Device and method for removing metal impurities in quartz glass at high voltage

Abstract

The invention relates to the technical field of removal of metal impurities in quartz glass, and particularly discloses a high-voltage removal device for removing metal impurity ions in quartz glass and a removal method of the high-voltage removal device. The machine tool comprises a main body, a fixed chuck, a movable chuck, a chuck moving sliding rail, a blowtorch support body, a blowtorch support sliding rail, a positive electrode moving support body, a positive electrode moving support sliding rail and a controller. The impurity migration and removal device is used for controlling the oxyhydrogen flame and the ultrahigh direct-current voltage to work; the quartz tube is heated in a mode of oxyhydrogen flame or other heat sources, a heating area has ultrahigh direct-current voltage, the quartz glass is in a softened or semi-melt state, and metal ions can directionally move under an ultrahigh-voltage electric field, so that metal impurity ions in the quartz glass can be effectively removed, and the metal impurity ions in the quartz glass can be effectively removed. Therefore, the purity of the quartz glass is further improved.

Description

Technical Field

[0001] The invention belongs to the technical field of removing metal impurities in quartz glass, and particularly relates to a device for removing metal impurities in quartz glass using high voltage and a removal method thereof. Background Art

[0002] Quartz glass is a special industrial technical glass composed of a single component of silicon dioxide. It has a series of excellent physical and chemical properties. The main raw material of quartz glass is high-purity quartz sand (such as crystal, silica, etc.), and synthetic silane can also be used. These raw materials are made into quartz glass through high-temperature melting or chemical vapor deposition processes.

[0003] The reasons why metal impurities in quartz glass need to be removed are mainly due to the following reasons: the presence of metal impurities in quartz glass will reduce its light transmittance. These impurities may absorb or scatter light, resulting in a decrease in the light transmittance of quartz glass, affecting its application in optical instruments, optical fiber communications and other fields; metal impurities will affect the thermal properties of quartz glass. For example, alkali metal impurities have a strong fluxing effect in molten quartz glass, which may cause thermal cracks or deformation of quartz glass at high temperatures. In addition, metal impurities may also affect the thermal conductivity of quartz glass, limiting its use in high temperature environments; quartz glass, as an excellent insulating material, is widely used in the electronics industry. However, the presence of metal impurities will destroy its electrical insulation and lead to unstable electrical properties. Especially in the semiconductor manufacturing process, the mixing of metal impurities may cause device performance degradation or failure. For this reason, a high-voltage removal device and a removal method for removing metal impurities in quartz glass are proposed. Summary of the invention

[0004] The object of the present invention is to provide a high voltage removal device and a removal method for removing metal impurities in quartz glass to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A high voltage removal device for removing metal impurities in quartz glass, comprising a quartz tube, and also comprising:

[0007] A machine tool, which controls the entire device, and includes a main body, a fixed chuck, a movable chuck, a chuck movable slide rail, a blowtorch support body, a blowtorch support slide rail, a positive electrode movable support body, a positive electrode movable support slide rail and a controller;

[0008] The impurity migration and removal device controls the oxyhydrogen flame and the ultra-high DC voltage to work and realizes automated operation. The impurity migration and removal device includes an oxyhydrogen flame quartz blowtorch and a positive electrode conduit. The oxyhydrogen flame quartz blowtorch is provided with a metal lampshade, and the metal lampshade is connected to a negative electrode line of an ultra-high DC voltage. The tail of the oxyhydrogen flame quartz blowtorch is connected to an oxygen pipeline and a hydrogen pipeline. The positive electrode conduit is provided with a positive electrode line of an ultra-high DC voltage inside and a tungsten wire at the end.

[0009] Preferably, the movable chuck is driven to rotate by a motor, and the movable chuck as a whole is driven by the motor and slides back and forth on the chuck moving slide rail, which is controlled by the controller.

[0010] Preferably, the blowtorch support body is used to fix the oxyhydrogen flame quartz blowtorch, and the blowtorch support body is driven by a motor to slide back and forth on the blowtorch support slide rail and is controlled by the controller.

[0011] Preferably, the positive electrode movable bracket body is used to clamp the positive electrode conduit, and the positive electrode conduit is driven by a motor to move longitudinally, and moves synchronously with the longitudinal direction of the blowtorch bracket body during movement. The lower base of the positive electrode movable bracket body is driven by a motor to slide horizontally left and right on the positive electrode movable bracket slide rail, which is controlled by the controller.

[0012] Preferably, the oxygen pipeline and the hydrogen pipeline are connected to the gas electric valves respectively.

