Calibration data acquisition method, inspection gauge, storage medium and computer program product

Abstract

The present invention relates to a calibration data acquisition method, a test gauge, a storage medium and a computer program product. The calibration data acquisition method comprises: a first holding step for holding a test gauge (70) provided with a plurality of to-be-checked parts (71) in a first posture using a gauge moving device (50); a first measuring step for acquiring first distance data by measuring the distance between the plurality of to-be-checked parts (71) using a three-dimensional measuring device (10); a second holding step for holding the test gauge (70) in a second posture using the gauge moving device (50) after the first measuring step; a second measuring step for acquiring second distance data by measuring the distance between the plurality of to-be-checked parts (71) of the test gauge (70) in the second posture using the three-dimensional measuring device (10); and a step for generating calibration data including the first distance data and the second distance data.

Description

Technical Field

[0001] The present disclosure relates to a calibration data acquisition method and a test gauge. Background Art

[0002] Three-dimensional measuring devices for measuring the size, geometry, and other characteristics of a measurement object are known. A three-dimensional measuring device is calibrated using a check gauge to maintain measurement accuracy. For example, Japanese Patent Application Laid-Open No. 2023-017309 discloses a check gauge having a sphere disposed at a position corresponding to the vertex of a triangular pyramid. Summary of the invention

[0003] Problem that the invention aims to solve

[0004] In the configuration of Japanese Patent Laid-Open No. 2023-017309, it is necessary to prepare a check gauge having a relatively complicated structure in order to obtain sufficient calibration data to calibrate the three-dimensional measuring device.

[0005] The present disclosure has been made in view of these points, and an object of the present disclosure is to provide a calibration data acquisition method and a check gauge capable of simplifying the structure of a check gauge for calibrating a three-dimensional measuring apparatus.

[0006] Solutions for solving problems

[0007] According to one aspect of the present disclosure, a calibration data acquisition method includes: a first holding step for holding a verification gauge provided with a plurality of parts to be inspected in a first posture using a gauge moving device in a measurement space of a three-dimensional measuring device; a first measuring step for acquiring first distance data by measuring the distance between the plurality of parts to be inspected of the verification gauge in the first posture using the three-dimensional measuring device; a second holding step for holding the verification gauge in a second posture different from the first posture using the gauge moving device after the first measuring step; a second measuring step for acquiring second distance data by measuring the distance between the plurality of parts to be inspected of the verification gauge in the second posture using the three-dimensional measuring device; and a step for generating calibration data including at least the first distance data and the second distance data.

[0008] The inspection gauge may be a first inspection gauge having a support and a plurality of spheres arranged on the support at predetermined intervals as the plurality of parts to be inspected, and the first measuring step and the second measuring step may measure the center position of each sphere by bringing the front end of the detector of the three-dimensional measuring device into contact with the respective spheres.

[0009] The inspection gauge may be a second inspection gauge having a support and a plurality of parts to be inspected which are arranged on the support at predetermined intervals as the plurality of parts to be inspected, wherein each of the plurality of parts to be inspected has a conical or truncated-conical recess, and the first measuring step and the second measuring step may measure the conical or truncated-conical position to be measured by bringing the front end of the detector of the three-dimensional measuring device into contact with the inner circumferential surface of the recess.

[0010] The first holding step and the second holding step may hold the second test gauge using the gauge moving device so that the opening of the recess faces the probe.

[0011] The gauge moving device can be configured to selectively use one of the following gauges: i) a first inspection gauge having a support and a plurality of spheres arranged on the support at predetermined intervals, and ii) a second inspection gauge having a support and a plurality of parts to be inspected arranged on the support at predetermined intervals, wherein each of the parts to be inspected has a conical or truncated-conical recess, and in a case where it is determined that the three-dimensional measuring device does not have an operating mode of a detector for measuring a conical or truncated-conical position to be measured, the first measuring step or the second measuring step can use the first inspection gauge using the gauge moving device.

[0012] According to the present disclosure, the above method may further include the following steps: using the gauge mobile device to obtain the operating mode information of the detector from the three-dimensional measuring device, thereby determining whether the three-dimensional measuring device has an operating mode for measuring a conical or truncated cone-shaped position to be measured.

