Waveguide integrated infrared spectrum chip based on micro-ring filter and detection method thereof

Abstract

The invention relates to a waveguide integrated infrared spectrum chip based on micro-ring filters, the waveguide integrated infrared spectrum chip is matched with an optical waveguide, the optical waveguide is used for transmitting light with different wavelengths, the waveguide integrated infrared spectrum chip comprises a plurality of downloading waveguides arranged in an array, and a micro-ring filter is optically coupled between each downloading waveguide and the optical waveguide; and an infrared detector is arranged at the output end of each downloading waveguide. The micro-ring filter array is combined with the infrared detector, so that the sensing of infrared spectrum is realized, the size is small, and the cost is low.

Description

Technical Field

[0001] The invention relates to the technical field of infrared detectors, and in particular to a waveguide integrated colloidal quantum dot infrared detector. Background Art

[0002] Spectra, as the fingerprint of matter, can be used to identify everything. Infrared spectral sensing is widely used in inspection and quality control in various industries such as semiconductors, electronics and pharmaceuticals; crop health monitoring, food quality control and moisture content analysis; vascular imaging, tissue differentiation and endoscopy; environmental monitoring, geological and mineral exploration; enhanced vision, penetrating haze, smoke, rain and snow, and improving situational awareness; national defense security, target identification, camouflage detection and secret surveillance; scientific research, astronomy, biology, chemistry and materials science. Traditional infrared spectrometers use a spectroscopic structure, which is large in size, high in cost and difficult to promote. Spectral chips abandon the spectroscopic structure, are small in size and low in cost, and have great potential to become daily consumer products.

[0003] Most existing spectral chips can realize spectral perception in the visible light band but cannot perceive infrared. Summary of the invention

[0004] In order to achieve the purpose of the present invention, the technical solution adopted by the present invention is: a waveguide integrated infrared spectrum chip based on a microring filter, which cooperates with an optical waveguide, and the optical waveguide is used to transmit light of different wavelengths, including: a plurality of download waveguides arranged in an array, each download waveguide is optically coupled with a microring filter between the optical waveguide, and an infrared detector is arranged at the output end of the download waveguide.

[0005] Preferably, the infrared detector is an infrared colloidal quantum dot detector.

[0006] Preferably, the infrared colloidal quantum dot detector comprises: a silicon dioxide film deposited on a download waveguide, a silicon optical waveguide formed on the silicon dioxide film, a graphene pattern made on the silicon optical waveguide, and colloidal quantum dots and two electrodes are arranged on the upper surface of the graphene pattern, and the two electrodes are arranged on both sides of the colloidal quantum dots.

[0007] Compared with the prior art, the present invention has the following beneficial effects: 1. The micro-ring filter array is combined with an infrared detector to realize the perception of the infrared spectrum, with small size and low cost.

[0008] 2. By combining colloidal quantum dots with two electrodes, the carriers can circulate multiple times in graphene, producing an amplification effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a schematic diagram of the colloidal quantum dot infrared spectrum chip based on the microring filter in the present invention; Figure 2 It is a cross-sectional schematic diagram of a single colloidal quantum dot detector in the present invention; Figure 3 It is a schematic top view of a single colloidal quantum dot detector in the present invention; Figure 4 Schematic diagram of the processing technology for integrating colloidal quantum dot infrared detectors into a single waveguide. In the figure: 1. Optical waveguide; 2. Download waveguide; 3. Microring filter; 4. Silicon dioxide film; 5. Silicon optical waveguide; 6. Graphene pattern; 7. Colloidal quantum dots; 8. Electrode. DETAILED DESCRIPTION

[0010] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0011] Example: like Figures 1 to 4 The present invention provides a technical solution: a waveguide integrated infrared spectrum chip based on a micro-ring filter, which cooperates with an optical waveguide 1, and the optical waveguide 1 is used to transmit light of different wavelengths, including: a plurality of transmission waveguides 2 arranged in a row, each transmission waveguide 2 is optically coupled with a micro-ring filter 3 between the optical waveguide 1, and an infrared detector is arranged at the output end of the transmission waveguide 2. By combining the array of micro-ring filters 3 with the infrared detector, the perception of the infrared spectrum is realized, with small size and low cost.

[0012] The infrared detector specifically adopts an infrared colloidal quantum dot detector. The infrared colloidal quantum dot detector includes: a silicon dioxide film 4 deposited on a download waveguide 2, a silicon optical waveguide 5 formed on the silicon dioxide film 4, a graphene pattern 6 made on the silicon optical waveguide 5, a colloidal quantum dot 7 and two electrodes 8 arranged on the upper surface of the graphene pattern 6, and the two electrodes 8 are arranged on both sides of the colloidal quantum dot 7.

[0013] The colloidal quantum dots 7 cooperate with the two electrodes 8 to achieve multiple circulation of carriers in the graphene.

[0014] The colloidal quantum dot 7 infrared detector at the end of the download waveguide 2 adopts a colloidal quantum dot 7 / graphene heterostructure infrared detector. Light is absorbed by the colloidal quantum dot 7 to generate electron-hole pairs, one of which will be transferred to the graphene. The carriers transferred to the graphene will move under the action of an external electric field to generate external photocurrent.

[0015] Since the carrier mobility of graphene is relatively high, the photogenerated carriers will circulate in the graphene many times, producing an amplification effect. Therefore, the photodetector with this structure has a very high sensitivity.

[0016] The processing process of a single colloidal quantum dot infrared detector includes: first, making a silicon optical waveguide 5 based on a microring filter 3, then making a graphene pattern 6 on the surface of the silicon optical waveguide 5, then making a metal electrode 8 on the surface of the graphene pattern 6, and finally preparing an imaged colloidal quantum dot 7 film on the surface of the graphene pattern 6.

[0017] During operation, infrared light is coupled into the silicon optical waveguide 5, and light with wavelength WL1 is coupled into the first microring, and finally absorbed by the detector on the download waveguide 2, generating photocurrent I1; then light with wavelength WL2 is coupled into the second microring, and finally absorbed by the detector on the download waveguide 2, generating photocurrent I2; and so on, until the remaining light with wavelength WLn is coupled into the nth microring, generating photocurrent In. The wavelength is used as the horizontal coordinate and the photocurrent is used as the vertical coordinate, and the curve drawn is the incident spectrum.

[0018] The embodiments of the present invention disclose preferred embodiments, but are not limited thereto. A person skilled in the art can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. However, as long as they do not deviate from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims

1. A waveguide integrated infrared spectrum chip based on a microring filter, in cooperation with an optical waveguide, the optical waveguide being used to transmit light of different wavelengths, characterized in that: include: A plurality of download waveguides are arranged in a row, each download waveguide is optically coupled with a micro-ring filter between the optical waveguide, and an infrared detector is arranged at the output end of the download waveguide.

2. The waveguide integrated infrared spectrum chip based on microring filter according to claim 1, characterized in that: The infrared detector adopts an infrared colloidal quantum dot detector.

3. The waveguide integrated infrared spectrum chip based on microring filter according to claim 2, characterized in that: The infrared colloidal quantum dot detector includes: a silicon dioxide film deposited on a download waveguide, a silicon optical waveguide formed on the silicon dioxide film, a graphene pattern made on the silicon optical waveguide, and colloidal quantum dots and two electrodes are arranged on the upper surface of the graphene pattern, and the two electrodes are arranged on both sides of the colloidal quantum dots.

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