Automatic spin-coating equipment for preparing perovskite solar cell and use method of automatic spin-coating equipment
By designing automated spin coating equipment, the problem of unstable perovskite solar cell film layer caused by manual operation is solved, and the preparation consistency and experimental efficiency are improved.
Patent Information
- Application Number
- CN202510069913.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-16
- Publication Date
- 2025-04-11
AI Technical Summary
The spin coating process of existing perovskite solar cells relies on manual operation, resulting in inconsistent factors such as spin coating speed, time and solution droplet addition timing, resulting in unstable film quality, discrete experimental data, and poor repetition of results.
An automated spin coating device is designed, including an operating chamber, a first robotic arm, a second robotic arm, a sample table, a heating table, a glue uniform machine, a vision controller and a PLC controller. Human-computer interaction is carried out through an industrial control machine, and the spin coating process is automatically controlled to ensure accurate operation of each step.
Through automated spin coating equipment, the preparation consistency of the perovskite layer is achieved, the accuracy, reliability and repeatability of the experiment are improved, the impact of manual operation differences is reduced, and the preparation efficiency is improved.
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Figure CN119793825A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the preparation of perovskite solar cells, in particular to a spin coating device for preparing perovskite solar cells, and a method for using the device to spin coat a perovskite layer. Background Art
[0002] Perovskite solar cells are a new type of photovoltaic cell. Since its birth in 2009, it has been widely studied by scientific researchers, and the photoelectric conversion efficiency has increased from 3.8% to 26.5%. This is due to the fact that the halogen perovskite, the light-absorbing layer material of the perovskite solar cell, has a series of excellent optical and electrical properties, including high light absorption coefficient, long carrier diffusion length and good tolerance to defects.
[0003] At present, small-area spin coating is the most commonly used method for experimental research on perovskite solar cells. The perovskite layer is prepared by spin coating technology, and each film layer that constitutes the perovskite layer is spin-coated in turn. However, the solution addition and spin coating are completely manual operations. During the spin coating process, the spin coating speed, spin coating time, solution drop timing, drop speed, drop amount, drop gun distance and angle, ambient temperature and humidity, and later annealing process affect the quality of the film. Different people have different control techniques and accuracy, which leads to a series of problems such as discrete experimental data and poor repeatability of results.
[0004] To address these issues, spin coating is considered to use equipment control instead of manual operation to facilitate the research on perovskite solar cells. Summary of the invention
[0005] Purpose of the invention: One of the purposes of the present invention is to provide an automated spin coating device for preparing perovskite solar cells, replacing manual spin coating. The second purpose of the present invention is to provide a method for using the device to spin coat a perovskite layer, thereby improving the consistency of the preparation of the perovskite layer and improving the preparation quality and efficiency.
[0006] Technical solution: An automated spin coating device for preparing perovskite solar cells, including an operation chamber and a first mechanical arm, a second mechanical arm, a sample stage, a first heating stage, a second heating stage, a glue spreader, a visual controller, a PLC controller, and an industrial computer;
[0007] A plurality of battery cells are arranged on the sample table, and the first mechanical arm obtains the battery cells and transfers them between the sample table, the first heating table, the second heating table, and the glue spreader; a plurality of drippers are arranged on the second mechanical arm, and one of the drippers is connected to an injection pump, and the injection pump transports the solution into the dripper. During spin coating, the second mechanical arm places the dripper above the battery cell in the glue spreader;
[0008] The visual controller is arranged at the top of the operation chamber, and is used to associate and identify the pick-up and placement status of the battery cells on the sample table, the first heating table, the second heating table, and the glue spreader, as well as the film formation quality of the battery cells and the related instruction operation status. The PLC controller is used to associate and execute the operation instructions of the first robotic arm, the second robotic arm, the dripper, the injection pump, the first heating table, the second heating table, and the glue spreader, and the industrial computer controls the automatic operation of the spin coating equipment.
[0009] Furthermore, a temperature and humidity controller is also provided inside the operating chamber, and the PLC controller is associated with executing the operating instructions of the temperature and humidity controller.
[0010] Furthermore, when the spin coating device is in operation, the door on the operation chamber is closed, and the interior of the operation chamber is in a closed state.
[0011] Furthermore, a gripper mechanism for obtaining battery cells is provided at the front end of the first robotic arm.
