A diamond substrate surface processing apparatus and a surface processing method

Abstract

The application belongs to the technical field of substrate surface treatment, and particularly relates to a diamond substrate surface treatment device and a surface treatment method, which comprise: a workbench; a fixing frame fixed to the top of the workbench; a mounting seat arranged below the fixing frame; when the second motor is turned on, the rotating frame is driven to rotate by the output shaft of the second motor, the first grinding wheel and the second grinding wheel are driven to rotate by the rotating frame, the first grinding wheel is rotated to the lowermost position, and then rough grinding is performed; the second grinding wheel is rotated to the lowermost position, and then fine grinding is performed; the effects of rough grinding and fine grinding are realized; when the drying box is rotated to the lowermost position, the diamond sheet after grinding is dried; when grinding, the third motor needs to be turned on, the second gear is driven to rotate by the output shaft of the third motor, the first gear is driven to rotate by the second gear, the rotating rod is driven to rotate by the first gear, and the first grinding wheel and the second grinding wheel are driven to rotate by the rotating rod, so that the effect of grinding is realized.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of substrate surface processing, and particularly relates to a diamond substrate surface processing device and a surface processing method. BACKGROUND

[0002] At present, heat dissipation is one of the core problems of vehicle operation efficiency in the international automobile system. Various heat dissipation modes such as natural heat dissipation, fan heat dissipation, and liquid heat dissipation are used to improve the energy efficiency of vehicles. The diamond material is used as the substrate of the automobile power chip, including chip heat dissipation, heat sink, and automobile electronic module heat dissipation, which is the latest technical solution for heat dissipation. The diamond substrate needs to be subjected to surface treatment by using a surface treatment device during production.

[0003] A Chinese patent with the publication number CN115476215A discloses a preparation device for an ultrathin substrate. The device includes a base and a bearing plate. A first suction disc is fixedly connected to the bearing plate. A wafer bottom liner is placed on the first suction disc and is fixedly adsorbed by the first suction disc. A polishing block is movably connected above the bearing plate. When the polishing block is in contact with the wafer bottom liner, the polishing block rotates to polish the wafer bottom liner. A liquid tank is fixedly connected above the base. A liquid injection pipe is connected in the liquid tank. When the polishing block polishes the wafer bottom liner, the wafer bottom liner is cooled from the top and bottom surfaces, so that the temperature of the top and bottom surfaces of the wafer bottom liner is kept consistent. The temperature difference between the top and bottom surfaces of the wafer bottom liner is prevented, and the performance of the wafer bottom liner is affected. At the same time, the wafer bottom liner is sprayed with cooling liquid from the top and bottom surfaces, and the cooling effect is improved.

[0004] In the above-mentioned technology, the polishing block can only polish the substrate once. If the polishing block is rough polishing, the abrasive particles are large, and obvious scratches, pits and other defects will be left on the surface of the substrate, resulting in high surface roughness, and the flatness and smoothness cannot meet the requirements. If the polishing block is fine polishing, the abrasive particles used for polishing are small, and the amount of material removed each time is small. A long polishing time is required to achieve a certain removal amount, resulting in low production efficiency.

[0005] Therefore, the application provides a diamond substrate surface processing device and a surface processing method. SUMMARY

[0006] In order to make up for the deficiencies of the prior art and solve at least one technical problem proposed in the background art.

[0007] The technical scheme adopted by the application to solve the technical problems is that the diamond substrate surface processing device comprises:

[0008] a workbench;

[0009] The fixed frame is fixed on the top of the workbench;

[0010] The mounting seat is arranged below the fixed frame;

[0011] The first filter plate is arranged at the top end of the workbench;

[0012] The conversion mechanism is arranged below the mounting seat;

[0013] The conversion mechanism comprises a first polishing wheel, a second polishing wheel and a drying box;

[0014] The second motor is fixed on the mounting seat, the output shaft of the second motor penetrates the mounting seat, and the rotating frame is fixed thereon, the rotating frame is rotatably connected with the rotating rod, one end of the rotating rod is fixed with the first polishing wheel, the other end of the rotating rod is fixed with the second polishing wheel, the rotating rod is fixed with the first gear, the inner wall of the rotating frame is fixed with the third motor, the output shaft of the third motor is fixed with the second gear, and the second gear is meshed with the first gear; the first polishing wheel and the second polishing wheel are arranged above the first filter plate;

[0015] The side wall of the rotating frame is fixed with the drying box, and the drying box comprises an electric heating wire and a fan.

[0016] Preferably, the bottom of the fixed frame is fixed with two fixed plates, the first screw rod is rotatably connected between the two fixed plates through the bearing, one of the fixed plates is fixed with the first motor, the output shaft of the first motor is fixed at one end of the first screw rod, the moving block is threadedly connected on the first screw rod, two guide rods are fixed between the two fixed plates, and the moving block is slidably connected on the two guide rods.

[0017] Preferably, the bottom of the moving block is fixed with the electric push rod, the output end of the electric push rod is fixed on the top of the mounting seat, two side plates are symmetrically fixed on the side wall of the electric push rod, and two slide columns are fixed on the top of the mounting seat.

