Chemical cleaning liquid treatment circulating device in semiconductor grinding process

Abstract

The invention belongs to the technical field of water treatment, and discloses a semiconductor grinding process chemical cleaning liquid treatment circulating device which comprises a bottom plate. A filter assembly; a housing; a stirring assembly; an air inlet assembly; an air inlet assembly; and a water inlet assembly and an air floatation assembly. According to the invention, the air flotation assembly is installed, after an impeller is driven by compressed air to rotate, an annular motor is rotated clockwise, a circular plate is driven to rotate, when a second circular hole is overlapped with a plurality of first circular holes, the rotation is stopped, compressed bubbles can uniformly float upwards from the plurality of first circular holes, and a falling flocculant is buffered; flocculants with different liquid levels can be fully utilized, the problems that the flocculants are prone to agglomeration, low in utilization efficiency and difficult to quickly and uniformly mix with liquid are solved, meanwhile, the arc-shaped blades with the arc-shaped surface design can prevent too fast rotation and slow down the falling speed of the flocculants, and the problems that traditional equipment is intense in stirring and poor in stirring effect are solved. And a mixture formed by solid particles and a flocculating agent is easily scattered.

Description

Technical Field

[0001] The invention belongs to the technical field of sewage treatment, and in particular relates to a chemical cleaning liquid treatment circulation device for a semiconductor polishing process. Background Art

[0002] The semiconductor industry is an advanced industry that has attracted much attention in China's industrial development in recent years. It has a huge market and development potential. In the process of turning semiconductor wafers into terminal products with various functions, the wafers need to be ground and cut according to product requirements and set sizes. At the same time, the wafers need to be cleaned during the grinding and cutting process, which generates a large amount of grinding and cutting wastewater. The main pollutants in the grinding and cutting wastewater are suspended particles and cleaning agents. The characteristics of this type of wastewater are high concentration of suspended matter, light weight, extremely difficult to precipitate, turbid appearance, poor biodegradability and generally weak alkalinity.

[0003] In the current semiconductor polishing process chemical cleaning liquid processing circulation device, when adding flocculants into the processing tube, the flocculants are added at a relatively single position, causing the flocculants at the added position to clump and cannot be used efficiently. When mixed with the chemical cleaning liquid, an excessively large solid-liquid mixture is also produced, resulting in difficulty in discharging the liquid in the mixture, and the amount of water circulating out is therefore reduced, resulting in the problem that after the flocculants enter the processing tube, they are difficult to mix quickly and evenly with the liquid. If a strong stirring device is provided, the mixture formed by the solid particles and the flocculants is easily broken up, affecting the flocculation effect. Summary of the invention

[0004] The object of the present invention is to provide a semiconductor polishing process chemical cleaning liquid processing circulation device to solve the problems raised in the above background technology.

[0005] In order to achieve the above-mentioned object, the present invention provides the following technical solutions: a semiconductor polishing process chemical cleaning liquid processing circulation device, comprising a bottom plate, a support assembly is fixedly installed on the top of the bottom plate, and also comprises a linkage circulation processing mechanism, which comprises a filter assembly, the filter assembly is fixedly connected to the bottom of the support assembly, a shell is fixedly installed on the top of the support assembly, a stirring assembly is fixedly installed on the top of the shell, an air intake assembly is fixedly installed on the front side of the stirring assembly, and a water intake assembly is fixedly installed on the right side of the shell;

[0006] An air flotation component is fixedly installed inside the shell, and the air flotation component includes a round shell, a plurality of first round holes are opened on the top of the round shell, a ventilation pipe is fixedly connected to the front side of the round shell, an impeller is rotatably installed inside the round shell, a ring-shaped motor is fixedly connected to the bottom of the round shell, three U-shaped rods are fixedly connected to the output shaft of the ring-shaped motor, a round plate is fixedly connected to the top of the U-shaped rod, and a plurality of second round holes are opened on the round plate, and the diameter of the first round hole is the same as that of the second round hole.

[0007] Preferably, the support assembly includes three first fixed blocks, the three first fixed blocks are fixedly installed on the top of the base plate, the tops of the three first fixed blocks are movably hinged with inclined rods, the tops of the three inclined rods are movably hinged with second fixed blocks, and the tops of the three second fixed blocks are fixedly connected with conical buckets.

