Galvanometer calibration method, device and equipment

Abstract

The invention relates to the technical field of galvanometer calibration, and discloses a galvanometer calibration method, device and equipment, and the method comprises the steps: determining a galvanometer scanning region; acquiring a first control signal of the galvanometer and a first ideal coordinate corresponding to the first control signal; determining a first control signal deviation based on the first control signal and the first ideal coordinate; acquiring a plurality of second control signals of the galvanometer and second ideal coordinates corresponding to the second control signals; determining a second control signal deviation based on the second control signal and the second ideal coordinate; correcting the second control signal deviation based on the first control signal deviation to obtain a deviation function of the galvanometer; and calibrating the galvanometer based on the deviation function. According to the invention, high-precision and low-cost calibration can be carried out on galvanometer positioning.

Description

Technical Field

[0001] The present invention relates to the technical field of galvanometer calibration, and in particular to a galvanometer calibration method, device and equipment. Background Art

[0002] The dimensional accuracy of parts manufactured by 3D printing technology will be affected by the positioning accuracy of the galvanometer control. Since there is a nonlinear relationship between the deflection angle of the galvanometer and the coordinates of the processing plane, if a linear correspondence is used to control the galvanometer to deflect the laser beam to process the parts, dimensional errors will be introduced, affecting the molding accuracy of the parts. The galvanometer can be calibrated based on the difference between the actual irradiation position of the collected laser beam and the theoretical irradiation position.

[0003] In the related art, the actual irradiation position of the laser beam is mainly obtained through image sensors or array photoelectric sensors. Among them, the calibration of the galvanometer through the image sensor is limited by the spatial resolution of the image sensor, resulting in insufficient calibration accuracy; the calibration of the galvanometer through the array photoelectric sensor is costly.

[0004] In view of this, a galvanometer calibration method with high calibration accuracy and low cost is needed. Summary of the invention

[0005] In view of this, the present invention provides a galvanometer calibration method, which can perform high-precision and low-cost calibration on the galvanometer positioning.

[0006] In the first aspect, the present invention provides a galvanometer calibration method, the method comprising: determining a galvanometer scanning area; obtaining a first control signal of the galvanometer and a first ideal coordinate corresponding to the first control signal; the first control signal is a control signal of the galvanometer for the center point coordinates of the scanning area; based on the first control signal and the first ideal coordinates, determining the first control signal deviation; obtaining several second control signals of the galvanometer and second ideal coordinates corresponding to the second control signal; the second control signal is a control signal of the galvanometer for the boundary coordinates of the scanning area; based on the second control signal and the second ideal coordinates, determining the second control signal deviation; and correcting the second control signal deviation based on the first control signal deviation to obtain a deviation function of the galvanometer; and calibrating the galvanometer based on the deviation function.

[0007] In this embodiment, the galvanometer scanning area is determined, and then the first control signal of the galvanometer and the first ideal coordinates corresponding to the first control signal are obtained to determine the first control signal deviation; then several second control signals of the galvanometer and the second ideal coordinates corresponding to the second control signal are obtained to determine the second control signal deviation, and the second control signal is corrected according to the first control signal deviation to obtain the deviation function, and the galvanometer is calibrated according to the deviation function. According to the above scheme, the galvanometer can be calibrated according to the partial coordinates of the galvanometer scanning area, reducing the time cost of calibration and improving the efficiency of adjustment.

[0008] In an optional embodiment, the method also includes: gridding the galvanometer scanning area to determine a plurality of groups of grid points; obtaining a third control signal of the galvanometer for each grid point and a third measured coordinate corresponding to the third control signal; determining a third control signal deviation based on the third control signal and the third measured coordinate; and calibrating the galvanometer based on the third control signal deviation.

[0009] In this embodiment, the scanning area of ​​the galvanometer is divided into a network to determine a plurality of grid points, and a third control signal for each grid point and a third measured coordinate corresponding to the third control signal are obtained to determine the third control signal deviation, and the galvanometer is calibrated according to the third control signal deviation. The accuracy of the galvanometer calibration can be improved.

[0010] In an optional embodiment, based on the first control signal and the first ideal coordinate, determining the first control signal deviation includes: inputting the first control signal into the galvanometer to obtain a first measured coordinate corresponding to the first control signal; obtaining a first deviation value between the first measured coordinate and the first ideal coordinate to determine a correction value of the first control signal; comparing the correction value of the first control signal with a first threshold, and determining the first control signal deviation based on the comparison result.

[0011] In this embodiment, the first control signal is input into the galvanometer to obtain the first measured coordinate corresponding to the first control signal; the first deviation value between the first measured coordinate and the first ideal coordinate is obtained, and the correction value of the first control signal is determined to determine the control signal deviation. The accuracy of the galvanometer positioning can be improved.

[0012] In an optional embodiment, the first control signal deviation is determined based on the comparison result, including: when the correction value of the first control signal is greater than the first threshold, updating the historical value of the first deviation value; correcting the first control signal according to the correction value of the first control signal; inputting the corrected first control signal into the galvanometer to update the first measured coordinate; updating the first deviation value, wherein the first deviation value is the deviation value between the first measured coordinate and the first ideal coordinate; and determining the correction value of the first control signal according to the first deviation value to determine the first control signal deviation.

[0013] In this embodiment, when the correction value of the first control signal is greater than the first threshold value, the historical value of the first deviation value is updated, and the first control signal is corrected according to the correction value of the first control signal and then input into the galvanometer to update the first measured coordinate, so as to correct the first control signal again, thereby ensuring that the positioning accuracy of the galvanometer meets the usage requirements.

[0014] In an optional embodiment, based on the second control signal and the second ideal coordinate, the second control signal deviation is determined, including: inputting the second control signal into the galvanometer to obtain a second measured coordinate corresponding to the second control signal; obtaining a second deviation value between the second measured coordinate and the second ideal coordinate; and determining a correction value of the second control signal based on the second deviation value; comparing the correction value of the second control signal with a second threshold, and determining the second control signal deviation based on the comparison result.

[0015] In this embodiment, the second control signal is input into the galvanometer to obtain the second measured coordinate corresponding to the second control signal; the second deviation value between the second measured coordinate and the second ideal coordinate is obtained, and the correction value of the second control signal is determined to determine the control signal deviation. The accuracy of the galvanometer positioning can be improved.

[0016] In an optional embodiment, determining the deviation of the second control signal according to the comparison result includes: updating the historical value of the second deviation value when the correction value of the second control signal is greater than the second threshold value; correcting the second control signal according to the correction value of the second control signal; inputting the corrected second control signal into the galvanometer to obtain a second measured coordinate corresponding to the second control signal; updating the second deviation value, wherein the second deviation value is the deviation value between the second measured coordinate and the second ideal coordinate; and determining the correction value of the second control signal according to the second deviation value to determine the second control signal deviation.

