Vacuum pump exhaust monitoring system
By setting up an annular passage and a gas detection structure at the connection of the exhaust pipe at the tail of the vacuum pump, a monitoring circuit is formed, which solves the problem of difficult-to-detect gas leakage at the connection of the exhaust pipe at the tail of the vacuum pump, and realizes timely detection and alarm, delaying the occurrence of leakage and equipment failures.
Patent Information
- Application Number
- CN202510219554.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-26
- Publication Date
- 2025-04-11
AI Technical Summary
Gas leakage is prone to the connection of the exhaust pipe at the tail of the vacuum pump, especially in the long exhaust pipes, where the leaking gas is not easy to detect, which may lead to safety hazards and equipment failures.
A vacuum pump exhaust monitoring system is designed, and an annular passage is set up between the exhaust pipes at the tail of the vacuum pump, and the intake pipe and exhaust pipe are connected at its intake port and exhaust port to form a monitoring circuit and use inert gas to detect gas leakage.
It can promptly detect gas leakage at the connection of the exhaust pipe at the tail of the vacuum pump, trigger an alarm, delay the leakage of harmful or combustible gases, and reduce the time for equipment downtime.
Smart Images
Figure CN119801881A_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the technical field of exhaust systems of vacuum pumps, and in particular relates to an exhaust monitoring system for a vacuum pump capable of detecting gas leakage. Background Art
[0002] The vacuum system involves the discharge of toxic, harmful or dangerous flammable gases. These gases need to be discharged through the exhaust pipeline, and then treated with secondary treatment to remove harmful components before being discharged.
[0003] Since the exhaust pipes in the factory are long, there are certain areas with elbows and straight connections, which are connected by seals and other connectors. Compared with the overall exhaust pipes, these pipe connection areas are the most prone to leakage. If leaks occur in these pipe connection areas, the colorless leaked gas is not easy to detect, and the leakage cannot be discovered immediately, which will cause certain safety problems and affect the operation of the vacuum pump or other equipment. In addition, if the leaked gas is toxic and harmful chemical gas, inhalation hazards will occur. If the leaked gas is a flammable gas, it may burn or explode when combined with oxygen or flammable and explosive gases in the air. Summary of the invention
[0004] The present disclosure aims to solve at least one of the technical problems existing in the prior art and provide a vacuum pump exhaust monitoring system.
[0005] The present disclosure provides a vacuum pump exhaust monitoring system, the system comprising:
[0006] An annular channel is provided at the connection joint between the exhaust pipe at the tail of the vacuum pump, and the annular channel has an air inlet and an exhaust port;
[0007] A first sealing member and a second sealing member are respectively arranged on both sides of the annular channel, and are used to seal the inner cavity of the exhaust pipe and the annular channel, and the annular channel and the atmosphere side, respectively;
[0008] An air intake pipeline and an exhaust pipeline are respectively connected to the air intake port and the exhaust port of the annular channel, and a gas detection structure is provided on the air intake pipeline and / or the exhaust pipeline;
[0009] The inert gas enters the annular channel from the air intake pipeline and is then discharged through the exhaust pipeline to form a monitoring loop. Whether a gas leak occurs at the connection joint is determined by the detection result of the gas detection structure.
[0010] Optionally, when the connection joint between the two exhaust pipes is a flange, the connection end surface of the flange is respectively provided with the annular channel, the first annular groove and the second annular groove along its circumference;
[0011] The first annular groove is located between the annular channel and the inner cavity of the exhaust pipe, and the first sealing member is embedded in the first annular groove;
[0012] The second annular groove is located between the annular channel and the atmosphere side, and the second sealing member is embedded in the second annular groove.
[0013] Optionally, an inner annular support and an outer annular support connected to the inner annular support are provided between the two flanges; wherein,
[0014] The annular channel is located between the inner annular support and the outer annular support in the radial direction;
[0015] The first sealing member is arranged on the inner annular support;
[0016] The second sealing member is arranged on the outer annular support.
[0017] Optionally, an anti-extrusion bracket is further connected to a side of the outer annular bracket facing away from the inner annular bracket.
[0018] Optionally, when one of the exhaust pipe connection ends of the two exhaust pipes is inserted into the other exhaust pipe connection end, the two connection ends form the connection joint;
[0019] The annular channel, the first annular groove and the second annular groove are respectively provided on a curved surface of one of the connecting ends facing the other connecting end along its circumference;
[0020] The first annular groove is located between the annular channel and the inner cavity of the exhaust pipe, and the first sealing member is embedded in the first annular groove;
[0021] The second annular groove is located between the annular channel and the atmosphere side, and the second sealing member is embedded in the second annular groove.
[0022] Optionally, the two exhaust pipes are respectively provided with a first fixing portion and a second fixing portion at a connection point, and the first fixing portion and the second fixing portion are connected by a fixing member.
[0023] Optionally, the gas detection structure is a pressure gauge.
