X-ray fluorescence analyzer, water leakage management method for X-ray fluorescence analyzer, information storage medium, and program

Abstract

The purpose of the present invention is to reduce the degree of failure of a fluorescent X-ray analyzer in the event of water leakage by detecting water leakage in a spectroscopic chamber with high precision and quickly. This X-ray fluorescence analyzer is provided with: a high-voltage power source that applies a voltage to an electron beam source; an X-ray tube for irradiating a sample disposed in the spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a circulating water pump for conveying cooling water for cooling the target; a vacuum pump for discharging air in the spectroscopic chamber; a vacuum gauge for measuring the pressure of the spectroscopic chamber; and a control unit that, on the basis of both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, determines that the cooling water leaks into the inside of the spectroscopic chamber, and stops the operation of the circulating water pump.

Description

Technical Field

[0001] The present invention relates to a fluorescent X-ray analysis device, a water leakage management method for a fluorescent X-ray analysis device, an information storage medium and a program. Background Art

[0002] As an apparatus for analyzing elements contained in a sample, a fluorescent X-ray analyzer is known. The fluorescent X-ray analyzer irradiates the sample with primary X-rays and performs analysis based on the intensity and energy of the fluorescent X-rays emitted from the sample. When analyzing light elements, in order to avoid absorption of X-rays by air, the spectroscopic chamber is made vacuous for measurement. The fluorescent X-ray analyzer has an X-ray tube that generates primary X-rays. The target and anode of the X-ray tube generate heat when generating X-rays, so they are cooled using cooling water.

[0003] In the vicinity of the anode that is in constant contact with cooling water, damage occurs in the flow path due to wear or vibration, and cooling water may leak into the interior of the X-ray tube. The cooling water leaking into the X-ray tube passes through the relatively thin X-ray window of the X-ray tube and is sucked into the spectroscopic chamber in a vacuum state. At this time, if the fluorescent X-ray analysis device continues to operate, further damage may occur. Therefore, when a cooling water leak is detected, the operation of the device needs to be stopped quickly in order to reduce the extent of the failure.

[0004] For example, the following patent document 1 discloses a rotating cathode type X-ray generating device, which receives cooling water leakage with a tray, and when the specified water level is reached, the water detection sensor detects it, stops the electron beam for target irradiation, and issues a warning. The following patent document 2 discloses a method for determining whether a liquid-cooled electron tube has cooling water leakage based on changes in water pressure. The following patent document 3 discloses a method for detecting water leakage in an electromagnetic wave generating device by using a float-type switch device. The following patent document 4 discloses a method for manufacturing an X-ray tube that uses a flow sensor to detect cooling water leakage and stops the water supply. The following patent document 5 discloses an X-ray diffraction device having a safety device that stops the test when a cooling water leak of the X-ray tube is detected.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2-197098

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 7-235266

[0009] Patent Document 3: Japanese Patent Application Publication No. 2001-327855

[0010] Patent Document 4: Japanese Patent Application Laid-Open No. 9-167563

[0011] Patent Document 5: Japanese Patent Application Laid-Open No. 8-189907 Summary of the invention

[0012] Problems to be solved by the invention

[0013] If the sensor for detecting water leakage is arranged in the spectroscopic chamber, the size and position of other components arranged inside the spectroscopic chamber will be limited. In addition, depending on the size of the spectroscopic chamber, the sensor may not be arranged. In addition, depending on the type of sensor, water leakage may not be accurately detected. Moreover, depending on the position of the sensor, water leakage may not be detected at the early stage, and a certain amount of cooling water may leak into the spectroscopic chamber.

[0014] The present invention has been made in view of the above problems, and an object of the present invention is to provide a fluorescent X-ray analyzer that can detect water leakage inside a spectroscopic chamber with high accuracy and quickly, thereby reducing the extent of failure when water leakage occurs.

[0015] Technical solutions to solve problems

[0016] (1) An aspect of the present disclosure is characterized in that the fluorescent X-ray analysis device comprises: a high-voltage power supply that applies voltage to an electron beam source; an X-ray tube that irradiates a sample arranged in a spectroscopic chamber with a single X-ray generated by irradiating a target with an electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump that exhausts air from the spectroscopic chamber; a vacuum gauge that measures the pressure of the spectroscopic chamber; and a control unit that determines that the cooling water has leaked into the interior of the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and stops the operation of the circulating water pump.