[0008] Preferably, the filter assembly includes a circular tube, which is fixedly connected to the bottom of the conical bucket, and the middle and bottom positions of the circular tube are respectively fixedly connected to the first filter screen and the second filter screen, and two long grooves are opened on the left side of the circular tube, and the left sides of the two long grooves are fixedly connected to the vacuum cleaner.

[0009] Preferably, the shell includes a cylinder, which is fixedly mounted on the top of the conical bucket, and the left and right sides of the cylinder are fixedly connected to a first water inlet, and the front side of the cylinder is fixedly connected to a second water inlet, and the two first water inlets and one second water inlet are equidistantly distributed in the longitudinal direction of the cylinder.

[0010] Preferably, the stirring assembly includes a first bracket, the first bracket is fixedly installed on the top of the base plate, a first motor is fixedly installed on the top of the first bracket, the output shaft of the first motor is fixedly connected to a circular shaft, six feed pipes are installed around the outer edge of the circular shaft, the front sides of the six feed pipes are all provided with circular grooves, the outer edge of the circular shaft is fixedly connected to three groups of arc-shaped blades, and the three groups of arc-shaped blades are all provided with U-shaped grooves at equal distances.

[0011] Preferably, the air intake assembly includes a second bracket, the second bracket is fixedly mounted on the front side of the first bracket, a pressurized tank is fixedly mounted inside the second bracket, a first air intake pipe is fixedly connected to the top of the pressurized tank, the other end of the first air intake pipe is fixedly connected to the ventilation pipe, a connecting pipe is fixedly connected to the right side of the pressurized tank, and two compressors are fixedly connected to the right end of the connecting pipe.

[0012] Preferably, the water inlet assembly includes a water inlet, which is fixedly installed on the right side of the three first fixed blocks, three water distribution pipes are fixedly connected to the left side of the water inlet, and the front side of the water inlet is fixedly connected to the second air inlet pipe.

[0013] Preferably, the water inlet can evenly divide the water flow into three parts, the tail ends of the three water distribution pipes are fixedly connected to two first water inlets and one second water inlet, and the other end of the second air inlet pipe is fixedly connected to the right compressor.

[0014] The beneficial effects of the present invention are as follows:

[0015] 1. The present invention is equipped with an air flotation component. The pressurized air enters the circular shell after passing through the first air inlet pipe and the ventilation pipe. The compressed air drives the impeller to rotate. At this time, the annular motor rotates clockwise. The annular motor drives the circular plate to rotate through three U-shaped rods. When the second circular hole overlaps with the first circular hole, it stops. The compressed bubbles will float up from multiple first circular holes evenly, and play a buffering role for the falling flocculant, so that the flocculant at different liquid levels can be fully utilized, which solves the problem that after the flocculant enters the treatment cylinder, it is easy to form a mass when mixed with the chemical cleaning liquid, and it cannot be efficiently used and is difficult to mix quickly and evenly with the liquid.

[0016] 2. The present invention is equipped with a newly designed stirring device, and the first motor is started. The first motor rotates clockwise to drive the circular shaft to rotate. When the circular shaft rotates, a centrifugal force is generated, and the flocculant is centrifugally released through the circular groove of the feed pipe. The flocculants at different liquid levels in the cylinder are then guided by the U-shaped groove to be evenly flattened, and are quickly mixed at the current liquid level under the rotation of multiple circular grooves and U-shaped grooves. The arc-shaped blades with an arc surface design can generate resistance during rotation to prevent excessive rotation, and can also slow down the speed at which the flocculant falls in the cylinder due to gravity, thereby solving the problem that the strong stirring device installed in traditional equipment easily causes the mixture formed by solid particles and flocculants to be broken up.

