Lamp and heating device for semiconductor workpiece heat treatment equipment

Abstract

The invention provides a lamp and a heating device for semiconductor workpiece heat treatment equipment. The lamp comprises a lampshade which comprises a body part and a process hole part connected to one end of the body part; a lamp cavity is defined by the inner space of the body part, a technological hole cavity is defined by the inner space of the technological hole part, and the technological hole cavity communicates with the lamp cavity; the first light-emitting part is located in the lamp cavity. The first light-emitting part is formed by winding a spiral coil in the axial direction of the lamp, and the spiral coil is formed by winding a first lamp filament. The second light-emitting part is connected with the first light-emitting part; at least a portion of the second light emitting member is disposed in the fabrication cavity. The lamp provided by the embodiment of the invention adopts the first light-emitting part with the double-spiral structure, compared with a single-spiral filament, the first light-emitting part is shorter and thicker, mechanical automatic processing is facilitated, the service life is prolonged, the product stability is improved, and product integration is facilitated; part of the second light-emitting part is arranged in the process hole cavity, light blocked by the process hole part can be compensated, the shadow effect is reduced, heat loss is reduced, and the light-emitting efficiency is improved.

Description

Technical Field

[0001] Exemplary embodiments of the present disclosure relate generally to the field of semiconductor manufacturing, and more particularly to lamps and heating devices for use in semiconductor workpiece heat treatment equipment. Background Art

[0002] In the heat treatment process of wafers, the single spiral filament of the wafer heating lamp has large heat loss, low luminous efficiency, and is prone to form a shadow effect, reducing energy utilization efficiency. Summary of the invention

[0003] In a first aspect of the present disclosure, a lamp for semiconductor workpiece heat treatment equipment is provided, comprising: a lampshade, comprising a main body and a process hole portion connected to one end of the main body; the internal space of the main body defines a lamp cavity, the internal space of the process hole portion defines a process hole cavity, and the process hole cavity is connected to the lamp cavity; a light-emitting device, located in the lampshade, having a first connecting portion and a second connecting portion; the light-emitting device comprises a first light-emitting member and a second light-emitting member; the first light-emitting member is located in the lamp cavity, and the first light-emitting member is provided with a first connecting portion; the first light-emitting member is formed by a spiral coil wound along the axial direction of the lamp, the spiral coil is formed by a first filament wound, and the spiral axis of the first filament is the spiral direction of the spiral coil; the second light-emitting member is connected to the first light-emitting member; at least part of the second light-emitting member is arranged in the process hole cavity; one of the first light-emitting member and the second light-emitting member is provided with a second connecting portion; a first connector, at least part of which is arranged in the lamp cavity, and is electrically connected to the first connecting portion of the first light-emitting member; a second connector, at least part of which is arranged in the lamp cavity, and is electrically connected to the second connecting portion of the first light-emitting member.

[0004] The lamp provided in this embodiment adopts a first light-emitting component with a double-helix structure, which is shorter and thicker than a single-helix filament, is conducive to mechanized and automatic processing, and improves the service life and product stability, which is conducive to product integration; part of the second light-emitting component is arranged in the process hole cavity, which can compensate for the light blocked by the process hole, reduce the shadow effect, reduce heat loss, and improve the luminous efficiency.

[0005] In some embodiments, a first through hole and a second through hole are provided at the end of the main body away from the process hole portion; the first connector is passed through the first through hole and extends toward the first connecting portion; the second connector is passed through the second through hole and extends toward the second connecting portion; the first connecting portion is close to the end of the main body away from the process hole portion, and the second connecting portion is close to the end of the main body facing the process hole portion.

[0006] In some embodiments, the second light-emitting element is formed by winding a second filament along the axial direction of the lamp.

[0007] In some embodiments, the lamp further includes: a support member disposed in the lamp cavity and connected to the wall of the lampshade; an elastic member connected to the support member and to the first light-emitting member; the elastic member is used to prevent the first light-emitting member from deforming or deflecting.

[0008] In some embodiments, one end of the elastic member facing the first light-emitting member is bent into a hook shape and hooked on the first light-emitting member to prevent the first light-emitting member from deviating along the axial direction of the lamp and preventing the first light-emitting member from deforming.

[0009] In some embodiments, at least a portion of the support member extends in a radial direction of the lamp, and the elastic member is sleeved on the portion of the support member extending in the radial direction of the lamp.

