Auxiliary equipment for semiconductor production

Abstract

The invention relates to the technical field of semiconductors, and discloses an auxiliary device for semiconductor production, which comprises a bottom frame, the top of the bottom frame is fixedly connected with a bottom plate, the surface of the bottom plate is fixedly connected with a dust removal fan, the inner wall of the bottom frame is fixedly connected with a conveyor belt, and the end surface of one end, close to the conveyor belt, of the bottom frame is fixedly connected with an inbox. A motor is fixedly connected to the surface of the end, away from the inbox, of the bottom frame, and a rotation control pump is fixedly connected to the inner wall of the side, close to the motor, of the bottom frame. When the device is used, semiconductor materials needing to be collected are placed into the device through a feeding plate in a placing component, an engine is started, the engine can drive an output rod to operate, when the output rod operates, a half-toothed plate can be driven to rotate, the half-toothed plate can drive a periodic rack to perform periodic operation through surface meshing, and then the output rod is driven to rotate. When the periodic rack runs, the connecting rack can be driven to slide along the faces, close to each other, of the two rack groove plates.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to auxiliary equipment for semiconductor production. Background Art

[0002] Semiconductors are materials with electrical conductivity between that of insulators and conductors. Their electrical conductivity is easily controlled and can be used as a component material for information processing. The core units of many electronic products, such as computers, mobile phones, and digital recorders, use the changes in the electrical conductivity of semiconductors to process information, which is the most influential in commercial applications.

[0003] Auxiliary equipment for semiconductor production refers to various auxiliary tools and equipment used in the semiconductor manufacturing process. They play a vital role in various links such as silicon wafer preparation, cleaning, coating, testing and packaging. When the semiconductor is processed, it needs manual loading and unloading, which makes the originally simple work consume a lot of manpower and reduces the efficiency of semiconductor production and transportation. Summary of the invention

[0004] The object of the present invention is to provide an auxiliary equipment for semiconductor production to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention is achieved through the following technical solutions: The present invention is an auxiliary device for semiconductor production, comprising a bottom frame, a bottom plate fixedly connected to the top of the bottom frame, a dust removal fan fixedly connected to the surface of the bottom plate, a conveyor belt fixedly connected to the inner wall of the bottom frame, a receiving box fixedly connected to the end surface of the bottom frame close to one end of the conveyor belt, a motor fixedly connected to the surface of the bottom frame away from the receiving box, a self-rotation control pump fixedly connected to the inner wall of the bottom frame close to the motor, an engine fixedly connected to the inner wall of the bottom frame, a control board fixedly connected to the surface of the bottom plate away from the bottom frame, four dust removal fans are provided, the four dust removal fans are divided into two groups, and the number of each group is two, and the two groups of dust removal fans are symmetrically distributed on the surface of the bottom frame, and also include: A placing component, the placing component comprises an output rod, a surface of the output rod is fixedly connected with a half-tooth plate, and a surface of the half-tooth plate is meshingly connected with a periodic rack; A transmission component, wherein the transmission component comprises a transmission shaft, a transmission rod is fixedly connected to the surface of the transmission shaft, a vertical shaft is arranged on the end surface of the rotation control pump close to one end of the transmission rod, and a transmission shaft is fixedly connected to the surface of the vertical shaft; The collecting component comprises a collecting plate, a surface of the bottom plate close to the collecting plate is provided with a spring groove, and an end surface of the spring groove is fixedly connected with a buffer spring.

[0006] Furthermore, the display component includes a connecting rack, and a rack groove plate is fixedly connected to the inner wall of the bottom frame close to the connecting rack side, and the surface of the connecting rack is meshingly connected with the output tooth, and the number of the rack groove plates is two, and the two rack groove plates are symmetrically distributed on the surface of the connecting rack, and the surface of the connecting rack is slidingly connected to the two rack groove plates close to each other, and the end face of the connecting rack away from the output tooth is fixedly connected to the surface of the periodic rack close to the rack groove plate.

[0007] Furthermore, the end face of the output tooth away from one end of the connected rack is fixedly connected to a turn plate, the surface of the turn plate is slidably connected to a turn plate slide plate, the surface of the turn plate away from the turn plate slide plate is fixedly connected to a placement arc plate, the end face of the bottom frame close to one end of the placement arc plate is fixedly connected to a feed plate, the surface of the placement arc plate away from the feed plate is provided with an auxiliary plate, the surface of the output tooth passes through the inner wall of the bottom frame to the end face of the turn plate, and the end face of the auxiliary plate away from one end of the placement arc plate is fixedly connected to the top of the bottom frame.