[0018] Preferably, a processing groove is formed in the workbench, the first filter plate is rotatably connected in the processing groove through a bearing, a fifth motor is fixedly connected to the inner wall of the bottom of the processing groove, a U-shaped frame is fixedly connected to the output shaft of the fifth motor, the top of the U-shaped frame is fixedly connected to the bottom of the first filter plate, a fourth motor is fixedly connected to the inner wall of the bottom of the U-shaped frame, a second lead screw is fixedly connected to the output shaft of the fourth motor, the top of the second lead screw is rotatably connected to the bottom of the first filter plate through a bearing, a lifting block is threadedly connected to the second lead screw, four sliding openings are formed in the first filter plate, sliding blocks are slidably connected in the sliding openings, connecting rods are rotatably connected to the bottom of the sliding blocks through pins, one end of the connecting rods is rotatably connected to the lifting block through a pin, and the four connecting rods are circumferentially arranged outside the second lead screw.

[0019] Preferably, a second filter plate is fixedly connected to the inner wall of the bottom end of the processing groove, a collecting cavity is formed in one end of the workbench, a blocking plate is mounted on one side of the collecting cavity, a scraper is fixedly connected to the output shaft of the fifth motor, the scraper is in close contact with the second filter plate, and the collecting cavity cooperates with the processing groove.

[0020] Preferably, a bottom plate is fixedly connected to the bottom of the workbench, a water tank is arranged on the top of the bottom plate, a water pump is fixedly connected to the top of the water tank, a water outlet pipe is mounted on the water pump, one end of the water outlet pipe is communicated and fixedly connected to the water tank, a protective frame is fixedly connected to the top of the workbench, the protective frame is arranged outside the first filter plate, the other end of the water outlet pipe is communicated and fixedly connected to the protective frame, a second drain pipe is communicated and fixedly connected to the bottom of the processing groove, one end of the second drain pipe is communicated and fixedly connected to the water tank, a hopper is fixedly connected to the bottom of the collecting cavity, a first drain pipe is fixedly connected to one end of the hopper, one end of the first drain pipe is communicated and fixedly connected to the water tank, a filter screen is fixedly connected to the bottom of the collecting cavity in a hollow manner, and the filter screen cooperates with the hopper.

[0021] Preferably, mounting frames are fixedly connected to the top of the sliding blocks, pen-shaped cylinders are fixedly connected to the top of the mounting frames, connecting blocks are fixedly connected to the output end of the pen-shaped cylinders, second clamping plates are fixedly connected to the bottom of the connecting blocks, first clamping plates are rotatably connected to the top of the sliding blocks, vertical rods are fixedly connected to the top of the first clamping plates, and the second clamping plates slide on the first clamping plates.

[0022] Preferably, a diamond substrate surface treatment method comprises the following steps:

[0023] S1: A single crystal diamond sheet is manufactured by using a high-temperature and high-pressure six-deformation diamond anvil press.

[0024] S2: Put the diamond sheet into an ultrasonic cleaning instrument containing an organic solvent such as acetone, ethanol, etc., and ultrasonic cleaning for 30 minutes to remove oil stains and dust on the surface;

[0025] S3: First, a first grinding wheel with a large particle size is used for preliminary grinding to remove large scratches and protrusions on the surface, and then a second grinding wheel with a large particle size is used for fine grinding to make the surface smoother and more flat;

[0026] S4: The diamond sheet is cut into a set shape according to the requirements;

[0027] S5: After the surface treatment is completed, the surface quality of the diamond sheet needs to be detected to produce standard diamond heat sink materials.

[0028] Preferably, the method for manufacturing a single crystal diamond sheet in S1 comprises the following steps:

[0029] S101: Prepare raw materials: select high-purity graphite as the main raw material, and add appropriate alloy catalyst powder;

[0030] S102: Assemble the synthesis block: mix the graphite powder, alloy catalyst powder and additives in a certain proportion, and go through the processes of granulation, static pressure, vacuum reduction, inspection, weighing, etc. to make a graphite core column; then the graphite core column is assembled together with a composite block, auxiliary parts and sealed pressure transmission medium to form a synthesis block;

[0031] S103: Synthesis: set the synthesis conditions, start the six-surface press, heat and pressurize and keep constant for a long time, so that the graphite gradually transforms into diamond under high temperature and high pressure;

[0032] S104: Processing and machining: after the crystal growth is completed, the heat is stopped and the pressure is released, the sealed pressure transmission medium is removed to obtain a synthesis column, and then purification treatment and sorting detection are carried out to obtain a diamond single crystal; then the diamond single crystal is processed into a diamond sheet through cutting, grinding and polishing.

[0033] Preferably, the synthesis conditions in S103 include a pressure of 5.5-6.0 Gpa and a temperature of 1450-2000℃; the diamond sheet in S104 includes a circular sheet, a square sheet and a special-shaped sheet, which is used for high heat dissipation demand of automobiles.