[0024] Optionally, the gas detection structure is a flow meter.
[0025] Optionally, the air intake pipeline and the exhaust pipeline are both connected to an air storage tank, and the air intake pipeline is provided with an air pump.
[0026] Optionally, the gas detection structure is also electrically connected to a controller, and the controller includes a monitoring module and an alarm module; wherein,
[0027] The monitoring module is used to monitor the detection result of the gas detection structure;
[0028] The alarm module is used to send out an alarm signal according to the detection result.
[0029] The present disclosure provides a vacuum pump exhaust monitoring system, which provides an annular channel at the connecting joint between the exhaust pipes at the rear of the vacuum pump, and provides an air intake pipeline and an exhaust pipeline at the air intake port and the exhaust port of the annular channel. Inert gas is introduced through the air intake pipeline and discharged to the exhaust pipeline through the annular channel to form a monitoring loop. When gas leakage occurs at the connection of the exhaust pipe at the rear of the vacuum pump, the gas detection structure can detect the gas leakage result, and determine whether gas leakage occurs in the connection structure according to the detection result. The system can timely detect the leakage problem at the connection of the exhaust pipe at the rear of the vacuum pump, trigger an alarm, facilitate detection and maintenance, delay the leakage of harmful gas or flammable gas, and at the same time delay the downtime of the vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] Figure 1 It is a structural schematic diagram of a vacuum pump exhaust monitoring system according to Embodiment 1 of the present disclosure;
[0031] Figure 2 It is a schematic structural diagram of the vacuum pump exhaust monitoring system at the exhaust pipe connection of Example 2 of the present disclosure;
[0032] Figure 3 It is a schematic structural diagram of the vacuum pump exhaust monitoring system at the exhaust pipe connection of Example 2 of the present disclosure;
[0033] Figure 4 It is a schematic structural diagram of the vacuum pump exhaust monitoring system at the exhaust pipe connection of Example 3 of the present disclosure;
[0034] Figure 5 It is a schematic structural diagram of the vacuum pump exhaust monitoring system at the exhaust pipe connection of Example 3 of the present disclosure;
[0035] Figure 6 It is a schematic structural diagram of the vacuum pump exhaust monitoring system at the exhaust pipe connection of Example 4 of the present disclosure;
[0036] Figure 7 This is a schematic diagram of the sealing structure in the vacuum pump exhaust monitoring system of Example 4 of the present disclosure. DETAILED DESCRIPTION
[0037] In order to enable those skilled in the art to better understand the technical solution of the present disclosure, the present disclosure is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. It should be understood that the specific embodiments described herein are only used to explain the present disclosure and are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
[0038] In some descriptions of the present disclosure, the terms "include" or "comprises" and the like neither limit the mentioned shapes, numbers, steps, actions, operations, components, originals and / or their groups, nor exclude the presence or addition of one or more other different shapes, numbers, steps, actions, operations, components, originals and / or their groups.
[0039] In some descriptions of the present disclosure, the terms “first” and “second” are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number and order of the indicated technical features.
[0040] In some descriptions of the present disclosure, terms such as "installed", "connected", "connected" or "fixed" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect through an intermediate medium, and may be internal connections between two elements or mutual interactions between two elements.
[0041] In some descriptions of the present disclosure, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or position relationships based on the orientations or position relationships shown in the accompanying drawings and are only used to indicate relative position relationships. When the absolute position of the object being described changes, the relative position relationship may also change accordingly.
[0042] like Figures 1 to 6As shown, the present disclosure proposes a vacuum pump exhaust monitoring system capable of detecting gas leakage, the system comprising: an annular channel 61, a first seal 621, a second seal 622, an intake pipe 41 and an exhaust pipe 51; wherein the annular channel 61 is arranged at a connecting joint between the exhaust pipes at the tail of the vacuum pump 11, and the annular channel 61 has an intake port 65 and an exhaust port 66; the first seal 621 and the second seal 622 are respectively arranged on both sides of the annular channel 61, and the first seal 621 is used to seal between the inner cavities of the two exhaust pipes and the annular channel 61, and the second seal 622 is used to seal between the annular channel 61 and the external atmosphere; the intake pipe 41 is connected to the intake port of the annular channel 61, the exhaust pipe 51 is connected to the exhaust port of the annular channel 61, and a gas detection structure is provided on the intake pipe 41 and / or the exhaust pipe 51. Based on the above structure, the inert gas enters the annular channel 61 from the intake pipe 41 and is then discharged through the exhaust pipe 51 to form a monitoring loop. By judging whether the detection data of the gas detection structure changes, it can be concluded whether gas leakage occurs at the connection joint.
