A device for wet manufacturing of graphics and circuits and a spraying method thereof

Abstract

The present invention provides a device for wet manufacturing of patterns and circuits and its spraying method. The device includes a spraying cavity, a turntable rack with an air expandable shaft, a front swing mechanism and a rear swing mechanism. The hollow rotating shaft assembly is driven by a first driving motor to drive the turntable rack to rotate, and the gear transmission assembly drives the rear swing nozzle to swing in a reverse fan shape, synchronously forming a non-concentric spraying trajectory with the front swing nozzle. The spraying method includes the following steps: First, fix the product on the turntable rack and start rotating; then, drive the rear swing nozzle and the front swing nozzle to swing synchronously through the gear transmission assembly and a second driving motor respectively; next, the external chemical liquid is transported to the two groups of nozzles through the gas-liquid diversion shaft and the direct liquid supply method, and the wide-angle nozzles spray perpendicular to the surface of the product to form a non-concentric coverage path; finally, in the drying stage, the external gas blows and dries the surface of the product through the same pipeline structure. The present invention relates to the technical field of wet manufacturing of patterns and circuits.

Description

Technical Field

[0001] The invention relates to the technical field of wet manufacturing of graphics and circuits, and in particular to a device for wet manufacturing of graphics and circuits and a spraying method thereof. Background Art

[0002] In the field of semiconductor packaging, TGV (through glass via) technology has developed rapidly due to the demand for high-density interconnection. Existing TGV wet manufacturing processes mostly use horizontal or vertical connection production lines. In the horizontal production line, the lower surface of the product contacts the transmission mechanism, resulting in differences in the spray volume on both sides and the risk of contamination; due to the effect of gravity, the concentration of the liquid is unevenly distributed in the vertical production line, and the treatment effect in the upper and lower areas is inconsistent. In addition, the traditional production line requires multiple sections of modules to be connected in series, the equipment is large and the maintenance is complicated, and a single point failure can easily lead to shutdown of the entire line, which is less economical.

[0003] Existing technologies such as patent CN111133846A disclose a rotary spraying device for PCB manufacturing, which uses a circular frame to drive the substrate to rotate. However, this solution relies on friction transmission, which is not stable enough when running at high speeds, and friction may introduce contaminants, which cannot meet the high cleanliness requirements in the semiconductor field. In addition, its spraying trajectory is centered on the center of the substrate, resulting in excessive concentration of liquid in the center area and insufficient edge coverage.

[0004] Therefore, the inventor proposes a device for wet manufacturing of patterns and circuits and a spraying method thereof to solve the above problems. Summary of the invention

[0005] In view of the defects of the above-mentioned prior art, the present invention provides a device for wet manufacturing of graphics and circuits and a spraying method thereof, aiming to solve the problems of uneven double-sided spraying, high risk of contamination, large equipment and complex maintenance, and single-point failure affecting the entire line in the horizontal and vertical production lines of the TGV wet manufacturing process in the prior art.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a device for wet manufacturing of graphics and lines, comprising: a spray chamber, a rotatable turntable frame is arranged inside the spray chamber; a first drive motor, the output end of which passes through the spray chamber and is connected to the turntable frame through a hollow shaft assembly; a front swing mechanism, which is arranged on the spray chamber; a rear swing mechanism, which is arranged on the turntable frame; a product fixture, which is installed on a plurality of inflatable shafts evenly distributed around the turntable frame; wherein the output end of the front swing mechanism is located at the front side of the spray chamber, the product fixture is located between the front swing mechanism and the rear swing mechanism, the rear swing mechanism comprises a gear transmission assembly and a rear swing nozzle, the gear transmission assembly is driven by the turntable frame and reversely drives, so as to drive the rear swing nozzle to swing in a fan shape relative to the rotation direction of the turntable frame; when the turntable frame drives the product fixture to rotate, the rear swing nozzle and the front swing mechanism swing synchronously, and spray the double sides of the product with non-concentric trajectories.