[0017] 3. The present invention is equipped with a filter assembly with layered filtering and recovery functions. When the gate is opened, the solid-liquid mixture falls and reaches the filter assembly. After being filtered by the first filter screen and the second filter screen, the flocculant is retained, and the clean liquid is discharged from the circular tube. After the chemical cleaner is discharged, the vacuum cleaner is started to recover the flocculant on the first filter screen and the second filter screen through the long groove. The filter screen design on both sides allows the flocculant to be gradually purified and isolated, and the flocculant can be directly sucked and recovered, thereby reducing the maintenance steps. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 It is a top view of the overall structure of the present invention;

[0020] Figure 3 It is a schematic diagram of the structure of the air intake assembly of the present invention;

[0021] Figure 4 For the present invention Figure 3 A schematic diagram of the structure enlargement in the middle;

[0022] Figure 5 For the present invention Figure 3 A magnified schematic diagram of the structure at B in the middle;

[0023] Figure 6 It is a cross-sectional view of the shell structure of the present invention;

[0024] Figure 7 For the present invention Figure 6 A magnified schematic diagram of the structure at C in the middle;

[0025] Figure 8 This is a schematic diagram of the structure of the filter assembly of the present invention;

[0026] Fig. 9 This is a schematic diagram of the structure of the air flotation assembly of the present invention;

[0027] Fig.10 It is a cross-sectional view of the air flotation component of the present invention.

[0028] In the figure: 1, bottom plate; 2, support assembly; 3, filter assembly; 4, shell; 5, stirring assembly; 6, air flotation assembly; 7, air intake assembly; 8, water intake assembly; 21, first fixed block; 22, inclined rod; 23, second fixed block; 24, conical bucket; 31, round tube; 32, first filter screen; 33, second filter screen; 34, long slot; 35, vacuum cleaner; 41, cylinder; 42, first water inlet; 43, second water inlet; 51, first bracket; 52, The first motor; 53, round shaft; 54, feed pipe; 55, round groove; 56, arc blade; 57, U-shaped groove; 61, round shell; 62, first round hole; 63, ventilation pipe; 64, impeller; 65, ring motor; 66, U-shaped rod; 67, round plate; 68, second round hole; 71, second bracket; 72, pressurized tank; 73, first air inlet pipe; 74, connecting pipe; 75, compressor; 81, water inlet; 82, water distribution pipe; 83, second air inlet pipe. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] like Figures 1 to 10The embodiment of the present invention provides a semiconductor polishing process chemical cleaning liquid processing circulation device, including a bottom plate 1, a support assembly 2 is fixedly installed on the top of the bottom plate 1, and also includes a linkage circulation processing mechanism, which includes a filter assembly 3, the filter assembly 3 is fixedly connected to the bottom of the support assembly 2, a shell 4 is fixedly installed on the top of the support assembly 2, a stirring assembly 5 is fixedly installed on the top of the shell 4, an air intake assembly 7 is fixedly installed on the front side of the stirring assembly 5, and a water intake assembly 8 is fixedly installed on the right side of the shell 4;

[0031] The air flotation component 6 is fixedly installed inside the housing 4. The air flotation component 6 includes a round shell 61. A plurality of first round holes 62 are opened on the top of the round shell 61. A ventilation pipe 63 is fixedly connected to the front side of the round shell 61. An impeller 64 is rotatably installed inside the round shell 61. A ring-shaped motor 65 is fixedly connected to the top of the round shell 61. Three U-shaped rods 66 are fixedly connected to the output shaft of the ring-shaped motor 65. A round plate 67 is fixedly connected to the top of the U-shaped rod 66. The round plate 67 is opened with a plurality of second round holes 68. The diameters of the first round holes 62 and the second round holes 68 are the same.

[0032] The pressurized air then passes through the first air inlet pipe 73 and the vent pipe 63 and enters the circular shell 61. The compressed air drives the impeller 64 to rotate. At this time, the annular motor 65 rotates clockwise. The annular motor 65 drives the circular plate 67 to rotate through the three U-shaped rods 66. When the second circular hole 68 overlaps with the first circular hole 62, it stops. The compressed bubbles will float up from the multiple first circular holes 62 evenly, and play a buffering role for the falling flocculants, so that the flocculants at different liquid levels can be fully utilized. The misalignment degree of the second circular hole 68 and the first circular hole 62 can be adjusted by rotating, and the size of the floating bubbles can also be adjusted. The higher the overlap degree of the second circular hole 68 and the first circular hole 62, the larger the bubbles that can pass through, and vice versa.