[0034] The beneficial effects of the present application are as follows:

[0035] 1. The diamond substrate surface treatment device and surface treatment method of the present application, through the cooperation of the first grinding wheel, the second grinding wheel and the drying box, when grinding is needed, the second motor is started, the output shaft of the second motor drives the rotating frame to rotate, the first grinding wheel and the second grinding wheel are driven to rotate by the rotating frame, when the first grinding wheel rotates to the lowest position, rough grinding is carried out; when the second grinding wheel rotates to the lowest position, fine grinding is carried out; the effect of switching between rough grinding and fine grinding is realized; when the drying box rotates to the lowest position, it is used for drying the ground diamond sheet; when grinding, the third motor needs to be started, the output shaft of the third motor drives the second gear to rotate, the first gear is driven to rotate by the second gear, the first grinding wheel and the second grinding wheel are driven to rotate by the first gear, so as to realize the effect of grinding.

[0036] 2. The diamond substrate surface treatment device and surface treatment method of the present application, through the cooperation of the sliding block, the connecting rod, the lifting block, the first clamping plate and the second clamping plate, when clamping the diamond sheet, the fourth motor needs to be started, the output shaft of the fourth motor drives the second screw to rotate, the lifting block moves up and down by the second screw, one end of the connecting rod moves by the lifting block, the other end of the connecting rod moves horizontally, the sliding block moves horizontally by the connecting rod, the first clamping plate and the second clamping plate move horizontally by the sliding block, until the diamond sheet is clamped and fixed; when grinding, the fifth motor needs to be started, the output shaft of the fifth motor drives the U-shaped frame to rotate, the first filter plate is driven to rotate by the U-shaped frame, the first clamping plate and the second clamping plate are driven to rotate by the first filter plate, so as to realize the wide grinding function of the diamond sheet.

[0037] 3. The diamond substrate surface treatment device and surface treatment method of the present application, through the use of the high heat dissipation performance of diamond, the heat dissipation and efficiency of the automobile are greatly improved; through the use of heat sink technology, in various places where high efficiency heat dissipation is needed, especially in places such as automobiles where high heat dissipation is needed, diamond has irreplaceable performance advantages. BRIEF DESCRIPTION OF DRAWINGS

[0038] The present application will be further described below in conjunction with the drawings.

[0039] Figure 1 is a perspective view of the present application;

[0040] Figure 2 is a sectional view of the present application;

[0041] Figure 3 is a structure diagram of the mounting seat in the present application;

[0042] Figure 4 is a structure diagram of the first grinding wheel and the second grinding wheel in the present application;

[0043] Figure 5 is a structural schematic diagram of the first filter plate in the application;

[0044] Figure 6 is a structural schematic diagram of the placement table in the application;

[0045] Figure 7 is a sectional view of the collection cavity in the application;

[0046] Figure 8 is a method flow chart of the diamond substrate surface treatment method in the application;

[0047] Figure 9 is a method flow chart of the single crystal diamond sheet manufacturing method in the application;

[0048] Figure 10 is a performance schematic diagram of the diamond output power in the application;

[0049] In the figure: 1, workbench; 11, bottom plate; 2, fixed frame; 21, fixed plate; 211, first screw rod; 212, guide rod; 213, moving block; 214, first motor; 22, electric push rod; 221, side plate; 222, slide column; 223, mounting seat; 23, second motor; 231, rotating frame; 232, first grinding wheel; 233, second grinding wheel; 234, drying box; 235, rotating rod; 236, first gear; 237, second gear; 238, third motor; 3, protective frame; 31, first filter plate; 311, sliding opening; 312, sliding block; 313, connecting rod; 314, lifting block; 315, second screw rod; 316, fourth motor; 317, U-shaped frame; 318, scraper; 319, fifth motor; 32, second filter plate; 321, collection cavity; 322, plugging plate; 33, water tank; 331, water outlet pipe; 332, water pump; 333, funnel; 334, first drain pipe; 335, filter screen; 336, second drain pipe; 34, mounting frame; 341, pen-shaped cylinder; 342, connecting block; 343, first clamping plate; 344, second clamping plate; 345, vertical rod; 35, placement table. DETAILED DESCRIPTION

[0050] In order to make the technical means, creative features, purposes and effects realized by the application easy to understand, the application is further described below in combination with specific embodiments.

[0051] As Figures 1 to 7As shown, the diamond substrate surface treatment device provided by the embodiment of the present application comprises a workbench 1, a fixed frame 2 fixedly connected to the top of the workbench 1, a mounting seat 223 arranged below the fixed frame 2, a first filter plate 31 arranged at the top end of the workbench 1, and a conversion mechanism arranged below the mounting seat 223. The conversion mechanism comprises a first grinding wheel 232, a second grinding wheel 233 and a drying box 234. The mounting seat 223 is fixedly connected with a second motor 23, the output shaft of the second motor 23 penetrates through the mounting seat 223 and is fixedly connected with a rotating frame 231, the rotating frame 231 is rotatably connected with a rotating rod 235, one end of the rotating rod 235 is fixedly connected with the first grinding wheel 232, the other end of the rotating rod 235 is fixedly connected with the second grinding wheel 233, the rotating rod 235 is fixedly connected with a first gear 236, the inner wall of the rotating frame 231 is fixedly connected with a third motor 238, the output shaft of the third motor 238 is fixedly connected with a second gear 237, and the second gear 237 is engaged with the first gear 236. The first grinding wheel 232 and the second grinding wheel 233 are arranged above the first filter plate 31. The side wall of the rotating frame 231 is fixedly connected with the drying box 234, and the drying box 234 comprises an electric heating wire and a fan.

