Temperature control system and control method for semiconductor furnace tube equipment

Abstract

The invention discloses a temperature control system and method for semiconductor furnace tube equipment. The control system comprises a three-phase electric furnace transformer, a power regulator, a heating furnace body, a temperature controller, a programmable controller and an upper computer which are connected in sequence. The three-phase electric furnace transformer is used for continuously outputting secondary side voltage and current to the power regulator; the power regulator is used for regulating the output current from the secondary side of the transformer of the three-phase electric furnace by receiving a heating power output signal output by the temperature controller; the heating furnace body is used for heating the process products loaded in the heating furnace body; the temperature controller calculates the heating output power value of each temperature zone according to the internal and external thermocouple detection temperature values, and sends the heating output power values to the power regulator; and the upper computer is used for issuing the process menu target temperature parameters to the programmable controller. The device has the advantages of high temperature control precision, good stability and the like.

Description

Technical Field

[0001] The present invention mainly relates to the technical field of semiconductor furnace tubes, and in particular to a temperature control system and a control method for semiconductor furnace tube equipment. Background Art

[0002] Temperature is one of the most important equipment parameters and process parameters in semiconductor furnace tube equipment. Its stability, uniformity and repeatability are key factors to ensure the quality and speed of process product growth. The temperature control system of semiconductor furnace tube equipment includes heating furnace body, temperature controller, over-temperature protector, hardware heating protection interlocking circuit and other devices. The temperature control mode of the thermostat can be divided into single-loop temperature control, cascade temperature control and mixed temperature control mode. Furnace tube equipment is mostly used for chemical deposition reactions between various special gas materials and process products. The product reaction process often has high requirements for the furnace tube equipment to quickly reach the process target temperature from the initial process temperature and quickly stabilize at the process target temperature. Too slow furnace body temperature control rate will lead to too slow chemical reaction rate between process products and special gases, resulting in incomplete decomposition of the chemical components of the reactants, further leading to excessive product particles, poor uniformity and unqualified electrical performance indicators, directly affecting the product process effect and yield rate. Therefore, the temperature control system needs to be able to achieve high-precision and rapid temperature control inside the furnace tube to obtain the ideal temperature field of semiconductor furnace tube equipment.

[0003] Specifically, the furnace tube equipment needs to be precisely controlled to quickly heat up from the initial process temperature to the process target temperature to ensure that the process product and the special gas chemical reaction are complete, while also meeting the requirements for product particles, electrical properties and uniformity. The temperature control methods of semiconductor furnace tube equipment generally adopt single-loop temperature control, cascade temperature control and mixed temperature control mode; the single-loop temperature control method is used when the thermocouple fails. The single-loop temperature control method has a faster heating rate, but it takes a long time for the temperature to stabilize at the process target temperature; the mixed temperature control mode can be used throughout the temperature control process, but in most cases it is used to restore the furnace tube temperature after the boat is raised. The mixed temperature control mode also has the problem of a long time required for the temperature to stabilize at the process target temperature; the cascade temperature control mode is generally suitable for the process heating process. During the cascade temperature control, the process temperature presents the characteristics of small temperature fluctuation and high temperature control accuracy, but it takes a long time from the initial process temperature to the process target temperature, making it difficult to achieve rapid temperature control of the equipment. Summary of the invention

[0004] In view of the technical problems existing in the prior art, the present invention provides a temperature control system and a control method for semiconductor furnace tube equipment with high temperature control accuracy and good stability.

