Coating equipment

Abstract

The invention belongs to the technical field of battery piece processing, and discloses coating equipment which comprises a carrier assembly used for bearing a piece to be coated, the coating equipment further comprises a cavity assembly, the cavity assembly comprises a shell and a furnace door, the shell is provided with a containing cavity and an outlet communicated with the containing cavity, and the furnace door is movably connected to the shell to close or open the outlet. The carrier assembly can enter and exit the containing cavity through the outlet. And the section of the accommodating cavity is rectangular. The rectangular containing cavity of the coating equipment is beneficial to improving the productivity, the cavity assembly formed by welding the metal plates is resistant to impact and collision and low in cost, and the overall cost of the coating equipment is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of battery cell processing, and in particular to coating equipment. Background Art

[0002] Thin film deposition technology refers to the process of forming and depositing thin film coatings on substrate materials. It is widely used in industries such as microelectronic devices, thin film transistors, and solar cells. During the processing, the thin film deposition equipment introduces chemical reaction gases into the vacuum chamber, decomposes chemical molecules through thermal energy or plasma energy, and forms a thin film on the surface of the substrate. At present, the photovoltaic equipment market is mainly composed of two types of deposition equipment: plate type and tube type. In comparison, tube furnaces have the advantage of lower equipment cost compared to plate type equipment and are widely used in the industry. The tube furnace uses a quartz tube to form a shielding cavity, and the graphite boat carrier is placed in the shielding cavity. The quartz tube supports the graphite boat carrier. Because the quartz tube is fragile and expensive, the outside of the tube body needs to be covered with a cotton layer. The overall structure of the equipment is relatively complex, which is not convenient for transportation and assembly, making the overall price and production cost of the tube furnace high.

[0003] In addition, the graphite boat carrier is usually a rectangular structure formed by multiple small boats stacked together, and the quartz tube is a circular tube structure. The arrangement of the rectangular structure in the circular tube cavity will cause part of the space in the cavity to not be effectively utilized. If the number of stacked boats is increased to increase production capacity, the corresponding cross-sectional area or length of the quartz tube must be increased accordingly, which ultimately causes the overall size of the equipment to be oversized, making transportation and maintenance more difficult, and limiting the increase in production capacity. Summary of the invention

[0004] The purpose of the present invention is to provide a coating device, which can solve the problems that the quartz tubes used in existing tubular furnaces are fragile and inconvenient to transport and assemble, and the high price makes the overall price and production cost of the tubular furnace high, and the circular tube cavity and graphite boat carrier have poor adaptability and waste a lot of cavity space, which limits the improvement of production capacity.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] A coating device is provided, comprising a carrier assembly for carrying a workpiece to be coated, and also a cavity assembly, wherein the cavity assembly comprises a shell and a furnace door, the shell having a accommodating cavity and an outlet connected to the accommodating cavity, the furnace door being movably connected to the shell to close or open the outlet, the carrier assembly being able to enter and exit the accommodating cavity through the outlet, and the cross-section of the accommodating cavity being rectangular.

[0007] As an optional structure of the present invention, the coating equipment further includes a uniform heat component, which includes a plurality of uniform heat plates arranged in the accommodating cavity, and the plurality of uniform heat plates are spliced ​​together to surround the periphery of the carrier component.

[0008] As an optional structure of the present invention, the coating device further includes a heating component disposed in the accommodating chamber, and the uniform heat plate is disposed between the heating component and the carrier component;

[0009] There are gaps between the uniform heat plate and the heating assembly and the carrier assembly respectively; and / or the heating assembly forms six groups of heating tube groups, each group of the heating tube groups corresponds to six side surfaces of the carrier assembly respectively, and a plurality of the uniform heat plates are spliced ​​together to form six uniform heat plate groups, and the six uniform heat plate groups correspond to the six groups of heating tube groups respectively.

[0010] As an optional structure of the present invention, the material of the uniform heat plate is silicon carbide; and / or,

[0011] A rear panel is arranged on the shell corresponding to the furnace door, and a vacuum extraction hole is opened on the rear panel. At least one of the plurality of heat-distributing plates faces the rear panel to form a flow-guiding heat-distributing plate, and the flow-guiding heat-distributing plate is provided with a plurality of air outlet holes arranged at intervals.

