Pressurizing system

Abstract

The invention provides a pressurization system which can shorten the interval time of pressurization processing and can execute related processing of the pressurization processing. A pressurization system (1) of the present invention performs a pressurization process and a related process on a workpiece (W). The pressurization system is provided with: a pressurization region (A8) in which pressurization processing is performed; two correlation regions (A4, A7) that are disposed so as to sandwich the pressurizing region and that execute correlation processing; two chamber units (20) that accommodate the workpiece and that are reciprocatingly transported between the upper space of the related region and the upper space of the pressurizing region; and a chamber conveyance device (96) that reciprocates and conveys the two chamber units at the same time. The chamber transport device reciprocates and transports chamber units in such a manner that when one chamber unit is located in a pressurized region, the other chamber unit is located in one related region, and when the other chamber unit is located in the pressurized region, the one chamber unit is located in the other related region.

Description

Technical Field

[0001] The present invention relates to a pressurizing system. Background Art

[0002] In the past, a pressurizing device was used to pressurize a pressurized object (for example, electronic parts, etc.). For example, the pressurizing device disclosed in Patent Document 1 includes an upper pressurizing unit and a lower pressurizing unit, and the pressurized object is clamped and pressurized by the upper pressurizing unit and the lower pressurizing unit, and the pressurized object is heated by a thermal energy unit of the lower pressurizing unit. In this pressurizing device, after the pressurization and heating of the pressurized object are completed, the pressurized state is maintained, the workpiece is cooled, and the pressurized object is taken out after cooling. In this pressurizing device, the pressurized object is heated and cooled by one thermal energy unit. Therefore, it takes time to switch between heating and cooling of the thermal energy unit, which prolongs the processing time of each pressurization process.

[0003] In the pressurizing device disclosed in Patent Document 2, the lower pressurizing unit is provided with a preheated heating unit and a precooled cooling unit. The heating unit and the cooling unit are configured to be movable relative to the upper pressurizing unit holding the pressurized object, and can be appropriately switched according to the progress of the pressurizing process. Therefore, the switching time of heating and cooling of the lower pressurizing unit can be shortened, and the processing time can also be shortened.

[0004] Prior art literature

[0005] Patent Literature:

[0006] Patent document 1: Japanese Patent Publication No. 2007-896.

[0007] Patent document 2: Japanese Patent Application Publication No. 2017-199812. Summary of the invention

[0008] Problem that the invention aims to solve

[0009] However, in the pressurizing devices disclosed in Patent Documents 1 and 2, the pressurized object is clamped by the upper pressurizing unit and the lower pressurizing unit during the execution of each treatment (heating, pressurizing, cooling) on ​​the pressurized object. Therefore, from the start to the end of each treatment, the pressurizing device becomes a dedicated device that only handles the pressurized object being treated. As a result, during the pressurizing treatment, the pressurized object for the next pressurizing treatment cannot be placed in the pressurizing device. That is, it takes a long time between the pressurizing treatment and the next pressurizing treatment.

[0010] Here, by performing a preheating treatment on the pressurized object as a pretreatment of the pressurized treatment, it is expected to shorten the treatment time. In addition, by separating the cooling treatment from the pressurized treatment as a post-treatment of the pressurized treatment and performing a cooling treatment on the pressurized object, it is also expected to shorten the treatment time. In this way, by being able to use a pressurizing device to perform a treatment related to the pressurized treatment (hereinafter referred to as "related treatment"), not only the treatment time of the pressurizing device can be shortened, but also the time between pressurized treatments can be shortened. However, it is not easy to perform the related treatment in the pressurizing device. In addition, even if the related treatment can be performed, since the pressurized object is sealed only during the pressurized treatment in the pressurizing device, the pressurized object in the related treatment may be exposed to the atmosphere and the pressurized object may be oxidized. Therefore, a chamber for the related treatment and a large amount of inert gas (for example, nitrogen) filling the chamber are required.

[0011] An object of the present invention is to provide a pressurizing system capable of shortening the interval time of pressurizing treatment and performing related treatments of pressurizing treatment.

[0012] Solutions for solving problems

[0013] One embodiment of the present invention is a pressurizing system, which performs pressurizing treatment on a workpiece and related treatments related to the pressurizing treatment on the workpiece, wherein the pressurizing system comprises: a pressurizing area, in which the pressurizing treatment is performed; two related areas, which are arranged at positions adjacent to the pressurizing area in a manner of sandwiching the pressurizing area, and perform the related treatments; two chamber units, which accommodate the workpiece and are reciprocated between the upper space of the related areas and the upper space of the pressurizing area; and a chamber transport device, which reciprocates the two chamber units at the same time, and the chamber transport device reciprocates the chamber units in the following manner, namely: when one chamber unit is located in the pressurizing area, the other chamber unit is located in one of the related areas, and when the other chamber unit is located in the pressurizing area, one chamber unit is located in the other related area.

[0014] Effects of the Invention

[0015] According to the present invention, it is possible to provide a pressurizing system capable of shortening the time interval between pressurizing treatments and performing processes related to the pressurizing treatments. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic perspective view showing an embodiment of the pressurizing system of the present invention.

[0017] Figure 2 yes Figure 1 Functional block diagram of the pressurization system.

[0018] Figure 3 yes Figure 1 Schematic top view of the pressurization system.

[0019] Figure 4 yes Figure 3 Schematic cross-sectional view of the pressurization system along line AA.

[0020] Figure 5 yes Figure 3 A schematic cross-sectional view of the pressurization system along line BB.

[0021] Figure 6 yes Figure 3 Schematic cross-sectional view of the pressurization system along line CC.

[0022] Figure 7 yes Figure 3 Schematic cross-sectional view of the pressurization system along line DD.

[0023] Figure 8 yes Figure 1 A schematic cross-sectional view of a chamber unit provided with a pressurizing system.

[0024] Fig. 9 Yes Description Figure 1 A schematic cross-sectional view of the action of the pressurization system.

[0025] Fig.10 Yes Description Figure 1 The pressurized system Fig. 9 A schematic cross-sectional view of the next action.

[0026] Fig.11 yes Fig.10 Schematic top view of the 4th area of ​​the pressurization system.

[0027] Fig.12 Yes Description Figure 1 The pressurized system Fig.10 A schematic cross-sectional view of the next action.

[0028] Fig.13 Yes Description Figure 1 The pressurized system Fig.12 A schematic cross-sectional view of the next action.

[0029] Fig.14 Yes Description Figure 1 The pressurized system Fig.13 A schematic cross-sectional view of the next action.

[0030] Fig.15 Yes Description Figure 1 The pressurized system Fig.14 A schematic cross-sectional view of the next action.

[0031] Fig.16 Yes Description Figure 1The pressurized system Fig.15 A schematic cross-sectional view of the next action.

[0032] Fig.17 Yes Description Figure 1 The pressurized system Fig.16 A schematic cross-sectional view of the next action.

[0033] Fig.18 Yes Description Figure 1 The pressurized system Fig.17 A schematic cross-sectional view of the next action.

[0034] Fig.19 Yes Description Figure 1 A schematic top view of the operation of a workpiece transport device provided with a pressurizing system.

[0035] Fig. 20 It is a schematic cross-sectional view of a chamber unit included in a pressurizing system according to a modified example.

[0036] Description of Reference Numerals

[0037] 1: Pressurization system

[0038] 20: Chamber unit

[0039] 20R: Containment Chamber

[0040] 21: Loading table

[0041] 26: Pressure pad (ceiling parts)

[0042] 27: Side parts (surrounding wall parts)

[0043] 41: Cooling unit

[0044] 42: Lifting device

[0045] 51: Preheating unit

[0046] 52: Thermal energy unit transport device

[0047] 61: Cooling unit

[0048] 62: Lifting device

[0049] 71: Preheating unit

[0050] 72: Thermal energy unit transport device

[0051] 8: Pressurization device

[0052] 8U: Upper pressurization unit

[0053] 8D: Lower pressure unit

[0054] 90: Workpiece handling device

[0055] 91: Workpiece loading device

[0056] 92: Workpiece removal device

[0057] 94: The first transport device

[0058] 95: Second transport device

[0059] 96: Chamber handling device

[0060] 20X: Chamber unit

[0061] 32: Fixed parts

[0062] A1: Area 1 (workpiece loading area)

[0063] A2: Area 2 (1st workpiece transport area)

[0064] A3: Area 3 (Standby Area)

[0065] A4: Area 4 (Related Area)

[0066] A5: Area 5 (2nd workpiece transport area)

[0067] A6: Area 6 (Standby Area)

[0068] A7: Area 7 (Related Area)

[0069] A8: Area 8 (pressurized area)

[0070] A9: Area 9 (workpiece removal area) DETAILED DESCRIPTION

[0071] The following is a description of an implementation of the pressurization system of the present invention (hereinafter referred to as "the present system"). In the following description, appropriate reference is made to the drawings. In the drawings, the same parts and elements are marked with the same figure marks, and repeated descriptions are omitted. In addition, for the convenience of explanation, the size ratios of the elements may be exaggerated, and are not limited to the ratios shown in the drawings.

[0072] In the following description and drawings, unless otherwise emphasized, when the three axes that are orthogonal to each other in space are the X-axis, Y-axis, and Z-axis, the "X-axis direction" refers to the direction along the X-axis, for example, the left-right direction. The "Y-axis direction" refers to the direction along the Y-axis, for example, the front-back direction. The "Z-axis direction" refers to the direction along the Z-axis, which is the up-down direction. In addition, the "+X-axis direction" refers to the left, the "-X-axis direction" refers to the right, the "+Y-axis direction" refers to the front, the "-Y-axis direction" refers to the back, the "+Z-axis direction" refers to the top, and the "-Z-axis direction" refers to the bottom. In the following description, the determination of directions other than the up-down direction mainly adopts the X-axis direction (+X-axis direction, -X-axis direction) and the Y-axis direction (+Y-axis direction, -Y-axis direction).

[0073] In the present invention, the function of performing a process related to the pressurization treatment (hereinafter referred to as "related process") is added to the pressurization device, thereby forming the present system that performs multiple processes including the pressurization treatment. In addition, two chamber units for accommodating the workpiece are formed by a part of the upper pressurization unit and a part of the lower pressurization unit that pressurize the workpiece during the pressurization treatment. The two chamber units are alternately reciprocated between the pressurization area and the related area configured in the present system, and the processes corresponding to each area are performed on the workpiece. As a result, the present invention can perform related processes on the workpiece by reciprocating the chamber units. In addition, the present invention can shorten the time between the pressurization treatment and the next pressurization treatment (pressurization treatment interval). Moreover, the present invention can perform multiple types of related processes on the workpiece by performing multiple types of related processes in one related area. For the description of each term and the specific structure of each component, please refer to the following content.

[0074] “Pressure treatment” is a treatment in which pressure is applied to a workpiece from the top and bottom to perform a predetermined process (for example, compression, pressure bonding, sintering, etc.) on the workpiece. The pressure treatment includes a treatment in which only pressure is applied and a treatment in which pressure and heating are applied.

[0075] The "workpiece" is an object to be pressurized in this system (ie, a pressurized object), for example, a sheet-like substrate (ceramic green sheet, etc.), an electronic component, a substrate on which a circuit is mounted, etc.

[0076] "Related processing" refers to processing related to pressurization processing in this system, including necessary pre-processing of the workpiece before performing pressurization processing (for example, receiving the workpiece, pre-heating the workpiece, etc.), and necessary post-processing of the workpiece after performing pressurization processing (for example, cooling the workpiece, taking out the workpiece, etc.). In this embodiment, the related processing includes receiving processing and pre-heating processing as pre-processing, and cooling processing and taking out processing as post-processing. For details of each processing, see the following content.

[0077] Pressurized system

[0078] Structure of the pressurized system

[0079] Figure 1 It is a schematic perspective view showing an embodiment of the present system 1 .

[0080] Figure 2 This is a functional block diagram of this system 1.

[0081] Figure 1 In FIG. 1 , the boundaries of the regions described later are indicated by bold single-dot chain lines.

[0082] The system 1 performs pressurization and related processing on the workpiece W. The system 1 includes a housing 2, a control device 3, a first cooling device 4, a first preheating device 5, a second cooling device 6, a second preheating device 7, a pressurizing device 8, a conveying device 9, an atmosphere adjusting device 10, and two chamber units 20. In the following description, when distinguishing between the chamber units 20, one chamber unit 20 and its components are marked with a reference numeral "A", and the other chamber unit 20 and its components are marked with a reference numeral "B".

[0083] In the present system 1, the pressurization process and the related process are performed alternately on the two workpieces W. In the following description, when distinguishing between the workpieces W, one workpiece W is referred to as the "first workpiece W1" and the other workpiece W is referred to as the "second workpiece W2 (refer to Figure 4 . The same below)”.

[0084] The housing 2 accommodates a control device 3 , a first cooling device 4 , a first preheating device 5 , a second cooling device 6 , a second preheating device 7 , a pressurizing device 8 , a conveying device 9 , an atmosphere adjusting device 10 , and two chamber units 20 .

[0085] Figure 3 It is a schematic top view of the system 1.