[0052] Diamond has the highest thermal conductivity of natural substances known, 4 times larger than silicon carbide, 13 times larger than silicon, 43 times larger than gallium arsenide, single chip output power can reach 17KW, the largest output power of semiconductor materials, and the working frequency reaches 600GHz, which is the highest working frequency of semiconductor materials. Therefore, the high heat dissipation performance of diamond can greatly improve the heat dissipation and efficiency of the automobile. In the prior art, only one polishing of the substrate can be completed, if it is rough polishing, the abrasive particles are large, which will leave obvious scratches, pits and other defects on the surface of the substrate, resulting in high surface roughness, and the flatness and smoothness cannot meet the requirements, if it is fine polishing, the abrasive particles used for polishing are small, and the amount of material removed each time is small, a long polishing time is needed to achieve a certain removal amount, resulting in low production efficiency, the conversion mechanism provided in the present application needs to be polished, the second motor 23 is started, the output shaft of the second motor 23 drives the rotating frame 231 to rotate, the first polishing wheel 232 and the second polishing wheel 233 are driven to rotate by the rotating frame 231, when the first polishing wheel 232 rotates to the lowermost position, rough polishing is carried out, when the second polishing wheel 233 rotates to the lowermost position, fine polishing is carried out, the effects of rough polishing and fine polishing are realized, when the drying box 234 rotates to the lowermost position, it is used for drying the polished diamond sheet, when polishing, the third motor 238 needs to be started, the output shaft of the third motor 238 drives the second gear 237 to rotate, the first gear 236 is driven to rotate by the second gear 237, the first gear 236 drives the rotating rod 235 to rotate, the first polishing wheel 232 and the second polishing wheel 233 are driven to rotate by the rotating rod 235, so as to realize the effect of polishing.

[0053] As shown in Figure 3 The bottom of the fixing frame 2 is fixedly connected with two fixed plates 21, the first screw rod 211 is rotatably connected between the two fixed plates 21 through a bearing, one of the fixed plates 21 is fixedly connected with a first motor 214, the output shaft of the first motor 214 is fixedly connected to one end of the first screw rod 211, a moving block 213 is threadedly connected to the first screw rod 211, two guide rods 212 are fixedly connected between the two fixed plates 21, and the moving block 213 is slidably connected to the two guide rods 212.

[0054] The first screw rod 211 provided in the present application can adjust the positions of the first polishing wheel 232 and the second polishing wheel 233 according to the size of the diamond sheet during use, the first motor 214 is started, the output shaft of the first motor 214 drives the first screw rod 211 to rotate, the moving block 213 is driven to move by the first screw rod 211, and the electric push rod 22, the mounting seat 223, the first polishing wheel 232 and the second polishing wheel 233 are driven to move by the moving block 213, until they move to the appropriate positions, so as to facilitate polishing of diamond sheets of different sizes.

[0055] As Figure 3 shown, the bottom of the moving block 213 is fixedly connected with an electric push rod 22, the output end of the electric push rod 22 is fixedly connected to the top of the mounting seat 223; two side plates 221 are symmetrically fixedly connected to the side wall of the electric push rod 22, and the top of the mounting seat 223 is fixedly connected with two slide columns 222, and the two side plates 221 are slidingly connected to the slide columns 222, respectively.

[0056] The electric push rod 22 provided by the present application is convenient to adjust the height of the first grinding wheel 232 and the second grinding wheel 233 when in use. The height of the first grinding wheel 232 and the second grinding wheel 233 should be adjusted when grinding and feeding. By turning on the electric push rod 22, the mounting seat 223 is driven to move through the output end of the electric push rod 22. The slide column 222 is driven to move when the mounting seat 223 moves. The slide column 222 slides on the side plate 221 when the slide column 222 moves, so as to ensure that the mounting seat 223 moves in the vertical direction. The first grinding wheel 232 and the second grinding wheel 233 are driven to move through the mounting seat 223, so as to adjust the height of the first grinding wheel 232 and the second grinding wheel 233.

[0057] As Figure 2 and Figure 5 shown, the workbench 1 is provided with a machining groove, and the first filter plate 31 is rotatably connected in the machining groove through a bearing; the bottom inner wall of the machining groove is fixedly connected with a fifth motor 319, the output shaft of the fifth motor 319 is fixedly connected with a U-shaped frame 317, and the top of the U-shaped frame 317 is fixedly connected to the bottom of the first filter plate 31; the bottom inner wall of the U-shaped frame 317 is fixedly connected with a fourth motor 316, the output shaft of the fourth motor 316 is fixedly connected with a second lead screw 315, and the top of the second lead screw 315 is rotatably connected to the bottom of the first filter plate 31 through a bearing; the second lead screw 315 is threadedly connected with a lifting block 314, the first filter plate 31 is provided with four sliding openings 311, the sliding openings 311 are slidingly connected with sliding blocks 312, the bottom of the sliding blocks 312 is rotatably connected with connecting rods 313 through a pin shaft, one end of the connecting rods 313 is rotatably connected to the lifting block 314 through a pin shaft, and the four connecting rods 313 are circumferentially arranged outside the second lead screw 315.

