Horizontal ejection piece drawing device and piece drawing equipment

Abstract

The invention provides a horizontal ejection piece drawing device and piece drawing equipment, and belongs to the field of semiconductor material transmission, and the horizontal ejection piece drawing device comprises a piece drawing airflow supporting frame which is provided with an air channel and is connected with an external air source; an airflow gap is formed between the lower surface of the belt supporting plate and the sheet drawing airflow supporting frame; a negative pressure area is formed on the upper surface of the corresponding sheet drawing flat belt through airflow movement of the sheet drawing airflow supporting frame, the belt supporting plate and the pressure stabilizing cover plate; the sheet drawing material sensor is used for sensing whether materials exist above or not; and the sheet drawing motor adopts an S-shaped speed curve motor. By optimizing the gas path layout, the fluctuation of gas flow to materials is reduced, and the sensor is triggered more stably while the adhesive force of the materials is increased; within the set capacity, the S-shaped curve speed motor is used for reducing the set speed of the wafer drawing assembly line, and slipping of the silicon wafers caused by instant starting of the motor is reduced, so that the drawing time of each silicon wafer is uniform, consistent and more stable. The conveying device can be popularized and applied in the conveying fields of photovoltaics, semiconductors and the like related to sheets.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor material transmission, and in particular relates to a horizontal ejection sheet extraction device and a sheet extraction equipment. Background Art

[0002] In the existing silicon wafer loading, the wafers are generally continuously transported from the flower basket by horizontal conveyor belts, which faces the bottleneck problem of 20,000 production capacity. At the same time, in order to stabilize the wafer discharge effect, some use side stops or air suction to assist the wafer discharge. The side stops will basically eliminate the fragments, and the air suction-assisted wafer discharge will cause unstable wafer extraction due to poor adsorption guidance. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a horizontal ejection sheet extraction device and a sheet extraction equipment, which can solve the above-mentioned problems.

[0004] Design principle: Independent horizontal conveying mechanism for wafer extraction. The motor of the horizontal conveying mechanism for wafer extraction adopts an S-shaped speed curve motor to reduce the slippage of the silicon wafer caused by the instantaneous start and stop of the motor, and ensure the uniformity of wafer extraction. The horizontal conveying mechanism for wafer extraction optimizes the air path layout, reduces the fluctuation of airflow on the silicon wafer, and improves the stable adhesion of the silicon wafer.

[0005] A horizontal ejection sheet extraction device comprises: a sheet extraction airflow support frame, on which an air duct is provided and connected to an external air source; two belt support plates are arranged along the sheet extraction streamline direction at the adjacent two side edges of the upper surface of the sheet extraction airflow support frame, and an airflow gap is formed between the lower surface of the belt support plate and the sheet extraction airflow support frame; a pressure stabilizing cover plate is horizontally arranged in the middle of the two belt support plates, and the airflow movement of the sheet extraction airflow support frame, the belt support plate and the pressure stabilizing cover plate forms a negative pressure area on the upper surface of the corresponding sheet extraction flat belt; the sheet extraction flat belt is used to transport silicon wafers; a sheet extraction material sensor is arranged at the end of the sheet extraction airflow support frame or at the pressure stabilizing cover plate, and is used to sense whether there is material above; a sheet extraction transmission assembly is connected to the sheet extraction motor, and is used to drive the sheet extraction flat belt; the sheet extraction motor is instantly started when the sheet extraction material sensor senses material, and instantly stops when it senses that there is no material, so as to realize the horizontal ejection and sheet extraction of materials.

[0006] Furthermore, the overall shape of the drawer airflow support frame is "mouth" shaped, airways and air grooves are opened on both sides of the drawer airflow support frame, and an air cushion is arranged between the belt support plate and the drawer airflow support frame to control the airflow direction; the drawer flat belt is arranged in the middle hollow part of the drawer airflow support frame.

[0007] Furthermore, an airflow gap is formed between the belt supporting plate and the pressure stabilizing cover plate.

[0008] Furthermore, the material extraction sensor adopts a non-contact sensor.

[0009] Furthermore, the sheet-pulling transmission assembly includes a transmission shaft adapter block, a transmission shaft unit and a motor adapter arranged on the sheet-pulling airflow support frame.

[0010] Furthermore, the sheet extraction motor adopts an S-shaped speed curve motor.