[0043] In this embodiment, an exhaust monitoring system is provided at the connection between the exhaust pipes at the rear end of the vacuum pump, and an inert gas of stable pressure is introduced into the intake pipe of the exhaust monitoring system. By judging whether the detection data of the gas detection structure changes, it is determined whether a gas leakage occurs in the connecting joint. For example, when there is no gas leakage, the inert gas enters the annular channel from the intake pipe and is then discharged through the exhaust pipe. At this time, the value of the gas detection structure does not change and remains stable. When the gas leaks at the connection of the exhaust pipe at the rear end of the vacuum pump, the leaked gas flows from the inner cavity of the exhaust pipe through the first sealing component into the annular channel and further enters the intake pipe or the exhaust pipe, thereby causing the detection data of the gas detection structure to change, and it is inferred that a gas leakage occurs in the connecting joint. Based on the system, gas leakage can be detected in the first time, and maintenance personnel can promptly check and maintain the pipeline to avoid the occurrence of safety accidents.
[0044] It should be noted that the system of this embodiment is used to monitor whether there is gas leakage at the exhaust pipe connection joints between the vacuum pump and the combustion equipment. These exhaust pipes are located at the tail of the vacuum pump and are used to discharge the process gas of the vacuum pump. Based on this system, it can accurately determine the gas leakage situation and promptly check and repair the exhaust pipes.
[0045] It should be further explained that the present embodiment does not specifically limit the location of the system. The vacuum pump exhaust monitoring system can be installed at the connection joints of all exhaust pipes installed between the tail of the vacuum pump and the factory services. The vacuum pump exhaust monitoring system can also be installed at two exhaust pipe connection joints where there is a risk of gas leakage according to actual needs.
[0046] It should be noted that one side of the annular channel is sealed with the inner cavity of the exhaust pipe by a first seal, so when the first seal is damaged or broken and the gas in the inner cavity of the exhaust pipe leaks, the gas leakage can be detected in time. In addition, the other side of the annular channel is also sealed with the atmosphere by a second seal, so when the second seal is damaged or broken, it can be detected in time whether air has entered the annular channel.
[0047] It should be noted that the present embodiment does not specifically limit the gas detection structure and its setting position. The gas detection structure can be a pressure gauge or a flow meter, or can include both a pressure gauge and a flow meter. When the pressure gauge fails, the flow meter can continue to obtain gas data to improve the accuracy of the detection data. Of course, the pressure gauge and / or the flow meter can be set in the intake pipeline, or in the exhaust pipeline, or in both the intake pipeline and the exhaust pipeline.
[0048] For example, Figure 1 As shown, an intake pressure gauge 42 and an intake flow meter 43 are provided in the intake pipeline 41 to obtain the pressure value and flow value of the gas at the same time. When one or both of them change, it is determined that the connection joint has a gas leak. An exhaust pressure gauge 52 is provided in the exhaust pipeline 51 to obtain the pressure value of the gas. Of course, in other embodiments, an exhaust flow meter can also be provided in the exhaust pipeline at the same time, and this is not specifically limited.
[0049] It is still necessary to explain that, in order to analyze and judge the detection values of the pressure gauge or flow meter, a controller can also be set to automatically judge whether gas leakage occurs at the connection joints between the exhaust pipes, thereby improving the judgment efficiency.
[0050] For example, Figure 1 As shown, the intake pressure gauge 42, the intake flow meter 43 and the exhaust pressure gauge 52 are all electrically connected to the controller 33, and the controller includes a monitoring module and an alarm module, wherein the monitoring module is used to monitor the pressure value and flow value of the pressure gauge and the flow meter respectively; the alarm module is used to send an alarm signal according to the pressure value and the flow value.
[0051] Furthermore, if Figures 1 to 6 As shown, the air intake pipeline 41 should also be connected to the air storage tank 31, and an air pump 32 is arranged on the connected air intake pipeline. The air storage tank 31 provides inert gas, and the air pump 32 extracts the inert gas from the air storage tank 31, and the inert gas flows into the annular channel 61 through the air intake pipeline 41. Of course, the air storage tank 31 here can also be connected to the exhaust pipeline 51, so that the inert gas flows out of the air storage tank 31, enters the annular channel 61 arranged between the two exhaust pipes through the air intake pipeline 41, and then flows back to the air storage tank 31 through the exhaust pipeline 51, forming a gas monitoring loop, and the inert gas can be recycled.
[0052] It should be understood that when a vacuum pump exhaust monitoring system is provided on multiple connection joints, each air intake pipeline can be connected to only one air storage tank, that is, multiple air intake pipelines can be connected to a total air intake pipeline, the total air intake pipeline is connected to the air storage tank, and an air pump is provided on the total air intake pipeline. At the same time, multiple exhaust pipelines can also be connected to a total exhaust pipeline, the total exhaust pipeline is connected to the air storage tank, saving air storage equipment and pipelines, and reducing costs.
