Phase modulation method and system for multiple radio frequency power supply combinations
Through the phase modulation method of a combination of multiple RF power supplies, phase modulation is realized using VI sensors and incremental PID calculations, solving the problems of hardware complexity and external reference signal sources, and improving the synchronization and stability of the system.
Patent Information
- Application Number
- CN202411985416.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-04-04
AI Technical Summary
The phase modulation technology of multiple RF power supplies relies on hardware phase lock loops, resulting in complex hardware and the need for external reference signal sources, affecting the maximum output power.
Through a phase modulation method combining multiple RF power supplies, the VI sensor detects voltage and current, calculates the actual phase angle and phase difference, performs incremental PID calculations to realize phase modulation without the need for hardware phase lock loops and external reference signal sources.
It reduces the difficulty of hardware implementation, reduces the complexity of hardware circuits, improves the synchronization and stability of the system, realizes real-time monitoring and feedback without affecting the maximum output power.
Smart Images
Figure CN119758738A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of radio frequency power supplies, and in particular to a phase modulation method and system for a combination of multiple radio frequency power supplies. Background Art
[0002] With the continuous development of RF technology and digital signal processing technology, the phase adjustment technology of multiple RF power supplies will need to achieve higher accuracy, flexibility and stability in the future, further promoting its application in high-end science, semiconductors, military and other fields.
[0003] Phase modulation (PM) is a modulation technique in which the phase of the carrier changes with the modulation signal. The basic principle of phase modulation is to use the modulation signal to control the phase of the carrier so that it changes with the regularity of the modulation signal. The phase modulated signal can be a sine wave, a periodic pulse sequence, etc. The main purpose of phase modulation is to carry information by changing the phase of the carrier, thereby realizing signal transmission. At present, the phase modulation technology of multiple RF power supplies has made certain progress, but it still faces some challenges. The realization of high-precision phase control: It is necessary to further improve the control accuracy in hardware and algorithms, especially in high-frequency and high-power applications; real-time monitoring and correction of phase error: In complex systems, real-time monitoring and correction of phase error is still a technical problem; system synchronization and stability: When multiple RF power supplies work together, ensuring the synchronization and stability of the system still requires more efficient control strategies.
[0004] Currently, in phase modulation, a hardware phase-locked loop is used to control the frequency and phase of the oscillation signal inside the loop through an external reference signal, so as to achieve automatic tracking of the output signal frequency to the input signal frequency. The phase-locked loop can be used to generate an oscillation signal synchronized with the input signal to ensure that the phase of the output signal is consistent with the phase of the input signal. However, the current phase-locked loop method relies on hardware implementation and requires an external reference signal source. The same reference signal source will be attenuated in multiple devices, which may affect the maximum output power later. Summary of the invention
[0005] In view of the defects in the prior art, the present invention provides a phase modulation method and system for a combination of multiple RF power supplies to solve the problem that the current phase modulation based on a phase-locked loop causes complex hardware; at the same time, a reference signal source must be provided externally, which affects the maximum output power.
[0006] In a first aspect, the present invention provides a phase modulation method for a combination of multiple radio frequency power supplies, comprising: S1. Taking the first RF power source as the benchmark, according to the output angle of each RF power source , get the offset start time of each RF power supply and the first RF power supply ; S2. Based on the VI sensor, the AD collects digital data of V and I to obtain the actual phase angle ; S3. According to the actual phase angle Get the phase difference between each RF power source and the first RF power source ; S4. According to the phase difference , perform incremental PID calculation to obtain ; S5. For each RF power supply Make fine-tuning of the time.
[0007] It can be seen from the above technical scheme that the phase modulation method of a combination of multiple RF power supplies provided by the present invention can realize phase modulation without a hardware modulation phase-locked loop, thereby reducing the difficulty of hardware implementation and alleviating the complexity of the hardware circuit; at the same time, no external reference signal source is required, the maximum output power is not affected, the synchronization and stability of the system are improved, and the phase difference of each device can be monitored in real time and feedback can be given in a timely manner.
[0008] Optionally, before step S1, the method further includes: S601. Control the host at the same time interval Send data frames multiple times, and each RF power supply calculates the time offset , upload to the control host; , is the local time of the RF power source; S602. Obtain each RF power supply and The time difference between ; S603. Control each DDS signal generator i to The corresponding RF power supply is used as the reference, and the interval time difference Turn on the computer.
[0009] Optionally, in step S1, the offset start time , is the difference between the set output angle of each RF power source and the set output angle of the first RF power source, is the offset time per angle, , is the operating frequency of the RF power supply.
[0010] Optionally, in step S2, the voltage signal of the RF power supply detected by the VI sensor ,in The obtained arctan (imaginary part / real part) is the actual radian angle during DFT. , the actual phase angle is .