[0058] The slider 312, the connecting rod 313 and the lifting block 314 provided by the application are used to clamp the diamond sheet, the fourth motor 316 is started, the second screw rod 315 is driven to rotate by the output shaft of the fourth motor 316, the lifting block 314 is driven to move up and down by the second screw rod 315, one end of the connecting rod 313 is driven to move by the lifting block 314, the other end of the connecting rod 313 is driven to slide horizontally, the slider 312 is driven to slide horizontally by the connecting rod 313, the first clamping plate 343 and the second clamping plate 344 are driven to slide horizontally by the slider 312, and the diamond sheet is clamped and fixed until the diamond sheet is clamped and fixed; when polishing, the fifth motor 319 is started, the U-shaped frame 317 is driven to rotate by the output shaft of the fifth motor 319, the first filter plate 31 is driven to rotate by the U-shaped frame 317, the first clamping plate 343 and the second clamping plate 344 are driven to rotate by the first filter plate 31, and the diamond sheet is polished in a large range.

[0059] As shown in Figure 2 and Figure 7 , the second filter plate 32 is fixedly connected to the inner wall of the bottom end of the machining groove, one end of the workbench 1 is provided with a collecting cavity 321, the collecting cavity 321 is provided with a blocking plate 322 on one side, the output shaft of the fifth motor 319 is fixedly connected with a scraper 318, the scraper 318 is in close contact with the second filter plate 32, and the collecting cavity 321 is matched with the machining groove.

[0060] The collecting cavity 321 provided by the application is used to collect the polishing waste material in use, the aperture of the first filter plate 31 is relatively large, the polishing waste material and water can flow down, and the waste material is filtered when passing through the second filter plate 32; the fifth motor 319 is started, the scraper 318 is driven to rotate by the fifth motor 319, the fertilizer on the second filter plate 32 is scraped into the collecting cavity 321 by the scraper 318, the waste material is prevented from blocking the second filter plate 32, and the water flow is affected.

[0061] As shown in Figures 1 to 2As shown, the bottom of the workbench 1 is fixedly connected with a bottom plate 11, the top of the bottom plate 11 is provided with a water tank 33, the top of the water tank 33 is fixedly connected with a water pump 332, the water pump 332 is provided with a water outlet pipe 331, one end of the water outlet pipe 331 is connected and fixed to the water tank 33; the top of the workbench 1 is fixedly connected with a protective frame 3, the protective frame 3 is arranged outside the first filter plate 31; the other end of the water outlet pipe 331 is connected and fixed to the protective frame 3; the bottom of the processing tank is connected and fixed with a second drain pipe 336, one end of the second drain pipe 336 is connected and fixed to the water tank 33; the bottom of the collecting cavity 321 is fixedly connected with a funnel 333, one end of the funnel 333 is fixedly connected with a first drain pipe 334, one end of the first drain pipe 334 is connected and fixed to the water tank 33, the bottom of the collecting cavity 321 is hollowly connected with a filter screen 335, and the filter screen 335 cooperates with the funnel 333.

[0062] The first drain pipe 334 and the second drain pipe 336 provided by the application are used for circulating water in use, and spraying is needed to prevent damage to the diamond sheet caused by high polishing temperature, and the spraying can also prevent the polishing waste from splashing; by opening the water pump 332, the water pump 332 pumps out the water in the water tank 33, sprays the water on the diamond sheet through the water outlet pipe 331, then filters the water through the second filter plate, the water in the processing tank flows to the water tank 33 through the second drain pipe 336, the water in the collecting tank is filtered through the filter screen 335, and finally flows to the water tank 33 through the funnel 333 and the first drain pipe 334, and is used for spraying the diamond sheet again.

[0063] As shown in the drawings, Figure 6 The top of the sliding block 312 is fixedly connected with a mounting frame 34, the top of the mounting frame 34 is fixedly connected with a pen-shaped air cylinder 341, the output end of the pen-shaped air cylinder 341 is fixedly connected with a connecting block 342, the bottom of the connecting block 342 is fixedly connected with a second clamping plate 344, the top of the sliding block 312 is rotatably connected with a first clamping plate 343, the top of the first clamping plate 343 is fixedly connected with a vertical rod 345, and the second clamping plate 344 slides on the first clamping plate 343; the top center of the first filter plate 31 is fixedly connected with a placing table 35, and the top of the placing table 35 is flush with the first clamping plate 343.

