Chip manufacturing process control method, control system and computer readable storage medium

Abstract

The invention discloses a chip manufacturing process control method and system and a computer readable storage medium. The method comprises the steps that product data input into a chip and control parameters of a manufacturing process tool are acquired; determining product data of an output chip based on the product data of the input chip, the control parameters of the process tool and a preset virtual measurement model; determining first feedback information according to the product data of the output chip, and feeding the first feedback information forward to the previous production process, so that the previous production process adjusts production parameters based on the first feedback information; and / or second feedback information is determined according to the product data of the output chip, and the second feedback information is fed back to the subsequent production process, so that the production parameters are determined based on the second feedback information in the subsequent production process. Therefore, according to the method, the product data of the output chip in the production process is determined by adopting the virtual measurement system, real-time data feedback in the production process can be realized, and the control precision of the chip manufacturing process is greatly improved.

Description

Technical Field

[0001] The present application relates to the field of chip manufacturing technology, and in particular to a chip manufacturing process control method, a computer-readable storage medium, and a chip manufacturing process control system. Background Art

[0002] In order to ensure the quality of chip production, the process capability of the machine is usually monitored through chip control. In the related art, before the formal production of the chip, the machine is tested for chip control, and the process capability of the machine is evaluated through the test results of the chip control to determine whether the process of the machine meets the standard, and then the machine that meets the standard is used for chip production. However, this technical solution only controls the chip process based on the chip control detection results of offline testing, which is prone to data deviation and causes inaccurate automatic process control. Summary of the invention

[0003] The present application aims to solve at least one of the technical problems in the related art to a certain extent. To this end, the first purpose of the present application is to propose a control method for a chip manufacturing process, which uses a virtual measurement system to determine the product data of the output chip of the production process, and can realize real-time data feedback in the production process, thereby greatly improving the control accuracy of the chip manufacturing process.

[0004] A second object of the present application is to provide a computer-readable storage medium.

[0005] The third objective of this application is to provide a control system for chip manufacturing process.

[0006] To achieve the above-mentioned purpose, the first aspect embodiment of the present application proposes a chip process control method, which is applied to the current production process. The chip process control method includes: obtaining product data of the input chip and control parameters of the process tool, wherein the process tool is used for chip production; determining the product data of the output chip based on the product data of the input chip, the control parameters of the process tool and a preset virtual measurement model; determining first feedback information based on the product data of the output chip, and feeding the first feedback information forward to the previous production process, so that the previous production process adjusts the production parameters based on the first feedback information; and / or determining second feedback information based on the product data of the output chip, and feeding the second feedback information backward to the subsequent production process, so that the production parameters are determined in the subsequent production process based on the second feedback information.

[0007] According to the control method of the chip process of the embodiment of the present application, in the current production process, first obtain the product data of the input chip and the control parameters of the process tool, wherein the process tool is used for chip production; determine the product data of the output chip based on the product data of the input chip, the control parameters of the process tool and the preset virtual measurement model, and then determine the first feedback information based on the product data of the output chip, and feed the first feedback information forward to the previous production process, so that the production parameters are adjusted in the previous production process based on the first feedback information; and / or determine the second feedback information based on the product data of the output chip, and feed the second feedback information back to the subsequent production process, so that the production parameters are determined in the subsequent production process based on the second feedback information. Therefore, the method uses a virtual measurement system to determine the product data of the output chip of the production process, which can realize real-time data feedback in the production process, greatly improving the control accuracy of the chip process.

[0008] In addition, the chip process control method according to the above embodiment of the present application may also have the following additional technical features:

[0009] According to an embodiment of the present application, the chip process control method further includes: adjusting control parameters of a process tool of a current production process according to a data deviation between product data of an output chip and a target product threshold.

[0010] According to one embodiment of the present application, after adjusting the control parameters of the process tool according to the data deviation between the product data of the output chip and the target product threshold, the chip process control method also includes: determining the product data of the output chip based on the product data of the input chip, the adjusted control parameters of the process tool and a preset virtual measurement model; determining first feedback information according to the product data of the output chip, including: determining the first feedback information according to the product data of the output chip when the adjusted control parameters of the process tool reach the preset parameter threshold and the product data of the output chip does not reach the target product threshold.