[0011] Furthermore, a discharging sensor is arranged at the discharging outer end of the horizontal ejection sheet extraction device, for sensing the material ejected from the horizontal ejection sheet extraction device.

[0012] The present invention also provides a sheet-pulling device, which includes a flip feed basket, a horizontal ejection sheet-pulling device and a horizontal guiding and conveying device according to the above-mentioned method; the bottom of the flip feed basket is arranged directly above the horizontal ejection sheet-pulling device, so as to supply materials to the horizontal ejection sheet-pulling device; the horizontal guiding and conveying device is horizontally arranged at the end of the horizontal ejection sheet-pulling device, so as to guide and transport the side edges of the materials conveyed by horizontal ejection.

[0013] Furthermore, the flip feed basket includes a flip motor module and a basket clamping module, and the lower end of the basket of the basket clamping module is arranged opposite to the horizontal ejection and extraction device.

[0014] Furthermore, the horizontal guiding and conveying device includes a horizontal transmission streamline module and a side guiding mechanism, and the two side guiding mechanisms are arranged on both sides of the horizontal transmission streamline module along the material transmission streamline direction.

[0015] Compared with the prior art, the invention has the following beneficial effects: by optimizing the gas path layout, the invention reduces the fluctuation of the airflow on the material, increases the material adhesion and makes the sensor trigger more stable; within the set production capacity, the S-curve speed motor is used to reduce the set speed of the sheet extraction line, and reduces the slippage of the silicon wafer caused by the instantaneous motor start-up, so that the time for each silicon wafer to be extracted is uniform and more stable. It can be promoted and applied in photovoltaic, semiconductor and other fields involving sheet material transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of an example of a horizontal ejection sheet extraction device of the present invention; Figure 2 It is a partial structural schematic diagram of another example of a horizontal ejection sheet extraction device; Figure 3 and Figure 4 Schematic diagram of the airflow support frame for drawing sheets from different angles; Figure 5 This is a schematic diagram of the extraction equipment.

[0017] In the figure, 10. Horizontal ejection extraction device; 11. Extraction airflow support frame; 12. Belt support plate; 13. Pressure stabilizing cover plate; 14. Extraction flat belt; 15. Extraction material sensor; 16. Extraction transmission assembly; 17. Extraction motor; 18. Air cushion; 19. Discharge sensor; 20. Flip feed basket; 21. Flip motor module; 22. Basket clamping module; 30. Horizontal guiding conveying device; 31. Horizontal transmission streamline module; 32. Side guiding mechanism. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] Horizontal ejection device A horizontal ejection device, see Figure 1-Figure 4 The horizontal ejection sheet extraction device 10 includes a sheet extraction airflow support frame 11, a belt support plate 12, a pressure stabilizing cover plate 13, a sheet extraction flat belt 14, a sheet extraction material sensor 15, a sheet extraction transmission assembly 16 and a sheet extraction motor 17.

[0020] Layout relationship: an airway is opened on the sheet-pulling airflow support frame 11 and an external air source is connected, two belt support plates 12 are arranged on both sides of the upper surface of the sheet-pulling airflow support frame 11 along the sheet-pulling streamline direction, and an airflow gap is formed between the lower surface of the belt support plate 12 and the sheet-pulling airflow support frame 11, and the pressure-stabilizing cover plate 13 is horizontally arranged in the middle of the two belt support plates 12 to form a negative pressure area on the upper surface of the corresponding sheet-pulling flat belt 14.

[0021] The sheet drawing material sensor 15 is arranged at the end of the sheet drawing airflow support frame 11 or the pressure stabilizing cover plate 13, and is used to sense whether there is material above.

[0022] The sheet-drawing transmission assembly 16 is connected to the sheet-drawing motor 17, and is used to drive the sheet-drawing flat belt 14. The sheet-drawing flat belt 14 is arranged on the sheet-drawing transmission assembly 16, and is used to transport silicon wafers.

[0023] The sheet drawing motor 17 adopts an S-shaped speed curve motor, which starts instantly when the sheet drawing material sensor 15 senses material and stops instantly when it senses that there is no material, thereby realizing a sheet drawing method in which the material is thrown horizontally.

[0024] Among them, the pressure stabilizing cover plate 13 is horizontally arranged in the middle of the two belt support plates 12, and the airflow movement of the sheet-drawing airflow support frame 11, the belt support plate 12 and the pressure stabilizing cover plate 13 forms a negative pressure area on the upper surface of the corresponding sheet-drawing flat belt 14.