[0005] In order to solve the above technical problems, the technical solution proposed by the present invention is:

[0006] A temperature control system for semiconductor furnace tube equipment, comprising a three-phase electric furnace transformer, a power regulator, a heating furnace body, a temperature controller, a programmable controller and a host computer; the three-phase electric furnace transformer, the power regulator, the heating furnace body, the temperature controller, the programmable controller and the host computer are connected in sequence; the temperature controller is also connected to the power regulator;

[0007] The three-phase electric furnace transformer is used to transform the primary side voltage and current through electromagnetic induction and continuously output the secondary side voltage and current to the power regulator;

[0008] The power regulator is used to adjust the output current from the secondary side of the three-phase electric furnace transformer by receiving the heating power output signal output by the temperature controller;

[0009] The heating furnace body is used to heat the process product loaded inside and feed back the internal and external thermocouple signals to the temperature controller;

[0010] The temperature controller is used to receive the internal and external thermocouple signals fed back by the heating furnace body, calculate the heating output power value of each temperature zone according to the temperature values ​​detected by the internal and external thermocouples, and then send the heating output power value to the power regulator;

[0011] The host computer is used to send the process menu target temperature parameters to the programmable controller and receive feedback values ​​from the programmable controller.

[0012] As a further improvement of the above technical solution:

[0013] It also includes a protection unit, which is located between the three-phase electric furnace transformer and the three-phase power supply; the protection unit includes a molded case circuit breaker, an AC contactor and a fuse; the molded case circuit breaker, the AC contactor and the fuse are connected in sequence.

[0014] It also includes an over-temperature alarm instrument, which is connected to the heating furnace body and the programmable controller respectively, and is used to cut off the furnace body heating circuit when each temperature zone exceeds the instrument set temperature.

[0015] The heating furnace body includes a heating unit and various thermocouple collection units. The heating unit is used to heat the process product loaded inside according to the process menu on the host computer, and to feed back the internal and external thermocouple output signals and over-temperature thermocouple signals to the temperature controller and over-temperature alarm instrument through the various thermocouple collection units.

[0016] The thermocouple collection unit comprises a thermocouple outside the furnace body and a thermocouple inside the furnace body.

[0017] The present invention also discloses a control method for a temperature control system for a semiconductor furnace tube device based on the above, comprising the steps of:

[0018] Obtain process target temperature, process initial temperature and process actual temperature;

[0019] The temperature proportionality coefficient is obtained according to the process target temperature, the process initial temperature and the process actual temperature;

[0020] The temperature proportionality coefficient is compared with a preset value. When the temperature proportionality coefficient is greater than the preset value, the mixed temperature control mode is used for temperature control; otherwise, the cascade temperature control mode is used for temperature control.

[0021] As a further improvement of the above technical solution:

[0022] The formula for obtaining the temperature proportionality coefficient k0 according to the process target temperature T0, the process initial temperature and the process actual temperature is:

[0023] k0 = (actual process temperature - initial process temperature) / (T0 - initial process temperature).

[0024] In the mixed temperature control mode, the proportional coefficient R of the mixed temperature control mode is adjusted in real time according to the temperature proportional coefficient k0; wherein the proportional coefficient R is proportional to the heating power.

[0025] The specific process of real-time adjustment of the proportional coefficient R according to the temperature proportional coefficient k0 is:

[0026] The proportional coefficient R and the temperature proportional coefficient k0 satisfy the following linear relationship: R = R0-1.25*k0;

[0027] The value of R0 is 1; the value range of k0 is [0, 0.8].

[0028] Compared with the prior art, the advantages of the present invention are:

[0029] The temperature control system of the present invention is suitable for a variety of semiconductor furnace tube equipment. By switching the ratio of the mixed temperature control mode and the cascade temperature control mode, the function of quickly heating the process product inside the furnace tube and quickly stabilizing it at the process target temperature can be achieved. It can meet the temperature field requirements for rapid reaction between the process product and different types of special gas chemical materials; the temperature control accuracy is high, the process target temperature fluctuation is small, and the stability is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a topological diagram of the temperature control system of the present invention in an embodiment.

[0031] Figure 2 It is a circuit diagram of a temperature control system in an embodiment of the present invention.

[0032] Figure 3 Schematic diagram of the temperature control mode of the present invention; (a) is the mixed temperature control mode; (b) is the cascade temperature control mode.