[0011] According to one embodiment of the present application, the chip process control method also includes: obtaining offline chip monitoring data, online chip monitoring data, operation data of process tools, and operation data of monitoring sensors, wherein the monitoring sensors are used to obtain offline chip monitoring data and online chip monitoring data; training a preset virtual measurement model based on the offline chip monitoring data, online chip monitoring data, operation data of process tools, and operation data of monitoring sensors.

[0012] According to one embodiment of the present application, before training the preset virtual measurement model, the chip process control method also includes: determining the aging status of the detection tool corresponding to the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor; and performing data calibration on the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor based on the aging status of the corresponding detection tool.

[0013] According to one embodiment of the present application, before training the virtual measurement model, the chip process control method also includes: filtering data on calibrated offline chip monitoring data and calibrated online chip monitoring data; filtering data on calibrated process tool operation data and calibrated monitoring sensor operation data.

[0014] According to one embodiment of the present application, the chip process control method also includes: receiving second feedback information fed back from the previous production process, and determining the control parameters of the process tools of the current production process based on the second feedback information sent by the previous production process and the target product threshold of the current production process.

[0015] According to one embodiment of the present application, the chip process control method further includes: receiving first feedback information fed forward in a subsequent production process, and adjusting a target product threshold of a current production process based on the first feedback information fed back in the subsequent production process.

[0016] To achieve the above-mentioned purpose, the second embodiment of the present application proposes a computer-readable storage medium, on which a chip process control program is stored. When the chip process control program is executed by a processor, the above-mentioned chip process control method is implemented.

[0017] According to the computer-readable storage medium of the embodiment of the present application, the control method of the above-mentioned chip process is implemented when the control program of the chip process is executed by the processor. Based on the control method of the above-mentioned chip process, a virtual measurement system is used to determine the product data of the output chip of the production process, which can realize real-time data feedback in the production process, thereby greatly improving the control accuracy of the chip process.

[0018] To achieve the above-mentioned purpose, the third aspect embodiment of the present application proposes a control system for a chip process, which is applied to the current production process. The control system for the chip process includes: an acquisition module, which is used to acquire the product data of the input chip and the control parameters of the process tool, wherein the process tool is used for chip production; a determination module, which is used to determine the product data of the output chip based on the product data of the input chip, the control parameters of the process tool and the preset virtual measurement model; a control module, which is used to determine first feedback information based on the product data of the output chip, and feed forward the first feedback information to the previous production process, so that the previous production process adjusts the production parameters based on the first feedback information; and / or determine second feedback information based on the product data of the output chip, and feed back the second feedback information to the subsequent production process, so that the subsequent production process determines the production parameters based on the second feedback information.

[0019] According to the control system of the chip process of the embodiment of the present application, the product data of the input chip and the control parameters of the process tool are obtained through the acquisition module, wherein the process tool is used for chip production, and the product data of the output chip is determined by the determination module based on the product data of the input chip, the control parameters of the process tool and the preset virtual measurement model, and the control module determines the first feedback information according to the product data of the output chip, and feeds the first feedback information forward to the previous production process, so that the production parameters are adjusted in the previous production process based on the first feedback information; and / or determines the second feedback information according to the product data of the output chip, and feeds the second feedback information backward to the subsequent production process, so that the production parameters are determined in the subsequent production process based on the second feedback information. Therefore, the system uses a virtual measurement system to determine the product data of the output chip of the production process, which can realize real-time data feedback in the production process, greatly improving the control accuracy of the chip process.

[0020] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a flow chart of a method for controlling a chip process according to an embodiment of the present application;

[0022] Figure 2 A schematic diagram of a chip manufacturing process according to an embodiment of the present application;

[0023] Figure 3 A schematic diagram of a chip manufacturing process according to a specific embodiment of the present application;

[0024] Figure 4 It is a flowchart of a chip process control method according to a specific embodiment of the present application; Figure 5Schematic diagram of the connection of a control system for a chip process according to an embodiment of the present application. DETAILED DESCRIPTION

[0025] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limiting the present application.

