Data processing method, device and system and storage medium

Abstract

The embodiment of the invention discloses a data processing method, device and system and a storage medium. The method comprises the following steps: acquiring at least two processing line data packets in one-to-one correspondence with at least two target processing lines on a target processing part from a processing device; based on at least part of machining data of each machining line data packet in the at least two machining line data packets and preset machining line positions of the at least two target machining lines on the target machined part, a three-dimensional oscillogram is generated, the three-dimensional oscillogram comprises a first target waveform, and the first target waveform comprises a second target waveform; the first target waveform is a three-dimensional waveform that the height of each machining point on at least two target machining lines on the target machined part changes along with the positions of the machining points in the machining lines and the positions of the target machining lines on the target machined part. According to the scheme, the machining data can be stored and processed, and the three-dimensional oscillogram capable of visually displaying the positions of the multiple target machining lines on the target machined part and the height of each point on each target machining line is obtained.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a data processing method, device, system, and storage medium. Background Art

[0002] When a workpiece is processed by a processing device, in order to analyze product problems of the workpiece, the distance measuring mechanism of the processing device can collect processing data during the processing and transmit it to the board of the processing device. The board can sample the processing data, and the sampled processing data needs to be viewed using an oscilloscope. However, the sampling waveform displayed by the oscilloscope is the waveform of the processing data for a single processing line on the workpiece, and cannot display the concave and convex conditions of the entire surface of the workpiece. Summary of the invention

[0003] The present invention is proposed in view of the above problems. The present invention provides a data processing method, device, system, and storage medium. This solution can store and process processing data to obtain a three-dimensional waveform diagram that can intuitively display the positions of multiple target processing lines on the target workpiece and the height of each point on each target processing line.

[0004] According to one aspect of the present invention, a data processing method is provided for processing processing data of a workpiece, which is applied to a host computer, and the method comprises: obtaining at least two processing line data packets corresponding to at least two target processing lines on a target workpiece from a processing device, each processing line data packet in the at least two processing line data packets comprises a plurality of groups of processing data corresponding to a plurality of processing points on the corresponding target processing line, wherein each group of processing data comprises position data for indicating a position of the corresponding processing point in the processing line and height data for indicating a height of the corresponding processing point, wherein the height is a distance between the processing point and a distance measuring mechanism in the processing device; generating a three-dimensional waveform graph based on at least part of the processing data of each processing line data packet in the at least two processing line data packets and preset processing line positions of the at least two target processing lines on the target workpiece, wherein the three-dimensional waveform graph comprises a first target waveform, which is a three-dimensional waveform in which the height of each processing point on the at least two target processing lines on the target workpiece changes with the position of the processing point in the processing line and the position of the target processing line on the target workpiece.

[0005] Optionally, obtaining at least two processing line data packets corresponding one-to-one to at least two target processing lines on a target workpiece from the processing device includes: querying and obtaining at least two processing line data packets corresponding one-to-one to at least two target processing lines from an initial data packet stored in the processing device based on first identification information of the target workpiece and second identification information of the at least two target processing lines; wherein the initial data packet includes processing line data packets corresponding one-to-one to multiple processing lines, and the multiple processing lines belong to one or more workpieces.

[0006] Optionally, based on at least part of the processing data of each processing line data packet in at least two processing line data packets and the preset processing line positions of at least two target processing lines on the target processing part, a three-dimensional waveform graph is generated, including: based on at least part of the processing data of each processing line data packet in at least two processing line data packets and the preset processing line positions of at least two target processing lines on the target processing part, determining the physical coordinates corresponding to at least part of the processing data, the physical coordinates being used to indicate the position of the processing point corresponding to at least part of the processing data in the preset physical space where the target processing part is located; based on the physical coordinates corresponding to at least part of the processing data, determining the pixel coordinates corresponding to when mapping at least part of the processing data into the target display area, so as to generate the three-dimensional waveform graph.

[0007] Optionally, based on the physical coordinates corresponding to at least part of the processed data, the pixel coordinates corresponding to when mapping at least part of the processed data into the target display area are determined, including: based on the physical coordinates corresponding to at least part of the processed data, determining the coordinate axis precision of each coordinate axis in the surface coordinate system within the target display area and the coordinate axis position within the target display area; based on the determined coordinate axis precision and coordinate axis position, and the physical coordinates corresponding to at least part of the processed data, determining a first coordinate mapping relationship for mapping the processed data to the corresponding pixel coordinates; and determining the pixel coordinates corresponding to at least part of the processed data according to the first coordinate mapping relationship.

[0008] Optionally, before generating a three-dimensional waveform graph based on at least part of the processing data of each processing line data packet in at least two processing line data packets and preset processing line positions of at least two target processing lines on the target processing part, the method also includes: for each processing line data packet in at least two processing line data packets, dividing each group of processing data in the processing line data packet into multiple data sets, wherein the number of groups of processing data in different data sets is the same, and the positions of processing points corresponding to each group of processing data in each data set are continuous with each other in the processing line; determining the processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height in each data set of the multiple data sets to obtain at least part of the processing data of the processing line data packet.

[0009] Optionally, after the self-processing device obtains at least one processing line data packet corresponding to at least one target processing line on the target workpiece, the method also includes: for each processing line data packet of at least two processing line data packets, generating a two-dimensional waveform graph based on at least part of the processing data in the processing line data packet, the two-dimensional waveform graph includes a second target waveform presented in a plane coordinate system, the second target waveform is a waveform in which the height of each processing point on the target processing line corresponding to the processing line data packet varies with the position of the processing point, the first coordinate axis of the plane coordinate system represents the position of the processing point, and the second coordinate axis of the plane coordinate system represents the height of the processing point.

[0010] Optionally, for each processing line data packet of at least two processing line data packets, a two-dimensional waveform graph is generated based on at least part of the processing data in the processing line data packet, including: generating a preset background image; generating a plane coordinate system within the preset background image based on at least part of the processing data in the processing line data packet; and determining, based on at least part of the processing data and the plane coordinate system, pixel coordinates corresponding to each group of processing data within the preset background image when mapping at least part of the processing data to the plane coordinate system, so as to generate a two-dimensional waveform graph.

[0011] Optionally, based on at least part of the processing data in the processing line data packet, a plane coordinate system is generated in a preset background image, including: determining the coordinate axis accuracy of the first coordinate axis based on the position data contained in at least part of the processing data and the image resolution of the preset background image in the direction where the first coordinate axis is located; determining the coordinate axis accuracy of the second coordinate axis based on the height data contained in at least part of the processing data and the image resolution of the preset background image in the direction where the second coordinate axis is located; determining the coordinate axis position of the first coordinate axis in the preset background image and the coordinate axis position of the second coordinate axis in the preset background image based on the position data and height data contained in at least part of the processing data and the image resolution of the preset background image in the directions where the first coordinate axis and the second coordinate axis are located respectively; and generating a plane coordinate system in the preset background image based on the determined coordinate axis accuracy and coordinate axis position.

[0012] Optionally, based on at least part of the processed data and the plane coordinate system, the pixel coordinates corresponding to each group of processed data in the preset background image when mapping at least part of the processed data to the plane coordinate system are determined, including: based on the coordinate axis accuracy of each coordinate axis in the plane coordinate system and the coordinate axis position of the coordinate axis in the preset background image, determining a second coordinate mapping relationship for mapping the processed data to corresponding pixel coordinates; and determining the pixel coordinates corresponding to each of the at least part of the processed data according to the second coordinate mapping relationship.

[0013] Optionally, based on at least part of the processed data and a plane coordinate system, the pixel coordinates corresponding to each group of processed data in a preset background image when mapping at least part of the processed data to the plane coordinate system are determined to generate a two-dimensional waveform graph, including: highlighting the target pixel points at the pixel coordinates corresponding to at least part of the processed data in a manner different from the pixel values ​​of the preset background image to obtain a two-dimensional waveform graph; or highlighting the target pixel points at the pixel coordinates corresponding to at least part of the processed data and the intermediate pixel points between adjacent target pixel points in a manner different from the pixel values ​​of the preset background image to obtain a two-dimensional waveform graph, wherein the intermediate pixel point is a pixel point on a line between adjacent target pixel points, and adjacent target pixel points are adjacent pixel points along the direction of the first coordinate axis.

[0014] Optionally, before generating a two-dimensional waveform graph based on at least part of the processing data in each processing line data packet of at least two processing line data packets, the method also includes: dividing each group of processing data in the processing line data packet into multiple data sets, wherein the number of groups of processing data in different data sets is the same, and the positions of processing points corresponding to each group of processing data in each data set are continuous with each other in the processing line; determining the processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height in each data set of the multiple data sets, so as to obtain at least part of the processing data of the processing line data packet.

[0015] According to another aspect of the present invention, there is also provided a data processing method, which is applied to a control mechanism in a processing device connected to the above-mentioned host computer, the processing device comprising a control mechanism, a distance measuring mechanism, a position measuring mechanism and a storage mechanism, the control mechanism being connected to the distance measuring mechanism and the position measuring mechanism respectively, the distance measuring mechanism being used to collect height data of the processing workpiece and sending the collected height data to the control mechanism in real time, the position measuring mechanism being used to collect position data of the processing workpiece and sending the collected position data to the control mechanism in real time, the method comprising: acquiring position data collected by the position measuring mechanism and height data collected by the distance measuring mechanism; storing the sampled position data and height data in the storage mechanism, so that the host computer can obtain the processing line data packet from the storage mechanism.