[0013] Preferably, the positive electrode conduit has insulating and supporting functions, a positive electrode line with an ultra-high DC voltage passes through the interior of the positive electrode conduit, and a tungsten wire is connected to the end of the positive electrode line.

[0014] Preferably, the power on or off of the negative and positive lines and the ignition and extinguishing of the oxyhydrogen flame quartz burner are all controlled by the controller.

[0015] A method for removing metal impurities from quartz glass by high voltage removal device, comprising:

[0016] Step 1: Under the automatic control of the controller, the oxyhydrogen flame quartz burner and the tungsten filament move to the left to reset, the positive electrode movable bracket body moves to the center point to reset, and the two ends of the quartz tube are respectively installed on the fixed chuck and the movable chuck;

[0017] Step 2: Start the machine, the fixed chuck and the movable chuck drive the quartz tube to rotate, the positive electrode movable bracket body moves left or right to the set position, the hydrogen-oxygen flame quartz blowtorch ignites to heat the quartz tube, and the negative electrode circuit and the positive electrode circuit are energized;

[0018] After heating to the set time, the oxyhydrogen flame quartz burner and the tungsten filament move longitudinally to the moving chuck at the other end and automatically stop, the oxyhydrogen flame quartz burner is extinguished, and the negative and positive lines are powered off;

[0019] Step 3: Move the oxyhydrogen flame quartz blowtorch and tungsten filament to the left and reset, reset the positive pole moving bracket body to the center point, remove the metal impurities in the quartz tube, disassemble and replace the quartz tube, start it, and repeat the above cycle.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention heats the quartz tube by using a hydrogen-oxygen flame or other heat sources. The heating area has an ultra-high DC voltage, the quartz glass is softened or in a semi-molten state, and the metal ions can move in a direction under the ultra-high voltage electric field, so that the metal impurity ions inside the quartz glass can be effectively removed, thereby further improving the purity of the quartz glass to a level that cannot be purified in the original purification stage (crystal state). BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural diagram of the present invention;

[0023] Figure 2 This is a structural diagram of the migration of metal impurity ions in the quartz glass tube wall under ultra-high DC voltage.

[0024] In the figure: 1. machine tool; 101. main body; 102. fixed chuck; 103. movable chuck; 104. chuck movable slide; 105. blowtorch bracket body; 106. blowtorch bracket slide; 107. positive electrode movable bracket body; 108. positive electrode movable bracket slide; 109. controller; 2. impurity migration and removal device; 201. hydrogen-oxygen flame quartz blowtorch; 202. positive electrode conduit; 2011. metal lampshade; 2012. negative electrode line; 2013. oxygen pipeline; 2014. hydrogen pipeline; 2021. positive electrode line; 2022. tungsten filament; 3. quartz tube. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] Embodiment 1

[0027] like Figure 1 , Figure 2As shown, a high voltage removal device for removing metal impurities in quartz glass includes a quartz tube 3 and a machine tool 1, which controls the entire device. The machine tool 1 includes a main body 101, a fixed chuck 102, a movable chuck 103, a chuck movable slide rail 104, a blowtorch support body 105, a blowtorch support slide rail 106, a positive electrode movable support body 107, a positive electrode movable support slide rail 108 and a controller 109;

[0028] The present invention is further specifically described in detail. The mobile chuck 103 is driven to rotate by a motor. The mobile chuck 103 is driven by the motor as a whole and slides forward and backward on the chuck moving slide rail 104, which is controlled by the controller 109. The burner bracket body 105 is used to fix the hydrogen-oxygen flame quartz burner 201. The burner bracket body 105 is driven by the motor to slide forward and backward on the burner bracket slide rail 106, which is controlled by the controller 109. The positive electrode mobile bracket body 107 is used to clamp the positive electrode conduit 202, and the positive electrode conduit 202 is driven by the motor to move longitudinally. When moving, it moves synchronously with the burner bracket body 105 longitudinally. The lower base of the positive electrode mobile bracket body 107 is driven by the motor to slide horizontally left and right on the positive electrode mobile bracket slide rail 108, which is controlled by the controller 109.

[0029] like Figure 1 , Figure 2 As shown, the impurity migration and removal device 2 controls the hydrogen-oxygen flame and the ultra-high DC voltage to work and realizes automatic operation. The impurity migration and removal device 2 includes a hydrogen-oxygen flame quartz blowtorch 201 and a positive electrode conduit 202. The hydrogen-oxygen flame quartz blowtorch 201 is provided with a metal lampshade 2011, and the metal lampshade 2011 is connected with a negative electrode line 2012 of an ultra-high DC voltage. The tail of the hydrogen-oxygen flame quartz blowtorch 201 is connected with an oxygen pipeline 2013 and a hydrogen pipeline 2014. The positive electrode conduit 202 is provided with a positive electrode line 2021 of an ultra-high DC voltage inside and a tungsten wire 2022 at the end.

