Device for preparing tuning fork type scanning probe microscope probe

Abstract

The invention relates to a device for preparing a tuning fork type scanning probe microscope probe, the device is composed of a base, a tuning fork fixing frame, a needle tip clamping frame, a dispensing support, a microscopic observation instrument and a laser cutter, and the tuning fork fixing frame, the needle tip clamping frame, the dispensing support, the microscopic observation instrument and the laser cutter are all fixedly installed on the base. The laser cutter comprises a laser device base and a laser device, and the laser device is installed on a lifting support of the laser device base, located over the quartz tuning fork fixing frame and used for cutting the bonded needle tip in a non-contact mode. The device provided by the invention solves the problems that the tip is easy to damage during the bonding of the tuning fork probe and the performance of the quartz tuning fork probe is reduced because the tip is too long, thereby improving the reliability of the manufactured tuning fork type scanning probe microscope probe.

Description

Technical Field

[0001] The invention relates to the technical field of precision machining equipment, in particular to a device for preparing a tuning fork type scanning probe microscope probe. Background Art

[0002] With the development of science and technology, scanning probe microscopy (SPM) has become an important tool for studying the surface morphology and properties of materials. In the probe design of scanning probe microscopy, force sensor is a key component. SPM probes usually use cantilever beam force sensors, but the complexity of the cantilever beam force sensor structure poses considerable challenges to the manufacturing and assembly process. In order to overcome these challenges, researchers have been exploring new force sensors, among which quartz tuning forks have attracted widespread attention due to their excellent performance. Quartz tuning forks have many significant advantages over traditional silicon cantilevers, including high elastic constant k, self-excitation and self-induction, low temperature drift and other characteristics. The above characteristics make quartz tuning forks have great potential in scanning probe microscopy probe applications.

[0003] The traditional cantilever beam is difficult to prepare independently due to its complex structural design. The quartz tuning fork probe has a simple structure and can be obtained by self-preparation. The quartz tuning fork probe is composed of a quartz tuning fork and a needle tip. The needle tip is bonded to the end face of the tuning fork arm of the quartz tuning fork. The quartz tuning fork is shelled with a commercial crystal oscillator. The end face of the tuning fork arm of the quartz tuning fork is a rectangular cross-section of 0.3mm-0.6mm. The distance between the two tuning fork arms is about 0.3mm. The needle tip is usually a conical structure, and the material is generally tungsten wire. The needle tip diameter is 0.2mm and the length is 1-2mm. The detection performance of the quartz tuning fork probe depends to a large extent on the parameters of the needle tip, the bonding method of the needle tip and the tuning fork arm, and the type and amount of adhesive. If the needle tip is too long, it will affect the resonant frequency of the quartz tuning fork probe, thereby affecting the detection sensitivity and accuracy of the scanning probe microscope. Insufficient adhesive may cause the needle tip of the probe to fall off during the scanning process. Excessive adhesive may cause the glue to overflow, affecting the vibration characteristics of the quartz tuning fork and reducing the resonant frequency and sensitivity of the probe.

[0004] The main problems with existing manually bonded quartz tuning fork probes are: (1) The small size of the needle tip is not conducive to clamping and bonding, and the slightest carelessness may cause damage to the needle tip or the quartz tuning fork; (2) Manual operation is difficult, and it is difficult to accurately control the bonding of the quartz tuning fork and the needle tip, resulting in unstable performance of the quartz tuning fork probe; (3) The quality control of manual bonding is relatively difficult, and the bonding quality of each probe may be different, which will affect the final imaging and measurement results. Summary of the invention

[0005] In order to solve the problems that the tuning fork probe tip is easily damaged during bonding and the performance of the quartz tuning fork probe is degraded due to the tip being too long, the bonding process is made simple and easy to operate, and the produced probe has excellent and reliable performance.

[0006] In view of this, the present invention provides a device for preparing a scanning probe microscope probe that is convenient for clamping and bonding to solve the above problems.