[0016] Optionally, obtaining position data collected by a position measurement mechanism and height data collected by a distance measurement mechanism includes: obtaining position data collected by the position measurement mechanism; and receiving height data corresponding to each processing point from the distance measurement mechanism based on the position data to obtain processing data corresponding to each processing point.

[0017] According to yet another aspect of the present invention, there is provided a processing device, comprising a control mechanism, a distance measuring mechanism, a position measuring mechanism and a storage mechanism, wherein the control mechanism is connected to the distance measuring mechanism and the position measuring mechanism respectively, the distance measuring mechanism is used to collect height data of the workpiece and send the collected height data to the control mechanism in real time, the position measuring mechanism is used to collect position data of the workpiece and send the collected position data to the control mechanism in real time, and the control mechanism is used to execute the above-mentioned data processing method.

[0018] According to another aspect of the present invention, there is also provided a data processing device for processing processing data of a workpiece, the device comprising: an acquisition module, for acquiring at least two processing line data packets corresponding one-to-one to at least two target processing lines on the target workpiece from a processing device, each processing line data packet in the at least two processing line data packets comprising a plurality of groups of processing data corresponding one-to-one to a plurality of processing points on the corresponding target processing line, wherein each group of processing data comprises position data for indicating a position of the corresponding processing point in the processing line and height data for indicating a height of the corresponding processing point, the height being the distance between the processing point and a distance measuring mechanism in the processing device; a generation module, for generating a three-dimensional waveform graph based on at least part of the processing data of each processing line data packet in the at least two processing line data packets and preset processing line positions of the at least two target processing lines on the target workpiece, wherein the three-dimensional waveform graph comprises a first target waveform, the first target waveform being a three-dimensional waveform in which the height of each processing point on the at least two target processing lines on the target workpiece changes with the position of the processing point in the processing line and the position of the target processing line on the target workpiece.

[0019] According to yet another aspect of the present invention, a storage medium is provided, on which program instructions are stored, and the program instructions are used to execute the above-mentioned data processing method when running.

[0020] The above technical solution obtains the processing data of multiple target processing lines of the target workpiece through the upper computer, and generates a three-dimensional waveform graph based on the processing data of the multiple target processing lines. The three-dimensional waveform graph can intuitively display the positions of the multiple target processing lines on the target workpiece and the heights of each point on each target processing line, so that the concave and convex conditions of the entire surface of the target workpiece can be more intuitively represented visually, which is conducive to the analysis of product problems of the target workpiece.

[0021] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The above and other purposes, features and advantages of the present invention will become more apparent by describing the embodiments of the present invention in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0023] Figure 1 A schematic diagram of a processing device according to an embodiment of the present invention is shown;

[0024] Figure 2 A schematic flow chart of a data processing method according to an embodiment of the present invention is shown;

[0025] Figure 3 A schematic diagram of a three-dimensional waveform diagram according to an embodiment of the present invention is shown;

[0026] Figure 4 A schematic diagram of a two-dimensional waveform diagram according to an embodiment of the present invention is shown;

[0027] Figure 5 A schematic block diagram of a data processing device according to an embodiment of the present invention is shown;

[0028] Figure 6 A schematic block diagram of an electronic device according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the present invention more obvious, the exemplary embodiments according to the present invention will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments of the present invention, and it should be understood that the present invention is not limited to the exemplary embodiments described herein. Based on the embodiments of the present invention described in the present invention, all other embodiments obtained by those skilled in the art without creative work should fall within the protection scope of the present invention.

[0030] As described above, in the related art, when using an oscilloscope to view the sampling waveform of the processing data of the workpiece, the sampling waveform displayed by the oscilloscope is the waveform of the processing data for a single processing line on the workpiece, and cannot display the concave and convex conditions of the entire surface of the workpiece. In order to at least partially solve the above technical problems, an embodiment of the present invention provides a data processing method, device, system, and storage medium. This solution can store and process the processing data to obtain a three-dimensional waveform diagram that can intuitively display the positions of multiple target processing lines on the target workpiece and the height of each point on each target processing line.

[0031] For ease of understanding, an exemplary structure of a processing device is first introduced below. Figure 1 As shown, it is a schematic diagram of a processing device according to an embodiment of the present invention. Figure 1 As shown, the processing device 100 may include a stage 110, a distance measuring mechanism 120, a processing head 130 and an adjustment mechanism 140. In addition, Figure 1 The workpiece 150 is also shown. The workpiece can be any object such as ceramics, wafers, etc. For ease of description and understanding, the following description mainly takes the workpiece as a wafer. By way of example and not limitation, the distance measuring mechanism 120 can be, for example, a laser distance meter, and the adjustment mechanism 140 can be, for example, a piezoelectric ceramic motor. The workpiece 150 and the processing head 130 can move relative to each other along a first preset direction, and the first preset direction can be Figure 1 The x-axis direction in the horizontal plane is shown. It should be noted that Figure 1 The direction and position of the x-axis shown are examples only and its actual direction may vary relative to Figure 1 The directions shown are deflected in the horizontal plane and their actual positions can be relative to Figure 1 The adjustment mechanism 140 is connected to the processing head 130, and the adjustment mechanism 140 can drive the processing head 130 to move in the second preset direction. The second preset direction can be Figure 1 The vertical direction perpendicular to the x-axis direction. There is a preset interval between the distance measuring mechanism 120 and the processing head 130 / adjusting mechanism 140 in the x-axis direction. The carrier 110 may include a processing platform for placing the processing piece 150, a driving member for driving the processing platform and the processing piece 150 placed on the processing platform to move along the x-axis direction, and a first position measuring mechanism for measuring the moving distance of the processing platform and the processing piece 150 placed on the processing platform when they move along the x-axis direction. The driving member may be, for example, a motor, and the first position measuring mechanism may be, for example, a grating ruler.

[0032] For example, the origin of the grating ruler measurement can be preset, and the grating ruler is used to measure the distance between the processing platform and the origin, and this distance can be used as the distance between the processing part 150 and the origin. Specifically, during the processing, the driving part can drive the processing platform to move along the x-axis direction, and during this process, the processing head 230 can process each processing point in the x-axis direction. Figure 1 In the illustrated embodiment, when processing the workpiece 150, the position of the processing head 130 in the x-axis direction can be kept fixed, and the workpiece 150 can move along the x-axis direction. The first position measurement mechanism can measure the movement distance of the workpiece 150 in the x-axis direction, and the position of the workpiece 150 in the x-axis direction can be determined based on the measured movement distance. In another embodiment, when processing the workpiece, the position of the workpiece can be kept fixed, and the processing head can move along a preset processing direction (e.g. Figure 1 The first position measuring mechanism can measure the movement distance of the processing head in the preset processing direction, and the position of the workpiece in the preset processing direction can be determined based on the measured movement distance. The embodiment of the present invention is mainly described by taking the solution in which the position of the processing head 130 in the X-axis direction is kept fixed and the processing piece 150 moves along the x-axis direction as an example.

[0033] Exemplarily, the position data of each processing point in the x-axis direction can be determined by the measurement value of the grating ruler. Alternatively, the position data of each processing point in the x-axis direction can be represented by the acquisition sequence number of each processing point. In this case, the control mechanism for the processing device can trigger the laser rangefinder to measure the height of the processing point according to the preset sampling interval from the preset starting position of the processing line based on the measurement value of the first position measurement mechanism. The position of each processing point can be determined by the corresponding acquisition sequence number and the preset sampling interval. In the case where the workpiece 250 is a wafer, the processing point can be a processing point on any cutting path of the wafer parallel to the x-axis direction. The height data of each processing point can be measured by the distance measuring mechanism 220. It can be understood that the distance between the distance measuring mechanism and each processing point measured by the distance measuring mechanism can be used as the height data of the corresponding processing point.

[0034] Exemplarily, the position data and height data of the processing point can be transmitted to the control mechanism. The control mechanism can determine the corresponding control signal based on the position data and output the control signal to the adjustment mechanism 240, so as to control the vertical movement of the adjustment mechanism 240 to drive the processing head 230 to move vertically to the processing point position matching the height data, that is, the processing position matching the height of each processing point. Specifically, taking the distance measuring mechanism 120 as a laser rangefinder as an example, the laser rangefinder measures the distance between the processing part 150 and the laser rangefinder in the second preset direction, which can be used as the distance between the processing part 150 and the processing head 130 in the second preset direction. When the height of the laser emitting end and the receiving end of the laser rangefinder is the same as the height of one end of the processing head 130 facing the processing part 150, it can be considered that the distance between the laser emitting end and the receiving end of the laser rangefinder and the processing part 150 in the second preset direction (which can be recorded as the first distance) and the distance between the processing head 130 and the processing part 150 in the second preset direction (which can be recorded as the second distance) are equal. When the first distance and the second distance are inconsistent, the distance information measured by the laser rangefinder can still be used to represent the distance between the processing head 130 and the processing piece 150 in the second preset direction. In this case, when the processing head 130 is controlled to move to the position of the processing point matching the distance information in the second preset direction based on the read distance information, the position of the processing point matching the distance information can be appropriately adjusted up or down according to the difference between the preset first distance and the second distance.