[0013] According to the present disclosure, the above-mentioned method may also include the following steps: using the gauge moving device to obtain a device ID for identifying the three-dimensional measuring device, based on the acquired device ID, referring to a storage unit for storing i) multiple device IDs and ii) multiple information related to whether the three-dimensional measuring device has an operating mode for measuring a conical or truncated cone-shaped position to be measured in association with each other, and when it is determined that the three-dimensional measuring device corresponding to the acquired device ID does not have the operating mode, causing the robotic arm to hold the first inspection gauge.

[0014] A testing gauge according to one aspect of the present disclosure is a testing gauge, comprising: a support member; and a plurality of parts to be inspected, which are arranged on the support member so that the plurality of parts to be inspected are arranged on a straight line along an extension direction of the support member, wherein the plurality of parts to be inspected include a first part to be inspected, a second part to be inspected and a third part to be inspected, and i) a first distance between the first part to be inspected and the second part to be inspected and ii) a second distance between the second part to be inspected and the third part to be inspected are different from each other.

[0015] Each part to be inspected may be a sphere.

[0016] Each of the parts to be inspected may have a conical or truncated-conical recess.

[0017] Each of the parts to be inspected may include three spherical elements, and the sphere at the front end of the probe of the three-dimensional measuring device contacts the three spherical elements.

[0018] Effects of the Invention

[0019] According to the present disclosure, the structure of a check gauge for calibrating a three-dimensional measuring device can be simplified. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A system according to one embodiment of the present disclosure is shown.

[0021] Figure 2 is a block diagram showing the configuration of a three-dimensional measuring device and a gauge moving device.

[0022] Figure 3 An example of a test gauge is shown.

[0023] Figure 4 An example of a conventional inspection gauge is shown.

[0024] Figure 5 is used Figure 4 A flow chart of an example of a method for acquiring calibration data for a test gauge.

[0025] Figure 6 is a schematic diagram for explaining a method for obtaining calibration data.

[0026] Figure 7 A test gauge according to a second embodiment is shown.

[0027] Figure 8 yes Figure 7 A cross-sectional view of a portion of a test gauge.

[0028] Fig. 9 A modified example of the inspection gauge is shown.

[0029] Description of Reference Numerals

[0030] 103D measuring equipment

[0031] 11 units

[0032] 12 detectors

[0033] 13 Support mechanism

[0034] 13a beam

[0035] 13b Column

[0036] 13c support

[0037] 14XZ direction moving mechanism

[0038] 15Y direction moving mechanism

[0039] 21 Ministry of Communications

[0040] 22 Measurement Department

[0041] 50 gauge mobile device

[0042] 51 Robotic Arm

[0043] 55 Control device

[0044] 56 Ministry of Communications

[0045] 57 Arm control unit

[0046] 70 Inspection Gauge

[0047] 71 Department to be inspected

[0048] 72 Support parts

[0049] 80 Inspection Gauge

[0050] 81 Department to be inspected

[0051] 82 Support parts

[0052] 83 concavity

[0053] 83a Inner Surface

[0054] 90 Inspection Gauge

[0055] 91 Department to be inspected

[0056] 92 Support parts

[0057] 95a, 95b, 95c spherical elements

[0058] CL Center

[0059] L Baseline

[0060] S100 System

[0061] T1-T6 sphere DETAILED DESCRIPTION

[0062] <First Embodiment>

[0063] Figure 1 A system according to one embodiment of the present disclosure is shown. Figure 2 is a block diagram showing the configuration of a three-dimensional measuring device and a gauge moving device.

[0064] like Figure 1 As shown, the system S100 includes a three-dimensional measuring device 10 and a gauge moving device 50. The main feature of the system S100 is to generate calibration data of the three-dimensional measuring device 10 by moving the inspection gauge 70 to a plurality of postures by the gauge moving device 50 and measuring the position of the part to be inspected of the inspection gauge 70 in each posture by the three-dimensional measuring device 10. According to such a configuration, the inspection gauge can be simplified compared with the complicated gauge in the prior art.

[0065] (Three-dimensional measuring device 10)

[0066] The three-dimensional measuring apparatus 10 has a stage 11 , a probe 12 , a supporting mechanism 13 , an XZ-direction moving mechanism 14 , a Y-direction moving mechanism 15 , and a control unit 20 .

[0067] The stage 11 has a horizontal placement surface on which a workpiece as an object to be measured can be placed. The probe 12 is held by a part of the XZ direction moving mechanism 14. In this example, the probe 12 extends in the Z direction. A sphere is provided at the front end of the probe 12.