[0017] In this embodiment, when the correction value of the second control signal is greater than the second threshold value, the historical value of the second deviation value is updated, and the second control signal is corrected according to the correction value of the second control signal and then input into the galvanometer to update the second measured coordinates. In order to correct the second control signal again, it can be ensured that the positioning accuracy of the galvanometer meets the usage requirements.

[0018] In an optional implementation, the second control signal deviation is corrected based on the first control signal deviation, including: obtaining the second control signal center deviation based on the first control signal deviation and the second control signal; and correcting the second control signal deviation based on the second control signal center deviation.

[0019] In this embodiment, the second control signal center deviation can be obtained according to the first control signal deviation, and the second control signal deviation is corrected based on the second control signal center deviation, which can improve the accuracy of galvanometer positioning and the efficiency of galvanometer calibration.

[0020] In an optional implementation, obtaining the deviation function of the galvanometer includes: constructing a fitting model based on the second control signal deviation to obtain the deviation function of the galvanometer; the fitting model is a polynomial fitting model.

[0021] In this embodiment, a fitting model is constructed based on the deviation of the second control signal to determine the deviation function of the galvanometer, so as to improve the positioning accuracy of the galvanometer.

[0022] In a second aspect, the present invention provides a galvanometer calibration device, which includes: an area determination module for determining a galvanometer scanning area; a first acquisition module for acquiring a first control signal of the galvanometer and a first ideal coordinate corresponding to the first control signal; the first control signal is a control signal of the galvanometer for the center point coordinates of the scanning area; a deviation determination module for determining the first control signal deviation based on the first control signal and the first ideal coordinates; a second acquisition module for acquiring several second control signals of the galvanometer and second ideal coordinates corresponding to the second control signal; the second control signal is a control signal of the galvanometer for the boundary coordinates of the scanning area; a deviation function acquisition module for determining the second control signal deviation based on the second control signal and the second ideal coordinates; and correcting the second control signal deviation based on the first control signal deviation to obtain the deviation function of the galvanometer; and a calibration module for calibrating the galvanometer based on the deviation function.

[0023] In a third aspect, the present invention provides a computer device, comprising: a memory and a processor, the memory and the processor are communicatively connected to each other, computer instructions are stored in the memory, and the processor executes the galvanometer calibration method of the first aspect or any corresponding embodiment thereof by executing the computer instructions. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 is a structural schematic diagram of a galvanometer calibration system according to an embodiment of the present invention;

[0026] Figure 2 is a flow chart of a galvanometer calibration method according to an embodiment of the present invention;

[0027] Figure 3 is a schematic diagram of second ideal coordinate positioning according to an embodiment of the present invention;

[0028] Figure 4 is a flow chart of another galvanometer calibration method according to an embodiment of the present invention;

[0029] Figure 5 is a flow chart of a control signal deviation calculation method according to an embodiment of the present invention;

[0030] Figure 6 is a structural block diagram of a galvanometer calibration device according to an embodiment of the present invention;

[0031] Figure 7 is a schematic diagram of the hardware structure of a computer device according to an embodiment of the present invention;

[0032] Description of reference numerals:

[0033] 1-industrial camera; 2-reflector; 3-scanning galvanometer; 4-laser; 5-collimator; 6-beam splitter; 7-protective window; 8-field mirror; 9-positioning plate; 10-processing plane; 11-cavity. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0035] Selective laser melting is a 3D printing technology that uses a galvanometer to control a high-energy laser beam to irradiate metal powder, causing it to melt and accumulate layer by layer to form parts. The dimensional accuracy of parts manufactured using this technology is affected by the positioning accuracy of the galvanometer control. Since there is a nonlinear relationship between the deflection angle of the galvanometer and the coordinates of the processing plane, if a linear correspondence is used to control the galvanometer to deflect the laser beam to process the part, dimensional errors will be introduced, making it difficult to ensure the part forming accuracy.

[0036] In the related technology, the positioning calibration of the galvanometer is realized mainly by controlling the deflection of the galvanometer mirror so that the laser beam is actually irradiated onto the medium surface, and then the actual irradiation position and theoretical irradiation position of the laser beam are collected, and a corresponding correction file is generated according to the correction algorithm. The actual irradiation position of the laser beam can be collected by an image sensor or an array photoelectric sensor.

[0037] The image sensor collects the image printed by the laser beam on the medium surface. The actual irradiation position of the laser beam can be calculated by identifying the pixel coordinates of the logo pattern in the image and according to the conversion relationship between the pixel coordinate system and the processing plane coordinate system. The image sensor can be a scanner or a camera. The calibration accuracy of this method is limited by the spatial resolution of the image sensor. When used for large-format galvanometer calibration, there is a problem of insufficient spatial resolution, which affects the calibration accuracy.

[0038] The array photoelectric sensor obtains the actual irradiation position signal of the laser beam. However, the photoelectric sensor is easily damaged when receiving the energy of the laser beam. And as the printing format increases, the number of sensors required also increases, resulting in rising costs and difficult maintenance.

[0039] The galvanometer calibration method based on the coaxial CCD image acquisition system observes the engraved graphics on the high-precision calibration plate placed on the working plane of the printing platform, identifies the deviation between the calibration graphic information and the theoretical graphic position information, generates the corresponding calibration file, and corrects the galvanometer parameters of each galvanometer unit. The calibration accuracy problem caused by insufficient spatial resolution during large-format galvanometer calibration can be solved, but due to the complexity of the galvanometer optical path, the nonlinear error introduced by the image acquisition system is difficult to completely eliminate, resulting in accuracy errors.

[0040] The embodiment of the present invention provides a galvanometer calibration method, which determines the galvanometer scanning area, then obtains the first control signal of the galvanometer and the first ideal coordinate corresponding to the first control signal to determine the first control signal deviation; then obtains several second control signals of the galvanometer and the second ideal coordinates corresponding to the second control signal to determine the second control signal deviation, and corrects the second control signal according to the first control signal deviation to obtain the deviation function, and calibrates the galvanometer according to the deviation function. The galvanometer can be calibrated according to the partial coordinates of the galvanometer scanning area, reducing the calibration cost and improving the efficiency of adjustment. It also avoids the nonlinear error introduced by the coaxial image acquisition system, does not require laser printing light, and improves the safety of galvanometer calibration.

[0041] According to an embodiment of the present invention, a schematic diagram of the structure of a galvanometer calibration system is provided, as shown in FIG. Figure 1 As shown, the industrial camera 1 and the reflector 2 are in the same plane, the laser 4, the collimator 5 and the beam splitter 6 are in the same plane, the scanning galvanometer 3, the field lens 8 and the protective window 7 are in the same plane. The positioning plate 9 and the processing plane 10 are placed in the center of the cavity 11.