[0035] See also Figure 2 As shown, it is a schematic flow chart of a data processing method according to an embodiment of the present invention. According to one aspect of the present invention, a data processing method is provided for processing processing data of a workpiece, which is applied to a host computer, and the method includes: step S210 and step S220.

[0036] In step S210, at least two processing line data packets corresponding one-to-one to at least two target processing lines on the target workpiece are acquired from the processing device, and each of the at least two processing line data packets includes multiple groups of processing data corresponding one-to-one to multiple processing points on the corresponding target processing line, wherein each group of processing data includes position data for indicating the position of the corresponding processing point within the processing line and height data for indicating the height of the corresponding processing point, and the height is the distance between the processing point and the distance measuring mechanism in the processing device.

[0037] Exemplarily, the position data and height data of the processing point can also be transmitted to a storage mechanism for a processing device. For each of at least one processing part processed by the processing device, a plurality of processing line data packets corresponding to a plurality of processing lines on the processing part can be stored in the storage mechanism. Specifically, each processing part can have a plurality of processing lines. Taking the processing part as a wafer as an example, the processing line on the wafer can be a cutting path of the wafer. Each processing line data packet can include a plurality of groups of processing data, each group of processing data corresponds to each processing point of the corresponding processing line, and each group of processing data can include the position data and height data of the corresponding processing point. The position data can indicate the position of the corresponding processing point, and the height data can indicate the height of the corresponding processing point. The storage mechanism can be connected to a host computer, and the host computer can obtain a processing line data packet corresponding to the target processing line on the target processing part from the plurality of processing line data packets stored in the storage mechanism. It can be understood that the target workpiece can be any one of the at least one workpiece, the target processing line can be any one of the multiple processing lines on the target workpiece, and the at least two target processing lines obtained are different processing lines on the same workpiece (ie, the target workpiece).

[0038] In step S220, a three-dimensional waveform graph is generated based on at least part of the processing data of each processing line data packet in the at least two processing line data packets and the preset processing line positions of at least two target processing lines on the target processing part, wherein the three-dimensional waveform graph includes a first target waveform, which is a three-dimensional waveform in which the height of each processing point on at least two target processing lines on the target processing part changes with the position of the processing point in the processing line and the position of the target processing line on the target processing part.

[0039] Exemplarily, after the host computer obtains the processing line data packet, a three-dimensional waveform diagram can be generated according to part or all of the processing data in each processing line data packet. Specifically, the first target waveform in the three-dimensional waveform diagram can represent the position of at least part of the processing points on each target processing line of at least two target processing lines in the first direction, the height of at least part of the processing points on each target processing line of at least two target processing lines in the second direction, and the position of each target processing line of at least two target processing lines on the target processing part in the third direction, and the first direction, the second direction and the third direction are perpendicular to each other. The position change of each processing point on at least two target processing lines within the processing line may include the position change of the processing point on the same target processing line along the first direction, and may also include the position change of the processing point at the same position on different target processing lines along the third direction. For each group of processing data in each processing line data packet in the two processing line data packets, the position of the corresponding processing point in the first direction and the second direction in the first target waveform can be determined based on the position data and height data included in the group of processing data, and the position of the processing point in the first target waveform in the third direction can be determined based on the preset processing line position of the target processing line on the target processing part to which the processing point corresponding to the group of processing data belongs. In some embodiments, the preset processing line position can be determined by the position data of each target processing line on the corresponding target processing part pre-stored on the host computer. In other embodiments, the stage of the processing system may also include a device for measuring the processing platform and the processing part placed on the processing platform along the third preset direction (in Figure 1 The second position measuring mechanism (for example, a grating ruler) is used to measure the moving distance when the processing system moves (shown as the y-axis direction), and the third preset direction is a direction perpendicular to both the first preset direction and the second preset direction. The first preset direction in the processing system can correspond to the first direction of the first target waveform, the second preset direction can correspond to the second direction of the first target waveform, and the third preset direction can correspond to the third direction of the first target waveform. The position data of each processing point in the third preset direction can be determined by the measurement value of the second position measuring mechanism, and the preset processing line position of the target processing line to which the corresponding processing point belongs on the target processing part can be determined based on the measurement value. In other words, the position of the corresponding processing point in the first target waveform in the third direction can be determined based on the measurement value. It can be understood that the first target waveform can be obtained based on the positions of the processing points corresponding to each set of processing data in the first direction, the second direction and the third direction.

[0040] The above technical solution obtains the processing data of multiple target processing lines of the target workpiece through the upper computer, and generates a three-dimensional waveform graph based on the processing data of the multiple target processing lines. The three-dimensional waveform graph can intuitively display the positions of the multiple target processing lines on the target workpiece and the heights of each point on each target processing line, so that the concave and convex conditions of the entire surface of the target workpiece can be more intuitively represented visually, which is conducive to the analysis of product problems of the target workpiece.

[0041] Optionally, obtaining at least two processing line data packets corresponding one-to-one to at least two target processing lines on a target workpiece from the processing device includes: querying and obtaining at least two processing line data packets corresponding one-to-one to at least two target processing lines from an initial data packet stored in the processing device based on first identification information of the target workpiece and second identification information of the at least two target processing lines; wherein the initial data packet includes processing line data packets corresponding one-to-one to multiple processing lines, and the multiple processing lines belong to one or more workpieces.

[0042] Exemplarily, each workpiece may have corresponding first identification information, and the first identification information may be, for example, a string, a serial number, an identification code, etc., which can be used to distinguish the information of each workpiece. Similarly, each processing line of each workpiece may have corresponding second identification information, and the second identification information may be, for example, a string, a serial number, etc., which can be used to distinguish the information of each processing line. In some embodiments, the first identification information and the second identification information may be input by a user, and the host computer may determine the first identification information and the second identification information in response to the user's input operation. In other embodiments, when processing the current processing line of the current workpiece, the host computer may obtain the first identification information of the current workpiece from the image collected by the control mechanism of the processing device or the image acquisition device for the processing device. In this case, the target workpiece may be the current workpiece, and the target processing line may be the current processing line. In a specific embodiment, the target workpiece may be a wafer, and a wafer number (waferID) may be engraved on the wafer. The image acquisition device for the processing device may perform image acquisition on the target workpiece and transmit the acquired image to the control mechanism of the processing device. The control mechanism may determine the first identification information of the target workpiece according to the received image, and transmit the acquired first identification information to the host computer. In another specific embodiment, the target workpiece may be a wafer, on which a wafer number may be engraved, and the image acquisition device used for the processing device may perform image acquisition on the target workpiece and transmit the acquired image to the host computer, and the host computer may determine the first identification information of the target workpiece according to the received image. In other embodiments, the number and arrangement of the processing lines on each workpiece are the same, and at least one set of second identification information in a preset arrangement order may be stored in the host computer, and the host computer may determine the second identification information of the target processing line according to the preset arrangement order. At least one set of second identification information stored in the host computer may correspond to each processing line of each workpiece one by one. In other words, the second identification information of the corresponding processing lines on each workpiece may be the same. Taking the case where the processing line is a cutting path on a wafer as an example, at least one set of second identification information may include, for example: cutting path 1, cutting path 2, ..., cutting path n.

[0043] In some embodiments, a storage mechanism for a processing device may acquire an initial data packet with first identification information sent by a control mechanism, and the storage mechanism may store at least one set of second identification information in a preset arrangement order. The storage mechanism may associate and store each processing line data packet with the initial data packet based on the order in which the control mechanism acquires the processing line data packet, and may also associate and store the processing line data packet with the second identification information in a one-to-one correspondence based on the order in which the control mechanism acquires the processing line data packet and the preset arrangement order of the second identification information. In other embodiments, the first identification information corresponding to the initial data packet of each workpiece in the storage mechanism and the second identification information corresponding to each processing line data packet may be input by a user and associated and stored. It can be understood that one or more initial data packets may be stored in the storage mechanism, each initial data packet may correspond to a workpiece, and each initial data packet may include at least one processing line data packet corresponding to at least one processing line on the corresponding workpiece. Exemplarily, the host computer may query and acquire the processing line data packet corresponding to the second identification information of the target processing line in the initial data packet corresponding to the first identification information of the target workpiece from the initial data packet stored in the storage mechanism of the processing device according to the first identification information of the target workpiece and the second identification information of the target processing line.

[0044] The above technical solution obtains a processing line data packet corresponding to a target processing line from multiple initial data packets based on the first identification information of the target processing workpiece and the second identification information of the target processing line. When a processing device stores multiple processing line data packets corresponding to multiple processing lines on multiple processing workpieces, the processing line data packet corresponding to the target processing line can be quickly and accurately obtained.

[0045] Optionally, based on at least part of the processing data of each processing line data packet in at least two processing line data packets and the preset processing line positions of at least two target processing lines on the target processing part, a three-dimensional waveform graph is generated, including: based on at least part of the processing data of each processing line data packet in at least two processing line data packets and the preset processing line positions of at least two target processing lines on the target processing part, determining the physical coordinates corresponding to at least part of the processing data, the physical coordinates being used to indicate the position of the processing point corresponding to at least part of the processing data in the preset physical space where the target processing part is located; based on the physical coordinates corresponding to at least part of the processing data, determining the pixel coordinates corresponding to when mapping at least part of the processing data into the target display area, so as to generate the three-dimensional waveform graph.