[0033] Figure 4 It is the temperature control signal principle diagram of the present invention.

[0034] Figure 5 It is the PLC program design diagram of the temperature control system of the present invention.

[0035] Figure 6 The figure is a flow chart of a temperature control method according to an embodiment of the present invention.

[0036] Legend: 1. Molded case circuit breaker; 2. AC contactor; 3. Fuse; 4. Three-phase electric furnace transformer; 5. Power regulator; 6. Heating furnace body; 601. Heating unit; 602. Thermocouple acquisition unit; 7. Temperature controller; 8. Programmable controller; 9. Host computer; 10. Over-temperature alarm instrument. DETAILED DESCRIPTION

[0037] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0038] like Figure 1 As shown, the temperature control system for semiconductor furnace tube equipment provided by the embodiment of the present invention includes a molded case circuit breaker 1, an AC contactor 2, a fuse 3, a three-phase electric furnace transformer 4, a power regulator 5, a heating furnace body 6, a temperature controller 7, a programmable controller 8, a host computer 9 and an over-temperature alarm instrument 10;

[0039] The molded case circuit breaker 1, the AC contactor 2, the fuse 3, the three-phase electric furnace transformer 4, the power regulator 5, the heating furnace body 6, the temperature controller 7, the programmable controller 8, and the host computer 9 are connected in sequence; the temperature controller 7 is also connected to the power regulator 5; the over-temperature alarm instrument 10 is respectively connected to the heating furnace body 6 and the programmable controller 8;

[0040] The molded case circuit breaker 1, the AC contactor 2 and the fuse 3 are used for the three-phase input current protection and control of the temperature control system; when the three-phase electric furnace transformer 4 and the heating furnace body 6 have current overload, the three-phase incoming line current can be disconnected in time to protect the key heating core components such as the three-phase electric furnace transformer 4 and the heating furnace body 6;

[0041] The three-phase electric furnace transformer 4 is a heating power source for heating the furnace body 6, which converts the primary side voltage and current through electromagnetic induction and continuously outputs the secondary side voltage and current to the power regulator 5;

[0042] The power regulator 5 is the input current control unit of the temperature control system. It accurately adjusts the output current from the secondary side of the three-phase electric furnace transformer 4 by receiving the 4-20mA heating power output signal output by the temperature controller 7;

[0043] The heating furnace body 6 includes a heating unit 601 and various thermocouple collection units 602. The heating furnace body heats the process product loaded inside according to the process menu on the upper computer human-machine interface 9, and feeds back the internal and external thermocouple output signals and the over-temperature thermocouple signals to the temperature controller 7 and the over-temperature alarm instrument 10 through the various thermocouple collection units 602;

[0044] The temperature controller 7 receives the internal and external thermocouple input signals fed back by the heating furnace body 6, quickly and accurately calculates the heating output power value of each temperature zone according to the temperature values ​​detected by the internal and external thermocouples, sends the heating power value to the power regulator 5 through a 4-20mA electrical signal, and exchanges temperature control system data with the programmable controller 8 through the TCP / IP communication protocol;

[0045] The programmable controller 8 and the host computer 9 are the core components of the temperature control system. The programmable controller 8, the host computer 9 and the temperature controller 7 all exchange data through the TCP / IP communication protocol; the host computer 9 sends the process menu target temperature and other parameters to the programmable controller 8, and the programmable controller 8 then transmits them to the temperature controller 7. At the same time, the temperature controller 7 feeds back the temperature and other values ​​to the programmable controller 8, and the programmable controller 8 then transmits the feedback value to the host computer human-machine interface 9;

[0046] The over-temperature alarm instrument 10 is used to detect the over-temperature situation in each temperature zone. If the temperature exceeds the set temperature of the instrument, the furnace heating circuit will be cut off immediately.

