Spherical multi-dimensional rotation angle measurement time grating sensor and mounting structure thereof

Abstract

The invention discloses a spherical multi-dimensional rotation angle measurement time grating sensor and an installation structure thereof. The time grating sensor comprises a stator base body and a rotor base body. The stator base body is in a spherical shell shape, the rotor base body is in a spherical shell shape and located in the spherical shell of the stator base body, and a gap is reserved between the surface of the rotor base body and the inner surface of the stator base body so that the rotor base body can be suspended and concentric with the stator base body. Six excitation units with the same shape and size are uniformly distributed on the inner surface of the stator base body at intervals; and the centers of the six excitation units are positioned in the centers of the six surfaces of the cube externally tangent to the inner surface of the stator base body. Eight sensing units with the same shape and size are uniformly distributed on the surface of the rotor base body at intervals; the eight sensing units are symmetrically distributed on eight quadrants of a space rectangular coordinate system with the center of the rotor base body as the original point. According to the invention, high-precision spherical space multi-dimensional rotation angle measurement can be realized, the structure is simple, the decoupling is thorough, and the anti-interference capability is strong.

Description

Technical Field

[0001] The invention relates to a time-grating sensing technology, in particular to a spherical multi-dimensional rotation angle measurement time-grating sensor and a mounting structure thereof, and belongs to the field of precision angular displacement measurement. Background Art

[0002] At present, the level of multi-dimensional and multi-parameter measurement technology has become an important factor in measuring the international competitiveness of my country's manufacturing industry, and its importance will become more prominent in the new round of global high-end manufacturing competition. At present, simply using multiple independent sensors to combine measurements can no longer meet the new needs in the intelligent manufacturing process. A single sensor unit to achieve multi-dimensional and multi-parameter measurement has become a development trend in the field of precision detection technology. Spatial multi-dimensional rotation angle displacement measurement is a method of rotating around a constant center in multiple degrees of freedom. When it is based on a ball joint, it can be converted into measuring the multi-degree-of-freedom rotation of a spherical rotor around the center of the ball in a constrained ball socket. For traditional industrial robot joints, if the high-precision measurement of the spatial rotation angle of the ball joint can be achieved, the ball joint can be used to replace the traditional single-degree-of-freedom rotation joint, thereby effectively reducing the number of joints used, simplifying the system structure, and improving the tracking accuracy and dynamic performance of the system. However, conventional measuring instruments and equipment cannot achieve high-precision detection of the multi-dimensional rotation angle of the ball joint, especially in situations where the structural size is limited.

[0003] In recent years, a kind of angular displacement time-grating sensor (publication number CN102425987B) with clock pulse as displacement measurement reference has been developed in China. This sensor uses high-frequency clock pulse as measurement reference, uses alternating electric field constructed by flat capacitor to directly couple the electric wave signal required for measurement, and uses high-frequency clock pulse to perform phase interpolation processing on the induced signal to obtain the angular displacement value, which can achieve high-precision angular displacement measurement. However, the current electric field angular displacement time-grating sensor can only perform single-dimensional angular displacement measurement, and cannot achieve multi-dimensional angular displacement measurement in spherical space. Summary of the invention

[0004] In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a spherical multi-dimensional rotation angle measurement time-grating sensor and its installation structure. The present invention can achieve high-precision spherical space multi-dimensional rotation angle measurement, and has a simple structure, complete decoupling, and strong anti-interference ability.

[0005] The technical solution of the present invention is achieved in this way:

[0006] A spherical multi-dimensional rotation angle measurement time-grid sensor, comprising a stator matrix and a rotor matrix, wherein an excitation unit is arranged on the stator matrix, and an induction unit is arranged on the rotor matrix; the stator matrix is ​​in the shape of a spherical shell, the rotor matrix is ​​in the shape of a spherical shell and is located in the spherical shell of the stator matrix, and a gap is left between the surface of the rotor matrix and the inner surface of the stator matrix so that the rotor matrix is ​​suspended and concentric with the stator matrix; the excitation units are 6 in shape and size and are evenly spaced and distributed on the inner surface of the stator matrix; the centers of the 6 excitation units are located at the centers of the six faces of a cube circumscribed to the inner surface of the stator matrix;

[0007] The sensing units are 8 in number and have exactly the same shape and size and are evenly distributed on the surface of the rotor base; the 8 sensing units are symmetrically distributed on 8 quadrants of a spatial rectangular coordinate system with the center of the rotor base as the origin.