[0012] A method for using the above-mentioned automated spin coating equipment comprises the following steps:
[0013] S10: Setting operating parameters for the spin coating equipment through the human-machine interactive interface of the industrial computer, and the spin coating equipment is ready to start;
[0014] S20: Send the battery cells into the operation chamber, arrange several battery cells in sequence on the sample table, and close the operation chamber door;
[0015] S30: The first robot arm obtains a battery cell from the sample table and transfers it to the glue machine. The second robot arm moves to a dripper above the battery cell. The dripper drips the solution onto the surface of the battery cell and the glue machine spins it. After the spin coating is completed, the second robot arm moves away. The first robot arm obtains the battery cell from the glue machine and transfers it to a heating table for annealing. After the annealing is completed, the first robot arm obtains the battery cell from the heating table and transfers it back to the sample table for cooling, completing the preparation of a film layer on a battery cell.
[0016] Combined with the spin coating time and annealing time, the first heating station and the second heating station are used alternately. Different drippers drip different solutions for spin coating to form corresponding film layers. The industrial computer sends tasks according to priority calculation, and spin coating, annealing and cooling are performed alternately on different battery cells to complete the preparation of all film layers on all battery cells. Finally, the operating compartment door is opened to replace a batch of battery cells.
[0017] Furthermore, step S30 is specifically as follows:
[0018] S301: The first robot arm obtains the 1# battery cell from the sample table and transfers it to the glue machine. The second robot arm moves to the dripper A above the 1# battery cell. The injection pump A delivers the electron transport layer solution to the dripper A. The dripper A drips the electron transport layer solution onto the surface of the 1# battery cell. The glue machine then spin coats. After the spin coating is completed, the second robot arm moves away. The first robot arm obtains the 1# battery cell from the glue machine and transfers it to the first heating table for annealing. The first robot arm obtains the 2# battery cell from the sample table and transfers it to the glue machine. The second robot arm moves until the dripper A is above the 2# battery cell, and the injection pump A delivers the electron transport layer solution into the dripper A. The dripper A drips the electron transport layer solution onto the surface of the 2# battery cell, and then the glue machine spins it. After the spin coating is completed, the second robot arm moves away, and the first robot arm obtains the 2# battery cell from the glue machine and transfers it to the second heating table for annealing; the first robot arm obtains the 3# battery cell from the sample table and transfers it to the glue machine, and the second robot arm moves until the dripper A is above the 3# battery cell, and the injection pump A delivers the electron transport layer solution into the dripper A. The electron transport layer solution is dripped from the dripper A onto the surface of the 3# cell, and then the coating machine is used for spin coating. After the 2# cell is transferred to the second heating table and before the 3# cell is spin coated, the first robot arm obtains the 1# cell from the first heating table and transfers it back to the sample table for cooling. Then the first robot arm obtains the 3# cell from the coating machine and transfers it to the first heating table for annealing. The first robot arm obtains the 4# cell from the sample table and transfers it to the coating machine. The second robot arm moves to the position where the dripper A is at the 4# cell. #above the battery cell, the injection pump A delivers the electron transport layer solution into the dripper A, and the dripper A drips the electron transport layer solution onto the surface of the 4# battery cell, and then the glue machine spins it. After the 3# battery cell is transferred to the first heating table and before the 4# battery cell is spin-coated, the first robot arm obtains the 2# battery cell from the second heating table and transfers it back to the sample table for cooling, and then the first robot arm obtains the 4# battery cell from the glue machine and transfers it to the second heating table for annealing; this is done until the preparation of the electron transport layer on all the battery cells is completed;
[0019] S302: According to step S301, the preparation of the perovskite layer on all the cells is completed; during spin coating, the second robot arm moves to the dripper B, the dripper C is above the cell, the injection pump B delivers the perovskite solution into the dripper B, the dripper B drips the perovskite solution onto the surface of the cell, and then the glue machine spin coats, at the set time, the injection pump C delivers the anti-solvent into the dripper C, the dripper C drips the anti-solvent onto the surface of the cell, and the second robot arm moves away after the spin coating is completed;
[0020] S303: According to step S301, the preparation of the hole transport layer on all battery cells is completed; during spin coating, the second robot arm moves until the dripper D is above the battery cell, the injection pump D transports the hole layer solution into the dripper D, the dripper D drips the hole layer solution onto the surface of the battery cell, and then the glue machine spin coats, and after the spin coating is completed, the second robot arm moves away.
