Optical fiber photoacoustic gas sensing system and method for gas insulation equipment
By designing a linear spot multi-purpose fiber optic acoustic gas sensing system, the existing photoacoustic gas sensing system is solved by using a rectangular gas chamber and a high reflectivity planar concave mirror, and the existing photoacoustic gas sensing system has been solved, and high sensitivity and high precision gas concentration detection is achieved.
Patent Information
- Application Number
- CN202411791173.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-06
- Publication Date
- 2025-04-04
AI Technical Summary
The existing photoacoustic gas sensing systems have problems such as large size, large gas consumption and long response time, and the absorption path of the miniaturized sensor is short and the sensitivity is low.
A linear spot multi-purpose fiber photoacoustic gas sensing system is designed. Through a narrow line-wide laser light source and a wide spectrum detection light source, a rectangular gas chamber and a high reflectivity planar concave reflector are used to achieve multiple reflections to form a linear spot distribution and enhance the photoacoustic signal.
It is realized that the volume of the fiber optic acoustic gas sensing system is significantly reduced without reducing the number of light reflections, the sensitivity and response speed of the sensor are improved, and the gas concentration can be detected with high accuracy.
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Figure CN119757227A_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the field of sensing and measuring technology for operation and maintenance of power transmission and transformation equipment, and relates to an optical fiber photoacoustic gas sensing system and method for gas-insulated equipment. Background Art
[0002] Intelligent sensing is the core technology of the power Internet of Things. Real-time monitoring of the operating status of electrical equipment is an important means to ensure the safe operation of the power grid. Gas-insulated equipment adopts a fully enclosed structural design and is filled with sulfur hexafluoride gas with excellent insulation and arc extinguishing performance. It can greatly reduce the size of high-voltage electrical equipment and increase the transmission capacity. It has become a key equipment for ultra-high voltage transmission and urban power grids. When overheating or discharge failure occurs inside the gas-insulated equipment, sulfur hexafluoride decomposes to form low-fluorine sulfides. These low-fluorine sulfides react chemically with electrodes, insulating materials, gas impurities and moisture to produce a variety of highly toxic and highly corrosive decomposition derivatives. Monitoring the concentration of decomposition derivatives can accurately analyze and provide early warning of the type and severity of latent faults inside gas-insulated equipment. Trace gas detection technology plays an important role in many fields with its high sensitivity, high selectivity and wide applicability. The detection of SF6 decomposition derivatives such as hydrogen sulfide (H2S) and carbon monoxide (CO) is of great significance.
[0003] Photoacoustic spectroscopy gas detection technology is an indirect absorption spectroscopy technology. A beam of excitation light with a frequency (wavelength) within the absorption spectrum of the target gas molecules is used to irradiate the gas to be tested. Some gas molecules will absorb the energy of the excitation light and transition to a high-energy state. The excited gas molecules return to a low-energy state in the form of a non-radiative transition, and this process is accompanied by the release of heat. When the excitation light source is modulated at a certain frequency, the release of heat presents the same cycle. When the gas in the gas chamber of the photoacoustic cell undergoes periodic thermal expansion, sound waves with an amplitude proportional to the concentration of the gas to be tested are generated. Since the photoacoustic spectroscopy technology detects the sound signal generated by the gas absorbing light energy, there is no need for the detector to receive the transmitted light, avoiding the influence of interference factors such as light scattering and reflection in traditional spectroscopy. It has the advantages of high sensitivity, high precision, no background, and a wide range of applicable gases.
