Lithium tantalate infrared induction network system

Abstract

The invention relates to the technical field of infrared induction, and discloses a lithium tantalate infrared induction network system, which comprises a substrate composed of a support substrate and an ultralow thermal conductivity heat insulation layer, the support substrate is made of a silicon-based or sapphire-based material, the ultralow thermal conductivity heat insulation layer is composed of a modified silicon dioxide aerogel composite layer, and the modified silicon dioxide aerogel composite layer is made of a silicon dioxide aerogel composite material. The substrate and a supporting substrate are integrated through a low-temperature plasma bonding process; the lithium tantalate sensing module comprises a first electrode layer, a lithium tantalate wafer and a second electrode layer; a signal transmission link to ensure good conductivity; the infrared absorption film is used for balancing the absorption efficiency and the mechanical stability of a film layer; a self-adaptive noise suppression algorithm is built in the distributed module; through the heat insulation layer with ultralow heat conductivity, the loss of heat to the environment is obviously reduced, and the thermal response performance of the detector is improved; the shielding layer is formed by doping zirconium oxide nanoparticles, infrared radiation is effectively shielded, and heat loss is further reduced.

Description

Technical Field

[0001] The invention relates to the field of infrared sensing technology, in particular to a lithium tantalate infrared sensing network system. Background Art

[0002] Infrared sensing technology plays an important role in many fields, such as environmental monitoring, medical diagnosis, security monitoring, smart home, etc. By detecting the infrared radiation emitted by an object, it is possible to perceive the object's temperature, movement and other information. ) As an important ferroelectric material, it has excellent piezoelectric, electro-optical and nonlinear optical properties and is widely used in the field of infrared detection. It can realize the collection, transmission and processing of multi-point infrared signals, providing a more comprehensive and accurate monitoring method for various application scenarios.

[0003] The patent with publication number CN118215382A discloses a lithium tantalate pyroelectric infrared detector and a manufacturing method thereof. The detector includes, from bottom to top, a supporting substrate, a heat insulation layer, a first bonding layer, a second bonding layer, a first electrode layer, a lithium tantalate wafer, a second electrode layer, and an infrared absorption layer. The supporting substrate and the heat insulation layer together constitute a composite supporting structure, which realizes the overall support of the lithium tantalate wafer, and there is no suspended area. The problem of partial suspension of the lithium tantalate wafer in the existing lithium tantalate pyroelectric infrared detector is avoided from the root, and the ability of the lithium tantalate pyroelectric infrared detector to resist external mechanical vibration is improved, and the microphone effect of the lithium tantalate pyroelectric infrared detector is greatly reduced. At the same time, the thermal conductivity of the heat insulation layer is less than or equal to 0.05W / (m·K), which can ensure the heat insulation performance and enable the lithium tantalate pyroelectric infrared detector to maintain a high detection rate.

[0004] In the above patent, the heat conduction efficiency and thermal isolation effect are improved by designing the supporting substrate boss and the thermal insulation layer, but the thermal conductivity of the thermal insulation layer is still relatively high (≤0.1 W / (m·K)), which may cause part of the heat to still be lost to the environment, affecting the thermal response performance of the detector. In addition, the material selection of the thermal insulation layer, such as inorganic aerogel, organic aerogel, etc., may have stability problems in practical applications; in addition, the pyroelectric charge generated by the lithium tantalate wafer needs to be transmitted to the external circuit through multiple layers, including the first electrode layer, the second bonding layer and the first bonding layer, which increases the complexity of signal transmission and potential signal loss. Based on this, the present invention designs a lithium tantalate infrared sensing network system to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide a lithium tantalate infrared sensing network system, which solves the problems of heat loss and signal transmission difficulty in the background technology.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions: A lithium tantalate infrared sensing network system, comprising: The substrate is composed of a supporting substrate and an ultra-low thermal conductivity insulation layer. The supporting substrate is a silicon-based or sapphire-based material with a thickness of 200-500 μm. A periodic boss array is formed on the surface by a photolithography process. The boss height is 10-50 μm and the spacing is 50-200 μm. The ultra-low thermal conductivity insulation layer is composed of a modified silica aerogel composite layer with a thermal conductivity of ≤0.03 W / (m·K) and a density of , porosity ≥ 95%, thickness 50-200μm, integrated with the supporting substrate through low-temperature plasma bonding process; The lithium tantalate sensor module comprises a first electrode layer, a lithium tantalate wafer and a second electrode layer. The lithium tantalate wafer has a thickness of 10-50 μm. The first electrode layer and the second electrode layer are made of platinum material with a thickness of 50-200 nm to balance mechanical strength and pyroelectric performance. The signal transmission link includes a conductive via that penetrates the supporting substrate and is filled with gold and copper materials with a resistivity of ≤2μΩ·cm, directly connecting the first electrode layer to the external readout circuit to ensure good conductivity; Infrared absorbing film, made of vanadium oxide ( ) Nanostructured with a thickness of 0.5-2 μm to balance the absorption efficiency and mechanical stability of the membrane; Distributed module, built-in adaptive noise suppression algorithm, supports multi-node signal synchronous acquisition.