[0064] The first clamping plate 343 and the second clamping plate 344 provided by the application are used in use, in the clamping process, the pen-shaped air cylinder 341 needs to be opened, the connecting block 342 is driven to move through the output end of the pen-shaped air cylinder 341, the second clamping plate 344 is driven to move through the connecting block 342, the second clamping plate 344 slides on the vertical rod 345, and the diamond sheet is fixed; the placing table 35 is used for supporting the diamond sheet, preventing the diamond sheet from being broken when the polishing force is large.

[0065] As shown in the drawings,Figures 8 to 10 As shown in the figure, a diamond substrate surface treatment method comprises the following steps:

[0066] S1: using a high-temperature and high-pressure six-deformation diamond anvil press to manufacture a single crystal diamond sheet;

[0067] S2: placing the diamond sheet into an ultrasonic cleaning instrument containing an organic solvent such as acetone, ethanol, etc., and ultrasonic cleaning for 30 minutes to remove oil stains and dust on the surface;

[0068] S3: first using a first grinding wheel 232 with a large particle size for preliminary grinding to remove large scratches and protrusions on the surface, and then using a second grinding wheel 233 with a large particle size for fine grinding to make the surface smoother and more flat;

[0069] S4: cutting the diamond sheet into a set shape according to requirements;

[0070] S5: after the surface treatment is completed, the surface quality of the diamond sheet needs to be detected to produce standard diamond heat sink materials.

[0071] The method for manufacturing a single crystal diamond sheet in S1 comprises the following steps:

[0072] S101: preparing raw materials: selecting high-purity graphite as the main raw material and adding appropriate alloy catalyst powder;

[0073] S102: assembling a synthesis block: mixing graphite powder, alloy catalyst powder and additives in a certain proportion, and going through processes such as granulation, static pressure, vacuum reduction, inspection, weighing, etc. to make a graphite core column; then assembling the graphite core column with a composite block, auxiliary parts, etc. to form a synthesis block;

[0074] S103: synthesis: setting synthesis conditions, starting the six-surface press, heating and pressurizing and maintaining constant for a long time, so that the graphite gradually transforms into diamond under high temperature and high pressure;

[0075] S104: processing and machining: after the crystal growth is completed, the heat is stopped and the pressure is released, the sealing pressure medium is removed to obtain a synthesis column, and then purification treatment and sorting detection are performed to obtain a diamond single crystal; and then the diamond single crystal is cut, ground and polished to form a diamond sheet.

[0076] Example one:

[0077] The synthesis conditions in S103 include a pressure of 5.5 Gpa and a temperature of 1450℃; the diamond sheet in S104 includes a circular sheet, a square sheet and a special-shaped sheet, which is used for high heat dissipation requirements of automobiles.

[0078] Example two:

[0079] The synthesis condition in the S103 includes that the pressure is 5.75 Gpa, and the temperature is 1725 DEG C; the diamond sheet in the S104 includes circular sheet, square sheet and special-shaped sheet, and is used for high heat dissipation demand of an automobile.

[0080] Embodiment three:

[0081] The synthesis condition in the S103 includes that the pressure is 6.0 Gpa, and the temperature is 2000 DEG C; the diamond sheet in the S104 includes circular sheet, square sheet and special-shaped sheet, and is used for high heat dissipation demand of an automobile.

[0082] The diamond provided by the application has the performance advantage that cannot be replaced by other materials in the use, by using the high heat dissipation performance of the diamond, the heat dissipation and efficiency of the automobile are greatly improved, and by using the heat sink technology, the diamond has the performance advantage that cannot be replaced by other materials in the place where the high efficiency heat dissipation is needed, especially in the place where the high heat dissipation is needed, such as the automobile.

[0083] Working principle: when the diamond sheet is clamped, the fourth motor 316 needs to be started, the second screw rod 315 is driven to rotate by the output shaft of the fourth motor 316, the lifting block 314 is driven to move up and down by the second screw rod 315, one end of the connecting rod 313 is driven to move by the lifting block 314, the other end of the connecting rod 313 is driven to slide horizontally in the vertical direction, the sliding block 312 is driven to slide horizontally by the connecting rod 313, the first clamping plate 343 and the second clamping plate 344 are driven to slide horizontally by the sliding block 312, until the diamond sheet is clamped and fixed; when polishing, the fifth motor 319 needs to be started, the U-shaped frame 317 is driven to rotate by the output shaft of the fifth motor 319, the first filter plate 31 is driven to rotate by the U-shaped frame 317, the first clamping plate 343 and the second clamping plate 344 are driven to rotate by the first filter plate 31, so that the diamond sheet is polished in a large range; during clamping, the pen-shaped air cylinder 341 needs to be started, the connecting block 342 is driven to move by the output end of the pen-shaped air cylinder 341, the second clamping plate 344 is driven to move by the connecting block 342, the second clamping plate 344 slides on the vertical rod 345, until the diamond sheet is fixed; the placing table 35 is used for supporting the diamond sheet, preventing the diamond sheet from being broken when the polishing force is large.

