Galvanometer product long-term stability detection device and detection method

Abstract

The invention discloses a galvanometer product long-term stability detection device and method, and the device comprises a pedestal which is provided with a first station and a second station, the first station is provided with an autocollimator capable of moving along a first direction, and the second station is provided with at least two groups of galvanometers to be detected along the first direction; the optical assembly is configured at the second station and used for assisting the autocollimator in optical detection, and the optical assembly at least comprises a linear polarization beam splitting cube configured at the incidence hole of the galvanometer, a first reflecting mirror located under the linear polarization beam splitting cube and a second reflecting mirror located under the emergence hole of the galvanometer; the problems that a traditional galvanometer repeated positioning precision and zero drift distance detection device generally can only detect one galvanometer product, and the galvanometer product stability detection efficiency is low can be solved.

Description

Technical Field

[0001] The present invention relates to the field of galvanometers, and in particular to a device and method for detecting the long-term stability of galvanometer products. Background Art

[0002] Galvanometer is an important optical device, widely used in many fields such as laser processing, optical communication and precision measurement. In the above applications, the repeatability accuracy and long-term zero drift of the galvanometer are important indicators. Repeatability accuracy refers to the ability of the galvanometer to maintain a stable position or angle during multiple measurements or operations to ensure the accuracy of its working effect; zero drift refers to the deviation between the initial position (i.e., zero position) and the set position of the galvanometer after a long period of work. Traditional devices for detecting the repeatability accuracy and zero drift of galvanometers can usually only detect one galvanometer product. When the galvanometer is in working state for a long time, the detection device is in standby state, which greatly reduces the efficiency of galvanometer stability detection. Summary of the invention

[0003] The present invention aims to solve the above technical problem, that is, the traditional galvanometer repeatability positioning accuracy and zero drift detection device can usually only detect one galvanometer product, and there is a problem of low efficiency in galvanometer product stability detection.

[0004] In a first aspect, the present invention provides a device for detecting the long-term stability of a galvanometer product, comprising: a base having a first station and a second station, wherein the first station is provided with an autocollimator that can move along a first direction, and the second station is provided with at least two groups of galvanometers to be detected along the first direction; an optical component is configured at the second station to assist the autocollimator in performing optical detection, wherein the optical component at least includes a linear polarization beam splitter cube configured at the galvanometer entrance hole, a first reflector located directly below the linear polarization beam splitter cube, and a second reflector located directly below the galvanometer exit hole.

[0005] In the preferred technical solution of the above-mentioned galvanometer product long-term stability detection device, a linear module is arranged on the first station, and the autocollimator is driven to move along the first direction by the linear module.

[0006] In the preferred technical solution of the above-mentioned galvanometer product long-term stability detection device, the second station is provided with a support for fixing the galvanometer and the first reflector.

[0007] In the preferred technical solution of the above-mentioned galvanometer product long-term stability detection device, the support is made of Invar steel.

[0008] In the preferred technical solution of the above-mentioned galvanometer product long-term stability detection device, the base is arranged on a vibration-absorbing table, and the base is made of marble.

[0009] In the preferred technical solution of the above-mentioned galvanometer product long-term stability detection device, the linear polarization beam splitter cube is arranged at the second station by means of a snap-on structure.

[0010] In the preferred technical solution of the above-mentioned galvanometer product long-term stability detection device, the first reflector and the second reflector are configured to have the same structure.

[0011] In a second aspect, the present invention further provides a method for detecting the long-term stability of a galvanometer product, comprising the following steps: A collimated laser beam is emitted toward a linear polarization beam splitter cube by using an autocollimator, and the linear polarization beam splitter cube splits the laser beam into two linear polarization beams, wherein the first linear polarization beam is vertically reflected downward toward a first reflector, and the second linear polarization beam is incident along a horizontal straight line into a galvanometer in a zero position state and vertically reflected downward to a second reflector by the galvanometer; After the first route polarized light beam is reflected by the first reflector, it returns to the autocollimator through the linear polarization beam splitter cube, and the autocollimator records the landing point of the first route polarized light beam as the reference coordinate S (a, b); after the second route polarized light beam is reflected by the second reflector, it returns to the autocollimator through the galvanometer and the linear polarization beam splitter cube in sequence, and the autocollimator records the landing point of the second route polarized light beam as the test coordinate P (c, d), and the initial relative coordinates of the galvanometer when initializing are obtained as T (x, y), where x = a - c, y = b–d; When performing interval detection on a plurality of the galvanometers, the autocollimator emits a collimated laser beam to the linear polarization beam splitter cube corresponding to one group of the galvanometers, so that the autocollimator can record the real-time reference coordinate S'(a', b') reflected by the first reflector and the real-time test coordinate P'(c', d') reflected by the second reflector, and obtain the real-time relative coordinate T'(x', y') of the galvanometer returning to the initial origin after working for a predetermined time, wherein x'= a'- c', y'=b'-d'; By comparing whether the real-time relative coordinates T'(x', y') of the galvanometer at different times deviate from the threshold range of the initial relative coordinates T(x, y) of the galvanometer, the stability of the galvanometer after long-term operation can be confirmed.