[0017] (2) According to the above-mentioned fluorescent X-ray analysis device, the control unit is characterized in that when the pressure measured by the vacuum gauge is higher than a predetermined value and the voltage of the high voltage power supply applied to the electron beam source is lower than a predetermined value, the control unit determines that the cooling water is leaking.

[0018] (3) According to the above-mentioned X-ray fluorescence analysis apparatus, the control unit stops applying voltage to the electron beam source when determining that the cooling water has leaked.

[0019] (4) According to the above-mentioned X-ray fluorescence analysis device, the control unit stops the operation of the vacuum pump when it is determined that the cooling water has leaked.

[0020] (5) According to the above-mentioned X-ray fluorescence analysis device, when the control unit determines that the cooling water has leaked, the control unit introduces air into the spectroscopic chamber.

[0021] (6) The fluorescent X-ray analysis device described above is characterized in that it also has an information processing unit including a receiving unit for receiving user instructions and a display unit, and when the control unit or the information processing unit determines that there is a cooling water leak, the display unit displays that the cooling water may have leaked into the spectroscopic chamber, and when the receiving unit receives an instruction from the user to stop the operation of the circulating water pump, the control unit stops the operation of the circulating water pump.

[0022] (7) A method for managing water leakage in a fluorescent X-ray analysis device according to one aspect of the present disclosure is characterized in that the fluorescent X-ray analysis device comprises: a high-voltage power supply that applies voltage to an electron beam source; an X-ray tube that irradiates a sample arranged in a spectroscopic chamber with a single X-ray generated by irradiating a target with an electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump that exhausts air from the spectroscopic chamber; and a vacuum gauge that measures the pressure in the spectroscopic chamber, wherein the method for managing water leakage in a fluorescent X-ray analysis device comprises: a step of determining whether the cooling water has leaked into the interior of the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and a step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the interior of the spectroscopic chamber.

[0023] (8) An information storage medium according to one aspect of the present disclosure is a non-temporary computer-readable information storage medium storing a program executed by a computer used in a fluorescent X-ray analysis device, characterized in that the fluorescent X-ray analysis device comprises: a high-voltage power supply that applies voltage to an electron beam source; an X-ray tube that irradiates a sample arranged in a spectroscopic chamber with a single X-ray generated by irradiating a target with an electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump that exhausts air from the spectroscopic chamber; and a vacuum gauge that measures the pressure in the spectroscopic chamber, wherein the program causes the computer to execute: a step of determining whether the cooling water has leaked into the interior of the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and a step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the interior of the spectroscopic chamber.

[0024] (9) A program according to one aspect of the present disclosure is executed by a computer used in a fluorescent X-ray analysis device, characterized in that the fluorescent X-ray analysis device comprises: a high-voltage power supply that applies voltage to an electron beam source; an X-ray tube that irradiates a sample arranged in a spectroscopic chamber with a single X-ray generated by irradiating a target with an electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump that exhausts air from the spectroscopic chamber; and a vacuum gauge that measures the pressure in the spectroscopic chamber, wherein the program causes the computer to execute: a step of determining whether the cooling water has leaked into the interior of the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and a step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the interior of the spectroscopic chamber.

[0025] Effects of the Invention

[0026] According to the present invention, by detecting water leakage inside the spectroscopic chamber with high accuracy and promptly, the degree of failure of the fluorescent X-ray analysis device can be reduced when water leakage occurs. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a diagram schematically showing the overall structure of a fluorescent X-ray analyzer.

[0028] Figure 2 This is a diagram schematically showing the interior of the spectroscopic chamber.

[0029] Figure 3 This is a diagram schematically showing an X-ray tube.

[0030] Figure 4 This is a diagram schematically showing the overall configuration of the information processing unit.

[0031] Figure 5 It is a flow chart showing the water leakage management method.

[0032] Figure 6 This is a flow chart for determining whether there is a water leak. DETAILED DESCRIPTION

[0033] like Figure 1 As shown, there is a measuring unit 102, a circulating water pump 104, a vacuum pump 106, an information processing unit 108, and a high voltage power supply 110. The measuring unit 102 includes a preparation room 112, a vacuum gate 114, pressure relief valves 116A and 116B, a spectroscopic chamber 118, an X-ray tube 120, a vacuum gauge 122, and a control unit 124.