[0008] Furthermore, the transmission component includes a transverse axis, the surface of the transverse axis is connected to an auxiliary belt in a transmission manner, the surface of the auxiliary belt away from the transverse axis is fixedly connected to a fixed plate, the inner wall of the auxiliary belt away from the transverse axis is rotatably connected to a connecting shaft, and the surface of the auxiliary plate close to the transmission rod is provided with a transmission groove plate; There are two transmission shafts, which are symmetrically distributed on the end surface of the motor. There are six vertical shafts, which are divided into three groups, and each group has two vertical shafts. The three groups of vertical shafts are equidistantly distributed along the surface of the rotation control pump. There are two transverse shafts, which are symmetrically distributed on the surface of the control plate. The end surface of the transverse shaft away from the control plate is rotatably connected to the inner wall of the bottom plate, and the end surface of the connecting shaft is rotatably connected to the inner wall of the bottom plate.

[0009] Furthermore, a lifting rod is provided on the end surface of the control plate close to one end of the base plate, a push plate is fixedly connected to the end surface of the lifting rod away from one end of the control plate, a buffer rod is fixedly connected to the end surface of the push plate away from one end of the lifting rod, a direction plate is fixedly connected to the end surface of the buffer rod away from one end of the push plate, two buffer rods are provided, the two buffer rods are symmetrically distributed on the surface of the push plate, and the end surface of the direction plate away from one end of the buffer rod is fixedly connected to the top of the base plate.

[0010] Furthermore, the end face of the direction plate close to one end of the buffer rod is fixedly connected to a direction base, the inner wall of the direction base is rotatably connected to a rotating plate transverse axis, the surface of the rotating plate transverse axis is fixedly connected to a two-way rotating plate, the surface of the two-way rotating plate away from the buffer rod is fixedly connected to an elastic pad, the number of the two-way rotating plates is three, the three two-way rotating plates are equidistantly distributed along the surface of the rotating plate transverse axis, the surface of the two-way rotating plate close to the buffer rod is in contact with the surface of the push plate close to the direction plate.

[0011] Furthermore, the collecting component comprises a push column rotating shaft, a push column connecting rod is fixedly connected to the surface of the push column rotating shaft, an arc-shaped push column is fixedly connected to the surface of the push column connecting rod close to the collecting plate, and a blanking inclined plate is fixedly connected to the surface of the bottom plate close to the collecting plate; The number of the spring grooves is set to two, and the two spring grooves are symmetrically distributed on the surface of the bottom plate. The surface of the buffer spring away from the spring groove is in contact with the bottom of the collecting plate. The number of the blanking inclined plates is set to three, and the three blanking inclined plates are equidistantly distributed along the surface of the bottom plate. The number of the push column rotating shafts is set to two, and the two push column rotating shafts are symmetrically distributed on the surface of the bottom plate. The number of the push column connecting rods is set to two, and the two push column connecting rods are symmetrically distributed about the surface center of the push column rotating shaft.

[0012] Furthermore, a collecting plate arc column is fixedly connected to the surface of the collecting plate close to the blanking inclined plate, a collecting plate feeding plate is fixedly connected to the surface of the collecting plate arc column, a collecting plate pushing column is fixedly connected to the inner wall of the collecting plate, an end face of the collecting plate pushing column close to one end of the collecting plate arc column is fixedly connected to a collecting plate clamping groove, a collecting plate discharging groove is provided on the surface of the collecting plate away from the collecting plate arc column, a discharging swivel is fixedly connected to the surface of the collecting plate close to the collecting plate discharging swivel, and a discharging swivel is rotatably connected to the inner wall of the discharging swivel with a discharging swivel plate; The number of the collecting plate arc columns is set to six, and the six collecting plate arc columns are divided into three groups, and the number of each group is two, and the three groups of collecting plate arc columns are equidistantly distributed along the surface of the collecting plate, the number of the collecting plate feed plates is set to two, and the two collecting plate feed plates are symmetrically distributed on the surface of the collecting plate arc columns, the number of the collecting plate push columns is set to two, and the two collecting plate push columns are symmetrically distributed on the surface of the collecting plate slot, and the surface of the collecting plate is slidably connected to the inner wall of the bottom plate.

[0013] The present invention has the following beneficial effects: When the present invention is in use, the semiconductor materials to be collected are placed in the device through the feed plate in the placing component, and the engine is started. The engine will drive the output rod to run. When the output rod runs, it will drive the semi-tooth plate to rotate. The semi-tooth plate will drive the periodic rack to run periodically through surface engagement. When the periodic rack runs, it will drive the connecting rack to slide along the surfaces of the two rack groove plates that are close to each other. When the connecting rack runs, it will drive the output teeth to rotate periodically through surface engagement. When the output teeth run, it will drive the rotating plate to run along the surface of the rotating plate slide plate. At the same time, when the rotating plate runs, it will drive the placing arc plate to run periodically. At this time, the materials entering the placing component can run to the surface of the auxiliary plate in three directions through the periodic rotation of the placing arc plate and the centrifugal force, which will not cause the accumulation of materials and cause blockage.