[0012] The beneficial effect of the present invention is that at least two groups of galvanometer products to be tested are arranged on the base, and a linear module is used to drive the autocollimator to move between the galvanometer products, so as to detect the repeat positioning accuracy and zero drift of each galvanometer product at intervals, so that the autocollimator is always in a working state, thereby greatly improving the detection efficiency of the stability of each galvanometer product. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a front view of the present invention; Figure 2 Schematic diagram of the optical path of the detection device; Figure 3 It is a schematic diagram of the detection principle of the detection device; In the figure: base 1, autocollimator 2, first route polarized light beam 21, second route polarized light beam 22, galvanometer 3, linear polarization beam splitter cube 41, first reflector 42, second reflector 43, linear module 5, support 6, vibration reduction platform 7. DETAILED DESCRIPTION

[0014] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0015] It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "rear" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0016] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0017] See also Figures 1 to 3 The long-term stability detection device of the galvanometer product of the present invention includes: a base 1, having a first station and a second station, the first station is provided with an autocollimator 2 that can move along a first direction, and the second station is provided with at least two groups of galvanometers 3 to be detected along the first direction; an optical component is configured at the second station, and is used to assist the autocollimator 2 in optical detection, and the optical component at least includes a linear polarization beam splitter cube 41 configured at the incident hole of the galvanometer 3, a first reflector 42 located directly below the linear polarization beam splitter cube 41, and a second reflector 43 located directly below the exit hole of the galvanometer 3.

[0018] See also Figure 1The first direction is the length direction of the base 1, and the second direction is the width direction of the base 1. The autocollimator 2 can move along the first direction on the first station and emit a collimated laser beam along the second direction. At least two groups of galvanometers 3 to be detected are arranged on the second station along the first direction. In this application, five galvanometers 3 to be detected are used as an exemplary explanation.

[0019] See also Figure 1 , Figure 2 The optical component at least includes a linear polarization beam splitter cube 41, a first reflector 42 and a second reflector 43, wherein the collimated laser beam incident on the linear polarization beam splitter cube 41 can separate two linear polarized light beams propagating perpendicularly to each other, wherein the first line polarized light beam 21 is vertically reflected toward the first reflector 42, and the second line polarized light beam 22 is incident on the galvanometer 3 through the incident hole of the galvanometer 3 along a horizontal straight line and is reflected vertically downward to the second reflector 43 by the reflection of the galvanometer 3.

[0020] Specifically, when the stability test is performed on five groups of galvanometer mirrors 3, one group of galvanometer mirrors 3 is selected as the test object, and then the autocollimator 2 is controlled to move to the front of the galvanometer mirror 3 in the zero position state, and the autocollimator 2 emits a collimated laser beam toward the incident hole of the galvanometer mirror 3. The collimated laser beam is divided into two paths after passing through the linear polarization beam splitter cube 41. The first path polarized light beam 21 is reflected toward the first reflector 42. After being reflected by the first reflector 42, the first path polarized light beam 21 returns to the autocollimator 2 after passing through the linear polarization beam splitter cube 41. The autocollimator 2 records the first path polarized light beam. The landing point of the second polarized laser beam 21 is the real-time reference coordinate S' (a', b'), and the second route polarized light beam 22 is reflected by the galvanometer 3 in the zero position state and then directed to the second reflector 43. After being reflected by the second reflector 43, the second route polarized light beam 22 returns to the galvanometer 3 and returns to the autocollimator 2 through the linear polarization beam splitter cube 41. The autocollimator 2 records the landing point of the second polarized laser beam as the real-time test coordinate P' (c', d'). At this time, the detection of the group of galvanometer 3 products is completed, and the real-time relative coordinate T' (x', y') of the galvanometer is obtained, where x'= a'- c', y'= b'-d', then, control the autocollimator 2 to move to other galvanometer 3 products to be tested, repeat the above operation, and the real-time relative coordinates of each group of galvanometer 3 products can be measured. After waiting for five groups of galvanometer 3 to work for a period of time, the stability test of the above five groups of galvanometer 3 products is re-performed to measure the real-time relative coordinates of each group of galvanometer 3 products returning to the initial origin after different working time. By analyzing the real-time relative coordinates of each group of galvanometer 3 products and the corresponding initial relative coordinates, the repeated positioning accuracy and zero drift of each group of galvanometer 3 after long-term work can be measured. It has the characteristics of simple detection structure and high test accuracy, and is practical.