[0007] To achieve the above object, the present invention provides the following solutions: A device for preparing a tuning fork scanning probe microscope probe, characterized in that it comprises: a base, a tuning fork fixing frame, a needle tip clamping frame, a dispensing bracket, a microscopic observation instrument, and a laser cutter; the tuning fork fixing frame, the needle tip clamping frame, the dispensing bracket, the microscopic observation instrument, and the laser cutter are all fixedly mounted on the base;

[0008] Preferably, the tuning fork fixing frame comprises: a tuning fork base and a tuning fork clamping plate; the tuning fork base is fixedly mounted on the base, and the tuning fork clamping plate is fixedly mounted on the tuning fork clamping plate; the tuning fork clamping plate is composed of a clamping plate and a pressure plate, and the clamping plate and the pressure plate are pressed together by means of stud screws, springs and nuts, and the quartz tuning fork is placed between the clamping plate and the pressure plate, and the quartz tuning fork is fixed by means of the elastic force of the spring.

[0009] Preferably, the needle tip clamping frame includes: a first base, a first XY-axis micro-displacement platform, a first Z-axis support plate, a first Z-axis adjustment piece and a needle tip clamping plate; the first base is fixedly mounted on the base, the first XY-axis micro-displacement platform is fixedly connected to the upper end of the first base, the first Z-axis support plate is mounted and fixed on the first XY-axis micro-displacement platform, the first Z-axis adjustment piece is mounted and fixed on the side of the first Z-axis support plate, and the needle tip clamping plate is mounted and fixed on the first Z-axis adjustment piece; the first XY-axis micro-displacement platform and the first Z-axis adjustment piece realize micro-displacement movement of the needle tip clamping frame in the X-axis, Y-axis and Z-axis directions; the needle tip clamping plate is composed of an upper clamping plate and a lower clamping plate, and the two clamping plates are used to clamp the needle tip at the clamping position through the cooperation of a locking screw and a nut to facilitate the bonding of the needle tip to the quartz tuning fork.

[0010] Preferably, the glue dispensing bracket includes: a second base, a second XY-axis micro-displacement platform, a second Z-axis support plate, a second Z-axis adjusting piece, a syringe clamp, and a glue dispensing barrel; the second base is fixedly mounted on the base, the second XY-axis micro-displacement platform is fixedly connected to the upper end of the second base, the second Z-axis support plate is mounted and fixed on the second XY-axis micro-displacement platform, the second Z-axis adjusting piece is mounted and fixed on the second Z-axis support plate, the syringe clamp is fixedly mounted on the second Z-axis adjusting piece, and the glue dispensing barrel is fixedly mounted in the syringe clamp; the second XY-axis micro-displacement platform and the second Z-axis adjusting piece are used to realize micro-displacement movement of the glue dispensing barrel in the X-axis, Y-axis and Z-axis directions, move the glue dispensing barrel to above the needle tip and the quartz tuning fork, and drop a certain amount of glue on the bonding point between the needle tip and the quartz tuning fork.

[0011] Preferably, the microscope observation instrument includes: a microscope base, a microscope holder and a microscope; the microscope base is fixedly mounted on the base, the microscope holder is fixedly mounted on the cylinder of the microscope base, and the microscope is fixedly mounted in the microscope holder. The microscope is used to observe whether the distance between the needle tip and the tuning fork arm is within the bonding range and whether the focal length of the laser is focused on the needle tip.

[0012] Preferably, the laser cutter comprises: a laser base and a laser; the laser base is fixedly mounted on the base, the laser is mounted on a lifting frame of the laser base, the lifting frame can be moved in the Z-axis direction of the laser base by a hand-cranked lifting shaft, the laser is moved in the X-axis direction by the cooperation of the slide rail and the fastening screw on the lifting bracket, and the laser controls the length of the needle tip by non-contact cutting of the bonded needle tip.

[0013] The beneficial effects of the present invention are:

[0014] (1) The present invention uses a long needle tip for bonding, which makes the needle tip clamping and bonding process simple and easy to operate, and is not easy to damage the needle tip and the quartz tuning fork.

[0015] (2) The present invention uses a laser cutter to cut the needle tip after bonding without contact, and controls the length of the needle tip, so that the manufactured quartz tuning fork probe has excellent performance.