[0007] Based on the above, the beneficial effect of a device for wet manufacturing of graphics and circuits is to solve the problems of uneven double-sided spraying, high pollution risk, large equipment and complex maintenance, and single-point failure affecting the entire line in the horizontal and vertical production lines of the TGV wet manufacturing process in the prior art; it is mainly reflected in:

[0008] 1. The present invention realizes the spraying of non-concentric trajectories on both sides of the product on the product fixture through the synchronous swinging of the front swing mechanism and the rear swing mechanism and the rotation of the turntable frame. This design avoids the problem of double-sided spraying volume difference and contamination risk caused by gravity or contact transmission in traditional horizontal or vertical production lines;

[0009] 2. The present invention drives the large gear through the small gear arranged on the turntable frame, so that the large gear drives the rear swing nozzle to swing in a fan shape relative to the rotation direction of the turntable frame through the first hinge rod and the second hinge rod, thereby avoiding the pollutants that may be introduced by the friction transmission in the traditional design, meeting the requirements of the semiconductor field for a high clean environment, and maintaining high stability during high-speed operation;

[0010] 3. Compared with traditional continuous wafer flow equipment, the present invention significantly reduces the footprint of a single machine, has a more flexible layout, and does not require a large factory building to achieve efficient production. Due to its compact structure, simplified design, and rapid machine adjustment process, a device can be put into production immediately after adjustment, reducing downtime and debugging costs. Even if a unit fails, it will not affect the normal operation of other units, ensuring the overall stability and continuity of the production line and facilitating maintenance.

[0011] Further, the hollow rotating shaft assembly includes a gas-liquid diversion shaft, a rotating shaft, and a sealing housing that are sleeved in sequence from the inside to the outside. The rotating shaft is fixedly connected to the turntable frame, and the rotating shaft is driven to rotate by a first driving motor. The rear swing mechanism further includes a gas-liquid transmission pipe, and the rear swing nozzle is rotatably fitted to the output end of the gas-liquid transmission pipe. The gear transmission assembly includes a small gear, a large gear bracket, a large gear, a connecting rod, a first hinge rod, and a second hinge rod. One end of the large gear bracket is located on one side of the small gear. The output end of the gas-liquid diversion shaft sequentially passes through the turntable frame, the small gear, and the large gear bracket and is connected to the input end of the gas-liquid transmission pipe. The large gear is rotatably fitted to the other end of the large gear bracket. The large gear is rotatably connected to one end of the first hinge rod through the connecting rod. One end of the second hinge rod is hinged to the other end of the first hinge rod, and the other end of the second hinge rod is hinged to the rear swing nozzle.

[0012] Based on the above, the beneficial effects of the gas-liquid diversion shaft are that it can be used to transport chemical liquid medicine and gas, which not only ensures the efficient transportation of chemical liquid medicine but also enables the transportation of drying gas through the same pipeline system after spraying, simplifies the equipment structure, and reduces the need for additional pipelines; the beneficial effect of the rotating shaft is that it is fixedly connected to the turntable frame and driven to rotate by the first driving motor, ensuring the concentricity and stability of the overall system, avoiding vibrations or unstable factors caused by non-synchronization, and improving the reliability of equipment operation; the beneficial effect of the sealing housing is to prevent external pollutants from entering the inside of the hollow rotating shaft assembly, maintain a highly clean working environment, and at the same time have good airtightness to prevent the leakage of the internally transmitted gas; the beneficial effect of the gear transmission assembly is that through the coordinated work of the small gear, the large gear bracket, the large gear, the connecting rod, the first hinge rod, and the second hinge rod, the rear swing nozzle performs a fan-shaped swing relative to the rotation direction of the turntable frame.

[0013] Further, a plurality of first wide-angle nozzles are provided on the rear swing nozzle. The first wide-angle nozzles are evenly distributed along the length direction of the nozzle, and the spraying direction is perpendicular to the surface of the product.

[0014] Based on the above, the beneficial effect of the first wide-angle nozzle is to ensure that the chemical liquid medicine can be evenly sprayed out throughout the entire length of the nozzle, avoiding the problem of excessive concentration or insufficient liquid medicine in local areas.

[0015] Further, the front swing mechanism includes a second driving motor and a front swing nozzle. The front swing nozzle is driven to swing by the second driving motor. The swing trajectory of the front swing nozzle is synchronized with the swing trajectory of the rear swing nozzle. A plurality of second wide-angle nozzles are provided on the front swing nozzle. The second wide-angle nozzles are evenly distributed along the length direction of the nozzle, and the spraying direction is perpendicular to the surface of the product.

[0016] Based on the above, the beneficial effect of the front swinging nozzle is that it is driven to swing by the second drive motor, and its swing trajectory is synchronized with the swing trajectory of the rear swinging nozzle, ensuring that both sides of the product can be evenly sprayed at the same time, avoiding the problem of uneven double-sided treatment of the product caused by traditional single-sided spraying equipment.

[0017] Furthermore, the swing speed ratio of the rear swing nozzle is greater than the rotation speed ratio of the turntable frame.