[0030] The present invention further specifically describes that the oxygen pipeline 2013 and the hydrogen pipeline 2014 are respectively connected to the gas electric valve, the positive electrode conduit 202 has the functions of insulation and support, the positive electrode conduit 202 is penetrated by the positive electrode line 2021 of ultra-high DC voltage, the end of the positive electrode line 2021 is connected to the tungsten wire 2022, and the power on or off of the negative electrode line 2012 and the positive electrode line 2021 and the ignition and extinguishing of the hydrogen-oxygen flame quartz burner 201 are all controlled by the controller 109;

[0031] As can be seen from the above, under the automatic control of the controller 109, the oxyhydrogen flame quartz burner 201 and the tungsten filament 2022 move to the left to reset, the positive pole movable bracket body 107 moves the center point to reset, and the two ends of the quartz tube 3 are respectively mounted on the fixed chuck 102 and the movable chuck 103; when it is turned on, the fixed chuck 102 and the movable chuck 103 drive the quartz tube 3 to rotate, the positive pole movable bracket body 107 moves left or right to the set position, the oxyhydrogen flame quartz burner 201 ignites to heat the quartz tube 3, and the negative pole circuit 2012 The positive electrode circuit 2021 is energized; after heating to the set time, the oxyhydrogen flame quartz burner 201 and the tungsten filament 2022 move longitudinally to the movable chuck 103 at the other end and stop automatically, the oxyhydrogen flame quartz burner 201 is extinguished, and the negative electrode circuit 2012 and the positive electrode circuit 2021 are powered off; the oxyhydrogen flame quartz burner 201 and the tungsten filament 2022 move to the left side to reset, the positive electrode movable bracket body 107 moves to the center point to reset, the metal impurities in the quartz tube 3 are removed, the quartz tube 3 is disassembled and taken out for replacement, and the start is started, and the above cycle is repeated;

[0032] The quartz tube 3 is heated by spraying hydrogen-oxygen flame from the hydrogen-oxygen flame quartz blowtorch 201. The metal impurities in the quartz in the high-temperature purification zone migrate from the positive electrode to the negative electrode under the ultra-high DC voltage during heating, so that the metal impurities migrate from the inner surface to the outer surface or to remove and purify the metal impurities.

[0033] It should be noted that: the heating method of the present invention includes but is not limited to hydrogen-oxygen flame, and the ultra-high DC voltage is not limited to a specific volt;

[0034] Quartz glass or quartz sand is a non-conductor in solid state, and impurity ions cannot migrate in it. However, quartz glass melt or molten state is a conductor, and impurity ions in it can migrate under the action of an external electric field, so as to remove impurity ions and further improve the purity of quartz glass, and further purify impurity elements that cannot be purified in the quartz raw material processing and purification stage;

[0035] The present invention heats the quartz tube by using a hydrogen-oxygen flame or other heat source, and the heating area has an ultra-high DC voltage, the quartz glass is softened or in a semi-molten state, and the metal ions can move in a direction under the ultra-high voltage electric field, so that the metal impurity ions inside the quartz glass can be effectively removed, thereby further improving the purity of the quartz glass to a level that cannot be purified in the original purification stage (crystal state).

[0036] Embodiment 2

[0037] A method for removing metal impurities from quartz glass by high voltage removal device, comprising:

[0038] Step 1: Under the automatic control of the controller 109, the oxyhydrogen flame quartz burner 201 and the tungsten filament 2022 are moved to the left to reset, the positive electrode movable bracket body 107 moves the center point to reset, and the two ends of the quartz tube 3 are respectively installed on the fixed chuck 102 and the movable chuck 103;

[0039] Step 2: Start the process, the fixed chuck 102 and the movable chuck 103 drive the quartz tube 3 to rotate, the positive electrode movable bracket body 107 moves left or right to the set position, the hydrogen-oxygen flame quartz torch 201 ignites to heat the quartz tube 3, and the negative electrode circuit 2012 and the positive electrode circuit 2021 are energized;

[0040] After heating to the set time, the oxyhydrogen flame quartz torch 201 and the tungsten wire 2022 move longitudinally to the moving chuck 103 at the other end and automatically stop, the oxyhydrogen flame quartz torch 201 is turned off, and the negative electrode circuit 2012 and the positive electrode circuit 2021 are powered off;

[0041] Step 3: The oxyhydrogen flame quartz burner 201 and the tungsten filament 2022 are moved to the left side and reset, the positive electrode movable bracket body 107 moves the center point to reset, the metal impurities in the quartz tube 3 are removed, the quartz tube 3 is disassembled and taken out, and replaced, and the startup is started, and the above cycle is repeated.