[0021] Furthermore, in step S20, the cell is a TCO conductive substrate.
[0022] Furthermore, in step S10, the set operating parameters include: the number of spin-coated film layers, the order of film layers, the solution dripping acceleration of each film layer, the dripping amount, the dripping height and angle of the dripper, the spin coating speed, the spin coating time, the annealing time, the annealing temperature, and the temperature and humidity in the operating chamber.
[0023] Beneficial effects: The present invention can continuously produce multiple cells. During the waiting period of spin coating, annealing and cooling of a cell, the operation instructions for other cells can be continued to be executed, thereby improving the preparation efficiency. Two heating tables and multiple drippers can be switched, which is convenient for the equipment to carry out continuous production. The automated spin coating equipment replaces manual operation of spin coating film formation, and the automated precise control avoids the influence of manual operation differences, improves the preparation consistency of the perovskite layer, and improves the experimental accuracy, reliability and repeatability. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Figure 1 It is a front view of the automated spin coating equipment of the present invention;
[0025] Figure 2 A top view of the automated spin coating apparatus of the present invention;
[0026] Figure 3 This is a schematic diagram of setting up several drippers on the second robotic arm. DETAILED DESCRIPTION
[0027] The present invention is further explained below in conjunction with the accompanying drawings and specific embodiments.
[0028] An automated spin coating device for preparing perovskite solar cells, as shown in the attached Figure 1 , 2 As shown, it includes an operation chamber 1, a first robotic arm 2, a second robotic arm 3, a sample table 4, a first heating table 5, a second heating table 6, a glue spreader 7, a visual controller 8, a PLC controller, an industrial computer 9, and a temperature and humidity controller 10.
[0029] The operating chamber 1 is made of transparent material, and a chamber door is arranged on the side wall of the operating chamber.
[0030] The first robotic arm 2 , the second robotic arm 3 , the sample stage 4 , the first heating stage 5 , the second heating stage 6 , the glue spreader 7 , the visual controller 8 , and the temperature and humidity controller 10 are arranged inside the operation chamber 1 .
[0031] The first heating table 5 and the second heating table 6 are located between the sample table 4 and the glue machine 7. The first mechanical arm 2 and the second mechanical arm 3 are located on the same side of the sample table 4 and the glue machine 7. The first mechanical arm 2 is close to the sample table 4, and the second mechanical arm 3 is close to the glue machine 7. The sample table 4 is used to arrange and place a number of battery cells, and each placement position corresponds to a serial number; the front end of the first mechanical arm 2 is provided with a clamping mechanism for obtaining the battery cells and transferring them between the sample table 4, the first heating table 5, the second heating table 6, and the glue machine 7; combined with the attached Figure 3 As shown, a plurality of drippers 31 are arranged on the second robotic arm 3. One dripper 31 is connected to an injection pump 32 and corresponds to a serial number. The injection pump 32 transports the solution into the dripper 31 to form an independent dripping channel. During spin coating, the second robotic arm 3 moves so that the dripper 31 is located above the battery cell in the glue spreader 7.
[0032] The temperature and humidity controller 10 is arranged on the side wall of the operation chamber 1 .
[0033] The industrial computer 9 controls the automatic operation of the spin coating equipment, and the human-machine interface of the industrial computer can input and set the operating parameters of the spin coating equipment. The visual controller 8 is set at the top of the operation chamber 1, overlooking the sample table 4, the first heating table 5, the second heating table 6, and the glue machine 7. It is used to associate and identify the placement status of the battery cell on the sample table 4, the first heating table 5, the second heating table 6, and the glue machine 7, as well as the film quality of the battery cell and the related instruction operation status, and feedback to the industrial computer 9 to issue an operation instruction. The PLC controller associates and executes the operation instructions of the first mechanical arm 2, the second mechanical arm 3, the dripper 31, the injection pump 32, the first heating table 5, the second heating table 6, the glue machine 7, and the temperature and humidity controller 10.
[0034] Taking a TCO conductive substrate as a battery cell, and sequentially preparing an electron transport layer, a perovskite layer, and a hole layer by spin coating as an example, the method for using the automated spin coating equipment of the present invention is described, which specifically includes the following steps S10 to S30.