[0084] When polishing is needed, the second motor 23 is started to drive the rotating frame 231 to rotate through the output shaft of the second motor 23, and the first polishing wheel 232 and the second polishing wheel 233 are driven to rotate through the rotating frame 231, when the first polishing wheel 232 rotates to the lowermost position, rough polishing is performed, when the second polishing wheel 233 rotates to the lowermost position, fine polishing is performed, the effect of switching between rough polishing and fine polishing is achieved, when the drying box 234 rotates to the lowermost position, it is used for drying the polished diamond sheet, when polishing, the third motor 238 is started to drive the second gear 237 to rotate through the output shaft of the third motor 238, the first gear 236 is driven to rotate through the second gear 237, the rotating rod 235 is driven to rotate through the first gear 236, and the first polishing wheel 232 and the second polishing wheel 233 are driven to rotate through the rotating rod 235, so that the effect of polishing is achieved, according to the size of the diamond sheet, the positions of the first polishing wheel 232 and the second polishing wheel 233 are adjusted, the first motor 214 is started, the output shaft of the first motor 214 drives the first screw rod 211 to rotate, the moving block 213 is driven to move through the first screw rod 211, the electric push rod 22, the mounting seat 223, the first polishing wheel 232 and the second polishing wheel 233 are driven to move through the moving block 213, until they move to the appropriate position, so as to facilitate polishing of diamond sheets of different sizes.

[0085] When polishing, in order to prevent high polishing temperature from damaging the diamond sheet, spraying is needed, and spraying can also prevent polishing waste from splashing, the water pump 332 is started, the water pump 332 pumps water in the water tank 33 out, sprays the water on the diamond sheet through the water outlet pipe 331, then filters the water through the second filter plate, the water in the processing tank flows to the water tank 33 through the second drain pipe 336, the water in the collection tank is filtered through the filter screen 335, and finally flows to the water tank 33 through the funnel 333 and the first drain pipe 334, and is used for spraying the diamond sheet again, the first filter plate 31 has a larger aperture, polishing waste and water can flow down, and the waste is filtered when passing through the second filter plate 32, the fifth motor 319 is started to drive the scraper 318 to rotate, the fertilizer on the second filter plate 32 is scraped into the collection cavity 321 through the scraper 318, so as to prevent the waste from blocking the second filter plate 32 and affecting the water flow.

[0086] The basic principles, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited to the above embodiments, the above embodiments and descriptions in the specification are only to illustrate the principles of the present application, and various changes and improvements can be made without departing from the spirit and scope of the present application, and these changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A diamond substrate surface treatment device, comprising: a workbench (1); a fixed frame (2) fixed on the top of the workbench (1); a mounting seat (223) arranged below the fixed frame (2); a first filter plate (31) arranged at the top end of the workbench (1); a conversion mechanism arranged below the mounting seat (223); characterized in that: the conversion mechanism comprises a first grinding wheel (232), a second grinding wheel (233) and a drying box (234); a second motor (23) is fixed on the mounting seat (223), the output shaft of the second motor (23) penetrates the mounting seat (223), and a rotating frame (231) is fixed thereon, a rotating rod (235) is rotatably connected to the rotating frame (231), one end of the rotating rod (235) is fixed with the first grinding wheel (232), the other end of the rotating rod (235) is fixed with the second grinding wheel (233), a first gear (236) is fixed on the rotating rod (235), a third motor (238) is fixed on the inner wall of the rotating frame (231), the output shaft of the third motor (238) is fixed with a second gear (237), the second gear (237) is engaged with the first gear (236); the first grinding wheel (232) and the second grinding wheel (233) are arranged above the first filter plate (31); the side wall of the rotating frame (231) is fixed with the drying box (234), and the drying box (234) comprises an electric heating wire and a fan.

2. A diamond substrate surface treatment apparatus according to claim 1, wherein: the bottom of the fixed frame (2) is fixed with two fixed plates (21), a first lead screw (211) is rotatably connected between the two fixed plates (21) through a bearing, one of the fixed plates (21) is fixed with a first motor (214), the output shaft of the first motor (214) is fixed at one end of the first lead screw (211), a moving block (213) is threadedly connected to the first lead screw (211), two guide rods (212) are fixed between the two fixed plates (21), and the moving block (213) is slidably connected to the two guide rods (212).

3. A diamond substrate surface treatment apparatus according to claim 2, wherein: the bottom of the moving block (213) is fixed with an electric push rod (22), the output end of the electric push rod (22) is fixed at the top of the mounting seat (223); two side plates (221) are symmetrically fixed on the side wall of the electric push rod (22), and two slide columns (222) are fixed at the top of the mounting seat (223); the two side plates (221) are slidably connected to the slide columns (222), respectively.

4. A diamond substrate surface treatment apparatus according to claim 3, wherein: The workbench (1) is provided with a machining groove, and the first filter plate (31) is rotatably connected in the machining groove through a bearing; a fifth motor (319) is fixedly connected to the inner wall of the bottom of the machining groove, the output shaft of the fifth motor (319) is fixedly connected with a U-shaped frame (317), and the top of the U-shaped frame (317) is fixedly connected to the bottom of the first filter plate (31); a fourth motor (316) is fixedly connected to the inner wall of the bottom of the U-shaped frame (317), the output shaft of the fourth motor (316) is fixedly connected with a second lead screw (315), and the top of the second lead screw (315) is rotatably connected to the bottom of the first filter plate (31) through a bearing; a lifting block (314) is threadedly connected to the second lead screw (315), four sliding openings (311) are formed in the first filter plate (31), sliding blocks (312) are slidably connected in the sliding openings (311), the bottom of each sliding block (312) is rotatably connected with a connecting rod (313) through a pin shaft, one end of each connecting rod (313) is rotatably connected to the lifting block (314) through a pin shaft, and the four connecting rods (313) are circumferentially arranged outside the second lead screw (315).