[0010] In some embodiments, at least a portion of the support member extends axially along the lamp; the elastic member has a telescopic portion and a connecting portion connected to the telescopic portion; the telescopic portion is sleeved on a portion of the support member extending axially along the lamp; the connecting portion extends radially along the lamp; and the connecting portion is connected to the first light-emitting member.

[0011] In some embodiments, the elastic member comprises a plurality of elastic members, wherein at least two elastic members are spaced apart and distributed along the axial direction of the lamp.

[0012] In some embodiments, the elastic member comprises a plurality of elastic members, wherein at least two elastic members are distributed along the radial direction of the lamp and are located on opposite sides of the first light-emitting member.

[0013] In some embodiments, the first filament is at least made of tungsten.

[0014] In some embodiments, the diameter of the first filament is greater than or equal to 0.3 mm and less than or equal to 0.5 mm.

[0015] In some embodiments, the inner diameter of the spiral coil is greater than or equal to 0.3 mm and less than or equal to 0.5 mm.

[0016] In some embodiments, along the axial direction of the lamp, the length of the spiral coil is greater than or equal to 12 mm and less than or equal to 14 mm.

[0017] In some embodiments, the pitch between two adjacent turns of the spiral coil is greater than or equal to 0.4 mm and less than or equal to 0.6 mm.

[0018] In some embodiments, the winding inner diameter of the first light-emitting element is greater than or equal to 4 mm and less than or equal to 6 mm.

[0019] In some embodiments, the winding inner diameter of the first light-emitting element is greater than or equal to 5 mm and less than or equal to 8 mm.

[0020] In some embodiments, the pitch between two adjacent turns of the first light-emitting element is greater than or equal to 1.4 mm and less than or equal to 1.6 mm.

[0021] In a second aspect of the present disclosure, a heating device for semiconductor workpiece heat treatment equipment is provided, comprising: a lamp holder for connecting to the heat treatment equipment; a reflective cover connected to the lamp holder, the reflective cover is located on the side of the lamp holder facing the reaction chamber of the processing equipment, and includes a plurality of accommodating cavities; the lamps in any of the above embodiments, at least part of the plurality of lamps are accommodated in corresponding accommodating cavities.

[0022] In some embodiments, the heating device further includes: a lamp plate located between the lamp holder and the reflector cover to strengthen the connection between the lamp holder and the reflector cover.

[0023] It should be understood that the contents described in the summary of the invention are not intended to limit the key or important features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. In the accompanying drawings, the same or similar reference numerals represent the same or similar elements, wherein:

[0025] Figure 1 is a schematic cross-sectional structural diagram of a lamp according to an embodiment of the present disclosure;

[0026] Figure 2 yes Figure 1 A magnified image of area A;

[0027] Figure 3 It is a schematic cross-sectional structural diagram of the heating device of an embodiment of the present disclosure.

[0028] Description of reference numerals:

[0029] 100: Light;

[0030] 101: lampshade;

[0031] 1011: Ontology department;

[0032] 1012: process hole part;

[0033] 1013: lamp cavity;

[0034] 1014: process cavity;

[0035] 102: a first light emitting element;

[0036] 1021: Helical coil;

[0037] 103: second light emitting element;

[0038] 104: a first connector;

[0039] 105: second connector;

[0040] 106: support member;

[0041] 107: elastic member;

[0042] 108: seal;

[0043] 109: housing;

[0044] 200: heating device;

[0045] 201: lamp holder;

[0046] 202: Reflector. DETAILED DESCRIPTION

[0047] The following is a description of exemplary embodiments of the present disclosure in conjunction with the accompanying drawings, including various details of the embodiments of the present disclosure to facilitate understanding, which should be considered as merely exemplary. Therefore, it should be recognized by those of ordinary skill in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, descriptions of well-known functions and structures are omitted in the following description.

[0048] like Figure 1 , Figure 2 As shown, the present disclosure provides a lamp 100 for semiconductor workpiece heat treatment equipment, comprising: a lampshade 101, comprising a main body 1011 and a process hole portion 1012 connected to one end of the main body 1011; the internal space of the main body 1011 defines a lamp cavity 1013, the internal space of the process hole portion 1012 defines a process hole cavity 1014, and the process hole cavity 1014 is connected to the lamp cavity 1013; a light-emitting device, located in the lampshade 101, having a first connecting portion and a second connecting portion; the light-emitting device comprises a first light-emitting member 102 and a second light-emitting member 103; the first light-emitting member 102 is located in the lamp cavity 1013, and the first light-emitting member 102 is provided with a first connecting portion; ... The spiral coil 1021 is wound along the axial direction of the lamp 100, and the spiral coil 1021 is wound by a first filament, and the spiral axis of the first filament is the spiral direction of the spiral coil 1021; the second light-emitting component 103 is connected to the first light-emitting component 102; at least part of the second light-emitting component 103 is arranged in the process cavity 1014; one of the first light-emitting component 102 and the second light-emitting component 103 is provided with a second connecting portion; the first connector 104 is at least partially arranged in the lamp cavity 1013, and is electrically connected to the first connecting portion of the first light-emitting component 102; the second connector 105 is at least partially arranged in the lamp cavity 1013, and is electrically connected to the second connecting portion of the first light-emitting component 102.