[0014] When the present invention is in use, in the conveying component, when the material enters the surface of the auxiliary plate, the motor starts to drive the transmission shaft to rotate, and the transmission shaft will drive the transmission rod to rotate along the surface of the transmission slot plate. When the transmission rod rotates, it will push the material on the surface of the auxiliary plate to enable it to run better. When the material is pushed off the surface of the auxiliary plate and enters the surface of the bottom plate, the self-rotation control pump starts to drive the vertical shaft to rotate, and the vertical shaft will drive the conveying shaft to rotate. When the conveying shaft rotates, it will transmit the material that falls into it and limit the material. At the same time, the control board starts to drive the lifting rod to run. When the lifting rod runs, it will drive the push plate to run, and the push plate will drive the push buffer rod to run. At the same time, the push plate drives the two-way rotating plate to run through surface contact, and the two-way rotating plate will It will drive the horizontal axis of the rotating plate to rotate along the inner wall of the direction base. By controlling the rotation angle of the push plate on the two-way rotating plate, the material entering it can be controlled to run along the surface of the bottom plate to prevent directional deviation due to the force when the material enters the device. At the same time, when the two-way rotating plate rotates, it will drive the elastic pad at the other end to move up and down, and the elastic pad will limit the material on the surface of the auxiliary plate in advance. At the same time, when the control board is started, it will drive the horizontal axis to rotate, and the horizontal axis will drive the auxiliary belt to transmit. When the auxiliary belt is transmitted, it will drive the fixed plate to run. At this time, it is necessary to place the collecting plate on the end face of the fixed plate, and through the operation of the auxiliary belt, the collecting plate is periodically placed in the device.

[0015] When the present invention is in use, in the collecting component, after the auxiliary belt drives the fixed plate to run to a certain position, the collecting plate on the surface of the fixed plate will fall to the surface of the bottom plate. At this time, the collecting plate will first collide with the buffer spring to buffer its fall to prevent the collecting plate from being damaged due to excessive falling speed. At this time, the material runs through the surface of the falling inclined plate and enters the collecting plate through the mutually approaching surfaces of the two collecting plate feeding plates. At the same time, if the material deviates, the material is positioned by the curvature deflection of the collecting plate arc column to prevent it from deviating. When the material enters the collecting plate, the collecting plate push column will first By positioning the collecting plate slot, the material entering the device can be collected. At the same time, when collecting the collecting plate, the control panel will control the push column shaft to rotate, and the push column shaft will drive the push column connecting rod to run periodically, and the push column connecting rod will drive the arc-shaped push column to run. Through the contact between the surface of the arc-shaped push column and the surface of the collecting plate, the periodic limit of the collecting plate can be controlled. After collection, the collecting plate will run along the conveyor belt. When the collecting plate enters the surface of the conveyor belt and runs, the dust removal fan will start, and the material in the collecting plate will be subjected to certain surface dust removal treatment to prevent dust on its surface from entering the inbox.

[0016] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a cross-sectional view of the overall structure of the present invention; Figure 3 This is a bottom view of the component placement structure of the present invention; Figure 4 It is a cross-sectional view of the structure of the components of the present invention; Figure 5 It is a schematic diagram of the structure of the transmission component of the present invention; Figure 6 For the present invention Figure 5 A magnified view of part A in FIG. Figure 7 It is a cross-sectional view of the structure of the collecting component of the present invention; Figure 8 For the present invention Figure 7 A magnified view of part B in FIG. Fig. 9 This is a cross-sectional view of the collecting plate structure of the present invention.