[0034] The preparation chamber 112 is a chamber for taking out and putting in the sample 202, and is also called a sample exchange system. The preparation chamber 112 is arranged adjacent to the spectroscopic chamber 118, and a vacuum gate 114 is arranged between the preparation chamber 112 and the spectroscopic chamber 118. The vacuum gate 114 is usually in a closed state, and is opened when the sample 202 is transported between the preparation chamber 112 and the spectroscopic chamber 118. The pressure relief valve 116A is a valve for introducing air into the preparation chamber 112. The pressure relief valve 116A is opened manually or by the control of the control unit 124.

[0035] The spectroscopic chamber 118 is a chamber for analyzing the sample 202. Specifically, Figure 2 As shown in (a), the spectroscopic chamber 118 is provided with a sample stage 204, an X-ray tube 120, a spectroscopic element 206, a detector 208, and a vacuum gauge 122. In addition, in the present embodiment, a part of the X-ray tube 120 (the periphery of the window portion that emits a single X-ray) and a part of the vacuum gauge 122 are located inside the spectroscopic chamber 118, and the other parts of the X-ray tube 120 and the vacuum gauge 122 are located outside the spectroscopic chamber 118. The pressure relief valve 116B is a valve for introducing air into the spectroscopic chamber 118. The pressure relief valve 116B is opened manually or by the control of the control unit 124.

[0036] The sample stage 204 is an xy stage, and a sample 202 as a measurement object is arranged. The primary X-ray generated by the X-ray tube 120 is irradiated onto the surface of the sample 202 as a measurement object. The spectroscopic element 206 spectrally separates the fluorescent X-rays of a predetermined wavelength emitted from the sample 202. The detector 208 is arranged at a position where the fluorescent X-rays spectrally separated by the spectroscopic element 206 are incident. The detector 208 is, for example, a proportional counter tube. The detector 208 measures the fluorescent X-rays and outputs a pulse signal. The counter (not shown) obtains the intensity of the fluorescent X-rays by counting the pulse signals output from the detector 208. The spectroscopic element 206 and the detector 208 can be set for each element to be analyzed, or a set of the spectroscopic element 206 and the detector 208 can be rotated and moved for measurement. In the case of rotating and moving a set of the spectroscopic element 206 and the detector 208, a mechanism (goniometer) for rotating and moving the spectroscopic element 206 and the detector 208 is arranged in the spectroscopic chamber.

[0037] also, Figure 2 The X-ray tube 120 shown in (a) irradiates X-rays from below the sample 202 to the lower surface of the sample 202. That is, Figure 2 (a) shows an example of the spectroscopic chamber 118 when the fluorescent X-ray analysis device 100 is a downward illumination type. Figure 2As shown in (b), the X-ray tube 120 may also irradiate the upper surface of the sample 202 with X-rays from above the sample 202, that is, the fluorescence X-ray analysis device 100 may also be a top-irradiation type. In addition, the present disclosure is particularly applicable to large-scale wavelength dispersion type fluorescence X-ray analysis devices in which high-power water-cooled X-ray tubes are often used. However, the present invention can of course also be applied to energy dispersion type fluorescence X-ray analysis devices.

[0038] The X-ray tube 120 applies a voltage to the electron beam source 302 , and irradiates the sample 202 disposed in the spectroscopic chamber 118 with primary X-rays generated by irradiating the target 304 with the generated electron beam. Figure 3 3 is a diagram schematically showing an X-ray tube 120 . The X-ray tube 120 includes an electron beam source 302 , a target 304 , an anode 306 , and a pipe 310 .

[0039] For example, when the X-ray tube 120 is a hot cathode type, the electron beam source 302 is a filament, and a negative voltage is applied by the high voltage power supply 110 to generate an electron beam. The target 304 is arranged in contact with the anode 306, and a pipe 310 for cooling water to flow is connected to the back of the anode 306. The anode 306 is formed of a material having high thermal conductivity. A positive voltage is applied to the anode 306 by the high voltage power supply 110, and the electron beam generated from the electron beam source 302 irradiates the target 304 to generate a primary X-ray. As the material of the target 304, a material that generates a primary X-ray with high excitation efficiency is appropriately selected according to the energy of the absorption end of the measured element. The electron beam source 302 and the target 304 are arranged inside a vacuum-evacuated housing (for example, a glass tube). The housing has an opening for extracting the primary X-ray, and an X-ray window 308 formed of a film formed of a material that transmits the primary X-ray is provided on the opening. The film is formed of beryllium, for example. Since most of the energy of the electron beam irradiated to the target 304 is converted into heat, the target 304 and the anode 306 become high temperatures during measurement. By flowing cooling water through the inside of the pipe 310, the target 304 and the anode 306 are cooled.