[0049] The lampshade 101 is a structure that at least accommodates the light-emitting device, and its shape can be adjusted according to the application scenario. For example, the lampshade 101 can be roughly prismatic or cylindrical. The material of the lampshade 101 can be adjusted according to the process requirements, for example, it can be made of transparent quartz glass.

[0050] For ease of description, this embodiment will be described by taking the main body 1011 being located above the lampshade 101 and the process hole 1012 being located below the lampshade 101 as an example; accordingly, the axial direction of the lamp 100 is Figure 1 The up and down directions in the figure are indicated by the dotted lines.

[0051] The main body 1011 may be a hollow cylinder in the shape of a prism or a cylinder, wherein the hollow portion forms a lamp cavity 1013. The main body 1011 may be made by an integrated molding process. The process hole portion 1012 may be understood as a structure generated during the processing of the main body 1011. The process hole portion 1012 may also be a hollow cylinder in the shape of a prism or a cylinder, wherein the hollow portion of the process hole portion 1012 forms a process cavity 1014, and the process cavity 1014 is connected to the lamp cavity 1013. The outer diameter and the inner diameter of the process hole portion 1012 are respectively smaller than the outer diameter and the inner diameter of the main body 1011. In some embodiments, the lamp cavity 1013 and the process cavity 1014 are at least filled with halogen gas.

[0052] The light emitting device is accommodated in the lampshade 101. The light emitting device has a first connection portion and a second connection portion for electrically connecting to other components. When the light emitting device is in a working state, i.e., a powered state, the light generated by the light emitting device can be radiated to the outside of the lampshade 101 to increase the temperature outside the lampshade 101.

[0053] The first light emitting element 102 in the light emitting device is accommodated in the lamp cavity 1013. When the first light emitting element 102 is configured to work, the light generated by the first light emitting element 102 can be transmitted to the outside of the lampshade 101 through the body 1011 to increase the temperature outside the lampshade 101.

[0054] The first light emitting element 102 can be formed by a spiral coil 1021 along Figure 1The lamp 100 shown by the middle dotted line is formed by spirally winding from top to bottom in the axial direction; the spiral coil 1021 can be formed by a first filament being spirally wound from top to bottom along the winding direction of the spiral coil 1021 as the spiral axis; or it can be understood that the spiral coil 1021 is formed by spirally winding the first filament, and the spiral coil 1021 is again spirally wound along the axial direction of the lamp 100 to form the first light-emitting component 102; the first light-emitting component 102 of the light-emitting device disclosed in the present invention is shorter and thicker than a single spiral filament, which is conducive to mechanized and automatic processing; secondly, under the same power and luminous flux, the life of the first light-emitting component 102 of this embodiment is increased by 2-3 times; thirdly, the first light-emitting component 102 of this embodiment has good structural stability, which is conducive to product integration.

[0055] The upper portion of the spiral coil 1021 may form a first connection portion, and the first connection portion may be electrically connected to the first connector 104. The first connection portion may be electrically connected to the first connector 104 by welding or plugging.

[0056] At least part of the second light emitting element 103 in the light emitting device is located in the process cavity 1014. For example, the upper part of the second light emitting element 103 is electrically connected to the first light emitting element 102 and is located in the lamp cavity 1013; the lower part of the second light emitting element 103 is located in the process cavity 1014.

[0057] The second light emitting member 103 may be welded and fixed to the first light emitting member 102. For example, in some embodiments, the second light emitting member 103 may be formed by a second filament spirally wound along the axial direction of the lamp 100, wherein the second filament may be a filament of the same specification as the first filament, or may be a filament of different specifications. Taking the case where the two are filaments of the same specification, the second light emitting member 103 may be understood as a spiral coil 1021 wound in a spiral direction. Figure 1 , Figure 2 The second light emitting element 103 is a portion extending from the process cavity 1014. In other embodiments, the second light emitting element 103 may also be a straight second filament.