[0012] As an optional structure of the present invention, the coating equipment also includes a heat insulation shielding component and a heating component arranged in the accommodating cavity, the heat insulation shielding component includes a shielding top plate, a shielding bottom plate and four shielding side plates arranged between the shielding top plate and the shielding bottom plate, the shielding top plate, the shielding bottom plate and the four shielding side plates are arranged to form a shielding cavity, and the heating component and the carrier assembly are accommodated in the shielding cavity.

[0013] As an optional structure of the present invention, the heat insulation shielding assembly is connected to the inner cavity wall of the cavity assembly, wherein one of the four shielding side panels is a front side panel, and the front side panel is detachably connected to the furnace door, and the front side panel can move with the furnace door to connect the shielding cavity to the outlet.

[0014] As an optional structure of the present invention, a rear panel is provided on the shell corresponding to the furnace door, and the rear panel is provided with a vacuum extraction hole. One of the four shielding side panels is a rear side panel, and the rear side panel is provided with an air collecting hole connected to the shielding cavity. The rear side panel is connected to the rear panel, and the air collecting hole is connected to the vacuum extraction hole.

[0015] As an optional structure of the present invention, the heat insulation shielding assembly also includes a rear air collecting hood, and a plurality of evenly arranged air collecting holes are opened on the rear side panel. The inlet end size of the rear air collecting hood is larger than the outlet end size. The inlet end hood is arranged on the rear side panel, and the outlet end is connected to the rear panel.

[0016] As an optional structure of the present invention, the heating assembly includes multiple heating tubes, and the heating tubes include heating tubes and positive electrode columns and negative electrode columns connected to the heating tubes. The positive electrode columns and the negative electrode columns are both connected to an external heating circuit so that the multiple heating tubes can be heated independently.

[0017] As an optional structure of the present invention, the plurality of heating tubes form six groups of heating tubes, the six groups of heating tubes respectively correspond to and are insulated and connected to the shielding top plate, the shielding bottom plate and the four shielding side plates, and each group of heating tubes includes a plurality of the heating tubes that are parallel to each other and spaced apart; and / or,

[0018] The heating tube assembly includes a plurality of heating tubes and at least two fixing parts. The plurality of heating tubes are parallel to each other and arranged at intervals. The fixing parts are connected to one end of two adjacent heating tubes to form an electrical connection. The plurality of fixing parts are staggered at both ends of the plurality of heating tubes so that the heating tube assembly forms a serpentine structure. The positive electrode column and the negative electrode column are respectively arranged at the head end and the tail end of the serpentine structure.

[0019] As an optional structure of the present invention, the coating device further includes a plurality of support columns, the support columns are arranged in the accommodating cavity to support the carrier assembly, the plurality of support columns are arranged at intervals to form a support plane, and the support height of any of the support columns is adjustable; and / or,

[0020] The coating device further includes an electrode rod, which passes through the shell and has one end abutting against the bottom of the carrier assembly; and / or,

[0021] The shell comprises a bottom shell and an upper cover, the accommodating cavity and the outlet are arranged in the bottom shell, the bottom shell is also provided with an upper opening communicating with the accommodating cavity, and the upper cover is connected to the bottom shell to close the upper opening.

[0022] Beneficial effects of the present invention:

[0023] The coating equipment provided by the present invention has a cavity assembly including a shell and a furnace door, the shell has a accommodating cavity and an outlet connected to the accommodating cavity, the furnace door can be movably connected to the shell to close or open the outlet, and the carrier assembly can enter and exit the accommodating cavity through the outlet; the shell material can be metal, for example, formed by welding of metal plates, and the cross-section of the accommodating cavity is rectangular. The shell is formed by welding of metal plates, and a closed accommodating cavity is formed by the shell and the furnace door; compared with the quartz tube body, the metal plate is resistant to impact and collision and has low cost, and the welding structure is convenient to manufacture and process, easy to process and transport, thereby reducing the overall cost of the coating equipment; the size of the cavity assembly can be processed and manufactured according to the production capacity requirements to meet the production capacity requirements; moreover, the cross-section of the accommodating cavity is rectangular, which is more compatible with the appearance of the carrier assembly, and the carrier assembly can be arranged in multiple rows in parallel in the horizontal width direction; compared with the circular tube body, the accommodating cavity can accommodate more parts to be coated under the same volume, reducing the space waste of the accommodating cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a schematic structural diagram of a coating device provided by an embodiment of the present invention;