[0040] In addition, the electron beam source 302 is sometimes damaged due to wear and other reasons. In this case, even if the high-voltage power supply 110 applies a high voltage between the electron beam source 302 and the anode 306, a predetermined current (electron beam) cannot flow. In addition, when the vacuum degree is reduced due to air intrusion into the interior of the X-ray tube 120 or leakage of cooling water, discharge occurs inside the X-ray tube 120, and a predetermined high voltage cannot be applied. When a normal voltage is not applied between the electron beam source 302 and the anode 306, the high-voltage power supply 110 sends a voltage abnormality signal to the control unit 124. The voltage abnormality signal can also be sent from the high-voltage power supply 110 to the information processing unit 108, and the information processing unit 108 gives instructions to the control unit 124 described later.

[0041] The vacuum gauge 122 measures the pressure of the spectroscopic chamber 118. Specifically, for example, the vacuum gauge 122 is a thermal conductivity vacuum gauge such as a Pirani vacuum gauge. The vacuum gauge 122 measures the pressure of the spectroscopic chamber 118 and sends it to the control unit 124. The measured pressure is sent from the vacuum gauge 122 to the information processing unit 108, and the information processing unit 108 can instruct the control unit 124 (stop applying voltage to the electron beam source 302 described later, and give instructions to the circulating water pump 104, the vacuum pump 106, etc.). The vacuum gauge 122 can also be a vacuum gauge other than a thermal conductivity vacuum gauge as long as it can measure the pressure inside the spectroscopic chamber 118 (especially the pressure caused by water vapor). For example, the vacuum gauge 122 can be a U-shaped vacuum gauge, an elastic vacuum gauge, a McLaren vacuum gauge, a hot cathode ionization vacuum gauge, etc.

[0042] The control unit 124 controls the operation of each structure included in the measurement unit 102, the vacuum pump 106, and the circulating water pump 104 according to the instruction of the information processing unit 108. In addition, the control unit 124 controls the operation of the vacuum pump 106, the circulating water pump 104, and the pressure relief valves 116A and B when water leakage occurs according to the signal from the high-voltage power supply 110 and the vacuum gauge 122. Specifically, the control unit 124 stops the operation of the vacuum pump 106 when the sample 202 is taken out and placed in the preparation room 112, and operates the vacuum pump 106 before and during the measurement. In addition, the control unit 124 operates the circulating water pump 104 during the measurement, and stops the operation of the circulating water pump 104 when it is determined that there is a cooling water leak. In addition, the control unit 124 obtains the intensity of the fluorescent X-ray from the counter (not shown), and sends the intensity of the fluorescent X-ray to the information processing unit 108.

[0043] The circulating water pump 104 delivers cooling water for cooling the target 304. Specifically, the circulating water pump 104 has a cooling mechanism and has a function of cooling the water inside the circulating water pump 104. The circulating water pump 104 is connected to the pipe 310 of the X-ray tube 120 via a connecting pipe, and delivers cooled water to the X-ray tube 120. The cooling water sent from the circulating water pump 104 returns to the circulating water pump 104 via another connecting pipe. In this way, the circulating water pump 104 cools the water as a refrigerant while circulating the water between the X-ray tube 120 and the circulating water pump 104, thereby cooling the anode 306. In addition, the circulating water pump 104 may not have a cooling mechanism, and may be provided with a structure in which a cooling mechanism is separately provided outside the circulating water pump 104, or water is taken in from the outside without circulation.

[0044] The vacuum pump 106 exhausts the air in the preparation chamber 112 and the spectroscopic chamber 118. Specifically, the vacuum pump 106 is a pump that makes the chamber of a dry pump or a molecular pump or the like evacuate, and operates according to the instruction of the control unit 124. Figure 1In the embodiment, one vacuum pump 106 is connected to the preparation chamber 112 and the spectroscopic chamber 118, but it is preferable to provide a structure in which separate vacuum pumps 106 are provided.

