Scanning device and imaging system

Abstract

The embodiments of this specification disclose an image scanning device and an imaging system. The image scanning device includes: a laser light source for providing laser light to excite an image plate; and a scanning chip, including a refractive index control structure, and an optical waveguide structure having an incident light channel and an output light channel array, wherein the incident light channel is used to couple the laser light emitted by the laser light source, and the output light channel array is used to output the laser light entering through the incident light channel, and the refractive index control structure is used to change the refractive index of the optical waveguide structure so that the laser light entering the incident light channel is sequentially emitted from the output light channel array to scan the image plate. The image scanning device according to the embodiments of the present disclosure can use a scanning chip to replace a mechanically rotating galvanometer, and can form scanning laser light emitted from different positions based on the incident laser without mechanically rotating the scanning chip.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to the field of laser scanning imaging technology, and more particularly to scanning devices and imaging systems. Background Art

[0002] The imaging system's scanning mechanism uses a spatial optical path to scan the image plate. This system uses the rotation of a galvanometer mirror to emit incident light at different angles, forming a laser beam that scans and excites the image plate. However, as the galvanometer mirror rotates, the scanning light spot moves from one pixel unit to the next, making it impossible to accurately distinguish the fluorescence generated by two adjacent scanning light spots, affecting image quality. Summary of the Invention

[0003] Embodiments of the present disclosure provide a scanning device and an imaging system, aiming to solve one or more of the above-mentioned problems and other potential problems.

[0004] According to a first aspect of the present disclosure, a scanning device is provided, comprising: a laser light source for providing laser light to excite an image plate; and a scanning chip comprising a refractive index control structure and an optical waveguide structure having an incident light channel and an output light channel array, wherein the incident light channel is used to couple laser light emitted by the laser light source, the output light channel array is used to output laser light entering through the incident light channel, and the refractive index control structure is used to change the refractive index of the optical waveguide structure so that the laser light entering the incident light channel is sequentially emitted from the output light channel array to scan the image plate. The image scanning device according to an embodiment of the present disclosure can utilize a scanning chip to replace a mechanically rotating galvanometer mirror, and can generate scanning laser light emitted from different positions based on the incident laser light without mechanically rotating the scanning chip.

[0005] In some embodiments, the refractive index control structure includes: a resistor array, including a plurality of heating resistors corresponding to each output light channel in the output light channel array; and an electrode array, including a plurality of control electrodes corresponding to each heating resistor in the resistor array, the control electrodes being used to apply a voltage signal to the corresponding heating resistor, and the voltage signals applied by the heating resistors of each output light channel have the same frequency and different amplitudes, so that the laser entering the incident channel is emitted sequentially from the output light channel array to scan the image plate.

[0006] In some embodiments, the image scanning device also includes: a power supply, including multiple voltage output channels corresponding to each control electrode in the electrode array, the voltage output channels are electrically connected to the corresponding control electrodes, and the output voltages of each voltage output channel have the same frequency and different amplitudes.

[0007] In some embodiments, the image scanning device further includes: an image plate loading device for loading the image plate to move in a line feed direction perpendicular to the scanning direction of the image plate; and the frequency of the voltage signal applied by each control electrode in the electrode array matches the movement period of the image plate.

[0008] In some embodiments, the image plate loading device loads the image plate and moves intermittently in a line feed direction perpendicular to the scanning direction of the image plate; and after the laser completes a line scan on the image plate, the image plate moves from the current position to the position of the next scanning line perpendicular to the image plate.

[0009] In some embodiments, the image plate loading device loads the image plate and moves the image plate in a line feed direction perpendicular to the scanning direction of the image plate at a uniform speed; and the moving speed v of the image plate and the period T of the voltage signal meet the relationship:

[0010]

[0011] Wherein, h represents half of the distance between two adjacent scanning lines on the image plate.