[0053] It should also be understood that, in order to facilitate the connection of each intake pipeline with the total intake pipeline, an intake connector can be provided at the intake end of each intake pipeline, and multiple intake pipelines can be connected to the total intake pipeline through the intake connector. Similarly, the connection method of each exhaust pipeline with the total exhaust pipeline can also be the same as above. In addition, it is not difficult to understand that for the annular channel, an intake connector and an exhaust connector can also be provided at its intake port and exhaust port, respectively, for example, an intake connecting pipeline or an intake connecting connector, etc., through which the intake pipeline, exhaust pipeline and annular channel can be quickly connected to improve operating efficiency.
[0054] It should also be understood that, since the annular channel is provided at the connection joint between the two exhaust pipes, the annular channel can be provided at the connection end of the connection joint to form a gas passage that can conduct the inert gas. It should be noted that the annular channel here needs to be specifically provided according to the type of the connection joint, and its provision position is not specifically limited. For example, when two exhaust pipes are connected by flanges, the connection joint at this time is a flange, and the annular channel should be provided at the connection end of the flange; for another example, when two exhaust pipes are connected by bolts and one exhaust pipe is inserted into the other exhaust pipe, the two exhaust pipes are connected by their respective ends, that is, the connection joint is the connection end of the exhaust pipe, and an annular channel should be provided at the connection end of the exhaust pipe.
[0055] In some preferred embodiments, when flange connection is adopted between two exhaust pipes, the side where the two flanges are connected is the connection end, and an annular channel, a first annular groove and a second annular groove are respectively arranged along its circumference at the connection end of one of the flanges. Of course, the first annular groove and the second annular groove can also be arranged along its circumference at the connection end face of the other flange, the first annular groove is located between the annular channel and the inner cavity of the exhaust pipe, the first sealing member is embedded in the first annular groove, the second annular groove is located between the annular channel and the atmosphere side, and the second sealing member is embedded in the second annular groove. In this case, an air inlet and an exhaust port connected to the annular channel should be provided on the side of the flange away from the connection end face, the air inlet is connected to the air inlet pipeline, and the exhaust port is connected to the exhaust pipeline to form a monitoring circuit. Of course, an air inlet connector can also be arranged on the air inlet to facilitate connection with the air inlet pipeline, and an exhaust connector can also be arranged on the exhaust port to facilitate connection with the exhaust pipeline.
[0056] In other preferred embodiments, when flange connection is adopted between two exhaust pipes, the side where two connecting flanges are connected is a connecting end, an annular channel is respectively arranged along the circumference of the connecting end of one of the flanges, an inner annular bracket and an outer annular bracket connected to the inner annular bracket are arranged between the two flanges, the annular channel is located between the inner annular bracket and the outer annular bracket in the radial direction, the first sealing member is arranged on the inner annular bracket, and the second sealing member is arranged on the outer annular bracket. In other words, in addition to being embedded in the annular groove of the flange connecting end, the first sealing member and the second sealing member can also be arranged on the bracket structure, as long as the sealing of the annular channel can be achieved.
[0057] In other preferred embodiments, when bolts are used to connect the two exhaust pipes and one exhaust pipe is inserted into the other exhaust pipe, an annular channel, a first annular groove and a second annular groove can be respectively opened along the circumference of the curved surface of the connecting end of one exhaust pipe facing the other connecting end, the first annular groove is located between the annular channel and the inner cavity of the exhaust pipe, the first sealing member is embedded in the first annular groove, the second annular groove is located between the annular channel and the atmosphere side, and the second sealing member is embedded in the second annular groove. For example, an annular channel, a first annular groove and a second annular groove are arranged on the curved surface of the connecting end of the exhaust pipe inserted inside, or a channel, a first annular groove and a second annular groove are arranged on the connecting end of the exhaust pipe sleeved outside. It should be noted that in the above two cases, an air inlet and an exhaust port connected to the annular channel should be arranged on the exhaust pipe sleeved outside, the air inlet is connected to the air inlet pipeline, and the exhaust port is connected to the exhaust pipeline to form a monitoring loop. Similarly, it is also preferred that an air inlet connector can be arranged on the air inlet to facilitate connection with the air inlet pipeline, and an exhaust connector can be arranged on the exhaust port to facilitate connection with the exhaust pipeline.
[0058] Based on the above structure, the vacuum pump is a negative pressure environment, and the annular channel in the vacuum pump exhaust monitoring system is fed with an inert gas with a constant pressure. The pressure here can be set according to actual needs. For example, assuming that the pressure here is higher than the atmospheric pressure, in this way, when there is a problem at the connection of the exhaust pipe at the rear of the vacuum pump, for example, if the connection joint or the first seal is damaged or broken, the pressure in the annular channel is greater than the pressure in the exhaust pipe cavity, and the inert gas will be quickly absorbed into the exhaust pipe cavity. If the second seal or the connection joint is damaged or broken, and the outside is the atmosphere, the inert gas in the annular channel will flow out through the first seal, and the pressure value or flow value will fluctuate. Based on the real-time monitoring of the pressure value and flow value by the pressure gauge or flow meter, it can be judged that the gas has leaked, and the location of the damage or breakage can be further determined. The system will sound an alarm, and the gas leakage signal can also be transmitted to the main unit through the controller according to demand, so that the abnormal situation of the exhaust pipe at the rear of the vacuum pump can be discovered in the first time.
