A wafer production dust removal device

Abstract

The present invention discloses a wafer production dust removal device, wherein the four corners of the bottom frame are provided with upright columns extending upward, an upper frame is provided at one end of the column away from the bottom frame, and the bottom frame, the columns and the upper frame form a mounting frame; a dust removal mechanism is provided in the mounting frame, a mobile mechanism is provided on the dust removal mechanism, a pneumatic assembly is provided on the mobile mechanism, and the dust removal mechanism, the mobile mechanism and the pneumatic assembly are arranged in the mounting frame; a supporting cross plate is provided between the middle parts of two adjacent columns, another matching supporting cross plate is provided between the two columns on the other side, the two supporting cross plates are matched and arranged relatively, a cross-carrying plate is provided between the two supporting cross plates, and some components of the pneumatic assembly are provided on the cross-carrying plate; the dust removal mechanism includes a dust removal head cavity, a bottom plate is provided at the bottom of the dust removal head cavity, and a frame sealing cover is provided at the top of the dust removal head cavity. The present application adopts a non-contact dust removal head for cleaning, improves cleaning efficiency, and enhances the degree of automation of the equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production, and in particular to a cleaning device for producing semiconductor chips. Background Art

[0002] A wafer is a silicon chip used in the manufacture of silicon semiconductor integrated circuits. Wafers are used to produce integrated circuit chips. During the semiconductor production process, wafers are placed in wafer boxes, which are transported to carriers at different loading ports through AMHS (automatic material handling system). After a period of time, dust will remain on the surface of the carrier, affecting the yield of the wafer product.

[0003] In order to maintain the cleanliness of the carrier, the carrier of the semiconductor processing equipment needs to be cleaned regularly. The existing cleaning methods mostly use manual cleaning and brush cleaning. Manual cleaning needs to be performed when the equipment is repaired and maintained, which is time-consuming and labor-intensive, inefficient, and not conducive to the overall working environment. There is no way to control the cleanliness of the cleaning; brush cleaning is contact-type, and there is a risk of scratching the carrier and generating static electricity. Summary of the invention

[0004] In order to solve the problems existing in the prior art, the purpose of the present invention is to provide a cleaning device for semiconductor chip production, which adopts non-contact suspended positive and negative airway cleaning. At the same time, the cleaning device realizes gas and electricity isolation and independent operation, thereby improving the stability and yield rate of product processing.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A wafer production dust removal device comprises a bottom frame, four corners of the bottom frame are provided with upright columns extending upward, an end of the column away from the bottom frame is provided with an upper frame body, and the bottom frame, the upright column and the upper frame body form a mounting frame; a dust removal mechanism is provided in the mounting frame, a moving mechanism is provided above the dust removal mechanism, a pneumatic assembly is provided above the moving mechanism, and the dust removal mechanism, the moving mechanism and the pneumatic assembly are arranged in the mounting frame;

[0007] A supporting cross plate is provided between the middle parts of two adjacent columns, another matching supporting cross plate is provided between the two columns on the opposite side, the two supporting cross plates are matched and arranged opposite to each other, a cross-carrying plate is provided between the two supporting cross plates, and part of the components of the air pressure component are provided on the cross-carrying plate;

[0008] The dust removal mechanism comprises a dust removal head cavity, a bottom plate is provided at the bottom of the dust removal head cavity, the dust removal head cavity and the bottom plate are integrally formed, and a frame sealing cover is provided at the top of the dust removal head cavity;

[0009] An opening is provided at the top of the dust removal head cavity, a frame sealing cover is provided at the opening at the top of the dust removal head cavity, a positive pressure chamber is provided in the dust removal head cavity, and the lateral side walls of the positive pressure chamber are vertically arranged from the bottom plate in the dust removal head cavity, and the top of the positive pressure chamber is separated from the top of the dust removal head cavity by a separation distance;

[0010] The moving mechanism is arranged between the supporting transverse plates on both sides, and the moving mechanism includes a concave rail and a motor; a concave rail is arranged between the supporting transverse plates on both sides, and both ends of the concave rail are respectively fixedly arranged on the supporting transverse plates on both sides, a motor is arranged at one end of the concave rail, and a gear is arranged at the other end of the concave rail, an internal toothed belt is sleeved between the output shaft of the motor and the gear, the internal toothed belt is arranged in the groove of the concave rail, and the transmission wheel on the output shaft of the motor is gearedly connected with the internal toothed belt.