[0026] The following describes the chip process control method, computer-readable storage medium and chip process control system proposed in the embodiments of the present application with reference to the accompanying drawings.

[0027] Figure 1 Flow chart of a chip process control method according to an embodiment of the present application.

[0028] like Figure 1 As shown, the chip process control method of the embodiment of the present application is applied to the current production process, and the chip process control method may include:

[0029] S1, obtaining product data of an input chip and control parameters of a process tool, wherein the process tool is used for chip production;

[0030] S2, determining the product data of the output chip based on the product data of the input chip, the control parameters of the process tool and the preset virtual measurement model;

[0031] S3, determining first feedback information according to the product data of the output chip, and feeding the first feedback information forward to the previous production process, so that the previous production process adjusts the production parameters based on the first feedback information; and / or determining second feedback information according to the product data of the output chip, and feeding the second feedback information backward to the subsequent production process, so that the subsequent production process determines the production parameters based on the second feedback information.

[0032] Specifically, the chip product data may include the size information, material information, etc. of the input product, without specific limitation. At least one process tool is provided in each production process, and the input chip is processed accordingly by controlling the process tool to produce the output chip.

[0033] The preset virtual measurement model corresponds to the production process to which it outputs. The collected relevant parameters, such as the sensor parameters of the equipment, are used to obtain the corresponding preset virtual measurement model through AI (Artificial Intelligence) modeling, so as to predict the measurement value without the need to perform actual measurements on the equipment. The preset virtual measurement model can be used to achieve real-time product quality prediction based on the product data of the input chip and the control parameters of the process, and obtain the product data of the output product of the corresponding production process. For example, the current production process is chemical mechanical polishing, and the product data of the output product is chip thickness. The preset virtual measurement model can determine the chip thickness of the production output, that is, the product data of the output chip, based on the chip thickness of the input product and the control parameters of the process tool.

[0034] The first feedback information and / or the second feedback information are generated based on the product data of the output chip output by the preset virtual measurement module. Specifically, the first feedback information and / or the second feedback information can be determined according to the product data of the output chip by performing data packaging, communication protocol conversion, conversion into target identification information, etc., so that the production status of the current production process can be understood according to the feedback information in the previous production process and / or the next production process, so as to make production adjustments in time. It can be understood that the chip production process includes multiple production processes, and the previous production process can be the previous production process relative to the current production process, or the previous n production processes. Similarly, the next production process can be the next production process relative to the current production process, or the next n production processes, without specific limitation.

[0035] For example, if Figure 2As shown, in the chip production process, the chip is sequentially subjected to production process A, production process B and production process C. Assuming that the current production process is production process B, then production process A is the previous production process and production process C is the subsequent production process. The preset virtual measurement system in production process B calculates the product data of the output chip according to the product data of the input chip and the control parameters of the process tool, so as to generate the first feedback information and the second feedback information according to the product data of the output chip, send the first feedback information to production process A, and send the second feedback information to production process C. If production process A is used for deposition, production process B is used for chemical mechanical polishing, and production process C is used for etching, production process B determines the thickness of the polished product based on the virtual measurement model B after chemical mechanical polishing, and feeds forward to production process A, so that production process A can correct the thickness of the deposited film, and feeds the thickness of the polished product back to production process C as the product data of the input product of production process C for adjusting the etching depth and thickness. In this way, less deposition, less polishing, and less etching not only make the process more accurate, but also reduce the cost of consumables, reduce the process time, and increase the output time. Among them, APC (Auto Process Control) can be used for data storage, processing and data exchange, and can optimize and control the production process based on the product data output by the preset measurement model and the received target data. RMS (Recipe Management System) is used to manage and control the recipes in factory equipment to ensure the consistency and accuracy of the recipes in the production process, thereby improving production quality and yield.