[0047] Specifically, Figure 2 The three-phase incoming currents of L1, L2 and L3 enter the A, B and C three-phase terminals of the primary side of the three-phase electric furnace transformer 4 through the molded case circuit breaker 1, the AC contactor 2 and the fuse 3 in turn. The secondary side induction currents outputted from the internal S1, S2, S3, S4 and S5 of the three-phase electric furnace transformer 4 are sequentially sent to the V1, V2, V3, V4 and V5 of the power regulator 5 after electromagnetic induction conversion. The thyristor controlled unit in the power regulator 5 outputs current to the furnace wire segments E1, E2, E3, E4 and E5 corresponding to each temperature zone of the heating furnace body 6. The thermocouple output signal 7 is connected to the temperature controller 7 and the over-temperature alarm instrument 10.

[0048] like Figure 3 As shown, Figure 3 (a) is the temperature control block diagram of the mixed temperature control mode. Figure 3 (b) is the temperature control block diagram of the cascade temperature control mode.

[0049] Figure 3 The mixed temperature control mode shown in (a) is a single-loop temperature control mode. The upper computer 9 sets the process target temperature value and transmits it to the temperature controller 7. The temperature control program inside the temperature controller 7 performs PID calculation and outputs the heating power value of each temperature zone to the power regulator 5. The power regulator 5 accurately controls the transformer 4 to output current to the heating furnace body 6.

[0050] in Figure 3 The coefficient R in (a) is the proportional coefficient of the internal thermocouple detection value of the mixed temperature control mode, and the value range of R is (0,1); the thermocouple detection temperature value inside the furnace body is k1, and the external thermocouple temperature detection value is k2. The product of k2 and (1-R) ​​and the product of k1 and R are added to obtain a new mixed value. This mixed value is compared with the process target temperature value (set temperature). The larger the difference between the two, the larger the heating output power value obtained by the PID calculation of the internal temperature control program of the temperature controller, and the faster the furnace heating rate. Conversely, the smaller the difference between the two, the smaller the heating power output value of the temperature controller and the slower the furnace heating rate.

[0051] The new mixed value is used to adjust the PID and other parameter variables inside the temperature controller in the form of negative feedback of the temperature control system, so that the furnace temperature is stabilized near the process target temperature.

[0052] Figure 3 In (b), when the cascade command is ON, the temperature is in cascade temperature control mode, the set temperature is used as the internal temperature set value, and the internal temperature PID control output is used as the external temperature set value after cascade calculation. The internal temperature and external temperature closed loops use the same control cycle to improve the response speed of the system. The cascade control mode is widely used in occasions with large object disturbance amplitude, nonlinearity, large capacity hysteresis, and interrelated parameters due to its strong anti-interference and self-adaptive capabilities.

[0053] Figure 4 It includes external thermocouple input signal X1, internal thermocouple input signal X2, over-temperature thermocouple signal X3, mixed temperature control mode proportional coefficient X4, temperature controller mixed temperature control mode X5, temperature controller cascade temperature control mode X6, temperature controller temperature control super loop X7, furnace temperature zone heating power output signal X8;

[0054] The external thermocouple input signal X1, the internal thermocouple input signal X2, and the over-temperature thermocouple signal X3 are thermocouple signals collected from the heating furnace body and transmitted to the temperature controller and the over-temperature alarm instrument.

[0055] The upper computer 9 writes the proportional coefficient of the process menu into the proportional coefficient X4 of the mixed temperature control mode, and the proportional coefficient X4 of the mixed temperature control mode is written into the mixed temperature control mode X5 of the temperature controller through the temperature control program. The mixed temperature control mode X5 of the temperature controller 7 outputs the mixed value detected by the internal and external thermocouples to the slave loop program of the temperature control super loop X7;

[0056] The internal thermocouple input signal X2 feeds back the internal temperature value of each temperature zone to the temperature controller cascade temperature control mode X6, and the temperature controller cascade temperature control mode X6 outputs the temperature detection value to the main loop program of the temperature controller temperature control super loop X7 through the temperature control program. The temperature control program module of the temperature controller temperature control super loop X7 receives the values ​​of the temperature controller mixed temperature control mode X5 and the temperature controller cascade temperature control mode X6, and calculates and outputs the furnace temperature zone heating power output signal X8 through the internal mixed temperature control mode or cascade temperature control mode temperature control.