[0007] Preferably, the ultra-low thermal conductivity insulation layer includes a reinforcement skeleton, which is a blend of silicon carbide nanowires and an aerogel matrix to form a three-dimensional network structure with a compressive strength of ≥5 MPa; the reinforcement skeleton also includes a shielding layer, which is aerogel doped with zirconium oxide nanoparticles with a particle size of 10-50nm and an infrared reflectivity of ≥90% to perform radiation shielding.

[0008] Preferably, the polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane to ensure the maximization of the pyroelectric effect, thereby improving the sensitivity of infrared detection; the cutting angle θ of the lithium tantalate wafer is 36°±2° so that the lithium tantalate wafer has an optimal pyroelectric coefficient after polarization.

[0009] Preferably, the polarization treatment of the lithium tantalate wafer adopts an electric field polarization method, with a polarization electric field strength of 10-30 kV / cm, a polarization temperature of 80-120° C., and a polarization time of 10-30 minutes to ensure that the electric domains inside the wafer are fully oriented and arranged, thereby obtaining good pyroelectric properties.

[0010] The weak electrical signal generated by the lithium tantalate sensor module is transmitted to the external readout circuit quickly and with low loss through the conductive vias in the signal transmission link. The conductive vias penetrate the supporting substrate and are filled with gold and copper materials with a resistivity of ≤2μΩ·cm, ensuring good conductivity. In addition, the parasitic capacitance of the conductive vias is ≤0.1pF, which effectively reduces the noise interference during signal transmission and ensures the integrity of the signal. In the signal transmission process, the distributed module plays a key role. Its built-in adaptive noise suppression algorithm uses a wavelet transform-Kalman filter hybrid algorithm to achieve noise suppression ≥40dB in the frequency domain range of 0.1-100Hz, a sampling rate ≥3MHz, and a signal-to-noise ratio ≥90dB. This algorithm can monitor the noise situation during signal transmission in real time and automatically adjust the filtering parameters to adapt to different noise environments.

[0011] Preferably, the gold and copper materials filled in the conductive vias are filled by chemical plating to ensure good conductivity and mechanical strength; the parasitic capacitance of the conductive vias is ≤0.1pF to reduce noise interference during signal transmission.

[0012] Preferably, the nanostructure is one or more of nanowires, nanotubes or nanoparticles to achieve effective absorption of infrared light; the infrared absorption film has an infrared absorption rate of ≥95% and has excellent absorption performance in the infrared band of 3-14 μm.

[0013] Preferably, the distributed module adopts a wavelet transform-Kalman filter hybrid algorithm to achieve noise suppression ≥40dB, a sampling rate ≥3MHz, and a signal-to-noise ratio ≥90dB in the frequency domain range of 0.1-100Hz; the distributed module also integrates a temperature compensation unit, a dynamic bias circuit and a digital filter module to further improve the stability and detection accuracy of the system.

[0014] The distributed module also integrates a temperature compensation unit, a dynamic bias circuit and a digital filter module to further improve the stability and detection accuracy of the system. The temperature compensation unit can monitor the changes in ambient temperature in real time and compensate the signal accordingly to eliminate the impact of temperature drift on the detection results; the dynamic bias circuit automatically adjusts the bias voltage according to the signal strength to ensure that the signal is transmitted in the best state; the digital filter module further filters the signal to remove high-frequency noise and interference signals.