[0059] The system of this embodiment can timely monitor the gas leakage from the exhaust pipe at the rear of the vacuum pump, accurately locate the gas leakage position, and facilitate timely maintenance. In addition, in the initial period of time, the leaked gas is first discharged into the vacuum pump exhaust monitoring system, which can form a protective barrier, effectively blocking the further leakage of harmful gases, and can delay the leakage of harmful gases into the air. In addition, when the exhaust pipe at the rear of the vacuum pump leaks, process operations are being carried out in the chamber of the vacuum pump. If the exhaust pipe suddenly leaks, it will cause the pressure in the vacuum pump to change, affecting the vacuum degree in the chamber. The system based on this embodiment can prevent the vacuum pump from shutting down immediately by continuously introducing nitrogen into the annular channel. At the same time, an alarm is issued to start the standby vacuum pump in time, delaying the downtime of the vacuum pump, so that the shutdown and downtime of the vacuum pump can be controlled.
[0060] The vacuum pump exhaust monitoring system will be further described below in conjunction with specific embodiments:
[0061] Example 1
[0062] like Figure 1 As shown, the tail exhaust pipe of the vacuum pump 11 includes a first exhaust pipe 21, a second exhaust pipe 22 and a third exhaust pipe 23. Of course, it can also include multiple other exhaust pipes, which are not shown here. The multiple exhaust pipes are all connected to the exhaust pipeline 20 of the factory service. The first exhaust pipe 21 and the second exhaust pipe 22 are connected by a first connecting joint 24, and the second exhaust pipe 22 and the third exhaust pipe 23 are connected by a second connecting joint 25. The first connecting joint 24 and the second connecting joint 25 are both provided with a vacuum pump exhaust monitoring system.
[0063] The vacuum pump exhaust monitoring system includes: an annular channel, a first seal, a second seal, an intake pipe 41 and an exhaust pipe 51. The annular channel has an intake port and an exhaust port. The intake pipe 41 and the exhaust pipe 51 are respectively connected to the intake port and the exhaust port of the annular channel. The intake pipe 41 is provided with an intake pressure gauge 42 and an intake flow meter 43. The exhaust pipe 51 is provided with an exhaust pressure gauge 52. At the same time, the intake pressure gauge 42, the intake flow meter 43 and the exhaust pressure gauge 52 are electrically connected to the controller 33. The first seal and the second seal are respectively arranged on both sides of the annular channel, and the first seal is used to seal between the inner cavity of the exhaust pipe and the annular channel, and the second seal is used to seal between the annular channel and the external atmosphere.
[0064] For further information, please refer to Figure 1The intake pipes 41 provided at the first connecting joint 24 and the second connecting joint 25 are both connected to the total intake pipe 40, and the exhaust pipes 51 are both connected to the total exhaust pipe 50. The total exhaust pipe 50 and the total intake pipe 40 are connected to the gas storage tank 31. An air pump 32 is provided at the downstream position of the gas storage tank 31 for extracting the inert gas from the gas storage tank 31 and pumping it into each intake pipe 41.
[0065] Based on the above structure, when the vacuum pump 11 is working, the gas is discharged from the first exhaust pipe 21, and discharged to the exhaust pipeline 20 of the factory through the middle second exhaust pipe 22 and the third exhaust pipe 23 and other exhaust pipes. The connection joints between these exhaust pipes may have the hidden danger of leakage. Based on this, the vacuum pump exhaust monitoring system of this embodiment can realize the detection of leaked gas. The vacuum pump exhaust monitoring system forms a closed-loop control system. By providing a stable inert gas, the pressure of the system can be kept constant. The air pump 32 extracts the inert gas (for example, nitrogen) from the gas storage tank 31 and provides it to the total air intake pipeline 40, and then flows into different air intake pipelines 41 respectively. The inert gas further flows into the annular channel and is discharged to the total exhaust pipeline 50 through the exhaust pipeline 51. These discharged inert gases flow back to the gas storage tank 31. If leakage occurs in the first connecting joint 24 or the second connecting joint 25, the gas in the inner cavity of the exhaust pipe flows into the annular channel, or the external gas flows into the annular channel, etc. The intake pressure gauge 42, the exhaust pressure gauge 52 and the intake flow meter 43 can detect the changes in pressure and flow, and transmit the pressure value and flow value to the controller 33, thereby determining whether there is gas leakage at the exhaust pipe connection and further issuing an alarm signal.
[0066] It should be noted that this embodiment only takes two connecting joints as an example. In other embodiments, it may also include multiple exhaust pipes and multiple connecting joints. The same vacuum pump exhaust monitoring system may be set on multiple connecting joints, and the vacuum pump exhaust monitoring system may also be set on one or several of the connecting joints. They are not listed one by one here.