[0016] (3) The present invention utilizes a micro-displacement platform to control the displacement of the needle tip and the glue dispensing tube, thereby improving the success rate of bonding. The glue dispensing tube can dispense glue accurately and quantitatively, making the performance of the manufactured quartz tuning fork probe reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The present invention provides a device for preparing a tuning fork scanning probe microscope probe. Figure 1 ;

[0018] Figure 2 The present invention provides a device for preparing a tuning fork scanning probe microscope probe. Figure 2 ;

[0019] Figure 3 It is a schematic diagram of the structure of the tuning fork fixing frame of the present invention;

[0020] Figure 4 It is a schematic diagram of the structure of the needle tip clamping frame in the present invention;

[0021] Figure 5 It is a schematic diagram of the structure of the glue dispensing bracket in the present invention;

[0022] Figure 6 It is a structural schematic diagram of the microscopic observation instrument in the present invention;

[0023] Figure 7 It is a schematic diagram of the structure of the laser cutter in the present invention.

[0024] In the accompanying drawings, the components represented by the reference numerals are as follows: 1. Base; 2. Tuning fork fixing frame; 3. Needle tip clamping frame; 4. Glue dispensing bracket; 5. Microscope observation instrument; 6. Laser cutter; 7. Tuning fork base; 8. Tuning fork clamping plate; 8A. Clamping plate; 8B. Pressing plate; 9. Quartz tuning fork; 10. First base; 11. First XY axis micro displacement platform; 12. First Z axis support plate; 13. First Z axis adjustment member; 14. Needle tip clamping plate; 14A. Upper clamping plate; 14B. Lower clamping plate; 15. Second base; 16. Second XY axis micro displacement platform; 17. Z axis support member; 18. Second Z axis adjustment member; 19. Syringe clamp; 20. Glue dispensing barrel; 21. Microscope base; 22. Microscope clamp; 23. Microscope; 24. Laser base; 25. Laser; 25A. Lifting bracket; 25B. Hand-cranked lifting shaft.

[0025] In the description of the present invention, it should be noted that, in the present application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprises", "comprising" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprising a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0026] Example, see Figure 1-Figure 7 , a device for preparing a tuning fork scanning probe microscope probe, comprising: a base 1, a tuning fork fixing frame 2, a needle tip clamping frame 3, a dispensing bracket 4, a microscopic observation instrument 5, and a laser cutter 6; the tuning fork fixing frame 2, the needle tip clamping frame 3, the dispensing bracket 4, the microscopic observation instrument 5, and the laser cutter 6 are all fixedly installed on the base 1;

[0027] Specifically, Figure 3 As shown, the tuning fork fixing frame 2 includes: a tuning fork base 7 and a tuning fork clamping plate 8; the tuning fork base 7 is fixedly mounted on the base 1, and the tuning fork clamping plate 8 is fixedly mounted on the tuning fork clamping plate 7; the tuning fork clamping plate 8 is composed of a clamping plate 8A and a pressing plate 8B, and the clamping plate 8A and the pressing plate 8B are pressed together by a stud screw, a spring and a nut, so that the quartz tuning fork 9 to be glued can be fixed and pressed.

[0028] Specifically, Figure 4 As shown, the needle tip clamping frame 3 includes: a first base 10, a first XY-axis micro-displacement platform 11, a first Z-axis support plate 12, a first Z-axis adjustment member 13 and a needle tip clamping plate 14; the first base 10 is fixedly installed on the base 1, the first XY-axis micro-displacement platform 11 is fixedly connected to the upper end of the first base 10, the first Z-axis support plate 12 is fixedly installed on the first XY-axis micro-displacement platform 11, the first Z-axis adjustment member 13 is fixedly installed on the side of the first Z-axis support plate 12, the needle tip clamping plate 14 is fixedly installed on the first Z-axis adjustment member 13, the needle tip clamping plate 8 is composed of an upper clamping plate 14A and a lower clamping plate 14B, and the two clamping plates are used to clamp the needle tip in the clamping position through the cooperation of a locking screw and a nut, and the needle tip is moved to the same height of the tuning fork arm of the quartz tuning fork 9 through the first XY-axis micro-displacement platform 11 and the first Z-axis adjustment member 13, and waits for bonding within the bonding range.

[0029] Specifically, Figure 5As shown, the glue dispensing bracket 4 includes: a second base 15, a second XY-axis micro-displacement platform 16, a second Z-axis support plate 17, a second Z-axis adjustment member 18, a syringe clamp 19, and a glue dispensing tube 20; the second base 15 is fixedly mounted on the base 1, the second XY-axis micro-displacement platform 16 is fixedly connected to the upper end of the second base 15, the second Z-axis support plate 17 is mounted and fixed on the second XY-axis micro-displacement platform 16, the second Z-axis adjustment member 18 is mounted and fixed on the second Z-axis support plate 17, the syringe clamp 19 is fixedly mounted on the second Z-axis adjustment member 18, and the glue dispensing tube 20 is fixedly mounted in the syringe clamp 19; the second XY-axis micro-displacement platform 16 and the second Z-axis adjustment member 18 are used to realize the micro-displacement movement of the glue dispensing tube 20 in the X-axis, Y-axis and Z-axis directions, and move the needle of the glue dispensing tube 20 to the upper end of the tuning fork arm for glue dispensing.