[0015] Preferably, the system is deployed as an M×N array (M, N≥8), with a unit spacing of 1-5 mm, the array is interconnected via a CAN bus, with a transmission delay of ≤1 ms, and supports real-time data fusion under the OSI model protocol stack.

[0016] Preferably, the system is also equipped with a self-check module, including a blackbody radiation reference source and a fault diagnosis circuit, which can monitor the operating status of the system in real time to ensure the reliability and stability of the system.

[0017] The self-test module configured in the system is a key subsystem to ensure the long-term stable operation of the entire lithium tantalate infrared sensing network system. Its core components include a blackbody radiation reference source and a fault diagnosis circuit, which work together to achieve real-time monitoring of the system's operating status and fault warning.

[0018] Preferably, the system is packaged in an airtight ceramic tube shell, the thermal expansion coefficient of the ceramic tube shell is 6.5-7.5ppm / ℃, and the interior is filled with argon gas with a purity of ≥99.999%; the performance indicators of the system include detection rate , thermal response time constant τ≤20ms, equivalent noise power .

[0019] The system is packaged in an airtight ceramic shell. The thermal expansion coefficient of the ceramic shell is precisely controlled at 6.5-7.5ppm / ℃. This feature enables the system to maintain the stability of its internal structure when facing temperature changes and avoid mechanical stress damage caused by uneven thermal expansion. The high-purity argon gas (purity ≥99.999%) filled inside provides an inert gas environment for the system, effectively reducing the absorption and scattering of infrared radiation by gas molecules and improving the sensitivity of infrared detection. At the same time, high-purity argon gas can also prevent the internal components of the system from chemical corrosion such as oxidation, thereby extending the service life of the system.

[0020] Compared with the prior art, the beneficial effects achieved by the present invention are: 1. The present invention adopts a modified silica aerogel composite layer as an ultra-low thermal conductivity insulation layer, which significantly reduces the heat loss to the environment compared with the traditional insulation layer, and improves the thermal response performance of the detector; the design of the reinforced skeleton in the insulation layer not only improves the compressive strength of the material, but also forms a shielding layer by doping zirconium oxide nanoparticles, which effectively shields infrared radiation and further reduces heat loss.

[0021] 2. In the present invention, the signal transmission link adopts a conductive via that penetrates the supporting substrate to directly connect the first electrode layer to the external readout circuit, thereby reducing the number of layers and complexity of signal transmission and reducing potential signal loss; the conductive via is filled with gold and copper materials, and good conductivity and mechanical strength are ensured by chemical plating. At the same time, the parasitic capacitance is as low as below 0.1pF, which effectively reduces noise interference during signal transmission.

[0022] 3. In the present invention, the lithium tantalate wafer is subjected to precise cutting angle selection and electric field polarization treatment to ensure that the internal electric domains are fully oriented and arranged, thereby being able to produce a significant pyroelectric effect when the temperature changes; the infrared absorption film is made of vanadium oxide ( ) nanostructure has an absorption rate of more than 95% for light in the 3-14μm infrared band, and can efficiently convert infrared light energy into heat energy, further improving the performance of the detector. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a system structure diagram of the present invention; Figure 2 A flowchart of system manufacturing and parameter configuration of the present invention; Figure 3 This is a flow chart of the application scenario of the present invention. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] See also Figure 1-Figure 3 In an embodiment of the present invention, a lithium tantalate infrared sensing network system includes: The substrate is composed of a supporting substrate and an ultra-low thermal conductivity insulation layer. The supporting substrate is a silicon-based or sapphire-based material with a thickness of 200-500 μm. A periodic boss array is formed on the surface by a photolithography process. The boss height is 10-50 μm and the spacing is 50-200 μm. The ultra-low thermal conductivity insulation layer is composed of a modified silica aerogel composite layer with a thermal conductivity of ≤0.03 W / (m·K) and a density of , porosity ≥ 95%, thickness 50-200μm, integrated with the supporting substrate through low-temperature plasma bonding process; The lithium tantalate sensor module includes a first electrode layer, a lithium tantalate wafer and a second electrode layer. The lithium tantalate wafer has a thickness of 10-50 μm. The first electrode layer and the second electrode layer are made of platinum material with a thickness of 50-200 nm to balance mechanical strength and pyroelectric performance. The signal transmission link includes a conductive via that penetrates the supporting substrate and is filled with gold and copper materials with a resistivity of ≤2μΩ·cm, directly connecting the first electrode layer to the external readout circuit to ensure good conductivity; Infrared absorbing film, made of vanadium oxide ( ) Nanostructured with a thickness of 0.5-2 μm to balance the absorption efficiency and mechanical stability of the membrane; Distributed module, built-in adaptive noise suppression algorithm, supports multi-node signal synchronous acquisition.

