External lifting mechanism for component in vacuum cavity

Abstract

The invention relates to the technical field of lifting mechanisms, in particular to an external lifting mechanism for a component in a vacuum cavity, and mainly solves the technical problem that the vacuum degree of the cavity is easily affected by an existing lifting structure for lifting the component in the vacuum cavity. A lifting rod of the external lifting mechanism is connected with a bottom plate of the box through a sliding sealing assembly, the sliding sealing assembly comprises a corrugated pipe and a flange plate, the corrugated pipe is provided with an upper connecting disc and a lower connecting disc, the upper connecting disc is in sealed connection with the bottom plate of the box, the lower connecting disc is in sealed connection with the flange plate, and a mounting groove is formed in the upper surface of the flange plate. And the bottom end of the lifting rod is fixed in the lifting groove, so that sliding sealing between the lifting rod and the bottom plate of the box body is realized. According to the structure, sliding sealing between the lifting rod and the bottom plate of the box body is achieved through cooperation of flexibility of the corrugated pipe and the flange plate, common sealing materials such as a rubber ring do not need to be arranged, and chippings generated after long-time use can be avoided, so that the chippings can be prevented from flying into the box body, and the vacuum degree of a cavity is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of lifting mechanisms, and in particular to an external lifting mechanism for components in a vacuum chamber. Background Art

[0002] Many existing processing equipments include a box with a vacuum cavity, a component to be lifted and lowered is arranged inside the box, and a lifting mechanism is arranged outside the box. The lifting mechanism passes through the bottom plate of the box and is connected to the component to drive the component to lift and lower. In this structure, the sliding seal between the lifting mechanism and the bottom plate of the box is more important to ensure the vacuum degree in the box during operation.

[0003] In the prior art, rubber sleeves or other flexible sealing materials are generally used between the lifting structure and the bottom plate of the box to ensure sealing. The rubber sleeves and other sealing materials of this structure will be greatly worn out as the working time increases, and the debris produced by the wear will easily fly into the box, affecting the vacuum degree of the cavity. Summary of the invention

[0004] In order to overcome the technical defect of the existing lifting structure for lifting components in a vacuum chamber that easily affects the vacuum degree of the chamber, the present invention provides an external lifting mechanism for components in a vacuum chamber.

[0005] The external lifting mechanism for components in a vacuum chamber provided by the present invention comprises a box body and a lifting rod, wherein the lifting rod passes through the bottom plate of the box body, and the bottom end of the lifting rod is connected to a driving assembly for driving the lifting rod, and the lifting rod passes through the bottom plate of the box body through a sliding sealing assembly, and the sliding sealing assembly comprises: A bellows, which is sleeved on the outside of the lifting rod, an upper connecting plate is provided at the upper end of the bellows, the upper connecting plate is sealed and connected to the lower surface of the bottom plate of the box body, and a lower connecting plate is provided at the lower end of the bellows; The flange plate has an installation groove on its upper surface, the bottom end of the lifting rod is sleeved and fixed in the installation groove, and the upper surface of the flange plate is sealed and connected to the lower connecting plate.

[0006] Optionally, the sliding seal assembly further includes an oil-free bushing, which is disposed in the bottom plate of the box body, and the lifting rod is slidably sleeved in the oil-free bushing.

[0007] Optionally, the upper connecting plate and the bottom plate of the box body and the lower connecting plate and the flange plate are sealed by sealing rings.

[0008] Optionally, the upper surface of the upper connecting plate and / or the lower surface of the bottom plate of the box body is provided with a first annular groove for accommodating the sealing ring, and the lower surface of the lower connecting plate and / or the upper surface of the flange plate is provided with a second annular groove for accommodating the sealing ring.

[0009] Optionally, the driving component includes: A guide rod, the top end of which is fixedly connected to the bottom of the box body and arranged vertically; A fixing plate fixed to the bottom end of the guide rod; A screw rod, the bottom end of which is rotatably connected to the fixed plate; A servo motor, whose housing is fixed to the lower surface of the bottom plate of the box body, and the output shaft of the servo motor is drivingly connected to the top end of the screw rod to drive the screw rod to rotate; A nut member is threadedly connected to the screw rod and fixedly connected to the flange plate. The nut member is slidably sleeved on the guide rod.

[0010] Optionally, two guide rods are provided, the nut member comprises a nut sleeve and a lifting plate, the nut sleeve is embedded in the lifting plate, the nut sleeve is threadedly connected to the screw rod, and both guide rods are slidably inserted in the lifting plate.