[0042] In the actual processing process, the processing optical path of the laser beam is: laser 4->collimator 5->beam splitter 6->scanning galvanometer 3->field lens 8->protective window 7->processing plane 10. The laser beam is emitted by laser 4, and collimator 5 can reduce the divergence of the laser beam and turn it into a beam with better parallelism; then it reaches the beam splitter 6, which splits it according to a certain proportion or demand, one part continues to be transmitted along the original optical path, and the other part can be used for other functions such as calibration; the laser beam along the original optical path enters the scanning galvanometer 3 again, and the scanning galvanometer 3 changes its propagation direction by rapidly swinging the reflective lens, so that it has the ability to dynamically scan on the processing plane, and then the laser beam enters the field lens 8, which focuses and corrects the laser beam to keep a uniform spot size and energy distribution on the processing plane 10.

[0043] The calibration optical path for calibrating the scanning galvanometer 3 is: industrial camera 1->reflector 2->beam splitter 6->scanning galvanometer 3->field mirror 8->protective window 7->positioning plate 9. Under the joint action of the reflector 2 and the beam splitter 6, the calibration optical path and the processing optical path can be adjusted to a coaxial optical path; then the center of the image obtained by the industrial camera 1 is used as the actual radiation position of the light beam emitted by the laser 4. In this way, the scanning galvanometer 3 can be calibrated by comparing the actual deflection position of the laser beam controlled by the scanning galvanometer 3 and the standard position on the positioning plate 9 without turning on the laser 4.

[0044] By adding an image acquisition system coaxial with the laser optical path to the galvanometer optical path, the problem of limited spatial resolution of the traditional image acquisition system affecting the calibration accuracy can be solved.

[0045] According to an embodiment of the present invention, an embodiment of a galvanometer calibration method is provided. It should be noted that the steps shown in the flowchart of the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and although a logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0046] In this embodiment, a galvanometer calibration method is provided. Figure 2 is a flow chart of a galvanometer calibration method according to an embodiment of the present invention. Figure 2 As shown, the process includes the following steps:

[0047] Step S101, determining the scanning area of ​​the galvanometer mirror.

[0048] The galvanometer scanning system uses a field mirror, which has a compound distortion error. The actual scanned coordinates have a certain deviation from the ideal coordinates. An uncalibrated galvanometer has a large distortion error during use, so the galvanometer and retrograde calibration are required.

[0049] The galvanometer scanning area can be controlled by sending scanning instructions of different angles and ranges to the galvanometer through the control software to observe the area covered by it in the actual space.

[0050] Step S102, obtaining a first control signal of the galvanometer and a first ideal coordinate corresponding to the first control signal; the first control signal is a control signal of the galvanometer for the coordinates of the center point of the scanning area.

[0051] After obtaining the galvanometer scanning area, a rectangular coordinate system can be established for the galvanometer scanning area, and the coordinates of the center point of the galvanometer scanning area can be determined by calculating the coordinates. The center point coordinate information is sent to the galvanometer through the control software to generate a first control signal to control the galvanometer to deflect. The ideal coordinates corresponding to the first control signal are the coordinates of the center point of the galvanometer scanning area.

[0052] You can also place a positioning plate with a standard pattern of precise coordinates at the galvanometer scanning area, and adjust the galvanometer deflection to the center position. Turn on the laser red light coaxial with the galvanometer optical path, adjust the center of the positioning plate to align with the center of the red light, and then turn off the laser red light. Rotate the positioning plate to align the X-axis and Y-axis substrate coordinate axes of the positioning plate. After the positioning plate is aligned, you can also adjust the positioning plate balance to align the positioning plate plane with the processing plane to determine the center point coordinates of the galvanometer scanning area.

[0053] Step S103: determining a first control signal deviation based on the first control signal and the first ideal coordinates.

[0054] By inputting the first control signal into the galvanometer, the deflection of the galvanometer can be controlled to obtain the coordinates of the galvanometer optical path in the scanning area, that is, the measured coordinates. By calculating the deviation between the measured coordinates and the first ideal coordinates in the direction of the coordinate axis, the deviation of the first control signal from the ideal position in different directions can be determined. Then, the deviation of the first control signal is determined based on the influence of each parameter in the first control signal on the coordinate deviation. Among them, the parameters that affect the coordinate deviation may be the amplitude of the first control signal, etc.

[0055] Step S104, obtaining a plurality of second control signals of the galvanometer and second ideal coordinates corresponding to the second control signals; the second control signal is a control signal of the galvanometer for the boundary coordinates of the scanning area.

[0056] The number of second control signals can be determined based on actual conditions. The staff can select several boundary coordinates of the scanning area, and then send instructions to the galvanometer through the control software for each boundary coordinate information to generate a second control signal corresponding to the boundary coordinate information.

[0057] In an actual application, the worker selects the target quadrant on the positioning board and selects three boundary positioning points of the target quadrant. Figure 3 shown.

[0058] Step S105 , determining a second control signal deviation based on the second control signal and the second ideal coordinates; and correcting the second control signal deviation based on the first control signal deviation to obtain a deviation function of the galvanometer.

[0059] By inputting the second control signal into the galvanometer, the deflection of the galvanometer can be controlled to obtain the coordinates of the galvanometer optical path in the scanning area, that is, the measured coordinates. By calculating the deviation between the measured coordinates and the second ideal coordinates in the direction of the coordinate axis, the deviation of the second control signal from the ideal position in different directions can be determined. Then, the deviation of the second control signal is determined based on the influence of each parameter in the second control signal on the coordinate deviation. Among them, the parameters that affect the coordinate deviation may be the amplitude of the second control signal, etc.

[0060] According to the first control signal deviation, a correlation model of the first control signal deviation and the second control signal deviation can be established, and then a correction coefficient can be determined according to the correlation model to adjust the second control signal deviation. In one practice, the first control signal deviation and the second control signal deviation can be added to correct the second control signal deviation.

[0061] The deviation function can be selected by the staff according to the actual situation. The second control signal and the deviation of the second control signal are substituted into the model to obtain the deviation function. In an actual application, the deviation function is a polynomial fitting model.

[0062] Step S106, calibrating the galvanometer based on the deviation function.

[0063] Some coordinates can be selected in the scanning area of ​​the galvanometer, and then the deviation values ​​of these coordinates are calculated according to the deviation function, and then the deviation values ​​corresponding to these coordinates are determined and updated to achieve calibration of the galvanometer.

[0064] Alternatively, the coordinates of the points to be collected may be determined directly according to the galvanometer control calibration table, and then the deviation function calculates the deviations of the coordinates of these points and records them in the galvanometer control calibration table.

[0065] After the galvanometer is calibrated, the galvanometer can be retested to determine whether the galvanometer calibration meets the requirements. If not, the galvanometer can be recalibrated.