[0036] Therefore, this embodiment can determine the product data of the output chip in real time through the preset virtual measurement module of the production process, and generate feedback signals to the previous production process and / or the subsequent production process to adjust the overall parameters, thereby making the chip process control more accurate and improving the production speed and production accuracy.

[0037] In one embodiment of the present application, the chip process control method further includes: adjusting control parameters of a process tool of a current production process according to a data deviation between product data of an output chip and a target product threshold.

[0038] Specifically, the target product threshold corresponds to the product data, and the parameters can be set according to the actual situation, which is the parameter data that the chip produced by the current production process needs to meet. Continuing with the current production process as production process B, for chemical mechanical polishing as an example, it is assumed that the preset virtual measurement model B determines that the thickness of the output product after grinding is 98mm according to the product data of the input chip and the control parameters of the process tool, and the target product threshold is 95mm. Then adjust the control parameters of the process tool to increase the grinding so that the thickness of the final output product reaches 95mm to meet production needs. In addition, the adjustment of the control parameters of the process tool can be stepped based on the preset control strategy, or the preset control strategy can determine the final adjustment parameters according to the deviation between the product data of the output product and the target product threshold, without specific restrictions.

[0039] In one embodiment of the present application, after adjusting the control parameters of the process tool according to the data deviation between the product data of the output chip and the target product threshold, the chip process control method also includes: determining the product data of the output chip based on the product data of the input chip, the adjusted control parameters of the process tool and a preset virtual measurement model; determining first feedback information according to the product data of the output chip, including: when the adjusted control parameters of the process tool reach the preset parameter threshold and the product data of the output chip does not reach the target product threshold, determining the first feedback information according to the product data of the output chip.

[0040] Specifically, after the control parameters of the process tool are adjusted, the preset virtual measurement model determines the adjusted product data of the output chip according to the product data of the input chip and the adjusted control parameters of the process tool. If after the control parameters of the process tool are adjusted, the determined product data of the output product still deviates from the target product threshold, the control parameters of the process tool are adjusted based on the data deviation until the product data of the output chip determined by the preset virtual measurement model meets the target product threshold. In addition, in order to ensure the normal use of the process tool, the process tool is provided with a corresponding preset parameter threshold. When the control parameters of the adjusted process tool reach the preset parameter threshold, if the product data of the output chip still does not reach the target product threshold, it is determined that the current production process cannot meet the production demand based on the adjustment of the control parameters. At this time, the first feedback information is determined based on the product data of the output chip to assist the current production process in achieving its production target through the adjustment of the previous production process.

[0041] Continuing with the example of production process A being used for deposition and production process B being used for chemical mechanical polishing, the current production process is production process B, and the target product threshold of production process B is 95 mm. If the control parameters of the adjusted process tool reach the preset parameter threshold, the thickness of the output product is 96 mm, and a first feedback signal is sent to production process A. Production process A can lower the target thickness based on the first feedback signal to reduce the thickness to be ground by production process B.

[0042] In one embodiment of the present application, the chip process control method also includes: obtaining offline chip monitoring data, online chip monitoring data, process tool operation data, and monitoring sensor operation data, wherein the monitoring sensor is used to obtain offline chip monitoring data and online chip monitoring data; training a preset virtual measurement model according to the offline chip monitoring data, online chip monitoring data, process tool operation data, and monitoring sensor operation data.

[0043] Specifically, combined Figure 3 As shown, the offline chip monitoring data is the monitoring data obtained by offline testing of the control chip before the start of production, and the online chip monitoring data is the monitoring data obtained by detecting the processed chip during the production process. The operation data of the process tool can be obtained through the sensors set in the process tool, such as the operating torque, etc. The monitoring sensor is used to monitor the control chip and the processing chip to obtain offline chip monitoring data and online chip monitoring data. The preset virtual measurement model is trained by the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool and the operation data of the monitoring sensor, so that the trained preset virtual measurement model can be used to measure the product data of the output chip. Among them, FDC (Failure Detection Collection) identifies potential faults by regularly checking the key components and performance of the system, and SPC (Statistic Process Control) is a process control tool that uses mathematical statistics methods. The above data can be directly obtained based on FDC and SPC.

