axis direction of the sample image light signal, that is, the vertical direction. At this time, the generated sample scanning signal is a signal with three dimensions, and the finally confocal image is also a three-dimensional image.

[0052] In an embodiment of the present application, the lens unit includes a scanning lens 5, a tube lens 6 and a quarter wave plate 7, and the laser 1, the polarizer 2, the polarization beam splitter prism 3, the galvanometer 4, the scanning lens 5, the tube lens 6, the quarter wave plate 7, the mirror 8 and the sample display unit are connected in turn to form the incident light channel; the sample display unit, the mirror 8, the quarter wave plate 7, the tube lens 6, the scanning lens 5, the galvanometer 4, the polarization beam splitter prism 3, the focusing lens 12 and the perovskite detector 14 are connected in turn to form the reflected light channel.

[0053] Among them, the scanning lens 5 and the tube lens 6 are both positive lenses, the focal length of the scanning lens 5 is 39mm, and the distance between the scanning lens 5 and the galvanometer 4 is 39mm; the focal length of the tube lens 6 is 180mm, the distance between the tube lens 6 and the scanning lens 5 is 219mm, and the tube lens 6 and the scanning lens 5 constitute a 4f optical system.

[0054] Specifically, the scanning lens 5 and the tube lens 6 can constitute a 4f optical system (4f optical system is used to enlarge the light spot), and the fast axis direction of the quarter wave plate 7 is 45°, so that the incident vertical linearly polarized light is changed into circularly polarized light, and the sample image light signal (circularly polarized light) reflected back through the reflected light channel is further changed into parallel linearly polarized light.

[0055] In an embodiment of the present application, the sample display unit comprises a piezoelectric lifting platform 9, a galvanometer 10 and a sample stage 11, the sample to be measured is placed on the sample stage 11, the piezoelectric lifting platform 9 can be precisely moved in the vertical direction, and the piezoelectric lifting platform 9 is used for scanning the sample image light signal of the sample to be measured and realizing electric focusing;

[0056] The laser 1, the polarizer 2, the polarization beam splitter prism 3, the galvanometer 4, the scanning lens 5, the tube lens 6, the mirror 8, the piezoelectric lifting platform 9, the galvanometer 10 and the sample stage 11 are sequentially connected to form the incident light channel.

[0057] The sample stage 11, the galvanometer 10, the piezoelectric lifting platform 9, the mirror 8, the tube lens 6, the scanning lens 5, the galvanometer 4, the polarization beam splitter prism 3, the focusing lens 12 and the perovskite detector 14 are sequentially connected to form the reflected light channel.

[0058] Specifically, the piezoelectric lifting platform 9 can drive the galvanometer 10 to be precisely moved in the vertical direction by piezoelectric ceramics, the stroke is 100 μm, and the minimum step resolution is 10 nm, so as to realize three-dimensional scanning imaging and electric focusing of the confocal microscope;

[0059] The galvanometer 10 is installed below the piezoelectric lifting platform 9 and realizes microscopic observation of the sample to be measured. The galvanometer 10 can switch different magnification and model parameters to realize imaging of the sample to be measured under different magnification and resolution.

[0060] The sample stage 11 is used for placing and fixing the sample to be measured, and the X axis and Y axis of the sample stage 11 can be finely adjusted by a knob, that is, the pose of the sample to be measured is finely adjusted.

[0061] In an embodiment of the present application, the galvanometer 4 comprises an X-axis galvanometer and a Y-axis galvanometer, the X-axis galvanometer and the Y-axis galvanometer are respectively used for scanning the X axis and Y axis of the sample image light signal, and the piezoelectric lifting platform 9 is used for scanning the Z axis of the sample image light signal.

[0062] The X axis of the sample image light signal and the Y axis of the sample image light signal correspond to two-dimensional coordinate axes of a horizontal plane where the sample to be measured is located, and the Z axis of the sample image light signal is perpendicular to the horizontal plane where the sample to be measured is located.