[0066] The galvanometer calibration method provided in this embodiment determines the galvanometer scanning area, then obtains the first control signal of the galvanometer and the first ideal coordinate corresponding to the first control signal to determine the first control signal deviation; then obtains several second control signals of the galvanometer and the second ideal coordinates corresponding to the second control signal to determine the second control signal deviation, and corrects the second control signal according to the first control signal deviation to obtain the deviation function, and calibrates the galvanometer according to the deviation function. According to the above scheme, the galvanometer can be calibrated according to the partial coordinates of the galvanometer scanning area, reducing the time cost of calibration and improving the efficiency of adjustment.

[0067] In this embodiment, a galvanometer calibration method is provided, which can be applied to galvanometer control terminal equipment, such as industrial computers, embedded boards, etc. Figure 4 is a flow chart of a galvanometer calibration method according to an embodiment of the present invention. Figure 4 As shown, the process includes the following steps:

[0068] Step S201, determining the scanning area of ​​the galvanometer mirror.

[0069] For details, please see Figure 2 Step S101 of the illustrated embodiment will not be described in detail here.

[0070] Step S202, obtaining a first control signal of the galvanometer and a first ideal coordinate corresponding to the first control signal; the first control signal is a control signal of the galvanometer for the coordinates of the center point of the scanning area.

[0071] For details, please see Figure 2 Step S102 of the illustrated embodiment will not be described in detail here.

[0072] Step S203: determining a first control signal deviation based on the first control signal and the first ideal coordinates.

[0073] Specifically, the above step S203 includes:

[0074] Step S2031: input a first control signal into the galvanometer to obtain a first measured coordinate corresponding to the first control signal.

[0075] The first control signal is input into the galvanometer to control the deflection of the galvanometer. The coordinates of the point where the galvanometer optical path falls on the scanning area are the first measured coordinates corresponding to the first control signal.

[0076] In some optional implementations, the galvanometer positioning image is acquired by an image acquisition device, and after the galvanometer positioning image is acquired, the image can be preprocessed to reduce interference with recognition. Then the first measured coordinate in the image is identified.

[0077] Step S2032, obtaining a first deviation value between the first measured coordinate and the first ideal coordinate to determine a correction value of the first control signal.

[0078] The first deviation value can be obtained by directly calculating the deviation between the first measured coordinate and the first ideal coordinate in different directions. According to the influence of different parameters in the first control signal on the first measured coordinate, the correction value of the first control signal is determined. The correction value may include a correction direction, a correction amount, etc.

[0079] Step S2033, comparing the correction value of the first control signal with the first threshold, and determining the first control signal deviation according to the comparison result.

[0080] Wherein, when the correction value of the first control signal is greater than the first threshold value, it indicates that the correction degree of the first control signal is large, and the corrected first control signal can be verified again. When the correction value of the first control signal is less than the first threshold value, it indicates that the correction degree of the first control signal is small. The correction value of the first control signal can be directly used as the first control signal deviation.

[0081] Among them, the first threshold can be determined by the staff according to the actual situation.

[0082] In some optional implementations, the above step S2033 includes:

[0083] Step a1: when the correction value of the first control signal is greater than the first threshold, updating the historical value of the first deviation value.

[0084] When the first control signal correction value is greater than the first threshold, the current first deviation value may be used as the previous historical value of the first deviation value.

[0085] Step a2: correcting the first control signal according to the correction value of the first control signal.

[0086] Among them, the correction direction, correction size, etc. of the first control signal can be corrected according to the correction value of the first control signal, so that the coordinate point corresponding to the first control signal is closer to the center point of the scanning area.

[0087] Step a3, inputting the corrected first control signal into the galvanometer to update the first measured coordinates.

[0088] The corrected first control signal is input into the galvanometer to control the deflection of the galvanometer. The coordinates of the galvanometer optical path in the scanning area are obtained, that is, the measured coordinates.

[0089] Step a4, updating the first deviation value, wherein the first deviation value is the deviation value between the first measured coordinate and the first ideal coordinate.

[0090] By calculating the deviation between the updated measured coordinates and the first ideal coordinates in the coordinate axis direction, the deviation of the corrected first control signal from the ideal position in different directions can be determined, thereby updating the first deviation value.

[0091] Step a5: determining a correction value of the first control signal according to the first deviation value to determine the first control signal deviation.

[0092] According to the updated first deviation value, a correction value for the first control signal is determined, wherein the correction value may include a correction direction, a correction degree, etc. Then, the first control signal deviation is determined, wherein the first control signal deviation may be the sum of the original first control signal deviation and the correction value of the first control signal.

[0093] The corrected first control signal deviation is determined according to the influence of each parameter in the first control signal on the coordinate deviation, wherein the parameter having an influence on the coordinate deviation may be the amplitude of the first control signal, etc.

[0094] In a practical application, the first ideal coordinate is p1=(x1, y1), and the first ideal coordinate is input to the galvanometer to generate the corresponding first control signal S1=(S 1x , S 1y ), the first control signal deviation is ΔS(ΔS 1x , ΔS 1y ), then the relationship between the first ideal coordinate point and the ideal control signal is as follows:

[0095]

[0096] Among them, x1 is the abscissa of the first ideal coordinate, y1 is the ordinate of the first ideal coordinate, K bit is the coordinate conversion coefficient, S 1x is the lateral control amount of the galvanometer control signal corresponding to the first ideal coordinate p1, S1y is the longitudinal control amount of the galvanometer control signal corresponding to the first ideal coordinate p1, ΔS 1x is the lateral deviation of the galvanometer control signal corresponding to the first ideal coordinate p1, ΔS 1y is the longitudinal deviation of the galvanometer control signal corresponding to the first ideal coordinate p1. Then, a closed-loop feedback control method is used to calculate the first control deviation.

[0097] When the correction value of the first control signal is greater than the first threshold, the historical value of the first deviation value is updated, and the first control signal is corrected according to the correction value of the first control signal and then input into the galvanometer to update the first measured coordinate. In order to correct the first control signal again, it can be ensured that the positioning accuracy of the galvanometer meets the use requirements.

[0098] Step S204, obtaining a plurality of second control signals of the galvanometer and second ideal coordinates corresponding to the second control signals; the second control signal is a control signal of the galvanometer for the boundary coordinates of the scanning area.

[0099] For details, please see Figure 2 Step S104 of the illustrated embodiment will not be described in detail here.

[0100] Step S205 , determining a second control signal deviation based on the second control signal and the second ideal coordinates; and correcting the second control signal deviation based on the first control signal deviation to obtain a deviation function of the galvanometer.

[0101] For details, please see Figure 2 Step S105 of the illustrated embodiment will not be described in detail here.