[0021] In one or more embodiments, a linear module 5 is disposed on the first workstation, and the autocollimator 2 is driven to move along the first direction by the linear module 5 .

[0022] See also Figure 1 The method of driving the autocollimator 2 by the linear module 5 has the characteristics of high displacement accuracy and high movement efficiency of the autocollimator 2, which greatly improves the efficiency of the stability test of each galvanometer 3 product in this application.

[0023] In one or more embodiments, the second workstation is provided with a support 6 for fixing the galvanometer 3 and the first reflector 42; the support 6 is made of Invar.

[0024] See also Figure 2 The galvanometer 3 is detachably mounted on the support 6. The support 6 is made of invar steel, which has a very low expansion coefficient. When the laser beam irradiates the support or the heat generated by the galvanometer 3 and the heat of the first reflector 42 are conducted to the support, the support made of invar steel can release the heat well, thus ensuring the reliability of the product test data. In addition, the support made of invar steel has a high strength, which can ensure the fixing effect of the galvanometer 3 and the first reflector 42.

[0025] In one or more embodiments, the base 1 is disposed on a vibration-damping platform 7 , and the base 1 is made of marble.

[0026] See also Figure 1 The base 1 made of marble has a very small linear expansion coefficient, and has extremely high precision and stability, which ensures the measurement accuracy of the galvanometer 3 product. In addition, the base 1 made of marble has the characteristics of high hardness, compressive strength, flexural strength, etc., and is not easy to deform or damage.

[0027] In one or more embodiments, the linear polarization beam splitter cube 41 is configured at the second station by means of a snap-on structure.

[0028] The drawings do not show the clamping structure, which can be configured on both sides of the linear polarization beam splitter cube 41 to clamp the linear polarization beam splitter cube 41 from both sides. The clamping structure can be a support rod installed on the support 6. The shape of the clamping structure is not specifically limited, and it only needs to be able to clamp the linear polarization beam splitter cube 41 on the support 6 or the base 1.

[0029] In one or more embodiments, the first reflector 42 and the second reflector 43 are configured to have the same structure. The first reflector 42 and the second reflector 43 are made of the same material, have the same thickness and diameter. Through this configuration, it can be ensured that the reflection of the first route polarized light beam 21 by the first reflector 42 is consistent with the reflection of the second route polarized light beam 22 by the second reflector 43, further ensuring the accuracy of the product stability detection of the galvanometer 3 in this application.

[0030] In addition, the repeatability and zero drift of the galvanometer 3 will deviate during long-term operation. To ensure the working effect of the galvanometer 3, the repeatability and zero drift of the galvanometer 3 during long-term operation need to be monitored. The repeatability of the galvanometer 3 means that the galvanometer 3 can maintain a stable position or angle during multiple measurements or operations to ensure the accuracy of its working effect; the zero drift of the galvanometer 3 means that during the working process of the galvanometer 3, due to the influence of various factors, the galvanometer 3 is not completely at the absolute zero position when it returns to the initial origin position for multiple times over a long period of time, but presents a certain position offset error.

[0031] To this end, the present invention also provides a method for detecting the long-term stability of a galvanometer product, comprising the following steps: The collimated laser beam is emitted toward the linear polarization beam splitter cube 41 by using the autocollimator 2. The linear polarization beam splitter cube 41 splits the laser beam into two linear polarization beams. The first linear polarization beam 21 is vertically reflected downward toward the first reflector 42. The second linear polarization beam 22 is incident along a horizontal straight line into the galvanometer 3 in the zero position state and is vertically reflected downward to the second reflector 43 by the galvanometer 3. After the first route polarized light beam 21 is reflected by the first reflector 42, it returns to the autocollimator 2 through the linear polarization beam splitter cube 41, and the autocollimator 2 records the landing point of the first route polarized light beam 21 as the reference coordinate S (a, b); after the second route polarized light beam 22 is reflected by the second reflector 43, it returns to the autocollimator 2 through the galvanometer 3 and the linear polarization beam splitter cube 41 in sequence, and the autocollimator 2 records the landing point of the second route polarized light beam 22 as the test coordinate P (c, d), and the initial relative coordinates of the galvanometer 3 when initialized are obtained as T (x, y), where x = a - c, y = bd; When performing interval detection on a plurality of galvanometers 3, the autocollimator 2 emits a collimated laser beam to the linear polarization beam splitter cube 41 corresponding to one group of galvanometers 3, so that the autocollimator 2 can record the real-time reference coordinate S' (a', b') reflected by the first reflector 42 and the real-time test coordinate P' (c', d') reflected by the second reflector 43, and obtain the real-time relative coordinate T' (x', y') of the galvanometer 3 returning to the initial origin again after working for a predetermined time, wherein x'= a'- c', y'=b'-d'; By comparing whether the real-time relative coordinates T'(x', y') of the galvanometer 3 at different times deviate from the threshold range of the initial relative coordinates T(x, y) of the galvanometer 3, it can be confirmed whether the repeatability and zero drift data of the galvanometer 3 meet expectations after long-term operation.