[0012] In some embodiments, the scanning chip further includes: an input optical fiber for coupling with an input light channel of the optical waveguide structure; and an output optical fiber array including a plurality of output optical fibers respectively coupled with respective output light channels of the optical waveguide structure.

[0013] In some embodiments, the scanning chip also includes a silicon material substrate for supporting the optical waveguide structure; and the optical waveguide structure also includes: a polymer material layer, provided on the silicon material substrate; and a germanium material guide core, provided in the polymer material layer, wherein the germanium material guide core is provided with an incident light channel and an output light channel array.

[0014] In some embodiments, the scanning chip further includes: an optical isolation element disposed between adjacent output light channels.

[0015] According to a second aspect of the present disclosure, an imaging system includes: the scanning device of the first aspect, for scanning the image plate; and an imaging device, for forming a digital image corresponding to the image plate based on the fluorescence generated by the image plate under laser excitation of the image scanning device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and other objects, features and advantages of the embodiments of the present disclosure will become readily understood by reading the following detailed description with reference to the accompanying drawings, in which several embodiments of the present disclosure are shown by way of example and not limitation.

[0017] Figure 1A schematic diagram showing the structure of an image scanning device according to an embodiment of the present disclosure.

[0018] Figure 2 A schematic diagram illustrating the arrangement of a resistor array of a scanning chip of an image scanning device according to an embodiment of the present disclosure.

[0019] Figure 3 A schematic diagram illustrating the related structures of a heating resistor and a control electrode of an image scanning device according to an embodiment of the present disclosure.

[0020] Figure 4 A schematic diagram illustrating a first matching manner between the period (ie, frequency) of the output voltage of the voltage output channel of the power supply and the movement period of the image board according to an embodiment of the present disclosure.

[0021] Figure 5 A schematic diagram illustrating a second matching manner between the period (ie, frequency) of the output voltage of the voltage output channel of the power supply and the movement period of the image board according to an embodiment of the present disclosure.

[0022] Figure 6 A front cross-sectional view of a scanning chip of an image scanning device according to an embodiment of the present disclosure is shown.

[0023] Figure 7 A top cross-sectional view of a scanning chip of an image scanning device according to an embodiment of the present disclosure is shown.

[0024] Figure 8 A schematic diagram illustrating the structure of an image scanning device with a reflecting mirror according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0025] The preferred embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although preferred embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided to make the present disclosure more thorough and complete, and to fully convey the scope of the present disclosure to those skilled in the art.

[0026] The term "including" and its variations used in this document indicate open inclusion, that is, "including but not limited to". Unless otherwise stated, the term "or" means "and / or". The term "based on" means "based at least in part on". The terms "an example embodiment" and "an embodiment" mean "at least one example embodiment". The term "another embodiment" means "at least one other embodiment". Terms such as "upper", "lower", "front", and "rear" indicating placement or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the principles of the present disclosure, and do not indicate or imply that the referred elements must have a specific orientation, be constructed or operate in a specific orientation, and therefore should not be understood as limiting the present disclosure.

[0027] X-ray imaging technology utilizes the penetrating properties of X-rays to generate images of the human body's internal structures. Using an imaging plate and a reader, the latent image created by X-ray exposure is converted into a digital image, providing high-resolution diagnostic information. This technology is widely used in medical imaging, particularly in oral scanning. An imaging plate is a digital X-ray imaging medium whose surface is composed of multiple pixel units, each of which stores a latent image reflecting the intensity of the X-ray exposure. During the scanning process, a laser excites each pixel on the imaging plate point by point, causing it to re-emit light. This converts the latent image into a digital signal, generating a detailed digital image that facilitates diagnosis.

[0028] As described above, in the imaging technology, the scanning device uses a galvanometer to deflect the image plate, generating laser beams with different emission angles. As the galvanometer rotates, the scanning light spot moves from the previous pixel unit position to the next pixel unit position. The scanning light used to excite adjacent pixels is continuous, making it impossible to accurately distinguish the fluorescence generated by the excitation of two adjacent scanning light spots, affecting the image quality. Especially in applications requiring high resolution, the light spots are more densely distributed on the image plate, and the signal interference between adjacent pixels is more obvious, which can easily cause image distortion.