[0063] The reflective confocal microscope further comprises a data acquisition card, the data acquisition card is used for driving the X-axis galvanometer and the Y-axis galvanometer, and acquiring signals scanned by the X-axis galvanometer and the Y-axis galvanometer;

[0064] The X-axis galvanometer is driven by a high-frequency triangular wave emitted by the data acquisition card, and the Y-axis galvanometer is driven by a low-frequency sawtooth wave signal emitted by the data acquisition card. The mirror angles of the X-axis galvanometer and the Y-axis galvanometer can be adjusted.

[0065] Specifically, as shown in Figure 2 The confocal imaging of the entire reflective confocal microscope is realized by two-dimensional scanning of the sample image light signal (laser beam reflected by the reflection light channel) by the galvanometer 4. Figure 2 The waveform diagram of the voltage signal for controlling the galvanometer 4 and the frame trigger is shown in FIG. 4. The X-axis galvanometer is driven by a high-frequency triangular wave emitted by the data acquisition card, which is used as a fast-axis scanning. The Y-axis galvanometer is driven by a low-frequency sawtooth wave signal emitted by the data acquisition card. The frame trigger is used to enable the data acquisition of a frame of imaging by the data acquisition card using a constant high transistor-transistor logic (TTL) voltage, and disable the data acquisition using a low TTL voltage when the yY axis flies back. The signal of each pixel is collected according to the pixel clock time. The model of the data acquisition card is NI-6218.

[0066] Further, in the reflective confocal microscope, as shown in Figure 4 Figure 4 The X-axis galvanometer and the Y-axis galvanometer (also referred to as the galvanometer 4) shown in FIG. 1 are key components for controlling the scanning of the laser signal on the surface of the sample to be measured. The imaging principle of the reflective confocal microscope mainly relies on the scanning of the sample by the laser signal (i.e. the laser signal emitted by the laser 1), and the image is obtained by detecting the reflected signal (sample image light signal) or the fluorescent signal. The functions of the X-axis galvanometer and the Y-axis galvanometer are to accurately control the scanning position of the laser signal, so as to obtain high-resolution two-dimensional or three-dimensional images.

[0067] The laser signal of the confocal microscope is scanned by the galvanometer 4. The galvanometer 4 is usually composed of two high-speed mirrors 8, one controlling the X-axis direction (horizontal scanning) and the other controlling the Y-axis direction (vertical scanning).

[0068] The galvanometer 4 quickly adjusts the mirror angle by electromagnetic drive or other means, so that the laser beam is repeatedly scanned along the X-axis and Y-axis directions.

[0069] ​The X-axis galvanometer and the Y-axis galvanometer usually work in a perpendicular way to ensure that the laser beam can cover the entire two-dimensional scanning area (sample surface). By quickly changing the movement path of the laser beam, the galvanometer 4 can excite fluorescence or detect reflected signals at different positions of the sample. It should be noted that the following laser beam is also referred to as the laser signal described in the embodiments of the present application, and the vertical linearly polarized light, the circularly polarized light and the parallel linearly polarized light are only used to describe the polarization state of the laser signal, and the essence of the laser signal does not change. From the laser 1 to the focusing on the surface of the sample to be measured, it is all the laser signal (laser beam)

[0070] Specific steps of the working process

[0071] 1. Laser signal emission and preliminary focusing: The laser signal is first emitted from the laser 1, collimated through the optical system (such as a collimating lens) to form a small light beam, and then focused on the surface of the sample to be measured through the X-axis and Y-axis galvanometers and the incident light channel of the reflection confocal microscope.

[0072] 2. The working principle of the X-axis galvanometer and the Y-axis galvanometer is similar to that of the electron beam scanning in the traditional scanning display (such as a CRT display), but they control the deflection of the laser beam by the angle of the reflecting mirror 8. When the galvanometer 4 controls the angle by the electrical signal, it changes the position of the laser beam on the surface of the sample to be measured, thereby realizing excitation at different positions on the surface of the sample to be measured.