[0011] Further, in some embodiments, an empty space is provided between the outer walls on both sides of the positive pressure chamber and the inner wall of the dust removal head cavity, the cavity between the inner wall of the dust removal head cavity and the outer wall of the positive pressure chamber forms a negative pressure cavity, and negative pressure cavities are respectively provided on both sides of the positive pressure chamber, and the negative pressure cavities on both sides are arranged in the dust removal head cavity;

[0012] A dust blowing slit is provided on the bottom plate of the positive pressure chamber, and two matching variable-section rods are provided on the bottom surface of the positive pressure chamber. The variable-section rods are arranged parallel to the dust blowing slit, and the two variable-section rods are arranged on both sides of the dust blowing slit respectively;

[0013] A first suction slit and a second suction slit are provided on the bottom plate of the negative pressure chamber, and the first suction slit, the second suction slit and the dust blowing slit are arranged in parallel; the first suction slit is arranged close to the dust blowing slit, the second suction slit is arranged away from the dust blowing slit, and a separation distance is provided between the first suction slit and the second suction slit; a blowing and suction operation distance is provided between the dust blowing slit and the first suction slit.

[0014] Further, in some embodiments, a positive pressure sealing cover is provided at one end of the positive pressure chamber away from the bottom plate, and an air inlet cylinder extending upward through the frame sealing cover is provided on the positive pressure sealing cover, and one end of the air inlet cylinder away from the positive pressure chamber extends above the frame sealing cover, and the air inlet cylinder is connected to the positive pressure chamber;

[0015] The height ratio of the positive pressure chamber to the height ratio of the dust removal head cavity is 2 / 3 to 3 / 4:1.

[0016] A hanging frame is provided on the frame sealing cover, and one end of the hanging frame away from the frame sealing cover is arranged on the moving mechanism;

[0017] The frame sealing cover is provided with an exhaust tube, which is connected to the negative pressure chamber; the positive pressure chamber and the negative pressure chamber are respectively arranged in the dust removal head cavity, and the positive pressure chamber and the negative pressure chamber are isolated from each other and do not communicate with each other;

[0018] Dust blowing slit width: the ratio of the first suction slit width to the second suction slit width is 1:4-5:4-5; the first suction slit and the second suction slit are of equal width;

[0019] The ratio of dust blowing slit air volume to the first suction slit air volume is 1:1.5~3, and the second suction slit air volume is equal to the first suction slit air volume.

[0020] Further, in some embodiments, a supporting middle beam is provided in the middle of the bottom frame, supporting side beams are provided on both sides of the supporting middle beam, the supporting middle beam and the supporting side beams are arranged in the frame of the bottom frame, and the supporting middle beam and the supporting side beams are arranged at intervals;

[0021] The bottom surfaces of the supporting middle beam and the supporting side beams are respectively provided with positioning grooves corresponding to the carrier, the two sides of the supporting middle beam are respectively provided with double-sided tactile wings protruding outwards, and the inner sides of the supporting side beams are respectively provided with inner tactile wings protruding inwards;

[0022] A middle accommodating groove corresponding to the supporting middle beam is provided on the bottom plate of the dust removal head cavity, and double-side avoidance recesses corresponding to the double-side tactile wings are provided on both sides of the middle accommodating groove; a side accommodating groove corresponding to the supporting side beam is provided on the bottom plate of the dust removal head cavity, and an inner avoidance recess corresponding to the inner tactile wing is provided on the inner side of the side accommodating groove.

[0023] Further, in some embodiments, the variable-section rod is provided with an inwardly protruding compressed air convex hull, an air inlet spacing D1 is provided between the tops of the two corresponding variable-section rods, a convex hull spacing D2 is provided between the compressed air convex hulls on the two opposite sides of the middle of the two variable-section rods, and the air inlet spacing D1>convex hull spacing D2; an air outlet spacing D3 is provided between the bottoms of the two corresponding variable-section rods, and a dust blowing gap D4 is provided on the bottom plate, and the dust blowing gap D4 is also the width of the dust blowing gap; the air inlet spacing D1=the air outlet spacing D3, and the air outlet spacing D3>the dust blowing gap D4;

[0024] The compressed air flow convex hull is a convex strip type;

[0025] Or the convex hull of the compressed airflow is a long strip with an arc-shaped cross section;

[0026] Or the convex hull of the compressed airflow is a long strip with a short chordal section;

[0027] The bottom surface of the positive pressure chamber is provided with a pair of clamping plates that match and correspond to the variable-section rods, and the variable-section rods are embedded in the pair of clamping plates;

[0028] The ratio of the air inlet spacing D1: the convex hull spacing D2 is 5 to 10:1; the air inlet spacing D1 = the air outlet spacing D3; the ratio of the dust blowing spacing D4: the convex hull spacing D2 is 1:1 to 1.5.

[0029] Further, in some embodiments, a slide groove parallel to the inner toothed belt is provided at the bottom of the concave rail groove, a hanging concave slide seat is sleeved on the concave rail, a mounting beam is mounted on the top of the hanging concave slide seat, and the hanging concave slide seat is hung on the concave rail through the mounting beam;

[0030] The bottom surface of the groove of the hanging concave slide is provided with a clamp seat corresponding to the internal toothed belt, the internal toothed belt is clamped in the clamp seat, and the clamp seat and the internal toothed belt are tightly matched; the clamp seat is inserted in the slide groove, and a hanging frame is fixedly provided under the hanging concave slide.