[0102] In some optional implementations, the above step S205 includes:

[0103] Step S2051: input a second control signal into the galvanometer to obtain a second measured coordinate corresponding to the second control signal.

[0104] The second control signal is input into the galvanometer to control the deflection of the galvanometer. The coordinates of the point where the galvanometer optical path falls on the scanning area are the second measured coordinates corresponding to the second control signal.

[0105] Step S2052, obtaining a second deviation value between the second measured coordinate and the second ideal coordinate.

[0106] The second deviation value can be obtained by directly calculating the deviation between the second measured coordinate and the second ideal coordinate in different directions.

[0107] In some optional implementations, the galvanometer positioning image is acquired by an image acquisition device, and after the galvanometer positioning image is acquired, the image can be preprocessed to reduce interference with recognition. Then, the second measured coordinate and the second ideal coordinate in the image are identified, so as to calculate the second deviation value of the two coordinates.

[0108] Step S2053: determining a correction value of the second control signal according to the second deviation value.

[0109] According to the influence of different parameters in the second control signal on the second measured coordinates, a correction value of the second control signal is determined, wherein the correction value may include a correction direction, a correction amount, and the like.

[0110] Step S2054, comparing the correction value of the second control signal with the second threshold, and determining the second control signal deviation according to the comparison result.

[0111] Wherein, when the correction value of the second control signal is greater than the second threshold value, it indicates that the correction degree of the second control signal is large, and the corrected second control signal can be verified again. When the correction value of the second control signal is less than the second threshold value, it indicates that the correction degree of the second control signal is small. The correction value of the second control signal can be directly used as the second control signal deviation.

[0112] The second control signal is input into the galvanometer to obtain the second measured coordinate corresponding to the second control signal; the second deviation value between the second measured coordinate and the second ideal coordinate is obtained, and the correction value of the second control signal is determined to determine the control signal deviation. The accuracy of the galvanometer positioning can be improved.

[0113] In some optional implementations, the above step S2054 includes:

[0114] Step b1: when the correction value of the second control signal is greater than the second threshold, updating the historical value of the second deviation value.

[0115] When the second control signal correction value is greater than the second threshold, the current second deviation value can be used as the previous historical value of the second deviation value, and then the second control signal is newly corrected.

[0116] Step b2: correcting the second control signal according to the correction value of the second control signal.

[0117] Among them, the correction direction, correction size, etc. of the second control signal can be corrected according to the correction value of the second control signal, so that the coordinate point corresponding to the second control signal is closer to the ideal coordinate point of the second control signal.

[0118] Step b3, inputting the corrected second control signal into the galvanometer to obtain a second measured coordinate corresponding to the second control signal.

[0119] The corrected second control signal is input into the galvanometer to control the deflection of the galvanometer, and the coordinates of the galvanometer optical path in the scanning area are obtained, that is, the second measured coordinates.

[0120] Step b4, updating the second deviation value, wherein the second deviation value is the deviation value between the second measured coordinate and the second ideal coordinate.

[0121] By calculating the deviation between the updated measured coordinates and the second ideal coordinates in the coordinate axis direction, the deviation of the corrected second control signal from the ideal position in different directions can be determined, thereby updating the second deviation value.

[0122] Step b5, determining a correction value of the second control signal according to the second deviation value to determine the second control signal deviation.

[0123] According to the updated second deviation value, a correction value for the second control signal is determined, wherein the correction value may include a correction direction, a correction degree, etc. Then, a second control signal deviation is determined, wherein the second control signal deviation may be the sum of the original second control signal deviation and the correction value of the second control signal.

[0124] When the correction value of the second control signal is greater than the second threshold, the historical value of the second deviation value is updated, and the second control signal is corrected according to the correction value of the second control signal and then input into the galvanometer to update the second measured coordinate. The second control signal is corrected again to ensure that the positioning accuracy of the galvanometer meets the usage requirements.

[0125] In some optional implementations, the above step S205 includes:

[0126] Step S2055: Based on the first control signal deviation and the second control signal, obtain the second control signal center deviation.

[0127] According to the first control signal deviation, a second control signal center deviation corresponding to the second control signal may be determined.

[0128] In some optional implementations, a center deviation model is constructed according to the first control signal deviation. The second control signal is input into the center deviation model to obtain the center deviation of the second control signal. The center deviation model can be selected by the staff according to the actual situation, and can be a differential error model, etc.

[0129] Step S2056, based on the second control signal center deviation, correct the second control signal deviation.

[0130] The second control signal deviation may be directly added to the second control signal center deviation to achieve correction of the second control signal deviation.

[0131] According to the first control signal deviation, the second control signal center deviation can be obtained, and the second control signal deviation can be corrected based on the second control signal center deviation, so as to improve the accuracy of galvanometer positioning and the efficiency of galvanometer calibration.

[0132] In some optional implementations, the above step S205 further includes:

[0133] Step S2057, constructing a fitting model based on the second control signal deviation to obtain the deviation function of the galvanometer; the fitting model is a polynomial fitting model.

[0134] Among them, a polynomial fitting model can be constructed first, and then the parameters in the polynomial fitting model can be determined according to the deviation of the second control signal. Then the polynomial fitting model can be verified to ensure the accuracy of the fitting model. After the polynomial fitting model is verified, the specific expression of the polynomial fitting model can be directly used as the deviation function of the galvanometer.

[0135] In a practical application, three boundary points are selected to obtain the second control signals and the second control signal deviations of the three boundary points. The polynomial fitting model is shown in the following formula:

[0136]

[0137] Among them, ΔS x is the lateral deviation of the control signal, ΔS y is the longitudinal deviation of the control signal, S x is the lateral control quantity of the control signal, S y is the longitudinal control quantity of the control signal, and a0, a1, b0 and b1 are the parameters of the polynomial fitting model.

[0138] The second control signal deviation is corrected according to the first control signal deviation, as shown in the following formula:

[0139]

[0140] Among them, S (1) , S (2) , S (3) are three second control signals, ΔS (1) , ΔS (2) , ΔS (3) are the three second control signal deviations, ΔS (0) is the first control signal deviation.

[0141] Substituting the corrected three second control signal deviations into the polynomial fitting model, we can obtain:

[0142]

[0143] are the deviations of the three second control signals on the horizontal axis, These are the deviations of the three second control signals on the ordinate axis.

[0144] The second control signal deviation is expressed in matrix form as shown in the following formula:

[0145]

[0146]

[0147] Among them, A x With A y It can be determined by the second control signal of the boundary point. is the lateral control signal of the first boundary point, is the longitudinal control signal of the first boundary point; is the lateral control signal of the second boundary point, is the longitudinal control signal of the second boundary point; is the lateral control signal of the third boundary point, is the longitudinal control signal of the third boundary point.

[0148] Get the fitting model parameter equation group, as shown below:

[0149]

[0150] Where a=(a0a1) T , b=(b0b1) T .