[0086] In this figure, for the sake of convenience, a part of the structure of the present system 1 is omitted. In addition, in this figure, the base component B1 described later is shown in a semi-transparent state, and the first cooling device 4 is shown by a double-dashed line. Figure 1-2 .

[0087] When viewed from above, the shape of the shell 2 is a rectangle along the X-axis direction and the Y-axis direction (hereinafter referred to as the "XY-axis direction"), and is a hollow cuboid. The shell 2 is arranged on a horizontal floor surface. In the following description, the "horizontal direction" refers to a direction parallel to the floor surface, which is a direction parallel to the XY-axis direction. In addition, the horizontal direction includes not only a completely horizontal direction, but also a slight tilt of the floor surface, and errors (slight tilts) caused by manufacturing tolerances and assembly tolerances of the various components constituting the present system 1.

[0088] When viewed from above, the space inside the housing 2 is divided into a first area A1, a second area A2, a third area A3, a fourth area A4, a fifth area A5, a sixth area A6, a seventh area A7, an eighth area A8, and a ninth area A9. In other words, the system 1 has first area A1 to ninth area A9. In this specification, when the first area A1 to ninth area A9 are not specifically distinguished, these areas are simply referred to as "areas".

[0089] Among the areas, the second area A2 to the fourth area A4 and the eighth area A8 constitute a first system for processing the first workpiece W1, and the fifth area A5 to the eighth area A8 constitute a second system for processing the second workpiece W2.

[0090] The "first area A1" is an area where the workpieces W before various processes are arranged (are waiting). A conveyor a11 is arranged in the first area A1. The first area A1 is an example of a workpiece carrying-in area in the present invention.

[0091] The "second area A2" is an area where the first workpiece W1 before each process is transferred to the fourth area A4 is arranged, and is an area where the first workpiece W1 after each process is transferred from the fourth area A4 is arranged. The second area A2 is an example of the first workpiece transfer area in the present invention.

[0092] The "third area A3" is an area where the first preheating device 5 stands by (is located in) during the pressurization process, cooling process, and removal process of the first workpiece W1. The third area A3 is an example of a standby area in the present invention.

[0093] The "fourth area A4" is an area where the relevant processes (accommodation process, preheating process, cooling process, and removal process) for the first workpiece W1 are performed. The fourth area A4 is an example of a relevant area in the present invention.

[0094] The fifth area A5 is an area where the second workpiece W2 before each process is placed, and is an area where the second workpiece W2 after each process transferred from the seventh area A7 is placed. The fifth area A5 is an example of the second workpiece transfer area in the present invention.

[0095] The "sixth area A6" is an area where the second preheating device 7 stands by (is located in) during the pressurization process, cooling process, and removal process of the second workpiece W2. The sixth area A6 is an example of a standby area in the present invention.

[0096] The "seventh area A7" is an area for performing relevant processes (accommodation process, preheating process, cooling process, and removal process) on the second workpiece W2. The seventh area A7 is an example of another relevant area in the present invention.

[0097] The "eighth area A8" is an area where a pressurization process is performed on the workpiece W. The eighth area A8 is an example of a pressurization area in the present invention.

[0098] The "ninth area A9" is, for example, an area where the workpieces W after various processes are placed. A conveyor a91 is placed in the ninth area A9. The ninth area A9 is an example of a workpiece carrying-out area in the present invention.

[0099] When viewed from above, the second region A2 to the eighth region A8 are arranged between the first region A1 and the ninth region A9. The second region A2 is arranged adjacent to the +X axis direction of the first region A1. The third region A3 is arranged adjacent to the +Y axis direction of the second region A2. The fourth region A4 is arranged adjacent to the +Y axis direction of the third region A3. The fifth region A5 is arranged in the +X axis direction of the second region A2 and adjacent to the -X axis direction of the ninth region A9. The sixth region A6 is arranged adjacent to the +Y axis direction of the fifth region A5. The seventh region A7 is arranged adjacent to the +Y axis direction of the sixth region A6. The eighth region A8 is arranged adjacent to the +X axis direction of the fourth region A4 and adjacent to the -X axis direction of the seventh region A7. That is, in the X axis direction, the eighth region A8 is arranged to be sandwiched between the fourth region A4 and the seventh region A7.

[0100] The control device 3 controls the overall operation of the present system 1. The control device 3 includes, for example, a processor such as a CPU (Central Processing Unit) 3a, a volatile memory such as a RAM (Random Access Memory) 3b that functions as a work area of ​​the CPU 3a, and a non-volatile memory such as a ROM (Read Only Memory) 3c that stores various information such as a control program.

[0101] Figure 4 yes Figure 3 A schematic cross-sectional view of the system 1 along line AA.

[0102] Figure 5 yes Figure 3 A schematic cross-sectional view of the system 1 along line BB.

[0103] In the following description, refer to Figure 2 .

[0104] The first cooling device 4 cools the first workpiece W1 after the pressurization process and housed in the chamber unit 20A. The first cooling device 4 includes a stage 40, a cooling unit 41, and a lifting device 42. The first cooling device 4 is disposed in the fourth area A4.

[0105] The workbench 40 is a table on which the cooling unit 41 is placed. The shape of the workbench 40 is, for example, an octagonal shape having four sides along the XY axis direction when viewed from above (see Fig.11 ), is plate-shaped.

[0106] The cooling unit 41 is arranged above the workbench 40 and is mounted on the workbench 40. The cooling unit 41 includes a main body 41a, a heat insulating member 41b, and a plurality of refrigerant flow paths C1. The main body 41a protects the refrigerant flow paths C1. The main body 41a is made of, for example, a metal having high thermal conductivity (for example, a copper alloy). When viewed from above, the shape of the main body 41a is, for example, the same shape as the workbench 40 (see FIG. 1 ). Fig.11 ). The heat insulating component 41b covers the periphery of the main body 41a (the entire circumference in the horizontal direction and the downward direction. The same below) to suppress condensation on the main body 41a. The refrigerant flow channel C1 is a flow channel for the refrigerant (not shown. The same below) to flow. The refrigerant is cooled by the cooling device and circulates between the refrigerant flow channel C1 and the cooling device (not shown. The same below). The upper surface 41c of the cooling unit 41 is a plane parallel to the horizontal direction.

[0107] The lifting device 42 lifts and lowers the work table 40 and the cooling unit 41. The lifting device 42 is, for example, a known cylinder.

[0108] The first preheating device 5 heats the first workpiece W1 accommodated in the chamber unit 20A to a preheating temperature described below. The first preheating device 5 includes a stage 50 , a preheating unit 51 , and a thermal unit transport device 52 .

[0109] The workbench 50 is a table on which the preheating unit 51 is placed. The workbench 50 includes a main body 50a and a mounting portion 50b. The main body 50a is, for example, plate-shaped. When viewed from above, the main body 50a is similar in shape to the workbench 40 and the cooling unit 41, and the main body 50a is slightly larger than the workbench 40 and the cooling unit 41 (see FIG. 1 ). Fig.11 ). The end portion of the main body portion 50a on the -Y axis direction side extends in a rectangular plate shape on the -Y axis direction side to form the mounting portion 50b.

[0110] The preheating unit 51 is disposed above the main body 50a and is mounted on the main body 50a. The preheating unit 51 includes a main body 51a, a heat insulating member 51b, and a plurality of heaters H1. The main body 51a protects the heaters H1. The main body 51a is made of, for example, a metal having high thermal conductivity (for example, a copper alloy). The shape of the main body 51a is, for example, a rectangular shape along the XY axis direction when viewed from above (see Fig.11 ), and is in the shape of a rectangular parallelepiped. When viewed from above, the main body 51a is smaller than the main body 50a. The heat insulating member 51b covers the periphery of the main body 51a to suppress the heat of the heater H1 from leaking to the surroundings. The heater H1 is arranged inside the main body 51a. The upper surface 51c of the preheating unit 51 is a plane parallel to the horizontal direction.

[0111] The thermal energy unit transport device 52 transports the workbench 50 and the preheating unit 51 back and forth between the third area A3 and the fourth area A4. The thermal energy unit transport device 52 includes, for example, a motor (not shown, the same below), a power transmission mechanism 52a, a connecting member 52b, a lifting member 52c, a plurality of rollers 52d, and a pair of rail members R1 and R2.

[0112] The power transmission mechanism 52a is, for example, a known ball screw that converts the rotational motion of the motor into a linear motion. The power transmission mechanism 52a is arranged in the third area A3 and the fourth area A4 (the part on the side of the third area A3) in a manner along the Y-axis direction. The connecting member 52b is mounted on the power transmission mechanism 52a and can reciprocate in the Y-axis direction. The upper end of the lifting member 52c is mounted on the mounting portion 50b. The lifting member 52c is supported on the connecting member 52b in a manner that can be lifted and lowered together with the workbench 50 in the up and down directions relative to the connecting member 52b. The roller 52d is placed on the track members R1 and R2, and assists in the transportation of the workbench 50 and the preheating unit 51 by rotating. The roller 52d is evenly mounted on both side surfaces of the X-axis direction side of the main body 50a. The track members R1 and R2 support the workbench 50 and the preheating unit 51 via the roller 52d in a manner that the workbench 50 and the preheating unit 51 can move horizontally in the Y-axis direction. The rail members R1 and R2 are arranged in the third area A3 and the fourth area A4 along the Y-axis direction. The rail members R1 and R2 are supported by the housing 2 .

[0113] By placing the roller 52d on the rail members R1 and R2, the workbench 50 and the preheating unit 51 are supported on the rail members R1 and R2 so as to be reciprocatingly movable in the Y-axis direction. The workbench 50 and the preheating unit 51 are reciprocatingly transported between the third area A3 and the fourth area A4 by the reciprocating movement of the connecting member 52b in the Y-axis direction. As described later, the workbench 50 and the preheating unit 51 are arranged in the third area A3 during the pressurization process, cooling process, and removal process of the first workpiece W1, and are arranged in the fourth area A4 during the storage process and preheating process of the first workpiece W1.

[0114] Figure 6 yes Figure 3 A schematic cross-sectional view of the system 1 along line CC.

[0115] In the following description, reference is also made as appropriate. Figure 3 and Figure 4 .

[0116] The second cooling device 6 cools the second workpiece W2 after the pressurization process accommodated in the chamber unit 20B. The structure of the second cooling device 6 is the same as that of the first cooling device 4, so its detailed description is omitted. The second cooling device 6 includes a workbench 60, a cooling unit 61, and a lifting device 62. The second cooling device 6 is arranged in the seventh area A7.

[0117] The structures of the workbench 60 and the lifting device 62 are the same as the structures of the workbench 40 and the lifting device 42 .

[0118] The cooling unit 61 includes a main body 61a, a heat insulating member 61b, an upper surface 61c, and a plurality of refrigerant flow paths C2. The main body 61a, the heat insulating member 61b, the upper surface 61c, and the plurality of refrigerant flow paths C2 have the same structures as the main body 41a, the heat insulating member 41b, the upper surface 41c, and the plurality of refrigerant flow paths C1.

[0119] The second preheating device 7 heats the second workpiece W2 accommodated in the chamber unit 20B to a preheating temperature described later. The structure of the second preheating device 7 is the same as that of the first preheating device 5, so its detailed description is omitted. The second preheating device 7 includes a workbench 70, a preheating unit 71, and a thermal unit transport device 72.

[0120] The table 70 includes a main body 70a and an attachment 70b. The structures of the main body 70a and the attachment 70b are the same as the structures of the main body 50a and the attachment 50b.

[0121] The preheating unit 71 includes a body 71a, an insulating member 71b, an upper surface 71c, and a plurality of heaters H2. The structures of the body 71a, the insulating member 71b, the upper surface 71c, and the heaters H2 are the same as the structures of the body 51a, the insulating member 51b, the upper surface 51c, and the heaters H1.

[0122] The heat energy unit transport device 72 includes, for example, a motor (not shown in the figure, the same below), a power transmission mechanism 72a, a connecting member 72b, a lifting member 72c, a plurality of rollers 72d, and a pair of track members R3 and R4. The power transmission mechanism 72a is arranged in the 6th area A6 and the 7th area A7 (the part on the 6th area A6 side) in a manner along the Y-axis direction. The track members R3 and R4 are arranged in the 6th area A6 and the 7th area A7 in a manner along the Y-axis direction. The track members R3 and R4 are supported by the housing 2.

[0123] By placing the rollers 72d on the rail members R3 and R4, the worktable 70 and the preheating unit 71 are supported on the rail members R3 and R4 so as to be reciprocatingly movable in the Y-axis direction. The worktable 70 and the preheating unit 71 are reciprocatingly transported between the sixth area A6 and the seventh area A7 by the reciprocating movement of the connecting member 72b in the Y-axis direction. As described later, the worktable 70 and the preheating unit 71 are arranged in the sixth area A6 during the pressurization process, cooling process, and removal process of the second workpiece W2, and are arranged in the seventh area A7 during the storage process and preheating process of the second workpiece W2.

[0124] In the following description, refer to Figure 1 to Figure 4 .

[0125] The pressurizing device 8 pressurizes the workpiece W accommodated in the chamber unit 20. The pressurizing device 8 includes a lower base member 80, a thermal energy unit 81, and a lifting device 82. The pressurizing device 8 is disposed in the eighth area A8.