[0031] Further, in some embodiments, the air pressure component includes a positive pressure fan and a negative pressure fan, a horizontal carrier plate is provided between the supporting horizontal plates on both sides, and the two ends of the horizontal carrier plate are respectively fixedly arranged on the supporting horizontal plates on both sides, a negative pressure high-efficiency filter bin is provided on the horizontal carrier plate, a negative pressure fan is provided on the negative pressure high-efficiency filter bin, a negative pressure fan air inlet housing is provided on the outer side of the negative pressure fan, a negative pressure fan exhaust housing is provided on the top of the negative pressure fan, and the negative pressure high-efficiency filter bin is connected to the exhaust tube on the dust removal mechanism through a duct;

[0032] A positive pressure high efficiency filter bin is provided under the upper frame, a positive pressure fan is provided under the positive pressure high efficiency filter bin, the upper part of the positive pressure fan is provided with a positive pressure fan air inlet casing, the lower part of the positive pressure fan is provided with a positive pressure fan exhaust casing, and the positive pressure fan is connected to the air inlet pipe on the dust removal mechanism through a duct.

[0033] This application uses a non-contact dust removal head for cleaning and an automated cleaning device. The cleaning device of this application corresponds to the size of the chip box (chip wafer box) on the carrier to clean the carrier. The equipment of this application is placed on the chip carrier for cleaning. There are generally hundreds or thousands of wafer processing carriers (points) in the working environment. The working environment is equipped with an overhead crane system, and the overhead crane is loaded with a mobile fixture. When a station is cleaned, the overhead crane system transports the cleaning equipment of this application to the next idle station to be cleaned (carrier position); you only need to cooperate with the station route map to clean the idle stations one by one.

[0034] This application adopts a non-contact suspension + gas and electricity isolation design, which uses a fluctuating airflow to blow dust → wind curtain blocking (negative pressure suction) to close the dust removal workspace; a high-efficiency filter is set on the suction fan (negative pressure fan) to filter the dust (efficiently), and two fans provide positive or negative pressure air sources without external air sources; in addition, it is powered by batteries without external power supply. The fan and motor are both 24 volts, and the entire device is isolated from external gas and electricity.

[0035] The dust removal head (blowing and suction head) of the present application is cleaned by blowing through the middle dust blowing slit and suctioned through the two side suction slits; the dust removal head is suspended on the carrier without contact, the middle dust blowing slit blows and the two side suction slits suction, dust will not be exposed, and the negative pressure suction (suction slits) on both sides will not leak air, which can prevent dust from floating out.

[0036] There are two suction slits (narrow suction channels) on each side of the dust removal head, and the width of the suction slit is greater than the width of the dust blowing slit. The wind blown down from the dust blowing slit in the middle of the dust removal head (working gun) will spread to both sides, and two suction slit air curtains are set on each side to suck away the dust; the suction slits on both sides form a suction air curtain to prevent dust from spreading out of the dust blowing gun, improve cleaning efficiency, and enhance the degree of automation of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a structural schematic diagram of an embodiment of the present invention;

[0038] Figure 2 It is a structural schematic diagram of the bottom frame part of an embodiment of the present invention;

[0039] Figure 3 It is a cross-sectional structural diagram of the dust removal mechanism of an embodiment of the present invention;

[0040] Figure 4 It is a structural schematic diagram of an embodiment of the variable cross-section rod part of the present invention;

[0041] Figure 5 It is a structural schematic diagram of another embodiment of the variable cross-section rod part of the present invention;

[0042] Figure 6 It is a schematic structural diagram of the dust removal mechanism part of an embodiment of the present invention;

[0043] Figure 7 It is a cross-sectional schematic diagram of the dust removal mechanism part of an embodiment of the present invention;

[0044] Figure 8 Schematic diagram of wind direction of the dust removal mechanism according to an embodiment of the present invention;

[0045] Fig. 9 It is a structural schematic diagram of an embodiment of the present invention;

[0046] Fig.10 It is a schematic diagram of the assembly of the moving mechanism part of an embodiment of the present invention;

[0047] Fig.11 It is a structural schematic diagram of the moving mechanism part of an embodiment of the present invention;

[0048] Fig.12 It is a schematic diagram of the assembly of the pneumatic component part of an embodiment of the present invention.

[0049] Description of the markings in the figure:

[0050] Column 11, upper frame 12, supporting horizontal plate 13, horizontal carrier plate 14, bottom frame 21, supporting middle beam 22, positioning groove 23, double-sided tactile wings 24, supporting side beams 25, inner tactile wings 27, dust removal mechanism 31, dust removal head cavity 32, bottom plate 33, frame sealing cover 34, positive pressure sealing cover 35, negative pressure cavity 36, positive pressure chamber 37, air inlet 38, exhaust duct 39, middle accommodating groove 41, double-sided avoidance concave platform 42, side accommodating groove 43, inner avoidance concave platform 44, compressed air flow convex hull 45, first suction slit 46, second Suction seam 47, dust blowing seam 48, variable cross-section rod 49, moving mechanism 51, motor 52, gear 53, inner tooth belt 54, concave rail 55, slide groove 56, hanging concave slide seat 57, clamp seat 58, air pressure component 61, positive pressure fan 62, negative pressure fan 63, positive pressure fan exhaust shell 64, positive pressure fan air inlet shell 65, negative pressure high efficiency filter bin 66, negative pressure fan air inlet shell 67, negative pressure fan exhaust shell 68, positive pressure high efficiency filter bin 69, battery 81, duct 82, positioning plate 83, hanging rack 84, mounting beam 85. DETAILED DESCRIPTION