[0030] Specifically, Figure 1-Figure 6 As shown, the microscope observation instrument 5 includes: a microscope base 21, a microscope holder 22 and a microscope 23; the microscope base 21 is fixedly mounted on the base 1, the microscope holder 22 is fixedly mounted on the cylinder of the microscope base 21, and the microscope 23 is fixedly mounted in the microscope holder 22; the microscope holder 22 can realize the movement of the microscope 23 at a certain angle, and focus the microscope 23 on the tuning fork arm of the quartz tuning fork 9, which is used to observe the distance between the tuning fork arm of the quartz tuning fork 9 and the needle tip in real time, so that the micro-displacement platform can be accurately adjusted to allow the needle tip and the dispensing tube 20 to be located at the upper end of the tuning fork arm of the quartz tuning fork 9.

[0031] Specifically, Figure 1-Figure 7 As shown, the laser cutter 6 includes: a laser base 24 and a laser 25; the laser base 24 is fixedly mounted on the base 1, and the laser 25 is mounted on a lifting frame 24A of the laser base 24, the lifting frame 24A can be moved in the Z-axis direction of the laser base 25 by a hand-cranked lifting shaft 24B, and the laser 25 is moved in the X-axis direction by the slide rail on the lifting bracket 25A and the fastening screw; the laser 25 focuses the focal length on the bonded long needle tip by moving in the X-axis and Z-axis directions, and cuts the excess tail of the long needle tip non-contactly.

[0032] The following is a detailed description of the specific working process of this device:

[0033] 1. First, fix the quartz tuning fork 9 at the clamping position of the tuning fork fixing frame 2, with the tuning fork arm end of the quartz tuning fork 9 facing upward;

[0034] 2. Place the needle tip at the clamping position of the needle tip clamping plate 14 and tighten the screw to fix the needle tip;

[0035] 3. Adjust the direction and height of the microscope base 21 and the microscope holder 22 in the microscope observation instrument 5, and focus the microscope 23 on the tuning fork arm of the quartz tuning fork 9;

[0036] 4. Adjust the first Z-axis adjustment member 13 so that the needle tip is at the same height as the tuning fork arm of the quartz tuning fork 9, and adjust the X-axis and Y-axis adjustment knobs of the first XY-axis micro-displacement platform 11 so that the needle tip is within the effective bonding range of the tuning fork arm of the quartz tuning fork 9, and the needle tip does not touch the tuning fork arm;

[0037] 5. Adjust the second Z-axis adjustment member 18 so that the needle tip of the dispensing tube 20 is at the same height as the top of the tuning fork arm of the quartz tuning fork 9, and adjust the X-axis and Y-axis modulation knobs of the second XY-axis micro-displacement platform 16 so that the needle tip of the dispensing tube 20 is directly above the tuning fork arm of the quartz tuning fork 9;

[0038] 6. Use the glue dispensing tube 20 to quantitatively dispense glue on the end surface of the tuning fork arm of the quartz tuning fork 9, and then adjust the X-axis and Y-axis modulation knobs of the second XY-axis micro-displacement platform to make the glue dispensing tube 20 exit the effective bonding range between the tuning fork arm and the needle tip;

[0039] 7. Adjust the X-axis adjustment knob of the first XY-axis micro-displacement platform 11 so that one end of the needle tip contacts the end surface of the tuning fork arm of the quartz tuning fork 9 with glue, so that the needle tip is bonded to the end of the tuning fork arm of the quartz tuning fork 9 under the glue;

[0040] 8. After the glue solidifies, loosen the screws of the needle tip clamping plate 14 to disengage the needle tip from the clamping, and move the X-axis and Y-axis of the second XY-axis micro-displacement platform 16 to make the needle tip clamping plate 14 withdraw from the effective bonding range;

[0041] 9. Adjust the height of the laser 25 by hand-cranking the lifting shaft 25B and adjust the position of the laser 25 on the lifting bracket 25A so that the focus of the laser 25 is on the position where the needle tip needs to be cut off. Start the laser 25 to cut off the excess part of the needle tip. The bonding and cutting are completed, and the probe of the tuning fork scanning probe microscope is completed.