[0029] In response to this, according to an embodiment of the present disclosure, an image scanning device is provided that does not require a mechanical galvanometer to provide a scanning laser. The image scanning device can use a scanning chip to replace the mechanically rotating galvanometer, and can form scanning lasers emitted from different positions based on the incident laser without mechanically rotating the scanning chip. In this way, the scanning light spot disappears from the position of the previous pixel unit and reappears at the position of the next pixel unit, so that the scanning light used to excite adjacent pixel points is isolated from each other, making it easier to distinguish and improving the imaging quality. The principle of the image scanning device according to the embodiment of the present disclosure is described in detail below with reference to the accompanying drawings.

[0030] Figure 1An imaging scanning system according to an embodiment of the present disclosure is shown, including a scanning device and an imaging device. This embodiment can be used for scanning image plates for oral clinical medical use. In oral medicine, this technology is often used for dental X-ray examinations, which can provide detailed images of teeth and jaws, helping dentists diagnose and treat various oral diseases. Specifically, an image plate (IP) is a photosensitive plate used in the X-ray imaging process. When X-rays pass through human tissue, the image plate absorbs radiation of different intensities and forms a latent image on the plate. Afterwards, the image plate is scanned by a scanning device, and the light signal generated by the excitation of the image plate is collected and processed by the imaging device, and a digital image corresponding to the image plate can be obtained. Specifically, the scanning device generates a laser to scan the image plate, so that the image plate generates fluorescence under the laser excitation of the image scanning device. The imaging device can form a scanned image corresponding to the image plate based on the fluorescence generated by the excitation of the image plate. A schematic diagram of the main structure of the image scanning device 1000. As shown Figure 1 As shown, the image scanning device 1000 may include a laser light source 1100 and a scanning chip 1200. The laser light source 1100 is used to provide laser light to excite the image plate 2000. For example, the laser light source may be a visible light laser, a near-infrared laser, a semiconductor laser, a multi-wavelength laser, or an ultrafast pulse laser. The scanning chip 1200 includes an optical waveguide structure 1220 having an incident light channel 1221 and an output light channel array 1222. Laser light 1110 entering the optical waveguide structure through the incident light channel 1221 can be emitted from one of the multiple output light channels of the output light channel array 1222. Changes in the refractive index of the material in the optical waveguide structure can change the output light channel from which the incident laser light is ultimately emitted, thereby changing the output angle of the laser light. To generate scanning laser beams with different emission angles, the output light channel array 1222 may include multiple output light channels arranged in rows or columns. When laser beams are emitted sequentially (for example, from top to bottom or from left to right) from the output light channel array, they form scanning laser beams that excite the image plate. Laser beams emitted from different output light channels within the scanning laser beam impinge on different locations on the image plate, forming laser spots. These laser spots stimulate fluorescence on the image plate. The imaging device uses the fluorescence stimulated at different locations on the image plate to generate a scanned image (i.e., a digital image). The scanning direction of the scanning laser beam across the image plate is the direction of movement of the laser spot on the image plate as the scanning laser beam sequentially strikes the image plate. To change the output light channel from which the output laser beam from the optical waveguide structure is emitted, the scanning chip also includes a refractive index control structure 1210 that can change the refractive index of the optical waveguide structure. The refractive index control structure can change the refractive index of the material within the optical waveguide structure based on electro-optical or thermo-optical effects, so that laser beams entering the input light channel of the optical waveguide structure are sequentially emitted from the output light channel array to scan the image plate.