[0068] The support mechanism 13 is a mechanism that supports the XZ direction moving mechanism 14. The support mechanism 13 has a beam 13a, a column 13b, and a support member 13c, and constitutes a gate-shaped frame. The support mechanism 13 is provided to be movable in the Y direction.

[0069] The beam 13a is a member extending in the X direction above the stage 11. The beam 13a supports the XZ direction moving mechanism 14. The column 13b and the support 13c are members for supporting the beam 13a. Both the column 13b and the support 13c extend in the Z direction.

[0070] The XZ direction moving mechanism 14 moves the detector 12 in the X direction and the Z direction. The XZ direction moving mechanism 14 may have a driving unit (not shown) that tilts the detector 12 in one or more directions intersecting the Z direction. The XZ direction moving mechanism 14 is configured to be movable in the X direction along the beam 13a. The Y direction moving mechanism 15 moves the support mechanism 13 in the Y direction. The XZ direction moving mechanism 14 and the Y direction moving mechanism 15 operate to move the detector 12 to an arbitrary position in the measurement space of the three-dimensional measuring device 10.

[0071] The control unit 20 is a computer that controls the operation of each part of the three-dimensional measuring device 10. Figure 2 As shown, the control unit 20 has a communication unit 21 and a measuring unit 22. The control unit 20 controls the position of the probe 12 so as to measure a plurality of to-be-inspected portions in the inspection gauge 70. The control unit 20 measures the plurality of to-be-measured portions by moving the probe 12 to the inspection gauge 70 based on coordinates indicating the preset to-be-measured portions.

[0072] The communication section 21 includes, for example, a communication device for sending and receiving information via a network. The communication section 21 receives an arrangement completion notification sent by the gauge moving device 50, the arrangement completion notification indicating that the inspection gauge 70 has been arranged in a predetermined posture. The communication section 21 sends a measurement completion notification to the gauge moving device 50, the measurement completion notification indicating that the three-dimensional measuring device 10 has completed the measurement of a plurality of to-be-inspected portions of the inspection gauge 70.

[0073] The measuring section 22 measures a plurality of positions to be measured of the inspection gauge 70. The measuring section 22 measures the respective positions to be measured while moving the probe 12, for example, in the X-axis direction, the Y-axis direction, and the Z-axis direction. The measuring section 22 measures the coordinates of the plurality of positions to be measured of each of the plurality of portions to be inspected 71 (details will be described later) of the inspection gauge 70. The measuring section 22 generates position data indicating the plurality of positions to be measured.

[0074] The measuring section 22 generates distance data indicating a distance to be measured, which is a distance between a plurality of positions to be measured indicated by the position data. When the center position of each of the portions to be inspected 71 is used as each of the positions to be measured, each of the positions to be measured is measured based on the coordinates of a plurality of positions where the front end of the probe 12 contacts the surface of each of the portions to be inspected 71. The distance to be measured is, for example, a distance between the centers of two spheres among a plurality of spheres (sphere-to-sphere distance).

[0075] The measuring section 22 can calculate the distance to be measured by correcting the distance between the plurality of positions to be measured based on the temperature of the measuring space. For example, the measuring section 22 can perform the correction based on the temperature of the measuring space by referring to a storage section for storing identification information of the plurality of inspection gauges and information indicating changes in length of the respective inspection gauges due to temperature changes in association with each other.

[0076] (Gauge mobile device 50)

[0077] The gauge mobile device 50 has a robot arm 51 and a control device 55. The gauge mobile device 50 is connected to the three-dimensional measuring device 10 in a communicable manner. The gauge mobile device 50 is connected to the three-dimensional measuring device 10 via a network, for example.

[0078] The robot arm 51 holds the inspection gauge 70 (described in detail later). The robot arm 51 is, for example, an articulated arm with a built-in actuator. The robot arm 51 holds the inspection gauge 70 in a predetermined posture in the measurement space of the three-dimensional measuring device 10 .

[0079] When holding the check gauge 70 , the robot arm 51 itself may autonomously move to hold the check gauge 70 arranged at a predetermined position, or the user may attach the check gauge 70 to the robot arm 51 .

[0080] The control device 55 is a computer that controls the operation of each part of the gauge moving device 50. Figure 2 As shown, the control device 55 includes a communication unit 56 and an arm control unit 57 .