[0044] In one embodiment of the present application, before training the preset virtual measurement model, the chip process control method also includes: determining the aging status of the detection tool corresponding to the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor; and performing data calibration on the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor based on the aging status of the corresponding detection tool.

[0045] Specifically, the aging state can be determined according to the length of time the detection tool is used, and different aging states can correspond to different calibration adjustment coefficients or calibration parameters for data calibration. Offline chip monitoring data and online chip monitoring data can be calibrated according to the aging state of the monitoring sensor, the operation data of the process tool can be calibrated according to the aging state of the sensor in the process tool, and the operation data of the monitoring sensor can be calibrated according to the aging state of the sensor in the monitoring sensor, and then the calibrated data is used to train the preset virtual measurement model.

[0046] In one embodiment of the present application, before training the virtual measurement model, the chip process control method also includes: filtering data on calibrated offline chip monitoring data and calibrated online chip monitoring data; filtering data on calibrated process tool operation data and calibrated monitoring sensor operation data.

[0047] Specifically, the filtering conditions can be set according to the actual situation, and the calibrated offline chip monitoring data, the calibrated online chip monitoring data, the calibrated process tool operation data, and the calibrated monitoring sensor operation data can be filtered, and then used for the model training of the preset virtual measurement model. For example, the working status of the current production process can be determined, and the preset reasonable parameter range can be determined according to the working status, and the data outside the preset reasonable parameter range can be filtered; in addition, mutual calibration filtering between data can also be performed, and there is no specific limitation.

[0048] In one embodiment of the present application, the chip process control method also includes: receiving second feedback information fed back from a previous production process, and determining control parameters of a process tool of a current production process based on the second feedback information fed back from the previous production process and a target product threshold of the current production process.

[0049] Specifically, taking the current production process as production process B and the previous production process as production process A as an example, production process A is used for deposition, and production process B is used for chemical mechanical polishing. When production process B receives the second feedback information, the product thickness of the input chip is determined based on the second feedback information, and the target product thickness is determined. According to the data deviation between the product thickness of the input chip and the target product thickness, the polishing thickness is determined, thereby determining the control parameters of the process tool of production process B, so that the process tool of production process B completes the polishing of the corresponding thickness to meet the production requirements.

[0050] In one embodiment of the present application, the chip process control method further includes: receiving first feedback information fed forward in a subsequent production process, and adjusting a target product threshold of a current production process based on the first feedback information fed forward in the subsequent production process.

[0051] Specifically, taking the current production process as production process A and the subsequent production process as production process B as an example, production process A is used for deposition, and production process B is used for chemical mechanical polishing. When production process A receives the first feedback information, if it is determined based on the first feedback information that production process B cannot produce output chips that meet the target product based on the adjustment of control parameters, then the target product threshold of the production process A is adjusted according to the first feedback information. For example, production process B can only grind the chip to 96mm based on the adjustment of control parameters, and the target product threshold of production process B is 95mm, then production process A lowers its target product threshold by 1mm based on the first feedback information so that the grinding process meets the production requirements.

[0052] As a specific embodiment of the present application, Figure 2 As shown, the control method of the chip process may include the following steps:

[0053] S101, receiving first feedback information fed forward in a subsequent production process;

[0054] S102: Adjust the target product threshold based on the first feedback information.

[0055] S103, receiving second feedback information fed back from the previous production process.

[0056] S104, determining control parameters of the process tool based on the second feedback information and the target product threshold.

[0057] S105, obtaining product data of the input chip and control parameters of the process tool.

[0058] S106, determining chip data of the output chip based on the product data of the input chip, the control parameters of the process tool, and the preset virtual measurement model.

[0059] S107, determining first feedback information according to the product data of the output chip, and feeding the first feedback information forward to the previous production process, so that the previous production process can adjust the production parameters based on the first feedback information.

[0060] S108, determining second feedback information according to the product data of the output chip, and feeding the second feedback information back to a subsequent production process, so that the subsequent production process determines the adjustment of production parameters based on the second feedback information.