[0011] Optionally, in step S4, incremental PID calculation is performed to obtain , specifically: , in is the calculation result of the mth processing, For the processing cycle, is the error parameter, is the integration parameter, is the differential parameter.
[0012] In a second aspect, the present invention provides a system for combining multiple radio frequency power supplies, which performs phase modulation on the radio frequency power supplies according to the method described in any possible implementation of the first aspect, including: Control host, i.e. ECAT master station; Multiple radio frequency power supplies, the radio frequency power supply includes an ESC controller, an RF radio frequency power supply controller, a VI sensor, and a PA amplifier module, The ESC controller, i.e., the ECAT slave station, is used to realize data exchange between the RF power supply and the control host, and between the RF power supplies; The RF power supply controller is used to monitor the parameters of the RF power supply and control signal generation; The VI sensor is used to monitor the voltage and current of the RF power supply; The PA amplification module is used to amplify the low-power radio frequency signal to the required power.
[0013] By adopting the above technical solution, the present application has the following beneficial effects: The present invention can realize phase modulation without hardware modulation phase-locked loop, which reduces the difficulty of hardware implementation and alleviates the complexity of hardware circuit; at the same time, no external reference signal source is required, the maximum output power is not affected, the synchronization and stability of the system are improved, and the phase difference of each device can be monitored in real time and feedback can be given in time. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for the specific embodiments or the description of the prior art. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn according to the actual scale.
[0015] Figure 1 A flow chart of a phase modulation method of a combination of multiple radio frequency power supplies provided by an embodiment of the present invention is shown; Figure 2A structural block diagram of a multiple RF power supply combination system provided by an embodiment of the present invention is shown. DETAILED DESCRIPTION
[0016] The following embodiments of the technical solution of the present invention are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and are therefore only used as examples, and cannot be used to limit the protection scope of the present invention. It should be noted that, unless otherwise specified, the technical terms or scientific terms used in this application should have the common meanings understood by those skilled in the art to which the present invention belongs.
[0017] like Figure 1 As shown, a phase modulation method of a combination of multiple radio frequency power supplies is provided, comprising: Before this, the output port of the control host is connected to the input port of RF power controller 1; the output port of RF power controller is connected to the input port of RF power controller 2, and then to the input port of RF power controller n. Each RF power supply is powered on and water is supplied, and the control host is powered on.
[0018] S1. Taking the first RF power source as the benchmark, according to the set output angle of each RF power source , get the offset start time of each RF power supply and the first RF power supply .
[0019] Among them, in step S1, the offset start time , is the difference between the set output angle of each RF power source and the set output angle of the first RF power source, is the offset time per angle, , is the operating frequency of the RF power supply. According to the setting output angle of each RF power supply For example, the RF angle of the second RF power source differs by 30° from that of the first RF power source, the RF angle of the third RF power source differs by 50° from that of the first RF power source, and the RF angle of the fourth RF power source differs by 70° from that of the first RF power source. ; ; ; ; After the communication offset start time of each RF power supply ends, it is necessary to wait for the above time lengths in turn to start the DDS function.
[0020] S2. Based on the VI sensor, the AD collects digital data of V and I to obtain the actual phase angle .
[0021] In this step, the voltage signal and current signal detected by the VI sensor are in phase, and the timing of signal acquisition by each RF power source is consistent. Taking the voltage signal detected by the VI sensor as an example, the voltage signal of the RF power source detected by the VI sensor is specifically: ,in The obtained arctan (imaginary part / real part) is the actual radian angle during DFT. , the actual phase angle is .
[0022] S3. According to the actual phase angle Get the phase difference between each RF power source and the first RF power source .
[0023] S4. According to the phase difference , perform incremental PID calculation to obtain ; In step S4, the incremental PID calculation is performed to obtain , specifically: , in is the calculation result of the mth processing, For the processing cycle, is the error parameter, is the integration parameter, is the differential parameter.
[0024] S5. For each RF power supply Make fine-tuning of the time.
[0025] Also includes: PID adds a dead zone of 0.1%, which can greatly enhance the stability of the system.
[0026] In one embodiment, before step S1, the method further comprises: S601. Control the host at the same time interval Send data frames multiple times, and each RF power supply calculates the time offset , upload to the control host; , is the local time of the RF power source.
[0027] In this embodiment, It is 10ns, which is set and calculated by each RF power supply controller, and the time can be in the ps level.
[0028] S602. Obtain each RF power supply and The time difference between ; S603. Control each DDS signal generator i to The corresponding RF power supply is used as the reference, and the interval time difference Turn on the computer.