[0045] The information processing unit 108 communicates with the control unit 124 and controls the transmission and reception of measurement data and the operation of each component connected to the control unit 124. Specifically, for example, Figure 4 As shown, the information processing unit 108 is a computer connected to the control unit 124 , and includes a calculation unit 402 , a storage unit 404 , a display unit 406 , an input / output unit 408 , and an internal bus 410 .

[0046] The calculation unit 402 is a CPU (Central Processing Unit) as a processor, and performs various calculations. For example, the calculation unit 402 executes various calculations related to the analysis of the sample 202 or measurement programs based on the intensity of the fluorescent X-rays obtained from the control unit 124.

[0047] The storage unit 404 is a non-temporary computer-readable information storage medium that stores programs executed by a computer used for the fluorescent X-ray analysis device 100. Specifically, for example, the storage unit 404 is a device that can statically store information such as RAM (Random Access Memory), HDD (Hard Disk Drive), SSD (Solid State Drive) as a memory. The storage unit 404 stores a program for managing water leakage. The program causes the computer to execute the following steps: a step of determining whether cooling water has leaked into the interior of the spectroscopic chamber 118 based on both the pressure measured by the vacuum gauge 122 and the voltage applied to the electron beam source 302, and a step of stopping the operation of the circulating water pump 104 when it is determined that cooling water has leaked into the interior of the spectroscopic chamber 118. The details of this step will be described later.

[0048] The display unit 406 is a so-called flat panel display such as a liquid crystal monitor, and displays an image. When the control unit 124 determines that the cooling water has leaked, the display unit 406 displays that there is a possibility that the cooling water has leaked into the spectroscopic chamber 118 .

[0049] The input / output unit 408 is one or more interfaces for the computer to exchange information with external devices, and is one or more devices for the user to input information, such as a keyboard, a mouse, a touch panel, etc. In addition, the input / output unit 408 may include various ports for wired connection and a controller for wireless connection. The input / output unit 408 obtains the intensity of the fluorescent X-ray incident on the detector 208 from the control unit 124. In addition, the input / output unit 408 also functions as a receiving unit that receives an instruction from the user to stop the operation of the circulating water pump 104.

[0050] The internal bus 410 connects the calculation unit 402 , the storage unit 404 , the display unit 406 , and the input / output unit 408 to each other.

[0051] The control unit 124 determines that the cooling water has leaked into the spectroscopic chamber 118 based on the pressure measured by the vacuum gauge 122 and the voltage applied to the electron beam source 302, and stops the operation of the circulating water pump 104. Specifically, for example, the control unit 124 determines that there is a cooling water leak when the pressure measured by the vacuum gauge 122 is higher than a specified value and the voltage applied to the electron beam source 302 is lower than a specified value. Then, when the control unit 124 determines that there is a cooling water leak, it stops applying the voltage to the electron beam source 302. In addition, when the control unit 124 determines that there is a cooling water leak, it stops the operation of the vacuum pump 106. Furthermore, when the control unit 124 determines that there is a cooling water leak, it introduces air into the spectroscopic chamber 118. In addition, Figure 1 In the embodiment, the high voltage power supply 110 stops the operation of the circulating water pump 104 and the vacuum pump 106 via the control unit 124 . However, the high voltage power supply 110 may directly instruct the circulating water pump 104 and the vacuum pump 106 without going through the control unit 124 .

[0052] Reference Figure 5 and Figure 6 The detailed functions of the control unit 124 are described in the flow of the water leakage management method shown in FIG. First, the sample 202 is placed on the sample stage 204 ( S502 ). Specifically, with the vacuum gate 114 closed, the user places the sample 202 in the preparation room 112 and hermetically seals the preparation room 112.

[0053] Next, the measurement is started (S504). Specifically, for example, the information processing unit 108 executes a program for measurement, and the program displays predetermined information related to the measurement on the display unit 406. The user inputs measurement conditions such as measurement time and performs measurement start operations on the input and output unit 408 such as a mouse and a keyboard. The information processing unit 108 instructs the control unit 124 to perform measurement according to the measurement conditions.