[0018] Based on the above, the beneficial effect of designing the swing speed ratio of the rear swing nozzle to be greater than the rotation speed ratio of the turntable frame is as follows: while the turntable frame rotates, the rear swing nozzle can swing faster, which can effectively avoid the appearance of spray intermittent areas on the product surface and ensure that each position can be sprayed evenly. By increasing the swing speed of the rear swing nozzle, the same area can be covered more frequently during the rotation of the turntable frame, thereby improving the overall spray coverage and uniformity.

[0019] Furthermore, the device also includes a control unit for synchronously adjusting the rotation speed of the first drive motor and the swing frequency of the second drive motor so that the spraying trajectories of the rear swinging nozzle and the front swinging nozzle cover the entire surface of the product.

[0020] Based on the above, the beneficial effect of the control unit is to synchronously adjust the rotational speed of the first drive motor and the swing frequency of the second drive motor, ensuring that the spraying trajectories of the rear swinging nozzle and the front swinging nozzle can be accurately matched, thereby ensuring the consistency and accuracy of the spraying path and avoiding uneven spraying caused by asynchrony.

[0021] Furthermore, the inflatable axes are equidistantly distributed on the edge of the turntable frame.

[0022] Furthermore, a waste liquid collection port is provided at the bottom of the spray cavity.

[0023] Based on the above, the beneficial effect of the waste liquid collection port is to collect and recycle the cleaning liquid.

[0024] Furthermore, the present invention also provides a wet manufacturing spray method for graphics and circuits, comprising the following steps:

[0025] S1: Fix the product fixture vertically on the air shaft of the turntable frame, and start the first drive motor to drive the turntable frame to rotate;

[0026] S2: The gear transmission assembly drives the rear swing nozzle to swing in a fan shape, while the front swing mechanism drives the front swing nozzle to swing synchronously;

[0027] S3: The external spray liquid supply device delivers the chemical liquid to the rear swinging nozzle through the gas-liquid guide shaft, and the external gas-liquid supply device directly delivers the chemical liquid to the front swinging nozzle, and sprays perpendicularly to the product surface through the first wide-angle nozzle of the rear swinging nozzle and the second wide-angle nozzle of the front swinging nozzle, wherein the swinging trajectory of the rear swinging nozzle is superimposed on the rotating trajectory of the turntable frame to form a non-concentric coverage path to avoid repeated spraying in the middle of the product;

[0028] S4: After the spraying is completed, the external drying device conveys gas through the rear swinging nozzle of the gas-liquid guide shaft to vertically blow and dry the rear surface of the product, and directly conveys gas through the front swinging nozzle to vertically blow and dry the front surface of the product.

[0029] In order to more clearly illustrate the above features of the present invention and its intended objectives, the present invention is further described below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 : It is a schematic diagram of the internal structure of the present invention;

[0031] Figure 2 :for Figure 1 An enlarged schematic diagram of part A;

[0032] Figure 3 : is a cross-sectional view of the hollow shaft assembly of the present invention;

[0033] Figure 4 : is a three-dimensional diagram of a single machine of the present invention;

[0034] Figure 5 : is a three-dimensional diagram of the spray cavity of the present invention;

[0035] Figure 6 : is a flow chart of the steps of the spraying method of the present invention.

[0036] Explanation of the accompanying numbers: 1-spray chamber, 11-inflatable shaft, 2-turntable frame, 3-front swing mechanism, 31-second drive motor, 32-front swing nozzle, 321-second wide-angle nozzle, 4-first drive motor, 41-hollow shaft assembly, 411-gas-liquid guide shaft, 412-rotating shaft, 413-sealed shell, 5-rear swing mechanism, 51-gear transmission assembly, 511-small gear, 512-large gear, 513-connecting rod, 514-first hinged rod, 515-second hinged rod, 516-large gear bracket, 52-rear swing nozzle, 521-first wide-angle nozzle, 53-gas-liquid transmission pipe, 6-control unit, 10-product fixture. DETAILED DESCRIPTION