[0025] The voltage stabilizing cover plate 13 may be an integrated cover plate (see Figure 2 ), or multiple. When the sheet material sensor 15 is set at the pressure stabilizing cover plate 13, a sensor installation hole can be opened on the integrated cover plate. In the case where multiple cover plates are set, the sensor can be arranged between adjacent cover plates. In the case where the sheet material sensor 15 is set at the end of the sheet airflow support frame 11, the sensor installation hole may not be set on the pressure stabilizing cover plate 13, but sensor installation slots may be opened at both ends of the sheet airflow support frame 11 (see Figure 1 and Figure 3 ).

[0026] Among them, see Figure 3 The whole sheet airflow support frame 11 is in the shape of a "mouth", and air channels and air grooves are opened on both sides of the sheet airflow support frame 11. An air cushion 18 is arranged between the belt support plate 12 and the sheet airflow support frame 11 to control the airflow direction; the sheet flat belt 14 is arranged in the middle hollow part of the sheet airflow support frame 11.

[0027] See also Figure 4 , the side height of the sheet airflow support frame 11 is lower than the end height.

[0028] An airflow gap is formed between the belt supporting plate 12 and the pressure stabilizing cover plate 13 .

[0029] In one example, the air cushion 18 is used to convert the airflow from below into a horizontal airflow and blow it horizontally to the inside or outside of the sheet airflow support frame 11. Preferably, when the airflow blows out from the sheet airflow support frame 11 and reaches the top, the airflow gap formed by the belt support plate 12 is changed to be blown horizontally to the inside.

[0030] The two sides of the voltage-stabilizing cover plate 13 form guide slopes, and the airflow blowing from the above-mentioned horizontal direction is guided by the guide slopes of the voltage-stabilizing cover plate 13, thereby forming a negative pressure area above the sheet-drawing flat belt 14, so as to achieve the effect of adsorption and guidance of materials, such as silicon wafers.

[0031] Furthermore, the surface of the wafer-drawing flat belt 14 has an anti-slip texture, which further enhances the stability of the silicon wafer during the conveying process.

[0032] Among them, the sheet material sensor 15 adopts a non-contact sensor.

[0033] The form of the material sensor 15 is a capacitive non-contact sensor, and the specific principle is not limited, as long as it is non-contact. It is guaranteed to accurately detect the presence of the silicon wafer to avoid physical contact damage to the silicon wafer. The sensing distance of the material sensor 15 is adjustable from 0.1mm to 10mm.

[0034] The drawer transmission assembly 16 includes a transmission shaft adapter block, a transmission shaft unit and a motor adapter arranged on the drawer airflow support frame 11. The transmission shaft unit includes a shaft body, a bearing seat, a driving wheel, an idler wheel, a driven wheel, etc., which are not specifically limited here, and only need to achieve stable drive of the belt.

[0035] Among them, the S-shaped speed curve motor can start and stop stably and instantly, effectively reducing the slippage of silicon wafers during the extraction process, ensuring uniform extraction and stable horizontal transportation of silicon wafers. Instantaneous start and stop realizes the ejection of silicon wafers, that is, ejection extraction, and stable time setting intervals to ensure stable silicon wafer spacing.

[0036] See also Figure 2 A discharge sensor 19 is provided at the discharge outer end of the horizontal ejection sheet extraction device 10 for sensing the ejection of the material from the horizontal ejection sheet extraction device 10 .

[0037] Extraction equipment See also Figure 5 The sheet extraction equipment includes a flip feed basket 20, a horizontal ejection sheet extraction device 10 and a horizontal guiding and conveying device 30; the bottom of the flip feed basket 20 is arranged directly above the horizontal ejection sheet extraction device 10, and is used to supply materials to the horizontal ejection sheet extraction device 10; the horizontal guiding and conveying device 30 is horizontally arranged at the end of the horizontal ejection sheet extraction device 10, and is used to guide and transport the side edges of the materials transported by horizontal ejection.

[0038] The sheet extraction device includes a flip feed basket 20 including a flip motor module 21 and a basket clamping module 22 , and the lower end of the basket of the basket clamping module 22 is arranged opposite to the horizontal ejection sheet extraction device 10 .