[0058] The second connection portion may be formed by the lower portion of the first light-emitting member 102, or by the lower portion of the second light-emitting member 103. The second connection portion may be electrically connected to the second connector 105. The second connection portion may be electrically connected to the second connector 105 by welding or plugging. In some embodiments, a portion of the second connector 105 may extend into the process cavity 1014 along the axial direction of the lamp 100, and the second filament may be wound on the portion of the second connector 105 to form the second light-emitting member 103.

[0059] In some examples, a first connection portion is formed on the upper portion of the first light-emitting element 102 , and a second connection portion is formed on the lower portion of the second light-emitting element 103 ; the first light-emitting element 102 and the second light-emitting element 103 can emit light or stop emitting light synchronously.

[0060] In other examples, the first light emitting member 102 is provided with a first connection portion and a second connection portion, and the second light emitting member 103 is provided with a first connection portion and a second connection portion, and the first light emitting member 102 and the second light emitting member 103 can emit light independently of each other. For example, when the first light emitting member 102 stops emitting light, the second light emitting member 103 can emit light; or the first light emitting member 102 and the second light emitting member 103 can emit light synchronously.

[0061] Furthermore, in some embodiments, the outer diameter of the winding of the second light-emitting element 103 is smaller than the inner diameter of the process cavity 1014 , so as to facilitate the second light-emitting element 103 to extend into the process cavity 1014 .

[0062] The second light-emitting member 103 can be completely accommodated in the process hole 1014. When the second light-emitting member 103 is configured to work, the light of the second light-emitting member 103 can be transmitted to the outside of the lampshade 101 through the process hole portion 1012; or, the second light-emitting member 103 can be partially accommodated in the process hole 1014, and the other part can be accommodated in the lamp cavity 1013. When the second light-emitting member 103 is configured to work, part of the light generated by it can be transmitted to the outside of the lampshade 101 through the process hole portion 1012, and the other part can be transmitted to the outside of the lampshade 101 through the body portion 1011. Through the second light-emitting member 103 of the light-emitting device disclosed in the present invention, the light blocked by the process hole portion 1012 can be compensated, the shadow effect can be reduced, the heat loss can be reduced, and the light-emitting efficiency can be improved.

[0063] One end of the first connector 104 can be inserted into the lamp cavity 1013 from the upper end of the main body 1011 and connected to the first connection portion, and the other end of the first connector 104 can be located outside the lampshade 101 and connected to the positive pole of the power supply device. One end of the second connector 105 can be inserted into the lamp cavity 1013 from the upper end of the main body 1011 and connected to the second connection portion, and the other end of the second connector 105 can be located outside the lampshade 101 and connected to the negative pole of the power supply device. When the lamp 100 of this embodiment is configured to work, the electric energy of the power supply device can flow to the first light-emitting element 102 and the second light-emitting element 103 through the first connector 104, and flow back to the power supply device through the second connector 105.

[0064] The lamp 100 provided in this embodiment adopts a first light-emitting component 102 with a double-helix structure, which is shorter and thicker than a single-helix filament, is conducive to mechanized and automatic processing, and improves the service life and product stability, which is conducive to product integration; a part of the second light-emitting component 103 is arranged in the process hole cavity 1014, which can compensate for the light blocked by the process hole portion 1012, reduce the shadow effect, reduce heat loss, and improve the luminous efficiency.

[0065] In some embodiments, the first filament is made of at least tungsten. The size of the first filament can be adjusted according to process requirements, for example, the diameter of the first filament can be greater than or equal to 0.3 mm and less than or equal to 0.5 mm.

[0066] The winding specifications of the first filament can be adjusted according to process requirements. For example, in some embodiments, the winding inner diameter of the spiral coil 1021 is greater than or equal to 0.3 mm and less than or equal to 0.5 mm; for example, in some embodiments, along the axial direction of the lamp 100, the length of the spiral coil 1021 is greater than or equal to 12 mm and less than or equal to 14 mm; for example, in some embodiments, the pitch between two adjacent turns in the spiral coil 1021 is greater than or equal to 0.4 mm and less than or equal to 0.6 mm.