[0067] Example 2
[0068] This example takes the installation of a vacuum pump exhaust monitoring system at the connection joint between any two exhaust pipes as an example. Figure 2As shown, taking the first exhaust pipe and the second exhaust pipe as an example, the first exhaust pipe 21 and the second exhaust pipe 22 are used to discharge the tail gas of the vacuum pump, and the end of the first exhaust pipe 21 is inserted into the end of the second exhaust pipe 22. In this way, the connecting ends of the first exhaust pipe 21 and the second exhaust pipe 22 form a connecting joint, and an annular channel 61, a first annular groove and a second annular groove are respectively opened on the curved surface of the connecting end of the first exhaust pipe 21 along its circumference, wherein a first sealing ring is embedded in the first annular groove to form a first sealing member 621 for sealing the annular channel 61 and the inner cavity of the exhaust pipe, and a second sealing ring is embedded in the second annular groove to form a second sealing member 622 for sealing the annular channel 61 and the atmosphere side.
[0069] It should be noted that the annular channel, the first annular groove and the second annular groove are all grooves integrally opened along the curved surface of the exhaust pipe connection end, and each groove is integrally connected along the circumference of the connection end.
[0070] Furthermore, if Figure 2 As shown, the annular channel 61 has an air inlet 65 and an exhaust port 66 communicating with the outside, wherein the air inlet 65 and the exhaust port 66 penetrate the outer wall of the second exhaust pipe 22 to form a vent structure communicating with the outside, and the air inlet 65 is connected with an air inlet connector 63, through which it is convenient to communicate with the air inlet pipeline, and similarly, the exhaust connector 64 is connected at the exhaust port 66, through which it is convenient to communicate with the exhaust pipeline. Secondly, the air inlet pipeline and the exhaust pipeline are connected to the gas storage tank through the main air inlet pipeline and the main exhaust pipeline respectively.
[0071] Furthermore, if Figure 2 and Figure 3 As shown, the first exhaust pipe 21 and the second exhaust pipe 22 are provided with a first fixing portion 211 and a second fixing portion 221 at the connection between the two. The first fixing portion 211 can be a circular boss formed by the outer wall of the first exhaust pipe 21 extending radially outward; similarly, the second fixing portion 221 can be a circular boss formed by the end of the second exhaust pipe 22 extending radially outward; the first fixing portion 211 and the second fixing portion 221 are connected by a fixing member. In other words, in addition to the matching connection of the first exhaust pipe and the second exhaust pipe by the sleeved end portions, a fixing portion is also provided on the outside of the pipe, and the two pipes are fixedly connected by fixing members such as bolts.
[0072] Based on the above structure, an inert gas is introduced from the outside, and the gas enters the annular channel 61 through the air inlet connector 63 and the air inlet port 65. The annular channel 61 will be filled with gas, and then the gas will be discharged through the exhaust port 66 and the exhaust connector 64. When the first seal 621 and the second seal 622 have problems such as scratches, wear, corrosion, etc., then there will be gas flow, and the annular channel 61 is in a negative pressure state at this time. A constant pressure of inert gas is passed between the first seal 621 and the second seal 622. It is assumed here that the inert gas introduced is higher than the atmospheric pressure. Of course, the specific pressure value can be set according to the actual use. The right side of the first seal 621 and the two exhaust pipes are at the same pressure and are in a negative pressure state. The left side of the second seal 622 is atmospheric pressure. If the second seal 622 is damaged, the gas on the right side of the second seal 622 will flow to the left side of the second seal 622, that is, the pressure in the annular channel 61 will fluctuate, and the system can detect it. If there is a problem with the first seal 621, the gas pressure in the annular channel 61 on the left side of the first seal 621 is greater than that on the right side of the first seal 621, then the gas in the annular channel 61 will flow into the right side of the first seal 621, that is, the pressure or flow in the annular channel 61 will fluctuate, which the system can detect and then determine whether there is a gas leak at the connection joint of the exhaust pipe, and issue an alarm.
[0073] Example 3
[0074] This example takes the installation of a vacuum pump exhaust monitoring system at the connection joint between any two exhaust pipes as an example. Figure 4 As shown, taking the second exhaust pipe and the third exhaust pipe as an example, the second exhaust pipe 22 and the third exhaust pipe 23 are used to discharge the tail exhaust gas of the vacuum pump, and the second exhaust pipe 22 and the third exhaust pipe 23 are respectively connected by the first flange 71 and the second flange 72, so that the surfaces connected by the two flanges form a connecting end, and an annular groove is opened along the circumference of the connecting end of the first flange 71, which serves as an annular channel 61 for the circulation of inert gas. At the same time, a first annular groove and a second annular groove are opened along the circumference of the connecting end of the second flange 72, respectively, the first annular groove is located on the radial inner side of the annular channel 61, and the second annular groove is located on the radial outer side of the annular channel 61, wherein a first sealing ring is embedded in the first annular groove to form a first sealing member 621 for sealing the annular channel 61 and the inner cavity of the exhaust pipe, and a second sealing ring is embedded in the second annular groove to form a second sealing member 622 for sealing the annular channel 61 and the atmosphere side.