[0026] The ultra-low thermal conductivity insulation layer includes a reinforcement skeleton, which is a mixture of silicon carbide nanowires and an aerogel matrix to form a three-dimensional network structure with a compressive strength of ≥5 MPa; the reinforcement skeleton also includes a shielding layer, which is aerogel doped with zirconium oxide nanoparticles with a particle size of 10-50nm and an infrared reflectivity of ≥90% to perform radiation shielding.

[0027] The polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane to ensure the maximization of the pyroelectric effect, thereby improving the sensitivity of infrared detection; the cutting angle θ of the lithium tantalate wafer is 36°±2° so that the lithium tantalate wafer has the best pyroelectric coefficient after polarization.

[0028] The polarization treatment of lithium tantalate wafer adopts electric field polarization method, with polarization electric field strength of 10-30 kV / cm, polarization temperature of 80-120℃, and polarization time of 10-30 minutes, to ensure that the electric domains inside the wafer are fully oriented and arranged, thereby obtaining good pyroelectric properties.

[0029] The gold and copper materials filled in the conductive vias are filled by chemical plating to ensure good conductivity and mechanical strength; the parasitic capacitance of the conductive vias is ≤0.1pF to reduce noise interference during signal transmission.

[0030] The nanostructure is one or more of nanowires, nanotubes or nanoparticles to achieve effective absorption of infrared light; the infrared absorption rate of the infrared absorption film is ≥95%, and it has excellent absorption performance in the infrared band of 3-14μm.

[0031] The distributed module adopts a wavelet transform-Kalman filter hybrid algorithm to achieve noise suppression ≥40dB, sampling rate ≥3MHz, and signal-to-noise ratio ≥90dB in the frequency domain range of 0.1-100Hz; the distributed module also integrates a temperature compensation unit, a dynamic bias circuit and a digital filter module to further improve the stability and detection accuracy of the system.

[0032] The working principle of the embodiment of the present invention is: when external infrared radiation enters the system, it is first absorbed by the infrared absorption film. The film layer is made of vanadium oxide ( ) nanostructures, and its nanowire, nanotube or nanoparticle structure gives it an absorption rate of up to ≥95% in the 3-14μm infrared band. These nanostructures efficiently convert the absorbed infrared light energy into heat energy through their unique physical properties, causing the temperature of the lithium tantalate sensor module that is closely attached to the infrared absorption film to change. The polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane, and after precise cutting angles (θ is 36°±2°) and electric field polarization treatment (polarization electric field strength 10-30 kV / cm, polarization temperature 80-120℃, polarization time 10-30 minutes), it ensures the full orientation of its internal electric domains, so that a significant pyroelectric effect can be generated when the temperature changes, realizing efficient conversion of thermal energy to electrical energy. In this process, the first electrode layer and the second electrode layer (platinum material, thickness 50-200nm) not only provide the necessary electrode structure for the pyroelectric effect, but also ensure the stability of the sensor module through its good mechanical strength.