[0008] Furthermore, each excitation unit is composed of a metal pole piece of conductive material, and the six metal pole pieces corresponding to the six excitation units are closely attached to the inner surface of the stator matrix, and the outer surface radius of each excitation unit is equal to the inner surface radius of the stator matrix;

[0009] Each sensing unit is composed of a metal pole piece of conductive material. The eight metal pole pieces corresponding to the eight sensing units are tightly attached to the outer surface of the rotor base. The inner surface radius of each sensing unit is equal to the outer surface radius of the rotor base.

[0010] Furthermore, the angle occupied by each excitation unit is θ S , the angle between two adjacent excitation units is δ S =π / 2-θ S ;

[0011] The angle occupied by each sensing unit is θ R , the angle between two adjacent sensing units is δ R =π / 2-θ R .

[0012] Furthermore, the center of the rotor base is hollowed out, and the hollowed-out part is spherical.

[0013] Furthermore, the outer contour of the excitation unit is a spherical quadrilateral or a spherical circle, a spherical quadrilateral with a hollow center, or a spherical circle with a hollow center; the outer contour of the sensing unit is a spherical triangle or a spherical circle, a spherical triangle with a hollow center, or a spherical circle.

[0014] Furthermore, all the excitation units are hollowed out in the center; a mounting hole that penetrates inside and outside is provided on the stator base, and the mounting hole is directly opposite to the hollow part of one of the excitation units, so that the surface of the rotor base is connected to the outside through the mounting hole and the corresponding hollow part.

[0015] The present invention also provides a spherical multi-dimensional rotation angle measurement time-grating sensor installation structure, wherein the spherical multi-dimensional rotation angle measurement time-grating sensor is the aforementioned spherical multi-dimensional rotation angle measurement time-grating sensor, wherein the stator base is rotatably connected to the stator drive turntable via a stator support shaft, and the excitation electrode is connected to an external excitation source via a signal line that penetrates the stator base shell; the rotor base is rotatably connected to the rotor drive turntable via a rotor support shaft and the rotor base is suspended in the stator base; the signal line of the induction electrode is led out from the stator base via the rotor support shaft; and the rotor support shaft and the stator support shaft are perpendicular to each other.

[0016] Furthermore, one end of the rotor support shaft is integrally formed with the surface of the rotor base and avoids the area where the induction unit is located, and the other end of the rotor support shaft passes through the mounting hole on the surface of the stator base and the hollow part corresponding to the mounting hole and then is connected to the rotor driving turntable.

[0017] Furthermore, all the induction units are hollowed out in the center, and one end of the rotor support shaft is formed integrally with the surface of the rotor base through the hollow area of ​​one of the induction units to avoid the area where the induction unit is located.

[0018] Furthermore, one end of the stator support shaft is integrally formed with the outer surface of the stator base, and the other end of the stator support shaft is connected to the stator drive turntable; there is a rotation gap between the rotor support shaft and the mounting hole on the surface of the stator base and the hollow part corresponding to the mounting hole, and the rotation angle of the stator support shaft is limited by the rotation gap.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] The present invention realizes simultaneous encoding in the X and Z orthogonal directions in the spherical space by staggered arrangement of six excitation units, picks up signals by arranging the sensing units in pairs in a differential structure, filters out coupling signals in non-measurement directions by summing the output signals of two adjacent sensing units by an adder, eliminates common-mode interference by subtracting the differential signals by a subtractor, thereby further improving the signal decoupling capability, achieving thorough decoupling and strong anti-interference capability, realizing high-precision spherical multi-dimensional rotational angular displacement measurement, and having a simple structure and being easy to implement. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a diagram showing the relative relationship between the stator base and the rotor base in Example 1.

[0022] Figure 2 Schematic diagram of the stator matrix structure in Example 1.

[0023] Figure 3 This is a schematic diagram of the rotor base structure in Example 1.

[0024] Figure 4 This is a schematic diagram of angular displacement solution in Example 1.