[0075] It should be noted that the annular groove and the annular groove of the present embodiment are grooves that are integrally opened along the circumference of the connecting end of the flange, and each groove is integrally connected along the circumference of the connecting end.
[0076] Furthermore, if Figure 4As shown, the annular channel 61 has an air inlet 65 and an exhaust port 66 connected to the outside, wherein the air inlet 65 and the exhaust port 66 penetrate the wall thickness of the first flange 71 away from its connecting end to form a vent structure connected to the outside, that is, an annular channel is opened at the connecting end of the first flange, and two vent structures are opened on the side of the first flange away from the connecting end to connect them to the annular channel, which serve as the air inlet 65 and the exhaust port 66 respectively, and an air inlet connector 63 is provided at the air inlet 65, and an air inlet connector joint 631 is provided at the air inlet end of the air inlet connector 63, which is convenient for connecting with the air inlet pipeline through the air inlet connector 63 and the air inlet connector joint 631. At the same time, an exhaust connector 64 is provided at the exhaust port 66, and an exhaust connector joint 641 is provided at the exhaust end of the exhaust connector 64, which is convenient for connecting with the exhaust pipeline through the exhaust connector 64 and the exhaust connector joint 641. Of course, the air inlet connector and the exhaust connector can be connecting pipelines.
[0077] Furthermore, if Figure 4 and Figure 5 As shown, a clamp 73 is provided outside the first flange 71 and the second flange 72 to fix the two flanges and improve the sealing performance.
[0078] Based on the above structure, an inert gas is introduced from the outside, and the gas enters the annular channel 61 through the air inlet connector 63 and the air inlet 65. The annular channel 61 is filled with gas, and then the gas is discharged through the exhaust port 66 and the exhaust connector 64. When the first seal 621 and the second seal 622 are scratched, worn, corroded, etc., gas leakage occurs. At this time, the annular channel 61 is in a negative pressure state, and the outside of the second seal 622 is atmospheric pressure. A constant pressure gas higher than atmospheric pressure is introduced between the first seal 621 and the second seal 622. If gas leakage occurs at the connection joint, the same gas flow process as in Example 2 will occur, and the pressure value and flow value will fluctuate. It is judged whether gas leakage occurs at the connection joint of the exhaust pipe, and an alarm prompt is issued.
[0079] Example 4
[0080] This example takes the vacuum pump exhaust monitoring system set at the connection joint between any two exhaust pipes as an example. Figure 6 and Figure 7As shown, taking the second exhaust pipe and the third exhaust pipe as an example, the second exhaust pipe and the third exhaust pipe are used to exhaust the tail exhaust gas of the vacuum pump, and the second exhaust pipe 22 and the third exhaust pipe 23 are connected by the first flange 71 and the second flange 72 respectively, so that the surfaces connected by the two flanges form a connecting end face, and an annular groove is provided along the circumference of the connecting end of the first flange 71, which serves as an annular channel 61 for the circulation of inert gas. An inner annular bracket 623 and an outer annular bracket 624 connected to the inner annular bracket 623 are arranged between the two flanges; the annular channel 61 is located between the inner annular bracket 623 and the outer annular bracket 624 in the radial direction, the first sealing member 621 is arranged on the inner annular bracket 623, and the annular channel 61 and the inner cavity of the exhaust pipe are sealed, and the second sealing member 622 is arranged on the outer annular bracket 624, and the annular channel 61 and the atmosphere are sealed.
[0081] It should be understood that the first sealing member and the second sealing member of this embodiment may also be sealing rings.
[0082] Furthermore, if Figure 6 and Figure 7 As shown, an anti-extrusion bracket 625 is provided on the radial outer side of the outer annular bracket 624 to prevent the seal from being squeezed out when the flange connection end is uneven or the seal is subjected to too much force.
[0083] The four-seal structure adopted in this embodiment can effectively improve the sealing performance between the two flanges and prevent the leakage of process gas from affecting the normal operation of the equipment.
[0084] Likewise, if Figure 6 As shown, the annular channel 61 has an air inlet 65 and an exhaust port 66 connected to the outside, wherein the air inlet 65 and the exhaust port 66 penetrate the wall thickness of the first flange 71 away from its connecting end to form a vent structure connected to the outside, and an air inlet connector 63 is provided at the air inlet 65, and an air inlet connecting joint 631 is provided at the air inlet end of the air inlet connector 63, through which it is convenient to connect with the air inlet pipeline, similarly, an exhaust connector 64 is provided at the exhaust port 66, and an exhaust connecting joint 641 is provided at the exhaust end of the exhaust connector 64, through which it is convenient to connect with the exhaust pipeline.