[0151] By solving the fitting model parameter equation group, the parameters of the polynomial fitting model can be obtained.

[0152] Based on the deviation of the second control signal, a fitting model is constructed to determine the deviation function of the galvanometer, which can quickly reduce the distortion error of the galvanometer and improve the positioning accuracy of the galvanometer.

[0153] Step S206, calibrating the galvanometer based on the deviation function.

[0154] For details, please see Figure 2 Step S106 of the illustrated embodiment will not be described in detail here.

[0155] In some optional implementations, step S206 further includes:

[0156] Step c1, gridding the galvanometer scanning area to determine a plurality of groups of grid points.

[0157] The grid size of the grid division is determined according to the actual situation of the galvanometer. If the accuracy of the galvanometer is required to be high, the grid size can be reduced to obtain as many grid points as possible.

[0158] Step c2, obtaining a third control signal of the galvanometer for each grid point and a third measured coordinate corresponding to the third control signal.

[0159] By inputting the third control signal into the galvanometer, the deflection of the galvanometer can be controlled to obtain the coordinates of the galvanometer optical path in the scanning area, that is, the third measured coordinates.

[0160] Step c3, determining the third control signal deviation based on the third control signal and the third measured coordinates.

[0161] By calculating the deviation between the measured coordinates and the coordinates of the corresponding grid points in the coordinate axis direction, the deviation of the third control signal from the ideal position in different directions can be determined. Then, the third control signal deviation is determined based on the influence of various parameters in the third control signal on the coordinate deviation. Among them, the parameters that affect the coordinate deviation may be the amplitude of the third control signal, etc.

[0162] Step c4: calibrating the galvanometer based on the third control signal deviation.

[0163] Based on the third control signal deviation, the third control signal is corrected, and then the corrected third control signal is made to correspond to the corresponding grid point coordinates, and the corresponding data in the galvanometer control calibration table is updated to achieve recalibration of the galvanometer system.

[0164] In a practical application, the galvanometer scanning area is gridded at a first interval, and a network lookup table of the galvanometer control signal and the actual coordinates of each grid vertex is established. Then, an interpolation algorithm is used to collect a number of discrete error data points, and the error conditions of other grid points are inferred. The galvanometer control signal is then corrected to make the galvanometer scanning result closer to an ideal state.

[0165] By dividing the scanning area of ​​the galvanometer into a network to determine a number of grid points, and obtaining a third control signal for each grid point and a third measured coordinate corresponding to the third control signal to determine the third control signal deviation, and calibrating the galvanometer according to the third control signal deviation, the accuracy of the galvanometer calibration can be improved.

[0166] The galvanometer calibration method provided in this embodiment inputs a first control signal into the galvanometer to obtain a first measured coordinate corresponding to the first control signal; obtains a first deviation value between the first measured coordinate and the first ideal coordinate, and determines a correction value for the first control signal to determine the control signal deviation. The accuracy of galvanometer positioning can be improved.

[0167] In this embodiment, a control signal deviation calculation method is provided. Figure 5 FIG. 1 is a flow chart of a control signal deviation calculation method according to an embodiment of the present invention. Figure 5 Take the ideal coordinate P on the positioning plate k (x k ,y k ) and the ideal coordinates P k The corresponding galvanometer control signal S k =(S xk , S yk ). Among them, x k is the ideal coordinate P k The horizontal coordinate value, y k is the ideal coordinate P k The vertical coordinate value, S xk is the ideal coordinate P k The corresponding lateral control amount of the galvanometer control signal, S yk is the ideal coordinate P k The corresponding longitudinal control amount of the galvanometer control signal.

[0168] Initialize the change in the galvanometer control signal, defined as ΔS′ k =(ΔS′ xk , ΔS′ yk )=(0,0). Where, ΔS′ xk is the ideal coordinate P k The corresponding lateral change of the galvanometer control signal, ΔS' yk is the ideal coordinate P k The corresponding longitudinal change of the galvanometer control signal.

[0169] According to the change of the galvanometer control signal, the galvanometer control signal is updated, as shown in the following formula:

[0170] S k =S k +ΔS′ k

[0171] Get the local image of the positioning plate, pre-process the image, and identify the actual coordinates p of the galvanometer control signal positioning in the standard graph c =(x c ,y c ). Among them, x c is the actual coordinate pc The horizontal coordinate value, y c is the actual coordinate p c The vertical coordinate value of .

[0172] Calculate pixel deviation Δp c =(Δx c , Δy c ). Among them, Δx c is the actual coordinate p c With the ideal coordinates P k The horizontal axis deviation value, Δy c is the actual coordinate p c With the ideal coordinates P k The vertical axis deviation value.

[0173] Update the deviation values ​​e(n-2), e(n-1) and e(n); e(n) = (Δx c , Δy c ), e(n-2)=e(n-1), e(n-1)=e(n). Wherein, e(n-2) is the control signal deviation value at the n-2th moment, e(n-1) is the control signal deviation value at the n-1th moment, and e(n) is the control signal deviation value at the nth moment.

[0174] Based on the updated deviation value, the control signal change is calculated as shown in the following formula:

[0175]

[0176] In the formula, ΔS p K is the proportional change of the control signal, p is the proportional coefficient, ΔSi is the integral change of the control signal, K i is the integration coefficient, ΔS d is the differential change of the control signal, K d is the differential coefficient.

[0177] Then determine the control signal change amount ΔS′ k Is it close to 0? If it is close to 0, record the current galvanometer control signal S and calculate the control signal deviation value ΔS. In some optional embodiments, the control signal deviation value ΔS can be obtained by subtracting the current galvanometer control signal from the initial galvanometer control signal. If it is not close to 0, repeat the steps of updating the galvanometer control signal and the control signal according to the change amount of the galvanometer control signal until the control signal change amount ΔS′ approaches 0.

[0178] The control signal deviation calculation method based on pixel deviation is used to obtain the galvanometer control change, and the galvanometer is calibrated according to the galvanometer control change, which can solve the nonlinear error introduced by the optical path in the coaxial CCD image acquisition system.

[0179] In this embodiment, a galvanometer calibration device is also provided, which is used to implement the above-mentioned embodiments and preferred implementation modes, and will not be repeated hereafter. As used below, the term "module" can be a combination of software and / or hardware that implements a predetermined function. Although the devices described in the following embodiments are preferably implemented in software, the implementation of hardware, or a combination of software and hardware, is also possible and conceivable.