[0032] It should be noted that the device for driving the autocollimator 2 along the first direction is the linear module 5. The autocollimator 2 driven by the linear module 5 has high positioning accuracy and can reduce the error of the real-time relative coordinate T'(x', y') each time the galvanometer 3 is detected. Even if there is a certain error between the measured real-time relative coordinate T'(x', y') and the initial relative coordinate T(x, y), if the error is still within a certain threshold range, it means that the repeated positioning accuracy and displacement drift of the galvanometer 3 after long-term operation still meet the standards.

[0033] In addition, the present application can configure at least two groups of galvanometer mirrors 3 to be detected, and use the linear module 5 to drive the autocollimator 2 to move between the galvanometer mirrors 3 to be detected, thereby realizing interval detection of several galvanometer mirrors 3 to be detected at different times, effectively improving the efficiency of the present application for long-term stability detection of the galvanometer mirrors 3.

[0034] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for detecting the long-term stability of a galvanometer product, characterized in that: include: The base has a first station and a second station, wherein the first station is provided with an autocollimator that can move along a first direction, and the second station is provided with at least two groups of galvanometers to be detected along the first direction; An optical component is configured at the second workstation to assist the autocollimator in optical detection, and the optical component at least includes a linear polarization beam splitter cube configured at the galvanometer entrance hole, a first reflector located directly below the linear polarization beam splitter cube, and a second reflector located directly below the galvanometer exit hole.

2. The device for detecting the long-term stability of a galvanometer product according to claim 1, characterized in that: The first workstation is provided with a linear module, and the autocollimator is driven to move along a first direction by the linear module.

3. The long-term stability detection device for galvanometer products according to claim 1, characterized in that: The second workstation is provided with a support for fixing the galvanometer and the first reflector.

4. The device for detecting long-term stability of a galvanometer product according to claim 3, characterized in that: The support is made of Invar.

5. The device for detecting long-term stability of a galvanometer product according to claim 1, characterized in that: The base is arranged on a vibration-damping platform and is made of marble.

6. The device for detecting the long-term stability of a galvanometer product according to claim 1, characterized in that: The linear polarization beam splitter cube is arranged at the second station by means of a clamping structure.

7. The device for detecting long-term stability of a galvanometer product according to claim 1, characterized in that: The first reflector and the second reflector are configured to have the same structure.

8. A method for detecting the long-term stability of a galvanometer product, characterized in that: The following steps are involved: A collimated laser beam is emitted toward a linear polarization beam splitter cube by using an autocollimator, and the linear polarization beam splitter cube splits the laser beam into two linear polarization beams, wherein the first linear polarization beam is vertically reflected downward toward a first reflector, and the second linear polarization beam is incident along a horizontal straight line into a galvanometer in a zero position state and vertically reflected downward to a second reflector by the galvanometer; After the first route polarized light beam is reflected by the first reflector, it returns to the autocollimator through the linear polarization beam splitter cube, and the autocollimator records the landing point of the first route polarized light beam as the reference coordinate S (a, b); after the second route polarized light beam is reflected by the second reflector, it returns to the autocollimator through the galvanometer and the linear polarization beam splitter cube in sequence, and the autocollimator records the landing point of the second route polarized light beam as the test coordinate P (c, d), and the initial relative coordinates of the galvanometer when initializing are obtained as T (x, y), where x = a - c, y = b - d; When performing interval detection on a plurality of the galvanometers, the autocollimator emits a collimated laser beam to the linear polarization beam splitter cube corresponding to one group of the galvanometers, so that the autocollimator can record the real-time reference coordinate S'(a', b') reflected by the first reflector and the real-time test coordinate P'(c', d') reflected by the second reflector, and obtain the real-time relative coordinate T'(x', y') of the galvanometer returning to the initial origin after working for a predetermined time, wherein x'= a'- c', y'= b'-d'; By comparing whether the real-time relative coordinates T'(x', y') of the galvanometer at different times deviate from the threshold range of the initial relative coordinates T(x, y) of the galvanometer, the stability of the galvanometer after long-term operation can be confirmed.

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