[0025] Figure 2 is a structural cross-sectional view of a coating device provided by an embodiment of the present invention;

[0026] Figure 3 yes Figure 2 A schematic diagram of the enlarged local structure of part A;

[0027] Figure 4 It is a schematic diagram of partial structural disassembly of a heat distribution assembly provided in an embodiment of the present invention;

[0028] Figure 5 is a schematic structural diagram of a cavity assembly provided by an embodiment of the present invention;

[0029] Figure 6 is a structural cross-sectional view of a heat insulation and shielding assembly provided by an embodiment of the present invention;

[0030] Figure 7 yes Figure 6 A schematic diagram of the enlarged local structure of part A;

[0031] Figure 8 is a schematic diagram of the structure of a heating assembly provided by an embodiment of the present invention;

[0032] Fig. 9 is a schematic structural diagram of a heating pipe provided by an embodiment of the present invention;

[0033] Fig.10 It is a top view of the structure of the heating pipe provided in an embodiment of the present invention.

[0034] In the figure:

[0035] 1. Carrier assembly; 2. Cavity assembly; 21. Bottom shell; 211. Rear panel; 2111. Vacuum extraction hole; 2112. Observation window; 22. Upper cover; 23. Furnace door; 3. Heat insulation and shielding assembly; 31. Shielding top plate; 32. Shielding bottom plate; 33. Shielding side plate; 34. Front side plate; 35. Shielding cavity; 36. Rear side plate; 361. Gas collecting hole; 37. Tail gas collecting hood; 371. Inlet end; 372. Outlet end; 4. Heating assembly; 41. Heating pipe fittings; 411. Positive electrode column; 412. Negative electrode column; 413. Heating tube; 414. Fixing piece; 5. Heat uniforming assembly; 51. Heat uniforming plate; 511. Guide heat uniforming plate; 52. Air outlet; 6. Support column; 61. Compression spring; 62. Bellows; 7. Electrode rod. DETAILED DESCRIPTION

[0036] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature "above", "above" and "above" the second feature include the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature include the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0038] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0040] like Figure 1 and Figure 2 As shown, the coating equipment includes a carrier assembly 1 for carrying a piece to be coated. The coating equipment also includes a chamber assembly 2, which includes a shell and a furnace door 23. The shell has a containing chamber and an outlet connected to the containing chamber. The furnace door 23 can be movably connected to the shell to close or open the outlet. The carrier assembly 1 can enter and exit the containing chamber through the outlet, and the cross-section of the containing chamber is rectangular.

[0041] The coating equipment provided in the embodiment of the present invention may have a shell made of metal, for example, the shell is formed by welding metal plates, or by stamping plates and then welding them, and the shell and the furnace door 23 form a closed accommodating chamber; compared with a quartz tube body, the metal plate is resistant to impact and collision and has low cost, and the welding structure is convenient to manufacture and manufacture, and is easy to manufacture and transport, thereby reducing the overall cost of the coating equipment; the size of the cavity assembly 2 can be manufactured according to production capacity requirements to meet production capacity requirements; moreover, the cross-section of the accommodating chamber is rectangular, which is more compatible with the appearance of the carrier assembly 1, and the carrier assembly 1 can arrange boats in multiple rows in parallel in the horizontal width direction; compared with a circular tube body, the accommodating chamber can accommodate more parts to be coated under the same volume, reducing space waste in the accommodating chamber.

[0042] The coating device also includes a uniform heating component 5, such as Figure 4 As shown, the uniform heat assembly 5 includes a plurality of uniform heat plates 51 disposed in the accommodating cavity, and the plurality of uniform heat plates 51 are spliced ​​together to surround the periphery of the carrier assembly 1. The heat in the accommodating cavity is transferred and uniformed between the plurality of uniform heat plates 51, so that a uniform heat area with a relatively uniform temperature is formed on the periphery of the carrier assembly 1, thereby improving the process consistency of the part to be coated.