[0051] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0052] In the description of the present invention, it should be noted that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "inner", "outer", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present invention, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0053] In the production of semiconductor chips, the surface layer of the carrier that holds the processed chip box is provided with three separated and evenly distributed positioning support heads. In order to prevent the cleaning device of the present application from contacting the surface of the carrier, the bottom frame 21 of the cleaning device of the present application is provided with three support arms that match the three positioning support heads: a supporting middle beam 22 and two supporting side beams 25. The bottom surfaces of the supporting middle beam 22 and the two supporting side beams 25 are provided with positioning grooves 23 that match the positioning support heads, so that the positioning grooves 23 of the bottom frame 21 are in contact with the positioning support heads of the carrier. Through the load-bearing of three points and three short beams, the dust removal head is suspended on the carrier in a non-contact manner, maintaining the bottom frame 21 of the cleaning device at a distance from the surface of the carrier without contact.

[0054] Please refer to the accompanying drawings. The present application includes a base frame 21. The four corners of the base frame 21 are provided with upright columns 11 extending upward. The end of the column 11 away from the base frame 21 is provided with an upper frame body 12. The base frame 21, the columns 11 and the upper frame body 12 form an installation frame. A dust removal mechanism 31 is provided in the installation frame. A moving mechanism 51 is provided above the dust removal mechanism 31. A pneumatic assembly 61 is provided above the moving mechanism 51. The dust removal mechanism 31, the moving mechanism 51 and the pneumatic assembly 61 are arranged in the installation frame.

[0055] A supporting cross plate 13 is provided between the middle parts of two adjacent columns 11, and another matching supporting cross plate 13 is provided between the two columns 11 on the opposite side. The two supporting cross plates 13 are matched and correspondingly arranged, and a cross-carrying plate 14 is provided between the two supporting cross plates 13. Partial components of the pneumatic assembly 61 are provided on the cross-carrying plate 14, and a battery 81 is provided on the cross-carrying plate 14. The battery 81 is arranged under the upper frame 12.

[0056] The bottom surface of the positive pressure chamber 37 is provided with a pair of clamping plates 83 that match and correspond to the variable-section rod 49 , and the variable-section rod 49 is embedded in the pair of clamping plates 83 .

[0057] The dust removal mechanism 31 includes a dust removal head cavity 32, which is also a pressure-dividing bin; a bottom plate 33 is provided at the bottom of the dust removal head cavity 32, and the dust removal head cavity 32 and the bottom plate 33 are integrally formed; a frame sealing cover 34 is provided at the top of the dust removal head cavity 32.

[0058] Further, in one embodiment, the top of the dust removal head cavity 32 is provided with an opening, and a frame sealing cover 34 is provided at the opening at the top of the dust removal head cavity 32, that is, the frame sealing cover 34 is a sealing cover plate of the dust removal head cavity 32. A positive pressure chamber 37 is provided in the dust removal head cavity 32, and the lateral side walls of the positive pressure chamber 37 are vertically arranged from the bottom plate 33 in the dust removal head cavity 32, and the top of the positive pressure chamber 37 is separated from the top of the dust removal head cavity 32 by a separation distance, that is, a distance is provided between the top of the positive pressure chamber 37 away from the bottom plate 33 and the frame sealing cover 34.

[0059] The ratio of the height of the positive pressure chamber 37 to the height of the dust removal head cavity 32 is 2 / 3 to 3 / 4:1.

[0060] Furthermore, in one of the embodiments, a positive pressure sealing cover 35 (positive pressure chamber cover) is provided at one end of the positive pressure chamber 37 away from the bottom plate 33, and an air inlet pipe 38 extending upward through the frame sealing cover 34 is provided on the positive pressure sealing cover 35. One end of the air inlet pipe 38 away from the positive pressure chamber 37 extends out above the frame sealing cover 34, and the air inlet pipe 38 is connected with the positive pressure chamber 37.

[0061] There is an empty space between the outer walls of the two sides of the positive pressure chamber 37 and the inner wall of the dust removal head cavity 32. The cavity between the inner wall of the dust removal head cavity 32 and the outer wall of the positive pressure chamber 37 forms a negative pressure cavity 36. The outer side of the outer wall of the positive pressure chamber 37 is provided with a negative pressure cavity 36, that is, the two sides of the positive pressure chamber 37 are respectively provided with negative pressure cavities 36, and the negative pressure cavities 36 on both sides are arranged in the dust removal head cavity 32; the frame sealing cover 34 is provided with an exhaust cylinder 39, and the exhaust cylinder 39 is connected with the negative pressure cavity 36. The positive pressure chamber 37 and the negative pressure cavity 36 are respectively arranged in the dust removal head cavity 32, and the positive pressure chamber 37 and the negative pressure cavity 36 are isolated from each other and do not penetrate each other.