[0011] The technical solution provided by the present invention has the following advantages compared with the prior art: The present invention provides an external lifting mechanism for components in a vacuum chamber, wherein the lifting rod is connected to the bottom plate of the box body through a sliding sealing assembly, wherein the sliding sealing assembly includes a bellows and a flange, wherein the bellows is provided with an upper connecting plate and a lower connecting plate, wherein the upper connecting plate is sealingly connected to the bottom plate of the box body, and the lower connecting plate is sealingly connected to the flange, wherein the upper surface of the flange is provided with a mounting groove, and the bottom end of the lifting rod is fixed in the lifting groove, thereby realizing a sliding seal between the lifting rod and the bottom plate of the box body. This structure utilizes the elasticity of the bellows in conjunction with the flange to realize a sliding seal between the lifting rod and the bottom plate of the box body, and does not require the provision of commonly used sealing materials such as rubber rings, and can avoid the generation of debris during long-term use, thereby preventing the debris from flying into the box body and ensuring the vacuum degree of the chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0013] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0014] Figure 1 A three-dimensional diagram showing an external lifting mechanism in an embodiment of the present invention; Figure 2 A cross-sectional view showing an external lifting mechanism in an embodiment of the present invention.

[0015] In the figure: 1. Box body; 2. Lifting rod; 3. Driving assembly; 31. Guide rod; 32. Fixing plate; 33. Screw; 34. Servo motor; 35. Nut piece; 351. Nut sleeve; 352. Lifting plate; 4. Sliding seal assembly; 41. Bellows; 411. Upper connecting plate; 412. Lower connecting plate; 42. Flange; 421. Mounting groove; 43. Oil-free bushing; 44. Sealing ring; 45. First annular groove; 46. Second annular groove. DETAILED DESCRIPTION

[0016] In order to more clearly understand the above-mentioned objectives, features and advantages of the present invention, the scheme of the present invention will be further described below. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0017] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein; it is obvious that the embodiments in the specification are only part of the embodiments of the present invention, rather than all of the embodiments.

[0018] Combine the following Figure 1 and Figure 2 The specific embodiments of the present invention are described in detail.

[0019] The present embodiment provides an external lifting mechanism for components inside a vacuum chamber, including a box body 1 and a lifting rod 2, the lifting rod 2 passes through the bottom plate of the box body 1, and the bottom end of the lifting rod 2 is connected to a driving component 3 for driving the lifting thereof, the lifting rod 2 passes through the bottom plate of the box body 1 through a sliding sealing component 4, the sliding sealing component 4 includes a bellows 41 and a flange 42, the bellows 41 is sleeved on the outside of the lifting rod 2, an upper connecting plate 411 is provided at the upper end of the bellows 41, the upper connecting plate 411 is sealingly connected to the lower surface of the bottom plate of the box body 1, a lower connecting plate 412 is provided at the lower end of the bellows 41, an upper surface of the flange 42 is provided with a mounting groove 421, the bottom end of the lifting rod 2 is sleeved and fixed in the mounting groove 421, and the upper surface of the flange 42 is sealingly connected to the lower connecting plate 412.

[0020] It should be noted that Figure 1 The structure shown in the figure includes two sets of external lifting mechanisms, which are used to drive the two components in the box body 1 to rise and fall respectively; Figure 1 and Figure 2 The box 1 in FIG. 1 shows only its bottom plate.

[0021] It is easy to understand that the bellows 41 can be compressed or stretched with the lifting and lowering of the lifting rod 2, and cooperate with the flange 42 to always maintain the seal between the lifting rod 2 and the bottom plate of the box body 1 during the movement of the lifting rod 2. Compared with sliding sealing structures such as rubber sleeves, this sliding sealing method will not produce debris due to wear, thereby avoiding the contamination of the vacuum chamber by debris and ensuring the vacuum degree of the vacuum chamber. At the same time, this sliding sealing method has a long service life and does not require frequent maintenance and replacement.

[0022] Specifically, two guide rods 31 are provided, and the nut member 35 includes a nut sleeve 351 and a lifting plate 352. The nut sleeve 351 is embedded in the lifting plate 352, and the nut sleeve 351 is screwed with the screw rod 33. Both guide rods 31 are slidably inserted in the lifting plate 352. The two guide rods 31 make the nut member 35 rise and fall more smoothly.

[0023] Specifically, the upper connecting plate 411 and the bottom plate of the box body 1 and the lower connecting plate 412 and the flange plate 42 are sealed by a sealing ring 44 .

[0024] More specifically, the upper surface of the upper connecting plate 411 and / or the lower surface of the bottom plate of the box body 1 is provided with a first annular groove 45 for accommodating the sealing ring 44, and the lower surface of the lower connecting plate 412 and / or the upper surface of the flange plate 42 is provided with a second annular groove 46 for accommodating the sealing ring 44. For example, Figure 2 In the structure shown in FIG, a first annular groove 45 is provided on the upper surface of the upper connecting plate 411, and a second annular groove 46 is provided on the upper surface of the flange plate 42. The first annular groove and the second annular groove 46 can limit the sealing ring 44 to prevent the sealing ring 44 from lateral displacement.