[0081] The communication unit 56 includes, for example, a communication device for sending and receiving information via a network. The communication unit 56 acquires, for example, a gauge ID for identifying the inspection gauge 70 and an apparatus ID for identifying the object three-dimensional measuring device 10. The communication unit 56 also acquires an inspection ID indicating an inspection type. The communication unit 56 may acquire the gauge ID input by the operator, or may acquire the gauge ID by reading an identification tag attached to the inspection gauge 70 with a sensor. The communication unit 56 acquires, for example, an apparatus ID sent by the three-dimensional measuring device 10 connected to the gauge mobile device 50.

[0082] The communication section 56 sends a placement completion notification indicating that the inspection gauge 70 has been placed in a predetermined posture to the three-dimensional measuring device 10. The communication section 56 receives a measurement completion notification sent by the three-dimensional measuring device 10 indicating that measurement of the portion to be inspected of the inspection gauge 70 has been completed.

[0083] The arm control unit 57 identifies the posture information of the inspection gauge 70 based on one or more of the gauge ID, the device ID, and the inspection ID acquired by the communication unit 56. The "posture information of the inspection gauge" is information indicating that a plurality of postures of a predetermined inspection gauge should be maintained when the calibration data of the three-dimensional measuring device 10 is acquired using a predetermined inspection gauge. The "posture information of the inspection gauge" includes information of postures from a first posture to an nth posture (n is an integer) according to the inspection type. For example, if daily inspection and detailed inspection are set as inspection types, the number of postures in the detailed inspection is greater than the number of postures in the daily inspection. The arm control unit 57 controls the robot arm 51 according to the posture information of the identified inspection gauge so that the inspection gauge 70 is sequentially maintained in a plurality of postures.

[0084] (Inspection gauge 70)

[0085] Figure 3An example of the inspection gauge 70 is shown. The inspection gauge 70 has a plurality of parts to be inspected 71 and a support member 72. For example, the inspection gauge 70 has a configuration in which the plurality of parts to be inspected 71 and the support member 72 are integrally formed. Figure 3 In the example of FIG. 1 , as the plurality of sections to be inspected 71 , a first section to be inspected 71A, a second section to be inspected 71B, and a third section to be inspected 71C are provided.

[0086] For example, the first part to be inspected 71A, the second part to be inspected 71B and the third part to be inspected 71C are all spheres having the same shape and are arranged at a predetermined interval from each other. The first part to be inspected 71A and the third part to be inspected 71C are arranged at the ends of the support member 72. The support member 72 does not penetrate the first part to be inspected 71A and the third part to be inspected 71C, nor does it protrude from the first part to be inspected 71A and the third part to be inspected 71C. The second part to be inspected 71B is arranged between the first part to be inspected 71A and the third part to be inspected 71C.

[0087] The first portion to be inspected 71A, the second portion to be inspected 71B, and the third portion to be inspected 71C are arranged on a straight line along the extension direction of the support. Specifically, the first portion to be inspected 71A, the second portion to be inspected 71B, and the third portion to be inspected 71C are arranged so that the center of each sphere is located on the reference line L as a straight line. In this example, the distance d1 between the first portion to be inspected 71A and the second portion to be inspected 71B is different from the distance d2 between the second portion to be inspected 71B and the third portion to be inspected 71C, and is longer than the distance d2.

[0088] The support member 72 is a rod-shaped member extending along the reference line L. As an example, the support member 72 is a rod extending linearly. The cross-sectional shape of the support member 72 may be any of a circle, a rectangle, or a polygon. The support member 72 may be a hollow member or a solid member. The support member 72 may be formed to have the same cross-sectional shape in its length direction. The material of the support member 72 is, for example, the same in the entire region of the support member 72, and is, as an example, a metal.

[0089] Figure 4 An example of a conventional inspection gauge is shown. Figure 4 In the inspection gauge of FIG. 1 , spheres T1 to T6 as the parts to be inspected are arranged at the vertices of a regular triangular prism. Conventionally, in the three-dimensional measuring apparatus 10, for example, Figure 4 The calibration data can be obtained by using the inspection gauge shown in FIG. 70. In the present embodiment, a simple inspection gauge such as the inspection gauge 70 can be used to obtain similar calibration data. For example, the distance d1 of the inspection gauge 70 can correspond to the distance between the sphere T2 and the sphere T6 (the length of the diagonal line of the side of the triangular prism). For example, the distance d2 of the inspection gauge 70 can correspond to the distance between the sphere T2 and the sphere T3 (the length of one side of the bottom surface of the triangular prism).