[0062] A hanging frame 84 is disposed on the frame sealing cover 34 , and one end of the hanging frame 84 away from the frame sealing cover 34 is disposed on the moving mechanism 51 .

[0063] Furthermore, in one of the embodiments, a transversely penetrating dust blowing slit 48 is provided on the bottom plate 33 (bottom surface) of the positive pressure chamber 37, and two matching variable-section rods 49 are provided on the bottom surface of the positive pressure chamber 37. The variable-section rods 49 are arranged parallel to the dust blowing slit 48, and the two variable-section rods 49 are respectively arranged on both sides of the dust blowing slit 48.

[0064] The variable-section rod 49 is provided with a compressed air flow bulge 45 protruding inward (toward the opposite side), and an air inlet spacing D1 is provided between the tops of the two corresponding variable-section rods 49, and a bulge spacing D2 is provided between the compressed air flow bulges 45 on the opposite sides of the middle of the two variable-section rods 49, and the air inlet spacing D1>the bulge spacing D2; an air outlet spacing D3 is provided between the bottoms of the two corresponding variable-section rods 49, and a dust blowing spacing D4 is provided in the dust blowing slot 48 opened on the bottom plate 33, and the dust blowing spacing D4 is also the width of the dust blowing slot 48; the air inlet spacing D1=the air outlet spacing D3, and the air outlet spacing D3>the dust blowing spacing D4.

[0065] The compressed airflow convex hull 45 is a convex strip type;

[0066] Or the compressed airflow convex hull 45 is a long strip with an arc-shaped cross section;

[0067] Or the compressed airflow convex hull 45 is a long strip with a short chord-shaped section.

[0068] Variable cross-section rod 49: The compressed air passes through the variable cross-section air flow channel, the wide and narrow cross-section variable flow channel, and through repeated compression and diffusion, a fluctuating airflow is generated, and a high-frequency and high-speed pulse airflow is generated at the outlet position (dust blowing slit 48), so that the ultra-fine particles are separated from the substrate and then sucked away and collected by the surrounding negative pressure airflow.

[0069] Furthermore, in one of the embodiments, the ratio of the air inlet spacing D1: the convex hull spacing D2 is 5-10:1; the air inlet spacing D1 = the air outlet spacing D3, D1 is equal to D3; the dust blowing spacing D4: the convex hull spacing D2 is 1:1-1.5.

[0070] The size of the wind gap is D1=D3>D2≧D4, and the airflow passes through D1→D2→D3→D4 to change from wide to narrow→wide to narrow, and obtains a high-frequency and high-speed pulse airflow, and the dust-blowing slit 48 air outlet is used for impact dust blowing and wind sweeping.

[0071] The bottom plate 33 (bottom surface) of the negative pressure chamber 36 is provided with a first suction slit 46 and a second suction slit 47 which are transversely penetrated, and the first suction slit 46, the second suction slit 47 and the dust blowing slit 48 are arranged in parallel; the first suction slit 46 (inner suction slit) is arranged close to the dust blowing slit 48, and the second suction slit 47 (outer suction slit) is arranged away from the dust blowing slit 48, and a separation distance is provided between the first suction slit 46 and the second suction slit 47. Further, the first suction slit 46 and the second suction slit 47 are arranged through the bottom plate 33 of the negative pressure chamber 36, that is, the first suction slit 46 and the second suction slit 47 are opened through the bottom plate 33. A blowing and suction operation distance is provided between the dust blowing slit 48 and the first suction slit 46.

[0072] Further, in one of the embodiments, the ratio of the width of the dust blowing slit 48: the width of the first suction slit 46: the width of the second suction slit 47 is 1:4-5:4-5;

[0073] The first suction slit 46 and the second suction slit 47 have the same width.

[0074] Furthermore, in one of the embodiments, the ratio of the air volume of the dust blowing slot 48 to the air volume of the first suction slot 46 is 1:1.5-3, and the air volume of the second suction slot 47 is equal to the air volume of the first suction slot 31.

[0075] A supporting middle beam 22 is provided in the middle of the bottom frame 21 , and supporting side beams 25 are provided on both sides of the supporting middle beam 22 . The supporting middle beam 22 and the supporting side beams 25 are arranged in the frame of the bottom frame 21 , and the supporting middle beam 22 and the supporting side beams 25 are arranged at intervals.

[0076] The bottom surfaces of the supporting middle beam 22 and the supporting side beams 25 are respectively provided with positioning grooves 23 matching the carrier, the two sides of the supporting middle beam 22 are respectively provided with double-sided tactile wings 24 protruding outwards, and the inner sides of the supporting side beams 25 are respectively provided with inner tactile wings 27 protruding inwards.