[0019] In the accompanying drawings, the components represented by the reference numerals are listed as follows: In the figure: 1. Placement component; 2. Conveying component; 3. Collection component; 4. Engine; 5. Control panel; 6. Motor; 7. Rotation control pump; 8. Dust removal fan; 9. Conveyor belt; 10. Bottom frame; 11. Bottom plate; 12. Inbox; 21. Output rod; 22. Half tooth plate; 23. Periodic rack; 24. Connecting rack; 25. Rack groove plate; 26. Output gear; 27. Turn plate; 28. Turn plate slide plate; 29. ​​Placement arc plate; 30. Feed plate; 31. Auxiliary plate; 41. Transmission shaft; 42. Transmission rod; 43. Transmission groove plate; 44. Vertical shaft; 45. Conveying shaft; 46. ​​Horizontal axis; 47. Auxiliary belt; 48. Fixed plate; 49. Connecting axis; 50. Lifting rod; 51. Push plate; 52. Buffer rod; 53. Direction plate; 54. Direction base; 55. Two-way swivel plate; 56. swivel plate horizontal axis; 57. Elastic pad; 61. Collecting plate; 62. Spring groove; 63. Buffer spring; 64. Blanking inclined plate; 65. Push column rotating shaft; 66. Push column connecting rod; 67. Arc push column; 68. Collecting plate arc column; 69. Collecting plate feed plate; 70. Collecting plate push column; 71. Collecting plate slot; 72. Collecting plate discharge slot; 73. Discharge swivel seat; 74. Discharge swivel plate. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1 - Fig. 9As shown, the present invention is an auxiliary device for semiconductor production, including a bottom frame 10, a bottom plate 11 is fixedly connected to the top of the bottom frame 10, a dust removal fan 8 is fixedly connected to the surface of the bottom plate 11, and a conveyor belt 9 is fixedly connected to the inner wall of the bottom frame 10. After the collection is completed, the collection plate 61 will run along the conveyor belt 9. When the collection plate 61 enters the surface of the conveyor belt 9, the dust removal fan 8 is started, and a certain surface dust removal treatment is performed on the material in the collection plate 61 to prevent the dust on the surface from entering the inbox 12. The bottom frame 10 The end surface near one end of the conveyor belt 9 is fixedly connected with a receiving box 12, the surface of the bottom frame 10 away from the receiving box 12 is fixedly connected with a motor 6, the inner wall of the bottom frame 10 near the motor 6 is fixedly connected with a rotation control pump 7, the inner wall of the bottom frame 10 is fixedly connected with an engine 4, the surface of the bottom plate 11 away from the end of the bottom frame 10 is fixedly connected with a control board 5, the number of dust removal fans 8 is set to four, the four dust removal fans 8 are divided into two groups, and the number of each group is two, and the two groups of dust removal fans 8 are symmetrically distributed on the surface of the bottom frame 10, and also include: The placing component 1 includes an output rod 21. When the engine 4 is started, the engine 4 will drive the output rod 21 to run. When the output rod 21 runs, it will drive the semi-toothed plate 22 to rotate. The surface of the output rod 21 is fixedly connected with the semi-toothed plate 22. The semi-toothed plate 22 drives the periodic rack 23 to run periodically through surface meshing. The surface of the semi-toothed plate 22 is meshed with the periodic rack 23. When the periodic rack 23 runs, it will drive the connected rack 24 to slide along the surfaces of the two rack groove plates 25 that are close to each other. Conveying component 2, conveying component 2 includes transmission shaft 41, when the material enters the surface of auxiliary plate 31. Motor 6 starts, drives transmission shaft 41 to rotate, transmission shaft 41 will drive transmission rod 42 to rotate along the surface of transmission slot plate 43, when transmission rod 42 rotates, it will push the material on the surface of auxiliary plate 31, so that it can run better, the surface of transmission shaft 41 is fixedly connected with transmission rod 42, the end face of self-rotation control pump 7 close to one end of transmission rod 42 is provided with vertical shaft 44, when the material is pushed off the surface of auxiliary plate 31, it enters the surface of bottom plate 11, at this time, self-rotation control pump 7 starts, drives vertical shaft 44 to rotate, vertical shaft 44 will drive transmission shaft 45 to rotate, when transmission shaft 45 rotates, it will transmit the material falling into it, and limit the material, the surface of vertical shaft 44 is fixedly connected with transmission shaft 45; The collecting component 3 includes a collecting plate 61. When the auxiliary belt 47 drives the fixing plate 48 to run to a certain position, the collecting plate 61 on the surface of the fixing plate 48 will fall to the surface of the bottom plate 11. At this time, the collecting plate 61 will first collide with the buffer spring 63, and have a certain buffering effect on its falling, so as to prevent the collecting plate 61 from being damaged due to excessive falling speed. A spring groove 62 is provided on the surface of the bottom plate 11 close to the collecting plate 61, and the end face of the spring groove 62 is fixedly connected with a buffer spring 63.

[0022] The display component 1 includes a connecting rack 24. When the connecting rack 24 is running, the output tooth 26 will be driven to rotate periodically through the surface meshing action. The inner wall of the bottom frame 10 close to the connecting rack 24 is fixedly connected with a rack groove plate 25. The surface of the connecting rack 24 is meshed with the output tooth 26. When the output tooth 26 is running, it will drive the rotating plate 27 to run along the surface of the rotating plate slide plate 28. There are two rack groove plates 25, and the two rack groove plates 25 are symmetrically distributed with the surface of the connecting rack 24. The surface of the connecting rack 24 is slidably connected with the two rack groove plates 25 close to each other, and the end face of the connecting rack 24 away from the output tooth 26 is fixedly connected with the surface of the periodic rack 23 close to the rack groove plate 25.

[0023] The end face of the output tooth 26 away from the end connected to the rack 24 is fixedly connected to a rotating plate 27. When the rotating plate 27 runs, it will drive the placement arc plate 29 to run periodically. The surface of the rotating plate 27 is slidably connected to a rotating plate slide plate 28. The surface of the rotating plate 27 away from the side of the rotating plate slide plate 28 is fixedly connected to the placement arc plate 29. The materials entering the placement component 1 can be divided into three directions and run to the surface of the auxiliary plate 31 through the periodic rotation of the placement arc plate 29 and the centrifugal force, which will not cause the accumulation of materials and cause blockage. The end face of the bottom frame 10 close to one end of the placement arc plate 29 is fixedly connected to a feed plate 30, and the surface of the placement arc plate 29 away from the side of the feed plate 30 is provided with an auxiliary plate 31. The surface of the output tooth 26 passes through the inner wall of the bottom frame 10 to the end face of the rotating plate 27, and the end face of the auxiliary plate 31 away from the end of the placement arc plate 29 is fixedly connected to the top of the bottom frame 10.