[0090] (Calibration data acquisition method)

[0091] Figure 5 is used Figure 3 Flow chart of an example of a method for acquiring calibration data of the inspection gauge 70. Figure 6 1 is a schematic diagram for explaining the calibration data acquisition method. First, in step S1, the control device 55 of the gauge moving device 50 acquires the device ID of the object three-dimensional measuring device 10, the inspection ID of the inspection to be performed, and the gauge ID of the inspection gauge 70 to be used. The control device 55 identifies the posture information of the inspection gauge 70 based on the acquired device ID, inspection ID, and gauge ID.

[0092] Next, in step S2, the robot arm 51 holds the inspection gauge 70 in the measurement space of the three-dimensional measuring device 10 in the first posture indicated by the posture information (see Figure 6 Thereafter, the control device 55 transmits to the three-dimensional measuring apparatus 10 an arrangement completion notification indicating that the inspection gauge 70 has been arranged in the first posture.

[0093] Figure 6 The orientation of the inspection gauge 70 depicted in the figure is shown as a reference and does not limit the orientation of the inspection gauge 70 in the present disclosure. As an example, the "first posture" of the inspection gauge 70 may be that the first to-be-inspected portion 71A and the second to-be-inspected portion 71B are respectively located on the same side as the first to-be-inspected portion 71A and the second to-be-inspected portion 71B. Figure 4 The postures of the inspection gauge at the positions corresponding to the spheres T2 and T6.

[0094] Next, in step S3, in response to the control unit 20 of the three-dimensional measuring device 10 receiving the arrangement completion notification from the control device 55, the three-dimensional measuring device 10 measures the distances between the plurality of to-be-inspected portions 71 of the inspection gauge 70 in the first posture. Thereafter, the control unit 20 sends a measurement completion notification indicating that the measurement has been completed to the gauge moving device 50.

[0095] Next, in step S4, in response to the control device 55 receiving the measurement completion notification from the three-dimensional measuring device 10, the robot arm 51 holds the inspection gauge 70 in a second posture different from the first posture in the measurement space of the three-dimensional measuring device 10 (see Figure 6 (b)). Thereafter, in a similar manner to that in step S2, the control device 55 sends an arrangement completion notification to the three-dimensional measuring apparatus 10.

[0096] As an example, the “second posture” may be that the second to-be-inspected portion 71B and the third to-be-inspected portion 71C are respectively located on the same side as the second to-be-inspected portion 71B and the third to-be-inspected portion 71C. Figure 4 The postures of the inspection gauge at the positions corresponding to the spheres T2 and T3.

[0097] Next, in step S5 , in a similar manner to step S3 , the three-dimensional measuring apparatus 10 measures the distance between the parts to be inspected 71 of the inspection gauge 70 in the second posture.

[0098] Next, in step S6, the control unit 20 generates calibration data, which at least includes: i) first distance data as the distance measured in step S3; ii) second distance data as the distance measured in step S5. In this way, the calibration data required for calibrating the three-dimensional measuring device 10 is acquired.

[0099] Despite Figure 5 In the flowchart of FIG. 1 , the inspection gauge 70 is maintained in the first posture and the second posture, but the inspection gauge 70 may be maintained in more postures, and the distance between the parts to be inspected 71 in each posture may be measured.

[0100] (Effects of this embodiment)

[0101] According to the above configuration, the three-dimensional measuring apparatus 10 measures the position to be measured in each posture while holding the inspection gauge 70 in a plurality of postures with the robot arm 51, so that there is no need for a conventional technique or a conventional method. Figure 4 This makes it possible to simplify the inspection gauge 70 without having to use an inspection gauge with a complex structure like that in FIG.

[0102] In addition, according to the inspection gauge 70 of the present embodiment, i) the first distance d1 between the first part to be inspected 71A and the second part to be inspected 71B and ii) the second distance d2 between the second part to be inspected 71B and the third part to be inspected 71C are different from each other, so three distances can be measured using one inspection gauge 70, namely i) the first distance d1, ii) the second distance d2, and iii) the distance which is the sum of the first distance d1 and the second distance d2.