[0039] The horizontal guiding conveying device 30 includes a horizontal transmission streamline module 31 and a side guiding mechanism 32 , and the two side guiding mechanisms 32 are arranged on both sides of the horizontal transmission streamline module 31 along the material transmission streamline direction.

[0040] Through actual verification, materials such as silicon wafers can achieve a production capacity of more than 24,000, and the chip spacing is maintained above 60mm (30ms), achieving the expected effect.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A horizontal ejection device, characterized in that: The horizontal ejection sheet extraction device (10) comprises: A sheet-drawing airflow support frame (11), wherein an air passage is provided on the sheet-drawing airflow support frame (11) and is connected to an external air source; Two belt support plates (12) are arranged along the sheet drawing streamline direction at adjacent two side edges of the upper surface of the sheet drawing airflow support frame (11), and an airflow gap is formed between the lower surface of the belt support plate (12) and the sheet drawing airflow support frame (13); The pressure stabilizing cover plate (13) is horizontally arranged between the two belt support plates, and the airflow movement of the sheet drawing airflow support frame (11), the belt support plate (12) and the pressure stabilizing cover plate (13) forms a negative pressure area on the upper surface of the corresponding sheet drawing flat belt (14); A wafer-drawing flat belt (14) for conveying silicon wafers; A sheet material sensor (15) is arranged at the end of the sheet airflow support frame (11) or at the pressure stabilizing cover plate (13) and is used to sense whether there is material above; A sheet drawing transmission assembly (16) connected to a sheet drawing motor (17) for driving a sheet drawing flat belt; The sheet drawing motor (17) starts instantly when the sheet drawing material sensor (15) senses material, and stops instantly when it senses that there is no material, thereby realizing horizontal throwing and sheet drawing of the material.

2. The horizontal ejection sheet extraction device according to claim 1, characterized in that: The sheet-drawing airflow support frame (11) is in the shape of a "mouth" as a whole, air passages and air grooves are provided on both sides of the sheet-drawing airflow support frame (11), an air cushion (18) is provided between the belt support plate (12) and the sheet-drawing airflow support frame (13) to control the airflow direction; and the sheet-drawing flat belt (14) is arranged in the middle hollow portion of the sheet-drawing airflow support frame (11).

3. The horizontal ejection sheet extraction device according to claim 1, characterized in that: An air flow gap is formed between the belt support plate (12) and the pressure stabilizing cover plate (13).

4. The horizontal ejection sheet extraction device according to claim 1, characterized in that: The sheet material sensor (15) adopts a non-contact sensor.

5. The horizontal ejection sheet extraction device according to claim 1, characterized in that: The sheet-drawing transmission assembly (16) comprises a transmission shaft adapter block, a transmission shaft unit and a motor adapter which are arranged on the sheet-drawing airflow support frame (11).

6. The horizontal ejection sheet extraction device according to claim 1, characterized in that: The sheet drawing motor (17) adopts an S-shaped speed curve motor.

7. The horizontal ejection sheet extraction device according to claim 1, characterized in that: A material discharging sensor (19) is provided at the material discharging outer end of the horizontal ejection sheet extraction device (10) for sensing the material being ejected from the horizontal ejection sheet extraction device (10).

8. A film extraction device, characterized in that: The sheet extraction equipment comprises a flip feed basket (20), a horizontal ejection sheet extraction device (10) according to any one of claims 1 to 7, and a horizontal guiding and conveying device (30); the bottom of the flip feed basket (20) is arranged directly above the horizontal ejection sheet extraction device (10) for supplying materials to the horizontal ejection sheet extraction device (10); the horizontal guiding and conveying device (30) is horizontally arranged at the end of the horizontal ejection sheet extraction device (10) for guiding and conveying the side edges of the materials transported by horizontal ejection.

9. The film extraction device according to claim 8, characterized in that: The flip feed basket (20) comprises a flip motor module (21) and a basket clamping module (22), and the basket lower end of the basket clamping module (22) is arranged facing the horizontal ejection sheet extraction device (10).

10. The film extraction device according to claim 8, characterized in that: The horizontal guiding conveying device (30) comprises a horizontal transmission streamline module (31) and a side guiding mechanism (32), wherein the two side guiding mechanisms (32) are arranged on both sides of the horizontal transmission streamline module (31) along the material transmission streamline direction.

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