[0126] The lower base member 80 supports the thermal energy unit 81. The lower base member 80 is made of, for example, a metal having high rigidity (for example, stainless steel). The shape of the lower base member 80 is, for example, a rectangular parallelepiped along the XY axis direction when viewed from above.

[0127] The thermal energy unit 81 is arranged above the lower base member 80 and mounted on the lower base member 80. The thermal energy unit 81 includes a main body 81a, a heat insulating member 81b, a plurality of heaters H3, and a plurality of refrigerant flow channels C3. The main body 81a protects the heater H3 and the refrigerant flow channels C3. The main body 81a is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the main body 81a is a rectangular parallelepiped along the XY axis direction when viewed from above. The heat insulating member 81b is arranged to cover the periphery of the main body 81a and divide the main body 81a into two upper and lower parts. The heat insulating member 81b suppresses the heat leakage of the heater H3 to the surroundings and the condensation of the main body 81a. The heater H3 heats the workpiece W when the workpiece W is pressurized. The heater H3 is arranged in the upper half of the main body 81a. The refrigerant flow channel C3 is a flow channel for the flow of refrigerant for cooling the lower half of the main body 81a. The refrigerant is cooled by the cooling device and circulates between the refrigerant flow channel C3 and the cooling device. The refrigerant flow channel C3 is arranged in the lower half of the main body 81a. The upper surface 81c of the thermal energy unit 81 is a plane parallel to the horizontal direction. The thermal energy unit 81 is arranged above the lower base component 80 and is installed on the lower base component 80. The thermal energy unit 81 is an example of a pressing unit in the present invention.

[0128] The lifting device 82 lifts and lowers the lower foundation member 80 and the thermal energy unit 81. The lifting device 82 is, for example, a known hydraulic cylinder.

[0129] The transport device 9 transports the workpiece W and the chamber unit 20 . The transport device 9 includes a workpiece transport device 90 , a stage transport device 93 , and a chamber transport device 96 .

[0130] Figure 7 yes Figure 3 A schematic cross-sectional view of the system 1 along line DD.

[0131] In the following description, reference is also made as appropriate. Figure 1 to Figure 6 .

[0132] The workpiece conveying device 90 conveys the workpiece W located in the first area A1 into the second area A2 and the fifth area A5, and conveys the workpiece W conveyed to the second area A2 and the fifth area A5 after the pressurization treatment to the ninth area A9. The workpiece conveying device 90 includes a workpiece conveying device 91, a workpiece conveying device 92, a driving mechanism (not shown, the same below), and a pair of rail components R5 and R6.

[0133] The workpiece carrying device 91 carries the workpiece W waiting in the first area A1 into the second area A2 and the fifth area A5. The workpiece carrying device 91 includes a support member 91a, a lifting device 91b, and a holding member 91c. The support member 91a supports the lifting device 91b. The support member 91a is supported on the rail members R5 and R6 so as to be reciprocatingly movable in the X-axis direction. The lifting device 91b lifts and lowers the holding member 91c. The holding member 91c holds (for example, adsorbs) the workpiece W. The holding member 91c is mounted on the lower end of the lifting device 91b.

[0134] The workpiece unloading device 92 unloads the workpiece W after the pressurization treatment carried to the second area A2 and the fifth area A5 to the ninth area A9. The workpiece unloading device 92 includes a support member 92a, a lifting device 92b, and a holding member 92c. The structures of the support member 92a, the lifting device 92b, and the holding member 92c are the same as the structures of the support member 91a, the lifting device 91b, and the holding member 91c, and therefore, detailed description thereof is omitted.

[0135] The drive mechanism generates power for reciprocating the workpiece carrying-in device 91 and the workpiece carrying-out device 92 in the X-axis direction independently, and transmits the power to the workpiece carrying-in device 91 and the workpiece carrying-out device 92. The drive mechanism includes, for example, a known motor and a ball screw.

[0136] The rail components R5 and R6 are arranged in the upper space of the first area A1, the second area A2, the fifth area A5, and the ninth area A9 in a manner along the X-axis direction. The rail components R5 and R6 are supported by the housing 2. The workpiece loading device 91 and the workpiece unloading device 92 are supported by the rail components R5 and R6 in a manner that allows reciprocating movement in the X-axis direction. The workpiece loading device 91 is arranged at a position closer to the -X-axis direction side than the workpiece unloading device 92.

[0137] The stage transport device 93 reciprocates the first workpiece W1 between the second area A2 and the fourth area A4 , and reciprocates the second workpiece W2 between the fifth area A5 and the seventh area A7 . The stage transport device 93 includes a first stage transport device 94 and a second stage transport device 95 .

[0138] The first transport device 94 reciprocates the first workpiece W1 between the second area A2 and the fourth area A4. The first transport device 94 includes a transport table 94a, a drive mechanism (not shown, the same below), and a pair of rail members R7 and R8.

[0139] The conveying platform 94a conveys the first workpiece W1 together with the loading platform 21A described later. The conveying platform 94a is in the shape of a rectangular frame when viewed from above, and is in the shape of a plate. The conveying platform 94a has an octagonal central hole 94b having four sides along the XY axis direction when viewed from above. When viewed from above, the shape of the central hole 94b is similar to that of the main body 50a, and the central hole 94b is larger than the worktable 50 to which the roller 52d is mounted (see Fig.11 The end portion of the lower surface of the conveying platform 94a on the X-axis direction side is configured to engage with the rail members R7 and R8 in a slidable manner (for example, a concave-convex shape). The conveying platform 94a can slide in the Y-axis direction relative to the rail members R7 and R8.

[0140] It should be noted that in the present invention, the shape of the transfer table 94a is not limited to the present embodiment as long as it can transfer the first workpiece W1 and can perform the storage process, preheating process, cooling process, and removal process described later.

[0141] The drive mechanism generates power for reciprocating the conveying table 94a in the Y-axis direction, and transmits the power to the conveying table 94a. The drive mechanism includes, for example, a known motor and a ball screw.

[0142] The rail components R7 and R8 are arranged in the second area A2, the third area A3, and the fourth area A4 along the Y-axis direction. In the up-down direction, the rail components R7 and R8 are arranged at a position higher than the rail components R1 and R2. The rail components R7 and R8 are supported by the shell 2. The conveying table 94a is placed on the rail components R7 and R8 in a manner that allows reciprocating movement in the Y-axis direction. That is, the conveying table 94a is reciprocated between the second area A2 and the fourth area A4. When viewed from above, the conveying path of the conveying table 94a (the mounting table 21A, the first workpiece W1) overlaps with the conveying path of the preheating unit 51. That is, the conveying path of the preheating unit 51 is arranged below the conveying path of the conveying table 94a (the mounting table 21A, the first workpiece W1).

[0143] The second transport device 95 reciprocates the second workpiece W2 between the fifth area A5 and the seventh area A7. The second transport device 95 includes a transport table 95a, a drive mechanism (not shown, the same below), and a pair of rail members R9 and R10.

[0144] The conveying platform 95a conveys the second workpiece W2 together with the loading platform 21B described later. The structure of the conveying platform 95a is the same as that of the conveying platform 94a, so its detailed description is omitted. The conveying platform 95a has a central hole 95b of the same shape as the central hole 94b. When viewed from above, the shape of the central hole 95b is similar to that of the main body 70a, and the central hole 95b is larger than the workbench 70 on which the roller 72d is installed.

[0145] The drive mechanism generates power for reciprocating the conveying table 95a in the Y-axis direction, and transmits the power to the conveying table 95a. The drive mechanism includes, for example, a known motor and a ball screw.

[0146] The rail components R9 and R10 are arranged in the 5th area A5, the 6th area A6, and the 7th area A7 in a manner along the Y-axis direction. In the up-down direction, the rail components R9 and R10 are arranged at a position higher than the rail components R3 and R4. The rail components R9 and R10 are supported by the shell 2. The conveying table 95a is placed on the rail components R9 and R10 in a manner that allows reciprocating movement in the Y-axis direction. That is, the conveying table 95a is reciprocated between the 5th area A5 and the 7th area A7. When viewed from above, the conveying path of the conveying table 95a (the mounting table 21B, the second workpiece W2) overlaps with the conveying path of the preheating unit 71. That is, the conveying path of the preheating unit 71 is arranged below the conveying path of the conveying table 95a (the mounting table 21B, the second workpiece W2).

[0147] In the following description, refer to Figure 3 to Figure 5 .

[0148] The chamber transport device 96 simultaneously reciprocates and transports two chamber units 20 between the fourth area A4 or the seventh area A7 and the eighth area A8. The chamber transport device 96 includes two connecting members 96a and 96b, a plurality of fixing members 96c, a driving mechanism (not shown, the same below), a base member 96d, and a pair of rail members R11 and R12.

[0149] The shape of the connecting parts 96a, 96b is, for example, a prism. The fixing part 96c is, for example, an L-shaped fixing part. The connecting parts 96a, 96b are fixed to the upper surfaces of the base parts 23 (chamber units 20) described later by a plurality of fixing parts 96c in such a manner that the two upper units 22 (chamber units 20) described later are arranged in the X-axis direction. The lower surfaces of the connecting parts 96a, 96b are configured to engage with the rail parts R11, R12 in a slidable manner (for example, a concave and convex shape). The connecting parts 96a, 96b can slide in the X-axis direction relative to the rail parts R11, R12. The connecting parts 96a, 96b are supported on the base part 96d, for example, via a frame (not shown).

[0150] The driving mechanism generates power for reciprocating the two chamber units 20 in the X-axis direction, and transmits the power to the two chamber units 20. The driving mechanism includes, for example, a motor that can generate power to simultaneously transport the heavy objects, i.e., the two chamber units 20, and a power transmission mechanism (e.g., gears, sprockets, chains, etc.) that can transmit the power of the motor.

[0151] The base component 96d supports the connecting components 96a and 96b. The shape of the base component 96d is, for example, a rectangular shape along the XY axis direction when viewed from above, and is a cuboid shape. The base component 96d is arranged above the thermal energy unit 81 in the 8th area A8, that is, in the upper space in the 8th area A8. The base component 96d is installed on the housing 2, for example. As described later, the base component 96d is subjected to a predetermined pressure during the pressurization process, so the base component 96d is designed to have a strength that can withstand the pressure. During the pressurization process, the base component 96d and a part of the upper unit 22 together constitute the upper pressurization unit 8U. The central part of the lower surface of the base component 96d protrudes downward into a cuboid shape, constituting a receiving portion 96e. The receiving portion 96e abuts against the chamber unit 20 during the pressurization process, and is subjected to a predetermined pressure via the chamber unit 20. The lower surface 96f of the receiving portion 96e is a plane parallel to the horizontal direction.

[0152] The atmosphere adjustment device 10 adjusts the atmosphere of the storage chamber 20R described later. The atmosphere adjustment device 10 includes a vacuum pump P, a decompression line Lp, a gas line Lg, two valves V1 and V2, and two connecting lines Lc1 and Lc2. The atmosphere adjustment device 10 is configured to adjust the atmosphere of the storage chamber 20R to a decompression atmosphere (vacuum atmosphere) or an inert gas atmosphere.

[0153] The vacuum pump P adjusts the atmosphere in the storage chamber 20R to a reduced pressure atmosphere (vacuum atmosphere). The vacuum pump P is a known vacuum pump. The vacuum pump P is connected to a through hole 27c described later via a reduced pressure line Lp and two valves V1 and V2.

[0154] The pressure reducing line Lp is a line connected to the vacuum pump P. The gas line Lg is a line connected to a supply line (not shown in the figure) of an inert gas (for example, nitrogen). The pressure reducing line Lp and the gas line Lg are branched into two branches, each of which is connected to the corresponding connecting lines Lc1 and Lc2 via corresponding valves V1 and V2. Valves V1 and V2 are known solenoid valves, which switch the connection between the pressure reducing line Lp and the gas line Lg and the connecting lines Lc1 and Lc2. The connecting line Lc1 is a line connected to the valve V1 and the corresponding through hole 27cA, and the connecting line Lc2 is a line connected to the valve V2 and the corresponding through hole 27cB.

[0155] Chamber unit structure

[0156] Figure 8 is a schematic cross-sectional view of the chamber unit 20 .

[0157] In the following description, refer to Figure 4 .

[0158] The chamber unit 20 accommodates the workpiece W and reciprocates between the fourth area A4 or the seventh area A7 and the eighth area A8. The chamber unit 20 includes a mounting table 21, an upper unit 22, and an accommodation chamber 20R.

[0159] The stage 21 transports the workpiece W and divides the storage chamber 20R. As described later, the stage 21 acts as a transport plate for the workpiece W, and acts as a lower pressurizing unit 8D when the workpiece W is pressurized. The stage 21 is made of, for example, a metal with high thermal conductivity (for example, a copper alloy). The shape of the stage 21 is a rectangular shape along the XY axis direction when viewed from above, and is a plate-like shape. The stage 21 has a strength that can withstand the force applied during the operation of the system 1 described later, and has a thickness that reduces the heat capacity of the stage 21 during heating / cooling of the workpiece W. The shapes of the upper surface 21a and the lower surface 21b of the stage 21 are planes parallel to the horizontal direction. The stage 21 is configured to be mountable on the upper unit 22 (side member 27) or detachable from the upper unit 22 (side member 27).