[0037] like Figure 1-Figure 6As shown, a device for wet manufacturing of graphics and circuits includes: a spray chamber 1, in which a rotatable turntable frame 2 is provided; a first drive motor 4, the output end of which passes through the spray chamber 1 and is connected to the turntable frame 2 through a hollow shaft assembly 41; a front swing mechanism 3, which is arranged on the spray chamber 1; a rear swing mechanism 5, which is arranged on the turntable frame 2; a product fixture 10, which is installed on a plurality of inflatable shafts 11 evenly distributed around the turntable frame 2; wherein the output end of the front swing mechanism 3 is located at On the front side of the spray chamber 1, the product fixture 10 is located between the front swing mechanism 3 and the rear swing mechanism 5. The rear swing mechanism 5 includes a gear transmission assembly 51 and a rear swing nozzle 52. The gear transmission assembly 51 is driven by the turntable frame 2 and reversely drives to drive the rear swing nozzle 52 to swing in a fan shape relative to the rotation direction of the turntable frame 2. When the turntable frame 2 drives the product fixture 10 to rotate, the rear swing nozzle 52 and the front swing mechanism 3 swing synchronously to spray both sides of the product with non-concentric trajectories.

[0038] The hollow shaft assembly 41 includes a gas-liquid guide shaft 411, a rotating shaft 412 and a sealed shell 413 which are sequentially sleeved from the inside to the outside. The rotating shaft 412 is fixedly connected to the turntable frame 2, and the rotating shaft 412 is driven to rotate by the first driving motor 4; the rear swing mechanism 5 also includes a gas-liquid transmission pipe 53, and the rear swing nozzle 52 is rotatably matched with the output end of the gas-liquid transmission pipe 53; the gear transmission assembly 51 includes a small gear 511, a large gear bracket 516, a large gear 512, a connecting rod 513, a first hinge rod 514 and a second hinge rod 515, and the large gear One end of the bracket 516 is located on one side of the small gear 511, and the output end of the gas-liquid diversion shaft 411 passes through the turntable frame 2, the small gear 511, the large gear bracket 516 in sequence and is connected to the input end of the gas-liquid transmission pipe 53. The large gear 512 is rotatably matched with the other end of the large gear bracket 516. The large gear 512 is rotatably connected to one end of the first hinged rod 514 through the connecting rod 513. One end of the second hinged rod 515 is hinged to the other end of the first hinged rod 514, and the other end of the second hinged rod 515 is hinged to the rear swing nozzle 52.

[0039] The rear swinging nozzle 52 is provided with a plurality of first wide-angle nozzles 521 . The first wide-angle nozzles 521 are evenly distributed along the length direction of the nozzle, and the spraying direction is perpendicular to the product surface.

[0040] The front swing mechanism 3 includes a second drive motor 31 and a front swing nozzle 32. The front swing nozzle 32 is driven to swing by the second drive motor 31. The swing trajectory of the front swing nozzle 32 is synchronized with the swing trajectory of the rear swing nozzle 52. A plurality of second wide-angle nozzles 321 are arranged on the front swing nozzle 32. The second wide-angle nozzles 321 are evenly distributed along the length direction of the nozzle, and the spraying direction is perpendicular to the product surface.

[0041] The swing speed ratio of the rear swing nozzle 52 is greater than the rotation speed ratio of the turntable frame 2 to avoid the occurrence of spray intermittent areas on the product surface.

[0042] The device further comprises a control unit 6 for synchronously adjusting the rotation speed of the first drive motor 4 and the swing frequency of the second drive motor 31 so that the spraying tracks of the rear swinging nozzle 52 and the front swinging nozzle 32 cover the entire surface of the product.

[0043] The inflatable shafts 11 are evenly distributed on the edge of the turntable frame 2 .

[0044] A waste liquid collection port is provided at the bottom of the spray chamber 1.

[0045] The present invention also discloses a wet manufacturing spraying method for graphics and circuits, comprising the following steps:

[0046] S1: vertically fix the product fixture 10 on the air shaft 11 of the turntable frame 2, and start the first drive motor 4 to drive the turntable frame 2 to rotate;

[0047] S2: The rear swing nozzle 52 is driven to swing in a fan shape by the gear transmission assembly 51, and at the same time, the front swing mechanism 3 drives the front swing nozzle 32 to swing synchronously;

[0048] S3: The external spray liquid supply device delivers the chemical liquid to the rear swing nozzle 52 through the gas-liquid guide shaft 411, and the external gas-liquid supply device directly delivers the chemical liquid to the front swing nozzle 32, and sprays perpendicularly to the product surface through the first wide-angle nozzle 521 of the rear swing nozzle 52 and the second wide-angle nozzle 321 of the front swing nozzle 32, wherein the swing trajectory of the rear swing nozzle 52 is superimposed on the rotation trajectory of the turntable frame 2 to form a non-concentric coverage path to avoid repeated spraying in the middle of the product;

[0049] S4: After spraying is completed, the external drying device delivers gas to the rear swing nozzle 52 through the gas-liquid guide shaft 411 to vertically blow and dry the rear surface of the product, and directly delivers gas to the front swing nozzle 32 to vertically blow and dry the front surface of the product.