[0043] In one embodiment, the coating equipment further includes a heating component 4 disposed in the accommodating chamber, and the heating component 4 is used to make the accommodating chamber reach the required working temperature. The heating component 4 is disposed in the accommodating chamber, and compared with the external heating method of the quartz tube, the internal heating of the accommodating chamber can reduce heat loss. The uniform heat plate 51 is disposed between the heating component 4 and the carrier component 1; wherein, there are gaps between the uniform heat plate 51 and the heating component 4 and the carrier component 1, respectively, to facilitate the flow of the reaction gas. The uniform heat plate 51 uniformizes the heat energy radiated by the heating component 4, improves the temperature uniformity in the accommodating chamber, thereby reducing the temperature control module additionally provided in the coating equipment, reducing costs, and simplifying the structure.

[0044] The material of the heat-dissipating plate 51 is silicon carbide, which has the characteristics of high thermal conductivity, good temperature resistance, and good chemical stability, and avoids chemical reaction with the reaction gas.

[0045] In order to improve the heating uniformity of the heating component 4, for the carrier component 1 with a rectangular cross-section, the heating component 4 forms six groups of heating tube groups, each group of heating tube groups corresponds to the six sides of the carrier component 1, so as to form a relatively uniform heating area in the entire accommodating cavity. Accordingly, a plurality of uniform heat plates 51 are spliced ​​with each other according to the size of the cavity component 2 to form six uniform heat plate groups, and the six uniform heat plate groups correspond to the six groups of heating tube groups, and each uniform heat plate group can effectively uniformize the heat generated by the corresponding heating tube group.

[0046] During the coating process, the accommodating chamber is filled with reactive gas. A rear panel 211 is provided on the shell corresponding to the furnace door 23, and a vacuum extraction hole 2111 is provided on the rear panel 211. At least one of the multiple uniform heat plates 51 faces the rear panel 211 to form a flow-guiding uniform heat plate 511, and the flow-guiding uniform heat plate 511 is provided with multiple spaced-apart gas outlet holes 52. After the coating is completed, it is ensured that the reactive gas inside the uniform heat plate 51 can quickly flow to the vacuum extraction hole 2111 of the rear panel 211 through the gas outlet holes 52, thereby improving the gas extraction performance and the process efficiency.

[0047] In order to reduce the heat expansion in the accommodating cavity, the coating equipment also includes a heat insulation shielding component 3 arranged in the accommodating cavity, and the heat insulation shielding component 3 includes a shielding top plate 31, a shielding bottom plate 32 and four shielding side plates 33 arranged between the shielding top plate 31 and the shielding bottom plate 32. The shielding top plate 31, the shielding bottom plate 32 and the four shielding side plates 33 are arranged to form a shielding cavity 35, and the heating component 4 and the carrier component 1 are both accommodated in the shielding cavity 35.

[0048] like Figure 6 and Figure 7 As shown, a shielding top plate 31, a shielding bottom plate 32 and four shielding side plates 33 are arranged to form a shielding cavity 35, and the shielding cavity 35 can be connected to the outlet, and the carrier assembly 1 can enter the shielding cavity 35 through the outlet. The shielding top plate 31, the shielding bottom plate 32 and the four shielding side plates 33 are all composed of multiple layers of metal thin plates, and have a small heat capacity, so that the heating efficiency and cooling efficiency of the cavity assembly 2 can be relatively high; and the metal thin plates have little effect on the vacuum performance, and have good structural strength, which meets the vacuuming requirements in the accommodating cavity. Among them, the multiple layers of metal thin plates can be connected by bonding or screws between adjacent thin plates. The heat insulation shielding assembly 3 can reduce the heat loss in the shielding cavity 35 during the coating process, and prevent the outer wall temperature of the cavity assembly 2 from being too high, thereby improving the reliability and safety of the coating equipment.

[0049] The heat insulation shielding assembly 3 is connected to the inner cavity wall of the cavity assembly 2, wherein one of the four shielding side panels 33 is the front side panel 34, and the front side panel 34 is detachably connected to the furnace door 23. The front side panel 34 can move with the furnace door 23 to connect the shielding cavity 35 to the outlet, thereby improving the convenience of the carrier assembly 1 entering and exiting the shielding cavity 35.