[0160] The upper unit 22 covers the workpiece W from above. The upper unit 22 includes a base member 23, an upper die 24, a frame member 25, a pressure pad 26, a side member 27, a first spring member 28, a second spring member 29, and two sealing members 30 and 31. As described later, the base member 23, the upper die 24, and the pressure pad 26 function as an upper pressurizing unit 8U when the workpiece W is pressurized.

[0161] The base member 23 supports the upper mold 24, the first spring member 28, and the second spring member 29. The base member 23 is made of, for example, a metal having high rigidity (for example, stainless steel). The base member 23 is rectangular along the XY axis direction when viewed from above, and is a rectangular parallelepiped flattened in the vertical direction. The lower surface 23a and the upper surface 23b of the base member 23 are flat surfaces parallel to the horizontal direction.

[0162] The upper die 24 presses the workpiece W from above via the pressure pad 26. The upper die 24 is made of, for example, a metal having high rigidity (for example, stainless steel). The upper die 24 is arranged below the base member 23 and is mounted on the lower surface 23a of the base member 23. The shape of the upper die 24 is a rectangular parallelepiped that is smaller than the base member 23 and is along the XY axis direction when viewed from below. The lower surface 24a of the upper die 24 is a plane parallel to the horizontal direction.

[0163] It should be noted that, in the present invention, the upper mold 24 can also be formed as one piece with the base component 23 .

[0164] The frame member 25 holds the pressure pad 26. The frame member 25 is made of, for example, a metal having high rigidity (for example, stainless steel). When viewed from below, the shape of the frame member 25 is a rectangular shape along the XY axis direction, and is frame-shaped. That is, when viewed from below, a rectangular internal space is formed in the center of the frame member 25. The frame member 25 is configured to surround the upper mold 24 in the horizontal direction. That is, the upper mold 24 is arranged in the internal space. In the up-down direction, the lower end portion 25a of the frame member 25 is located at a position lower than the lower surface 24a of the upper mold 24. The frame member 25 is supported on the base member 23 via the first spring member 28 so as to be relatively movable in the up-down direction relative to the upper mold 24. The frame member 25 has a groove portion 25c formed to surround the outer peripheral surface 25b of the frame member 25.

[0165] When the workpiece W is pressurized, the pressure pad 26 deforms following the shape of the surface of the workpiece W, uniformly pressurizes the workpiece W, and defines the accommodation chamber 20R. The pressure pad 26 is held by the lower end 25a of the frame member 25 and is disposed below the upper mold 24. The pressure pad 26 includes a soft layer 26a and a heat insulating layer 26b.

[0166] The soft layer 26a uniformly transmits the pressure from the upper mold 24 to the workpiece W when the workpiece W is pressurized. The soft layer 26a is made of, for example, a known elastic material having high fluidity and low rebound rate. The soft layer 26a is, for example, filled between two film members (not shown. Same below) arranged above and below the soft layer 26a. The outer edge of the film member is held by the lower end 25a of the frame member 25 throughout the entire circumference, so that the soft layer 26a is surrounded by the lower end 25a of the frame member 25 in the horizontal direction.

[0167] When the workpiece W is pressurized, the heat insulating layer 26b uniformly transfers the pressure from the upper mold 24 to the workpiece W, and inhibits the heat from the thermal energy unit 81 from being transferred to the soft layer 26a. The heat insulating layer 26b is made of, for example, a known fiber material with high flexibility and low thermal conductivity. The heat insulating layer 26b is arranged adjacent to the soft layer 26a below the soft layer 26a. The heat insulating layer 26b is filled between, for example, two film members (not shown. The same below) arranged above and below the heat insulating layer 26b. The outer edge of the film member is held by the lower end 25a of the frame member 25 throughout the entire circumference, and the heat insulating layer 26b is surrounded by the lower end 25a of the frame member 25 in the horizontal direction.

[0168] In addition, in the present invention, when the temperature of the main heating described later is lower than the heat resistance temperature of the soft layer 26a, the pressure pad 26 may not include the heat insulating layer 26b.

[0169] The side member 27 defines the storage chamber 20R. The side member 27 is made of, for example, a metal having high rigidity (for example, stainless steel). When viewed from below, the shape of the side member 27 is a rectangular shape along the XY axis direction, and is frame-shaped. That is, when viewed from below, a rectangular internal space is formed in the center of the side member 27. The side member 27 is configured to surround the frame member 25 in the horizontal direction. That is, the frame member 25 (upper mold 24, pressure pad 26) is arranged in the internal space. The side member 27 is supported on the base member 23 via the second spring member 29 in a manner that it can move relative to the upper mold 24 and the frame member 25 in the up and down directions. The side member 27 has a groove portion 27b formed on the lower surface 27a of the side member 27, and a through hole 27c opened on the inner surface and the outer surface of the side member 27.

[0170] The first spring member 28 supports the frame member 25 so that the frame member 25 can move vertically relative to the upper mold 24. The first spring member 28 is disposed between the base member 23 and the frame member 25 and is attached to the lower surface 23a of the base member 23 and the upper surface 25d of the frame member 25.

[0171] The second spring member 29 supports the side member 27 so that the side member 27 can move relative to the upper mold 24 and the frame member 25 in the vertical direction. The second spring member 29 is arranged between the base member 23 and the side member 27, and is attached to the lower surface 23a of the base member 23 and the upper surface 27d of the side member 27.

[0172] The sealing members 30 and 31 hermetically seal between the frame member 25 and the side member 27, and between the mounting table 21 and the side member 27. The sealing members 30 and 31 are, for example, known O-rings. The sealing member 30 is disposed in the groove 25c and abuts against the frame member 25 and the side member 27. The sealing member 31 is disposed in the groove 27b and abuts against the mounting table 21 and the side member 27.

[0173] The storage chamber 20R is a space formed in the chamber unit 20 for storing the workpiece W. The storage chamber 20R is a closed space divided by the mounting table 21, the frame member 25, the pressure pad 26, the side member 27, and the sealing members 30 and 31. The storage chamber 20R is connected to the connecting pipe Lc1 or the connecting pipe Lc2 via the through hole 27c. The mounting table 21 functions as a floor member that divides the storage chamber 20R, the pressure pad 26 functions as a ceiling member that divides the storage chamber 20R, and the side member 27 functions as a peripheral wall member that divides the storage chamber 20R. The pressure pad 26 is an example of a ceiling member in the present invention, and the side member 27 is an example of a peripheral wall member in the present invention.

[0174] Operation of the pressurized system

[0175] Next, the operation of the present system 1 is described as follows. In the following description, reference is made to Figures 1 to 8 .

[0176] Here, as a premise, the upper unit 22A constituting the chamber unit 20A is located in the fourth area A4, and the mounting table 21A constituting the chamber unit 20A is mounted on the transfer table 94a located in the second area A2. The upper unit 22B constituting the chamber unit 20B is located in the eighth area A8, and the mounting table 21B constituting the chamber unit 20B is mounted on the transfer table 95a located in the fifth area A5.

[0177] Fig. 9 It is a schematic cross-sectional view for explaining the operation of the present system 1 .

[0178] This figure shows that along Figure 3 The cross section of the DD line of the present system 1.

[0179] First, the control device 3 controls the operation of the workpiece carrying-in device 91, and carries the workpiece W waiting in the first area A1 as the first workpiece W1 onto the mounting table 21A located in the second area A2 (first workpiece carrying-in processing). Specifically, the workpiece carrying-in device 91 moves to the first area A1, and the lifting device 91b lowers the holding component 91c toward the workpiece W. Then, the holding component 91c holds the workpiece W, and the lifting device 91b raises the holding component 91c. Then, the workpiece carrying-in device 91 moves to the second area A2, and the lifting device 91b lowers the holding component 91c toward the mounting table 21A. Then, the holding component 91c releases the holding of the workpiece W. At this time, by placing the corner of the workpiece W on the mounting table 21A, the workpiece W (first workpiece W1) is placed on the mounting table 21A. Then, the lifting device 91b raises the holding component 91c.

[0180] Fig.10 It is a schematic cross-sectional view for explaining the next operation of the present system 1.

[0181] This figure shows that along Figure 3 The cross section of the present system 1 is shown on line BB.

[0182] Then, the control device 3 controls the operation of the first transport device 94 to transport the transport table 94a on which the mounting table 21A is mounted to the fourth area A4. That is, the first workpiece W1 is transported to the fourth area A4. In addition, the control device 3 controls the operation of the thermal energy unit transport device 52 to transport the workbench 50 and the preheating unit 51 to the fourth area A4. At this time, the workbench 50 and the preheating unit 51 are arranged above the cooling unit 41, and the mounting table 21A, the first workpiece W1, and the transport table 94a are arranged above the preheating unit 51. That is, the workbench 50 and the preheating unit 51 are transported between the cooling unit 41 and the mounting table 21A. In addition, the upper unit 22A is arranged above the mounting table 21A and the first workpiece W1.

[0183] Fig.11 yes Fig.10 Schematic top view of the 4th area A4.

[0184] In this figure, for convenience of explanation, the transfer table 94a is shown in color, the mounting table 21A is shown semi-transparently, the outer edges of the workbench 40 and the cooling unit 41 are shown with double-dashed lines, and the rail members R1 and R2 are shown with dotted lines.

[0185] like Fig.11 As shown in the figure, when viewed from above, the positions of the centers of the mounting table 21A, the work table 40, the cooling unit 41, the main body 50a, the preheating unit 51, and the conveying table 94a are arranged at substantially the same position. When viewed from above, the work table 40, the cooling unit 41, the main body 50a, the mounting portion 50b, the preheating unit 51, and the roller 52d are arranged in the central hole 94b. When viewed from above, the work table 40 and the cooling unit 41 are arranged between the rail members R1 and R2.

[0186] When viewed from above, the table 40, the cooling unit 41, the main body 50a, and the center hole 94b have similar shapes. The center hole 94b is larger than the main body 50a, the cooling unit 41, and the table 40. The main body 50a is larger than the cooling unit 41 and the table 40.

[0187] Fig.12 It is a schematic cross-sectional view for explaining the next operation of the present system 1.

[0188] This figure shows that along Figure 3 A cross section of the present system 1 along line AA.

[0189] Then, the control device 3 controls the operation of the lifting device 42 to raise the workbench 40, the cooling unit 41, the workbench 50, the preheating unit 51, the mounting table 21A, and the first workpiece W1. Specifically, the lifting device 42 raises the workbench 40 and the cooling unit 41 until the cooling unit 41 (upper surface 41c) abuts against the workbench 50 (lower surface 50c). At this time, the cooling unit 41 passes between the rail components R1 and R2. Then, the lifting device 42 raises the workbench 50 and the preheating unit 51 together with the workbench 40 and the cooling unit 41 until the preheating unit 51 (upper surface 51c) abuts against the mounting table 21A (lower surface 21bA). At this time, the roller 52d leaves the rail components R1 and R2, and the lifting component 52c (refer to Figure 5 ) As the workbench 50 rises, the workbench 40 passes between the rail components R1 and R2, and the preheating unit 51 passes through the central hole 94b. Then, the lifting device 42 causes the mounting table 21A to rise together with the workbench 40, the cooling unit 41, and the preheating unit 51 until the mounting table 21A and the upper unit 22A (sealing component 31A) are tightly fitted. At this time, a receiving chamber 20RA is formed between the mounting table 21A and the upper unit 22A, and the first workpiece W1 is received in the receiving chamber 20RA.

[0190] It should be noted that the workbench 50 is placed on the cooling unit 41 during the ascending process. Therefore, the position of the workbench 50 relative to the cooling unit 41 may change due to a slight tilt or vibration. Therefore, in the present invention, it is also possible to form mutually interlocking concave and convex parts on the upper surface 41c of the cooling unit 41 and the lower surface 50c of the workbench 50 (preferably, a concave part is formed on the upper surface 41c for the cooling process described later).

[0191] Fig.13 It is a schematic cross-sectional view for explaining the next operation of the present system 1.

[0192] This figure shows that along Figure 3 A cross section of the present system 1 along line AA.

[0193] Then, the atmosphere adjustment device 10 operates the vacuum pump P and the valve V1, and replaces the atmosphere in the receiving chamber 20RA with an inert gas, so that the atmosphere in the receiving chamber 20RA becomes a reduced pressure atmosphere. At this time, the mounting table 21A is closely attached (mounted) to the side member 27A by using the vacuum pressure (the pressure difference between the receiving chamber 20RA and the external space of the chamber unit 20A), the second spring member 29A contracts, and the mounting table 21A and the side member 27A rise. That is, in the up and down direction, the frame member 25A and the pressure pad 26A approach the mounting table 21A (the first workpiece W1). In other words, the frame member 25A and the pressure pad 26A are relatively lowered relative to the mounting table 21A. Then, the pressure pad 26A finally contacts the first workpiece W1, and the first workpiece W1 is pre-pressurized by the pressure corresponding to the vacuum pressure. In addition, the frame member 25A abuts against the mounting table 21A. By pre-pressurizing, the pressure pad 26A is deformed according to the shape of the surface of the first workpiece W1, and the first workpiece W1 is held by the stage 21A and the pressure pad 26A. Here, the pressure applied to the first workpiece W1 during the pre-pressurizing is much smaller than the pressure applied to the first workpiece W1 during the pressurizing process. As described above, in the fourth area A4, the chamber unit 20A is assembled by mounting the stage 21A on the upper unit 22A (side component 27A), and the first workpiece W1 is accommodated in the chamber unit 20A (accommodation process). When the chamber unit 20A is assembled, the stage 21A is arranged below the first workpiece W1, the pressure pad 26A is arranged above the first workpiece W1, and the side component 27A is arranged to surround the entire circumference of the first workpiece W1 in the horizontal direction. Then, the lifting device 42 raises the work table 40 , the cooling unit 41 , the work table 50 , and the preheating unit 51 so that the preheating unit 51 comes into contact with the mounting table 21A.