[0050] In summary, the specific implementation modes of the present invention are as follows:

[0051] First, the product fixture 10 is vertically fixed on the inflatable shaft 11 of the turntable frame 2, and the stable clamping of the product fixture 10 is achieved by the air pressure expansion of the inflatable shaft 11, and the first driving motor 4 is started to drive the rotating shaft 412 in the hollow rotating shaft assembly 41 to rotate, driving the turntable frame 2 to rotate uniformly around the axis at a set speed. At this time, the small gear 511 of the gear transmission assembly 51 on the turntable frame 2 rotates synchronously with the turntable frame 2, and the small gear 511 meshes and drives the large gear 512 to rotate, so that the large gear bracket 516 rotates along the gas-liquid guide shaft 411, and then through the linkage effect of the connecting rod 513, the first hinge rod 514 and the second hinge rod 515, the rear swing nozzle 52 is reversely fan-shaped swung relative to the rotation direction of the turntable frame 2. At the same time, the second driving motor 31 of the front swing mechanism 3 drives the front swing nozzle 32 to swing at a set frequency, and its swing trajectory is synchronized with the rear swing nozzle 52 through the control unit 6;

[0052] In the spraying stage, the external chemical liquid enters the gas-liquid transmission pipe 53 of the rear swing mechanism 5 through the gas-liquid guide shaft 411 and is transported to the rear swing nozzle 52, while the front swing nozzle 32 is directly supplied with liquid from the external pipeline. The rear swing nozzle 52 and the first wide-angle nozzle 521 on the front swing nozzle 32 spray the liquid perpendicularly to the product surface, wherein the swing speed ratio of the rear swing nozzle 52 is greater than the rotation speed of the turntable frame 2, so that the spraying trajectory is formed by the superposition of rotational motion and swinging to form a non-concentric spiral path, thereby avoiding repeated coverage of the central area of ​​the product. The continuous rotation of the turntable frame 2 allows each position on both sides of the product to pass through the spraying area in turn, achieving uniform treatment;

[0053] After spraying is completed, it switches to drying mode: external gas enters the rear swing nozzle 52 through the gas-liquid guide shaft 411 to blow on the back of the product, and at the same time, the front swing nozzle 32 synchronously switches the air supply to blow on the front of the product. During the drying process, the rear swing nozzle 52 and the front swing nozzle 32 remain in a swinging state to ensure that the airflow impacts the surface vertically to efficiently remove residual droplets. The waste liquid collection port at the bottom of the spray cavity 1 recycles and processes the waste liquid in real time to maintain the cleanliness of the cavity. During the whole process, the control unit 6 dynamically adjusts the rotation speed of the first drive motor 4 and the swing frequency of the second drive motor 31 to ensure that the double-sided spray trajectory is fully covered and without interference.

[0054] The above description is only the optimal solution embodiment of the present invention and is not intended to limit the present invention. Various modifications or substitutions made by those skilled in the art to the present invention without departing from the essence and protection scope of the present invention should also be within the protection scope of the present invention.

Claims

1. A device for wet manufacturing of graphics and circuits, characterized in that: include: A spray chamber (1) having a rotatable turntable frame (2) disposed therein; A first drive motor (4), wherein an output end of the first drive motor (4) passes through the spray cavity (1) and is connected to the turntable frame (2) via a hollow shaft assembly (41); A front swing mechanism (3) is arranged on the spray cavity (1); A rear swing mechanism (5) is arranged on the turntable frame (2); A product fixture (10) is mounted on a plurality of inflatable shafts (11) evenly distributed around the turntable frame (2); The output end of the front swing mechanism (3) is located at the front side of the spray chamber (1); the product fixture (10) is located between the front swing mechanism (3) and the rear swing mechanism (5); the rear swing mechanism (5) comprises a gear transmission assembly (51) and a rear swing nozzle (52); the gear transmission assembly (51) is driven by the turntable frame (2) and is reversely driven to drive the rear swing nozzle (52) to swing in a fan shape relative to the rotation direction of the turntable frame (2); when the turntable frame (2) drives the product fixture (10) to rotate, the rear swing nozzle (52) and the front swing mechanism (3) swing synchronously to spray the two sides of the product with non-concentric trajectories.