[0067] The winding specifications of the spiral coil 1021 can be adjusted according to the process requirements. For example, in some embodiments, the winding inner diameter of the first light-emitting element 102 is greater than or equal to 4 mm and less than or equal to 6 mm; or, the winding inner diameter of the first light-emitting element 102 is greater than or equal to 5 mm and less than or equal to 8 mm; for example, in some embodiments, the pitch between two adjacent turns of the first light-emitting element 102 is greater than or equal to 1.4 mm and less than or equal to 1.6 mm. The first light-emitting element 102 configured with the above parameter specifications can reduce the shadow effect and improve the energy efficiency.

[0068] In some embodiments, the upper end of the body 1011, that is, the end away from the process hole 1012, may be provided with a first through hole and a second through hole, the first connector 104 is inserted in the first through hole and extends toward the first connection portion; the second connector 105 is inserted in the second through hole and extends toward the second connection portion; the first connection portion is close to the end of the body 1011 away from the process hole 1012, and the second connection portion is close to the end of the body 1011 facing the process hole 1012. By providing the first through hole and the second through hole at the upper end of the body 1011, a path is provided for the first connector 104 and the second connector 105, so that the first connector 104 and the second connector 105 can be easily extended into the lampshade 101.

[0069] like Figure 1As shown, in some embodiments, the lamp 100 may further include a housing 109, which may be located at the upper end of the lampshade 101 and at least cover a portion of the upper end of the lampshade 101. The housing 109 may be a prismatic or cylindrical hollow cylinder, and the upper end of the lampshade 101 extends from the bottom end of the hollow cylinder into the hollow portion of the housing 109. By configuring housings 109 of different specifications, the lamp 100 may be configured in heating devices of different specifications according to process requirements.

[0070] like Figure 1 As shown, in some examples, the lamp 100 may further include a seal 108. The seal 108 may be inserted into the top of the shell 109, and part of the seal 108 may extend from the top of the shell 109 to the outside of the shell 109; it can be understood that the shell 109 at least covers part of the lampshade 101 and the seal 108. Among them, the seal 108 and the shell 109 may be made of insulating materials. The seal 108 may be an annular body to improve the sealing performance of the seal 108. In other examples, the seal 108 may be arranged at the upper end of the main body 1011, and may be used to close the gap between the first connector 104 and the first through hole, and to close the gap between the second connector 105 and the second through hole, so as to form a closed environment in the lamp cavity 1013.

[0071] In some embodiments, the lamp 100 may further include: a support member 106, which is configured in the lamp cavity 1013 and connected to the wall of the lampshade 101; an elastic member 107, which is connected to the support member 106 and to the first light-emitting member 102; the elastic member 107 is used to prevent the first light-emitting member 102 from deforming or deflecting.

[0072] There can be multiple support members 106, and the configuration positions of the multiple support members 106 in the lamp cavity 1013 can be set according to actual needs. For example, at least two support members 106 are distributed along the axial direction of the lamp 100 at intervals, or at least two are distributed along the radial direction of the lamp 100 and are located on opposite sides of the first light-emitting member 102. Each support member 106 can be configured to extend at least partially along the radial direction of the lamp 100, or at least partially along the axial direction of the lamp 100.

[0073] The support member 106 can be understood as a structure for fixing the elastic member 107 on the wall of the lampshade 101, and is generally made of a material that is not easily deformed. The support member 106 can be arranged at the top end of the lampshade 101, or at the bottom end of the lampshade 101, or the two ends of the support member 106 are respectively connected to the top end and the bottom end of the lampshade 101; there are many ways to connect the support member 106 and the wall of the lampshade 101, for example, there is a slot on the wall of the lampshade 101, and the support member 106 is inserted into the slot.

[0074] In one example, the elastic member 107 may include a telescopic spring. A plurality of elastic members 107 may be provided, and they may be connected to the support member 106 in a one-to-one configuration. That is, at least two elastic members 107 may be spaced apart along the axial direction of the lamp 100, or at least two elastic members 107 may be distributed along the radial direction of the lamp 100 and located on opposite sides of the first light-emitting member 102.

[0075] There can be multiple connection relationships between the elastic member 107 and the support member 106. In some examples, the elastic member 107 can be sleeved on the support member 106, and the elastic member 107 is connected to the first light-emitting member 102; wherein the support member 106 guides the expansion and contraction direction of the elastic member 107 to prevent the elastic member 107 from being skewed in the axial direction of the lamp 100. In other examples, one end of the elastic member 107 is fixedly connected to the support member 106, and the other end of the elastic member 107 is connected to the first light-emitting member 102.