[0050] A rear panel 211 is provided on the shell body corresponding to the furnace door 23, and a vacuum extraction hole 2111 is provided on the rear panel 211. One of the four shielding side panels 33 is a rear panel 36, and a gas collecting hole 361 is provided on the rear panel 36 to communicate with the shielding chamber 35. The rear panel 36 is connected to the rear panel 211, and the gas collecting hole 361 is connected with the vacuum extraction hole 2111. The reaction gas in the shielding chamber 35 flows through the gas collecting hole 361 of the rear panel 36, and is finally sucked from the vacuum extraction hole 2111 of the rear panel 211.

[0051] In order to further improve the air extraction performance, the heat insulation shielding assembly 3 also includes a tail gas collecting hood 37, and a plurality of evenly arranged gas collecting holes 361 are opened on the rear side plate 36 to form a porous structure. The size of the inlet end 371 of the tail gas collecting hood 37 is larger than the size of the outlet end 372, forming a trumpet-shaped structure. The inlet end 371 is covered on the rear side plate 36, and the outlet end 372 is connected to the rear panel 211. More reaction gas is guided into the tail gas collecting hood 37 through the larger inlet end 371, and is accelerated when flowing through the smaller outlet end 372, thereby optimizing the air extraction performance.

[0052] In one embodiment, an observation window 2112 is provided on the rear panel 211 , and the observation window 2112 is used to observe the position of the graphite boat of the carrier assembly 1 and the excitation state of the plasma to understand the process progress.

[0053] like Figures 8 to 10 As shown, the heating pipe 41 includes a heating pipe 413 and a positive electrode column 411 and a negative electrode column 412 connected to the heating pipe 413. The positive electrode column 411 and the negative electrode column 412 are both connected to an external heating circuit so that the multiple heating pipes 41 are heated independently. This segmented temperature control structure can improve the temperature control accuracy and improve the uniformity and consistency of the temperature in the shielding cavity 35. Moreover, the heating assembly 4 can quickly replace one of the heating pipes 41 separately as needed, which is simple and convenient to maintain.

[0054] The six groups of heating tubes heat the carrier assembly 1 in a surrounding manner, and the temperature uniformity in the shielding cavity 35 is better. In order to facilitate the fixing of the heating assembly 4, each group of heating tubes is respectively installed on the corresponding shielding top plate 31, shielding bottom plate 32 or shielding side plate 33. Among them, the heating tube group corresponding to the front side plate 34 is installed on the front side plate 34, and can move with the furnace door 23 to connect the shielding cavity 35 to the outlet, so as to avoid interference between the heating assembly 4 and the carrier assembly 1 when entering and exiting the cavity assembly 2.

[0055] Similarly, in order to install the uniform heat assembly 5, the six uniform heat plate groups are respectively installed on the corresponding shielding top plate 31, shielding bottom plate 32 or shielding side plate 33; wherein, the uniform heat plate group corresponding to the front side plate 34 is installed on the front side plate 34, and can move with the furnace door 23 to avoid the uniform heat assembly 5 from interfering when the carrier assembly 1 enters and exits the cavity assembly 2. The above-mentioned heat insulation shielding assembly 3, heating assembly 4 and uniform heat assembly 5 are highly integrated, easy to replace independently, and the working reliability of the coating equipment is high.

[0056] Specifically, the heating tube 41 includes a plurality of heating tubes 413 and at least two fixings 414. The plurality of heating tubes 413 are parallel to each other and spaced apart, and the fixings 414 are connected to one end of two adjacent heating tubes 413 and form an electrical connection. The plurality of fixings 414 are staggered at both ends of the plurality of heating tubes 413 so that the heating tube 41 forms a serpentine structure, which is relatively compact. The positive electrode column 411 and the negative electrode column 412 are respectively arranged at the head and tail ends of the serpentine structure. The heating tube 413 can be an infrared heating tube, a silicon carbon rod, a resistance wire, etc., which is not specifically limited in this embodiment.

[0057] The coating device further includes a plurality of support columns 6, which are arranged in the accommodating cavity to support the carrier assembly 1. The plurality of support columns 6 are arranged at intervals to form a support plane, and the support height of any support column 6 is adjustable. By adjusting the height of the support columns 6, the error caused by the welding deformation of the cavity assembly 2 can be compensated, and the processing requirements for the cavity assembly 2 can be reduced.