2. The device for wet manufacturing of patterns and circuits according to claim 1, characterized in that: The hollow rotating shaft assembly (41) comprises a gas-liquid flow guide shaft (411), a rotating shaft (412) and a sealed housing (413) which are sequentially sleeved from the inside to the outside, the rotating shaft (412) being fixedly connected to the turntable frame (2), and the rotating shaft (412) being driven to rotate by a first driving motor (4); the rear swing mechanism (5) further comprises a gas-liquid transmission pipe (53), the rear swing nozzle (52) being rotationally matched to the output end of the gas-liquid transmission pipe (53); the gear transmission assembly (51) comprises a small gear (511), a large gear bracket (516), a large gear (512), a connecting rod (513), a first hinge rod (514) and a second hinge rod (515); the One end of the large gear support (516) is located on one side of the small gear (511); the output end of the gas-liquid guide shaft (411) passes through the turntable frame (2), the small gear (511), and the large gear support (516) in sequence and is connected to the input end of the gas-liquid transmission pipe (53); the large gear (512) is rotatably matched with the other end of the large gear support (516); the large gear (512) is rotatably connected to one end of the first hinged rod (514) through a connecting rod (513); one end of the second hinged rod (515) is hinged to the other end of the first hinged rod (514); and the other end of the second hinged rod (515) is hinged to the rear swing nozzle (52).

3. The device for wet manufacturing of patterns and circuits according to claim 1, characterized in that: The rear swinging nozzle (52) is provided with a plurality of first wide-angle nozzles (521), wherein the first wide-angle nozzles (521) are evenly distributed along the length direction of the nozzle, and the spraying direction is perpendicular to the product surface.

4. The device for wet manufacturing of patterns and circuits according to claim 2, characterized in that: The front swing mechanism (3) comprises a second drive motor (31) and a front swing nozzle (32); the front swing nozzle (32) is driven to swing by the second drive motor (31); the swing trajectory of the front swing nozzle (32) is synchronized with the swing trajectory of the rear swing nozzle (52); a plurality of second wide-angle nozzles (321) are arranged on the front swing nozzle (32); the second wide-angle nozzles (321) are evenly distributed along the length direction of the nozzle, and the spraying direction is perpendicular to the product surface.

5. The device for wet manufacturing of patterns and circuits according to claim 1, characterized in that: The swing speed ratio of the rear swing nozzle (52) is greater than the rotation speed ratio of the turntable frame (2).

6. The device for wet manufacturing of patterns and circuits according to claim 4, characterized in that: The device further comprises a control unit (6) for synchronously adjusting the rotation speed of the first drive motor (4) and the swing frequency of the second drive motor (31) so that the spraying trajectories of the rear swinging nozzle (52) and the front swinging nozzle (32) cover the entire surface of the product.

7. The device for wet manufacturing of patterns and circuits according to claim 1, characterized in that: The inflatable shafts (11) are distributed at equal distances on the edge of the turntable frame (2).

8. The device for wet manufacturing of patterns and circuits according to claim 1, characterized in that: A waste liquid collection port is provided at the bottom of the spray chamber (1).

9. A spraying method, applied to a device for wet manufacturing of patterns and circuits as claimed in claim 4, characterized in that: The following steps are involved: S1: vertically fixing the product fixture (10) on the air shaft (11) of the turntable frame (2), and starting the first drive motor (4) to drive the turntable frame (2) to rotate; S2: The rear swing nozzle (52) is driven to swing in a fan shape by the gear transmission assembly (51), and at the same time, the front swing mechanism (3) drives the front swing nozzle (32) to swing synchronously; S3: the external spray liquid supply device delivers the chemical liquid to the rearward swinging nozzle (52) through the gas-liquid guide shaft (411), and the external gas-liquid supply device directly delivers the chemical liquid to the forward swinging nozzle (32), and sprays the chemical liquid perpendicularly to the surface of the product through the first wide-angle nozzle (521) of the rearward swinging nozzle (52) and the second wide-angle nozzle (321) of the front swinging nozzle (32), wherein the swinging trajectory of the rearward swinging nozzle (52) overlaps with the rotating trajectory of the turntable frame (2) to form a non-concentric covering path, thereby avoiding repeated spraying in the middle of the product; S4: After the spraying is completed, the external drying device conveys gas through the gas-liquid guide shaft (411) to the rearward swinging nozzle (52) to perform vertical blowing and drying on the rear surface of the product, and directly conveys gas through the front swinging nozzle (32) to perform vertical blowing and drying on the front surface of the product.

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