[0194] Then, the control device 3 controls the operation of the preheating unit 51 to perform preheating treatment on the first workpiece W1. Specifically, the lifting device 42 maintains the state in which the preheating unit 51 abuts against the mounting table 21A for a predetermined time. Here, the preheating unit 51 has been preheated to a predetermined preheating temperature. Therefore, the heat from the preheating unit 51 is transferred to the first workpiece W1 via the mounting table 21A.

[0195] The "preheating treatment" is a treatment for preheating the workpiece W to a predetermined preheating temperature before the pressurization treatment. The preheating treatment is a pretreatment performed before the pressurization treatment in order to shorten the heating time of the workpiece W during the pressurization treatment. The preheating temperature is a temperature (e.g., about 200°C) lower than the main heating temperature (e.g., about 300°C) described later.

[0196] Fig.14 It is a schematic cross-sectional view for explaining the next operation of the present system 1.

[0197] This figure shows that along Figure 3A cross section of the present system 1 along line AA.

[0198] Then, after a predetermined time has passed, the control device 3 controls the operation of the lifting device 42 to lower the workbench 40, the cooling unit 41, the workbench 50, and the preheating unit 51. At this time, the lifting member 52c (see Figure 5 ) As the workbench 50 descends, the rollers 52d come into contact with the rail members R1 and R2, and the workbench 50 is placed on the rail members R1 and R2 via the rollers 52d.

[0199] Then, the control device 3 controls the operation of the chamber transport device 96 to transport the chamber unit 20A from the fourth area A4 to the eighth area A8 and to transport the upper unit 22B from the eighth area A8 to the seventh area A7. As a result, the chamber unit 20A is located in the eighth area A8 and the upper unit 22B is located in the seventh area A7.

[0200] Then, the control device 3 controls the operation of the pressurizing device 8 to perform a pressurizing process on the first workpiece W1 .

[0201] Specifically, the lifting device 82 raises the lower base component 80 and the thermal energy unit 81 until the thermal energy unit 81 (upper surface 81c) abuts against the chamber unit 20A (lower surface 21bA of the mounting table 21A). Then, the lifting device 82 raises the lower base component 80 and the thermal energy unit 81 until a predetermined pressure (hereinafter referred to as "formal pressure") is applied to the first workpiece W1. At this time, the mounting table 21A rises together with the frame component 25A and the side component 27A, and the upper mold 24A descends relative to the frame component 25A and the side component 27A. Therefore, the upper mold 24A presses the pressure pad 26A downward, and the pressure pad 26A deforms in a manner that follows the shape of the surface of the first workpiece W1, and uniformly pressurizes the first workpiece W1. As a result, the first workpiece W1 is pressed from below by the mounting table 21A and from above by the pressure pad 26A (upper mold 24A).

[0202] When the first workpiece W1 is pressurized, the chamber unit 20A is slightly lifted from the rail members R11 and R12 by the lifting device 82 and abuts against the receiving portion 96e of the base member 96d. That is, the base member 96d restricts the upward movement of the chamber unit 20A, and the chamber unit 20A is clamped by the thermal energy unit 81 and the base member 96d. At this time, the base member 96d and the lower base member 80 function as a so-called "pad" that bears the formal pressure from the lifting device 82. As a result, the formal pressure is applied to the first workpiece W1, and the formal pressure applied to the first workpiece W1 remains stable. As described above, by having the two base members 23A and 96d bear the formal pressure in the pressurization process instead of the base member 23A alone, the thickness of the base member 23A can be designed to be thinner than when the base member 23A alone bears the formal pressure. Therefore, the weight of the chamber unit 20A (upper unit 22A) can be reduced, and the power required for transporting them can be controlled. Furthermore, since the actual pressing force is not applied to the rail members R11 and R12 , no load based on the actual pressing force is applied to the rail members R11 and R12 .

[0203] As described above, during the pressurization process, the base member 23A, the upper mold 24A, and the pressurization pad 26A in the chamber unit 20A, together with the base member 96d, function as an upper pressurization unit 8U for pressurizing the first workpiece W1 from above. In addition, the mounting table 21A in the chamber unit 20A, together with the lower base member 80 and the thermal energy unit 81, function as a lower pressurization unit 8D for pressurizing the first workpiece W1 from below.

[0204] Fig.15 It is a schematic cross-sectional view for explaining the next operation of the present system 1.

[0205] This figure shows that along Figure 3 A cross section of the present system 1 along line AA.

[0206] Then, the lifting device 82 maintains the state of applying formal pressure to the first workpiece W1 for a predetermined time. Here, the upper half of the thermal energy unit 81 is preheated to a predetermined heating temperature (hereinafter referred to as the "formal pressure temperature". For example, about 300°C). Therefore, the heat from the thermal energy unit 81 is transferred to the first workpiece W1 via the mounting table 21A. At this time, the heat from the thermal energy unit 81 is also transferred to the pressure pad 26A via the frame part 25A and the first workpiece W1. As mentioned above, since the heat insulating layer 26bA is arranged below the soft layer 26aA, the heat from the thermal energy unit 81 is difficult to be transferred to the soft layer 26aA due to the heat insulating layer 26bA. That is, the soft layer 26aA is thermally protected by the heat insulating layer 26bA.

[0207] When the first workpiece W1 is subjected to the pressurization treatment, the control device 3 controls the thermal energy unit transport device 52 (see Figure 5 ) action to transport the workbench 50 and the preheating unit 51 to the third area A3.

[0208] It should be noted that, in the present invention, the conveyance of the worktable 50 and the preheating unit 51 to the third area A3 may be performed simultaneously with the conveyance of the chamber unit 20A to the eighth area A8.

[0209] When the pressurization process is performed on the first workpiece W1, the control device 3 controls the operation of the workpiece loading device 91 to transport the workpiece W waiting in the first area A1 as the second workpiece W2 to the mounting table 21B located in the fifth area A5 (second workpiece loading process). Then, the control device 3 controls the operation of the second stage transport device 95 and the thermal energy unit transport device 72 to transport the second workpiece W2, the mounting table 21B, the transport table 95a, the workbench 70, and the preheating unit 71 to the seventh area A7. Then, the control device 3 controls the operation of the lifting device 62 and the atmosphere adjustment device 10 to assemble the chamber unit 20B and accommodate the second workpiece W2 in the accommodation chamber 20RB in the same manner as the accommodation process of the first workpiece W1 described above (accommodation process). At this time, the chamber unit 20B is located in the seventh area A7.

[0210] Fig.16 It is a schematic cross-sectional view for explaining the next operation of the present system 1.

[0211] This figure shows that along Figure 3 A cross section of the present system 1 along line AA.

[0212] Then, after a predetermined time has passed, the control device 3 controls the operation of the lifting device 82 to lower the lower base member 80 and the thermal energy unit 81. In addition, the control device 3 controls the operation of the lifting device 62 to lower the workbench 60, the cooling unit 61, the workbench 70, and the preheating unit 71. At this time, the lifting member 72c (see Figure 6 ) As the workbench 70 descends, the roller 72d abuts against the rail members R3 and R4, and the workbench 70 is placed on the rail members R3 and R4 via the roller 72d.

[0213] Then, the control device 3 controls the operation of the chamber transport device 96 to transport the chamber unit 20A from the 8th area A8 to the 4th area A4 and to transport the chamber unit 20B from the 7th area A7 to the 8th area A8. As a result, the chamber unit 20A is located in the 4th area A4 and the chamber unit 20B is located in the 8th area A8.

[0214] Then, the control device 3 controls the operation of the first cooling device 4 to perform cooling treatment on the first workpiece W1, and controls the operation of the pressurizing device 8 to perform pressurizing treatment on the second workpiece W2. Here, the pressurizing treatment of the second workpiece W2 is the same as the pressurizing treatment of the first workpiece W1, so its detailed description is omitted.

[0215] The “cooling process” is a process of cooling the workpiece W after the pressurization process to a predetermined temperature (for example, about 100° C.) The cooling process is a post-pressurization process performed after the heating process in order to cool the workpiece W after the pressurization process.

[0216] Specifically, the lifting device 42 raises the workbench 40 and the cooling unit 41 until the cooling unit 41 (upper surface 41c) abuts against the chamber unit 20A (lower surface 21bA of the mounting table 21A). At this time, the workbench 40 and the cooling unit 41 pass through the rail components R1, R2, R7, R8, and the central hole 94b. Then, the lifting device 42 maintains the state in which the cooling unit 41 abuts against the mounting table 21A for a predetermined time. Here, the cooling unit 41 is pre-cooled to a predetermined primary cooling temperature (for example, approximately 20°C). Therefore, the first workpiece W1 is cooled by the cooling unit 41 via the mounting table 21A to a predetermined temperature (for example, approximately 100°C).

[0217] Fig.17 It is a schematic cross-sectional view for explaining the next operation of the present system 1.

[0218] This figure shows that along Figure 3 A cross section of the present system 1 along line AA.

[0219] Here, during the pressurization process, the base member 23B, the upper mold 24B, and the pressurization pad 26B in the chamber unit 20B, together with the base member 96d, function as an upper pressurization unit 8U for pressurizing the second workpiece W2 from above. In addition, the mounting table 21B in the chamber unit 20B, together with the lower base member 80 and the thermal energy unit 81, function as a lower pressurization unit 8D for pressurizing the second workpiece W2 from below.

[0220] Then, after a predetermined time, the lifting device 42 lowers the workbench 40 to terminate the cooling process. Then, the control device 3 controls the operation of the atmosphere adjustment device 10 and the lifting device 42 to remove the first workpiece W1 from the chamber unit 20A. Specifically, the atmosphere adjustment device 10 operates the vacuum pump P and the valve V1 to purify the atmosphere of the receiving chamber 20RA with an inert gas, so that the atmosphere of the receiving chamber 20RA becomes an inert gas atmosphere (atmospheric pressure). At this time, the vacuum pressure disappears, the second spring component 29A extends, and the stage 21A and the side component 27A descend. That is, in the up and down direction, the frame component 25A and the pressure pad 26A move away from the stage 21A. In other words, the frame component 25A and the pressure pad 26A rise relative to the stage 21A. Moreover, the stage 21A can be removed from the upper unit 22A. Then, the lifting device 42 lowers the workbench 40, the cooling unit 41, the mounting table 21A, and the first workpiece W1, removes the mounting table 21A from the upper unit 22A, and takes the first workpiece W1 out of the chamber unit 20A (taking out process). In this way, in the fourth area A4, by removing the mounting table 21A from the upper unit 22A, the assembly of the chamber unit 20A is released, and the first workpiece W1 is taken out of the chamber unit 20A (taking out process). The mounting table 21A carrying the first workpiece W1 after the pressurization process is placed on the transfer table 94a.

[0221] It should be noted that, in the present invention, the storage chamber 20R may be purified by air.

[0222] Fig.18 It is a schematic cross-sectional view for explaining the next operation of the present system 1.

[0223] This figure shows that along Figure 3 The cross section of the present system 1 is shown on line BB.

[0224] Then, the control device 3 controls the operation of the first stage transport device 94 to transport the transport stage 94a on which the mounting table 21A is mounted to the second area A2. That is, the first workpiece W1 after the pressurization process is transported to the second area A2.

[0225] In the following description, reference is also made as appropriate. Figure 2 , Figure 3 , Figure 7 ,as well as Figures 9 to 18 .

[0226] Then, the control device 3 controls the operation of the workpiece carrying-out device 92 to carry out the first workpiece W1 carried to the first area A1 to the ninth area A9 (first workpiece carrying-out process). Specifically, the workpiece carrying-out device 92 moves to the first area A1, and the lifting device 92b lowers the holding member 92c toward the first workpiece W1. Then, the holding member 92c holds the first workpiece W1, and the lifting device 92b raises the holding member 92c.

[0227] Then, the workpiece unloading device 92 moves to the ninth area A9, and the lifting device 92b lowers the holding member 92c toward the conveyor a91. Then, the holding member 92c releases the suction of the first workpiece W1. At this time, the first workpiece W1 is placed on the conveyor a91. Then, the lifting device 92b raises the holding member 92c.

[0228] Then, the control device 3 controls the operation of the workpiece loading device 91, the first stage conveying device 94, and the thermal energy unit conveying device 52 to convey the next first workpiece W1, the mounting table 21A, the conveying table 94a, the workbench 50, and the preheating unit 51 to the fourth area A4. Then, the control device 3 controls the operation of the lifting device 42 and the atmosphere adjustment device 10 to assemble the chamber unit 20A and accommodate the next first workpiece W1 in the accommodation chamber 20RA. Here, when the pressurization treatment of the second workpiece W2 has been completed, the lower base member 80 and the thermal energy unit 81 are lowered, and the chamber unit 20B is located in the eighth area A8.