[0033] The support assembly 2 includes three first fixed blocks 21, which are fixedly mounted on the top of the bottom plate 1, and the tops of the three first fixed blocks 21 are movably hinged with inclined rods 22, and the tops of the three inclined rods 22 are movably hinged with second fixed blocks 23, and the tops of the three second fixed blocks 23 are fixedly connected with conical buckets 24, and a gate is installed inside the conical bucket 24 to control whether the solid-liquid mixture falls or not;

[0034] By setting three first fixing blocks 21 and three second fixing blocks 23, and connecting the inclined rod 22 in a hinged manner, multi-point fixing and hinge can disperse and withstand forces from different directions, thereby reducing structural damage caused by excessive force on a single point, and the gate in the conical bucket 24 can also accurately control whether the solid-liquid mixture falls or not;

[0035] The filter assembly 3 includes a circular tube 31, which is fixedly connected to the bottom of the conical bucket 24. The middle and bottom of the circular tube 31 are respectively fixedly connected with a first filter screen 32 and a second filter screen 33. The left side of the circular tube 31 is provided with two long grooves 34, and the left side of the two long grooves 34 is fixedly connected with a vacuum cleaner 35.

[0036] When the gate is opened, the solid-liquid mixture falls and reaches the filter assembly 3. After being filtered by the first filter screen 32 and the second filter screen 33, the flocculant is left behind, while the clean liquid is discharged from the circular tube 31. After the chemical cleaner is discharged, the vacuum cleaner 35 is started to recover the flocculant on the first filter screen 32 and the second filter screen 33 through the long slot 34.

[0037] The housing 4 includes a cylinder 41, which is fixedly mounted on the top of the conical bucket 24. The left and right sides of the cylinder 41 are fixedly connected with a first water inlet 42, and the front side of the cylinder 41 is fixedly connected with a second water inlet 43. The two first water inlets 42 and the one second water inlet 43 are equidistantly distributed in the longitudinal direction of the cylinder 41.

[0038] After the diversion is completed, the chemical cleaning liquid will enter the two first water inlets 42 and the one second water inlet 43 through the three water diversion pipes 82. The two first water inlets 42 and the one second water inlet 43 are evenly distributed in the longitudinal space of the cylinder 41. Therefore, when the water is inletted, the water can be inletted in three dimensions at the same time.

[0039] The stirring assembly 5 includes a first bracket 51, which is fixedly mounted on the top of the bottom plate 1. A first motor 52 is fixedly mounted on the top of the first bracket 51. A circular shaft 53 is fixedly connected to the output shaft of the first motor 52. Six feeding pipes 54 are mounted around the outer edge of the circular shaft 53. The front sides of the six feeding pipes 54 are all provided with circular grooves 55. Three groups of arc-shaped blades 56 are fixedly connected to the outer edge of the circular shaft 53. The three groups of arc-shaped blades are evenly spaced and provided with U-shaped grooves 57.

[0040] Start the first motor 52, the first motor 52 rotates clockwise, driving the circular shaft 53 to rotate. When the circular shaft 53 rotates, a centrifugal force is generated, and the flocculant is centrifugally released through the circular groove 55 of the feed pipe 54. The flocculants at different liquid levels in the cylinder 41 are then guided by the U-shaped groove 57 to be evenly flattened, and are quickly mixed at the current liquid level under the rotation of multiple circular grooves 55 and U-shaped grooves 57. The arc-shaped blades 56 with arc surface design can generate resistance during rotation to prevent excessive rotation, and can also slow down the speed at which the flocculant falls in the cylinder 41 due to gravity.

[0041] The air intake assembly 7 includes a second bracket 71, which is fixedly mounted on the front side of the first bracket 51. A pressurized tank 72 is fixedly mounted inside the second bracket 71. A first air intake pipe 73 is fixedly connected to the top of the pressurized tank 72. The other end of the first air intake pipe 73 is fixedly connected to the ventilation pipe 63. A connecting pipe 74 is fixedly connected to the right side of the pressurized tank 72. Two compressors 75 are fixedly connected to the right end of the connecting pipe 74.

[0042] When water enters the water inlet 81, the water inlet 81 can be pressurized by the compressor 75 on the right through the second air inlet pipe 83, thereby accelerating the diversion speed. The compressor 75 injects air into the pressure tank 72 through the connecting pipe 74, and the pressurized air enters the round shell 61 after passing through the first air inlet pipe 73 and the ventilation pipe 63. The compressed air can drive the impeller 64 to rotate.