[0004] Although the traditional resonant multi-pass photoacoustic cell has the advantages of many light reflection times and long gas absorption optical path, it has the problems of large size, large gas consumption and long response time of the photoacoustic sensor. The non-resonant photoacoustic cell does not require a complex cavity structure to achieve acoustic resonance. The length of the photoacoustic cell is short, so its volume is small, and the interference suffered by the light when propagating in the cell is also small. As shown in the literature Dense multibutterfly spots-enhanced miniaturized optical fiberphotoacoustic gas sensor.Analytical Chemistry 2024,96(14):5554-5559, the multi-pass cell is integrated into a miniaturized non-resonant photoacoustic cell. In a photoacoustic tube with a diameter of 16 mm, the light beam is reflected about 100 times, and a dense butterfly-shaped spot can be formed. However, for irregular light spots with multiple reflections, there is a problem that the optical path is difficult to adjust. In addition, considering that the photoacoustic tube cross-section of the traditional miniaturized pump-suction type and diffusion type photoacoustic cell is circular, the improvement of the sensitivity of the small volume sensor is limited. Therefore, how to further reduce the volume of the photoacoustic cell without reducing the number of light reflections remains a major challenge. Summary of the invention
[0005] The technical solution of the present invention is used to solve the problem of how to further reduce the volume of the optical fiber photoacoustic gas sensing system without reducing the number of light reflections.
[0006] The present invention solves the above technical problems through the following technical solutions:
[0007] The present invention provides an optical fiber photoacoustic gas sensing system for gas-insulated equipment, comprising: a narrow line width laser light source (1), an optical fiber collimator (2), a wide spectrum detection light source (3), an optical circulator (4), a spectrometer (5), a signal processing circuit (6), a control computer (7), and a linear light spot multi-pass optical fiber photoacoustic gas sensor; the narrow line width laser light source (1) is connected to the optical fiber collimator (2) via an optical fiber, the optical fiber collimator (2) is inserted into the linear light spot multi-pass optical fiber photoacoustic gas sensor, the narrow line width laser light source (1) and the signal processing circuit (6) are connected by a cable, the spectrometer (5) and the signal processing circuit (6) are connected by a cable, the signal processing circuit (6) and the control computer (7) are connected by a cable, the wide spectrum detection light source (3) and the optical circulator (4) are connected by an optical fiber, the optical circulator (4) and the linear light spot multi-pass optical fiber photoacoustic gas sensor are connected by a single-mode optical fiber, and the optical circulator (4) and the spectrometer (5) are connected by an optical fiber;
[0008] The linear spot multi-pass optical fiber photoacoustic gas sensor comprises: a sensor body (10), an incident end cover (20), and an output end cover (30); the incident end cover (20) is fixed to the incident end of the sensor body (10), and the output end cover (30) is fixed to the output end of the sensor body (10);
[0009] A rectangular air chamber (101) is provided inside the sensor body (10), and two gas diffusion holes (102) are symmetrically provided on two side surfaces of the sensor body (10), wherein the gas diffusion holes (102) connect the outside of the sensor body (10) with the rectangular air chamber (101) inside the sensor body (10);
[0010] The incident end and the exit end of the rectangular air chamber (101) are respectively provided with an annular groove, a first plano-concave reflector (40) is installed in the groove of the incident end, an incident hole (401) is provided on the first plano-concave reflector (40), a second plano-concave reflector (50) is installed in the groove of the exit end, and the concave surfaces of the first plano-concave reflector (40) and the second plano-concave reflector (50) are opposite and are both arranged toward the rectangular air chamber (101);
[0011] The incident end cover (20) is provided with a fiber collimator mounting hole (201), the central axes of the fiber collimator mounting hole (201) and the incident hole (401) coincide with each other, and the central axes are aligned with the incident port of the rectangular air chamber (101); the incident end cover (20) is provided with a single-mode fiber pinhole (202) and a reflection cavity (203) in sequence from the outside to the inside, and a round-shaped sound wave sensitive cantilever beam diaphragm (60) is pasted on the end of the reflection cavity (203); the central axes of the single-mode fiber pinhole (202), the reflection cavity (203) and the sound wave sensitive cantilever beam diaphragm (60) coincide with each other, and the central axes are aligned with the incident port of the rectangular air chamber (101);
[0012] An elliptical observation hole (301) is provided on the emission end cover (30), and the central axes of the observation hole (301), the second plano-concave reflector (50), the rectangular air chamber (101) and the first plano-concave reflector (40) coincide with each other.
[0013] Furthermore, the spectrometer (5) adopts a high-speed miniature spectrometer with an acquisition rate higher than 10 kHz, the wavelength range of the spectrometer is 1525nm-1570nm, and the frame rate is higher than 10 kHz.