[0229] Then, the control device 3 controls the actions of the lifting device 42, the pressurizing device 8, and the chamber transport device 96 to perform pressurizing treatment on the next first workpiece W1, and controls the actions of the second cooling device 6, the second transport device 95, and the workpiece carrying-out device 92 to carry out the second workpiece W2 after pressurizing treatment to the ninth area A9 (cooling treatment, removal treatment, second workpiece carrying-out treatment). Then, the second workpiece W2 is moved in, and then the aforementioned various treatments on the first workpiece W1 (cooling treatment, removal treatment, first workpiece carrying-out treatment, first workpiece carrying-in treatment, storage treatment, preheating treatment, pressurizing treatment, ...) and various treatments on the second workpiece W2 (storing treatment, preheating treatment, pressurizing treatment, cooling treatment, removal treatment, second workpiece carrying-out treatment, ...) are repeatedly performed.

[0230] Fig.19 It is a schematic plan view for explaining the operation of the workpiece transport device 90 .

[0231] For ease of explanation, the figure only shows the outlines of the conveyor belts a11, a91, the mounting tables 21A, 21B, the workpiece loading device 91, the workpiece unloading device 92, the first workpiece W1, and the second workpiece W2, and the rail members R5, R6 are shown by single-point chain lines. The arrows in the figure show the movement of the mounting tables 21A, 21B, the workpiece loading device 91, and the workpiece unloading device 92.

[0232] When the first workpiece W1 is carried into the mounting table 21A, the workpiece carrying-in device 91 moves from the first area A1 to the second area A2. At this time, the workpiece carrying-out device 92 is located in the ninth area A9. Then, the workpiece carrying-in device 91 moves from the second area A2 to the first area A1.

[0233] Then, when the second workpiece W2 is carried into the mounting table 21B, the workpiece carrying-in device 91 moves from the first area A1 to the fifth area A5. Then, the workpiece carrying-in device 91 moves from the fifth area A5 to the first area A1.

[0234] Then, when the first workpiece W1 after the pressurization treatment is conveyed to the second area A2, the workpiece unloading device 92 moves from the ninth area A9 to the second area A2. At this time, the workpiece loading device 91 is located in the first area A1. Then, the workpiece unloading device 92 moves from the second area A2 to the ninth area A9. At this time, the workpiece loading device 91 moves from the first area A1 to the second area A2 and returns to the first area A1.

[0235] Then, when the second workpiece W2 after the pressurization treatment is conveyed to the fifth area A5, the workpiece unloading device 92 moves from the ninth area A9 to the fifth area A5. At this time, the workpiece loading device 91 is located in the first area A1. Then, the workpiece unloading device 92 moves from the fifth area A5 to the ninth area A9. At this time, the workpiece loading device 91 moves from the first area A1 to the fifth area A5 and returns to the first area A1.

[0236] Thus, when the workpiece W is carried in and out, the workpiece carrying-in device 91 moves between the first area A1 and the second area A2 and between the first area A1 and the fifth area A5, and the workpiece carrying-out device 92 moves between the ninth area A9 and the second area A2 and between the ninth area A9 and the fifth area A5. The workpiece carrying-in device 91 and the workpiece carrying-out device 92 are linked in a non-interfering manner, thereby being guided by a pair of rail members R5 and R6, and reciprocatingly move in the X-axis direction.

[0237] In the above-described operation, the present system 1 uses two systems, namely, the first system for the first workpiece W1 and the second system for the second workpiece W2, to alternately perform the loading process, storage process, preheating process, pressurization process, cooling process, removal process, and unloading process of the workpiece W, and performs the related process of the other workpiece W in parallel with the pressurization process of one workpiece W. As a result, in the present system 1, the time required between the pressurization process of a certain workpiece W (for example, the first workpiece W1) and the pressurization process of the next workpiece W (for example, the second workpiece W2) can be greatly shortened compared to the existing pressurization device that performs the pressurization process of the workpiece using one system. In addition, in the present system 1, the pre-processing and post-processing (related process) of the pressurization process can also be performed in parallel with the pressurization process.

[0238] In addition, in the present system 1, a preheating treatment is performed as a pretreatment for the pressurizing treatment. Therefore, compared with the pressurizing treatment in the existing pressurizing device that cannot perform the preheating treatment, the pressurizing treatment in the present system 1 can be performed in a shorter time. Moreover, in the present system 1, the pressurizing treatment is separated from the cooling treatment. Therefore, compared with the pressurizing treatment in the existing pressurizing device in which the pressurizing treatment and the cooling treatment cannot be separated, the pressurizing treatment in the present system 1 can be performed in a shorter time. As described above, in the present system 1, the receiving treatment, the preheating treatment, the cooling treatment, and the taking-out treatment can be performed alternately in the 4th area A4 and the 7th area A7 as related treatments. Therefore, in the present system 1, the total time required from the carrying in and carrying out of the workpiece W can be shortened compared with the total time required for the existing pressurizing device. That is, in the present system 1, compared with the existing pressurizing device that cannot perform related treatments, by performing a plurality of related treatments alternately in parallel with the pressurizing treatment, the time interval between pressurizing treatments can be shortened.

[0239] In addition, in the present system 1 , the orientation of the workpiece W is the same in any process. That is, in the pre-process and post-process of the present system 1 , the orientation of the workpiece W is the same.

[0240] In addition, in the present system 1, while the workpiece W is contained in the chamber unit 20, the atmosphere of the containment chamber 20R can be always adjusted by the atmosphere adjustment device 10 even during the transportation process. Therefore, the reduced pressure atmosphere of the containment chamber 20R is always maintained. In this structure, the workpiece W is not exposed to the outside air during the preheating process, the pressurizing process, and the cooling process, and is not oxidized.

[0241] Furthermore, in the present system 1, when the upper unit 22 is located in the fourth area A4, by moving the conveying platform 94a to the second area A2 and moving the preheating unit 51 to the third area A3, a space for maintenance (especially replacement of parts) of the upper unit 22 can be ensured in the fourth area A4. The same space can be ensured in the seventh area A7. Therefore, a space for maintenance is not required in the eighth area A8. Therefore, the eighth area A8 (housing 2) can be miniaturized in the height direction.

[0242] In addition, in the present system 1, the track components R1 to R4, R7 to R10 are respectively arranged in parallel with each other in a manner along the Y-axis direction. The track components R1 and R2 are arranged above the track components R7 and R8, and the track components R3 and R4 are arranged above the track components R9 and R10. That is, when viewed from above, the conveying direction of the conveying table 94a, 95a (carrying table 21) is the same as the conveying direction of the preheating unit 51, 71, and the conveying path of the preheating unit 51, 71 is arranged below the conveying path of the conveying table 94a, 95a (carrying table 21). In addition, when viewed from above, the track components R11 and R12 are arranged in a manner along the X-axis direction, and are orthogonal to the track components R1 to R4, R7 to R10. That is, the conveying direction of the preheating unit 51, 71 is orthogonal to the conveying direction of the chamber unit 20. Moreover, in the orthogonal areas (the 4th area A4 and the 7th area A7), multiple types of related processing are performed. In addition, in the X-axis direction, the conveyance paths of the preheating units 51 and 71 are arranged in parallel at positions facing each other. In this structure, since each area is compactly arranged in the housing 2, the floor space of the housing 2 can be reduced.

[0243] It should be noted that, in the present invention, at any time from when the workpiece W is loaded into the workpiece loading device 91 to when it is stored in the chamber unit 20, a release sheet (not shown in the figure, the same below) can be covered on the workpiece W. The release sheet is a sheet material that prevents the workpiece W from sticking to the pressure pad 26 after the heat treatment. The release sheet is, for example, a sheet material made of a synthetic resin (e.g., PTFE (polytetrafluoroethylene)) that has heat resistance to the temperature of the formal heating, which will be described later.

[0244] Summarize

[0245] According to the embodiment described above, the system 1 includes the 8th area A8, the 4th area A4, the 7th area A7, two chamber units 20, and a chamber transport device 96. The 4th area A4 and the 7th area A7 are arranged adjacent to the 8th area A8 in a manner of sandwiching the 8th area A8. The chamber unit 20 accommodates the workpiece W and is reciprocated between the upper space of the 4th area A4 or the 7th area A7 and the upper space of the 8th area A8. The connecting parts 96a and 96b of the chamber transport device 96 are connected to the two chamber units 20. The chamber transport device 96 reciprocates the chamber unit 20 in the following manner: when one chamber unit 20B is located in the 8th area A8, the other chamber unit 20A is located in the 4th area A4, and when the other chamber unit 20A is located in the 8th area A8, one chamber unit 20B is located in the 7th area A7. In this structure, when the pressurization treatment of the first workpiece W1 is performed, the related treatment (accommodation treatment, preheating treatment, cooling treatment, and removal treatment) of the second workpiece W2 can be performed. That is, in the present system 1, the pressurization treatment and the related treatment can be performed alternately on the two workpieces W at the same time. As a result, in the present system 1, the time interval between pressurization treatments can be shortened.

[0246] In addition, according to the embodiment described above, the system 1 has a lifting device 42 arranged in the fourth area A4, and a lifting device 62 arranged in the seventh area A7. The chamber unit 20 includes a mounting table 21, a pressure pad 26, and a side member 27. The mounting table 21 is arranged below the workpiece W and functions as a lower pressure unit 8D. The pressure pad 26 is arranged above the workpiece W and functions as an upper pressure unit 8U. The side member 27 is arranged to surround the entire circumference of the workpiece W in the horizontal direction, and divides the storage chamber 20R together with the mounting table 21 and the pressure pad 26. In the fourth area A4 and the seventh area A7, the lifting devices 42 and 62 can lift the mounting table 21 on which the workpiece W is placed. Based on the rise of the lifting devices 42 and 62, the mounting table 21 is attached to the side member 27, and the storage process is performed as the related process. On the other hand, based on the descent of the lifting devices 42 and 62, the mounting table 21 is removed from the side member 27, and the removal process is performed as the related process. In this structure, in the present system 1, a pressurization process can be performed on the workpiece W accommodated in the chamber unit 20 (accommodation chamber 20R). In addition, the chamber unit 20, which functions as the upper and lower pressurization units 8U and 8D, is not fixed to the 8th area A8 where the pressurization process is performed, but is transported to the 4th area A4 and the 7th area A7. In addition, in the 4th area A4 and the 7th area A7, the accommodation process and the removal process are performed as related processes. Therefore, in the present system 1, the maintenance of the upper unit 22 can be performed in the 4th area A4 and the 7th area A7 instead of the pressurization device 8, and the maintainability of the upper unit 22 can be improved.

[0247] In addition, according to the embodiment described above, the system 1 has cooling units 41 and 61. The cooling unit 41 is arranged in the 4th area A4, and performs cooling treatment of the first workpiece W1 as a related treatment, and the cooling unit 61 is arranged in the 7th area A7, and performs cooling treatment of the second workpiece W2 as a related treatment. When the chamber unit 20 after the pressurization treatment is located in the 4th area A4 or the 7th area A7, the lifting devices 42 and 62 raise the cooling units 41 and 61, thereby making the cooling units 41 and 61 abut against the mounting table 21. In this structure, the upper space of the 4th area A4 and the 7th area A7 can be used only for the transportation of the chamber unit 20, which can simplify the component structure in the upper space. In addition, the pressurization treatment and the cooling treatment can be performed simultaneously and in parallel, which can shorten the time interval between the pressurization treatments.

[0248] In addition, according to the embodiment described above, the removal process is performed after the cooling process. During the removal process, the lifting device 42, 62 lowers the cooling unit 41, 61 abutting against the mounting table 21 together with the mounting table 21. In this structure, the cooling process and the removal process can be continuously performed in the same area. As a result, the footprint of the housing 2 can be miniaturized.

[0249] In addition, according to the embodiment described above, the system 1 has a preheating unit 51, 71, and a thermal energy unit transport device 52, 72. The preheating unit 51, 71 preheats the workpiece W accommodated in the chamber unit 20. The thermal energy unit transport device 52, 72 reciprocates the preheating unit 51 (preheating unit 71) between the 3rd area A3 (6th area A6) adjacent to the 4th area A4 (7th area A7) and the 4th area A4 (7th area A7). The preheating process is continuously performed after the accommodation process. During the accommodation process, the stage 21 on which the workpiece W is placed is arranged above the lifting device 42, 62, and the pressure pad 26 and the side member 27 are arranged above the stage 21. The thermal energy unit transport device 52, 72 transports the preheating unit 51, 71 between the cooling unit 41, 61 and the stage 21. Then, the lifting devices 42 and 62 raise the mounting table 21 together with the cooling units 41 and 61 and the preheating units 51 and 71. During the cooling process and the removal process, the thermal energy unit transport devices 52 and 72 transport the preheating units 51 and 71 to the third area A3 (the sixth area A6). In this structure, the system 1 can perform the preheating process and the cooling process as related processes in the fourth area A4 by moving the preheating unit 51 forward and backward relative to the fourth area A4. The same is true in the seventh area A7. The system 1 can perform the preheating process and the cooling process as related processes separately. In addition, the system 1 can continuously perform the preheating process immediately after the storage process, can continuously perform the cooling process after the pressurization process, and can continuously perform the removal process immediately after the cooling process. As a result, the switching time between the various processes can be shortened, and the time interval between the pressurization processes can be shortened.