[0057] The furnace temperature zone heating power output signal X8 is transmitted to the power regulator 5 to further control the furnace heating current.

[0058] like Figure 5 As shown, PLC programming includes four parts: initializing the communication protocol, forming a communication request, preparing data to initiate communication, and processing after the communication ends.

[0059] First, access the PLC internal register address, register quantity, data length, etc. by initializing the communication protocol; at the same time, set the corresponding communication request through the upper computer human-machine interface;

[0060] When the communication is idle, the communication request with the highest priority is selected in order, and the upper computer human-machine interface prepares the corresponding communication data of the process menu and initiates communication with the temperature controller;

[0061] Finally, when the communication ends abnormally, the upper computer human-machine interface resets the communication request; if the number of retries is greater than 3 times, the upper computer human-machine interface prompts an error; when the communication ends normally, the corresponding temperature control data processing is performed according to the TCP / IP communication protocol.

[0062] like Figure 6 As shown, an embodiment of the present invention further provides a control method for a temperature control system for a semiconductor furnace tube device based on the above-mentioned method, including setting of internal and external temperature PID parameters, writing of a mixed temperature control mode proportional coefficient R, changing of a cascade temperature control mode and a constant temperature zone debugging part.

[0063] Based on the characteristics that the mixed temperature control mode has a fast heating rate but a long temperature stabilization time when reaching the target temperature, while the cascade temperature control mode has a short temperature stabilization time when reaching the target temperature but a slow heating rate, the temperature control mode adopts a method combining the mixed temperature control mode and the cascade temperature control mode for temperature control. In the same heating time, the mixed temperature control mode has a significant advantage over the cascade temperature control mode in terms of heating rate. In the stage where the difference between the initial process temperature and the process target temperature T0 is large, the mixed temperature control mode can quickly narrow the gap between the actual detection temperature and the process target temperature T0. When the difference between the actual detection temperature and the process target temperature T0 is small, the cascade temperature control mode can quickly control the actual detection temperature to stabilize near the process target temperature T0, and has good temperature control accuracy. Therefore, the method of first mixing the temperature control mode and then switching to the cascade temperature control mode is selected to control the temperature of the furnace body.

[0064] Through PID self-tuning or manual writing, the optimal PID parameters in the mixed temperature control mode and the cascade temperature control mode are determined to achieve better static stability performance for the internal and external temperatures. Considering that there are many types of semiconductor furnace tube equipment processes, and the initial temperature and process target temperature of various process menus are different, in order to meet the needs of semiconductor furnace tube equipment for various process temperatures, the switching between the mixed temperature control mode and the cascade temperature control mode is not based on a specific temperature value as the switching point, but the temperature proportional coefficient k0 is selected as the switching point. For the calculation of the temperature proportional coefficient k0, first determine the temperature difference T1 between the process target temperature T0 and the process initial temperature, and then calculate the temperature difference T2 between the actual detection temperature and the process initial temperature during the heating process. The ratio of T2 to T1 is the temperature proportional coefficient k0. The closer the value of the temperature proportional coefficient k0 is to 1, the closer the actual detected temperature in the hybrid temperature control mode is to the process target temperature T0. Taking into account that the temperature control inside the furnace body has a large hysteresis, the closer the temperature proportional coefficient k0 is to 1, the more likely it is that after switching to the cascade temperature control mode, the actual detected temperature will exceed the process target temperature T0, resulting in overshoot. In addition, it takes a long time for the furnace body temperature to cool down to the process target temperature T0 after overshoot. Therefore, the temperature proportional coefficient k0 takes a value of 0.8 when switching between the hybrid temperature control mode and the cascade temperature control mode.