[0025] Figure 5 Schematic diagram of the relative position relationship of the stator matrix excitation unit in Example 1.

[0026] Figure 6 This is a schematic diagram of signal processing in Example 1.

[0027] Figure 7 This is a schematic diagram of the shape of the stator matrix excitation unit in Example 2.

[0028] Figure 8 This is a schematic diagram of the shape of the stator matrix excitation unit in Example 3.

[0029] Fig. 9 This is a schematic diagram of the shape of the stator matrix excitation unit in Example 4.

[0030] Fig.10 This is a schematic diagram of the shape of the rotor base induction unit in Example 5.

[0031] Fig.11 This is a schematic diagram of the shape of the rotor base induction unit in Example 6.

[0032] Fig.12 This is a schematic diagram of the shape of the rotor base induction unit in Example 7.

[0033] Fig.13 This is a schematic diagram of the installation structure of the grating sensor for measuring the multi-dimensional rotation angle of a spherical surface according to the present invention. DETAILED DESCRIPTION

[0034] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] The present invention discloses a spherical multi-dimensional rotation angle measurement time-grid sensor, comprising a stator base and a rotor base, wherein an excitation unit is arranged on the stator base, and an induction unit is arranged on the rotor base. The stator base is in the shape of a spherical shell, and the rotor base is in the shape of a spherical shell and is located inside the spherical shell of the stator base. A gap is left between the surface of the rotor base and the inner surface of the stator base so that the rotor base is suspended and concentric with the stator base.

[0036] The excitation units are 6 units with exactly the same shape and size and are evenly spaced and distributed on the inner surface of the stator matrix without contacting each other. They are called A, B, C, D, E, and F respectively; the centers of the 6 excitation units are located at the centers of the six faces of the cube tangent to the inner surface of the stator matrix. The 6 excitation units of the present invention are symmetrical about the XOY plane, the XOZ plane, and the YOZ plane, that is, the 6 excitation units are located on the coordinate axes X+, X-, Y+, Y-, Z+, and Z-, respectively, and the 6 excitation units are equidistant from the coordinate origin O. Among the 6 excitation units, it can be considered that 4 excitation units A, B, C, and D rotate around the Z axis, and 4 excitation units A, E, C, and F rotate around the X axis, among which the excitation unit A and the excitation unit C are excitation units shared by the rotation directions around the Z axis and around the X axis. Of course, because of the symmetrical arrangement in the X, Y, and Z directions, other interpretations are also possible, such as four excitation units rotating around the Z axis and four rotating around the Y axis, where two excitation units are shared by the Z and Y axis directions; or four excitation units rotating around the X axis and four rotating around the Y axis, where two excitation units are shared by the X and Y axis directions.

[0037] The sensing units are 8 in total, with the same shape and size, and are evenly spaced and distributed on the surface of the rotor base without contacting each other. The 8 sensing units are symmetrically distributed in 8 quadrants of a spatial rectangular coordinate system with the center of the rotor base as the origin. The 8 sensing units are equidistant from the origin of the coordinate system, and the 8 sensing units are spherically symmetrically distributed relative to the center of the sphere. The 8 sensing units are located inside the sphere composed of the 6 excitation units, that is, the outer radius of the sensing unit is smaller than the inner radius of the excitation unit.

[0038] Each excitation unit of the present invention is composed of a metal pole piece of conductive material, and the six metal pole pieces corresponding to the six excitation units are closely attached to the inner surface of the stator matrix, that is, the outer surface radius of the excitation unit is equal to the inner surface radius of the stator matrix. Similarly, each induction unit is composed of a metal pole piece of conductive material, and the eight metal pole pieces corresponding to the eight induction units are closely attached to the outer surface of the rotor matrix, that is, the inner surface radius of each induction unit is equal to the outer surface radius of the rotor matrix.

[0039] Set the outer surface radius of sub-substrate 1 to r S , the stator matrix thickness is d S , then the inner surface radius of the stator matrix is ​​r' S =r S -d S The thickness of each excitation unit is d' S , then the radius of the inner surface of the excitation unit is r" S＝ r' S -d' S . Assume that the angle occupied by each excitation unit is θ S, then the arc length of the excitation unit is w S =θ S × S / 2. Since the distance between the centers of two adjacent excitation units is 90°, the angle between the two adjacent excitation units at their closest locations is δ S =π / 2-θ S ; Assume that the angle occupied by each sensing unit is θ R , then the angle between the closest two adjacent sensing units is δ R =π / 2-θ R .