[0014] Furthermore, the surface of the acoustic wave sensitive cantilever beam diaphragm (60) is plated with gold.
[0015] Furthermore, the reflectivity of the first plano-concave reflector (40) and the second plano-concave reflector (50) are both higher than 98%.
[0016] Furthermore, the central wavelength of the detection light of the wide-spectrum detection light source (3) is 1550 nm and the bandwidth is 45 nm.
[0017] The present invention also provides a method based on the above-mentioned optical fiber photoacoustic gas sensing system for gas-insulated equipment, which specifically comprises: when in use, the optical fiber collimator (2) is installed in the optical fiber collimator installation hole (201), and the single-mode optical fiber pin is installed in the single-mode optical fiber pin hole (202); the incident light beam of the modulated excitation light emitted by the narrow line width laser light source (1) passes through the optical fiber collimator (2) and the incident hole (401) in sequence and is incident into the rectangular gas chamber (101); the first plano-concave reflector (40) and the second plano-concave reflector (50) arranged at both ends of the rectangular gas chamber (101) reflect the incident light beam of the modulated excitation light back and forth multiple times in the rectangular gas chamber (101) to form a linear light spot distribution; the light beam to be detected in the rectangular gas chamber (101) is reflected back and forth by the first plano-concave reflector (40) and the second plano-concave reflector (50) arranged at both ends of the rectangular gas chamber (101) to form a linear light spot distribution; The detection gas absorbs the modulated excitation light, generating a photoacoustic effect, causing the gas to undergo periodic thermal expansion, thereby generating an acoustic signal, thereby causing the acoustic wave sensitive cantilever beam diaphragm (60) to produce forced vibration; the detection light emitted by the wide-spectrum detection light source (3) passes through the single-mode optical fiber pinhole (202) and the reflection cavity (203) in sequence, and the detection light reflected by the end of the cantilever beam etched on the acoustic wave sensitive cantilever beam diaphragm (60) generates a Fabry-Perot interference effect with the end face of the single-mode optical fiber and the reflected detection light; the returned interference signal is transmitted to the spectrometer (5) via the optical circulator (4); the signal collected by the spectrometer (5) is processed by the signal processing circuit (6), and finally processed and displayed by the control computer (7), thereby detecting the concentration of the gas.
[0018] The advantages of the present invention are:
[0019] The modulated excitation light of the sensor of the optical fiber photoacoustic gas sensing system for gas-insulated equipment of the present invention enters a rectangular air chamber with a high-reflectivity plano-concave reflector, generates multiple reflections in the air chamber to form a linear light spot distribution, and generates a photoacoustic signal; the detection light reflected by the end of the cantilever beam etched on the acoustic wave sensitive cantilever beam diaphragm and the end end face of the single-mode optical fiber and the reflected detection light generate a Fabry-Perot interference effect, thereby detecting the concentration of the gas; the rectangular air chamber greatly reduces the volume of the air chamber, thereby reducing the size of the entire sensor probe, and at the same time solves the problems of large volume, large gas consumption, and long response time in the traditional photoacoustic spectroscopy gas detection technology, as well as the problems of short absorption light path and low sensitivity of the miniaturized sensor; the sensor of the present invention has the advantages of small volume, high sensitivity, intrinsic safety, etc.; the excitation light and the detection light are both transmitted by optical fiber, realizing a full-fiber gas detection method. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1Schematic diagram of the composition of a fiber optic photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0021] Figure 2 3. A front view of the three-dimensional structure of a linear spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0022] Figure 3 It is a three-dimensional structural explosion diagram of a linear spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0023] Figure 4 It is a three-dimensional structural front view of a sensor body of a linear spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0024] Figure 5 is a projection view of the yoz plane of the sensor body of the linear spot multi-pass optical fiber photoacoustic gas sensor of the optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0025] Figure 6 It is a three-dimensional structure front view of a linear spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention, and a half-section top view along the xoy plane;