[0035] S10: The operating parameters of the spin coating equipment are set through the human-machine interface of the industrial computer, and the spin coating equipment is started in standby mode; the operating parameters include: the number of spin coating film layers, the order of film layers, the solution dripping speed of each film layer, the dripping amount, the dripping height and angle of the dripper, the spin coating speed, the spin coating time, the annealing time, the annealing temperature, the temperature and humidity in the operating chamber, etc.
[0036] S20: The cleaned battery cells are sent into the operation chamber through the operation chamber door, and several battery cells are arranged in sequence on the sample table. The operation chamber door is closed, and the interior of the operation chamber is in a closed state. The visual controller identifies the battery cells on the sample table, and then starts the equipment, and the equipment enters automatic operation.
[0037] S30: The first robot arm obtains a battery cell from the sample table and transfers it to the glue machine. The second robot arm moves to a dripper above the battery cell. The dripper drips the solution onto the surface of the battery cell and the glue machine spins it. After the spin coating is completed, the second robot arm moves away. The first robot arm obtains the battery cell from the glue machine and transfers it to a heating table for annealing. After the annealing is completed, the first robot arm obtains the battery cell from the heating table and transfers it back to the sample table for cooling, completing the preparation of a film layer on a battery cell.
[0038] Combined with the spin coating time and annealing time, the first heating station and the second heating station are used alternately. Different drippers drip different solutions for spin coating to form corresponding film layers. The industrial computer sends tasks according to priority calculation, and spin coating, annealing and cooling are performed alternately on different battery cells to complete the preparation of all film layers on all battery cells. Finally, the operating compartment door is opened to replace a batch of battery cells.
[0039] Step S30 can be specifically implemented through steps S301 to S303.
[0040] S301: The first robot arm obtains the 1# battery cell from the sample table and transfers it to the vacuum adsorption table in the glue machine. The second robot arm moves until the dripper A is above the 1# battery cell. The injection pump A delivers the electron transport layer solution into the dripper A. The dripper A drips the electron transport layer solution onto the surface of the 1# battery cell. The glue machine then spin coats. After the spin coating is completed, the second robot arm moves away. The first robot arm obtains the 1# battery cell from the glue machine and transfers it to the first heating table for annealing. The first robot arm obtains the 2# battery cell from the sample table and transfers it to In the glue machine, the second robot moves to the dripper A above the 2# battery cell, and the injection pump A delivers the electron transport layer solution into the dripper A. The dripper A drips the electron transport layer solution onto the surface of the 2# battery cell, and then the glue machine spins. After the spin coating is completed, the second robot moves away, and the first robot obtains the 2# battery cell from the glue machine and transfers it to the second heating table for annealing; the first robot obtains the 3# battery cell from the sample table and transfers it to the glue machine, and the second robot moves to the dripper A above the 3# battery cell, and the injection pump A delivers the electron transport layer solution to the dripper A. The electron transport layer solution is transported inside, and the dripper A drips the electron transport layer solution onto the surface of the 3# battery cell, and then the glue machine spins it. After the 2# battery cell is transferred to the second heating table and before the 3# battery cell is spin-coated, the first robot arm obtains the 1# battery cell from the first heating table and transfers it back to the sample table for cooling, and then the first robot arm obtains the 3# battery cell from the glue machine and transfers it to the first heating table for annealing; the first robot arm obtains the 4# battery cell from the sample table and transfers it to the glue machine, and the second robot arm moves to the dripper A Above the 4# battery cell, the injection pump A delivers the electron transport layer solution into the dripper A, and the dripper A drips the electron transport layer solution onto the surface of the 4# battery cell, and then the glue machine spin coats it. After the 3# battery cell is transferred to the first heating table and before the 4# battery cell is spin-coated, the first robot arm obtains the 2# battery cell from the second heating table and transfers it back to the sample table for cooling, and then the first robot arm obtains the 4# battery cell from the glue machine and transfers it to the second heating table for annealing; this is done until the preparation of the electron transport layer on all the battery cells is completed;
[0041] S302: According to step S301, the preparation of the perovskite layer on all the cells is completed; during spin coating, the second robot arm moves to the dripper B, the dripper C is above the cell, the injection pump B delivers the perovskite solution into the dripper B, the dripper B drips the perovskite solution onto the surface of the cell, and then the glue machine spin coats, at the set time, the injection pump C delivers the anti-solvent into the dripper C, the dripper C drips the anti-solvent onto the surface of the cell, and the second robot arm moves away after the spin coating is completed;
[0042] S303: According to step S301, the preparation of the hole transport layer on all battery cells is completed; during spin coating, the second robot arm moves until the dripper D is above the battery cell, the injection pump D transports the hole layer solution into the dripper D, the dripper D drips the hole layer solution onto the surface of the battery cell, and then the glue machine spin coats, and after the spin coating is completed, the second robot arm moves away.