[0025] Specifically, the driving assembly 3 includes a guide rod 31, a fixing plate 32, a screw rod 33, a servo motor 34 and a nut member 35; the top end of the guide rod 31 is fixedly connected to the bottom of the bottom plate of the box body 1 and arranged vertically; the fixing plate 32 is fixed to the bottom end of the guide rod 31; the bottom end of the screw rod 33 is rotatably connected to the fixing plate 32; the housing of the servo motor 34 is fixed to the lower surface of the bottom plate of the box body 1, and the output shaft of the servo motor 34 is transmission-connected to the top end of the screw rod 33 to drive the screw rod 33 to rotate; the nut member 35 is screwed on the screw rod 33 and fixedly connected to the flange 42, and the nut member 35 is slidably sleeved on the guide rod 31. The rotation of the output shaft of the servo motor 34 drives the screw rod 33 to rotate, thereby driving the nut member 35 to move up and down, and then driving the lifting rod 2 to rise and fall, and finally realizing the lifting and falling of the components inside the box body 1.

[0026] Furthermore, the sliding seal assembly 4 also includes an oil-free bushing 43 . The oil-free bushing 43 is arranged in the bottom plate of the box body 1 , and the lifting rod 2 is slidably sleeved in the oil-free bushing 43 .

[0027] It is easy to understand that the bottom plate of the box body 1 is provided with a through hole at the position corresponding to the lifting rod 2, the oil-free bushing 43 is sleeved in the through hole, and the lifting rod 2 is sleeved in the oil-free bushing 43. The oil-free bushing 43 can guide the lifting rod 2, thereby ensuring the movement accuracy of the lifting rod 2, and the oil-free bushing 43 does not require a medium such as lubricating oil, which can avoid contamination of the baking cavity and ensure the vacuum degree of the baking cavity.

[0028] The above is only a specific implementation of the present invention, which enables those skilled in the art to understand or implement the present invention. Although detailed descriptions are given with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments, and they should all be covered by the protection scope of the claims.

Claims

1. An external lifting mechanism for components in a vacuum chamber, comprising a box (1) and a lifting rod (2), wherein the lifting rod (2) passes through a bottom plate of the box (1), and a driving component (3) for driving the lifting rod (2) is connected to the bottom end of the lifting rod (2), characterized in that: The lifting rod (2) passes through the bottom plate of the box body (1) via a sliding sealing assembly (4), and the sliding sealing assembly (4) comprises: A bellows (41) is sleeved on the outside of the lifting rod (2); an upper connecting plate (411) is provided at the upper end of the bellows (41); the upper connecting plate (411) is sealingly connected to the lower surface of the bottom plate of the box body (1); and a lower connecting plate (412) is provided at the lower end of the bellows (41); The flange (42) has a mounting groove (421) on its upper surface, the bottom end of the lifting rod (2) is sleeved and fixed in the mounting groove (421), and the upper surface of the flange (42) is sealedly connected to the lower connecting plate (412).

2. The external lifting mechanism for components in a vacuum chamber according to claim 1, characterized in that: The sliding seal assembly (4) further comprises an oil-free bushing (43), wherein the oil-free bushing (43) is arranged in the bottom plate of the box body (1), and the lifting rod (2) is slidably sleeved in the oil-free bushing (43).

3. The external lifting mechanism for components in a vacuum chamber according to claim 1 or 2, characterized in that: The upper connecting plate (411) and the bottom plate of the box body (1) and the lower connecting plate (412) and the flange plate (42) are both sealed via sealing rings (44).

4. The external lifting mechanism for components in a vacuum chamber according to claim 3, characterized in that: The upper surface of the upper connecting plate (411) and / or the lower surface of the bottom plate of the box body (1) are provided with a first annular groove (45) for accommodating the sealing ring (44), and the lower surface of the lower connecting plate (412) and / or the upper surface of the flange plate (42) are provided with a second annular groove (46) for accommodating the sealing ring (44).

5. The external lifting mechanism for components in a vacuum chamber according to claim 1 or 2, characterized in that: The driving component (3) comprises: A guide rod (31), the top end of which is fixedly connected to the bottom of the bottom plate of the box body (1) and is arranged vertically; A fixing plate (32) fixed to the bottom end of the guide rod (31); A screw rod (33), the bottom end of which is rotatably connected to the fixing plate (32); A servo motor (34), the housing of which is fixed to the lower surface of the bottom plate of the box body (1), and the output shaft of the servo motor (34) is drivingly connected to the top end of the screw rod (33) so as to drive the screw rod (33) to rotate; A nut member (35) is threaded onto the screw rod (33) and fixedly connected to the flange (42); the nut member (35) is slidably sleeved onto the guide rod (31).

6. The external lifting mechanism for components in a vacuum chamber according to claim 5, characterized in that: Two guide rods (31) are provided, and the nut member (35) comprises a nut sleeve (351) and a lifting plate (352). The nut sleeve (351) is embedded in the lifting plate (352), and the nut sleeve (351) is threadedly connected to the screw rod (33). Both guide rods (31) are slidably inserted in the lifting plate (352).

Images