[0031] In this way, altering the refractive index of the optical waveguide material based on the electro-optical or thermo-optical effect can replace the mechanical rotation of the galvanometer mirror, achieving isolated scanning lasers emitted from different positions, thereby improving the imaging quality of the image scanning device. Furthermore, the distance between the scanning light spots depends on the distance between the corresponding output light channels, enabling controllable isolation of the scanning light spots. This allows for better and more controllable isolation of the signals generated by adjacent pixels on the imaging plate, reducing the performance requirements of the photodetectors and photoelectric converters in the imaging device. For example, in related prior art oral scanning, high resolution requires the use of electromagnetically shielded ultra-high-voltage photomultiplier tubes and high-sensitivity photodetectors. However, the scanning device of the present embodiment can achieve the same resolution without the use of photomultiplier tubes, or can simply use ordinary photodetectors, significantly reducing the cost and size of the imaging device (i.e., the entire imaging system). In related prior art, when the galvanometer mirror rotates, the middle portion of the galvanometer mirror near the rotation center rotates slower than the ends of the galvanometer mirror farther from the rotation center, resulting in uneven distribution of the laser light spots scanned on the imaging plate, thereby affecting image quality. In the embodiment of the present disclosure, by evenly distributing each outgoing light channel in the outgoing light channel array, the laser light spot can be evenly scanned on the image plate, further improving the imaging quality. In addition, the spot shapes formed by lasers emitted from different angles are different, and the energy distribution at different positions on the spot is also different, which will cause differences in the fluorescence generated by different scanning light spots on the image plate, and ultimately affect the linearity of the image. In the embodiment of the present disclosure, the laser is emitted in parallel from each outgoing light channel at the same exit angle, which can ensure that the spot shape and energy distribution formed by the laser emitted from each outgoing light channel remain consistent, and those skilled in the art can easily design a standard circular spot with a strong energy distribution in the middle and weak edges. In addition, since the embodiment of the present disclosure no longer uses a galvanometer mirror that requires high-speed rotation and is easily worn, the service life of the scanning system is improved.

[0032] In some embodiments, the refractive index control structure 1210 can be configured with a corresponding heating resistor 1211 for each output light channel of the output light channel array. The heating resistors corresponding to each output light channel in the output light channel array constitute a resistor array. Each heating resistor in the resistor array heats the contact position of the optical waveguide structure to different degrees, so that the refractive index of the optical waveguide structure at different positions is different, which can ultimately affect the output light channel of the laser entering through the incident light channel. Figure 2 Schematic diagram showing the arrangement of the electrical array of the scanning chip of the image scanning device according to an embodiment of the present disclosure. Figure 2As shown, resistor array 1211 includes multiple heating resistors (1211-1, 1211-2, ..., 1211-N), each of which is arranged on the optical waveguide structure 1220 corresponding to an output optical channel of the output optical channel array. Power is supplied to the heating resistors by a power supply, generating heat. This heats the optical waveguide structure near the heating resistors, thereby changing the refractive index of the optical waveguide structure at the corresponding location due to the thermo-optical effect. The power supply can be one or more single-channel power supplies, which, through hardware circuit design such as delays, triggers, and voltage conversion circuits, generate multiple voltage signals to power each heating resistor. Alternatively, the power supply can be a multi-channel power supply 1300, with each channel outputting a different voltage signal to control the heating of the heating resistor in a specific output optical channel, thereby controlling the laser emission position and generating a scanning laser beam. For example, the power supply can simultaneously apply voltage signals of the same frequency but different amplitudes to the heating resistors in each output optical channel, causing laser light entering the input channel to be emitted sequentially from the output optical channel array (due to the different refractive indices of the channels, the laser light is emitted from the output optical channels at different times), thereby scanning the image plate. In the related prior art, under the condition of a fixed light source, due to the different optical path lengths caused by the oscillation of the galvanometer, the light spot will reach the middle area of ​​the scanning line faster than the two end areas, resulting in greater photoelectric attenuation of the light spot in the middle area than the two end areas. The inconsistent energy of the light spot will affect the linearity of the imaging. Because the optical path is calculated by dividing the spatial distance by the refractive index, the embodiment of the present disclosure adopts a method of changing the refractive index of different output light channels at different voltages to make the optical path of the laser emitted by different output light channels consistent, thereby compensating for the optical path difference and avoiding the nonlinear problem caused by inconsistent attenuation of different light spots in the scanning line.