[0043] The water inlet assembly 8 includes a water inlet 81, which is fixedly installed on the right side of the three first fixed blocks 21, and three water distribution pipes 82 are fixedly connected to the left side of the water inlet 81, and a second air inlet pipe 83 is fixedly connected to the front side of the water inlet 81; the water inlet 81 can evenly divide the water flow into three, and the tail ends of the three water distribution pipes 82 are fixedly connected to the two first water inlets 42 and the one second water inlet 43, and the other end of the second air inlet pipe 83 is fixedly connected to the right compressor 75;

[0044] The water inlet 81 can divide the water of the feed into three equal parts, and when the water is fed in, the water inlet 81 can be pressurized by the compressor 75 on the right through the second air inlet pipe 83, thereby accelerating the diversion speed.

[0045] Working principle:

[0046] When using the present invention, the sewage of the semiconductor chemical cleaning liquid is first fed through the water inlet 81, and the water inlet 81 can divide the fed water into three equal parts, and when feeding the water, the water inlet 81 can also be pressurized by the compressor 75 on the right side through the second air inlet pipe 83, thereby accelerating the diversion speed;

[0047] After the diversion is completed, the chemical cleaning liquid will enter the two first water inlets 42 and the one second water inlet 43 through the three water diversion pipes 82. The two first water inlets 42 and the one second water inlet 43 are evenly distributed in the longitudinal space of the cylinder 41. Therefore, when the water is inletted, the water can be inletted in three dimensions at the same time.

[0048] When the water is fully inletted, the first motor 52 is started immediately, and the first motor 52 rotates clockwise, driving the circular shaft 53 to rotate. When the circular shaft 53 rotates, a centrifugal force is generated, and the flocculant is centrifugally released through the multiple circular grooves 55 opened in the feed pipe 54. The flocculants at different liquid levels in the cylinder 41 are then guided by the U-shaped groove 57 and are evenly flattened. Under the rotation of the multiple circular grooves 55 and the U-shaped groove 57, they are quickly mixed at the current liquid level. The arc-shaped blades 56 with arc surface design can generate resistance during rotation to prevent excessive rotation, and can also slow down the speed at which the flocculant falls in the cylinder 41 due to gravity.

[0049] When the flocculant and the chemical cleaning liquid are uniformly mixed, the compressor 75 on the left is started, and the compressor 75 fills air into the pressure tank 72 through the connecting pipe 74. The pressurized air then passes through the first air inlet pipe 73 and the ventilation pipe 63 and enters the circular shell 61. The compressed air drives the impeller 64 to rotate, and then the annular motor 65 is rotated clockwise. The annular motor 65 drives the circular plate 67 to rotate through the three U-shaped rods 66. When the second circular hole 68 overlaps with the first circular hole 62, it stops. The compressed bubbles will float evenly from the multiple first circular holes 62, and play a buffering role for the falling flocculant, so that the flocculant at different liquid levels can be fully utilized. The misalignment degree of the second circular hole 68 and the first circular hole 62 can be adjusted by rotating, and the size of the floating bubbles can also be adjusted. When the second circular hole 68 overlaps with the first circular hole 62, the larger the bubble that can pass through, and vice versa.

[0050] The solid-liquid mixture after flocculation and cleaning will gradually fall in the cylinder 41 and finally reach the conical bucket 24. A gate is installed inside the conical bucket 24 to control whether the solid-liquid mixture falls. When the gate is opened, the solid-liquid mixture falls and reaches the filter assembly 3. After being filtered by the first filter screen 32 and the second filter screen 33, the flocculant is retained and the clean liquid is discharged from the circular tube 31. After the chemical cleaner is discharged, the vacuum cleaner 35 is started to recover the flocculant on the first filter screen 32 and the second filter screen 33 through the long groove 34.