[0026] Figure 7 It is a half-section oblique view along the xoy plane of a three-dimensional structure front view of a linear spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0027] Figure 8 It is a front view of an incident end cover of a linear spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0028] Fig. 9 It is a front view of an exit end cap of a linear spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0029] Fig.10 It is a half-section front view of the installation and use of a linear spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0030] Fig.11 1 is a schematic diagram of the linear light spot distribution of a linear light spot multi-pass optical fiber photoacoustic gas sensor of an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0031] Fig.12 This is a comparison diagram of photoacoustic signal values of multiple reflections and single reflections of a linear light spot of a multi-pass optical fiber photoacoustic gas sensor of a optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention;
[0032] Fig.13 A relationship curve between the photoacoustic signal value measured by the linear spot multi-pass fiber photoacoustic gas sensor of the fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention and the change in acetylene gas concentration. DETAILED DESCRIPTION
[0033] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in combination with the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0034] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and specific embodiments:
[0035] Embodiment 1
[0036] like Figure 1 As shown, an optical fiber photoacoustic gas sensing system for gas-insulated equipment according to an embodiment of the present invention comprises: a narrow linewidth laser light source (1), an optical fiber collimator (2), a wide spectrum detection light source (3), an optical circulator (4), a spectrometer (5), a signal processing circuit (6), a control computer (7), and a linear light spot multi-pass optical fiber photoacoustic gas sensor; the narrow linewidth laser light source (1) is connected to the optical fiber collimator (2) via an optical fiber, the optical fiber collimator (2) is inserted into the linear light spot multi-pass optical fiber photoacoustic gas sensor, the narrow linewidth laser light source (1) and the signal processing circuit (6) are connected by a cable, the spectrometer (5) and the signal processing circuit (6) are connected by a cable, the signal processing circuit (6) and the control computer (7) are connected by a cable, the wide spectrum detection light source (3) and the optical circulator (4) are connected by an optical fiber, the optical circulator (4) and the linear light spot multi-pass optical fiber photoacoustic gas sensor are connected by a single-mode optical fiber, and the optical circulator (4) and the spectrometer (5) are connected by an optical fiber.
[0037] like Figure 2 and Figure 3As shown, the linear spot multi-pass optical fiber photoacoustic gas sensor comprises: a sensor body (10), an incident end cover (20), and an output end cover (30); the sensor body (10) is a rectangular parallelepiped structure, and the incident end cover (20) and the output end cover (30) are both block structures matching the sensor body (10).
[0038] like Figures 4 to 5 As shown, a flat rectangular air chamber (101) is provided inside the sensor body (10), and two gas diffusion holes (102) are symmetrically provided on two side surfaces of the sensor body (10), wherein the gas diffusion holes (102) connect the outside of the sensor body (10) with the rectangular air chamber (101) inside the sensor body (10).
[0039] like Figure 6 to Figure 7 As shown, the incident end and the exit end of the rectangular air chamber (101) are respectively provided with an annular groove, a first plano-concave reflector (40) in the shape of a circular cake is installed in the groove at the incident end, an incident hole (401) is provided on the first plano-concave reflector (40), and a second plano-concave reflector (50) in the shape of a circular cake is installed in the groove at the exit end, the size of the groove matches the first plano-concave reflector (40) and the second plano-concave reflector (50), and the concave surfaces of the first plano-concave reflector (40) and the second plano-concave reflector (50) are opposite and are both arranged toward the rectangular air chamber (101).
[0040] like Figure 6 , Figure 7 , Figure 8 As shown, the incident end cover (20) is fixed to the incident end of the sensor body (10) by screws, and a fiber collimator mounting hole (201) is provided on the incident end cover (20), and the central axes of the fiber collimator mounting hole (201) and the incident hole (401) coincide with each other, and the central axes are aligned with the incident port of the rectangular air chamber (101); a single-mode fiber pinhole (202) and a reflection cavity (203) are provided on the incident end cover (20) in sequence from the outside to the inside, and a round sound wave sensitive cantilever beam diaphragm (60) is pasted on the end of the reflection cavity (203); the central axes of the single-mode fiber pinhole (202), the reflection cavity (203) and the sound wave sensitive cantilever beam diaphragm (60) coincide with each other, and the central axes are aligned with the incident port of the rectangular air chamber (101).