[0033] In some embodiments, each heating resistor can be assigned a corresponding control electrode electrically connected to a voltage output channel of a multi-channel power supply. The control electrodes corresponding to the individual heating resistors in the resistor array form an electrode array that controls heating of the resistor array. The control electrodes can apply a voltage signal to the corresponding heating resistor, causing the heating resistor to generate heat. Figure 3 Schematic diagram showing the related structures of the heating resistor and the control electrode of the image scanning device according to the embodiment of the present disclosure. Figure 3 As shown, the heating resistor 1211 is disposed on the surface of the optical waveguide structure 1220 and in contact with the optical waveguide structure. The control electrode 1212 can be disposed on the top or other part of the heating resistor 1211. The heating resistor 1212 is powered by the control electrode 1212, and the heat generated by the heating resistor can affect the refractive index of the nearby optical waveguide structure 1220.

[0034] As laser light enters the optical waveguide structure's incident light channel and sequentially exits each outgoing light channel in the outgoing light channel array, the laser spot projected on the image plate by the emitted scanning laser light moves one scan line on the image plate. In some embodiments, the image scanning device may further include an image plate loading device for loading the image plate for movement in a direction perpendicular to the image plate's scanning direction (i.e., perpendicular to the scan lines). The image plate is secured to the image plate loading device, and the image plate loading device periodically moves the image plate a fixed distance. After this movement, the scanning laser light strikes another unscanned scan line on the image plate.

[0035] In some embodiments, the frequency of the voltage signal applied by each control electrode in the electrode array matches the movement period of the image plate, wherein the movement period of the image plate refers to the time interval between two adjacent movements of the image plate. Figure 4 Schematic diagram showing a first matching method of the cycle (ie, the frequency of the output voltage) of the voltage output channel (1310-1, 1310-2...1310-N) of the power supply according to an embodiment of the present disclosure and the movement cycle of the image board. Figure 4 As shown, the period is T, and the amplitudes are V1, V2…V N The output voltages 1310-1, 1310-2, ..., 1310-N are applied to the heating resistors corresponding to different output light channels. At each moment t, the voltage amplitude applied to each heating resistor varies, generating different amounts of heat. This results in different refractive indices in the optical waveguide structure, controlling the incident laser light's emission from different output light channels. The output voltages applied to each heating resistor vary synchronously with a period T, with each period T completing the scanning of one scan line 2001 of the image plate 2000. At the end of each period T, after the scanning laser completes scanning a scan line, the image plate loading device moves the image plate 2000 from its current position to the position of the next scan line in the line feed direction. Subsequently, in the next period T, the scanning laser completes scanning the next scan line of the image plate. This cycle continues until all scan lines on the image plate are scanned. This approach achieves precise matching of line scanning and line feed motion, improving scanning efficiency and accuracy.

[0036] Figure 5 Schematic diagram showing a second matching method between the period (ie, frequency) of the output voltage (1310-1, 1310-2...1310-N) of the voltage output channel of the power supply according to an embodiment of the present disclosure and the movement period of the image board. Figure 5 As shown, the period is T, and the amplitudes are V1, V2…V NThe output voltages 1310-1, 1310-2…1310-N are applied to the heating resistors corresponding to different output light channels. The voltage amplitudes applied to each heating resistor at each moment t are different, and the heat generated by the heating resistors is different, thereby forming different refractive indices in the optical waveguide structure, which can control the incident laser to be emitted from different output light channels. The output voltages applied to each heating resistor change synchronously with a period T, and each period T completes the scanning of one scanning line 2001 of the image plate 2000. In each period T, the image plate loading device controls the image plate to move at a constant speed v in the line feed direction perpendicular to the scanning direction of the image plate. In addition, the relationship between the movement speed v of the image plate and the period T of the voltage signal satisfies:

[0037]

[0038] Where h represents half the distance between two adjacent scan lines on the image board. In some embodiments, the distance between scan lines can be determined based on the size of the image board's pixel units. For example, if the pixel size is 32 x 64 microns, the distance h between scan lines is the vertical height of the pixel, which is 64 microns.