[0043] When the spin coating equipment is running, the inside of the operating chamber is in a closed state, which can ensure that organic solvents harmful to the human body do not diffuse out; since the perovskite material is sensitive to temperature and humidity, the temperature and humidity controller in the operating chamber can control the temperature and humidity.
[0044] The vision controller performs priority calculations on battery cell identification, operation timing, etc. During the waiting period of spin coating, annealing, and cooling, it can send tasks based on the priority calculation to achieve intelligent and efficient results.
[0045] The automated spin coating equipment for preparing perovskite solar cells of the present invention and the method for using the same can continuously produce multiple cells. During the waiting period of spin coating, annealing, and cooling of one cell, the operation instructions for other cells can be continuously executed to improve the preparation efficiency. Two heating tables and multiple drippers can be switched, which is convenient for the equipment to carry out continuous production. The automated spin coating equipment replaces manual operation of spin coating film formation, and the automated precise control avoids the influence of manual operation differences, improves the preparation consistency of the perovskite layer, and improves the experimental accuracy, reliability, and repeatability.
Claims
1. An automated spin coating device for preparing perovskite solar cells, characterized in that: It comprises an operation chamber (1) and a first mechanical arm (2), a second mechanical arm (3), a sample table (4), a first heating table (5), a second heating table (6), a glue spreader (7), a visual controller (8), and a PLC controller and an industrial computer (9); A plurality of battery cells are arranged on the sample table (4); the first mechanical arm (2) obtains the battery cells and transfers them between the sample table (4), the first heating table (5), the second heating table (6), and the glue spreader (7); a plurality of drippers (31) are arranged on the second mechanical arm (3); one of the drippers (31) is connected to an injection pump (32); the injection pump (32) transports a solution into the dripper (31); during spin coating, the second mechanical arm (3) places the dripper (31) above the battery cells in the glue spreader (7); The visual controller (8) is arranged at the top of the operating chamber (1), and is used to associate and identify the placement status of the battery cell on the sample table (4), the first heating table (5), the second heating table (6), and the glue spreader (7), as well as the film forming quality of the battery cell and the related instruction operation status. The PLC controller is used to associate and execute the operation instructions of the first mechanical arm (2), the second mechanical arm (3), the dripper (31), the injection pump (32), the first heating table (5), the second heating table (6), and the glue spreader (7), and the industrial computer (9) controls the automatic operation of the spin coating equipment.
2. The automated spin coating device for preparing perovskite solar cells according to claim 1, characterized in that: A temperature and humidity controller (10) is also provided inside the operating chamber (1), and the PLC controller is associated with executing operating instructions of the temperature and humidity controller (10).
3. The automated spin coating device for preparing a perovskite solar cell according to claim 1, characterized in that: When the spin coating device is in operation, the door on the operation chamber (1) is closed, and the interior of the operation chamber (1) is in a closed state.
4. The automated spin coating device for preparing a perovskite solar cell according to claim 1, characterized in that: The front end of the first mechanical arm (2) is provided with a clamping mechanism for obtaining the battery sheet.