[0042] Although the specific embodiments of the present invention are described above, those skilled in the art should understand that these are only examples, and the protection scope of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. A device for preparing a tuning fork scanning probe microscope probe, characterized in that: It comprises: a base (1), a tuning fork fixing frame (2), a needle tip clamping frame (3), a dispensing frame (4), a microscopic observation instrument (5), and a laser cutter (6); The tuning fork fixing frame (2) comprises: a tuning fork base (7) and a tuning fork clamping plate (8); the tuning fork base (7) is fixedly mounted on the base (1); the tuning fork clamping plate (8) is fixedly mounted on the tuning fork base (7); the tuning fork clamping plate (8) is composed of a clamping plate (8A) and a pressing plate (8B); and the clamping plate (8A) and the pressing plate (8B) are pressed together by the cooperation of a stud screw, a spring and a nut. The needle tip clamping frame (3) is located on the right side of the tuning fork fixing frame (2); The needle tip clamping frame (3) comprises: a first base (10), a first XY-axis micro-displacement platform (11), a first Z-axis support plate (12), a first Z-axis adjustment member (13) and a needle tip clamping plate (14); the first base (10) is fixedly mounted on the base (1); the first XY-axis micro-displacement platform (11) is fixedly connected to the upper end of the first base (10); the first Z-axis support plate (12) is fixedly mounted on the first XY-axis micro-displacement platform (11); The first Z-axis adjusting member (13) is fixedly mounted on the first Z-axis supporting plate (12); the needle tip clamping plate (14) is fixedly mounted on the first Z-axis adjusting member (13); the first XY-axis micro-displacement platform (11) and the first Z-axis adjusting member (13) realize micro-displacement movement of the needle tip clamping plate (14) in the directions of the X-axis, the Y-axis and the Z-axis; the needle tip clamping plate (14) is composed of an upper clamping plate (14A) and a lower clamping plate (14B); the two clamping plates are fixed by locking screws and nuts. The glue dispensing bracket (4) is located on the left side of the tuning fork fixing bracket (2); The microscopic observation instrument (5) is located in front of the tuning fork fixing frame (2), and the microscope (23) of the microscopic observation instrument (5) is focused on the quartz tuning fork (9) on the tuning fork fixing frame (2); The laser cutter (6) comprises: a laser base (24) and a laser (25); the laser base (24) is fixedly mounted on the base (1) and is located on the right side of the needle tip clamping frame (3); the laser (25) is mounted on a lifting bracket (24A) of the laser base (24) and is located directly above the quartz tuning fork fixing frame (2) for non-contact cutting of the bonded needle tip.

2. The device for preparing a tuning fork scanning probe microscope probe according to claim 1, characterized in that: The glue dispensing bracket (4) comprises: a second base (15), a second XY-axis micro-displacement platform (16), a second Z-axis support plate (17), a second Z-axis adjustment member (18), a syringe clamp (19), and a glue dispensing cylinder (20); the second base (15) is fixedly mounted on the base (1); the second XY-axis micro-displacement platform (16) is fixedly connected to the upper end of the second base (15); the second Z-axis support plate (17) is fixedly mounted on the second XY-axis micro-displacement platform (16); the second Z-axis adjustment member (18) is fixedly mounted on the second Z-axis support plate (17); the second XY-axis micro-displacement platform (16) and the second Z-axis adjustment member (17) are used to realize micro-displacement movement of the glue dispensing cylinder (20) in the directions of the X-axis, the Y-axis and the Z-axis; the syringe clamp (19) is fixedly mounted on the second Z-axis adjustment member (18); and the glue dispensing cylinder (20) is fixedly mounted in the syringe clamp (19).

3. The device for preparing a tuning fork scanning probe microscope probe according to claim 1, characterized in that: The microscope observation instrument (5) comprises: a microscope base (21), a microscope holder (22) and a microscope (23); the microscope base (21) is fixedly mounted on the base (1), the microscope holder (22) is fixedly mounted on the cylinder of the microscope base (21), and the microscope (23) is fixedly mounted in the microscope holder (22).

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