[0073] 3. Scanning mode: The scanning of the galvanometer 4 is usually carried out in a certain order, and the common scanning modes are:

[0074] Point scanning mode (Raster scan): The laser beam scans each pixel point of the sample in turn according to the scanning frame (horizontal scanning of a row and vertical scanning of rows downward), as shown in FIG. 1B, and finally covers the entire scanning area. When the laser irradiates the sample at each scanning position, fluorescence (or reflected light) is excited. This part of the fluorescence or reflected light is collected by the detection system of the microscope. Figure 2

[0075] 4. Since the confocal microscope uses a pinhole to limit the acceptance angle of light, only light from the focal point of the laser can pass through the pinhole, so that a clearer and higher resolution image can be obtained. The pinhole blocks stray light outside the focal point, thereby improving the contrast of the image.

[0076] ​5. After the laser scans a series of positions on the sample surface, the collected signals are converted into electrical signals and processed by a computer to generate an image. The scanning trajectories along the X and Y axes, as well as the light intensity or reflection intensity at each position, are ultimately stitched together to form a two-dimensional image. If three-dimensional imaging is required, the system will change the focal length (Z-axis scanning), i.e., the position of the piezoelectric lifting stage 9, to scan layers at different depths of the sample under test, and then use these scanning signals to reconstruct a three-dimensional image.

[0077] The following are specific components of the embodiments of this application, such as... Figure 1 As shown, from the light source to the image side, the following are arranged in sequence:

[0078] Laser 1 is a semiconductor single-mode spatial light collimating laser with a wavelength of 405nm and an output spot diameter of 2mm. Laser 1 is used as a light source for confocal imaging, and its output is vertically linearly polarized light with a power stability within 1%, an output power of 0-20mW, an adjustable range, and an adjustment accuracy of 0.1%. It emits parallel light to illuminate the next device, namely polarizer 2.

[0079] Polarizer 2 has a vertical polarization direction, and the light after the laser beam (laser signal) passes through polarizer 2 is vertically linearly polarized light;

[0080] The polarizing beam splitter 3 divides the laser beam into excitation and detection paths according to the polarization direction. The excitation path represents the incident light channel described in this application, and the detection path represents the reflected light channel described in this application. All vertically polarized light incident on the polarizing beam splitter 3 is reflected into the next device, namely the galvanometer 4.

[0081] Galvanometer 4 has two axes, X and Y, and the lens size is 5mm. The lens type is silver mirror. Galvanometer 4 is located on the front focal plane of scanning lens 5.

[0082] The scanning lens 5 has a focal length of 39mm and is a positive lens, located 39mm behind the galvanometer 4;

[0083] Tube lens 6 has a focal length of 180mm and is also a positive lens. It is located 219mm behind scanning lens 5 and together with scanning lens 5, they form a 4f optical system.

[0084] The quarter-wave plate 7 has a fast axis at 45°, which converts the incident vertically polarized light into circularly polarized light. After being reflected back by the sample, it is further converted into parallel linearly polarized light. The position is located behind the tube lens 6.

[0085] Reflector 8 mainly reflects the laser beam in a direction perpendicular to the table, making it convenient to observe the sample under test in an upright position;

[0086] A piezoelectric lifting platform 9 is used to precisely move the galvanometer 10 in the vertical direction by piezoelectric ceramic driving, with a stroke of 100 pm and a minimum step resolution of 10 nm, so as to realize three-dimensional scanning imaging and electric focusing.

[0087] An objective lens 10 is installed below the piezoelectric lifting platform 9 to realize microscopic observation of the sample to be measured, and the objective lens 10 can switch different magnification and model parameters to realize sample imaging at different magnifications and resolutions.

[0088] A stage 11 is used to place and fix the sample to be measured, and the X-axis and Y-axis of the stage 11 can be finely adjusted by a knob.

[0089] A focusing lens 12 with a focal length of 100 mm is used to focus and collect the sample scanning signal into a detector.

[0090] A pinhole 13 with an aperture diameter of 50 pm is located at the focal point of the focusing lens 12, with a distance of 100 mm, and is used for spatial filtering of the confocal sample scanning signal.

[0091] A perovskite detector 14 is used to collect the detected sample scanning signal and is located closely behind the pinhole 13; the collected photoelectric signal (sample scanning signal) is converted into a voltage signal, which is read by a data acquisition card of a computer and finally generates a confocal image.

[0092] According to another aspect of the embodiments of the present application, the preparation method of the perovskite detector 14 is as follows:

[0093] The preparation of the perovskite detector 14 mainly includes two parts, namely perovskite film deposition and electrode mask design.