[0033] The weak electrical signal generated by the lithium tantalate sensor module is transmitted to the external readout circuit quickly and with low loss through the conductive vias in the signal transmission link. The conductive vias penetrate the supporting substrate and are filled with gold and copper materials with a resistivity of ≤2μΩ·cm, ensuring good conductivity. At the same time, the conductive vias are filled by chemical plating, which gives them excellent mechanical strength and adaptability to complex use environments. In addition, the parasitic capacitance of the conductive vias is ≤0.1pF, which effectively reduces noise interference during signal transmission and ensures signal integrity. In the process of signal transmission, the distributed module plays a key role. Its built-in adaptive noise suppression algorithm uses a wavelet transform-Kalman filter hybrid algorithm to achieve noise suppression ≥40dB in the frequency domain range of 0.1-100Hz, a sampling rate ≥3MHz, and a signal-to-noise ratio ≥90dB. This algorithm can monitor the noise situation during signal transmission in real time and automatically adjust the filtering parameters to adapt to different noise environments.

[0034] The distributed module also integrates a temperature compensation unit, a dynamic bias circuit and a digital filter module to further improve the stability and detection accuracy of the system. The temperature compensation unit can monitor the changes in ambient temperature in real time and compensate the signal accordingly to eliminate the impact of temperature drift on the detection results; the dynamic bias circuit automatically adjusts the bias voltage according to the signal strength to ensure that the signal is transmitted in the best state; the digital filter module further filters the signal to remove high-frequency noise and interference signals.

[0035] See also Figure 1-Figure 3 ,In the embodiment of the present invention, the system is deployed as an M×N array (M, N ≥ 8), the unit spacing is 1-5mm, the array is interconnected via CAN bus, the transmission delay is ≤1ms, and real-time data fusion under the OSI model protocol stack is supported.

[0036] The system is also equipped with a self-test module, which includes a blackbody radiation reference source and a fault diagnosis circuit, which can monitor the operating status of the system in real time to ensure the reliability and stability of the system.

[0037] The system is packaged in an airtight ceramic shell with a thermal expansion coefficient of 6.5-7.5ppm / ℃. It is filled with argon gas with a purity of ≥99.999%. The system's performance indicators include detection rate , thermal response time constant τ≤20ms, equivalent noise power .

[0038] The working principle of the embodiment of the present invention is as follows: In the actual application scenario, the system is deployed as an M×N array (M, N≥8), the unit spacing is 1-5mm, interconnected through the CAN bus, the transmission delay is ≤1ms, and supports real-time data fusion under the OSI model protocol stack. When the system is installed at the end of the robotic arm and is 0.5-2m away from the monitoring target, the infrared radiation (temperature range 80-300℃) of the target area is After the nanowires absorb The chip temperature changes (ΔT≈0.05-0.5℃), generating pyroelectric charge These charges are quickly transmitted to the FPGA circuit through platinum electrodes and copper vias, with a transmission loss of ≤2%. In the data processing stage, the temperature compensation unit uses a Pt100 sensor to correct the ambient temperature drift in real time (±0.1°C accuracy), and the dynamic bias circuit applies a 50V bias voltage (ripple 0.8mV) to increase the signal-to-noise ratio to 92dB.

[0039] As a high-precision radiation standard, the blackbody radiation reference source can simulate infrared radiation signals of known intensity. By periodically activating the blackbody radiation reference source, stable infrared radiation is generated inside the system. The radiation is received by the infrared absorption film and converted into heat energy, which in turn triggers the lithium tantalate sensor module to generate a corresponding pyroelectric signal. This process is equivalent to an internal calibration of the system, which can effectively eliminate detection errors caused by environmental changes or system aging.

[0040] The system is equipped with a self-check module, which starts the blackbody reference source (emissivity 0.96, temperature 50℃±0.3℃) for calibration every 24 hours. The impedance spectrum analysis detects abnormal units (positioning error ≤80μm) to ensure the reliability and stability of the system. During the entire working process, the ultra-low thermal conductivity insulation layer effectively reduces heat loss through its unique reinforced skeleton and shielding layer design, ensuring the high-performance operation of the system in a high temperature difference environment.

[0041] The fault diagnosis circuit is responsible for real-time monitoring of the electrical performance of each key node of the system. It collects voltage and current signals in the signal transmission link and the operating parameters of the distributed modules to conduct a comprehensive health check on the system. Once an abnormal signal is detected, the fault diagnosis circuit can quickly locate the fault location and accurately determine the type of fault through technical means such as impedance spectrum analysis. For example, when the impedance of a unit in the system changes abnormally, the fault diagnosis circuit can determine whether it is a specific fault such as electrode breakage or interlayer debonding through impedance spectrum analysis, and feedback the fault information to the system control center so that maintenance measures can be taken in time to prevent the fault from further expanding and affecting the normal operation of the system.