[0076] In some embodiments, at least a portion of the support member 106 extends radially along the lamp 100, and the elastic member 107 is sleeved on the portion of the support member 106 extending radially along the lamp 100. The support member 106 guides the extension and contraction direction of the elastic member 107 to prevent the elastic member 107 from being skewed in the axial direction of the lamp 100.

[0077] In other examples, one end of the elastic member 107 facing the first light emitting member 102 can be bent into a hook shape to be hooked on the first light emitting member 102. In this way, the elastic member 107 can prevent the first light emitting member 102 from deflecting downward under the action of gravity and can also prevent the first light emitting member 102 from deforming.

[0078] In some embodiments, at least part of the support member 106 extends along the axial direction of the lamp 100; the elastic member 107 has a telescopic portion and a connecting portion connected to the telescopic portion; the telescopic portion is sleeved on the portion of the support member 106 extending along the axial direction of the lamp 100; the connecting portion extends along the radial direction of the lamp 100; and the connecting portion is connected to the first light-emitting member 102. In this way, the telescopic portion can prevent the first light-emitting member 102 from deforming under temperature changes and can also prevent the first light-emitting member 102 from deflecting downward under the action of gravity.

[0079] When the temperature of the first light-emitting component 102 changes too much and the first light-emitting component 102 is deformed in the radial or axial direction of the lamp due to the movement of internal particles, the elastic component 107 can provide a force to prevent the first light-emitting component 102 from deforming, and the elastic component 107 can extend or contract and store potential energy as the first light-emitting component 102 is deformed; after the internal particles of the first light-emitting component 102 stop moving, the deformation of the first light-emitting component 102 itself stops, and under the action of the potential energy of the elastic component 107, the elastic component 107 will drive the first light-emitting component 102 to return to its original state.

[0080] In other examples, a supporting portion may be provided at one end of the elastic member 107 , and a portion of the first light-emitting member 102 is placed on the supporting portion.

[0081] In some embodiments, the elastic member 107 may include multiple elastic members 107, and the multiple elastic members 107 may be evenly hooked on the first light-emitting member 102. For example, the length of the first light-emitting member 102 along the axial direction of the lamp 100 is 12 mm, and three elastic members 107 may be used and respectively hooked at the positions of 3 mm, 6 mm and 9 mm of the first light-emitting member 102. The following provides three examples of elastic members 107 preventing the first light-emitting member 102 from being displaced and deformed along the longitudinal direction of the lamp 100.

[0082] For example, in some embodiments, three support members 106 and three elastic members 107 are used, which are evenly distributed along the circumference of the first light-emitting member 102; the three support members 106 all extend along the axial direction of the lamp, and the three support members 106 extend from the upper end to the lower end of the main body 1011 respectively, and the extension lengths of the three support members 106 are different, among which the shortest support member 106 extends approximately to the 3rd mm of the first light-emitting member 102 (that is, along the axial direction of the lamp, the distance between the first light-emitting member 102 and its top end is 3 mm), and the second longest support member 106 extends approximately to the 6th mm of the first light-emitting member 102 (that is, along the axial direction of the lamp, the distance between the first light-emitting member 102 and its top end is 3 mm). 102 and its top end are at a distance of 6mm), the longest support member 106 roughly extends to 9mm of the first light-emitting member 102 (that is, along the axial direction of the lamp, the distance between the first light-emitting member 102 and its top end is 9mm); three elastic members 107 are respectively mounted on the support members 106, and the three elastic members 107 can be extended and retracted along the axial direction of the lamp. One end of the three elastic members 107 extends along the radial direction of the lamp 100 and is respectively hooked on the positions of 3mm, 6mm and 9mm of the first light-emitting member 102 to prevent the first light-emitting member 102 from being deformed and to prevent the first light-emitting member 102 from deviating downward under the action of gravity.

[0083] For another example, in some embodiments, three support members 106 and three elastic members 107 are respectively located on the same side of the first light-emitting member 102; the three support members 106 extend respectively along the axial direction of the lamp, wherein the first support member 106 extends from the upper end of the main body 1011 to the lower end approximately to the 3 mm position of the first light-emitting member 102 (that is, along the axial direction of the lamp, the distance between the first light-emitting member 102 and its top end is 3 mm), and the second support member 106 extends from the lower end of the main body 1011 to the upper end approximately to the 9 mm position of the first light-emitting member 102 (that is, along the axial direction of the lamp, the distance between the first light-emitting member 102 and its top end is 3 mm). Axially, the distance between the first light-emitting component 102 and its top end is 9 mm), the two ends of the third support component 106 are respectively connected to the upper end and the lower end of the main body 1011, and the third support component 106 is located on the outside of the first support component 106 away from the central axis of the lamp; three elastic components 107 are respectively mounted on the support components 106, and the three elastic components 107 can be extended and retracted along the axial direction of the lamp. The three elastic components 107 are respectively hooked on the 3mm, 6mm and 9mm positions of the first light-emitting component 102 to prevent the first light-emitting component 102 from being offset or deformed.