[0024] The transmission component 2 includes a transverse shaft 46. When the control plate 5 is started, the transverse shaft 46 is driven to rotate, and the transverse shaft 46 drives the auxiliary belt 47 to transmit. The surface of the transverse shaft 46 is connected to the auxiliary belt 47. When the auxiliary belt 47 is transmitted, it drives the fixed plate 48 to run. At this time, it is necessary to place the collecting plate 61 on the end surface of the fixed plate 48. Through the operation of the auxiliary belt 47, the collecting plate 61 is periodically placed in the device. The surface of the auxiliary belt 47 away from the transverse shaft 46 is fixedly connected to the fixed plate 48. The inner wall of the auxiliary belt 47 away from the transverse shaft 46 is rotatably connected to the connecting shaft 49. The surface of the auxiliary plate 31 close to the transmission rod 42 is provided with a transmission slot plate 43. There are two transmission shafts 41, which are symmetrically distributed on the end surface of the motor 6. There are six vertical shafts 44, which are divided into three groups, and each group has two vertical shafts. The three groups of vertical shafts 44 are equidistantly distributed along the surface of the rotation control pump 7. There are two transverse shafts 46, which are symmetrically distributed on the surface of the control plate 5. The end surface of the transverse shaft 46 away from the control plate 5 is rotatably connected to the inner wall of the bottom plate 11, and the end surface of the connecting shaft 49 is rotatably connected to the inner wall of the bottom plate 11.

[0025] A lifting rod 50 is provided on the end surface of the control board 5 close to the bottom plate 11. When the control board 5 is started, the lifting rod 50 is driven to run. When the lifting rod 50 is running, the push plate 51 is driven to run. The end surface of the lifting rod 50 away from the control board 5 is fixedly connected with the push plate 51. The push plate 51 will drive the buffer rod 52 to run. At the same time, the push plate 51 drives the two-way rotating plate 55 to run through surface contact. The end surface of the push plate 51 away from the lifting rod 50 is fixedly connected with the buffer rod 52. The end surface of the buffer rod 52 away from the push plate 51 is fixedly connected with the direction plate 53. There are two buffer rods 52, and the two buffer rods 52 are symmetrically distributed on the surface of the push plate 51. The end surface of the direction plate 53 away from the buffer rod 52 is fixedly connected to the top of the bottom plate 11.

[0026] The end face of the direction plate 53 near one end of the buffer rod 52 is fixedly connected with a direction base 54, and the inner wall of the direction base 54 is rotatably connected with a rotating plate horizontal axis 56, and the surface of the rotating plate horizontal axis 56 is fixedly connected with a two-way rotating plate 55, and the two-way rotating plate 55 will drive the rotating plate horizontal axis 56 to rotate along the inner wall of the direction base 54. By controlling the rotation angle of the two-way rotating plate 55 by the push plate 51, the material entering it can be controlled to run along the surface of the bottom plate 11 to prevent the direction deviation caused by the force when the material enters the device. The surface of the two-way rotating plate 55 away from the buffer rod 52 is fixedly connected with an elastic pad 57. At the same time, when the two-way rotating plate 55 rotates, it will drive the elastic pad 57 at the other end to move up and down, and the elastic pad 57 will limit the material on the surface of the auxiliary plate 31 in advance. The number of two-way rotating plates 55 is set to three, and the three two-way rotating plates 55 are equidistantly distributed along the surface of the rotating plate horizontal axis 56, and the surface of the two-way rotating plate 55 close to the buffer rod 52 is in contact with the surface of the push plate 51 close to the direction plate 53.

[0027] The collecting component 3 includes a push column shaft 65. When collecting the collecting plate 61, the control board 5 controls the push column shaft 65 to rotate, and the push column shaft 65 drives the push column connecting rod 66 to perform periodic operation. The surface of the push column shaft 65 is fixedly connected with the push column connecting rod 66, and the push column connecting rod 66 drives the arc push column 67 to operate. The surface of the arc push column 67 is in contact with the surface of the collecting plate 61, so as to control the periodic limit of the collecting plate 61. The surface of the push column connecting rod 66 close to the collecting plate 61 is fixedly connected with the arc push column 67, and the surface of the bottom plate 11 close to the collecting plate 61 is fixedly connected with the blanking inclined plate 64. There are two spring grooves 62, which are symmetrically distributed on the surface of the bottom plate 11. The surface of the buffer spring 63 away from the spring groove 62 is in contact with the bottom of the collecting plate 61. There are three blanking inclined plates 64, which are equidistantly distributed along the surface of the bottom plate 11. There are two push column rotating shafts 65, which are symmetrically distributed on the surface of the bottom plate 11. There are two push column connecting rods 66, which are symmetrically distributed about the surface center of the push column rotating shaft 65.