[0077] Furthermore, in one of the embodiments, a middle accommodating groove 41 is provided on the bottom plate 33 of the dust removal head cavity 32, and the two sides of the middle accommodating groove 41 are provided with double-sided avoidance recesses 42 corresponding to the double-sided tactile wings 24; a side accommodating groove 43 is provided on the bottom plate 33 of the dust removal head cavity 32, and the inner side of the side accommodating groove 43 is provided with an inner avoidance recess 44 corresponding to the inner tactile wings 27.

[0078] Furthermore, in one of the embodiments, the dust removal mechanism 31 is hung on the moving mechanism 51 through a hanging bracket 84 , and the dust removal mechanism 31 is suspended on the bottom frame 21 ; the dust removal mechanism 31 is connected to the pneumatic assembly 61 through a conduit 82 .

[0079] Furthermore, in one of the embodiments, the dust removal mechanism 31 is hung on the hanging concave slide seat 57 of the moving mechanism 51 through the hanging bracket 84, and the dust removal mechanism 31 is suspended on the bottom frame 21; the dust removal mechanism 31 is connected to the pneumatic component 61 through the conduit 82.

[0080] The moving mechanism 51 is arranged between the supporting transverse plates 13 on both sides, and the moving mechanism 51 includes a concave rail 55 and a motor 52; specifically, a concave rail 55 is arranged between the supporting transverse plates 13 on both sides, and both ends of the concave rail 55 are respectively fixed on the supporting transverse plates 13 on both sides, one end of the concave rail 55 is provided with a motor 52, and the other end of the concave rail 55 is provided with a gear 53, an internal toothed belt 54 is sleeved between the output shaft of the motor 52 and the gear 53, the internal toothed belt 54 is arranged in the groove of the concave rail 55, and the transmission wheel on the output shaft of the motor 52 is gearedly connected with the internal toothed belt 54.

[0081] A slide groove 56 parallel to the inner toothed belt 54 is provided at the bottom of the groove of the concave rail 55, a hanging concave slide seat 57 is sleeved on the concave rail 55, a mounting beam 85 is mounted on the top of the hanging concave slide seat 57, and the hanging concave slide seat 57 is hung on the concave rail 55 through the mounting beam 85; a clamping seat 58 corresponding to the inner toothed belt 54 is provided on the bottom surface of the groove of the hanging concave slide seat 57, the inner toothed belt 54 is clamped in the clamping seat 58, and the clamping seat 58 is tightly matched with the inner toothed belt 54; the clamping seat 58 is inserted in the slide groove 56, and a hanging frame 84 is fixedly provided at the bottom of the hanging concave slide seat 57.

[0082] The motor 52 drives the clamping seat 58 to move back and forth in the slide groove 56 through the internal toothed belt 54, and the clamping seat 58 drives the hanging concave slide seat 57 to move back and forth on the concave rail 55, and then drives the dust removal mechanism 31 to move back and forth through the hanging frame 84.

[0083] The air pressure component 61 includes a positive pressure fan 62 and a negative pressure fan 63. A horizontal carrier plate 14 is provided between the supporting horizontal plates 13 on both sides. The two ends of the horizontal carrier plate 14 are respectively fixed on the supporting horizontal plates 13 on both sides. A negative pressure high-efficiency filter bin 66 is provided on the horizontal carrier plate 14. The negative pressure high-efficiency filter bin 66 is provided on the negative pressure fan 63. The outer side of the negative pressure fan 63 is provided with a negative pressure fan air inlet shell 67. The top of the negative pressure fan 63 is provided with a negative pressure fan exhaust shell 68. The negative pressure high-efficiency filter bin 66 is connected to the exhaust pipe on the dust removal mechanism 31 through a conduit 82.

[0084] A positive pressure high efficiency filter chamber 69 is provided below the upper frame 12, and a positive pressure fan 62 is provided below the positive pressure high efficiency filter chamber 69. The upper part of the positive pressure fan 62 is provided with a positive pressure fan air inlet shell 65, and the lower part of the positive pressure fan 62 is provided with a positive pressure fan exhaust shell 64. The positive pressure fan 62 is connected to the air inlet pipe on the dust removal mechanism 31 through a duct 82.

[0085] The above detailed description includes reference to the accompanying drawings, which form a part of the detailed description. By way of illustration, the accompanying drawings show specific embodiments that can implement the present invention. These embodiments are also referred to as "examples" in this article. In addition to those elements shown and described, these examples can also include other elements. The inventors, either with respect to a specific example (or one or more aspects thereof) or with respect to other examples (or one or more aspects thereof) shown or described herein, also foresee examples of any combination or arrangement of the elements shown or described.