[0054] When the control unit 124 receives an instruction to start measurement, it controls the vacuum pump 106 to exhaust the air inside the preparation room 112. When the pressure in the preparation room 112 reaches a predetermined value or less, the control unit 124 opens the vacuum gate 114 and causes the transport device (not shown) to transport the sample 202 from the preparation room 112 to the sample stage 204 of the spectroscopic chamber 118. The control unit 124 notifies the high-voltage power supply 110 to start measurement, and the high-voltage power supply 110 applies voltage to the electron beam source 302 of the X-ray tube 120. The electron beam generated from the electron beam source 302 irradiates the target 304, and the primary X-ray is generated from the target 304. The generated primary X-ray is irradiated onto the sample 202 arranged in the spectroscopic chamber 118. In addition, the control unit 124 instructs the X-ray tube 120 to irradiate the primary X-ray, and instructs the circulating water pump 104 to transport cooling water to the X-ray tube 120. The circulating water pump 104 that receives the instruction circulates water between the X-ray tube 120 and the X-ray tube 120.

[0055] When the measurement starts, the execution is performed before the measurement ends to determine whether there is Figure 6 The water leakage process (S508) shown in FIG. Figure 6 The process shown can be compared with Figure 5 The illustrated flow may be repeatedly executed independently at regular intervals, or may be executed when the control unit 124 obtains a voltage abnormality signal.

[0056] When the control unit 124 obtains the voltage abnormality signal (S602), it is determined whether the pressure of the spectroscopic chamber 118 is higher than the specified value (S604). Then, when the pressure of the spectroscopic chamber 118 is higher than the specified value, it is determined that a water leak has occurred in the spectroscopic chamber 118 (S606). Specifically, when the pressure of the spectroscopic chamber 118 is greater than a specified absolute value (e.g., 1 Pa), it is determined that a water leak has occurred. In addition, it is also possible to determine that a water leak has occurred when the pressure of the spectroscopic chamber 118 exceeds a specified multiple (e.g., 1000 times) of the pressure during normal measurement.

[0057] In addition, when the normal voltage is not applied between the electron beam source 302 and the anode 306, the control unit 124 obtains a voltage abnormality signal from the high voltage power supply 110. In addition, the pressure measured by the vacuum gauge 122 is obtained by the control unit 124 at regular intervals. Since the information processing unit 108 and the control unit 124 can communicate with each other, any one of the information processing unit 108 and the control unit 124 can determine whether a water leak has occurred.

[0058] If it is not determined that there is a water leak in S508 and the predetermined time has passed in S506, the measurement is completed. When the measurement is completed, the analysis result is displayed on the display unit 406. On the other hand, if it is determined that there is a water leak in S508, the display unit 406 displays a warning indicating that there is a possibility that the cooling water has leaked into the spectroscopic chamber 118.

[0059] In response to the warning displayed on the display unit 406, the user inputs whether to stop or continue the measurement to the information processing unit 108. When the receiving unit receives an instruction to stop the measurement from the user, the control unit 124 stops the operation of the circulating water pump 104 (S514).

[0060] Furthermore, the control section 124 stops applying voltage to the electron beam source 302 (S516).

[0061] Then, the control unit 124 stops the operation of the vacuum pump 106. In addition, the control unit 124 opens the pressure relief valve 116B to introduce air into the spectroscopic chamber 118 (S518). At this time, the control unit 124 may open the pressure relief valve 116A to introduce air into the preparation chamber 112.

[0062] As described above, according to the present disclosure, it is determined whether a water leak has occurred using both the measured value of the vacuum gauge 122 and the voltage applied by the high-voltage power supply 110. When liquid water leaks into the vacuum spectroscopic chamber 118, the water evaporates and the pressure of the spectroscopic chamber 118 increases. If only the normal voltage is not applied to the electron beam source 302, various causes other than water leakage are envisioned as abnormalities occurring in the fluorescent X-ray analysis device 100. However, in most cases, the state in which the normal voltage is not applied to the electron beam source 302 and the vacuum degree of the spectroscopic chamber 118 is deteriorated is caused by water leakage into the spectroscopic chamber 118. Therefore, according to the present invention, it is possible to quickly and accurately determine whether a water leak has occurred without adding a sensor for detecting water leakage.