[0061] S109, adjusting the control parameters of the process tool of the current production process according to the data deviation between the product data of the output chip and the target product threshold. Execute step S105.

[0062] S110, acquiring offline chip monitoring data, online chip monitoring data, operation data of process tools, and operation data of monitoring sensors.

[0063] S111, determining the aging status of the detection tool corresponding to the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor.

[0064] S112, calibrating the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor based on the aging status of the corresponding detection tool.

[0065] S113, filtering the calibrated offline chip monitoring data, online chip monitoring data, process tool operation data, and monitoring sensor operation data.

[0066] S114, training a preset virtual measurement model according to the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool and the operation data of the monitoring sensor. Execute step S105.

[0067] Therefore, the control method of the chip process adopts an advanced virtual measurement system to provide real-time prediction data for precise adjustment of the automatic process control system, and provides fast and effective data to relevant upstream and downstream process sites based on process integration requirements so that the automatic process control system can make precise adjustments and timely correct process parameters for the next chip. At the same time, the statistical process control and fault detection collected data are used for retraining of the artificial intelligence computing system to provide more accurate parameter data and information, which solves the technical problems of excessive prediction data errors in the automatic process control methods in related technologies, resulting in inaccurate automatic process control, and some of them are only calculated based on SPC data without real-time data, and deviations are caused by insufficient sampling measurement data.

[0068] In summary, according to the control method of the chip process of the embodiment of the present application, in the current production process, first obtain the product data of the input chip and the control parameters of the process tool, wherein the process tool is used for chip production; determine the product data of the output chip based on the product data of the input chip, the control parameters of the process tool and the preset virtual measurement model, and then determine the first feedback information based on the product data of the output chip, and feed the first feedback information forward to the previous production process, so that the production parameters are adjusted in the previous production process based on the first feedback information; and / or determine the second feedback information based on the product data of the output chip, and feed the second feedback information back to the subsequent production process, so that the production parameters are determined in the subsequent production process based on the second feedback information. Therefore, the method uses a virtual measurement system to determine the product data of the output chip of the production process, which can realize real-time data feedback in the production process, greatly improving the control accuracy of the chip process.

[0069] Corresponding to the above embodiments, the present application also proposes a computer-readable storage medium.

[0070] The computer-readable storage medium of the embodiment of the present application stores a chip process control program thereon, and when the chip process control program is executed by a processor, the above-mentioned chip process control method is implemented.

[0071] According to the computer-readable storage medium of the embodiment of the present application, the control method of the above-mentioned chip process is implemented when the control program of the chip process is executed by the processor. Based on the control method of the above-mentioned chip process, a virtual measurement system is used to determine the product data of the output chip of the production process, which can realize real-time data feedback in the production process, thereby greatly improving the control accuracy of the chip process.

[0072] Corresponding to the above embodiments, the present application also proposes a control system for chip manufacturing process.

[0073] like Figure 5 As shown, the chip process control system of the embodiment of the present application is applied to the current production process, and the chip process control system may include: an acquisition module 10, a determination module 20 and a control module 30.

[0074] The acquisition module 10 is used to acquire the product data of the input chip and the control parameters of the process tool, wherein the process tool is used for chip production. The determination module 20 is used to determine the product data of the output chip based on the product data of the input chip, the control parameters of the process tool and the preset virtual measurement model. The control module 30 is used to determine the first feedback information according to the product data of the output chip, and feed the first feedback information forward to the previous production process, so that the production parameters are adjusted in the previous production process based on the first feedback information; and / or determine the second feedback information according to the product data of the output chip, and feed the second feedback information backward to the subsequent production process, so that the production parameters are determined in the subsequent production process based on the second feedback information.

[0075] According to an embodiment of the present application, the control module 30 is further used to adjust the control parameters of the process tool of the current production process according to the data deviation between the product data of the output chip and the target product threshold.

[0076] According to one embodiment of the present application, after adjusting the control parameters of the process tool according to the data deviation between the product data of the output chip and the target product threshold, the control module 30 is also used to: determine the product data of the output chip based on the product data of the input chip, the adjusted control parameters of the process tool and the preset virtual measurement model; determine the first feedback information according to the product data of the output chip, including: when the adjusted control parameters of the process tool reach the preset parameter threshold and the product data of the output chip does not reach the target product threshold, determine the first feedback information according to the product data of the output chip.