[0040] The rotor base 2 is a standard sphere with a hollow center, and the hollow part is also a standard sphere. The radius of the hollow part, that is, the radius of the inner surface of the rotor base, is r" R , the rotor base thickness is d' R , then the radius of the outer surface of the rotor base is r' R =r" R +d' R The thickness of each sensing unit is d R , then the outer radius is r R =r' R +d R The arc length of each sensing unit is w R =θ R × R / 2.

[0041] The outer contour shape of the excitation unit is preferably a spherical quadrilateral or a spherical circle, or a spherical ring structure formed by a corresponding quadrilateral hole or a circular hole in the center of the spherical quadrilateral or the spherical circle; the outer contour shape of the sensing unit is a spherical triangle or a spherical circle, or a spherical ring structure formed by a circular hole in the center of the spherical triangle or the spherical circle.

[0042] For the structure with a hollow setting in the center of the excitation unit (i.e. a spherical ring structure formed by a corresponding quadrilateral hole or circular hole in the center), a mounting hole that passes through the inside and outside is provided on the stator base. The mounting hole is directly opposite to the hollow part of one of the excitation units, so that the surface of the rotor base is connected to the outside through the mounting hole and the corresponding hollow part, thereby facilitating the connection between the rotor and the external rotor drive turntable.

[0043] Example 1: Figures 1 to 6 As shown, in this embodiment, the spherical multi-dimensional rotation angle measurement time-grid displacement sensor based on the alternating electric field, the stator base 1 and the rotor base 2 are installed concentrically, and a spacing of d=26mm is left. The thickness of the stator base d S =10mm, stator base inner radius r' S =76mm, the thickness of the excitation unit set on the inner surface of the stator matrix is ​​d' S=2mm. Rotor base thickness d' R =40mm, rotor base outer radius r' R =50mm, the thickness of the induction unit set on the outer surface of the rotor base is d R =2mm.

[0044] like Figure 2 and Figure 5 As shown, the inner surface of the stator matrix 1 is provided with 6 excitation units A, B, C, D, E, F of the same shape and size, and the angle occupied by a single excitation unit is θ S =π / 3, the gap between adjacent excitation units δ S =π / 2-θ S =π / 6, 6 excitation units are installed concentrically.

[0045] The six excitation units are arranged at equal spatial angles around the Z axis and the X axis respectively. The four excitation units arranged in the rotation direction of the Z axis are fed with different sinusoidal excitation signals, and the four excitation units arranged in the rotation direction of the X axis are fed with different sinusoidal excitation signals. The specific implementation method is as follows: the four excitation units A, B, C, and D arranged in the Z axis direction are fed with sinusoidal excitation signals Am*sin(ωt), Am*sin(ωt+π / 2), Am*sin(ωt+π), and Am*sin(ωt+3π / 2) respectively. The four excitation units A, E, C, and F arranged in the X axis direction are fed with four sinusoidal excitation signals Am*sin(ωt), Am*sin(ωt+π / 2), Am*sin(ωt+π), and Am*sin(ωt+3π / 2) respectively. The four excitation units arranged in the Z axis share excitation unit A and excitation unit C with the four excitation units arranged in the X axis. The four excitation units arranged around the Z axis are respectively fed with four sinusoidal excitation signals of the same frequency and amplitude with a phase difference of 90°, forming an alternating electric field in space; the four excitation units arranged around the X axis are respectively fed with four sinusoidal excitation signals of the same frequency and amplitude with a phase difference of 90°, forming an alternating electric field in space.

[0046] like Figure 3 As shown, the outer surface of the rotor base 2 is provided with 8 sensing units a, b, c, d, e, f, g, h of exactly the same shape and size. The shape of a single sensing unit is a spherical triangle, and the angle occupied by a single sensing unit is θ R =5π / 12. The 8 sensing units are located in the 8 quadrants of the spatial rectangular coordinate system. The distance from the 8 sensing units to the origin of the coordinate system is equal to the outer radius r' of the rotor base. R =50mm, 8 sensing units are located on the same sphere and do not touch each other, and the gap size between adjacent sensing units is δ R =π / 2-θ R =π / 12.