[0039] like Figure 2 As shown, in some embodiments, the scanning chip 1200 further includes an input optical fiber 1230 and an output optical fiber array. The input optical fiber 1230 can be arranged perpendicular to the laser incident end face of the optical waveguide structure and coupled to the input optical channel 1221 of the optical waveguide structure. The output optical fiber array 1240 includes multiple output optical fibers 1240, each for coupling with a respective output optical channel 1222 of the optical waveguide structure. Each optical fiber can independently receive laser light emitted from its corresponding output optical channel, allowing the optical fibers in the output optical fiber array to be densely arranged, thereby reducing the device size. Laser light emitted by the laser light source enters the optical waveguide structure through the input optical fiber 1230 and exits from the output optical fiber 1240. This reduces scattering, absorption, and other forms of loss during laser propagation, prevents the influence of external environmental factors (such as vibration and dust) on the optical path, better controls the characteristics of the beam input to the optical waveguide structure, and ensures the consistency of the excitation energy to the imaging plate, further improving imaging quality. In one or more embodiments of the present disclosure, the incident light 1230 may be a single-mode optical fiber, and the output optical fiber 1240 may also be a single-mode optical fiber.

[0040] like Figure 6-Figure 7As shown, in some embodiments, the scanning chip 1200 also includes a silicon material substrate 1250 for carrying the optical waveguide structure 1220. Silicon material has good mechanical strength and thermal conductivity, which can provide stable mechanical support for the optical waveguide structure and help dissipate heat. The optical waveguide structure 1220 specifically includes a polymer material layer 1260 provided on the silicon material substrate 1250, and a germanium material guide core 1270 provided in the polymer material layer 1260, and the aforementioned incident light channel 1221 and the output light channel array 1222 are provided in the germanium material guide core 1270. The germanium material guide core has a relatively high refractive index and is suitable as the core layer of the optical waveguide structure to guide light to propagate therein. The polymer material has a relatively low refractive index and can form a refractive index difference with the germanium material guide core, thereby limiting the propagation of light in the waveguide structure. At the same time, under the action of the thermo-optical effect, the refractive index of the polymer material will change, thereby adjusting the laser emission angle. For example, the change value of the refractive index n of the output light channel It is proportional to the square of the output voltage of the control electrode on the output light channel. When current passes through the heating resistor of the output light channel, heat is generated, causing the temperature of the material at the output channel to rise. As the temperature rises, the change in the refractive index of the output light channel is:

[0041]

[0042] Wherein, γ is the photothermal coefficient of the polymer material (unit: 1 / k), θ represents the thermal resistance of the polymer material (unit: k / W); R represents the resistance value of the heating resistor of the output channel (unit: Ω), and V represents the voltage value applied to the heating resistor (unit: V).

[0043] In some embodiments, optical isolators 1280 are provided between adjacent output light channels in the polymer material layer to improve the isolation of laser light between the output light channels. In some embodiments of the present disclosure, carbon nanotubes can be used as optical isolators. In some embodiments, one or more reflectors can be provided between the scanning chip and the imaging plate to direct the output laser light from the scanning chip to the imaging plate. Figure 8 Schematic diagram showing the structure of an image scanning device with a reflective mirror according to an embodiment of the present disclosure. Figure 8As shown, the reflector 1400 is arranged on the optical path of the laser emitted by the scanning chip 1200 to reflect the laser emitted by the scanning chip 1200 to the image plate 2000. In this way, the positions of the scanning chip 1200 and the image plate 2000 can be flexibly adjusted as needed to achieve a more compact layout. Although several specific implementation details are included in the above discussion, these should not be interpreted as limiting the scope of this disclosure. Certain features described in the context of separate embodiments can also be implemented in combination in a single implementation. Conversely, various features described in the context of a single implementation can also be implemented in multiple implementations individually or in any suitable sub-combination.