[0084] For example Figure 1 , Figure 2 As shown, two support members 106 and two elastic members 107 are used, which are respectively located on the same side of the first light-emitting member 102; the two support members 106 extend respectively along the radial direction of the lamp 100, one of the support members 106 corresponds to the 4mm position of the first light-emitting member 102 (that is, along the axial direction of the lamp, the distance between the first light-emitting member 102 and its top end is 4mm), and the other support member 106 corresponds to the 8mm position of the first light-emitting member 102 (that is, along the axial direction of the lamp, the distance between the first light-emitting member 102 and its top end is 8mm); the two elastic members 107 are respectively mounted on the two support members 106, and the two elastic members 107 are extended and retracted along the radial direction of the lamp. The two elastic members 107 are respectively hooked at the 4mm and 8mm positions of the first light-emitting member 102 to prevent the first light-emitting member 102 from being offset or deformed.

[0085] In other examples, among the multiple elastic members 107, a portion of the elastic members 107 can be expanded and contracted along the axial direction of the lamp, and another portion of the elastic members 107 can be expanded and contracted along the radial direction of the lamp, which can be specifically configured according to actual needs.

[0086] When configuring the initial amount of the elastic member 107 or the sum of the initial amounts of the plurality of elastic members 107 , it may be configured to be substantially equal to the gravity of the first light-emitting member 102 , so as to achieve pre-tightening of the first light-emitting member 102 .

[0087] like Figure 3As shown, the present disclosure provides a heating device 200 for semiconductor workpiece heat treatment equipment, comprising: a lamp holder 201 for connecting to the heat treatment equipment; a reflective cover 202 connected to the lamp holder 201, the reflective cover 202 is located on the side of the lamp holder 201 facing the reaction chamber of the processing equipment, and includes a plurality of accommodating cavities; the lamp 100 in any of the above embodiments, at least part of the plurality of lamps 100 is accommodated in the corresponding accommodating cavities.

[0088] The heating device 200 can be arranged in an area opposite to the upper surface of the heat treatment equipment and the workpiece (such as a wafer). The arrangement of the multiple lamps 100 in the heating device 200 can be adjusted according to the shape of the workpiece, so that the sum of the areas irradiated to the upper surface of the workpiece by the multiple lamps 100 is not less than the area of ​​the upper surface of the workpiece. When the workpiece is heat treated, the light generated by the heating device 200 enters the reaction chamber of the heat treatment equipment to increase the temperature of the reaction chamber to perform heat treatment on the workpiece. According to the heating device 200 disclosed in the present invention, the heat treatment effect of the workpiece can be improved.

[0089] In some embodiments, the heating device 200 further includes: a lamp 100 plate, located between the lamp holder 201 and the reflector 202 to reinforce the connection between the lamp holder 201 and the reflector 202 to prevent the reflector 202 from shaking in the lamp holder 201 or falling off from the lamp holder 201 .

[0090] In some embodiments, the heating power of each lamp 100 in the heating device 200 may be the same or different, as long as the total heating power is sufficient to make the temperature in the reaction chamber of the processing equipment reach 3000 degrees Celsius.

[0091] In the description of this specification, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present disclosure.

[0092] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present disclosure, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0093] In the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0094] In the present disclosure, unless otherwise expressly specified and limited, a first feature being “above” or “below” a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being “above”, “above”, and “above” a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0095] The disclosure above provides many different embodiments or examples to realize different structures of the present disclosure. In order to simplify the disclosure of the present disclosure, the components and settings of specific examples are described above. Of course, they are only examples, and the purpose is not to limit the present disclosure. In addition, the present disclosure can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0096] The above specific implementations do not constitute a limitation on the protection scope of the present disclosure. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A lamp for a semiconductor workpiece heat treatment device, comprising: The lampshade comprises a main body and a process hole connected to one end of the main body; The inner space of the main body portion defines a lamp cavity, the inner space of the process hole portion defines a process hole cavity, and the process hole cavity is communicated with the lamp cavity; A light-emitting device is located in the lampshade and has a first connecting portion and a second connecting portion; the light-emitting device includes a first light-emitting member and a second light-emitting member; the first light-emitting member is located in the lamp cavity, and the first light-emitting member is provided with the first connecting portion; the first light-emitting member is formed by a spiral coil wound along the axial direction of the lamp, the spiral coil is formed by a first filament wound, and the spiral axis of the first filament is the spiral direction of the spiral coil; the second light-emitting member is connected to the first light-emitting member; at least a portion of the second light-emitting member is arranged in the process cavity; One of the first light emitting member and the second light emitting member is provided with the second connecting portion; A first connector, at least partially disposed in the lamp cavity and electrically connected to the first connecting portion of the first light-emitting element; The second connector is at least partially disposed in the lamp cavity and is electrically connected to the second connecting portion of the first light-emitting element.