[0042] During the operation of the system, the airtight ceramic shell and the argon gas filled inside work together to ensure the long-term stability of the system performance. For example, in harsh environments such as high temperature and high humidity, the airtight ceramic shell can effectively block the invasion of external moisture and impurities, while the high-purity argon gas inside keeps the system dry and clean, so that key components such as the lithium tantalate sensor module and infrared absorption film are always in the best working condition, thereby ensuring the system detection rate. , thermal response time constant τ≤20ms, equivalent noise power Stable output of high performance indicators such as .

[0043] See also Figure 1-Figure 3 In an embodiment of the present invention, verifying the application of the lithium tantalate infrared sensing network system in temperature monitoring of a smart factory includes the following steps: Step S1, system manufacturing and parameter configuration: Step a, substrate preparation: Support substrate: 4-inch sapphire wafer (300 μm thick) was used to form a platform array (30 μm in height and 100 μm in spacing) by deep reactive ion etching (DRIE), with a surface roughness of ≤10 nm (measured by AFM); Ultra-low thermal conductivity insulation layer: modified silica aerogel was prepared by sol-gel method, doped with 15 wt% zirconium oxide nanoparticles (particle size 20 nm), and the thermal conductivity was reduced to 0.025 W / (m·K) after supercritical drying, the porosity was 97%, and the compressive strength was 6.2 MPa; it was integrated with the supporting substrate by plasma activated bonding (temperature 200°C, pressure 10 kN), and the interface thermal resistance was .

[0044] Step b, lithium tantalate sensor module integration: Lithium tantalate wafer: 36° Y-cut Single crystal (thickness 20μm), by ion implantation ( , energy 50 keV, dose ) forms a gradient doping layer, and the pyroelectric coefficient is increased to ; Electrode layer: Platinum electrode (thickness 150nm, square resistance 8 Ω / sq) was deposited by magnetron sputtering, and the electrode patterning accuracy was ±1μm.

[0045] Step c: signal transmission link construction: Conductive via: TSV process (aperture 15μm, aspect ratio 10:1), titanium nitride barrier layer (100nm) deposited on the hole wall + electroplated copper filling (resistivity 1.8μΩ·cm), through-hole resistance 42 mΩ, parasitic capacitance 0.08 pF; Interconnection structure: The vias are connected to the external FPGA circuit through gold wire ball bonding (diameter 25μm).

[0046] Step d, preparation of infrared absorbing film: Vanadium oxide nanowire array: VO2 nanowires (diameter 80nm, length 2μm) were grown by CVD method, with a period of 1.2μm and a duty cycle of 0.5. After FDTD simulation optimization, the absorption rate in the 8-14μm band was 97.3%.

[0047] Step e, distributed module deployment: Algorithm configuration: wavelet transform + Kalman filter, noise suppression 43 dB (0.1-100 Hz frequency band); Array scale: 8×8 unit array (pitch 3 mm), CAN bus transmission rate 1 Mbps, delay 0.8 ms.

[0048] Step S2, application scenario and operation process: Scenario: Real-time temperature monitoring of high-temperature components (welding points, motor coils) in automotive battery production lines, requiring detection accuracy of ±1°C and response time ≤50 ms.

[0049] Step a: System installation: encapsulate the array in an airtight ceramic tube (CTE = 7.0 ppm / ℃, internal argon purity 99.999%) and install it at the end of the robotic arm, 0.5-2 m away from the monitoring target.

[0050] Step b, signal acquisition, infrared radiation in the target area (temperature range 80-300℃) is absorbed by VO2 nanowires, causing The chip temperature changes (ΔT≈0.05-0.5℃), generating pyroelectric charge .

[0051] Step c, signal transmission, the charge passes through the platinum electrode → copper through hole → FPGA circuit, and the transmission loss is ≤ 2% (compared with the 15% loss of the multi-layer bonding structure in the prior art); Step d, data processing: Temperature compensation: Pt100 sensor corrects ambient temperature drift in real time (±0.1℃ accuracy); Dynamic bias: Applying 50 V bias voltage (ripple 0.8 mV) increases the signal-to-noise ratio to 92 dB; Data fusion: Upload to the central server via Ethernet to generate a 2D temperature distribution map (resolution 3 mm / pixel).