[0077] According to one embodiment of the present application, the acquisition module 10 is also used to: acquire offline chip monitoring data, online chip monitoring data, operation data of process tools, and operation data of monitoring sensors, wherein the monitoring sensors are used to acquire offline chip monitoring data and online chip monitoring data; the chip process control device also includes a training module, and the training module is used to train a preset virtual measurement model according to the offline chip monitoring data, online chip monitoring data, operation data of process tools, and operation data of monitoring sensors.

[0078] According to one embodiment of the present application, the control device of the chip process also includes a data processing module, which is used to determine the aging status of the detection tool corresponding to the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor before training the preset virtual measurement model; and perform data calibration on the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor based on the aging status of the corresponding detection tool.

[0079] According to one embodiment of the present application, before training the virtual measurement model, the data processing module is also used to: filter the calibrated offline chip monitoring data and the calibrated online chip monitoring data; filter the calibrated process tool operation data and the calibrated monitoring sensor operation data.

[0080] According to one embodiment of the present application, the control module 30 is also used to: receive second feedback information fed back from the previous production process, and determine the control parameters of the process tools of the current production process based on the second feedback information fed back from the previous production process and the target product threshold of the current production process.

[0081] According to one embodiment of the present application, the control module 30 is further configured to: receive first feedback information fed forward in a subsequent production process, and adjust a target product threshold of a current production process based on the first feedback information fed back in the subsequent production process.

[0082] It should be noted that for details not disclosed in the control system of the chip process of the embodiment of the present application, please refer to the details disclosed in the control method of the chip process of the above embodiment of the present application, and the details will not be repeated here.

[0083] According to the control system of the chip process of the embodiment of the present application, the product data of the input chip and the control parameters of the process tool are obtained through the acquisition module, wherein the process tool is used for chip production, and the product data of the output chip is determined by the determination module based on the product data of the input chip, the control parameters of the process tool and the preset virtual measurement model, and the control module determines the first feedback information according to the product data of the output chip, and feeds the first feedback information forward to the previous production process, so that the production parameters are adjusted in the previous production process based on the first feedback information; and / or determines the second feedback information according to the product data of the output chip, and feeds the second feedback information backward to the subsequent production process, so that the production parameters are determined in the subsequent production process based on the second feedback information. Therefore, the system uses a virtual measurement system to determine the product data of the output chip of the production process, which can realize real-time data feedback in the production process, greatly improving the control accuracy of the chip process.

[0084] It should be noted that the logic and / or steps represented in the flowchart or otherwise described herein, for example, can be considered as a sequenced list of executable instructions for implementing logical functions, and can be specifically implemented in any computer-readable medium for use by an instruction execution system, device or apparatus (such as a computer-based system, a system including a processor, or other system that can fetch instructions from an instruction execution system, device or apparatus and execute instructions), or in combination with these instruction execution systems, devices or apparatuses. For the purposes of this specification, "computer-readable medium" can be any device that can contain, store, communicate, propagate or transmit a program for use by an instruction execution system, device or apparatus, or in combination with these instruction execution systems, devices or apparatuses. More specific examples of computer-readable media (a non-exhaustive list) include the following: an electrical connection portion with one or more wirings (electronic device), a portable computer disk box (magnetic device), a random access memory (RAM), a read-only memory (ROM), an erasable and programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disk read-only memory (CDROM). In addition, the computer-readable medium may even be paper or other suitable medium on which the program is printed, since the program may be obtained electronically, for example, by optically scanning the paper or other medium and then editing, interpreting or processing in other suitable ways if necessary, and then stored in a computer memory.