[0046] Exemplarily, for the processing line data packet corresponding to the target processing line, each set of processing data can be expressed as (X, Z), where X can indicate the position of the corresponding processing point on the target processing line, that is, the position in the first direction, and Z can indicate the height of the corresponding processing point, that is, the position in the second direction. In a specific embodiment, the distance measuring mechanism of the processing device can be a laser distance meter, and the control mechanism can trigger the laser distance meter to measure the height of the processing point according to the preset sampling interval from the preset starting position of the processing line based on the measurement value of the first position measurement mechanism. The position of each processing point on the corresponding processing line can be determined by the corresponding acquisition sequence number and the preset sampling interval. In this case. The acquisition sequence number can be used as position data to indicate the position of the corresponding processing point on the corresponding processing line, and the analog voltage value of the laser distance meter can be used as height data to indicate the height of the corresponding processing point. The control mechanism can transmit the position data and height data of the processing point to the storage mechanism. For each group of processing data of the processing line data package stored in the storage mechanism, it can be expressed as (N, DataN), wherein N can represent the acquisition sequence number of the processing point corresponding to the group of processing data, and DataN can represent the analog voltage value of the laser rangefinder when sampling the processing point corresponding to the group of processing data. The larger the acquisition sequence number of the processing point, the farther the distance between the processing point and the preset processing starting point of the target processing line can be represented. For any processing point with an acquisition sequence number of N (N≥0), the distance between the processing point and the preset processing starting point can be equal to the product of the acquisition sequence number and the preset sampling interval. The host computer can be preset with position data for indicating the position of the preset processing starting point, and the position of the processing point can be determined by the position of the preset processing starting point and the distance between the processing point and the preset processing starting point. The preset sampling interval can be directly input by the user, or the host computer can be preset with position data for indicating the position of the preset processing starting point and position data for indicating the position of the preset processing end point, and the preset sampling interval can be calculated based on the position difference between the preset processing end point and the preset processing starting point and the number of sampled processing points. In another specific embodiment, the position of each processing point can be determined by the measurement value of the first position measurement mechanism. For each group of processing data of the processing line data package stored in the storage mechanism, it can be expressed as (x, h), wherein x can represent the measurement value of the first position measurement mechanism when sampling the processing point corresponding to the group of processing data, and h can represent the measurement value of the distance measurement mechanism when sampling the processing point corresponding to the group of processing data. Taking the distance measurement mechanism as a laser rangefinder as an example, h can be the analog voltage value of the laser rangefinder when sampling the processing point corresponding to the group of processing data, or it can be the distance value obtained by converting the analog voltage value according to a preset conversion relationship.

[0047] Exemplarily, for each set of processing data, the physical coordinates (X, Y, Z) corresponding to the set of processing data can be determined based on the set of processing data and the preset processing line position of the target processing line where the processing point corresponding to the set of processing data is located on the target processing part, wherein Y can represent the preset processing line position of the target processing line where the processing point corresponding to the set of processing data is located on the target processing part. In a specific embodiment, Y can be determined by the measurement value of the second position measurement mechanism when processing is performed on the target processing line where the processing point is located. In another specific embodiment, the position data of each target processing line on the corresponding target processing part can be pre-stored on the host computer, and the host computer can determine Y based on the position data of the target processing line where the processing point is located. For each set of processing data, the physical coordinates corresponding to the set of processing data can indicate the position of the processing point corresponding to the set of processing data in the preset physical space where the target processing part is located. The preset physical space where the target workpiece is located can be regarded as the physical space used by the processing system. The physical space can have a corresponding physical coordinate system. The coordinates of each processing point on the target workpiece in the physical coordinate system can be represented by the measurement values ​​of the position measurement mechanism of the processing system (including the first position measurement mechanism, or the first position measurement mechanism and the second position measurement mechanism) and the measurement values ​​of the distance measurement mechanism.

[0048] For example, the first target waveform can be displayed in the target display area. The position and size of the target display area on the display interface of the display device for the processing system can be set by the user according to actual needs. After determining the physical coordinates corresponding to at least part of the processing data, the processing data can be mapped to the corresponding pixel coordinates in the target display area to generate a three-dimensional waveform diagram. Figure 3 As shown, it is a schematic diagram of a three-dimensional waveform diagram according to an embodiment of the present invention. In this embodiment, the target processing part can be a wafer, and the target processing line can be a cutting road. The first direction of the first target waveform is Figure 3 The second direction is shown as the X-axis. Figure 3 The third direction is shown as the Z axis. Figure 3 The Y axis is shown. In this three-dimensional waveform diagram, the height of the processing point changes with the position of the processing point in the processing line can be represented by the position of the processing point in the Z axis direction changes with the position of the processing point in the X axis direction, and the height of the processing point changes with the position of the target processing line on the target workpiece can be represented by the position of the processing point in the Z axis direction changes with the position of the processing point in the Y axis direction. Among them, the number shown along the Y axis direction is the cutting path number, for example, "5" represents the 5th cutting path along the Y axis direction.

[0049] The above technical solution generates a first target waveform in the target display area based on the physical coordinates corresponding to at least part of the processing data in the processing data packet, which helps the generated first target waveform to more accurately display the shape of the target processing line on the target workpiece according to a certain scaling ratio. This is also helpful in ensuring that the first target waveform can be displayed in the target display area and can make the first target waveform displayed in the middle part of the target display area as much as possible.

[0050] Optionally, based on the physical coordinates corresponding to at least part of the processed data, the pixel coordinates corresponding to when mapping at least part of the processed data into the target display area are determined, including: based on the physical coordinates corresponding to at least part of the processed data, determining the coordinate axis precision of each coordinate axis in the surface coordinate system within the target display area and the coordinate axis position within the target display area; based on the determined coordinate axis precision and coordinate axis position, and the physical coordinates corresponding to at least part of the processed data, determining a first coordinate mapping relationship for mapping the processed data to the corresponding pixel coordinates; and determining the pixel coordinates corresponding to at least part of the processed data according to the first coordinate mapping relationship.

[0051] Exemplarily, the coordinate axis precision of each coordinate axis in the curved surface coordinate system in the target display area can be determined based on the physical coordinates corresponding to at least part of the processing data. Specifically, the coordinate range of each coordinate axis of the curved surface coordinate system that needs to be displayed in the target display area can be determined based on the physical coordinates corresponding to at least part of the processing data in the processing line data package, and the coordinate axis precision of each coordinate axis can be determined based on the coordinate range of each coordinate axis that needs to be displayed in the target display area and the size of the target display area. The coordinate axis position of each coordinate axis in the curved surface coordinate system in the target display area can also be determined based on the physical coordinates corresponding to at least part of the processing data. For example, the first curved surface coordinate axis of the curved surface coordinate system can represent the position of the processing point on the corresponding target processing line, and the coordinate range of each coordinate axis of the curved surface coordinate system that needs to be displayed in the target display area can be determined based on the physical coordinates corresponding to at least part of the processing data in the processing line data package. If the coordinates in the coordinate range of the first curved surface coordinate axis that needs to be displayed in the target display area are all positive values, the origin position of the curved surface coordinate system can be at the left end of the target display area. For another example, the second curved surface coordinate axis of the curved surface coordinate system can represent the height of the processing point, and each coordinate in the coordinate range of the second curved surface coordinate axis that needs to be displayed in the target display area is a negative value, then the origin position of the curved surface coordinate system can be at the upper end of the target display area. It can be understood that the position of each coordinate axis of the curved surface coordinate system can be determined based on the origin position of the curved surface coordinate system.

[0052] Exemplarily, the coordinates of each coordinate point in the curved surface coordinate system can be determined based on the coordinate axis accuracy of each coordinate axis in the curved surface coordinate system, and the pixel coordinates of each coordinate point in the curved surface coordinate system in the target display area can be determined based on the coordinate axis position of the coordinate axis in the target display area. Each coordinate point in the curved surface coordinate system can be mapped to a corresponding pixel point in the target display area. In other words, each coordinate point in the curved surface coordinate system has a corresponding pixel coordinate in the target display area, and this mapping relationship can be recorded as a first coordinate mapping relationship. After determining the first coordinate mapping relationship, the corresponding pixel coordinates of at least part of the processing data of the processing line data packet corresponding to each target processing line in the target display area can be determined according to the first coordinate mapping relationship.

[0053] The above technical solution determines the coordinate axis position and coordinate axis accuracy of the surface coordinate system through the physical coordinates corresponding to the processing data, which is conducive to making the generated target waveform fill the image as much as possible and helps the first target waveform to be displayed in the middle area of ​​the image.

[0054] Optionally, before generating a three-dimensional waveform graph based on at least part of the processing data of each processing line data packet in at least two processing line data packets and preset processing line positions of at least two target processing lines on the target processing part, the method also includes: for each processing line data packet in at least two processing line data packets, dividing each group of processing data in the processing line data packet into multiple data sets, wherein the number of groups of processing data in different data sets is the same, and the positions of processing points corresponding to each group of processing data in each data set are continuous with each other in the processing line; determining the processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height in each data set of the multiple data sets to obtain at least part of the processing data of the processing line data packet.