[0052] Step e, self-inspection and maintenance, start the blackbody reference source (emissivity 0.96, temperature 50℃±0.3℃) calibration every 24 hours, and impedance spectrum analysis detected 2 abnormal units (positioning error ≤80μm).

[0053] The working principle of the embodiment of the present invention is as follows: As shown in Table 1 below, the performance test and comparison data are shown (the heat loss rate test condition is 25°C environment, and the target temperature difference is 50°C for 30 minutes). In thermal management, the ultra-low thermal conductivity insulation layer (0.025 W / (m·K)) is combined with the radiation shielding design, and the heat loss rate is reduced to 4.5%, supporting the detector to maintain in a high temperature difference environment (ΔT=275°C). ; The TSV direct connection architecture reduces the number of transmission layers and reduces the parasitic capacitance to 0.08 pF, making the system signal-to-noise ratio exceed 90 dB, compared with similar products ≤ 75 dB.

[0054] Table 1.

[0055] By taking advantage of large-scale deployment, the 8×8 array combined with the adaptive algorithm can achieve The synchronous collection of data points increases the temperature imaging frame rate to 50 fps, while the existing technology is generally ≤15 fps. The aerogel-reinforced skeleton (compression resistance 6.2MPa) combined with the self-test module increases the MTBF (mean time between failures) to 50,000 hours, while the industry average is 30,000 hours.

[0056] Working principle: When external infrared radiation is incident, it is first absorbed by the infrared absorption film. The vanadium oxide ( )The nanostructure has an absorption rate of more than 95% in the 3-14μm band, which efficiently converts infrared light energy into heat energy, causing the temperature of the lithium tantalate sensor module attached to it to change. The lithium tantalate wafer is precisely cut and treated with electric field polarization, and the internal electric domains are fully oriented, producing a significant pyroelectric effect, realizing the conversion of thermal energy to electrical energy, and the weak electrical signal generated is transmitted to the external readout circuit quickly and with low loss through the conductive vias in the signal transmission link. The low resistivity and low parasitic capacitance characteristics of the conductive vias ensure the integrity and stability of signal transmission.

[0057] In the process of signal transmission, the distributed module plays a key role. Its built-in wavelet transform-Kalman filter hybrid algorithm achieves noise suppression of more than 40dB in the 0.1-100Hz frequency domain, and the sampling rate and signal-to-noise ratio reach 3MHz and more than 90dB respectively. At the same time, the integrated temperature compensation unit, dynamic bias circuit and digital filter module further improve the system stability and detection accuracy. The temperature compensation unit monitors and compensates for the ambient temperature changes in real time, the dynamic bias circuit automatically adjusts the bias voltage according to the signal strength, and the digital filter module further filters out high-frequency noise.

[0058] The system is also equipped with a self-test module, which includes a blackbody radiation reference source and a fault diagnosis circuit. The blackbody radiation reference source is periodically activated to provide the system with a stable infrared radiation signal to achieve internal calibration and eliminate detection errors caused by environmental changes or system aging. The fault diagnosis circuit monitors the electrical performance of each key node of the system in real time, and conducts a comprehensive health check by collecting voltage, current signals and operating parameters. Once an abnormal signal is detected, it can quickly locate the fault location and accurately determine the fault type, and feed back the fault information to the system control center for timely maintenance.