[0028] The surface of the collecting plate 61 close to the side of the material dropping inclined plate 64 is fixedly connected to the collecting plate arc column 68. The material runs through the surface of the material dropping inclined plate 64 and enters the collecting plate 61 through the mutually close surfaces of the two collecting plate feeding plates 69. At the same time, if the material is offset, the arc deflection of the collecting plate arc column 68 is used to position the material to prevent it from being offset. The surface of the collecting plate arc column 68 is fixedly connected to the collecting plate feeding plate 69. The inner wall of the collecting plate 61 is fixedly connected to the collecting plate pushing column 70. After the collecting plate 61 is inside, at this time, the collecting plate pushing column 70 will first position the collecting plate slot 71, so that the materials entering the device can be collected, and the end surface of the collecting plate pushing column 70 close to the collecting plate arc column 68 is fixedly connected with the collecting plate slot 71, and the surface of the collecting plate 61 away from the collecting plate arc column 68 is provided with a collecting plate discharge groove 72, and the surface of the collecting plate 61 close to the collecting plate discharge groove 72 is fixedly connected with a discharge rotating seat 73, and the inner wall of the discharge rotating seat 73 is rotatably connected with a discharge rotating plate 74; There are six collecting plate arc columns 68, which are divided into three groups, and each group has two collecting plate arc columns 68. The three groups of collecting plate arc columns 68 are equidistantly distributed along the surface of the collecting plate 61. There are two collecting plate feed plates 69, which are symmetrically distributed on the surface of the collecting plate arc columns 68. There are two collecting plate push columns 70, which are symmetrically distributed on the surface of the collecting plate slot 71. The surface of the collecting plate 61 is slidably connected to the inner wall of the bottom plate 11.

[0029] When in use, in the placing component 1, the semiconductor materials to be collected are placed into the device through the feed plate 30, and the engine 4 is started. The engine 4 will drive the output rod 21 to run. When the output rod 21 runs, it will drive the half-tooth plate 22 to rotate. The half-tooth plate 22 will drive the periodic rack 23 to run periodically through surface engagement. When the periodic rack 23 runs, it will drive the connecting rack 24 to slide along the surfaces of the two rack groove plates 25 that are close to each other. When the connecting rack 24 runs, it will drive the output teeth 26 to rotate periodically through surface engagement. When the output teeth 26 run, it will drive the rotating plate 27 to run along the surface of the rotating plate slide plate 28. At the same time, when the rotating plate 27 runs, it will drive the placing arc plate 29 to run periodically. At this time, the materials entering the placing component 1 can be divided into three directions to run to the surface of the auxiliary plate 31 through the periodic rotation of the placing arc plate 29 and the centrifugal force, which will not cause the accumulation of materials and cause blockage. At this time, in the conveying component 2, when the materials enter the surface of the auxiliary plate 31. The motor 6 is started, driving the transmission shaft 41 to rotate, and the transmission shaft 41 will drive the transmission rod 42 to rotate along the surface of the transmission groove plate 43. When the transmission rod 42 rotates, it will push the material on the surface of the auxiliary plate 31 to enable it to run better. When the material is pushed off the surface of the auxiliary plate 31, it enters the surface of the bottom plate 11. At this time, the self-rotation control pump 7 is started, driving the vertical shaft 44 to rotate, and the vertical shaft 44 will drive the transmission shaft 45 to rotate. When the transmission shaft 45 rotates, it will transmit the material falling into it and limit the material. At the same time, the control board 5 is started, driving the lifting rod 50 to run. When the lifting rod 50 runs, it will drive the push plate 51 to run, and the push plate 51 will drive the push buffer rod 52 to run. At the same time, the push plate 51 drives the two-way rotating plate 55 to run through surface contact. The two-way rotating plate 55 will drive the rotating plate horizontal axis 56 to rotate along the inner wall of the direction base 54. By controlling the rotation angle of the push plate 51 on the two-way rotating plate 55, the material entering it can be controlled to run along the surface of the bottom plate 11 to prevent the direction deviation caused by the force when the material enters the device. At the same time, when the two-way rotating plate 55 rotates, it will drive the elastic pad 57 at the other end to move up and down, and the elastic pad 57 will further limit the material on the surface of the auxiliary plate 31. At the same time, when the control plate 5 is started, it will drive the horizontal axis 46 to rotate, and the horizontal axis 46 will drive the auxiliary belt 47 to transmit. When the auxiliary belt 47 is transmitted, it will drive the fixed plate 48 to run. At this time, it is necessary to place the collecting plate 61 on the end face of the fixed plate 48, and through the operation of the auxiliary belt 47, the collecting plate 61 is periodically placed in the device.At this time, in the collecting component 3, when the auxiliary belt 47 drives the fixed plate 48 to run to a certain position, the collecting plate 61 on the surface of the fixed plate 48 will fall to the surface of the bottom plate 11. At this time, the collecting plate 61 will first collide with the buffer spring 63 to provide a certain buffering effect on its fall to prevent the collecting plate 61 from being damaged due to excessive falling speed. At this time, the material runs through the surface of the falling inclined plate 64 and will enter the collecting plate 61 through the mutually approaching surfaces of the two collecting plate feeding plates 69. At the same time, if the material is offset, the arc deflection of the collecting plate arc column 68 will position the material to prevent it from offsetting. When the material enters the collecting plate 61, at this time, the collecting plate pushing column 70 will first press the collecting plate slot 7 1 performs positioning processing, so that the materials entering the device can be collected. At the same time, when collecting the collecting plate 61, the control board 5 controls the push column shaft 65 to rotate, and the push column shaft 65 drives the push column connecting rod 66 to perform periodic operation, and the push column connecting rod 66 drives the arc push column 67 to operate. Through the contact between the surface of the arc push column 67 and the surface of the collecting plate 61, the periodic limit of the collecting plate 61 can be controlled. After the collection is completed, the collecting plate 61 will run along the conveyor belt 9. When the collecting plate 61 runs along the surface of the conveyor belt 9, the dust removal fan 8 is started, and a certain surface dust removal treatment will be performed on the materials in the collecting plate 61 to prevent the dust on the surface from entering the receiving box 12.