[0058] For example, in one embodiment, Figure 3 As shown, the support column 6 includes a compression spring 61 with adjustable elastic force and a bellows 62 sleeved on the outside of the compression spring 61, and the compression spring 61 and the bellows 62 jointly provide a support force for the carrier assembly 1. The compression amount of the compression spring 61 is adjusted, and the bellows 62 is stretched or compressed to match the length of the compression spring 61, so as to achieve height adjustment of the support column 6.

[0059] The coating equipment also includes an electrode rod 7, which penetrates the shell and one end of which abuts against the bottom of the carrier assembly 1. The carrier assembly 1 includes a bottom plate, a plurality of boat pages and an electrode column. The plurality of boat pages are stacked on the bottom plate. Among the plurality of boat pages, the electrodes connected to the adjacent boat pages are opposite, so the two boat pages separated by one boat page are electrically connected. The bottom plate is made of a conductive material, such as metal or graphite. A through avoidance hole is provided on the bottom plate. The electrode column is provided in the avoidance hole and is spaced from the bottom plate, and is electrically connected to the boat page opposite to the bottom plate. The bottom plate is electrically connected to the boat page separated by one boat page, so that the electrodes connected to the bottom plate and the electrode column are opposite. The electrode rod 7 abuts against the bottom of the carrier assembly 1, that is, it abuts against the bottom plate and the electrode column respectively. The electrode rod 7 introduces the medium frequency power supply into the shielding cavity 35 to excite plasma for the coating process. The electrode rod 7 abuts against the bottom of the carrier assembly 1 to form a boat foot electrode, simplifying the electrode docking structure.

[0060] In one embodiment, the shell includes a bottom shell 21 and an upper cover 22, the accommodating cavity and the outlet are arranged on the bottom shell 21, the bottom shell 21 is also provided with an upper opening connected to the accommodating cavity, and the upper cover 22 is connected to the bottom shell 21 to close the upper opening. The components in the accommodating cavity can be easily repaired and replaced by opening the upper cover 22. Compared with the furnace door 23, the upper opening has a large operating space, which improves the convenience of maintenance. Since the metal sheet structure has a heavy weight, the upper cover 22 can be directly covered on the bottom shell 21. Alternatively, in other embodiments, a detachable connection structure such as a bolt connection can also be provided between the bottom shell 21 and the upper cover 22.

[0061] like Figure 5 As shown, in one embodiment, the furnace door 23 is set as a double-door double-opening structure to minimize the opening area to reduce heat loss. The opening structure of the furnace door 23 can be opened by rotating a hinge or by lifting a screw, which is not specifically limited in this embodiment. The opening structure of the furnace door 23 can be set with reference to the prior art.

[0062] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A coating device, comprising a carrier assembly (1) for carrying a part to be coated, characterized in that: The invention also comprises a cavity assembly (2), wherein the cavity assembly (2) comprises a shell and a furnace door (23), wherein the shell has a accommodating cavity and an outlet connected to the accommodating cavity, and the furnace door (23) is movably connected to the shell to close or open the outlet, and the carrier assembly (1) can enter and exit the accommodating cavity through the outlet; the cross-section of the accommodating cavity is rectangular.

2. The coating device according to claim 1, characterized in that: The coating device further comprises a uniform heat component (5), wherein the uniform heat component (5) comprises a plurality of uniform heat plates (51) arranged in the accommodating cavity, and the plurality of uniform heat plates (51) are spliced ​​together to surround the peripheral side of the carrier component (1).

3. The coating device according to claim 2, characterized in that: The coating device further comprises a heating component (4) arranged in the accommodating chamber, and the uniform heat plate (51) is arranged between the heating component (4) and the carrier component (1); There are gaps between the uniform heat plate (51) and the heating component (4) and the carrier component (1); and / or the heating component (4) forms six groups of heating tube groups, each group of the heating tube groups corresponds to six side surfaces of the carrier component (1), and a plurality of the uniform heat plates (51) are spliced ​​together to form six uniform heat plate groups, and the six uniform heat plate groups correspond to the six groups of heating tube groups.