[0250] Furthermore, according to the above-described embodiment, when viewed from above, the conveying direction (Y-axis direction) of the preheating units 51 and 71 is orthogonal to the conveying direction (X-axis direction) of the chamber unit 20. In the conveying direction of the chamber unit 20, the conveying directions of the preheating units 51 and 71 are respectively arranged parallel to each other at positions opposite to each other. In this structure, the footprint of the housing 2 can be miniaturized.

[0251] Furthermore, according to the embodiment described above, the system 1 has the second area A2, the fifth area A5, the first transport device 94, and the second transport device 95. In the second area A2 and the fifth area A5, workpiece carrying-in processing and workpiece carrying-out processing are performed. The first transport device 94 reciprocates between the second area A2 and the fourth area A4 to transport the mounting table 21A on which the first workpiece W1 is placed. The second transport device 95 reciprocates between the fifth area A5 and the seventh area A7 to transport the mounting table 21B on which the second workpiece W2 is placed. When viewed from above, the transport direction of the mounting tables 21A and 21B is the same as the transport direction of the preheating units 51 and 71, and the transport path of the preheating units 51 and 71 is arranged below the transport path of the mounting tables 21A and 21B. In this structure, since the conveyance paths of the preheating units 51 and 71 and the conveyance paths of the mounting tables 21A and 21B are three-dimensionally arranged in a common floor space, the floor space of the housing 2 can be further reduced in size.

[0252] In addition, according to the embodiment described above, the system 1 has a first area A1, a ninth area A9, and a workpiece conveying device 90. The first area A1 is provided with a workpiece W before the relevant processing and the pressurizing processing, and the workpiece W after the relevant processing and the pressurizing processing is provided. In the second area A2, the first workpiece carrying-in processing and the first workpiece carrying-out processing are performed. In the fifth area A5, the second workpiece carrying-in processing and the second workpiece carrying-out processing are performed. The workpiece conveying device 90 performs the first workpiece carrying-in processing, the first workpiece carrying-out processing, the second workpiece carrying-in processing, and the second workpiece carrying-out processing. The workpiece conveying device 90 has a workpiece carrying-in device 91 and a workpiece carrying-out device 92. The workpiece carrying-in device 91 moves between the first area A1 and the second area A2, and between the first area A1 and the fifth area A5, and carries the workpiece W onto the mounting table 21. The workpiece unloading device 92 moves between the 9th area A9 and the 2nd area A2, and between the 9th area A9 and the 5th area A5, and unloads the workpiece W from the mounting table 21. When the workpiece loading device 91 is located in the 1st area A1, the workpiece unloading device 92 is located in the 2nd area A2 or the 5th area A5, and when the workpiece unloading device 92 is located in the 9th area A9, the workpiece loading device 91 is located in the 2nd area A2 or the 5th area A5. In this structure, the workpiece loading device 91 and the workpiece unloading device 92 can be guided by a pair of rail components R5 and R6, and the footprint of the housing 2 can be miniaturized. In addition, since one workpiece loading device 91 is used to load the first workpiece W1 and the second workpiece W2, and one workpiece unloading device 92 is used to unload the first workpiece W1 and the second workpiece W2, the number of components of the workpiece conveying device 90 can be reduced.

[0253] Furthermore, according to the above-described embodiment, the system 1 has a pressurizing device 8 that is disposed in the eighth area A8 and performs a pressurizing process. The pressurizing device 8 includes a thermal energy unit 81, which rises from the bottom of the chamber unit 20 and abuts against the mounting table 21 during the pressurizing process, and functions together with the mounting table 21 as a lower pressurizing unit 8D. In this structure, the upper space of the eighth area A8 can be used only for the transportation of the chamber unit 20, and the component structure in the upper space can be simplified. In addition, since most of the mechanism for applying a formal pressurizing force to the workpiece W (especially the lifting device 82) is disposed below the chamber unit 20, the height direction of the housing 2 can be miniaturized.

[0254] Furthermore, according to the above-described embodiment, the atmosphere of the storage chamber 20R is a decompression atmosphere in which the internal pressure of the storage chamber 20R is lower than the external pressure of the external space of the chamber unit 20. The mounting table 21 is arranged below the side member 27 and is mounted on the side member 27 using the pressure difference. In this structure, a separate component for mounting the mounting table 21 on the side member 27 is not required. That is, the number of components of the chamber unit 20 can be reduced. In addition, during each process, the workpiece W is not exposed to the outside air.

[0255] Modifications

[0256] Next, a modified example of the present system 1 is described below, focusing on the differences from the above-described embodiment (hereinafter referred to as the "first embodiment"). In this modified example, the structure of the chamber unit and the atmosphere of the containment chamber are different from those of the first embodiment. In the following modified examples, for ease of description, the same reference numerals as in the first embodiment are used for the same components and components having the same functions as in the first embodiment. In the following modified examples, appropriate references are made to Figures 1 to 8 .

[0257] Fig. 20 It is a schematic cross-sectional view of a chamber unit 20X according to a modified example.

[0258] The chamber unit 20X includes a mounting table 21, an upper unit 22X, and a storage chamber 20R. The upper unit 22X includes a base member 23, an upper mold 24, a frame member 25, a pressure pad 26, a side member 27, a first spring member 28, a second spring member 29, two sealing members 30 and 31, and a plurality of fixing members 32.

[0259] The fixing member 32 fixes the mounting table 21 to the side member 27 (upper unit 22X). The fixing member 32 is mounted on the outer peripheral surface 27f of the lower part of the side member 27. The fixing member 32 includes, for example, a support portion 32a, a main body portion 32b, and a known ratchet mechanism (not shown. Same below). The support portion 32a supports the main body portion 32b in such a manner that the main body portion 32b can rotate between a fixed position and a released position. The shape of the main body portion 32b is, for example, an L-shape when viewed from the side. The main body portion 32b can rotate toward the release position side but cannot rotate toward the fixed position side, for example, through the ratchet mechanism, and can rotate toward the fixed position when the ratchet mechanism is released. When the main body portion 32b is located at the fixed position, a portion of the main body portion 32b is located below the mounting table 21 and the side member 27, and can support the mounting table 21. When the main body portion 32b is located at the released position, a portion of the main body portion 32b is located to the side of the side member 27, and cannot support the mounting table 21.

[0260] When the workpiece W is stored in the chamber unit 20X, the atmosphere of the storage chamber 20R is adjusted to an inert gas atmosphere by the atmosphere adjustment device 10. That is, the storage chamber 20R is filled with an inert gas so that the internal pressure of the storage chamber 20R is the same as the external pressure (atmospheric pressure). In this case, since no vacuum pressure is generated, the mounting table 21 is fixed to the side member 27 (upper unit 22X) by the fixing member 32 rotated to a fixed position. As described above, the atmosphere of the storage chamber 20R can be maintained in the 4th area A4, the 7th area A7, and the 8th area A8. Therefore, even if a small gap is generated between the mounting table 21 and the sealing member 31, there is no problem.

[0261] In this structure, since the atmosphere of the receiving chamber 20R is an inert gas atmosphere, the workpiece W is not exposed to the outside air during the preheating process, the pressurizing process, and the cooling process, and is not oxidized. In addition, the amount of inert gas required can be controlled to be the volume of the receiving chamber 20R (when multiple replacements are performed, the amount is obtained by multiplying the volume by the number of replacements).

[0262] It should be noted that, in this modification, when the workpiece W is made of a non-oxidizable (not easily oxidizable) material, the accommodation chamber 20R may be filled with air.

[0263] In addition, in this modified example, the structure of the fixing component 32 is not limited to the support portion 32a, the main body portion 32b, and the known ratchet mechanism. That is, for example, the fixing component 32 may also be a rectangular "C" shape when viewed from the side. In this case, for example, a recess or a protrusion for embedding the fixing component 32 is formed on the outer peripheral surface 27f of the lower end portion 27e of the side component 27, and the fixing component 32 clamps the lower end portion 27e of the side component 27 and the outer edge portion of the mounting table 21. In addition, for example, the fixing component 32 may also be a bolt that fastens the outer edge portion of the mounting table 21 and the side component 27. The first cooling device 4 and the second cooling device 6 may also have an installation mechanism and a disassembly mechanism for the fixing component 32.

[0264] Other Implementations

[0265] It should be noted that, in the present invention, the system 1 may not include the first cooling device 4 and / or the first preheating device 5. Similarly, the system 1 may not include the second cooling device 6 and / or the second preheating device 7. Specifically, for example, the cooling treatment may also be performed during the pressurization treatment. Even in this case, the receiving treatment and the taking-out treatment can be performed in parallel with the pressurization treatment, and the processing time of the pressurization treatment interval can be shortened compared to the existing pressurization device. In addition, in this case, the system 1 can, for example, perform a different treatment on the first workpiece W1 than on the second workpiece W2 (making the formal pressurization temperature of the first workpiece W1 different from the formal pressurization temperature of the second workpiece W2, and performing a preheating treatment on only one of them, etc.).

[0266] In addition, in the present invention, the pressurizing device 8 may not include the thermal energy unit 81 .

[0267] In addition, in the present invention, the structure of the chamber transport device 96 is not limited to the first embodiment as long as it is configured to transport the chamber unit 20 and the upper unit 22 in the upper space of the 4th area A4, the 7th area A7, and the 8th area A8. That is, for example, the chamber unit 20 (upper unit 22) may also include a power source and a driving wheel that can rotate on the track parts R11 and R12. In addition, for example, a plurality of rollers that can abut against the base part 23 may also be installed on the track parts R11 and R12. In addition, for example, the chamber transport device 96 may also include a locking part that can be installed on the base part 23 or removed from the base part 23, and a moving mechanism that moves the locking part between the 4th area A4 and the 7th area A7 and the 8th area A8.

[0268] In addition, for the sake of convenience of explanation, the shape of the workpiece W accommodated in the chamber unit 20 is shown as a flat plate in each drawing, but the present invention is not limited thereto. That is, for example, a set of workpieces W consisting of a plurality of pressurized objects may be accommodated in the chamber unit 20. In addition, for example, the shapes of the pressurized objects constituting the set of workpieces W may be the same or different.

[0269] In addition, in the present invention, the structure of the thermal energy unit transport device 52, 72 is not limited to the first embodiment as long as the preheating unit 51, 71 does not interfere with the transport and lifting of the workbench 50, 70 and the preheating unit 51, 71, and the lifting and lowering of the cooling unit 41, 61 by the lifting device 42, 62.

[0270] In addition, in the present invention, the conveying direction and conveying path of the thermal energy unit conveying devices 52 and 72 are not limited to those in the first embodiment. That is, for example, the conveying direction and conveying path of the thermal energy unit conveying devices 52 and 72 may be along the X-axis direction.

[0271] Furthermore, in the present invention, the transport path of the thermal energy unit transport device 72 may be arranged to extend from the seventh area A7 in the +Y axis direction.

[0272] In addition, in the present invention, the shapes of the workbench 40, the cooling unit 41, the workbench 50, and the preheating unit 51 are not limited to the first embodiment as long as they can perform various processes (accommodation process, preheating process, cooling process, and removal process) of the lifting device 42. That is, for example, when viewed from above, the shapes of the workbench 40, the cooling unit 41, and the workbench 50 may also be rectangular. Similarly, the shapes of the workbench 60, the cooling unit 61, the workbench 70, and the preheating unit 71 are also not limited to the first embodiment.

[0273] Embodiments of the present invention

[0274] Next, the terms and symbols described in each embodiment are cited, and the embodiments of the present invention understood from the embodiments described above are described as follows.

[0275] A first embodiment of the present invention is a pressurizing system (e.g., pressurizing system 1) that performs a pressurizing treatment on a workpiece (e.g., workpiece W) and related treatments related to the pressurizing treatment on the workpiece, wherein the pressurizing system comprises: a pressurizing area (e.g., an eighth area A8) in which the pressurizing treatment is performed; two related areas (e.g., a fourth area A4 and a seventh area A7) that are arranged adjacent to the pressurizing area in a manner of sandwiching the pressurizing area and perform the related treatments; and two chamber units (e.g., chamber units 20, 20X), which accommodate the workpiece and are reciprocatedly transported between the upper space of the relevant area and the upper space of the pressurized area; and a chamber transport device (for example, chamber transport device 96), which reciprocates the two chamber units at the same time, and the chamber transport device reciprocates the chamber units in the following manner, namely: when one chamber unit is located in the pressurized area, the other chamber unit is located in one of the relevant areas, and when the other chamber unit is located in the pressurized area, one chamber unit is located in the other of the relevant areas.

[0276] According to this structure, the system can perform pressurization and correlation treatment on two workpieces alternately at the same time. As a result, the time interval between pressurization treatments can be shortened in the system.