[0051] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0052] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor polishing process chemical cleaning liquid processing circulation device, comprising a base plate (1), characterized in that: A support assembly (2) is fixedly mounted on the top of the base plate (1), and further comprises: A linked circulation treatment mechanism comprises a filter assembly (3), wherein the filter assembly (3) is fixedly connected to the bottom of the support assembly (2), a shell (4) is fixedly mounted on the top of the support assembly (2), a stirring assembly (5) is fixedly mounted on the top of the shell (4), an air intake assembly (7) is fixedly mounted on the front side of the stirring assembly (5), and a water intake assembly (8) is fixedly mounted on the right side of the shell (4); An air flotation component (6), the air flotation component (6) is fixedly installed inside the shell (4), the air flotation component (6) comprises a round shell (61), a plurality of first round holes (62) are opened on the top of the round shell (61), a ventilation pipe (63) is fixedly connected to the front side of the round shell (61), an impeller (64) is rotatably installed inside the round shell (61), a ring-shaped motor (65) is fixedly connected to the bottom of the round shell (61), three U-shaped rods (66) are fixedly connected to the output shaft of the ring-shaped motor (65), a round plate (67) is fixedly connected to the top of the U-shaped rod (66), the round plate (67) is opened with a plurality of second round holes (68), and the diameters of the first round holes (62) and the second round holes (68) are the same.

2. A semiconductor polishing process chemical cleaning liquid processing circulation device according to claim 1, characterized in that: The support assembly (2) comprises three first fixed blocks (21), the three first fixed blocks (21) are fixedly mounted on the top of the bottom plate (1), the tops of the three first fixed blocks (21) are movably hinged with inclined rods (22), the tops of the three inclined rods (22) are movably hinged with second fixed blocks (23), and the tops of the three second fixed blocks (23) are fixedly connected with conical buckets (24).

3. A semiconductor polishing process chemical cleaning liquid processing circulation device according to claim 2, characterized in that: The filter assembly (3) comprises a circular tube (31), the circular tube (31) being fixedly connected to the bottom of the conical bucket (24), the middle position and the bottom position of the circular tube (31) being fixedly connected to a first filter screen (32) and a second filter screen (33), respectively, the left side of the circular tube (31) being provided with two long grooves (34), the left sides of the two long grooves (34) being fixedly connected to a dust collector (35).

4. A semiconductor polishing process chemical cleaning liquid processing circulation device according to claim 3, characterized in that: The shell (4) comprises a cylinder (41), the cylinder (41) being fixedly mounted on the top of the conical bucket (24), the left and right sides of the cylinder (41) being fixedly connected to first water inlets (42), the front side of the cylinder (41) being fixedly connected to a second water inlet (43), and the two first water inlets (42) and the one second water inlet (43) being equidistantly distributed in the longitudinal direction of the cylinder (41).

5. A semiconductor polishing process chemical cleaning liquid processing circulation device according to claim 4, characterized in that: The stirring assembly (5) comprises a first bracket (51), the first bracket (51) is fixedly mounted on the top of the bottom plate (1), a first motor (52) is fixedly mounted on the top of the first bracket (51), an output shaft of the first motor (52) is fixedly connected to a circular shaft (53), six feeding pipes (54) are mounted around the outer edge of the circular shaft (53), the front sides of the six feeding pipes (54) are all provided with circular grooves (55), and three groups of arc-shaped blades (56) are fixedly connected to the outer edge of the circular shaft (53), and the three groups of arc-shaped blades are all provided with U-shaped grooves (57) at equal intervals.

6. A semiconductor polishing process chemical cleaning liquid processing circulation device according to claim 5, characterized in that: The air intake assembly (7) comprises a second bracket (71), the second bracket (71) is fixedly mounted on the front side of the first bracket (51), a pressurized tank (72) is fixedly mounted inside the second bracket (71), a first air intake pipe (73) is fixedly connected to the top of the pressurized tank (72), the other end of the first air intake pipe (73) is fixedly connected to the ventilation pipe (63), a connecting pipe (74) is fixedly connected to the right side of the pressurized tank (72), and two compressors (75) are fixedly connected to the right end of the connecting pipe (74).

7. A semiconductor polishing process chemical cleaning liquid processing circulation device according to claim 6, characterized in that: The water inlet assembly (8) comprises a water inlet (81), the water inlet (81) being fixedly mounted on the right side of the three first fixed blocks (21), the left side of the water inlet (81) being fixedly connected to three water distribution pipes (82), and the front side of the water inlet (81) being fixedly connected to a second air inlet pipe (83).

8. A semiconductor polishing process chemical cleaning liquid processing circulation device according to claim 7, characterized in that: The water inlet (81) can evenly divide the water flow into three parts. The tail ends of the three water distribution pipes (82) are fixedly connected to two first water inlets (42) and one second water inlet (43). The other end of the second air inlet pipe (83) is fixedly connected to the right compressor (75).

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