5. A diamond substrate surface treatment apparatus according to claim 4, wherein: A second filter plate (32) is fixedly connected to the inner wall of the bottom end of the machining groove, a collecting cavity (321) is formed in one end of the workbench (1), a blocking plate (322) is mounted on one side of the collecting cavity (321), the output shaft of the fifth motor (319) is fixedly connected with a scraper (318), the scraper (318) is in close contact with the second filter plate (32), and the collecting cavity (321) cooperates with the machining groove.

6. A diamond substrate surface treatment apparatus according to claim 5, wherein: A bottom plate (11) is fixedly connected to the bottom of the workbench (1), a water tank (33) is arranged on the top of the bottom plate (11), a water pump (332) is fixedly connected to the top of the water tank (33), a water outlet pipe (331) is mounted on the water pump (332), and one end of the water outlet pipe (331) is fixedly connected in communication to the water tank (33); a protective frame (3) is fixedly connected to the top of the workbench (1), and the protective frame (3) is arranged outside the first filter plate (31); the other end of the water outlet pipe (331) is fixedly connected in communication to the protective frame (3); a second drain pipe (336) is fixedly connected in communication to the bottom of the machining groove, one end of the second drain pipe (336) is fixedly connected in communication to the water tank (33); a hopper (333) is fixedly connected to the bottom of the collecting cavity (321), a first drain pipe (334) is fixedly connected to one end of the hopper (333), one end of the first drain pipe (334) is fixedly connected in communication to the water tank (33), a filter screen (335) is fixedly connected in a hollow manner to the bottom of the collecting cavity (321), and the filter screen (335) cooperates with the hopper (333).

7. A diamond substrate surface treatment apparatus according to claim 6, wherein: The top of the slider (312) is fixed with a mounting rack (34), the top of the mounting rack (34) is fixed with a pen-shaped cylinder (341), the output end of the pen-shaped cylinder (341) is fixed with a connecting block (342), the bottom of the connecting block (342) is fixed with a second clamping plate (344), the top of the slider (312) is rotatably connected with a first clamping plate (343), the top of the first clamping plate (343) is fixed with a vertical rod (345), and the second clamping plate (344) slides on the first clamping plate (343); The top center of the first filter plate (31) is fixed with a placement table (35), and the top of the placement table (35) is flush with the first clamping plate (343).

8. A method of processing a surface of a diamond substrate, suitable for use in a device for processing a surface of a diamond substrate according to any one of claims 1 to 7, characterised in that: It comprises the following steps: S1: using a high-temperature and high-pressure six-deformation diamond anvil press, manufacturing a single crystal diamond sheet; S2: the diamond sheet is placed in an ultrasonic cleaning instrument containing an organic solvent, and ultrasonic cleaning is performed for 30 minutes to remove oil stains and dust on the surface; S3: first, a first grinding wheel (232) with large particle size is used for preliminary grinding to remove large scratches and protrusions on the surface, and then a second grinding wheel (233) with large particle size is used for fine grinding to make the surface smoother and more uniform; S4: according to the requirements, the diamond sheet is cut into a set shape; S5: after surface treatment, the surface quality of the diamond sheet needs to be detected, and standard diamond heat sink materials are produced.

9. A method of treating a diamond substrate surface as claimed in claim 8, wherein: The method for manufacturing a single crystal diamond sheet in S1 comprises the following steps: S101: preparing raw materials: selecting high-purity graphite as the main raw material and adding alloy catalyst powder; S102: assembling a synthesis block: mixing graphite powder, alloy catalyst powder and additives in a certain proportion, and making a graphite core column through processes such as granulation, static pressure, vacuum reduction, inspection and weighing; then the graphite core column and the sealed pressure transmission medium are assembled together to form a synthesis block; S103: synthesis: set the synthesis conditions, start the six-surface press, heat and pressurize and keep constant for a long time, so that the graphite gradually transforms into diamond under high temperature and high pressure; S104: processing and machining: after the crystal growth is completed, stop heating and decompression, remove the sealed pressure transmission medium to obtain a synthesis column, then perform purification treatment and sorting detection to obtain a diamond single crystal; then cut, grind and polish the diamond single crystal into a diamond sheet.

10. A method of treating a diamond substrate surface as claimed in claim 9, wherein: The synthesis conditions in S103 include a pressure of 5.5-6.0 Gpa and a temperature of 1450-2000℃; the diamond sheet in S104 includes a circular sheet, a square sheet and a special-shaped sheet, which is used for high heat dissipation demand of automobiles.

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