[0041] like Figure 6 , Figure 7 , Fig. 9As shown, the output end cover (30) is fixed to the output end of the sensor body (10) by screws, and an elliptical observation hole (301) is provided on the output end cover (30), and the central axes of the observation hole (301), the second plano-concave reflector (50), the rectangular air chamber (101) and the first plano-concave reflector (40) coincide with each other.
[0042] Preferably, the surface of the acoustic wave sensitive cantilever beam diaphragm (60) is plated with gold.
[0043] Preferably, the reflectivity of the first plano-concave reflector (40) and the second plano-concave reflector (50) are both higher than 98%.
[0044] Preferably, the central wavelength of the detection light of the wide-spectrum detection light source (3) is 1550 nm and the bandwidth is 45 nm.
[0045] Preferably, the spectrometer (5) is a high-speed miniature spectrometer with an acquisition rate higher than 10 kHz, the wavelength range of the spectrometer is 1525 nm-1570 nm, and the frame rate is higher than 10 kHz.
[0046] like Fig.10 As shown, when in use, the optical fiber collimator (2) is installed in the optical fiber collimator installation hole (201), and the single-mode optical fiber pin is installed in the single-mode optical fiber pin hole (202). The incident light beam of the modulated excitation light emitted by the narrow line width laser light source (1) passes through the optical fiber collimator (2) and the incident hole (401) in sequence and is incident into the rectangular air chamber (101). The first plano-concave reflector (40) and the second plano-concave reflector (50) arranged at both ends of the rectangular air chamber (101) reflect the incident light beam of the modulated excitation light back and forth multiple times in the rectangular air chamber (101) to form a linear light spot distribution. The gas to be measured in the rectangular air chamber (101) absorbs the modulated excitation light, thereby generating a photoacoustic effect. The gas is caused to undergo periodic thermal expansion, thereby generating an acoustic signal, thereby causing the acoustic wave sensitive cantilever beam diaphragm (60) to produce forced vibration; the detection light emitted by the wide-spectrum detection light source (3) passes through the single-mode optical fiber pinhole (202) and the reflection cavity (203) in sequence; the detection light reflected by the end of the cantilever beam etched on the acoustic wave sensitive cantilever beam diaphragm (60) produces a Fabry-Perot interference effect with the end face of the single-mode optical fiber and the reflected detection light; the returned interference signal is transmitted to the spectrometer (5) via the optical circulator (4); the signal collected by the spectrometer (5) is processed by the signal processing circuit (6) and finally processed and displayed by the control computer (7), thereby detecting the concentration of the gas.
[0047] The principle of the present invention is as follows:
[0048] The modulated excitation light emitted by the narrow line width laser light source (1) is incident on the rectangular gas chamber (101). After multiple reflections and back and forth propagation, the absorbed light energy causes the gas to be measured in the rectangular gas chamber (101) to undergo periodic thermal expansion, thereby generating a photoacoustic signal. According to the Lambert-Beer absorption law, the photoacoustic signal generated by gas absorption in the non-resonant photoacoustic cell can be obtained as follows:
[0049] S PA =αP0CFM S (1)
[0050] In the formula, α is the absorption coefficient of the gas to be measured, P0 is the effective excitation light power, C is the concentration of the gas to be measured, F is the cell constant, and M s Indicates the sensitivity of the acoustic sensor;
[0051] The cell constant F can be expressed by the following equation:
[0052]
[0053] In the formula, C p and C v are the isobaric specific heat capacity and isovolumetric specific heat capacity, respectively; Q is the quality factor of acoustic resonance; l represents the interaction distance between the gas to be measured and the incident laser; S is the cross-sectional area of the photoacoustic tube; v g Indicates the speed of sound.
[0054] It can be deduced from formulas (1) and (2) that by reducing the cross-sectional area of the photoacoustic tube and increasing the interaction distance between the gas and the incident light, the cell constant can be increased, thereby increasing the photoacoustic signal value.