[0055] Exemplarily, for each group of processing data in the processing line data packet, each group of processing data can be divided into multiple data sets according to the position data contained in each group of processing data, and the number of groups of processing data in each data set is the same. Take each group of processing data in the processing line data packet as (x, Datax), x = 0, 1, 2..., N as an example, where x can represent the acquisition sequence number of the processing point, and Datax can represent the analog voltage value of the laser rangefinder when sampling the processing point. Each group of processing data can be divided into a data sets based on a preset division number a, and the number of groups of processing data contained in each data set can be (N+1) / a. The acquisition sequence numbers contained in each group of processing data in each data set are continuous with each other. In other words, the positions of the processing points corresponding to each group of processing data in each data set are continuous with each other in the processing line. Exemplarily, for each divided data set, the processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height can be determined in the data set based on the height data in each group of processing data contained in the data set, and at least part of the processing data of each processing line data packet obtained may include the processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height contained in each data set.

[0056] The above technical solution can effectively reduce the amount of processing data, and under the premise of reducing the amount of processing data, a three-dimensional waveform diagram is generated by determining the processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height in each data set of multiple data sets of each processing line data packet, which is helpful to avoid missing key processing points on the target processing line.

[0057] Optionally, after the self-processing device obtains at least one processing line data packet corresponding to at least one target processing line on the target workpiece, the method also includes: for each processing line data packet of at least two processing line data packets, generating a two-dimensional waveform graph based on at least part of the processing data in the processing line data packet, the two-dimensional waveform graph includes a second target waveform presented in a plane coordinate system, the second target waveform is a waveform in which the height of each processing point on the target processing line corresponding to the processing line data packet varies with the position of the processing point, the first coordinate axis of the plane coordinate system represents the position of the processing point, and the second coordinate axis of the plane coordinate system represents the height of the processing point.

[0058] Exemplarily, after the host computer obtains the processing line data packet, a two-dimensional waveform diagram of the target processing line can be generated according to part or all of the processing data in the processing line data packet. The two-dimensional waveform diagram may include a plane coordinate system and a second target waveform, and the second target waveform is presented in the plane coordinate system. Specifically, the plane coordinate system may have two coordinate axes passing through the coordinate origin perpendicular to each other, respectively recorded as the first coordinate axis and the second coordinate axis, the first coordinate axis may represent the position of the processing point, and the second coordinate axis may represent the height of the processing point. For each group of processing data of at least part of the processing data in each processing line data packet, the position data and height data contained in the group of processing data may be respectively used as coordinate values ​​on the corresponding coordinate axis in the plane coordinate system, based on the position data and height data in the group of processing data, the coordinate point of the corresponding processing point in the plane coordinate system can be determined, based on each coordinate point determined in the plane coordinate system, the target waveform can be obtained, and the second target waveform may represent the change of the height of each processing point on the corresponding target processing line with the change of the position of the processing point.

[0059] The above technical solution obtains the processing line data packet of the target processing line on the target processing part through the host computer, and generates a two-dimensional waveform diagram based on the processing data. The two-dimensional waveform diagram can intuitively display the flatness of the target processing line. After the processing of the target processing part is completed, the flatness of each target processing line of the target processing part can still be analyzed based on the processing data obtained by the host computer and the generated two-dimensional waveform diagram, which can make the processing data traceable. On the other hand, when an oscilloscope is not configured at the processing site, the processing data can be obtained and processed by the host computer, which is conducive to saving hardware costs.

[0060] Optionally, for each processing line data packet of at least two processing line data packets, a two-dimensional waveform graph is generated based on at least part of the processing data in the processing line data packet, including: generating a preset background image; generating a plane coordinate system within the preset background image based on at least part of the processing data in the processing line data packet; and determining, based on at least part of the processing data and the plane coordinate system, pixel coordinates corresponding to each group of processing data within the preset background image when mapping at least part of the processing data to the plane coordinate system, so as to generate a two-dimensional waveform graph.

[0061] Exemplarily, the host computer can generate a preset background image, and the colors of each pixel of the preset background image can be the same or similar, for example, it can be an image in which all pixels are black. The embodiment of the present invention does not specifically limit the size of the preset background image, which can be defined by the user according to actual needs. The host computer can determine the coordinate axis accuracy of the coordinate axis of the plane coordinate system and the coordinate axis position of the coordinate axis in the preset background image based on at least part of the processing data in the processing line data packet. For example, if each group of processing data is in the first quadrant of the plane coordinate system, the two coordinate axes of the plane coordinate system can be at the left end and the lower end of the preset background image, respectively.

[0062] For example, for the processing line data packet corresponding to the target processing line, each set of processing data can be expressed as (X, Y), where X can indicate the position of the corresponding processing point on the target processing line, and Y can indicate the height of the corresponding processing point. For the relevant description of the processing data, reference can be made to the aforementioned embodiment, which will not be repeated here. For example, after determining the plane coordinate system in the preset background image, the processing data can be mapped to the plane coordinate system. Specifically, the processing data can be mapped to the corresponding pixel coordinates in the preset background image according to the image position of the plane coordinate system in the preset background image. Please refer to Figure 4 As shown, it is a schematic diagram of a two-dimensional waveform diagram according to an embodiment of the present invention. In this embodiment, the target processing part can be a wafer, and the target processing line can be a cutting road. Figure 4 In the two-dimensional waveform diagram shown, the first coordinate axis of the generated plane coordinate system is the x-axis, which represents the acquisition sequence number of the processing point. Figure 4 It can be seen that in the preset background image, the coordinate range displayed on the first coordinate axis is 0 to 32400. The second coordinate axis of the plane coordinate system is the y-axis, which represents the analog voltage value of the laser rangefinder. Figure 4 It can be seen that in the preset background image, the coordinate range displayed on the second coordinate axis is -8 to 0, and the higher the analog voltage value, the higher the height of the corresponding processing point. Each group of processing data in the processing line data packet corresponding to the target processing line is in the fourth quadrant of the plane coordinate system, and the two coordinate axes of the plane coordinate system can be respectively at the upper end and the left end of the preset background image.

[0063] The above technical solution generates a plane coordinate system in a preset background image based on at least part of the processing data in the processing line data packet, which helps to ensure that the plane coordinate system and the second target waveform can be displayed in the preset background image, and helps to display the second target waveform in the middle area of ​​the image as much as possible.

[0064] Optionally, based on at least part of the processing data in the processing line data packet, a plane coordinate system is generated in a preset background image, including: based on at least part of the processing data in the processing line data packet, a plane coordinate system is generated in a preset background image, including: based on the position data contained in at least part of the processing data and the image resolution of the preset background image in the direction where the first coordinate axis is located, determining the coordinate axis accuracy of the second coordinate axis based on the height data contained in at least part of the processing data and the image resolution of the preset background image in the direction where the second coordinate axis is located; based on the position data and height data contained in at least part of the processing data and the image resolution of the preset background image in the direction where the first coordinate axis and the second coordinate axis are located, respectively, determining the coordinate axis position of the first coordinate axis in the preset background image and the coordinate axis position of the second coordinate axis in the preset background image; based on the determined coordinate axis accuracy and coordinate axis position, generating a plane coordinate system in the preset background image.

[0065] Exemplarily, the coordinate range displayed by the first coordinate axis in the preset background image can be determined based on the position data included in at least part of the processing data in the processing line data packet, and the image resolution of the preset background image in the direction where the first coordinate axis is located can be the number of rows / columns of the pixels of the preset background image. The coordinate axis precision of the first coordinate axis can be determined based on the determined coordinate range displayed by the first coordinate axis and the image resolution of the preset background image in the direction where the first coordinate axis is located, and the coordinate axis precision can be regarded as the absolute value of the coordinate difference between adjacent scales on the coordinate axis. The larger the coordinate range displayed by the first coordinate axis, the larger the absolute value of the coordinate difference between adjacent scales on the first coordinate axis. Similarly, the coordinate range displayed by the second coordinate axis in the preset background image can be determined based on the height data included in at least part of the processing data in the processing line data packet, and the image resolution of the preset background image in the direction where the second coordinate axis is located can be the number of rows / columns of the pixels of the preset background image. The coordinate axis precision of the second coordinate axis can be determined based on the determined coordinate range displayed by the second coordinate axis and the image resolution of the preset background image in the direction where the second coordinate axis is located, and the coordinate axis precision can be regarded as the absolute value of the coordinate difference between adjacent scales on the coordinate axis. The larger the coordinate range displayed by the second coordinate axis, the larger the absolute value of the coordinate difference between adjacent scales on the second coordinate axis.