Claims

1. A wafer production dust removal device, comprising: A bottom frame (21), wherein four corners of the bottom frame (21) are provided with upright columns (11) extending upward, an upper frame body (12) is provided at one end of the upright column (11) away from the bottom frame (21), and the bottom frame (21), the upright column (11) and the upper frame body (12) form a mounting frame; characterized in that a dust removal mechanism (31) is provided in the mounting frame, a moving mechanism (51) is provided above the dust removal mechanism (31), a pneumatic assembly (61) is provided above the moving mechanism (51), and the dust removal mechanism (31), the moving mechanism (51) and the pneumatic assembly (61) are arranged in the mounting frame; A supporting transverse plate (13) is provided between the middle parts of two adjacent upright posts (11), another supporting transverse plate (13) is provided between the two upright posts (11) on the other side, the two supporting transverse plates (13) are arranged opposite to each other, a transverse carrier plate (14) is provided between the two supporting transverse plates (13), and a part of the pneumatic component (61) is provided on the transverse carrier plate (14); The dust removal mechanism (31) comprises a dust removal head cavity (32), a bottom plate (33) is provided at the bottom of the dust removal head cavity (32), the dust removal head cavity (32) and the bottom plate (33) are integrally formed, and a frame sealing cover (34) is provided at the top of the dust removal head cavity (32); An opening is provided at the top of the dust removal head cavity (32), a frame sealing cover (34) is provided at the opening at the top of the dust removal head cavity (32), a positive pressure chamber (37) is provided in the dust removal head cavity (32), two lateral side walls of the positive pressure chamber (37) are vertically arranged from the bottom plate (33) in the dust removal head cavity (32), and a separation distance is provided between the top of the positive pressure chamber (37) and the top of the dust removal head cavity (32); The moving mechanism (51) is arranged between the supporting transverse plates (13) on both sides, and comprises a concave rail (55) and a motor (52); a concave rail (55) is arranged between the supporting transverse plates (13) on both sides, and two ends of the concave rail (55) are respectively fixedly arranged on the supporting transverse plates (13) on both sides, one end of the concave rail (55) is provided with a motor (52), and the other end of the concave rail (55) is provided with a gear (53), an internal toothed belt (54) is sleeved between the output shaft of the motor (52) and the gear (53), and the internal toothed belt (54) is arranged in a groove of the concave rail (55), and a transmission wheel on the output shaft of the motor (52) is gear-engaged and connected with the internal toothed belt (54).

2. A wafer production dust removal device according to claim 1, characterized in that: An empty space is provided between the outer walls of both sides of the positive pressure chamber (37) and the inner wall of the dust removal head cavity (32); the cavity between the inner wall of the dust removal head cavity (32) and the outer wall of the positive pressure chamber (37) forms a negative pressure chamber (36); negative pressure chambers (36) are provided on both sides of the positive pressure chamber (37), and the negative pressure chambers (36) on both sides are arranged in the dust removal head cavity (32); A dust blowing slit (48) is provided on the bottom plate (33) of the positive pressure chamber (37) and runs through it transversely. Two variable-section rods (49) are provided on the bottom surface of the positive pressure chamber (37) and are matched with each other. The variable-section rods (49) are arranged in parallel with the dust blowing slit (48). The two variable-section rods (49) are respectively arranged on both sides of the dust blowing slit (48). A first suction slit (46) and a second suction slit (47) are provided on the bottom plate (33) of the negative pressure chamber (36) and are transversely penetrated. The first suction slit (46), the second suction slit (47) and the dust blowing slit (48) are arranged in parallel. The first suction slit (46) is arranged close to the dust blowing slit (48), and the second suction slit (47) is arranged away from the dust blowing slit (48). A separation distance is provided between the first suction slit (46) and the second suction slit (47). A blowing and suction operation distance is provided between the dust blowing slit (48) and the first suction slit (46).

3. The wafer production dust removal device according to claim 1, characterized in that: The positive pressure chamber (37) is provided with a positive pressure sealing cover (35) at one end away from the bottom plate (33), and an air inlet cylinder (38) extending upward and penetrating the frame sealing cover (34) is provided on the positive pressure sealing cover (35). The end of the air inlet cylinder (38) away from the positive pressure chamber (37) extends above the frame sealing cover (34), and the air inlet cylinder (38) is connected to the positive pressure chamber (37); The ratio of the height of the positive pressure chamber (37) to the height of the dust removal head cavity (32) is 2 / 3 to 3 / 4:1; A hanging frame (84) is provided on the frame sealing cover (34), and one end of the hanging frame (84) away from the frame sealing cover (34) is arranged on the moving mechanism (51); An exhaust tube (39) is provided on the frame sealing cover (34), and the exhaust tube (39) is connected to the negative pressure chamber (36); the positive pressure chamber (37) and the negative pressure chamber (36) are respectively arranged in the dust removal head cavity (32), and the positive pressure chamber (37) and the negative pressure chamber (36) are isolated from each other and do not communicate with each other; The ratio of the width of the dust blowing slit (48): the width of the first suction slit (46): the width of the second suction slit (47) is 1:4-5:4-5; the first suction slit (46) and the second suction slit (47) are of equal width; The ratio of the air volume of the dust blowing slit (48) to the air volume of the first suction slit (46) is 1:1.5-3, and the air volume of the second suction slit (47) is equal to the air volume of the first suction slit (31).