2. The lamp according to claim 1, wherein The end of the main body away from the process hole portion is provided with a first through hole and a second through hole; the first connector is inserted into the first through hole and extends toward the first connecting portion; the second connector is inserted into the second through hole and extends toward the second connecting portion; The first connection portion is close to an end of the main body portion away from the process hole portion, and the second connection portion is close to an end of the main body portion toward the process hole portion.

3. The lamp according to claim 1, wherein The second light-emitting element is formed by winding a second filament along the axial direction of the lamp.

4. The lamp according to claim 1, wherein Also includes: A support member, disposed in the lamp cavity and connected to a wall of the lampshade; an elastic member connected to the supporting member and to the first light-emitting member; The elastic member is used to prevent the first light-emitting member from deforming or deflecting.

5. The lamp according to claim 4, wherein One end of the elastic member facing the first light-emitting member is bent into a hook shape and hooked on the first light-emitting member to prevent the first light-emitting member from deviating along the axial direction of the lamp and preventing the first light-emitting member from deforming.

6. The lamp according to claim 4, wherein At least a portion of the support member extends in the radial direction of the lamp, and the elastic member is sleeved on the portion of the support member extending in the radial direction of the lamp.

7. The lamp according to claim 4, wherein At least a portion of the support member extends along the axial direction of the lamp; The elastic member has a telescopic portion and a connecting portion connected to the telescopic portion; the telescopic portion is sleeved on the portion of the support member extending along the axial direction of the lamp; the connecting portion extends along the radial direction of the lamp; and the connecting portion is connected to the first light-emitting member.

8. The lamp according to claim 4, wherein The elastic member comprises a plurality of; At least two of the elastic members are distributed along the axial direction of the lamp at intervals; and / or at least two of the elastic members are distributed along the radial direction of the lamp and are located on two opposite sides of the first light-emitting member.

9. A lamp according to any one of claims 1 to 8, wherein: The first filament is made of at least tungsten; And / or, the diameter of the first filament is greater than or equal to 0.3 mm and less than or equal to 0.5 mm.

10. The lamp according to any one of claims 1 to 8, wherein The winding inner diameter of the spiral coil is greater than or equal to 0.3 mm and less than or equal to 0.5 mm; and / or, along the axial direction of the lamp, the length of the spiral coil is greater than or equal to 12 mm and less than or equal to 14 mm; And / or, the pitch between two adjacent turns of the spiral coil is greater than or equal to 0.4 mm and less than or equal to 0.6 mm.

11. A lamp according to any one of claims 1 to 8, wherein The winding inner diameter of the first light-emitting element is greater than or equal to 4 mm and less than or equal to 6 mm; And / or, the pitch between two adjacent turns of the first light-emitting element is greater than or equal to 1.4 mm and less than or equal to 1.6 mm.

12. The lamp according to any one of claims 1 to 8, wherein The winding inner diameter of the first light-emitting element is greater than or equal to 5 mm and less than or equal to 8 mm; And / or, the pitch between two adjacent turns of the first light-emitting element is greater than or equal to 1.4 mm and less than or equal to 1.6 mm.

13. A heating device for a semiconductor workpiece heat treatment device, comprising: a lamp holder for connection with the heat treatment equipment; A reflector connected to the lamp holder, the reflector is located on a side of the lamp holder facing the reaction chamber of the processing equipment and includes a plurality of accommodating chambers; A plurality of lamps according to any one of claims 1 to 12, wherein at least parts of the plurality of lamps are accommodated in corresponding accommodating cavities.

14. The heating device according to claim 13, wherein: Also includes: The lamp plate is located between the lamp holder and the reflector cover to strengthen the connection between the lamp holder and the reflector cover.

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