[0044] Although the subject matter has been described in language specific to structural features and / or methodological logical acts, it should be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are merely example forms of implementing the claims.

[0045] While various embodiments of the present disclosure have been described above, the foregoing description is intended to be illustrative, non-exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is selected to best explain the principles of the embodiments, their practical applications, or technological improvements in the marketplace, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. Scanning device, including: A laser light source (1100) is used to provide laser light (1110) for exciting the image plate (2000); A scanning chip (1200) comprising a refractive index control structure, an optical waveguide structure (1220) having an incident light channel (1221) and an output light channel array (1222), and a silicon material substrate (1250) for carrying the optical waveguide structure, wherein the incident light channel (1221) is used to couple laser light emitted by the laser light source, the output light channel array (1222) is used to output laser light entering through the incident light channel, and the refractive index control structure is used to change the refractive index of the optical waveguide structure so that the laser light entering the incident light channel is sequentially emitted from the output light channel array to scan the image plate; and An image plate loading device for loading the image plate to move in a line feed direction perpendicular to a scanning direction of the image plate; The refractive index control structure (1210) comprises: a resistor array, comprising a plurality of heating resistors (1211) corresponding to each of the exit light channels in the exit light channel array; and An electrode array comprising a plurality of control electrodes (1212) corresponding to the respective heating resistors in the resistor array, the control electrodes being used to apply voltage signals to the corresponding heating resistors, and the voltage signals of the heating resistors of the respective output light channels having the same frequency and different amplitudes, so that the laser light entering the incident light channel is sequentially emitted from the output light channel array to scan the image plate; The optical waveguide structure (1220) further includes: a polymer material layer (1260), provided on the silicon material substrate, wherein the polymer material undergoes a refractive index change under the action of a photothermal effect; and A germanium material guide core (1270) is provided in the polymer material layer, wherein the germanium material guide core is provided with the incident light channel (1221) and the output light channel array (1222); Furthermore, the frequency of the voltage signal applied by each control electrode in the electrode array matches the movement period of the image plate.

2. The apparatus according to claim 1, further comprising: The power supply (1300) includes a plurality of voltage output channels corresponding to the control electrodes in the electrode array, the voltage output channels are electrically connected to the corresponding control electrodes, and the output voltages (1310) of the respective voltage output channels have the same frequency but different amplitudes.

3. The apparatus according to claim 1, wherein the image plate loading device loads the image plate to intermittently move in a line feed direction perpendicular to a scanning direction of the image plate; and After the laser completes a line scan on the image plate, the image plate moves perpendicularly to the image plate from a current position to a position of a next scan line.

4. The apparatus according to claim 1, wherein the image plate loading device loads the image plate to move at a constant speed in a line feed direction perpendicular to a scanning direction of the image plate; and The moving speed v of the image plate and the period T of the voltage signal are in accordance with the relationship: ， in, h represents half of the distance between two adjacent scanning lines on the image plate.

5. The device according to claim 1, wherein the scanning chip (1200) further comprises: An incident optical fiber (1230) is used for coupling with the incident light channel of the optical waveguide structure; as well as An output optical fiber array (1240) comprises a plurality of output optical fibers respectively used for coupling with respective output optical channels of the optical waveguide structure.

6. The device according to claim 1, wherein the scanning chip (1200) further comprises: The optical isolation element (1280) is arranged between adjacent output light channels.

7. Imaging system, including: The scanning device according to any one of claims 1 to 6, configured to scan the image plate; as well as The imaging device forms a digital image corresponding to the imaging plate based on the fluorescence generated by the imaging plate under the laser excitation of the scanning device.

Images