[0066] Exemplarily, the coordinate axis position of the second coordinate axis in the preset background image can be determined based on the determined coordinate range displayed by the first coordinate axis and the image resolution of the preset background image in the direction of the second coordinate axis. Specifically, if all coordinates in the coordinate range displayed by the first coordinate axis are positive values, the preset background image can display the first quadrant and / or the fourth quadrant of the plane coordinate system, and the second coordinate axis can be located at the left end of the preset background image. For another example, if there are positive and negative values ​​in the coordinate range displayed by the first coordinate axis, the position of the second coordinate axis in the preset background image along the direction of the first coordinate axis can be determined based on the ratio of the number of positive coordinates to the number of negative coordinates. It can be understood that the more positive coordinates there are, the closer the coordinate axis position of the second coordinate axis is to the left edge of the preset background image. The image resolution of the preset background image in the direction of the second coordinate axis can determine the number of pixels that the second coordinate axis can occupy in the direction of the second coordinate axis. For example, if the image resolution of the preset background image in the direction of the second coordinate axis is 750, the number of pixels that the second coordinate axis occupies in the preset background image in the direction of the second coordinate axis can be the product of 750 and a preset ratio. The preset ratio can be less than 1. The preset ratio can be defined according to the actual display effect, for example, it can be 0.8. The coordinate axis position of the second coordinate axis in the preset background image can be determined according to the position of the second coordinate axis in the direction of the first coordinate axis in the preset background image, the second coordinate axis, and the number of pixels that the second coordinate axis occupies in the direction of the second coordinate axis in the preset background image. Similarly, the coordinate axis position of the first coordinate axis in the preset background image can be determined based on the determined coordinate range displayed by the second coordinate axis and the image resolution of the preset background image in the direction of the first coordinate axis. Specifically, if all coordinates in the coordinate range displayed by the second coordinate axis are positive values, the preset background image can display the first quadrant and / or the second quadrant of the plane coordinate system, and the first coordinate axis can be located at the lower end of the preset background image. For another example, if there are positive and negative values ​​in the coordinate range displayed by the second coordinate axis, the position of the first coordinate axis in the preset background image along the direction of the second coordinate axis can be determined based on the ratio of the number of positive coordinates to the number of negative coordinates. It can be understood that the greater the number of positive coordinates, the closer the coordinate axis position of the second coordinate axis is to the lower end of the preset background image. The image resolution of the preset background image in the direction of the first coordinate axis can determine the number of pixels that the first coordinate axis can occupy in the direction of the first coordinate axis. The coordinate axis position of the second coordinate axis in the preset background image can be determined based on the position of the second coordinate axis in the preset background image along the direction of the first coordinate axis, the second coordinate axis, and the number of pixels that the second coordinate axis occupies in the preset background image in the direction of the second coordinate axis.After the coordinate axis precisions and coordinate axis positions of the first coordinate axis and the second coordinate axis are determined, a plane coordinate system including the first coordinate axis and the second coordinate axis may be generated in the preset background image.

[0067] Please continue reading Figure 4 As shown, in Figure 4 In the two-dimensional waveform diagram shown, the coordinate axis precision of the first coordinate axis of the generated plane coordinate system is 324, specifically, the coordinate difference between adjacent scale lines marked with coordinate values ​​on the first coordinate axis is 3240, there are 9 scale lines without coordinate values ​​between adjacent scale lines marked with coordinate values, and the absolute value of the coordinate difference between each scale line without coordinate value and the adjacent scale line is 324, so the coordinate axis precision of the first coordinate axis is 324. The coordinate axis precision of the second coordinate axis is 0.1, specifically, the coordinate difference between adjacent scale lines marked with coordinate values ​​on the second coordinate axis is 1, there are 9 scale lines without coordinate values ​​between adjacent scale lines marked with coordinate values, and the absolute value of the coordinate difference between each scale line without coordinate value and the adjacent scale line is 0.1, so the coordinate axis precision of the second coordinate axis is 0.1. Each group of processing data in the processing line data package corresponding to the target processing line is in the fourth quadrant of the plane coordinate system, and the first coordinate axis of the plane coordinate system can be at the upper end of the preset background image, and the second coordinate axis can be at the left end of the preset background image.

[0068] The above technical solution at least partially processes the position data and height data contained in the data and the resolution of the preset background image to determine the coordinate axis accuracy and coordinate axis position of the first coordinate axis and the second coordinate axis, which is conducive to making the generated target waveform fill the image as much as possible and helps the target waveform to be displayed in the middle area of ​​the image.

[0069] Optionally, based on at least part of the processed data and the plane coordinate system, the pixel coordinates corresponding to each group of processed data in the preset background image when mapping at least part of the processed data to the plane coordinate system are determined, including: based on the coordinate axis accuracy of each coordinate axis in the plane coordinate system and the coordinate axis position of the coordinate axis in the preset background image, determining a second coordinate mapping relationship for mapping the processed data to corresponding pixel coordinates; and determining the pixel coordinates corresponding to each of the at least part of the processed data according to the second coordinate mapping relationship.

[0070] Exemplarily, the coordinates of each coordinate point in the plane coordinate system can be determined based on the coordinate axis accuracy of each coordinate axis in the plane coordinate system, and the pixel coordinates of each coordinate point in the plane coordinate system in the preset background image can be determined based on the coordinate axis position of the coordinate axis in the preset background image. There is a mapping relationship between the coordinates of each coordinate point in the plane coordinate system and the pixel coordinates, that is, the second coordinate mapping relationship. For example, the pixel coordinate range of the preset background image can be (0, 0) to (PX, PY), and the coordinate range of the coordinate point displayed by the plane coordinate system in the preset background image is (0, Data0) to (N, DataN). It can be understood that the proportional coefficient between the coordinate range displayed by the plane coordinate system and the pixel coordinate range of the preset background image can be calculated, and the proportional coefficient can be used as the second coordinate mapping relationship. After determining the second coordinate mapping relationship, the corresponding pixel coordinates of at least part of the processing data of the processing line data packet corresponding to the target processing line in the preset background image can be determined according to the second coordinate mapping relationship.

[0071] The above technical solution determines the coordinate mapping relationship through the coordinate axis accuracy and the coordinate axis position, and determines the pixel coordinates corresponding to the processing data according to the coordinate mapping relationship. It can realize the accurate mapping of the processing data to the corresponding pixel points of the corresponding pixel coordinates, and the coordinates of the mapped pixel points in the plane coordinate system can accurately indicate the height and position of the corresponding processing point.

[0072] Optionally, based on at least part of the processed data and a plane coordinate system, the pixel coordinates corresponding to each group of processed data in a preset background image when mapping at least part of the processed data to the plane coordinate system are determined to generate a two-dimensional waveform graph, including: highlighting the target pixel points at the pixel coordinates corresponding to at least part of the processed data in a manner different from the pixel values ​​of the preset background image to obtain a two-dimensional waveform graph; or highlighting the target pixel points at the pixel coordinates corresponding to at least part of the processed data and the intermediate pixel points between adjacent target pixel points in a manner different from the pixel values ​​of the preset background image to obtain a two-dimensional waveform graph, wherein the intermediate pixel point is a pixel point on a line between adjacent target pixel points, and adjacent target pixel points are adjacent pixel points along the direction of the first coordinate axis.

[0073] Exemplarily, after determining the corresponding pixel coordinates of at least part of the processing data of the processing line data packet corresponding to the target processing line in the preset background image, the target pixel points at the corresponding pixel coordinates of at least part of the processing data can be highlighted in a manner different from the pixel values ​​of the preset background image. For example, when the preset background image is an RGB image, the pixel values ​​of the target pixel points under the R channel, the G channel, and the B channel can be set to pixel values ​​that can be distinguished from the preset background image. Taking the color of all the pixels of the preset background image as black, the target pixel points can be set to yellow by setting the pixel values ​​of the target pixel points under the R channel, the G channel, and the B channel. In this case, the second target waveform in the two-dimensional waveform diagram includes the highlighted target pixel points. Exemplarily, the target pixel points and the middle pixel points on the connecting line between adjacent target pixel points can also be highlighted in a manner different from the pixel values ​​of the preset background image. In this case, the second target waveform in the two-dimensional waveform diagram includes the highlighted target pixel points and the middle pixel points.

[0074] The above technical solution can obtain a clear target waveform by highlighting the target pixel points. The target waveform can accurately and intuitively express the change of the height of each processing point on the target processing line as the position of the processing point changes.

[0075] Optionally, before generating a two-dimensional waveform graph based on at least part of the processing data in each processing line data packet of at least two processing line data packets, the method also includes: dividing each group of processing data in the processing line data packet into multiple data sets, wherein the number of groups of processing data in different data sets is the same, and the positions of processing points corresponding to each group of processing data in each data set are continuous with each other in the processing line; determining the processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height in each data set of the multiple data sets, so as to obtain at least part of the processing data of the processing line data packet.

[0076] For example, for each group of processing data in each processing line data packet, each group of processing data can be divided into multiple data sets according to the position data contained in each group of processing data, and the number of groups of processing data in each data set is the same. The division of the data set and obtaining at least part of the processing data of each processing line data packet based on the divided data set can refer to the above embodiment, which will not be repeated here.

[0077] The above technical solution can effectively reduce the amount of processing data, and on the premise that the amount of processing data can be reduced, a two-dimensional waveform diagram is generated based on the processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height in each data set of multiple data sets, which is helpful to avoid missing key processing points on the target processing line.

[0078] According to another aspect of the present invention, there is also provided a data processing method, which is applied to a control mechanism in a processing device connected to the above-mentioned host computer, the processing device comprising a control mechanism, a distance measuring mechanism, a position measuring mechanism and a storage mechanism, the control mechanism being connected to the distance measuring mechanism and the position measuring mechanism respectively, the distance measuring mechanism being used to collect height data of the processing workpiece and sending the collected height data to the control mechanism in real time, the position measuring mechanism being used to collect position data of the processing workpiece and sending the collected position data to the control mechanism in real time, the method comprising: acquiring position data collected by the position measuring mechanism and height data collected by the distance measuring mechanism; storing the sampled position data and height data in the storage mechanism, so that the host computer can obtain the processing line data packet from the storage mechanism.