4. The wafer production dust removal device according to claim 1, characterized in that: A supporting middle beam (22) is provided in the middle of the bottom frame (21), and supporting side beams (25) are respectively provided on both sides of the supporting middle beam (22), the supporting middle beam (22) and the supporting side beams (25) are arranged in the frame of the bottom frame (21), and the supporting middle beam (22) and the supporting side beams (25) are arranged at intervals; The bottom surfaces of the supporting middle beam (22) and the supporting side beam (25) are respectively provided with positioning grooves (23) matching with the carrier, the two sides of the supporting middle beam (22) are respectively provided with outwardly protruding double-sided tactile wings (24), and the inner side of the supporting side beam (25) is provided with inwardly protruding inner tactile wings (27); A middle accommodating groove (41) matching with the supporting middle beam (22) is provided on the bottom plate (33) of the dust removal head cavity (32), and double-side avoidance recesses (42) matching with the double-side tactile wings (24) are provided on both sides of the middle accommodating groove (41); a side accommodating groove (43) matching with the supporting side beam (25) is provided on the bottom plate (33) of the dust removal head cavity (32), and an inner side avoidance recess (44) matching with the inner side tactile wings (27) is provided on the inner side of the side accommodating groove (43).

5. The wafer production dust removal device according to claim 2, characterized in that: The variable cross-section rod (49) is provided with an inwardly protruding compressed air convex hull (45), an air inlet spacing D1 is provided between the tops of the two corresponding variable cross-section rods (49), a convex hull spacing D2 is provided between the compressed air convex hulls (45) on the two opposite sides of the middle of the two variable cross-section rods (49), and the air inlet spacing D1>the convex hull spacing D2; an air outlet spacing D3 is provided between the bottoms of the two corresponding variable cross-section rods (49), a dust blowing gap (48) provided on the bottom plate (33) is provided with a dust blowing gap D4, and the dust blowing gap D4 is also the width of the dust blowing gap (48); the air inlet spacing D1=the air outlet spacing D3, and the air outlet spacing D3>the dust blowing gap D4; The compressed air flow convex hull (45) is a convex strip type; Or the compressed airflow convex hull (45) is a long strip with an arc-shaped cross section; Or the compressed airflow convex hull (45) is a long strip with a short chord-shaped cross section; The bottom surface of the positive pressure chamber (37) is provided with a pair of clamping plates (83) that match and correspond to the variable cross-section rod (49), and the variable cross-section rod (49) is embedded in the pair of clamping plates (83); The ratio of the air inlet spacing D1: the convex hull spacing D2 is 5 to 10:1; the air inlet spacing D1 = the air outlet spacing D3; the ratio of the dust blowing spacing D4: the convex hull spacing D2 is 1:1 to 1.

5.

6. The wafer production dust removal device according to claim 1, characterized in that: The bottom of the groove of the concave rail (55) is provided with a slide groove (56) parallel to the inner toothed belt (54); a hanging concave slide seat (57) is sleeved on the concave rail (55); a mounting beam (85) is mounted on the top of the hanging concave slide seat (57); and the hanging concave slide seat (57) is hung on the concave rail (55) through the mounting beam (85); The bottom surface of the groove of the hanging concave slide seat (57) is provided with a clamp seat (58) corresponding to the inner toothed belt (54), the inner toothed belt (54) is clamped in the clamp seat (58), and the clamp seat (58) and the inner toothed belt (54) are tightly matched; the clamp seat (58) is inserted in the slide groove (56), and a hanging frame (84) is fixedly provided below the hanging concave slide seat (57).

7. The wafer production dust removal device according to claim 1, characterized in that: The air pressure component (61) comprises a positive pressure fan (62) and a negative pressure fan (63). A transverse carrier plate (14) is provided between the supporting transverse plates (13) on both sides. The two ends of the transverse carrier plate (14) are respectively fixedly arranged on the supporting transverse plates (13) on both sides. A negative pressure high-efficiency filter bin (66) is provided on the transverse carrier plate (14). A negative pressure fan (63) is provided on the negative pressure high-efficiency filter bin (66). A negative pressure fan air inlet housing (67) is provided on the outer side of the negative pressure fan (63). A negative pressure fan exhaust housing (68) is provided on the top of the negative pressure fan (63). The negative pressure high-efficiency filter bin (66) is connected to the exhaust pipe on the dust removal mechanism (31) through a conduit (82). A positive pressure high efficiency filter chamber (69) is provided below the upper frame (12), a positive pressure fan (62) is provided below the positive pressure high efficiency filter chamber (69), a positive pressure fan air inlet housing (65) is provided on the upper part of the positive pressure fan (62), a positive pressure fan air exhaust housing (64) is provided on the lower part of the positive pressure fan (62), and the positive pressure fan (62) is connected to the air inlet tube on the dust removal mechanism (31) through a conduit (82).

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