[0103] <Second Embodiment>

[0104] Figure 7 A test gauge according to a second embodiment is shown. Figure 8 yes Figure 7 A cross-sectional view of a portion of a test gauge. Figure 7 The inspection gauge 80 has a plurality of to-be-inspected portions 81 and a support member 82. As an example, the support member 82 is a member having a rectangular cross-sectional shape.

[0105] As the plurality of sections to be inspected 81, there are provided a first section to be inspected 81A, a second section to be inspected 81B, and a third section to be inspected 81C. The first section to be inspected 81A, the second section to be inspected 81B, and the third section to be inspected 81C are arranged so that their positions to be measured are located on a reference line L which is a straight line. In a manner similar to the first embodiment, the distance between the first section to be inspected 81A and the second section to be inspected 81B is longer than the distance between the second section to be inspected 81B and the third section to be inspected 81C.

[0106] Since each of the to-be-inspected portions 81 has the same shape, the structure of the to-be-inspected portion 81 will be described below by taking the first to-be-inspected portion 81A as an example. Figure 8 As shown, a concave portion 83 having a truncated cone shape is formed in the portion to be inspected 81. By bringing the front end of the probe 12 into contact with the inner peripheral surface 83a of the concave portion 83, the position to be measured of the portion to be inspected 81 can be measured. The three-dimensional measuring apparatus 10 moves the probe 12 toward the portion to be inspected 81 so that the sphere at the front end of the probe 12 is located at the center CL of the portion to be inspected 81, and measures the coordinates of the position where the sphere has come into contact with the inner peripheral surface 83a.

[0107] Specifically, the three-dimensional measuring device 10 moves the probe 12 to measure each position to be measured by a function called "measurement of finding the vertex of a cone trajectory." "Measurement of finding the vertex of a cone trajectory" is a method in which the front end of the probe 12 is made to track the measurement surface, and the moving direction of the contact point is continuously determined while observing a small displacement vector of the contact point, thereby autonomously finding the moving path and measuring the measurement reference position.

[0108] According to the method of measuring each position to be measured by bringing the front end of the probe 12 into contact with the inner circumferential surface 83a of the truncated cone-shaped recess 83 as described above, each position to be measured can be measured in a short time compared to the method of bringing the front end of the probe 12 into contact with multiple parts on the outer circumferential surface of the sphere.

[0109] although Figure 7 and Figure 8 The inspection gauge 80 formed with a truncated cone-shaped recess is shown, but the portion to be inspected 81 of the inspection gauge 80 may also have a conical recess.

[0110] (Method using test gauge 80)

[0111] Also in use Figure 7 and Figure 8 The inspection gauge 80 shown is used to calibrate the three-dimensional measuring device 10 to Figure 5 In a manner similar to the flowchart of FIG. 1 , the inspection gauge 80 can be held in a plurality of postures by the robot arm 51 and the position of the portion to be inspected 81 in each posture can be measured.

[0112] However, in the case of using the check gauge 80, unlike the check gauge 70 in which the portion to be inspected 71 is a sphere, if the check gauge 80 is not arranged in a direction in which the probe 12 can move toward the recess 83 of the portion to be inspected 81, the position to be measured of the portion to be inspected 81 cannot be measured. Therefore, in the step of holding the check gauge 80, the robot 51 holds the check gauge 80 so that the opening of the recess 83 faces the probe 12. According to such a configuration, the three-dimensional measuring apparatus 10 can measure the position to be measured by bringing the front end of the probe 12 into good contact with the recess 83.

[0113] <Modification 1>

[0114] The gauge mobile device 50 may be configured to selectively use Figure 3 The test gauge 70 is used as the first test gauge and Figure 7 For example, the gauge moving device 50 may be configured to autonomously operate the robot arm 51 to hold the test gauge 70 or the test gauge 80 from a gauge container configured with a plurality of test gauges.

[0115] As mentioned above, Figure 3 The inspection gauge 70 and Figure 7 Compared with the inspection gauge 80 of the three-dimensional measuring device 10, the inspection gauge 80 has the advantage of being able to measure the position to be measured in a short time. Therefore, in the case where both of these inspection gauges are available, as an example, the gauge moving device 50 can give priority to using the inspection gauge 80. However, in the inspection gauge 80, it is necessary to measure the position to be measured by contacting the front end of the probe 12 with the recess 83 of the part to be inspected 81, and the three-dimensional measuring device 10 needs to have an operating mode for measuring the position to be measured by contacting the front end of the probe 12 with the recess 83 (for example, a "measurement of finding the vertex of the conical trajectory" mode). In the case where the three-dimensional measuring device 10 does not have such an operating mode, since the inspection gauge 80 cannot be used, the inspection gauge 70 needs to be used.