[0079] Exemplarily, the relevant description of the control mechanism, the distance measuring mechanism, and the position measuring mechanism of the processing device can refer to the aforementioned embodiment, which will not be repeated here. The processing device may also include a storage mechanism, and the storage mechanism for the processing device in the aforementioned embodiment may be a storage mechanism included in the processing device. When processing the workpiece, the position measuring mechanism can collect the position data of the workpiece after receiving the trigger signal of the control mechanism, and can also send the collected position data to the control mechanism in real time. Similarly, the distance measuring mechanism can collect the height data of the workpiece after receiving the trigger signal of the control mechanism, and can also send the collected height data to the control mechanism in real time. The control mechanism can obtain the position data collected by the position measuring mechanism and the height data collected by the distance measuring mechanism, and store the obtained position data and height data in the storage mechanism, and the host computer can obtain the processing line data packet from the storage mechanism.

[0080] In the above technical solution, the control mechanism can obtain the position data and height data of each processing point on the processing line, and store the position data and height data in the storage mechanism, so as to realize the storage of processing data at the processing device end, and further ensure the traceability of processing data.

[0081] Optionally, obtaining position data collected by a position measurement mechanism and height data collected by a distance measurement mechanism includes: obtaining position data collected by the position measurement mechanism; and receiving height data corresponding to each processing point from the distance measurement mechanism based on the position data to obtain processing data corresponding to each processing point.

[0082] Exemplarily, the control mechanism may receive the position data sent by the position measurement mechanism, and when receiving the position data, may receive the height data from the distance measurement mechanism based on the position data, and the height data received based on the position data may be used as the height data of the processing point at the corresponding position. The processing data corresponding to each processing point may include the position data and the height data received based on the position data.

[0083] The above technical solution can achieve that the height data of the processing points stored in the storage mechanism can be accurately associated with the processing points at the corresponding positions by receiving the height data corresponding to each processing point from the distance measuring mechanism based on the position data.

[0084] According to yet another aspect of the present invention, there is provided a processing device, comprising a control mechanism, a distance measuring mechanism, a position measuring mechanism and a storage mechanism, wherein the control mechanism is connected to the distance measuring mechanism and the position measuring mechanism respectively, the distance measuring mechanism is used to collect height data of the workpiece and send the collected height data to the control mechanism in real time, the position measuring mechanism is used to collect position data of the workpiece and send the collected position data to the control mechanism in real time, and the control mechanism is used to execute the above-mentioned data processing method.

[0085] Exemplarily, the storage mechanism may be, for example, a read-only memory (ROM), an erasable programmable read-only memory (EPROM), a portable compact disk read-only memory (CD-ROM), a USB memory, etc. The distance measuring mechanism may be, for example, a laser distance meter, an infrared distance meter, an ultrasonic distance meter, etc. The position measuring mechanism may be, for example, a grating ruler, a position sensor, etc.

[0086] Optionally, the control mechanism is a floppy disk controller board.

[0087] Exemplarily, the control mechanism of the processing device can be a floppy disk controller board (also called "FDC board"), and the floppy disk controller can be connected to the distance measurement mechanism, the position measurement mechanism and the storage mechanism respectively to execute the above data processing method. The hardware cost of the floppy disk controller board is low, and the maintenance difficulty of the equipment is relatively low.

[0088] See also Figure 5 As shown, it is a schematic block diagram of a data processing device according to an embodiment of the present invention. According to another aspect of the present invention, a data processing device 500 is provided for processing processing data of a workpiece. The device 500 includes:

[0089] An acquisition module 510 is used to acquire at least two processing line data packets corresponding to at least two target processing lines on a target workpiece from a processing device, wherein each processing line data packet of the at least two processing line data packets includes multiple groups of processing data corresponding to multiple processing points on the corresponding target processing line, wherein each group of processing data includes position data indicating the position of the corresponding processing point in the processing line and height data indicating the height of the corresponding processing point, wherein the height is the distance between the processing point and a distance measuring mechanism in the processing device;

[0090] A generating module 520 is used to generate a three-dimensional waveform diagram based on at least part of the processing data of each processing line data packet in at least two processing line data packets and the preset processing line positions of at least two target processing lines on the target processing part, wherein the three-dimensional waveform diagram includes a first target waveform, which is a three-dimensional waveform in which the height of each processing point on at least two target processing lines on the target processing part changes with the position of the processing point in the processing line and the position of the target processing line on the target processing part.

[0091] According to another aspect of the present invention, there is provided a processing system, comprising the above-mentioned processing device and a host computer.

[0092] See also Figure 5 As shown, it is a schematic block diagram of an electronic device according to an embodiment of the present invention. According to another aspect of the present invention, an electronic device 600 is also provided, including: a processor 610 and a memory 620, wherein the memory 620 stores computer program instructions, and the computer program instructions are used by the processor 610 to execute the above-mentioned data processing method when it is running.

[0093] According to another aspect of the present invention, a storage medium is also provided, on which program instructions are stored, and when the program instructions are executed by a computer or a processor, the computer or the processor executes the corresponding steps of the above-mentioned data processing method of the embodiment of the present invention, and is used to implement the control mechanism or the above-mentioned host computer in the above-mentioned processing device according to the embodiment of the present invention. The storage medium may include, for example, a memory card of a smart phone, a storage component of a tablet computer, a hard disk of a personal computer, a read-only memory (ROM), an erasable programmable read-only memory (EPROM), a portable compact disk read-only memory (CD-ROM), a USB memory, or any combination of the above-mentioned storage media. The computer-readable storage medium may be any combination of one or more computer-readable storage media.

[0094] According to yet another aspect of the present invention, a computer program product is provided, comprising computer program instructions, wherein the computer program instructions are used to execute the above-mentioned data processing method when running.

[0095] A person skilled in the art can understand the specific implementation and beneficial effects of the above-mentioned processing device or the above-mentioned processing system by reading the above-mentioned detailed description of the data processing method. For the sake of brevity, they will not be elaborated here.

[0096] Although example embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above example embodiments are merely exemplary and are not intended to limit the scope of the present invention thereto. Various changes and modifications may be made therein by one of ordinary skill in the art without departing from the scope and spirit of the present invention. All such changes and modifications are intended to be included within the scope of the present invention as required by the appended claims.

[0097] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention.

[0098] In the several embodiments provided in this application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed.

[0099] In the description provided herein, a large number of specific details are described. However, it is understood that embodiments of the present invention can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0100] Similarly, it should be understood that in order to streamline the present invention and help understand one or more of the various inventive aspects, in the description of the exemplary embodiments of the present invention, the various features of the present invention are sometimes grouped together into a single embodiment, figure, or description thereof. However, the method of the present invention should not be interpreted as reflecting the following intention: the claimed invention requires more features than the features explicitly stated in each claim. More specifically, as reflected in the corresponding claims, the inventive point is that the corresponding technical problem can be solved with less than all the features of a single disclosed embodiment. Therefore, the claims following the specific embodiment are hereby expressly incorporated into the specific embodiment, wherein each claim itself serves as a separate embodiment of the present invention.

[0101] It will be understood by those skilled in the art that, except for mutually exclusive features, all features disclosed in this specification (including the accompanying claims, abstracts and drawings) and all processes or units of any method or device disclosed in this specification may be combined in any combination. Unless otherwise expressly stated, each feature disclosed in this specification (including the accompanying claims, abstracts and drawings) may be replaced by an alternative feature that provides the same, equivalent or similar purpose.

[0102] In addition, those skilled in the art will appreciate that, although some embodiments herein include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present invention and form different embodiments. For example, in the claims, any one of the claimed embodiments may be used in any combination.

[0103] The various component embodiments of the present invention can be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. It should be understood by those skilled in the art that a microprocessor or a digital signal processor (DSP) can be used in practice to implement some or all of the functions of the control mechanism in the processing device or some modules in the above-mentioned host computer according to an embodiment of the present invention. The present invention can also be implemented as a device program (e.g., a computer program and a computer program product) for executing part or all of the methods described herein. Such a program for implementing the present invention can be stored on a computer-readable medium, or can have the form of one or more signals. Such a signal can be downloaded from an Internet website, or provided on a carrier signal, or provided in any other form.

[0104] It should be noted that the above embodiments illustrate the present invention rather than limit it, and that those skilled in the art may devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference symbol between brackets shall not be construed as a limitation on the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "one" or "an" preceding an element does not exclude the presence of a plurality of such elements. The present invention may be implemented by means of hardware comprising a number of different elements and by means of a suitably programmed computer. In a unit claim enumerating a number of devices, several of these devices may be embodied by the same hardware item. The use of the words first, second, and third, etc., does not indicate any order. These words may be interpreted as names.

[0105] The above is only a specific embodiment or description of a specific embodiment of the present invention, and the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. The protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A data processing method for processing processing data of a workpiece, characterized in that: Applied to a host computer, the method includes: Acquire at least two processing line data packets corresponding to at least two target processing lines on a target workpiece from a processing device, each of the at least two processing line data packets comprising a plurality of sets of processing data corresponding to a plurality of processing points on the corresponding target processing line, wherein each set of processing data comprises position data indicating a position of the corresponding processing point within the processing line and height data indicating a height of the corresponding processing point, wherein the height is a distance between the processing point and a distance measuring mechanism in the processing device; A three-dimensional waveform graph is generated based on at least part of the processing data of each processing line data packet in the at least two processing line data packets and the preset processing line positions of the at least two target processing lines on the target processing part, wherein the three-dimensional waveform graph includes a first target waveform, which is a three-dimensional waveform in which the height of each processing point on the at least two target processing lines on the target processing part changes with the position of the processing point in the processing line and the position of the target processing line on the target processing part.