[0065] In order to further improve the furnace heating rate, there are certain requirements for the proportional coefficient R in the mixed temperature control mode. When the proportional coefficient R is larger, the smaller the proportion of the external thermocouple detection value to the mixed value, the smaller the mixed value, and the greater the difference between the mixed value and the process target temperature T0, the greater the heating power output by the temperature controller, and the furnace heating rate is further improved.

[0066] The proportional coefficient R is a parameter that changes with the actual detected temperature, and the R value range is [0,1]. Considering that the temperature proportional coefficient k0 is also a parameter that changes with the actual detected temperature, and k0 can well reflect the degree to which the hybrid temperature control mode changes with the detected temperature, the value of the hybrid model proportional coefficient R is highly correlated with the temperature proportional coefficient k0. When the temperature proportional coefficient k0 is 0, the initial value R0 of the hybrid mode proportional coefficient is 1, and the hybrid mode proportional coefficient value R and the temperature proportional coefficient k0 satisfy the following linear relationship:

[0067] R=R0-1.25*k0

[0068] The value of R0 is 1, and the value range of k0 is [0, 0.8].

[0069] At the initial time t0 when the process target temperature T0 is issued by the process menu of the upper computer human-machine interface, the lower computer PLC program switches the temperature control mode of the temperature controller 7 to the mixed temperature control mode, and writes the proportional coefficient R0 in the mixed temperature control mode to the temperature controller 7. When the PLC lower computer program detects that the temperature proportional coefficient k0 is 0.8, it writes the last proportional coefficient R in the mixed temperature control mode to the temperature controller 7;

[0070] When the furnace temperature rises to time t1 (i.e., the temperature proportional coefficient k0 is 0.8), the lower computer PLC program switches the temperature controller temperature control mode to the cascade temperature control mode, so that the temperature of each temperature zone of the furnace can be quickly stabilized to the process target temperature T0.

[0071] Finally, by adjusting the set temperature of each temperature zone, the axial temperature field in the internal target section is kept constant (the standard deviation of the temperature at each axial point meets the requirements). Wait until time t2 to debug the constant temperature zone of the internal temperature zone of the furnace body.

[0072] The molded case circuit breaker 1, AC contactor 2, fuse 3 and over-temperature alarm instrument 10 of the present invention can constitute a safety interlocking circuit of the temperature control system, and the furnace heating circuit will be immediately cut off when current overload or over-temperature occurs in any temperature zone; the process menu of the host computer 9 can flexibly set different heating times, and the mixed temperature control mode or cascade temperature control mode of the temperature controller 7 can be switched by the programmable controller 8 to achieve rapid heating of the furnace; the process menu of the host computer 9 can flexibly set different mixed temperature control mode proportional coefficients, which are sent to the temperature controller 7 by the programmable controller 8 to ensure that the furnace heating rate reaches the fastest in the mixed temperature control mode; the entire temperature control system only needs to set important heating times and mixed temperature control mode proportional coefficients in the process menu of the host computer human-machine interface, and the operation method is convenient, and can accurately adapt to the temperature field requirements for rapid reactions between process products and different types of special gas chemical materials.

[0073] The temperature control system of the present invention is suitable for a variety of semiconductor furnace tube equipment. By switching the ratio of the mixed temperature control mode and the cascade temperature control mode, the function of quickly heating the process product inside the furnace tube and quickly stabilizing it at the process target temperature can be achieved. It can meet the temperature field requirements for rapid reaction between the process product and different types of special gas chemical materials; the temperature control accuracy is high, the process target temperature fluctuation is small, and the stability is good.

[0074] The above are only preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should be regarded as the protection scope of the present invention.