[0116] Therefore, the three-dimensional measuring apparatus 10 and the gauge moving apparatus 50 may be configured such that a check gauge suitable for the target three-dimensional measuring apparatus 10 is selected from a plurality of types of check gauges.

[0117] For example, the arm control unit 57 (see Figure 2 ) determines whether the three-dimensional measuring device 10 has an operation mode for measuring a conical or truncated cone-shaped position to be measured based on the operation mode information of the probe received by the communication unit 56 from the three-dimensional measuring device 10. In the case where the three-dimensional measuring device 10 does not have an operation mode for measuring a conical or truncated cone-shaped position to be measured, the arm control unit 57 causes the robot arm 51 to hold the inspection gauge 70.

[0118] According to this configuration, when the three-dimensional measuring device 10 does not have an operating mode corresponding to the inspection gauge 80, since the gauge moving device 50 autonomously selects the inspection gauge 70 as the first inspection gauge, the operator does not need to input information related to the operating mode of the three-dimensional measuring device 10 to the gauge moving device 50, etc.

[0119] It should be noted that the arm control section 57 can determine the operation mode of the three-dimensional measuring device 10 based on the device ID received by the communication section 56 from the three-dimensional measuring device 10 by referring to a storage section for storing i) a plurality of device IDs and ii) a plurality of operation mode information of the devices indicated by the respective device IDs (for example, information on whether an operation mode for measuring a position to be measured of a cone or a truncated cone is included) in association with each other. In the case where the three-dimensional measuring device corresponding to the acquired device ID does not have an operation mode, the arm control section 57 causes the robot arm 51 to hold the inspection gauge 70 as the first inspection gauge. The arm control section 57 of the gauge moving device 50 can acquire the above-mentioned device ID from equipment other than the three-dimensional measuring device 10.

[0120] <Modification 2>

[0121] Inspection gauges are not limited to Figure 3 and Figure 4 The configuration shown can also have Fig. 9 Configuration shown. Fig. 9 A variation of the inspection gauge is shown. Fig. 9 The inspection gauge 90 has a plurality of to-be-inspected portions 91 and a support member 92. Since the support member 92 has Figure 7 The support member 82 has the same structure as that of the support member 82, so its description is omitted.

[0122] A first inspected portion 91A, a second inspected portion 91B and a third inspected portion 91C are provided as the plurality of inspected portions 91. Since the first inspected portion 91A, the second inspected portion 91B and the third inspected portion 91C all have the same structure, the second inspected portion 91B is taken as an example for description.

[0123] The portion to be inspected 91 has three spherical elements 95a, 95b, and 95c with which the sphere at the front end of the probe 12 contacts. The spherical elements 95a, 95b, and 95c are all, for example, spheres having the same size, and are fixed to the upper surface of the support member 92. The spherical elements 95a, 95b, and 95c are arranged at positions such that when the sphere of the probe 12 approaches from above, the spherical elements 95a, 95b, and 95c contact the sphere of the probe 12 to prevent the probe 12 from moving further (in this state, the sphere of the probe 12 does not contact the upper surface of the support member 92).

[0124] In a manner similar to the above-mentioned inspection gauges 70 and 80, the inspection gauge 90 is also positioned in a plurality of postures in the measurement space of the three-dimensional measuring device 10 by the robotic arm 51, and the position of the part to be inspected 91 in each posture is measured by the three-dimensional measuring device 10, so that calibration data for well calibrating the three-dimensional measuring device 10 can be obtained.

[0125] exist Figure 3 and Figure 7 In the inspection gauge of , three parts to be inspected are set, but more parts to be inspected can be set, or only two parts to be inspected can be set. The multiple parts to be inspected can be arranged so that the distance d1 (see Figure 3 ) is the same as the distance d2.

[0126] The present disclosure is described based on exemplary embodiments. The technical scope of the present disclosure is not limited to the scope described in the above embodiments, and various changes and modifications can be made within the scope of the present invention. For example, all or part of the device can be configured with any unit that is functionally or physically dispersed or integrated. In addition, new exemplary embodiments generated by any combination of embodiments are also included in the exemplary embodiments of the present invention. In addition, the effects of the new embodiments generated by the combination also have the effects of the original exemplary embodiments together.