2. The method according to claim 1, characterized in that The self-processing device obtains at least two processing line data packets corresponding to at least two target processing lines on the target workpiece, including: According to the first identification information of the target workpiece and the second identification information of the at least two target processing lines, query and obtain the at least two processing line data packets corresponding to the at least two target processing lines from the initial data packets stored in the processing device; The initial data packet includes processing line data packets corresponding to a plurality of processing lines one by one, and the plurality of processing lines belong to one or more processing parts.

3. The method according to claim 1, characterized in that The generating of a three-dimensional waveform diagram based on at least a portion of the processing data of each processing line data packet in the at least two processing line data packets and the preset processing line positions of the at least two target processing lines on the target processing part comprises: Based on at least a portion of the processing data of each processing line data packet in the at least two processing line data packets and the preset processing line positions of the at least two target processing lines on the target processing part, determining the physical coordinates corresponding to the at least a portion of the processing data, the physical coordinates being used to indicate the position of the processing point corresponding to the at least a portion of the processing data in the preset physical space where the target processing part is located; Based on the physical coordinates corresponding to the at least part of the processed data, the pixel coordinates corresponding to when the at least part of the processed data is mapped into the target display area are determined to generate the three-dimensional waveform graph.

4. The method according to claim 3, characterized in that The determining, based on the physical coordinates corresponding to the at least part of the processed data, corresponding pixel coordinates when mapping the at least part of the processed data into the target display area comprises: Determining, based on the physical coordinates corresponding to at least part of the processing data, the coordinate axis precision of each coordinate axis in the curved surface coordinate system within the target display area and the coordinate axis position within the target display area; Based on the determined coordinate axis precision and coordinate axis position, and the physical coordinates corresponding to at least part of the processed data, determine a first coordinate mapping relationship for mapping the processed data to corresponding pixel coordinates; The pixel coordinates corresponding to the at least part of the processed data are determined according to the first coordinate mapping relationship.

5. The method according to claim 1, characterized in that: Before generating the three-dimensional waveform diagram based on at least part of the processing data of each processing line data packet in the at least two processing line data packets and the preset processing line positions of the at least two target processing lines on the target processing part, the method further includes: For each of the at least two processing line data packets, Dividing each group of processing data in the processing line data package into multiple data sets, wherein the number of groups of processing data in different data sets is the same, and the positions of processing points corresponding to each group of processing data in each data set are continuous within the processing line; The processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height are determined in each data set of the plurality of data sets to obtain the at least part of the processing data of the processing line data packet.

6. The method according to any one of claims 1 to 5, characterized in that: After the self-processing device acquires at least one processing line data packet corresponding to at least one target processing line on the target workpiece, the method further includes: For each processing line data packet of the at least two processing line data packets, a two-dimensional waveform graph is generated based on at least part of the processing data in the processing line data packet, and the two-dimensional waveform graph includes a second target waveform presented in a plane coordinate system, and the second target waveform is a waveform in which the height of each processing point on the target processing line corresponding to the processing line data packet varies with the position of the processing point, the first coordinate axis of the plane coordinate system represents the position of the processing point, and the second coordinate axis of the plane coordinate system represents the height of the processing point.

7. The method according to claim 6, characterized in that The step of generating a two-dimensional waveform diagram for each processing line data packet of the at least two processing line data packets based on at least a portion of processing data in the processing line data packet comprises: Generate a preset background image; generating the plane coordinate system in the preset background image based on the at least part of the processing data in the processing line data packet; According to the at least part of the processed data and the plane coordinate system, pixel coordinates corresponding to each group of processed data in the preset background image when mapping the at least part of the processed data to the plane coordinate system are determined to generate the two-dimensional waveform diagram.

8. The method according to claim 7, characterized in that The step of generating the plane coordinate system in the preset background image based on at least part of the processing data in the processing line data packet comprises: Determining a coordinate axis precision of the first coordinate axis based on the position data included in the at least part of the processed data and an image resolution of the preset background image in the direction of the first coordinate axis; Determining the coordinate axis precision of the second coordinate axis based on the height data included in the at least part of the processing data and the image resolution of the preset background image in the direction where the second coordinate axis is located; Determine the coordinate axis position of the first coordinate axis in the preset background image and the coordinate axis position of the second coordinate axis in the preset background image based on the position data and the height data included in the at least part of the processed data and the image resolution of the preset background image in the directions of the first coordinate axis and the second coordinate axis respectively; Based on the determined coordinate axis precision and coordinate axis position, the plane coordinate system is generated within the preset background image.

9. The method according to claim 7, characterized in that: The step of determining, based on the at least a portion of the processed data and the plane coordinate system, pixel coordinates corresponding to each group of processed data in the preset background image when mapping the at least a portion of the processed data to the plane coordinate system comprises: Determining a second coordinate mapping relationship for mapping the processed data to corresponding pixel coordinates based on the coordinate axis accuracy of each coordinate axis in the plane coordinate system and the coordinate axis position of the coordinate axis in the preset background image; The pixel coordinates corresponding to each of the at least a portion of the processed data are determined according to the second coordinate mapping relationship.

10. The method according to claim 7, characterized in that The step of determining, based on the at least a portion of the processed data and the plane coordinate system, pixel coordinates corresponding to each group of processed data in the preset background image when mapping the at least a portion of the processed data to the plane coordinate system to generate the two-dimensional waveform diagram comprises: Highlight the target pixel points at the pixel coordinates corresponding to the at least part of the processed data in a manner different from the pixel values ​​of the preset background image to obtain the two-dimensional waveform graph; or, The target pixel points at the pixel coordinates corresponding to each of the at least part of the processed data and the intermediate pixel points between adjacent target pixel points are highlighted in a manner different from the pixel values ​​of the preset background image to obtain the two-dimensional waveform diagram, wherein the intermediate pixel points are pixel points on the line between adjacent target pixel points, and the adjacent target pixel points are adjacent pixel points along the direction of the first coordinate axis.

11. The method according to claim 6, characterized in that Before generating a two-dimensional waveform diagram based on at least part of the processing data in each of the at least two processing line data packets, the method further comprises: Dividing each group of processing data in the processing line data package into multiple data sets, wherein the number of groups of processing data in different data sets is the same, and the positions of processing points corresponding to each group of processing data in each data set are continuous within the processing line; The processing data corresponding to the processing point with the largest height and the processing data corresponding to the processing point with the smallest height are determined in each data set of the plurality of data sets to obtain the at least part of the processing data of the processing line data packet.

12. A data processing method, characterized in that: A control mechanism applied to a processing device connected to the host computer according to any one of claims 1 to 11, the processing device comprising the control mechanism, a distance measuring mechanism, a position measuring mechanism and a storage mechanism, the control mechanism being connected to the distance measuring mechanism and the position measuring mechanism respectively, the distance measuring mechanism being used to collect height data of a workpiece and sending the collected height data to the control mechanism in real time, the position measuring mechanism being used to collect position data of the workpiece and sending the collected position data to the control mechanism in real time, the method comprising: Acquiring the position data collected by the position measuring mechanism and the height data collected by the distance measuring mechanism; The sampled position data and height data are stored in the storage mechanism, so that the host computer can obtain the processing line data packet from the storage mechanism.

13. The method according to claim 12, characterized in that The step of acquiring the position data collected by the position measurement mechanism and the height data collected by the distance measurement mechanism comprises: Acquiring position data collected by the position measurement mechanism; The height data corresponding to each processing point is received from the distance measuring mechanism based on the position data to obtain processing data corresponding to each processing point.

14. A processing device, characterized in that: It includes a control mechanism, a distance measuring mechanism, a position measuring mechanism and a storage mechanism, the control mechanism is connected to the distance measuring mechanism and the position measuring mechanism respectively, the distance measuring mechanism is used to collect height data of the workpiece and send the collected height data to the control mechanism in real time, the position measuring mechanism is used to collect position data of the workpiece and send the collected position data to the control mechanism in real time, and the control mechanism is used to execute the data processing method as claimed in claim 12 or 13.

15. A data processing device for processing processing data of a workpiece, characterized in that: The device comprises: an acquisition module, used for acquiring at least two processing line data packets corresponding to at least two target processing lines on a target processing part from a processing device, each of the at least two processing line data packets comprising a plurality of groups of processing data corresponding to a plurality of processing points on the corresponding target processing line, wherein each group of processing data comprises position data indicating a position of the corresponding processing point within the processing line and height data indicating a height of the corresponding processing point, wherein the height is a distance between the processing point and a distance measuring mechanism in the processing device; A generating module is used to generate a three-dimensional waveform diagram based on at least part of the processing data of each processing line data packet in the at least two processing line data packets and the preset processing line positions of the at least two target processing lines on the target processing part, wherein the three-dimensional waveform diagram includes a first target waveform, which is a three-dimensional waveform in which the height of each processing point on the at least two target processing lines on the target processing part changes with the position of the processing point in the processing line and the position of the target processing line on the target processing part.

16. A storage medium having program instructions stored thereon, characterized in that: The program instructions are used to execute the data processing method according to any one of claims 1 to 11 or the data processing method according to claim 12 or 13 when running.

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