[0047] The 8 induction units on the upper surface of the rotor base 2 and the 6 excitation units on the inner surface of the stator base 1 form a coupling capacitor. During measurement, four sinusoidal excitation signals of the same frequency and amplitude with a phase difference of π / 2 are applied to the 6 excitation units in sequence, and U is applied to the excitation unit A. A Phase sinusoidal excitation signal, U A =Am*sin(ωt), U is applied to the excitation units B and E B Phase sinusoidal excitation signal, U B =Am*sin(ωt+π / 2), U is applied to the excitation unit C C Phase sinusoidal excitation signal, U C =Am*sin(ωt+π), U is applied to the excitation units D and F D Phase sinusoidal excitation signal, U D =Am*sin(ωt+3π / 2). Wherein the excitation signal amplitude A=12V, frequency f=40kHz, angular frequency ω=2πf=8*10 4 πrad / s. When the rotor base 2 rotates relative to the stator base 1, the a, b, c, d, e, f, g, and h induction units generate eight sinusoidal induction signals of the same frequency and amplitude Ua, Ub, Uc, Ud, Ue, Uf, Ug, and Uh respectively through electric field coupling.

[0048] Signal processing methods such as Figure 4 and Figure 6 As shown, Ua, Ud, Ue, Uh and Ub, Uc, Uf, Ug are summed up through adders to obtain sine traveling wave signals Uz+ and Uz- containing only angular displacements rotating around the Z axis; Ua, Ub, Uc, Ud and Ue, Uf, Ug, Uh are summed up through adders to obtain angular displacement signals Ux+ and Ux- containing only angular displacements rotating around the X axis. Uz+ and Uz- are subtracted through a subtractor to obtain a sine traveling wave signal Uz containing only angular displacements rotating around the Z axis; Ux+ and Ux- are subtracted through a subtractor to obtain a sine traveling wave signal Ux containing only angular displacements rotating around the X axis. The expressions of traveling wave signals Uz and Ux are as follows:

[0049]

[0050] The traveling wave signal Uz containing only the angular displacement around the Z axis and the traveling wave signal Ux containing only the angular displacement around the X axis are formed into square waves by the shaping circuit and sent to the FPGA for phase detection processing at the same time. ref The phase difference is represented by the number of interpolated high-frequency clock pulses. After conversion, the rotational angular displacement α of the rotor base 2 relative to the stator base 1 in the Z-axis direction is obtained. z and the rotational angular displacement α around the X-axis x .

[0051] Embodiment 2: The spherical multi-dimensional rotation angle measurement time-grating displacement sensor based on alternating electric field in this embodiment has the same measurement principle and most structures as those in Embodiment 1, except that: Figure 7 As shown, the shape of the excitation unit is a spherical quadrilateral.

[0052] Embodiment 3: The spherical multi-dimensional rotation angle measurement time-grating displacement sensor based on alternating electric field in this embodiment has the same measurement principle and most structures as those in Embodiment 1, except that: Figure 8 As shown, the shape of the excitation unit is a spherical quadrilateral with a hollow center, and the shape of the hollow part is a spherical quadrilateral.

[0053] Embodiment 4: The spherical multi-dimensional rotation angle measurement time-grating displacement sensor based on alternating electric field in this embodiment has the same measurement principle and most structures as those in Embodiment 3, except that: Fig. 9 As shown, the shape of the excitation unit is a spherical quadrilateral with a hollow center, and the shape of the hollow part is a spherical circle, and each excitation unit is composed of 4 metal pole pieces, so the electric field formed is more uniform. That is, the metal pole pieces Wa1, Wa2, Wa3, and Wa4 are connected by excitation signal leads to form an excitation unit A; the metal pole pieces Wb1, Wb2, Wb3, and Wb4 are connected by excitation signal leads to form an excitation unit B; the metal pole pieces Wc1, Wc2, Wc3, and Wc4 are connected by excitation signal leads to form an excitation unit C; the metal pole pieces Wd1, Wd2, Wd3, and Wd4 are connected by excitation signal leads to form an excitation unit D; the metal pole pieces We1, We2, We3, and We4 are connected by excitation signal leads to form an excitation unit E; the metal pole pieces Wf1, Wf2, Wf3, and Wf4 are connected by excitation signal leads to form an excitation unit F. In the same excitation unit, the gap between two adjacent metal pole pieces is δ' S =1°.