[0180] This embodiment provides a galvanometer calibration device, such as Figure 6 As shown, including:

[0181] The area determination module 301 is used to determine the scanning area of ​​the galvanometer;

[0182] The first acquisition module 302 is used to acquire a first control signal of the galvanometer and a first ideal coordinate corresponding to the first control signal; the first control signal is a control signal of the galvanometer for the coordinates of the center point of the scanning area;

[0183] A deviation determination module 303, configured to determine a first control signal deviation based on the first control signal and the first ideal coordinate;

[0184] The second acquisition module 304 is used to acquire a plurality of second control signals of the galvanometer and second ideal coordinates corresponding to the second control signals; the second control signal is a control signal of the galvanometer for the boundary coordinates of the scanning area;

[0185] The deviation function acquisition module 305 is used to determine the second control signal deviation based on the second control signal and the second ideal coordinate; and to correct the second control signal deviation based on the first control signal deviation to obtain the deviation function of the galvanometer;

[0186] The calibration module 306 is used to calibrate the galvanometer based on the deviation function.

[0187] In some optional implementations, the galvanometer calibration device further includes a second calibration module 307, and the second calibration module 307 includes:

[0188] A grid division unit, used for performing grid division on the galvanometer scanning area to determine a plurality of groups of grid points;

[0189] A third acquisition unit, used for acquiring a third control signal of the galvanometer for each grid point and a third measured coordinate corresponding to the third control signal;

[0190] A third deviation determining unit, configured to determine a third control signal deviation based on the third control signal and the third measured coordinates;

[0191] The second calibration unit is used to calibrate the galvanometer based on the third control signal deviation.

[0192] In some optional implementations, the deviation determination module 303 includes:

[0193] A first input unit, used to input a first control signal into the galvanometer to obtain a first measured coordinate corresponding to the first control signal;

[0194] A first correction determination unit, used for obtaining a first deviation value between the first measured coordinate and the first ideal coordinate to determine a correction value of the first control signal;

[0195] The first deviation determining unit is used to compare the correction value of the first control signal with the first threshold value, and determine the first control signal deviation according to the comparison result.

[0196] In some optional implementations, the first deviation determining unit includes:

[0197] A first updating subunit, configured to update a historical value of a first deviation value when a correction value of the first control signal is greater than a first threshold value;

[0198] A first correction subunit, used for correcting the first control signal according to a correction value of the first control signal;

[0199] A first coordinate updating subunit, used for inputting the corrected first control signal into the galvanometer to update the first measured coordinate;

[0200] A first deviation value updating subunit, used for updating a first deviation value, wherein the first deviation value is a deviation value between the first measured coordinate and the first ideal coordinate;

[0201] The first deviation determining subunit is used to determine a correction value of the first control signal according to the first deviation value, so as to determine the first control signal deviation.

[0202] In some optional implementations, the deviation function acquisition module 305 includes:

[0203] A second input unit, used to input a second control signal into the galvanometer to obtain a second measured coordinate corresponding to the second control signal;

[0204] A second deviation value obtaining unit, used to obtain a second deviation value between the second measured coordinate and the second ideal coordinate;

[0205] a second correction value determination unit, configured to determine a correction value of the second control signal according to the second deviation value;

[0206] The second control signal deviation determining unit is used to compare the correction value of the second control signal with the second threshold value, and determine the second control signal deviation according to the comparison result.

[0207] In some optional implementations, the second deviation value obtaining unit includes:

[0208] A second updating subunit, configured to update a historical value of a second deviation value when a correction value of the second control signal is greater than a second threshold value;

[0209] A second subunit, configured to correct the second control signal according to a correction value of the second control signal;

[0210] A second measured coordinate acquisition subunit, used for inputting the corrected second control signal into the galvanometer to acquire a second measured coordinate corresponding to the second control signal;

[0211] A second deviation value updating subunit is used to update a second deviation value, wherein the second deviation value is a deviation value between the second measured coordinate and the second ideal coordinate;

[0212] The second correction value determination subunit is used to determine the correction value of the second control signal according to the second deviation value, so as to determine the second control signal deviation.

[0213] In some optional implementations, the deviation function acquisition module 305 further includes:

[0214] A second control signal center deviation acquiring unit, configured to acquire a second control signal center deviation based on the first control signal deviation and the second control signal;

[0215] The second control signal deviation correction unit is used to correct the second control signal deviation based on the second control signal center deviation.

[0216] In some optional implementations, the deviation function acquisition module 305 further includes:

[0217] The fitting model building unit is used to build a fitting model based on the second control signal deviation to obtain the deviation function of the galvanometer; the fitting model is a polynomial fitting model.

[0218] The further functional description of each of the above modules and units is the same as that of the above corresponding embodiments and will not be repeated here.

[0219] The galvanometer calibration device in this embodiment is presented in the form of a functional unit, where the unit refers to an ASIC (Application Specific Integrated Circuit) circuit, a processor and memory that executes one or more software or fixed programs, and / or other devices that can provide the above functions.

[0220] The embodiment of the present invention also provides a computer device having the above Figure 6 The galvanometer calibration setup shown.

[0221] See also Figure 7 , Figure 7 is a schematic diagram of the structure of a computer device provided by an optional embodiment of the present invention, such as Figure 7 As shown, the computer device includes: one or more processors 50, memory 20, and interfaces for connecting various components, including high-speed interfaces and low-speed interfaces. Various components are connected to each other using different buses for communication, and can be installed on a common mainboard or installed in other ways as needed. The processor can process the instructions executed in the computer device, including instructions stored in or on the memory to display the graphical information of the GUI on an external input / output device (such as, a display device coupled to the interface). In some optional embodiments, if necessary, multiple processors and / or multiple buses can be used together with multiple memories and multiple memories. Similarly, multiple computer devices can be connected, and each device provides some necessary operations (for example, as a server array, a group of blade servers, or a multi-processor system). Figure 7 A processor 50 is taken as an example.

[0222] The processor 50 may be a central processing unit, a network processor or a combination thereof. The processor 50 may further include a hardware chip. The hardware chip may be a dedicated integrated circuit, a programmable logic device or a combination thereof. The programmable logic device may be a complex programmable logic device, a field programmable gate array, a general purpose array logic or any combination thereof.

[0223] The memory 20 stores instructions executable by at least one processor 50 so as to enable at least one processor 50 to implement the method shown in the above embodiment.

[0224] The memory 20 may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created according to the use of the computer device, etc. In addition, the memory 20 may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some optional embodiments, the memory 20 may optionally include a memory remotely arranged relative to the processor 50, and these remote memories may be connected to the computer device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0225] The memory 20 may include a volatile memory, such as a random access memory; the memory may also include a non-volatile memory, such as a flash memory, a hard disk or a solid state drive; the memory 20 may also include a combination of the above types of memory.

[0226] The computer device also includes an input device 30 and an output device 40. The processor 50, the memory 20, the input device 30 and the output device 40 may be connected via a bus or other means. Figure 7 The example of connecting through bus is taken in the following.