[0059] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations may be made to the embodiments without departing from the principles and spirit thereof, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A lithium tantalate infrared sensing network system, characterized in that: include: The substrate is composed of a supporting substrate and an ultra-low thermal conductivity insulation layer. The supporting substrate is a silicon-based or sapphire-based material with a thickness of 200-500 μm. A periodic boss array is formed on the surface by a photolithography process. The boss height is 10-50 μm and the spacing is 50-200 μm. The ultra-low thermal conductivity insulation layer is composed of a modified silica aerogel composite layer with a thermal conductivity of ≤0.03 W / (m·K) and a density of , porosity ≥ 95%, thickness 50-200μm, integrated with the supporting substrate through low-temperature plasma bonding process; The lithium tantalate sensor module comprises a first electrode layer, a lithium tantalate wafer and a second electrode layer. The lithium tantalate wafer has a thickness of 10-50 μm. The first electrode layer and the second electrode layer are made of platinum material with a thickness of 50-200 nm to balance mechanical strength and pyroelectric performance. The signal transmission link includes a conductive via that penetrates the supporting substrate and is filled with gold and copper materials with a resistivity of ≤2μΩ·cm, directly connecting the first electrode layer to the external readout circuit to ensure good conductivity; Infrared absorbing film, made of vanadium oxide ( ) Nanostructured with a thickness of 0.5-2 μm to balance the absorption efficiency and mechanical stability of the membrane layer; Distributed module, built-in adaptive noise suppression algorithm, supports multi-node signal synchronous acquisition.

2. A lithium tantalate infrared sensing network system according to claim 1, characterized in that: The ultra-low thermal conductivity insulation layer includes a reinforcement skeleton, which is a mixture of silicon carbide nanowires and an aerogel matrix to form a three-dimensional network structure with a compressive strength of ≥5 MPa; the reinforcement skeleton also includes a shielding layer, which is aerogel doped with zirconium oxide nanoparticles with a particle size of 10-50nm and an infrared reflectivity of ≥90% to perform radiation shielding.

3. A lithium tantalate infrared sensing network system according to claim 1, characterized in that: The polarization direction of the lithium tantalate wafer is perpendicular to the electrode plane to ensure the maximization of the pyroelectric effect, thereby improving the sensitivity of infrared detection; the cutting angle θ of the lithium tantalate wafer is 36°±2° so that the lithium tantalate wafer has the best pyroelectric coefficient after polarization.

4. A lithium tantalate infrared sensing network system according to claim 1, characterized in that: The polarization treatment of the lithium tantalate wafer adopts an electric field polarization method, with a polarization electric field strength of 10-30 kV / cm, a polarization temperature of 80-120° C., and a polarization time of 10-30 minutes to ensure that the electric domains inside the wafer are fully oriented and arranged, thereby obtaining good pyroelectric performance.

5. The lithium tantalate infrared sensing network system according to claim 1, characterized in that: The gold and copper materials filled in the conductive vias are filled by chemical plating to ensure good conductivity and mechanical strength; the parasitic capacitance of the conductive vias is ≤0.1pF to reduce noise interference during signal transmission.

6. A lithium tantalate infrared sensing network system according to claim 1, characterized in that: The nanostructure is one or more of nanowires, nanotubes or nanoparticles to achieve effective absorption of infrared light; the infrared absorption rate of the infrared absorption film is ≥95%, and it has excellent absorption performance in the infrared band of 3-14μm.

7. The lithium tantalate infrared sensing network system according to claim 1, characterized in that: The distributed module adopts a wavelet transform-Kalman filter hybrid algorithm to achieve noise suppression ≥40dB, sampling rate ≥3MHz, and signal-to-noise ratio ≥90dB in the frequency domain range of 0.1-100Hz; the distributed module also integrates a temperature compensation unit, a dynamic bias circuit and a digital filter module to further improve the stability and detection accuracy of the system.

8. The lithium tantalate infrared sensing network system according to claim 1, characterized in that: The system is deployed as an M×N array (M, N≥8) with a unit spacing of 1-5 mm. The array is interconnected via a CAN bus with a transmission delay of ≤1ms, supporting real-time data fusion under the OSI model protocol stack.

9. The lithium tantalate infrared sensing network system according to claim 1, characterized in that: The system is also equipped with a self-check module, including a blackbody radiation reference source and a fault diagnosis circuit, which can monitor the operating status of the system in real time to ensure the reliability and stability of the system.

10. The lithium tantalate infrared sensing network system according to claim 1, characterized in that: The system is packaged in an airtight ceramic tube shell, the thermal expansion coefficient of the ceramic tube shell is 6.5-7.5ppm / ℃, and the interior is filled with argon gas with a purity of ≥99.999%; the performance indicators of the system include detection rate , thermal response time constant τ≤20ms, equivalent noise power .

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