[0085] It should be understood that the various parts of the present application can be implemented by hardware, software, firmware or a combination thereof. In the above-mentioned embodiments, multiple steps or methods can be implemented by software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented by hardware, as in another embodiment, it can be implemented by any one of the following technologies known in the art or their combination: a discrete logic circuit having a logic gate circuit for implementing a logic function for a data signal, a dedicated integrated circuit having a suitable combination of logic gate circuits, a programmable gate array (PGA), a field programmable gate array (FPGA), etc.

[0086] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0087] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0088] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0089] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A chip process control method, characterized in that: Applied to the current production process, the method comprises: Acquiring product data of an input chip and control parameters of a process tool, wherein the process tool is used for chip production; Determine the product data of the output chip based on the product data of the input chip, the control parameters of the process tool and the preset virtual measurement model; Determining first feedback information according to the product data of the output chip, and feeding the first feedback information forward to a previous production process, so that the previous production process adjusts production parameters based on the first feedback information; and / or Second feedback information is determined according to the product data of the output chip, and the second feedback information is fed back to a subsequent production process so that the subsequent production process determines a production parameter based on the second feedback information.

2. The chip process control method according to claim 1, characterized in that: The method further comprises: The control parameters of the process tool of the current production process are adjusted according to the data deviation between the product data of the output chip and the target product threshold.

3. The chip process control method according to claim 2, characterized in that: After adjusting the control parameters of the process tool according to the data deviation between the product data of the output chip and the target product threshold, the method further includes: Determine the product data of the output chip based on the product data of the input chip, the adjusted control parameters of the process tool and the preset virtual measurement model; The determining the first feedback information according to the product data of the output chip includes: When the adjusted control parameter of the process tool reaches a preset parameter threshold and the product data of the output chip does not reach the target product threshold, the first feedback information is determined according to the product data of the output chip.

4. The chip process control method according to claim 1, characterized in that: The method further comprises: Acquire offline chip monitoring data, online chip monitoring data, operation data of the process tool, and operation data of the monitoring sensor, wherein the monitoring sensor is used to acquire the offline chip monitoring data and the online chip monitoring data; The preset virtual measurement model is trained according to the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool and the operation data of the monitoring sensor.

5. The chip process control method according to claim 4, characterized in that: Before training the preset virtual measurement model, the method further includes: Determine an aging state of a detection tool corresponding to the offline chip monitoring data, the online chip monitoring data, the operation data of the process tool, and the operation data of the monitoring sensor; The offline chip monitoring data, the online chip monitoring data, the operation data of the process tool and the operation data of the monitoring sensor are calibrated based on the aging status of the corresponding detection tool.

6. The chip process control method according to claim 5, characterized in that: Before training the virtual measurement model, the method further includes: Performing data filtering on the calibrated offline chip monitoring data and the calibrated online chip monitoring data; Data filtering is performed on the calibrated operating data of the process tool and the calibrated operating data of the monitoring sensor.

7. The chip process control method according to any one of claims 1 to 6, characterized in that: The method further comprises: Second feedback information fed back from a previous production process is received, and control parameters of a process tool of the current production process are determined based on the second feedback information fed back from the previous production process and a target product threshold of the current production process.

8. The chip process control method according to any one of claims 1 to 6, characterized in that: The method further comprises: First feedback information fed forward from a subsequent production process is received, and a target product threshold of the current production process is adjusted based on the first feedback information fed back from the subsequent production process.

9. A computer-readable storage medium, characterized in that: A chip process control program is stored thereon, and when the chip process control program is executed by a processor, a chip process control method according to any one of claims 1-8 is implemented.

10. A chip manufacturing process control system, characterized in that: Applied to the current production process, the system includes: An acquisition module, used to acquire product data of an input chip and control parameters of a process tool, wherein the process tool is used for chip production; A determination module, configured to determine the product data of the output chip based on the product data of the input chip, the control parameters of the process tool, and a preset virtual measurement model; a control module, configured to determine first feedback information according to the product data of the output chip, and feed forward the first feedback information to a previous production process, so that the previous production process adjusts production parameters based on the first feedback information; and / or Second feedback information is determined according to the product data of the output chip, and the second feedback information is fed back to a subsequent production process so that the subsequent production process determines a production parameter based on the second feedback information.

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