[0054] Embodiment 5: The measurement principle and most structures of the spherical multi-dimensional rotation angle measurement time-grating displacement sensor based on alternating electric field in this embodiment are the same as those in Embodiment 1, except that: Fig.10 As shown, each sensing unit is composed of 6 metal pole pieces. Taking sensing unit a as an example, it is composed of metal pole pieces a1, a2, a3, a4, a5, and a6. The 6 metal pole pieces of each sensing unit are connected together by wires. In the same sensing unit, the gap between two adjacent metal pole pieces is δ' R =1°.

[0055] Embodiment 6: The measurement principle and most of the structures of the spherical multi-dimensional rotation angle measurement time-grating displacement sensor based on alternating electric field in this embodiment are the same as those in Embodiment 1, except that: Fig.11As shown, each sensing unit is spherical in shape, and the angle occupied by each sensing unit is θ R =5π / 12.

[0056] Embodiment 7: The spherical multi-dimensional rotation angle measurement time-grating displacement sensor based on alternating electric field in this embodiment has the same measurement principle and most structures as those in Embodiment 1, except that: Fig.12 As shown, each sensing unit is in the shape of a spherical triangle with a hollow center, and the hollowed-out portion is a spherical circle.

[0057] See also Fig.13 The present invention also provides a spherical multi-dimensional rotation angle measurement time-grid sensor installation structure, wherein the center of all the excitation units of the spherical multi-dimensional rotation angle measurement time-grid sensor is hollowed out; a circular installation hole 3 that penetrates inside and outside is provided on the stator base 1, and the installation hole is directly opposite to the hollowed-out part of one of the excitation units, so that the surface of the rotor base is connected to the outside through the installation hole and the corresponding hollowed-out part. The stator base 1 is rotatably connected to the stator drive turntable through the stator support shaft 4, and the excitation electrode is connected to the external excitation source through the signal line that penetrates the stator base shell; the rotor base 2 is rotatably connected to the rotor drive turntable through the rotor support shaft 5, and the rotor base is suspended in the stator base; the signal line of the induction electrode is led out from the stator base through the rotor support shaft; the rotor support shaft 5 and the stator support shaft 4 are perpendicular to each other.

[0058] During actual installation, one end of the rotor support shaft is integrally formed with the surface of the rotor base and avoids the area where the induction unit is located, and the other end of the rotor support shaft passes through the mounting hole on the surface of the stator base and the hollow part corresponding to the mounting hole and then is connected to the rotor driving turntable.

[0059] In order to facilitate the rotor support shaft to avoid the area where the sensing units are located, the centers of all the sensing units in the embodiment of the present invention are hollowed out, and one end of the rotor support shaft is integrally formed with the surface of the rotor base through the hollow area of ​​one of the sensing units, thereby avoiding the area where the sensing units are located. Of course, the rotor support shaft can also be connected to the rotor base in the gap area left by the four sensing units.

[0060] One end of the stator support shaft of the present invention is integrally formed with the outer surface of the stator base, and the other end of the stator support shaft is connected to the stator driving turntable. The rotor support shaft of the present invention can rotate 360 ​​degrees, while the stator support shaft cannot. There is a rotation gap between the rotor support shaft and the mounting hole on the surface of the stator base and the hollow part corresponding to the mounting hole, and the rotation angle of the stator support shaft is limited by the rotation gap.

[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the applicant has described the present invention in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that modifications or equivalent substitutions of the technical solution of the present invention without departing from the purpose and scope of the technical solution should be included in the scope of the claims of the present invention.