[0030] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. An auxiliary device for semiconductor production, comprising a bottom frame (10), the top of the bottom frame (10) is fixedly connected to a bottom plate (11), the surface of the bottom plate (11) is fixedly connected to a dust removal fan (8), the inner wall of the bottom frame (10) is fixedly connected to a conveyor belt (9), the end surface of the bottom frame (10) close to the conveyor belt (9) is fixedly connected to a receiving box (12), the surface of the bottom frame (10) away from the receiving box (12) is fixedly connected to a motor (6), the inner wall of the bottom frame (10) close to the motor (6) is fixedly connected to a self-rotation control pump (7), the inner wall of the bottom frame (10) is fixedly connected to an engine (4), the surface of the bottom plate (11) away from the bottom frame (10) is fixedly connected to a control board (5), the number of the dust removal fans (8) is four, the four dust removal fans (8) are divided into two groups, and the number of each group is two, and the two groups of dust removal fans (8) are symmetrically distributed on the surface of the bottom frame (10), characterized in that Also includes: A placement component (1), the placement component (1) comprising an output rod (21), a surface of the output rod (21) being fixedly connected to a semi-toothed plate (22), and a surface of the semi-toothed plate (22) being meshingly connected to a periodic rack (23); A transmission component (2), the transmission component (2) comprising a transmission shaft (41), a transmission rod (42) being fixedly connected to the surface of the transmission shaft (41), a vertical shaft (44) being provided on an end surface of the self-rotation control pump (7) close to one end of the transmission rod (42), and a transmission shaft (45) being fixedly connected to the surface of the vertical shaft (44); A collecting component (3), the collecting component (3) comprising a collecting plate (61), a spring groove (62) being provided on a surface of the bottom plate (11) on a side close to the collecting plate (61), and a buffer spring (63) being fixedly connected to an end surface of the spring groove (62).

2. The semiconductor production auxiliary equipment according to claim 1, characterized in that: The placing component (1) comprises a connecting rack (24); a rack groove plate (25) is fixedly connected to the inner wall of the bottom frame (10) on a side close to the connecting rack (24); the surface of the connecting rack (24) is meshingly connected to an output tooth (26); two rack groove plates (25) are provided; the two rack groove plates (25) are symmetrically distributed with respect to the surface of the connecting rack (24); the surface of the connecting rack (24) and the two rack groove plates (25) are slidably connected to each other by surfaces close to each other; and the end surface of the connecting rack (24) away from the output tooth (26) is fixedly connected to the surface of the periodic rack (23) on a side close to the rack groove plate (25).

3. A semiconductor production auxiliary equipment according to claim 2, characterized in that: The end surface of the output tooth (26) away from the connecting rack (24) is fixedly connected to a rotating plate (27), the surface of the rotating plate (27) is slidably connected to a rotating plate slide groove plate (28), the surface of the rotating plate (27) away from the rotating plate slide groove plate (28) is fixedly connected to a placement arc plate (29), the end surface of the bottom frame (10) close to the placement arc plate (29) is fixedly connected to a feed plate (30), the surface of the placement arc plate (29) away from the feed plate (30) is provided with an auxiliary plate (31), the surface of the output tooth (26) penetrates the inner wall of the bottom frame (10) to the end surface of the rotating plate (27), and the end surface of the auxiliary plate (31) away from the placement arc plate (29) is fixedly connected to the top of the bottom frame (10).