[0063] The present invention is not limited to the above-mentioned embodiment, and various modifications are possible. The structure of the above-mentioned fluorescent X-ray analysis device 100 is an example and is not limited thereto. It can also be replaced with a structure that is substantially the same as the structure shown in the above-mentioned embodiment, a structure that has the same effect, or a structure that achieves the same purpose.

[0064] For example, in Figure 1 In the embodiment, the functions of the control unit 124 can be included in the functions of the information processing unit 108. Figure 5 In the process, the steps of S510 and S512 can also be omitted. If a water leak is detected, the circulating water pump 104 is stopped immediately without human judgment. In addition, S514, S516 and S518 can also be arranged in different orders and can be replaced.

[0065] Description of Reference Numerals

[0066] 100 Fluorescent X-ray analysis device, 102 measuring unit, 104 circulating water pump, 106 vacuum pump, 108 information processing unit, 110 high voltage power supply, 112 preparation room, 114 vacuum gate, 116 pressure relief valve, 118 spectrometer, 120 X-ray tube, 122 vacuum gauge, 124 control unit, 202 sample, 204 sample stage, 206 collimator, 208 detector, 302 electron beam source, 304 target, 306 anode, 308 X-ray window, 310 piping, 402 operation unit, 404 storage unit, 406 display unit, 408 input / output unit, 410 internal bus.

Claims

1. A fluorescent X-ray analysis device, characterized in that: have: a high voltage power supply that applies voltage to the electron beam source; An X-ray tube that irradiates a sample disposed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump for exhausting the air from the spectroscopic chamber; a vacuum gauge for measuring the pressure of the spectroscopic chamber; and A control unit determines that the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and stops the operation of the circulating water pump.

2. The fluorescent X-ray analysis device according to claim 1, characterized in that: The control unit determines that the cooling water is leaking when the pressure measured by the vacuum gauge is higher than a predetermined value and the voltage of the high-voltage power supply applied to the electron beam source is lower than a predetermined value.

3. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The control unit stops applying voltage to the electron beam source when determining that the cooling water has leaked.

4. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The control unit stops the operation of the vacuum pump when it is determined that the cooling water has leaked.

5. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: The control unit introduces air into the spectroscopic chamber when it is determined that the cooling water has leaked.

6. The fluorescent X-ray analysis device according to claim 1 or 2, characterized in that: further comprising an information processing unit including a receiving unit for receiving instructions from a user and a display unit, When the control unit or the information processing unit determines that there is a cooling water leak, the display unit displays that there is a possibility that the cooling water has leaked into the spectroscopic chamber. The control unit stops the operation of the circulating water pump when the receiving unit receives an instruction from the user to stop the operation of the circulating water pump.

7. A method for managing water leakage of a fluorescent X-ray analysis device, characterized in that: The fluorescent X-ray analysis device comprises: a high voltage power supply that applies voltage to the electron beam source; An X-ray tube that irradiates a sample disposed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump for exhausting air from the spectroscopic chamber; and a vacuum gauge, which measures the pressure of the spectroscopic chamber, The water leakage management method of the fluorescent X-ray analysis device comprises: a step of determining whether the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high voltage power supply applied to the electron beam source; and A step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the spectroscopic chamber.

8. An information storage medium, which is a non-transitory computer-readable information storage medium storing a program executed by a computer used in a fluorescent X-ray analysis device, characterized in that: The fluorescent X-ray analysis device comprises: a high voltage power supply that applies voltage to the electron beam source; An X-ray tube that irradiates a sample disposed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump for exhausting air from the spectroscopic chamber; and a vacuum gauge for measuring the pressure of the spectroscopic chamber, The program causes the computer to execute: a step of determining whether the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high voltage power supply applied to the electron beam source; and A step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the spectroscopic chamber.

9. A program executed by a computer used in a fluorescent X-ray analysis device, characterized in that: The fluorescent X-ray analysis device comprises: a high voltage power supply that applies voltage to the electron beam source; An X-ray tube that irradiates a sample disposed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a circulating water pump that delivers cooling water for cooling the target; a vacuum pump for exhausting air from the spectroscopic chamber; and a vacuum gauge for measuring the pressure of the spectroscopic chamber, The program causes the computer to execute: a step of determining whether the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high voltage power supply applied to the electron beam source; and A step of stopping the operation of the circulating water pump when it is determined that the cooling water has leaked into the spectroscopic chamber.

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