[0094] The perovskite film deposition includes but is not limited to two processes of solution spin coating and vapor deposition.

[0095] Taking the solution method as an example, the specific experimental steps of perovskite film deposition are as follows:

[0096] 1. Dissolve MAI and PbI2 in an organic solvent in a stoichiometric ratio to form a precursor.

[0097] 2. Then, the precursor solution is deposited on an ITO or FTO substrate by spin coating (wherein the spin coating speed and anti-solvent dropping process can be optimized).

[0098] 3. Then, the substrate is annealed at 100 degrees Celsius to complete the preparation of the perovskite film. The precursor can be replaced by chemical elements to control the quality and composition of the perovskite film.

[0099] Design and development of the perovskite detector 14:

[0100] 1. According to the specific structure and requirements of the confocal microscope, the effective area and region of the device are defined to guide the design of the electrode shape and size of the device.

[0101] 2. The electrode mask plate is processed by a laser cutting process.

[0102] 3. The electrode deposition is deposited on the perovskite thin film by using a thermal evaporation process combined with a mask plate. In addition, the response of the device can be improved by adding an interface layer, such as the introduction of an electron and hole transport layer.

[0103] 4. The device is soldered on the circuit board and connected with the amplification circuit and the acquisition port to form a complete perovskite photodetector module.

[0104] As shown in Figure 7 , the perovskite photodetector is prepared from bottom to top as glass, indium tin oxide (ITO), hole transport layer (HTL), perovskite layer (PVK), electron transport layer (ETL), and silver (AG).

[0105] In summary, the reflection type confocal microscope based on the perovskite detector proposed in this application has the following effects:

[0106] 1. Improve detection sensitivity

[0107] As the core of the detector, perovskite material has excellent photoelectric performance. Perovskite detector can effectively absorb and detect light of different wavelengths, so when applied in confocal microscope, it can greatly improve the sensitivity of the detection signal. This means that more reflected signals can be captured, even weak reflected light can be accurately detected. As Figure 3 shown is a comparison of confocal images collected by perovskite detector and silicon-based detector, the results show that the image sensitivity response of perovskite detector at the same position is higher.

[0108] 2. Enhance the selectivity and contrast of the signal

[0109] The response characteristics of perovskite material at different wavelengths are good, which can be adjusted by accurately adjusting the working wavelength range of the detector to optimize the detection effect of reflected light and improve the contrast of the image. This helps to distinguish different structural features or material components in complex biological tissues or samples, and improves the clarity and visualization effect of microscopic imaging.

[0110] 3. Improve the response speed of the detector

[0111] Perovskite detectors generally have a fast response time, which is very important for real-time imaging and dynamic monitoring of confocal microscopes. Especially in experiments that require high temporal resolution, perovskite detectors can effectively reduce the delay in the imaging process, thereby improving experimental efficiency.

[0112] 4. Self-driven device

[0113] Perovskite detectors are generally self-driven, without the need for external voltage supply compared to silicon-based detectors, greatly simplifying the circuit of the detector device and enabling small volume packaging.

[0114] 5. Reduced cost

[0115] Compared with traditional high-performance detectors such as CCD or CMOS, perovskite materials are relatively inexpensive and easy to manufacture. Therefore, the reflective confocal microscope using perovskite detectors can significantly reduce production costs, making this technology more widely used in laboratory and clinical applications.

[0116] It should be understood that the present application is not limited to the precise construction which has been described above and illustrated in the accompanying drawings, and that various modifications and changes can be made without departing from the scope thereof. The scope of the application is limited only by the claims that follow.