4. The semiconductor production auxiliary equipment according to claim 3, characterized in that: The transmission component (2) comprises a transverse axis (46), the surface of the transverse axis (46) is transmission-connected with an auxiliary belt (47), the surface of the auxiliary belt (47) away from the transverse axis (46) is fixedly connected with a fixing plate (48), the inner wall of one end of the auxiliary belt (47) away from the transverse axis (46) is rotationally connected with a connecting shaft (49), and the surface of the auxiliary plate (31) close to the transmission rod (42) is provided with a transmission groove plate (43); The number of the transmission shafts (41) is two, and the two transmission shafts (41) are symmetrically distributed on the end surface of the motor (6). The number of the vertical shafts (44) is six, and the six vertical shafts (44) are divided into three groups, and the number of each group is two. The three groups of vertical shafts (44) are equidistantly distributed along the surface of the self-rotation control pump (7). The number of the transverse shafts (46) is two, and the two transverse shafts (46) are symmetrically distributed on the surface of the control plate (5). The end surface of the transverse shaft (46) away from the control plate (5) is rotatably connected to the inner wall of the bottom plate (11), and the end surface of the connecting shaft (49) is rotatably connected to the inner wall of the bottom plate (11).

5. The semiconductor production auxiliary equipment according to claim 4, characterized in that: A lifting rod (50) is provided on an end surface of the control plate (5) close to the bottom plate (11); an end surface of the lifting rod (50) away from the control plate (5) is fixedly connected to a push plate (51); an end surface of the push plate (51) away from the lifting rod (50) is fixedly connected to a buffer rod (52); an end surface of the buffer rod (52) away from the push plate (51) is fixedly connected to a direction plate (53); two buffer rods (52) are provided, and the two buffer rods (52) are symmetrically distributed on the surface of the push plate (51); and an end surface of the direction plate (53) away from the buffer rod (52) is fixedly connected to the top of the bottom plate (11).

6. The semiconductor production auxiliary equipment according to claim 5, characterized in that: The end surface of the direction plate (53) close to one end of the buffer rod (52) is fixedly connected to a direction base (54), the inner wall of the direction base (54) is rotatably connected to a rotating plate transverse axis (56), the surface of the rotating plate transverse axis (56) is fixedly connected to a bidirectional rotating plate (55), the surface of the bidirectional rotating plate (55) away from the buffer rod (52) is fixedly connected to an elastic pad (57), the number of the bidirectional rotating plates (55) is three, the three bidirectional rotating plates (55) are equidistantly distributed along the surface of the rotating plate transverse axis (56), the surface of the bidirectional rotating plate (55) close to the buffer rod (52) is in contact with the surface of the push plate (51) close to the direction plate (53).

7. The semiconductor production auxiliary equipment according to claim 5, characterized in that: The end surface of the direction plate (53) close to one end of the buffer rod (52) is fixedly connected to a direction base (54), the inner wall of the direction base (54) is rotatably connected to a rotating plate transverse axis (56), the surface of the rotating plate transverse axis (56) is fixedly connected to a bidirectional rotating plate (55), the surface of the bidirectional rotating plate (55) away from the buffer rod (52) is fixedly connected to an elastic pad (57), the number of the bidirectional rotating plates (55) is three, the three bidirectional rotating plates (55) are equidistantly distributed along the surface of the rotating plate transverse axis (56), the surface of the bidirectional rotating plate (55) close to the buffer rod (52) is in contact with the surface of the push plate (51) close to the direction plate (53).

8. The semiconductor production auxiliary equipment according to claim 7, characterized in that: A collecting plate arc column (68) is fixedly connected to the surface of the collecting plate (61) on the side close to the blanking inclined plate (64), a collecting plate feeding plate (69) is fixedly connected to the surface of the collecting plate arc column (68), a collecting plate pushing column (70) is fixedly connected to the inner wall of the collecting plate (61), an end surface of the collecting plate pushing column (70) close to one end of the collecting plate arc column (68) is fixedly connected to a collecting plate clamping groove (71), a collecting plate discharging groove (72) is provided on the surface of the collecting plate (61) away from the collecting plate arc column (68), a discharging rotating seat (73) is fixedly connected to the surface of the collecting plate (61) on the side close to the collecting plate discharging groove (72), and a discharging rotating seat (73) is rotatably connected to the inner wall of the discharging rotating seat (73) with a discharging rotating plate (74); The number of the collecting plate arc columns (68) is six, and the six collecting plate arc columns (68) are divided into three groups, and the number of each group is two, and the three groups of collecting plate arc columns (68) are equidistantly distributed along the surface of the collecting plate (61), the number of the collecting plate feeding plates (69) is two, and the two collecting plate feeding plates (69) are symmetrically distributed on the surface of the collecting plate arc columns (68), the number of the collecting plate pushing columns (70) is two, and the two collecting plate pushing columns (70) are symmetrically distributed on the surface of the collecting plate slot (71), and the surface of the collecting plate (61) is slidably connected to the inner wall of the bottom plate (11).

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