[0227] The input device 30 can receive input digital or character information, and generate key signal input related to the user settings and function control of the computer device, such as a touch screen, a keypad, a mouse, a track pad, a touch pad, an indicator bar, one or more mouse buttons, a trackball, a joystick, etc. The output device 40 may include a display device, an auxiliary lighting device (e.g., an LED) and a tactile feedback device (e.g., a vibration motor), etc. The above-mentioned display device includes but is not limited to a liquid crystal display, a light emitting diode, a display and a plasma display. In some optional embodiments, the display device can be a touch screen.

[0228] The embodiment of the present invention also provides a computer-readable storage medium. The method according to the embodiment of the present invention can be implemented in hardware, firmware, or can be implemented as a computer code that can be recorded in a storage medium, or can be implemented as a computer code that is originally stored in a remote storage medium or a non-temporary machine-readable storage medium and will be stored in a local storage medium through a network download, so that the method described herein can be stored in such software processing on a storage medium using a general-purpose computer, a dedicated processor, or programmable or dedicated hardware. Among them, the storage medium can be a magnetic disk, an optical disk, a read-only storage memory, a random access memory, a flash memory, a hard disk or a solid-state hard disk, etc.; further, the storage medium can also include a combination of the above types of memories. It can be understood that a computer, a processor, a microprocessor controller, or programmable hardware includes a storage component that can store or receive software or computer code. When the software or computer code is accessed and executed by a computer, a processor, or hardware, the method shown in the above embodiment is implemented.

[0229] A part of the present invention may be applied as a computer program product, such as a computer program instruction, which, when executed by a computer, can call or provide the method and / or technical solution according to the present invention through the operation of the computer. Those skilled in the art should understand that the existence of the computer program instruction in a computer-readable medium includes, but is not limited to, a source file, an executable file, an installation package file, etc., and accordingly, the way in which the computer program instruction is executed by the computer includes, but is not limited to: the computer directly executes the instruction, or the computer compiles the instruction and then executes the corresponding compiled program, or the computer reads and executes the instruction, or the computer reads and installs the instruction and then executes the corresponding installed program. Here, the computer-readable medium may be any available computer-readable storage medium or communication medium accessible to the computer.

[0230] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A galvanometer calibration method, characterized in that: The method comprises: Determine the scanning area of ​​the galvanometer; Acquire a first control signal of the galvanometer and a first ideal coordinate corresponding to the first control signal; the first control signal is a control signal of the galvanometer for the coordinate of the center point of the scanning area; Determining a first control signal deviation based on the first control signal and the first ideal coordinate; Acquire a plurality of second control signals of the galvanometer and second ideal coordinates corresponding to the second control signals; the second control signal is a control signal of the galvanometer for the boundary coordinates of the scanning area; Determine a second control signal deviation based on the second control signal and the second ideal coordinate; and correct the second control signal deviation based on the first control signal deviation to obtain a deviation function of the galvanometer; The galvanometer is calibrated based on the deviation function.

2. The method according to claim 1, characterized in that The method further comprises: Gridding the galvanometer scanning area to determine a plurality of groups of grid points; Acquire a third control signal of the galvanometer for each grid point and a third measured coordinate corresponding to the third control signal; Determining a third control signal deviation based on the third control signal and the third measured coordinate; The galvanometer is calibrated based on the third control signal deviation.

3. The method according to claim 1, characterized in that The determining the first control signal deviation based on the first control signal and the first ideal coordinate includes: Inputting the first control signal into the galvanometer to obtain a first measured coordinate corresponding to the first control signal; Acquire a first deviation value between the first measured coordinate and the first ideal coordinate to determine a correction value of the first control signal; The correction value of the first control signal is compared with a first threshold, and the first control signal deviation is determined according to the comparison result.

4. The method according to claim 3, characterized in that Determining the first control signal deviation according to the comparison result includes: When the correction value of the first control signal is greater than the first threshold, updating the historical value of the first deviation value; modifying the first control signal according to the modified value of the first control signal; Inputting the corrected first control signal into the galvanometer to update the first measured coordinates; Updating the first deviation value, wherein the first deviation value is a deviation value between the first measured coordinate and the first ideal coordinate; A correction value of the first control signal is determined according to the first deviation value to determine the first control signal deviation.

5. The method according to claim 1, characterized in that The determining the second control signal deviation based on the second control signal and the second ideal coordinate includes: Inputting the second control signal into the galvanometer to obtain a second measured coordinate corresponding to the second control signal; Obtaining a second deviation value between the second measured coordinate and the second ideal coordinate; and determining a correction value of the second control signal according to the second deviation value; The correction value of the second control signal is compared with the second threshold, and the second control signal deviation is determined according to the comparison result.

6. The method according to claim 5, characterized in that Determining the second control signal deviation according to the comparison result includes: When the correction value of the second control signal is greater than the second threshold, updating the historical value of the second deviation value; modifying the second control signal according to the modified value of the second control signal; Inputting the corrected second control signal into the galvanometer to obtain a second measured coordinate corresponding to the second control signal; Updating the second deviation value, wherein the second deviation value is a deviation value between the second measured coordinate and the second ideal coordinate; According to the second deviation value, a correction value of the second control signal is determined to determine the second control signal deviation.

7. The method according to claim 1, characterized in that The correcting the second control signal deviation based on the first control signal deviation includes: Based on the first control signal deviation and the second control signal, obtaining a second control signal center deviation; Based on the second control signal center deviation, the second control signal deviation is corrected.

8. The method according to claim 1, characterized in that The step of obtaining the deviation function of the galvanometer includes: Based on the second control signal deviation, a fitting model is constructed to obtain the deviation function of the galvanometer; the fitting model is a polynomial fitting model.

9. A galvanometer calibration device, characterized in that: The device comprises: An area determination module is used to determine the scanning area of ​​the galvanometer; A first acquisition module, used to acquire a first control signal of the galvanometer and a first ideal coordinate corresponding to the first control signal; the first control signal is a control signal of the galvanometer for the coordinates of the center point of the scanning area; a deviation determining module, configured to determine a first control signal deviation based on the first control signal and the first ideal coordinate; A second acquisition module is used to acquire a plurality of second control signals of the galvanometer and second ideal coordinates corresponding to the second control signals; the second control signal is a control signal of the galvanometer for the boundary coordinates of the scanning area; a deviation function acquisition module, configured to determine a second control signal deviation based on the second control signal and the second ideal coordinate; and to correct the second control signal deviation based on the first control signal deviation to obtain a deviation function of the galvanometer; A calibration module is used to calibrate the galvanometer based on the deviation function.

10. A computer device, characterized in that: include: A memory and a processor, wherein the memory and the processor are communicatively connected to each other, the memory stores computer instructions, and the processor executes the galvanometer calibration method according to any one of claims 1 to 8 by executing the computer instructions.

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