Claims

1. A reflective confocal microscope based on perovskite detectors, characterized in that, Comprise: laser, polarizer, polarization beam splitter prism, galvanometer, lens unit, mirror, sample display unit, focusing lens and perovskite detector; The laser, the polarizer, the polarization beam splitter prism, the galvanometer, the lens unit, the mirror and the sample display unit are sequentially connected to form an incident light channel; the sample display unit, the mirror, the lens unit, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form a reflected light channel; Wherein, in the incident light channel, the laser is used to output a laser signal, the polarizer is used to modulate the laser signal into a vertical linearly polarized light, and the polarization beam splitter prism is used to reflect the vertical linearly polarized light into the galvanometer, and the vertical linearly polarized light passes through the galvanometer, the lens unit and the mirror to irradiate the surface of the sample to be measured placed on the sample display unit to form a sample image light signal; In the reflected light channel, the sample image light signal reflected by the mirror is two-dimensionally scanned by the galvanometer or three-dimensionally scanned by the sample display unit and the galvanometer, a sample scanning signal is obtained, and the sample scanning signal is transmitted to the perovskite detector through the polarization beam splitter prism and the focusing lens, so as to generate a confocal image of the sample to be measured according to the sample scanning signal.

2. The perovskite detector-based reflective confocal microscope of claim 1, wherein, The lens unit comprises a scanning lens, a tube lens and a quarter wave plate, and the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the scanning lens, the tube lens, the quarter wave plate, the mirror and the sample display unit are sequentially connected to form the incident light channel; the sample display unit, the mirror, the quarter wave plate, the tube lens, the scanning lens, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form the reflected light channel; Wherein, the scanning lens and the tube lens are both positive lenses, the focal length of the scanning lens is 39mm, and the distance between the scanning lens and the galvanometer is 39mm; the focal length of the tube lens is 180mm, the distance between the tube lens and the scanning lens is 219mm, and the tube lens and the scanning lens constitute a 4f optical system.

3. The perovskite detector based reflective confocal microscope of claim 2, wherein, The sample display unit comprises a piezoelectric lifting stage, an objective lens and an objective table, the sample to be measured is placed on the objective table, the piezoelectric lifting stage can be precisely moved in the vertical direction, and the piezoelectric lifting stage is used for scanning the sample image light signal of the sample to be measured and realizing electric focusing; Wherein, the laser, the polarizer, the polarization beam splitter prism, the galvanometer, the scanning lens, the tube lens, the mirror, the piezoelectric lifting stage, the objective lens and the objective table are sequentially connected to form the incident light channel; The objective, the piezoelectric lifting stage, the mirror, the tube lens, the scanning lens, the galvanometer, the polarization beam splitter prism, the focusing lens and the perovskite detector are sequentially connected to form the reflected light channel.

4. The perovskite detector-based reflective confocal microscope of claim 3, wherein, The galvanometer includes an X-axis galvanometer and a Y-axis galvanometer, and the X-axis galvanometer and the Y-axis galvanometer are respectively used for scanning an X-axis of the sample image light signal and a Y-axis of the sample image light signal. The X-axis of the sample image light signal and the Y-axis of the sample image light signal correspond to two-dimensional coordinate axes of a horizontal plane where the sample to be detected is located, and the Z-axis of the sample image light signal is perpendicular to the horizontal plane where the sample to be detected is located.

5. The perovskite detector based reflective confocal microscope of claim 4, wherein, The reflection confocal microscope further includes a data acquisition card, which is used for driving the X-axis galvanometer and the Y-axis galvanometer and collecting signals scanned by the X-axis galvanometer and the Y-axis galvanometer. The X-axis galvanometer is driven by a high-frequency triangular wave emitted by the data acquisition card, and the Y-axis galvanometer is driven by a low-frequency sawtooth wave signal emitted by the data acquisition card.

6. The perovskite detector based reflective confocal microscope of claim 5, wherein, The mirror angles of the X-axis galvanometer and the Y-axis galvanometer can be adjusted.

7. The perovskite detector based reflective confocal microscope of claim 6, wherein, A pinhole is further arranged between the focusing lens and the perovskite detector, the pinhole is 100 mm away from the focusing lens, the pinhole has a light passing diameter of 50 μm, and the pinhole is used for spatial filtering of the sample scanning signal.

8. The perovskite detector based reflective confocal microscope of claim 7, wherein, The focusing lens has a focal length of 100 mm, and is used for focusing the sample scanning signal.

9. The perovskite detector-based reflective confocal microscope of claim 8, wherein, The perovskite detector is used for converting the sample scanning signal into a voltage signal, and the voltage signal is read by the data acquisition card to generate a confocal two-dimensional image or a confocal three-dimensional image.

Images