[0277] A second embodiment of the present invention is based on the pressurizing system described in the first embodiment, wherein the pressurizing system has a lifting device (for example, the lifting device 42, 62) arranged in the relevant area, and the chamber unit has: a mounting table (for example, the mounting table 21), which mounts the workpiece and acts as a lower pressurizing unit (for example, the lower pressurizing unit 8D) for pressurizing the workpiece from below during the pressurizing process; a ceiling component (for example, the pressurizing pad 26), which is arranged above the mounting table and acts as an upper pressurizing unit (for example, the upper pressurizing unit 8U) for pressurizing the workpiece from above during the pressurizing process; and a peripheral wall component (for example, The side member 27 is configured to surround the entire circumference of the workpiece in the horizontal direction, and together with the mounting table and the ceiling member, divide a storage chamber (for example, storage chamber 20R) for storing the workpiece. In the related area, the lifting device can lift the mounting table carrying the workpiece, and the mounting table is installed on the peripheral wall member by the ascent of the lifting device, and the storage treatment of storing the workpiece before the pressurization treatment in the storage chamber is performed as the related treatment. The mounting table is removed from the peripheral wall member by the descent of the lifting device, and the removal treatment of taking the workpiece out of the storage chamber after the pressurization treatment is performed as the related treatment.

[0278] According to this structure, in this system, the workpiece accommodated in the chamber unit can be subjected to a pressurization process. In addition, the maintainability of the upper unit can be improved.

[0279] The third embodiment of the present invention is based on the pressurizing system described in the second embodiment, and the pressurizing system has a cooling unit (for example, cooling unit 41, 61), and the cooling unit is arranged in the relevant area, and performs a cooling treatment for cooling the workpiece after the pressurizing treatment accommodated in the chamber unit as the relevant treatment. When the chamber unit after the pressurizing treatment is located in the relevant area, the lifting device raises the cooling unit, thereby making the cooling unit abut against the mounting table.

[0280] According to this configuration, the pressurization process and the cooling process can be performed simultaneously and in parallel, and the time interval between the pressurization processes can be shortened.

[0281] The fourth embodiment of the present invention is based on the pressurizing system described in the third embodiment, and the pressurizing system has: a preheating unit (for example, preheating unit 51, 71), which performs a preheating treatment for preheating the workpiece before the pressurizing treatment accommodated in the chamber unit as the related treatment; and a thermal energy unit conveying device (for example, thermal energy unit conveying device 52, 72), which reciprocates the preheating unit between a standby area (for example, the third area A3, the sixth area A6) adjacent to the related area and the related area, the preheating treatment is performed after the accommodation treatment, in the accommodation treatment, the stage carrying the workpiece is arranged above the lifting device, the ceiling part and the surrounding wall part are arranged above the stage, the thermal energy unit conveying device conveys the preheating unit between the cooling unit and the stage, the lifting device causes the stage to rise together with the cooling unit and the preheating unit, and in the cooling treatment and the removal treatment, the preheating unit is located in the standby area.

[0282] According to this configuration, the switching time between the respective treatments can be shortened, and the time between the pressurizing treatments can be shortened.

[0283] The fifth embodiment of the present invention is based on the pressurizing system described in the fourth embodiment, and the pressurizing system has: a workpiece conveying area (for example, the second area A2, the fifth area A5), in which a workpiece carrying process of carrying the workpiece into the loading platform and a workpiece unloading process of carrying the workpiece out of the loading platform are performed; and a platform conveying device (for example, the first platform conveying device 94, the second platform conveying device 95), which reciprocates the loading platform carrying the workpiece between the workpiece conveying area and the related area, and when viewed from above, the conveying direction of the loading platform is the same as the conveying direction of the preheating unit, and the conveying path of the preheating unit is arranged below the conveying path of the loading platform.

[0284] According to this structure, the footprint of the casing can be further reduced in size.

[0285] The sixth embodiment of the present invention is based on the pressurizing system described in the second embodiment, and the pressurizing system has: a workpiece carrying-in area (for example, the first area A1), in which the workpiece before the related processing and the pressurizing processing are arranged; a workpiece carrying-out area (for example, the ninth area A9), in which the workpiece after the related processing and the pressurizing processing are arranged; and a first workpiece conveying area (for example, the second area A2), in which the first workpiece carrying-in processing and the first workpiece carrying-out processing are performed. The first workpiece carrying-in process comprises carrying the workpiece from the workpiece carrying-in area to one of the loading tables, and carrying the workpiece out of the first workpiece carrying-out process; the second workpiece carrying area (for example, the fifth area A5) comprises carrying the second workpiece carrying-in process and the second workpiece carrying-out process, wherein the workpiece is carried from the workpiece carrying-in area to another of the loading tables, and the workpiece is carried out of the second workpiece carrying area. from the other of the loading platforms to the workpiece unloading area; and a workpiece conveying device (e.g., workpiece conveying device 90), which performs the first workpiece carrying-in processing, the first workpiece unloading processing, the second workpiece carrying-in processing, and the second workpiece unloading processing, the workpiece conveying device comprising: a workpiece carrying-in device (e.g., workpiece carrying-in device 91), which moves between the workpiece carrying-in area and the first workpiece carrying area, and between the workpiece carrying-in area and the second workpiece carrying area, to carry the workpiece to the loading platform; and A workpiece unloading device (for example, workpiece unloading device 92) moves between the workpiece unloading area and the first workpiece transporting area, and between the workpiece unloading area and the second workpiece transporting area, to move the workpiece out of the loading table; when the workpiece loading device is located in the workpiece loading area, the workpiece unloading device is located in the first workpiece transporting area or the second workpiece transporting area; when the workpiece unloading device is located in the workpiece unloading area, the workpiece loading device is located in the first workpiece transporting area or the second workpiece transporting area.

[0286] According to this structure, the footprint of the housing can be reduced in size, and the number of components of the workpiece transport device can be reduced.

[0287] The seventh embodiment of the present invention is based on the pressurizing system described in the second embodiment. The pressurizing system has a pressurizing device (for example, pressurizing device 8), which is arranged in the pressurizing area to perform the pressurizing treatment. The pressurizing device has a pressing unit (for example, thermal energy unit 81). During the pressurizing treatment, the pressing unit rises from the bottom of the chamber unit and abuts against the stage, thereby acting as the lower pressurizing unit together with the stage.

[0288] According to this structure, the housing can be miniaturized in the height direction.

[0289] The eighth embodiment of the present invention is based on the pressurization system described in the second embodiment, wherein the containment chamber is a reduced-pressure atmosphere in which the internal pressure of the containment chamber is lower than the external pressure of the external space of the chamber unit, and the mounting table is arranged below the surrounding wall part and is installed on the surrounding wall part by utilizing the pressure difference between the internal pressure and the external pressure.

[0290] According to this structure, the workpiece is not exposed to the outside air during each process.

[0291] The ninth embodiment of the present invention is based on the pressurization system described in claim 2, wherein the atmosphere of the containment chamber is a gas atmosphere filled with gas so that the internal pressure of the containment chamber is the same as the external pressure of the external space of the chamber unit (for example, chamber unit 20X), and the chamber unit has a fixing component (for example, fixing component 32), which fixes the mounting table to the surrounding wall component.

[0292] According to this structure, the workpiece is not exposed to the outside air during each process. In addition, the amount of the required inert gas can be controlled to the volume of the storage chamber.

Claims

1. A pressurizing system for performing a pressurizing treatment on a workpiece and a related treatment related to the pressurizing treatment on the workpiece, wherein: The pressurizing system has: a pressurizing area in which the pressurizing treatment is performed; two related areas, which are arranged adjacent to the pressurized area in a manner of sandwiching the pressurized area, and perform the related processing; Two chamber units, which accommodate the workpiece and are reciprocated between the upper space of the relevant area and the upper space of the pressurized area; as well as A chamber transport device that simultaneously transports the two chamber units back and forth. The chamber transport device transports the chamber unit back and forth in the following manner, namely: When one of the chamber units is located in the pressurized area, another of the chamber units is located in one of the associated areas, and One of the chamber units is located in another of the associated areas while another of the chamber units is located in the pressurized area.

2. The pressurized system according to claim 1, wherein: The pressurizing system has a lifting device arranged in the relevant area, The chamber unit comprises: a mounting table on which the workpiece is mounted and which functions as a lower pressing unit for pressing the workpiece from below during the pressurizing process; a ceiling member disposed above the mounting table and functioning as an upper pressurizing unit for pressurizing the workpiece from above during the pressurizing process; as well as a peripheral wall member, which is arranged to surround the entire circumference of the workpiece in the horizontal direction, and to define a storage chamber for storing the workpiece together with the mounting table and the ceiling member, In the relevant area, The lifting device can lift the mounting table on which the workpiece is mounted. The mounting table is mounted on the peripheral wall member by ascending the lifting device, and a storage process of storing the workpiece before the pressurization process in the storage chamber is performed as the related process. As the related process, a take-out process is performed to remove the mounting table from the peripheral wall member by descending the lifting device and to take the workpiece after the pressurization process out of the storage chamber.

3. The pressurized system according to claim 2, wherein: The pressurizing system includes a cooling unit, the cooling unit is disposed in the relevant area, and performs a cooling process for cooling the workpiece after the pressurizing process accommodated in the chamber unit as the relevant process. When the chamber unit after the pressurization process is located in the relevant area, the lifting device raises the cooling unit to make the cooling unit contact with the mounting table.

4. The pressurized system according to claim 3, wherein: The pressurizing system has: a preheating unit that performs a preheating process for preheating the workpiece received in the chamber unit before the pressurization process as the related process; as well as a thermal energy unit transport device that transports the preheating unit back and forth between a standby area adjacent to the relevant area and the relevant area, The preheating process is performed after the receiving process. During the containment process, The mounting table on which the workpiece is mounted is arranged above the lifting device. The ceiling member and the peripheral wall member are arranged above the mounting table. The thermal energy unit transport device transports the preheating unit between the cooling unit and the mounting table. The lifting device causes the mounting table to rise together with the cooling unit and the preheating unit. In the cooling process and the taking-out process, the preheating unit is located in the standby area.

5. The pressurized system according to claim 4, wherein: The pressurizing system has: a workpiece conveying area in which a workpiece carrying-in process of carrying the workpiece into the mounting table and a workpiece carrying-out process of carrying the workpiece out from the mounting table are performed; as well as a table transport device for reciprocatingly transporting the mounting table on which the workpiece is mounted between the workpiece transport area and the related area, When viewed from above, the conveying direction of the mounting table is the same as the conveying direction of the preheating unit. The conveyance path of the preheating unit is arranged below the conveyance path of the mounting table.

6. The pressurized system according to claim 2, wherein: The pressurizing system has: a workpiece carrying-in area, in which the workpiece before the related treatment and the pressurization treatment are performed is arranged; a workpiece unloading area, in which the workpiece after the related treatment and the pressurization treatment are arranged; A first workpiece transporting area, in which a first workpiece carrying-in process and a first workpiece carrying-out process are performed, wherein in the first workpiece carrying-in process, the workpiece is carried from the workpiece carrying-in area to one of the mounting tables, and in the first workpiece carrying-out process, the workpiece is carried out from the one of the mounting tables to the workpiece carrying-out area; A second workpiece transporting area, in which a second workpiece carrying-in process and a second workpiece carrying-out process are performed, wherein the workpiece is carried from the workpiece carrying-in area to another of the mounting tables during the second workpiece carrying-in process, and the workpiece is carried out from the another of the mounting tables to the workpiece carrying-out area during the second workpiece carrying-out process; as well as a workpiece transport device that performs the first workpiece carrying-in process, the first workpiece carrying-out process, the second workpiece carrying-in process, and the second workpiece carrying-out process, The workpiece transport device comprises: a workpiece carrying device, which moves between the workpiece carrying area and the first workpiece conveying area, and between the workpiece carrying area and the second workpiece conveying area, and carries the workpiece onto the mounting table; as well as a workpiece carrying device that moves between the workpiece carrying area and the first workpiece carrying area and between the workpiece carrying area and the second workpiece carrying area to carry the workpiece out of the mounting table; When the workpiece carrying-in device is located in the workpiece carrying-in area, the workpiece carrying-out device is located in the first workpiece carrying area or the second workpiece carrying area. When the workpiece carrying-out device is located in the workpiece carrying-out area, the workpiece carrying-in device is located in the first workpiece carrying area or the second workpiece carrying area.

7. The pressurized system according to claim 2, wherein: The pressurizing system comprises a pressurizing device, which is arranged in the pressurizing area and performs the pressurizing treatment. The pressurizing device includes a pressing unit that rises from below the chamber unit to come into contact with the mounting table during the pressurizing process, thereby functioning as the lower pressurizing unit together with the mounting table.

8. The pressurized system according to claim 2, wherein: The storage chamber is a decompression atmosphere in which the internal pressure of the storage chamber is lower than the external pressure of the external space of the chamber unit. The mounting table is disposed below the peripheral wall member and is attached to the peripheral wall member using a pressure difference between the internal pressure and the external pressure.

9. The pressurized system according to claim 2, wherein: The atmosphere of the storage chamber is a gas atmosphere filled with gas so that the internal pressure of the storage chamber is equal to the external pressure of the external space of the chamber unit. The chamber unit includes a fixing member that fixes the mounting table to the peripheral wall member.

Images