Claims

1. A calibration data acquisition method, comprising: A first holding step is used to hold the inspection gauge provided with a plurality of to-be-inspected parts in a first posture by using the gauge moving device in the measurement space of the three-dimensional measuring device; a first measuring step for acquiring first distance data by measuring the distances between a plurality of to-be-inspected portions of the inspection gauge in the first posture using the three-dimensional measuring device; a second holding step for holding the inspection gauge in a second posture different from the first posture using the gauge moving device after the first measuring step; a second measuring step for acquiring second distance data by measuring the distances between the plurality of to-be-inspected portions of the inspection gauge in the second posture using the three-dimensional measuring device; as well as A step for generating calibration data comprising at least said first distance data and said second distance data.

2. The calibration data acquisition method according to claim 1, wherein: The inspection gauge is a first inspection gauge having a support and a plurality of spheres provided on the support at predetermined intervals as the plurality of portions to be inspected, and The first measuring step and the second measuring step measure the center position of each sphere by bringing the front end of the probe of the three-dimensional measuring device into contact with the respective spheres.

3. The calibration data acquisition method according to claim 1, wherein: The inspection gauge is a second inspection gauge having a support and a plurality of portions to be inspected provided on the support at predetermined intervals as the plurality of portions to be inspected, wherein the plurality of portions to be inspected each have a conical or truncated-conical concave portion, and The first measuring step and the second measuring step measure the conical or truncated-conical position to be measured by bringing the front end of the probe of the three-dimensional measuring device into contact with the inner peripheral surface of the recessed portion.

4. The calibration data acquisition method according to claim 3, wherein: The first holding step and the second holding step hold the second check gauge using the gauge moving device so that the opening of the recess faces the probe.

5. The calibration data acquisition method according to claim 1, wherein: The gauge moving device is configured to selectively use one of the following gauges: i) a first inspection gauge having a support and a plurality of spheres arranged on the support at predetermined intervals, and ii) a second inspection gauge having a support and a plurality of parts to be inspected arranged on the support at predetermined intervals, wherein each of the parts to be inspected has a conical or truncated-conical concave portion, and In a case where it is determined that the three-dimensional measuring device does not have an operation mode of a probe for measuring a conical or truncated-conical position to be measured, the first measuring step or the second measuring step uses the first inspection gauge using the gauge moving device.

6. The calibration data acquisition method according to claim 5, further comprising the following steps: The operating mode information of the detector is obtained from the three-dimensional measuring device by using the gauge moving device, so as to determine whether the three-dimensional measuring device has an operating mode for measuring a conical or truncated cone-shaped position to be measured.

7. The calibration data acquisition method according to claim 5, further comprising the following steps: Using the gauge moving device, an equipment ID for identifying the three-dimensional measuring device is obtained, and based on the obtained equipment ID, reference is made to a storage unit for storing i) multiple equipment IDs and ii) multiple information related to whether the three-dimensional measuring device has an operation mode for measuring a conical or truncated cone-shaped position to be measured in association with each other, and when it is determined that the three-dimensional measuring device corresponding to the obtained equipment ID does not have the operation mode, the robot arm holds the first inspection gauge.

8. A test gauge comprising: Supports; as well as A plurality of parts to be inspected are arranged on the support member so that the plurality of parts to be inspected are arranged on a straight line along the extension direction of the support member, The plurality of parts to be inspected include a first part to be inspected, a second part to be inspected and a third part to be inspected, and i) a first distance between the first part to be inspected and the second part to be inspected and ii) a second distance between the second part to be inspected and the third part to be inspected are different from each other.

9. The test gauge according to claim 8, wherein: Each part to be inspected is a sphere.

10. The test gauge of claim 8, wherein: Each of the parts to be inspected has a conical or truncated-conical recess.

11. The test gauge of claim 8, wherein: Each of the portions to be inspected includes three spherical elements, with which a sphere at a front end of a probe of the three-dimensional measuring apparatus contacts. 12 . A computer storage medium storing a computer program for causing a computer to execute the calibration data acquisition method according to claim 1 .

13. A computer program product comprising a computer program for causing a computer to execute the calibration data acquisition method according to any one of claims 1 to 7.

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