4. The coating device according to claim 2, characterized in that: The material of the uniform heat plate (51) is silicon carbide; and / or, A rear panel (211) is arranged on the shell body corresponding to the furnace door (23), and a vacuum extraction hole (2111) is provided on the rear panel (211). At least one of the plurality of heat-distributing plates (51) faces the rear panel (211) to form a flow-guiding heat-distributing plate (511), and a plurality of air outlet holes (52) are provided on the flow-guiding heat-distributing plate (511) at intervals.

5. The coating device according to claim 1, characterized in that: The coating equipment also includes a heat-insulating shielding component (3) and a heating component (4) arranged in the accommodating cavity, wherein the heat-insulating shielding component (3) includes a shielding top plate (31), a shielding bottom plate (32) and four shielding side plates (33) arranged between the shielding top plate (31) and the shielding bottom plate (32), wherein the shielding top plate (31), the shielding bottom plate (32) and the four shielding side plates (33) are arranged to form a shielding cavity (35), and the heating component (4) and the carrier component (1) are accommodated in the shielding cavity (35).

6. The coating device according to claim 5, characterized in that: The heat insulation shielding component (3) is connected to the inner cavity wall of the cavity component (2), wherein one of the four shielding side panels (33) is a front side panel (34), and the front side panel (34) is detachably connected to the furnace door (23), and the front side panel (34) can move with the furnace door (23) to enable the shielding cavity (35) to connect to the outlet.

7. The coating device according to claim 5, characterized in that: A rear panel (211) is provided on the shell body corresponding to the furnace door (23), and a vacuum extraction hole (2111) is provided on the rear panel (211). One of the four shielding side panels (33) is a rear side panel (36), and an air collecting hole (361) connected to the shielding cavity (35) is provided on the rear side panel (36). The rear side panel (36) is connected to the rear panel (211), and the air collecting hole (361) is connected to the vacuum extraction hole (2111).

8. The coating device according to claim 7, characterized in that: The heat insulation shielding assembly (3) also includes a rear air collecting hood (37), a plurality of evenly arranged air collecting holes (361) are provided on the rear side plate (36), the size of the inlet end (371) of the rear air collecting hood (37) is larger than the size of the outlet end (372), the inlet end (371) is covered on the rear side plate (36), and the outlet end (372) is connected to the rear enclosure (211).

9. The coating device according to claim 5, characterized in that: The heating assembly (4) comprises a plurality of heating tubes (41), wherein the heating tubes (41) comprise a heating tube (413) and a positive electrode column (411) and a negative electrode column (412) connected to the heating tube (413), wherein the positive electrode column (411) and the negative electrode column (412) are both connected to an external heating circuit so that the plurality of heating tubes (41) are heated independently.

10. The coating device according to claim 9, characterized in that: The plurality of heating tubes (41) form six groups of heating tube groups, the six groups of heating tube groups respectively correspond to and are insulated and connected to the shielding top plate (31), the shielding bottom plate (32) and the four shielding side plates (33), and each group of heating tube groups includes a plurality of the heating tubes (41) that are parallel to each other and spaced apart; and / or, The heating tube assembly (41) comprises a plurality of heating tubes (413) and at least two fixing members (414); the plurality of heating tubes (413) are arranged parallel to each other and at intervals; the fixing members (414) are connected to one end of two adjacent heating tubes (413) to form an electrical connection; the plurality of fixing members (414) are staggeredly arranged at both ends of the plurality of heating tubes (413) so that the heating tube assembly (41) forms a serpentine structure; the positive electrode column (411) and the negative electrode column (412) are respectively arranged at the head end and the tail end of the serpentine structure.

11. The coating device according to claim 1, characterized in that: The coating device further comprises a plurality of support columns (6), wherein the support columns (6) are arranged in the accommodating cavity to support the carrier assembly (1), the plurality of support columns (6) are arranged at intervals to form a support plane, and the support height of any of the support columns (6) is adjustable; and / or, The coating device further comprises an electrode rod (7), wherein the electrode rod (7) passes through the shell and one end of the electrode rod (7) abuts against the bottom of the carrier assembly (1); and / or, The shell comprises a bottom shell (21) and an upper cover (22); the accommodating cavity and the outlet are arranged in the bottom shell (21); the bottom shell (21) is also provided with an upper opening communicating with the accommodating cavity; the upper cover (22) is connected to the bottom shell (21) to close the upper opening.

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