Claims

1. A spherical multi-dimensional rotation angle measurement time grid sensor, comprising a stator matrix and a rotor matrix, wherein an excitation unit is provided on the stator matrix and a sensing unit is provided on the rotor matrix; characterized in that: The stator matrix is ​​in the shape of a spherical shell, the rotor matrix is ​​in the shape of a spherical shell and is located in the spherical shell of the stator matrix, and a gap is left between the surface of the rotor matrix and the inner surface of the stator matrix so that the rotor matrix is ​​suspended and concentric with the stator matrix; the excitation units are 6 in shape and size and are evenly distributed on the inner surface of the stator matrix; the centers of the 6 excitation units are located at the centers of the six faces of a cube tangent to the inner surface of the stator matrix; The sensing units are 8 in number and have exactly the same shape and size and are evenly distributed on the surface of the rotor base; the 8 sensing units are symmetrically distributed on 8 quadrants of a spatial rectangular coordinate system with the center of the rotor base as the origin.

2. A spherical multi-dimensional rotation angle measurement time-grating sensor according to claim 1, characterized in that: Each excitation unit is composed of a metal pole piece of conductive material. The six metal pole pieces corresponding to the six excitation units are tightly attached to the inner surface of the stator matrix. The outer surface radius of each excitation unit is equal to the inner surface radius of the stator matrix. Each sensing unit is composed of a metal pole piece of conductive material. The eight metal pole pieces corresponding to the eight sensing units are tightly attached to the outer surface of the rotor base. The inner surface radius of each sensing unit is equal to the outer surface radius of the rotor base.

3. The spherical multi-dimensional rotation angle measurement time-grating sensor according to claim 1, characterized in that: The angle occupied by each excitation unit is θ S , the angle between two adjacent excitation units is δ S = π / 2- θ S ; The angle occupied by each sensing unit is θ R , the angle between two adjacent sensing units is δ R =π / 2-θ R .

4. The spherical multi-dimensional rotation angle measurement time-grating sensor according to claim 1, characterized in that: The center of the rotor base is hollowed out, and the hollowed-out part is spherical.

5. The spherical multi-dimensional rotation angle measurement time-grating sensor according to claim 1, characterized in that: The outer contour of the excitation unit is a spherical quadrilateral or a spherical circle, a spherical quadrilateral with a hollow center, or a spherical circle with a hollow center; the outer contour of the sensing unit is a spherical triangle or a spherical circle, a spherical triangle with a hollow center, or a spherical circle.

6. The spherical multi-dimensional rotation angle measurement time-grating sensor according to claim 1, characterized in that: All the excitation units are hollowed out in the center; a mounting hole that penetrates inside and outside is provided on the stator base, and the mounting hole is directly opposite to the hollow part of one of the excitation units, so that the surface of the rotor base is connected to the outside through the mounting hole and the corresponding hollow part.

7. A spherical multi-dimensional rotation angle measurement time grid sensor installation structure, characterized in that: The spherical multi-dimensional rotation angle measurement time-grating sensor is the spherical multi-dimensional rotation angle measurement time-grating sensor according to claim 6, wherein the stator base is rotatably connected to the stator drive turntable through a stator support shaft, and the excitation electrode is connected to an external excitation source through a signal line that penetrates the stator base shell; the rotor base is rotatably connected to the rotor drive turntable through a rotor support shaft and the rotor base is suspended in the stator base; the signal line of the induction electrode is led out from the stator base through the rotor support shaft; the rotor support shaft and the stator support shaft are perpendicular to each other.

8. The spherical multi-dimensional rotation angle measurement time grid sensor installation structure according to claim 7, characterized in that: One end of the rotor support shaft is integrally formed with the surface of the rotor base body and avoids the area where the induction unit is located. The other end of the rotor support shaft passes through the mounting hole on the surface of the stator base body and the hollow part corresponding to the mounting hole and then is connected to the rotor driving turntable.

9. The spherical multi-dimensional rotation angle measurement time grid sensor installation structure according to claim 8, characterized in that: All the induction units are hollowed out in the center, and one end of the rotor support shaft is formed integrally with the surface of the rotor base through the hollow area of ​​one of the induction units to avoid the area where the induction unit is located.

10. A spherical multi-dimensional rotation angle measurement time grid sensor installation structure according to claim 8 or 9, characterized in that: One end of the stator support shaft is integrally formed with the outer surface of the stator base, and the other end of the stator support shaft is connected to the stator drive turntable; There is a rotation gap between the rotor support shaft and the mounting hole on the surface of the stator base body and the hollow part corresponding to the mounting hole, and the rotation angle of the stator support shaft is limited by the rotation gap.

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