[0055] In the multi-pass structure, after N reflections, the light spot position distribution can be described by the following equation:
[0056] x N =Usin(NФ+a) (4)
[0057] y N =Vsin(NФ+b) (5)
[0058] Where U and V are the boundary values of the light spot in the x and y directions, a and b are the initial phases of the light spot in the x and y directions, and Φ is a constant.
[0059] When the initial phase meets the following conditions:
[0060] a=b±π (6)
[0061] The spot distribution equation can be expressed as:
[0062]
[0063] Formula (7) indicates that the light spot on the reflector will be distributed in a straight line.
[0064] Experiment and simulation
[0065] like Fig.11 As shown, the linear spot distribution generated by the linear spot multi-pass optical fiber photoacoustic gas sensor of the optical fiber photoacoustic gas sensing system for gas-insulated equipment of the present invention has a smaller beam propagation space, which reduces the volume of the rectangular gas chamber and satisfies the multiple reflection conditions. By changing the position and angle of the incident light, the light is restricted to propagate within the axial plane in the rectangular gas chamber, and the spot distribution on the plano-concave reflector appears as a straight line. Compared with the traditional elliptical spot distribution, the required transmission space is smaller. The volume of the photoacoustic cell gas chamber can be reduced.
[0066] like Fig.12 As shown, the linear spot multi-pass fiber optic photoacoustic gas sensor of the fiber optic photoacoustic gas sensing system for gas-insulated equipment of the present invention is compared with the gas detection signal value of a single reflection. For the same gas concentration, the linear spot multiple reflection signal value is 12.4 times that of the single reflection signal.
[0067] like Fig.13 As shown, the linear spot multi-pass fiber optic photoacoustic gas sensor of the fiber optic photoacoustic gas sensing system for gas-insulated equipment of the present invention measures the photoacoustic signals of gases with different concentrations. It can be seen that the photoacoustic signal value has a good linear relationship with the gas concentration and has a high sensitivity (slope), so that it can have a large detection range, and the lowest detectable gas concentration reaches the ppb level.
[0068] In summary, compared with the traditional elliptical spot distribution pattern, the linear spot multi-pass fiber optic photoacoustic gas sensor of the fiber optic photoacoustic gas sensing system for gas-insulated equipment of the present invention requires a smaller light transmission space. Therefore, designing the air chamber cross-section into a rectangle can meet the multiple reflection conditions, further reducing the cross-sectional area of the photoacoustic tube, thereby reducing the air chamber volume and increasing the amplitude of the photoacoustic signal.
[0069] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims
1. A fiber optic photoacoustic gas sensing system for gas-insulated equipment, characterized in that: include: A narrow linewidth laser light source (1), an optical fiber collimator (2), a wide spectrum detection light source (3), an optical circulator (4), a spectrometer (5), a signal processing circuit (6), a control computer (7), and a linear light spot multi-pass optical fiber photoacoustic gas sensor; the narrow linewidth laser light source (1) is connected to the optical fiber collimator (2) via an optical fiber, the optical fiber collimator (2) is inserted into the linear light spot multi-pass optical fiber photoacoustic gas sensor, the narrow linewidth laser light source (1) and the signal processing circuit (6) are connected by a cable, the spectrometer (5) and the signal processing circuit (6) are connected by a cable, the signal processing circuit (6) and the control computer (7) are connected by a cable, the wide spectrum detection light source (3) and the optical circulator (4) are connected by an optical fiber, the optical circulator (4) and the linear light spot multi-pass optical fiber photoacoustic gas sensor are connected by a single-mode optical fiber, and the optical circulator (4) and the spectrometer (5) are connected by an optical fiber; The linear spot multi-pass optical fiber photoacoustic gas sensor comprises: a sensor body (10), an incident end cover (20), and an output end cover (30); the incident end cover (20) is fixed to the incident end of the sensor body (10), and the output end cover (30) is fixed to the output end of the sensor body (10); A rectangular air chamber (101) is provided inside the sensor body (10), and two gas diffusion holes (102) are symmetrically provided on two side surfaces of the sensor body (10), wherein the gas diffusion holes (102) connect the outside of the sensor body (10) with the rectangular air chamber (101) inside the sensor body (10); The incident end and the exit end of the rectangular air chamber (101) are respectively provided with an annular groove, a first plano-concave reflector (40) is installed in the groove of the incident end, an incident hole (401) is provided on the first plano-concave reflector (40), a second plano-concave reflector (50) is installed in the groove of the exit end, and the concave surfaces of the first plano-concave reflector (40) and the second plano-concave reflector (50) are opposite and are both arranged toward the rectangular air chamber (101); The incident end cover (20) is provided with a fiber collimator mounting hole (201), the central axes of the fiber collimator mounting hole (201) and the incident hole (401) coincide with each other, and the central axes are aligned with the incident port of the rectangular air chamber (101); the incident end cover (20) is provided with a single-mode fiber pinhole (202) and a reflection cavity (203) in sequence from the outside to the inside, and a round-shaped sound wave sensitive cantilever beam diaphragm (60) is pasted on the end of the reflection cavity (203); the central axes of the single-mode fiber pinhole (202), the reflection cavity (203) and the sound wave sensitive cantilever beam diaphragm (60) coincide with each other, and the central axes are aligned with the incident port of the rectangular air chamber (101); An elliptical observation hole (301) is provided on the emission end cover (30), and the central axes of the observation hole (301), the second plano-concave reflector (50), the rectangular air chamber (101) and the first plano-concave reflector (40) coincide with each other.
2. The optical fiber photoacoustic gas sensing system for gas-insulated equipment according to claim 1, characterized in that: The spectrometer (5) is a high-speed miniature spectrometer with a collection rate higher than 10 kHz, the wavelength range of the spectrometer is 1525nm-1570nm, and the frame rate is higher than 10 kHz.
3. The optical fiber photoacoustic gas sensing system for gas-insulated equipment according to claim 1, characterized in that: The surface of the acoustic wave sensitive cantilever beam diaphragm (60) is plated with gold.
4. The optical fiber photoacoustic gas sensing system for gas-insulated equipment according to claim 1, characterized in that: The reflectivity of the first plano-concave reflector (40) and the second plano-concave reflector (50) are both higher than 98%.
5. The optical fiber photoacoustic gas sensing system for gas-insulated equipment according to claim 1, characterized in that: The central wavelength of the detection light of the wide-spectrum detection light source (3) is 1550 nm and the bandwidth is 45 nm.
6. A method of the optical fiber photoacoustic gas sensing system for gas-insulated equipment according to any one of claims 1 to 5, characterized in that: When in use, the optical fiber collimator (2) is installed in the optical fiber collimator installation hole (201), and the single-mode optical fiber pin is installed in the single-mode optical fiber pin hole (202). The incident light beam of the modulated excitation light emitted by the narrow line width laser light source (1) passes through the optical fiber collimator (2) and the incident hole (401) in sequence and is incident into the rectangular air chamber (101). The first plano-concave reflector (40) and the second plano-concave reflector (50) arranged at both ends of the rectangular air chamber (101) reflect the incident light beam of the modulated excitation light back and forth multiple times in the rectangular air chamber (101) to form a linear light spot distribution. The gas to be measured in the rectangular air chamber (101) absorbs the modulated excitation light, generating a photoacoustic effect, causing The gas undergoes periodic thermal expansion, thereby generating an acoustic signal, thereby causing the acoustic wave sensitive cantilever beam diaphragm (60) to generate forced vibration; the detection light emitted by the wide-spectrum detection light source (3) passes through the single-mode optical fiber pinhole (202) and the reflection cavity (203) in sequence; the detection light reflected by the end of the cantilever beam etched on the acoustic wave sensitive cantilever beam diaphragm (60) generates a Fabry-Perot interference effect with the end face of the single-mode optical fiber and the reflected detection light; the returned interference signal is transmitted to the spectrometer (5) via the optical circulator (4); the signal collected by the spectrometer (5) is processed by the signal processing circuit (6), and finally processed and displayed by the control computer (7), thereby detecting the concentration of the gas.
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