Claims

1. A temperature control system for semiconductor furnace tube equipment, characterized in that: The invention comprises a three-phase electric furnace transformer (4), a power regulator (5), a heating furnace body (6), a temperature controller (7), a programmable controller (8) and a host computer (9); the three-phase electric furnace transformer (4), the power regulator (5), the heating furnace body (6), the temperature controller (7), the programmable controller (8) and the host computer (9) are connected in sequence; the temperature controller (7) is also connected to the power regulator (5); The three-phase electric furnace transformer (4) is used to transform the primary side voltage and current through electromagnetic induction and continuously output the secondary side voltage and current to the power regulator (5); The power regulator (5) is used to adjust the output current from the secondary side of the three-phase electric furnace transformer (4) by receiving the heating power output signal output by the temperature controller (7); The heating furnace body (6) is used to heat the process product loaded inside and feed back the internal and external thermocouple signals to the temperature controller (7); The temperature controller (7) is used to receive the internal and external thermocouple signals fed back by the heating furnace (6), calculate the heating output power value of each temperature zone according to the temperature values ​​detected by the internal and external thermocouples, and then send the heating output power value to the power regulator (5); The host computer (9) is used to send the process menu target temperature parameters to the programmable controller (8) and receive feedback values ​​from the programmable controller (8).

2. The temperature control system for semiconductor furnace tube equipment according to claim 1, characterized in that: It also comprises a protection unit, which is located between a three-phase electric furnace transformer (4) and a three-phase power supply; the protection unit comprises a molded case circuit breaker (1), an AC contactor (2) and a fuse (3); the molded case circuit breaker (1), the AC contactor (2) and the fuse (3) are connected in sequence.

3. The temperature control system for semiconductor furnace tube equipment according to claim 1, characterized in that: It also includes an over-temperature alarm instrument (10), which is connected to the heating furnace body (6) and the programmable controller (8) respectively, and is used to cut off the furnace body heating circuit when the temperature in each temperature zone exceeds the instrument set temperature.

4. The temperature control system for semiconductor furnace tube equipment according to claim 1, 2 or 3, characterized in that: The heating furnace body (6) includes a heating unit (601) and various thermocouple acquisition units (602). The heating unit (601) is used to heat the process product loaded inside according to the process menu on the host computer (9), and to feed back internal and external thermocouple output signals and over-temperature thermocouple signals to the temperature controller (7) and the over-temperature alarm instrument (10) through the various thermocouple acquisition units (602).

5. The temperature control system for semiconductor furnace tube equipment according to claim 4, characterized in that: The thermocouple collection unit (602) comprises a thermocouple outside the furnace and a thermocouple inside the furnace.

6. A control method for a temperature control system for a semiconductor furnace tube device based on any one of claims 1 to 5, characterized in that: Includes steps: Obtain process target temperature, process initial temperature and process actual temperature; The temperature proportionality coefficient is obtained according to the process target temperature, the process initial temperature and the process actual temperature; The temperature proportionality coefficient is compared with a preset value. When the temperature proportionality coefficient is greater than the preset value, the mixed temperature control mode is used for temperature control; otherwise, the cascade temperature control mode is used for temperature control.

7. The control method according to claim 6, characterized in that: The formula for obtaining the temperature proportionality coefficient k0 according to the process target temperature T0, the process initial temperature and the process actual temperature is: k0 = (actual process temperature - initial process temperature) / (T0 - initial process temperature).

8. The control method according to claim 7, characterized in that: In the mixed temperature control mode, the proportional coefficient R of the mixed temperature control mode is adjusted in real time according to the temperature proportional coefficient k0; wherein the proportional coefficient R is proportional to the heating power.

9. The control method according to claim 8, characterized in that: The specific process of real-time adjustment of the proportional coefficient R according to the temperature proportional coefficient k0 is: The proportional coefficient R and the temperature proportional coefficient k0 satisfy the following linear relationship: R=R0-1.25*k0 The value of R0 is 1.

10. The control method according to claim 9, characterized in that: The value range of k0 is [0, 0.8].

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