5. A method for using the automated spin coating device according to any one of claims 1 to 4, characterized in that The following steps are involved: S10: Setting operating parameters for the spin coating equipment through the human-machine interactive interface of the industrial computer, and the spin coating equipment is ready to start; S20: Send the battery cells into the operation chamber, arrange several battery cells in sequence on the sample table, and close the operation chamber door; S30: The first robot arm obtains a battery cell from the sample table and transfers it to the glue machine. The second robot arm moves to a dripper above the battery cell. The dripper drips the solution onto the surface of the battery cell and the glue machine spins it. After the spin coating is completed, the second robot arm moves away. The first robot arm obtains the battery cell from the glue machine and transfers it to a heating table for annealing. After the annealing is completed, the first robot arm obtains the battery cell from the heating table and transfers it back to the sample table for cooling, completing the preparation of a film layer on a battery cell. Combined with the spin coating time and annealing time, the first heating station and the second heating station are used alternately. Different drippers drip different solutions for spin coating to form corresponding film layers. The industrial computer sends tasks according to priority calculation, and spin coating, annealing and cooling are performed alternately on different battery cells to complete the preparation of all film layers on all battery cells. Finally, the operating compartment door is opened to replace a batch of battery cells.
6. The method of use according to claim 1, characterized in that: Step S30 is specifically as follows: S301: The first robot arm obtains the 1# battery cell from the sample table and transfers it to the glue machine. The second robot arm moves to the dripper A above the 1# battery cell. The injection pump A delivers the electron transport layer solution to the dripper A. The dripper A drips the electron transport layer solution onto the surface of the 1# battery cell. The glue machine then spin coats. After the spin coating is completed, the second robot arm moves away. The first robot arm obtains the 1# battery cell from the glue machine and transfers it to the first heating table for annealing. The first robot arm obtains the 2# battery cell from the sample table and transfers it to the glue machine. The second robot arm moves until the dripper A is above the 2# battery cell, and the injection pump A delivers the electron transport layer solution into the dripper A. The dripper A drips the electron transport layer solution onto the surface of the 2# battery cell, and then the glue machine spins it. After the spin coating is completed, the second robot arm moves away, and the first robot arm obtains the 2# battery cell from the glue machine and transfers it to the second heating table for annealing; the first robot arm obtains the 3# battery cell from the sample table and transfers it to the glue machine, and the second robot arm moves until the dripper A is above the 3# battery cell, and the injection pump A delivers the electron transport layer solution into the dripper A. The electron transport layer solution is dripped from the dripper A onto the surface of the 3# cell, and then the coating machine is used for spin coating. After the 2# cell is transferred to the second heating table and before the 3# cell is spin coated, the first robot arm obtains the 1# cell from the first heating table and transfers it back to the sample table for cooling. Then the first robot arm obtains the 3# cell from the coating machine and transfers it to the first heating table for annealing. The first robot arm obtains the 4# cell from the sample table and transfers it to the coating machine. The second robot arm moves to the position where the dripper A is at the 4# cell. #above the battery cell, the injection pump A delivers the electron transport layer solution into the dripper A, and the dripper A drips the electron transport layer solution onto the surface of the 4# battery cell, and then the glue machine spins it. After the 3# battery cell is transferred to the first heating table and before the 4# battery cell is spin-coated, the first robot arm obtains the 2# battery cell from the second heating table and transfers it back to the sample table for cooling, and then the first robot arm obtains the 4# battery cell from the glue machine and transfers it to the second heating table for annealing; this is done until the preparation of the electron transport layer on all the battery cells is completed; S302: According to step S301, the preparation of the perovskite layer on all the cells is completed; during spin coating, the second robot arm moves to the dripper B, the dripper C is above the cell, the injection pump B delivers the perovskite solution into the dripper B, the dripper B drips the perovskite solution onto the surface of the cell, and then the glue machine spin coats, at the set time, the injection pump C delivers the anti-solvent into the dripper C, the dripper C drips the anti-solvent onto the surface of the cell, and the second robot arm moves away after the spin coating is completed; S303: According to step S301, the preparation of the hole transport layer on all battery cells is completed; during spin coating, the second robot arm moves until the dripper D is above the battery cell, the injection pump D transports the hole layer solution into the dripper D, the dripper D drips the hole layer solution onto the surface of the battery cell, and then the glue machine spin coats, and after the spin coating is completed, the second robot arm moves away.
7. The method of use according to claim 5, characterized in that: In step S20, the cell is a TCO conductive substrate.
8. The method of use according to claim 5, characterized in that: In step S10, the set operating parameters include: the number of spin-coated film layers, the order of film layers, the solution dripping speed of each film layer, the dripping amount, the dripping height and angle of the dripper, the spin coating speed, the spin coating time, the annealing time, the annealing temperature, the temperature and humidity in the operating chamber.
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