[0029] Based on steps S601-S603, the time required for all data in the bus synchronization frame can be obtained. Therefore, the longest bus device time is used as the benchmark, and the interval time difference is calculated. By processing the DDS signal generator, all RF power supplies will be on the same starting line, which can offset the startup time difference of each DDS signal generator.
[0030] In one embodiment, Figure 2 As shown, a system of combining multiple radio frequency power supplies is provided, and phase modulation of the radio frequency power supplies is performed according to the method provided in the above embodiment, including: Control host, namely ECAT master station; used to generate ECAT master station data frame and send it to multiple power supplies.
[0031] Multiple RF power supplies, including ESC controller, RF power controller, VI sensor, and PA amplifier module.
[0032] The ESC controller, also known as the ECAT slave, is used to realize data exchange between the RF power supply and the control host, and between each RF power supply. The ESC controller is the core component for realizing protocol communication, and is responsible for exchanging data with the master device as a slave device in the EtherCAT network. As a slave device, it not only supports data communication with the master device, but also performs real-time control tasks, such as receiving commands, controlling motors or other actuators, monitoring system status, etc. In this system, it is used for the transmission and reception of synchronization signals and drive frames.
[0033] The RF power controller is used to monitor the parameters of the RF power and control signal generation; the RF power controller and the ESC controller use the SYNC synchronous clock to synchronize the local clock difference, and obtain the communication clock loss of each device on the bus through the local clock difference of the master station.
[0034] The VI sensor is used to monitor the voltage and current of the RF power supply. The measured voltage and current signals are fed back to the ARM processor to achieve real-time adjustment and protection of the RF power supply output power, thereby ensuring the quality and stability of the RF signal. The VI sensor plays an important role in the normal operation and protection of RF equipment, and can provide more reliable and high-quality RF signal output.
[0035] The PA amplification module is used to amplify low-power RF signals to the required power.
[0036] The multiple RF power supply combination system provided in this embodiment and the phase modulation method of the multiple RF power supply combination described above adopt the same inventive concept and can achieve the same beneficial effects, which will not be described in detail here.
[0037] The above embodiments are only used to introduce the technical solutions of the present application in detail, but the description of the above embodiments is only used to help understand the methods of the embodiments of the present invention and should not be understood as limiting the embodiments of the present invention. Any changes or substitutions that can be easily thought of by those skilled in the art should be included in the protection scope of the embodiments of the present invention.
Claims
1. A phase modulation method for a combination of multiple radio frequency power sources, characterized in that: include: S1. Taking the first RF power source as the benchmark, according to the set output angle of each RF power source , get the offset start time of each RF power supply and the first RF power supply ; S2. Based on the VI sensor, the AD collects digital data of V and I to obtain the actual phase angle ; S3. According to the actual phase angle Get the phase difference between each RF power source and the first RF power source ; S4. According to the phase difference , perform incremental PID calculation to obtain ; S5. For each RF power supply Make fine-tuning of the time.
2. The method according to claim 1, characterized in that: Before step S1, the method further includes: S601. Control the host at the same time interval Send data frames multiple times, and each RF power supply calculates the time offset , upload to the control host; , is the local time of the RF power source; S602. Obtain each RF power supply and The time difference between ; S603. Control each DDS signal generator i to The corresponding RF power supply is used as the reference, and the interval time difference Turn on the computer.
3. The method according to claim 2, characterized in that In step S1, the offset start time , is the difference between the set output angle of each RF power source and the set output angle of the first RF power source, is the offset time per angle, , is the operating frequency of the RF power supply.
4. The method according to claim 3, characterized in that In step S2, the voltage signal of the RF power supply detected by the VI sensor ,in The obtained arctan (imaginary part / real part) is the actual radian angle during DFT. , the actual phase angle is .
5. The method according to claim 4, characterized in that In step S4, an incremental PID calculation is performed to obtain , specifically: ， in is the calculation result of the mth processing, For the processing cycle, is the error parameter, is the integration parameter, is the differential parameter.
6. A multiple radio frequency power supply combination system, characterized in that: Phase modulation of a radio frequency power source is performed according to the method of any one of claims 1 to 5, comprising: Control host, i.e. ECAT master station; Multiple radio frequency power supplies, the radio frequency power supply includes an ESC controller, an RF radio frequency power supply controller, a VI sensor and a PA amplifier module, The ESC controller, i.e., the ECAT slave station, is used to realize data exchange between the RF power supply and the control host, and between the RF power supplies; The RF power supply controller is used to monitor the parameters of the RF power supply and control signal generation; The VI sensor is used to monitor the voltage and current of the RF power supply; The PA amplification module is used to amplify the low-power radio frequency signal to the required power.