[0042] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high voltage removal device for removing metal impurities in quartz glass, characterized in that: The invention comprises a quartz tube (3), and further comprises: A machine tool (1), wherein the machine tool (1) controls the entire device, and comprises a main body (101), a fixed chuck (102), a movable chuck (103), a chuck movable slide rail (104), a blowtorch support body (105), a blowtorch support slide rail (106), a positive electrode movable support body (107), a positive electrode movable support slide rail (108) and a controller (109); The impurity migration and removal device (2) controls the oxyhydrogen flame and the ultra-high direct current voltage to work and realizes automated operation. The impurity migration and removal device (2) comprises an oxyhydrogen flame quartz blowtorch (201) and a positive electrode conduit (202). The oxyhydrogen flame quartz blowtorch (201) is provided with a metal lampshade (2011), and the metal lampshade (2011) is connected to a negative electrode line (2012) of an ultra-high direct current voltage. The tail of the oxyhydrogen flame quartz blowtorch (201) is connected to an oxygen pipeline (213) and a hydrogen pipeline (2014). The positive electrode conduit (202) is provided with a positive electrode line (2021) of an ultra-high direct current voltage inside and a tungsten wire (2022) at the end.

2. The high voltage removal device for removing metal impurities in quartz glass according to claim 1, characterized in that: The movable chuck (103) is driven to rotate by a motor, and the movable chuck (103) is driven as a whole by the motor to slide forward and backward on the chuck moving slide rail (104), and is controlled by the controller (109).

3. The high voltage removal device for removing metal impurities in quartz glass according to claim 1, characterized in that: The burner support body (105) is used to fix the hydrogen-oxygen flame quartz burner (201). The burner support body (105) is driven by a motor to slide forward and backward on the burner support slide rail (106) and is controlled by the controller (109).

4. The high voltage removal device for removing metal impurities in quartz glass according to claim 1, characterized in that: The positive electrode movable support body (107) is used to clamp the positive electrode conduit (202), and is driven by a motor to move the positive electrode conduit (202) longitudinally, and moves synchronously with the burner support body (105) longitudinally during movement. The lower base of the positive electrode movable support body (107) is driven by a motor to slide horizontally left and right on the positive electrode movable support slide rail (108), and is controlled by the controller (109).

5. The high voltage removal device for removing metal impurities in quartz glass according to claim 1, characterized in that: The oxygen pipeline (2013) and the hydrogen pipeline (2014) are respectively connected to the gas electric valves.

6. The high voltage removal device for removing metal impurities in quartz glass according to claim 1, characterized in that: The positive electrode conduit (202) has the functions of insulation and support, and a positive electrode line (2021) with an ultra-high direct current voltage passes through the interior of the positive electrode conduit (202), and a tungsten wire (2022) is connected to the end of the positive electrode line (2021).

7. The high voltage removal device for removing metal impurities in quartz glass according to claim 6, characterized in that: The power on or off of the negative electrode circuit (2012) and the positive electrode circuit (2021) as well as the ignition and extinguishing of the oxyhydrogen flame quartz burner (201) are all controlled by the controller (109).

8. A method for removing metal impurities in quartz glass using a high voltage removal device as claimed in any one of claims 1 to 7, characterized in that: Included are: Step 1: Under the automatic control of the controller (109), the oxyhydrogen flame quartz burner (201) and the tungsten filament (2022) are moved to the left side for resetting, the positive electrode movable support body (107) moves the center point for resetting, and the two ends of the quartz tube (3) are respectively mounted on the fixed chuck (102) and the movable chuck (103); Step 2: Start the process, the fixed chuck (102) and the movable chuck (103) drive the quartz tube (3) to rotate, the positive electrode movable bracket body (107) moves left or right to the set position, the hydrogen-oxygen flame quartz torch (201) ignites to heat the quartz tube (3), and the negative electrode circuit (212) and the positive electrode circuit (212) are energized; After heating to a set time, the oxyhydrogen flame quartz burner (201) and the tungsten filament (2022) move longitudinally to the movable chuck (103) at the other end and automatically stop, the oxyhydrogen flame quartz burner (201) is extinguished, and the negative electrode circuit (2012) and the positive electrode circuit (2021) are powered off; Step 3: The oxyhydrogen flame quartz burner (201) and the tungsten filament (2022) are moved to the left side and reset, the positive electrode movable bracket body (107) moves the center point to reset, the metal impurities in the quartz tube (3) are removed, the quartz tube (3) is disassembled and replaced, and the start is started, and the above cycle is repeated.

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