[0085] Furthermore, if Figure 6 As shown, a clamp 73 is provided outside the first flange 71 and the second flange 72 to fix the two flanges and improve the sealing performance.
[0086] Based on the above structure, an inert gas is introduced from the outside, and the gas enters the annular channel 61 through the air inlet connector 63 and the air inlet 65. The annular channel 61 is filled with gas, and then the gas is discharged through the exhaust port 66 and the exhaust connector 64. When the first seal 621 and the second seal 622 are scratched, worn, corroded, etc., gas leakage occurs. At this time, the annular channel 61 is in a negative pressure state, and the outside of the second seal 622 is atmospheric pressure. The first seal 621 and the second seal 622 are passed with a constant pressure gas higher than the atmospheric pressure. If gas leakage occurs at the connection joint, the same gas flow process as in Example 2 will occur, and the pressure value and flow value will fluctuate. It is judged whether gas leakage occurs at the connection joint of the exhaust pipe, and an alarm prompt will be issued.
[0087] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present disclosure, but the present disclosure is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and substance of the present disclosure, and these modifications and improvements are also considered to be within the scope of protection of the present disclosure.
Claims
1. A vacuum pump exhaust monitoring system, characterized in that: The system comprises: An annular channel is provided at the connection joint between the exhaust pipe at the tail of the vacuum pump, and the annular channel has an air inlet and an exhaust port; A first sealing member and a second sealing member are respectively arranged on both sides of the annular channel, and are used to seal the inner cavity of the exhaust pipe and the annular channel, and the annular channel and the atmosphere side, respectively; An air intake pipeline and an exhaust pipeline are respectively connected to the air intake port and the exhaust port of the annular channel, and a gas detection structure is provided on the air intake pipeline and / or the exhaust pipeline; The inert gas enters the annular channel from the air intake pipeline and is then discharged through the exhaust pipeline to form a monitoring loop. Whether gas leakage occurs at the connection joint is determined by whether the detection data of the gas detection structure changes.
2. The vacuum pump exhaust monitoring system according to claim 1, characterized in that: When the connection joint between the two exhaust pipes is a flange, the connection end of the flange is respectively provided with the annular channel, the first annular groove and the second annular groove along its circumference; The first annular groove is located between the annular channel and the inner cavity of the exhaust pipe, and the first sealing member is embedded in the first annular groove; The second annular groove is located between the annular channel and the atmosphere side, and the second sealing member is embedded in the second annular groove.
3. The vacuum pump exhaust monitoring system according to claim 1, characterized in that: When the connection joint between the two exhaust pipes is a flange, the connection end of the flange is provided with the annular channel along its circumference, an inner annular bracket and an outer annular bracket connected to the inner annular bracket are provided between the two flanges; wherein, The annular channel is located between the inner annular support and the outer annular support in the radial direction. The first sealing member is arranged on the inner annular support, and the second sealing member is arranged on the outer annular support.
4. The vacuum pump exhaust monitoring system according to claim 3, characterized in that: An anti-extrusion bracket is also arranged on a side of the outer annular bracket facing away from the inner annular bracket.
5. The vacuum pump exhaust monitoring system according to claim 1, characterized in that: When one of the exhaust pipe connection ends of the two exhaust pipes is inserted into the other exhaust pipe connection end, the two connection ends form the connection joint; The annular channel, the first annular groove and the second annular groove are respectively provided on a curved surface of one of the connecting ends facing the other connecting end along its circumference; The first annular groove is located between the annular channel and the inner cavity of the exhaust pipe, and the first sealing member is embedded in the first annular groove; The second annular groove is located between the annular channel and the atmosphere side, and the second sealing member is embedded in the second annular groove.
6. The vacuum pump exhaust monitoring system according to claim 5, characterized in that: The two exhaust pipes are respectively provided with a first fixing portion and a second fixing portion at the connection position, and the first fixing portion and the second fixing portion are connected by a fixing member.
7. The vacuum pump exhaust monitoring system according to any one of claims 1 to 6, characterized in that: The gas detection structure is a pressure gauge.
8. The vacuum pump exhaust monitoring system according to any one of claims 1 to 6, characterized in that: The gas detection structure is a flow meter.
9. The vacuum pump exhaust monitoring system according to any one of claims 1 to 6, characterized in that: The air intake pipeline and the exhaust pipeline are both connected to an air storage tank, and the air intake pipeline is provided with an air pump.
10. The vacuum pump exhaust monitoring system according to any one of claims 1 to 6, characterized in that: The gas detection structure is also electrically connected to a controller, which includes a monitoring module and an alarm module; wherein, The monitoring module is used to monitor the detection result of the gas detection structure; The alarm module is used to send out an alarm signal according to the detection result.