Temperature control system, pressure regulation method, and semiconductor process system

Abstract

The application relates to a temperature control system, a pressure regulating method and a process system. The temperature control system comprises a circulating liquid supply unit, a liquid pump, a temperature regulating unit, a pressure regulating unit, a pressure detecting unit and a control unit. The liquid pump draws circulating liquid from the circulating liquid supply unit. The temperature regulating input end of the temperature regulating unit is connected with the output end of the liquid pump to regulate the temperature of the circulating liquid output by the liquid pump. The temperature regulating output end of the temperature regulating unit is connected with an external liquid device to provide the temperature-regulated circulating liquid for the external liquid device. The pressure regulating unit circulates unused circulating liquid into the circulating liquid supply unit. The pressure detecting unit detects the pressure of the circulating liquid at the temperature regulating output end to output system pressure data. The control unit is electrically connected with the pressure detecting unit, the pressure regulating unit and the liquid pump respectively, and regulates the opening degree of the pressure regulating unit and the working frequency of the liquid pump according to the received system pressure data to regulate the pressure of the circulating liquid in the temperature control system.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of temperature control devices, and in particular to a temperature control system, a pressure regulating method and a semiconductor process system. BACKGROUND

[0002] A temperature control device for semiconductor is a device for providing constant temperature and constant flow of circulating liquid. The temperature control device can be applied to the process of integrated circuit manufacturing to take away the heat generated in the process by circulating liquid, so as to meet the temperature control requirements of the semiconductor main process equipment.

[0003] In the temperature control device, the water pump usually pumps the circulating liquid from the water tank to the temperature regulating device. After the temperature regulating device adjusts the temperature of the circulating liquid, the temperature-regulated circulating liquid is output to the external liquid device.

[0004] During the normal operation of the temperature control device, if the outlet pressure of the water pump is too high, the water pump may be damaged, so a bypass pipeline is connected to the outlet of the water pump, and the other end of the bypass pipeline is communicated with the water tank. A safety valve is also arranged on the bypass pipeline. When the pressure at the outlet of the water pump reaches the opening pressure of the safety valve, the safety valve is opened to relieve the pressure of the water pump.

[0005] However, the inventors have found that the temperature control device in the prior art adjusts the outlet pressure of the water pump by opening and closing the safety valve. However, after the safety valve is opened and closed many times, the reliability of the safety valve is reduced, and it is difficult to open the safety valve when it is opened, which may result in the outlet pressure of the water pump of the temperature control device being too high and difficult to adjust. SUMMARY

[0006] The present application aims to provide a temperature control system, a pressure regulating method and a semiconductor process system.

[0007] According to an aspect of the present application, a temperature control system is provided. The temperature control system comprises a circulating liquid supply unit, a liquid pump, a temperature regulating unit, a pressure regulating unit, a pressure detecting unit and a control unit. The circulating liquid supply unit provides circulating liquid. The input end of the liquid pump is in communication with the circulating liquid supply unit to draw circulating liquid from the circulating liquid supply unit. The temperature regulating input end of the temperature regulating unit is connected with the output end of the liquid pump to regulate the temperature of the circulating liquid outputted by the liquid pump. The temperature regulating output end of the temperature regulating unit is connected with an external liquid device to provide the temperature-regulated circulating liquid to the external liquid device. One end of the pressure regulating unit is connected with the temperature regulating output end, and the other end of the pressure regulating unit is connected with the circulating liquid supply unit to circulate the unused circulating liquid into the circulating liquid supply unit. The pressure detecting unit detects the pressure of the circulating liquid at the temperature regulating output end to output system pressure data. The control unit is electrically connected with the pressure detecting unit, the pressure regulating unit and the liquid pump respectively, and regulates the opening degree of the pressure regulating unit and the working frequency of the liquid pump according to the received system pressure data from the pressure detecting unit to regulate the pressure of the circulating liquid in the temperature control system.

[0008] According to some embodiments, the control unit determines a current system pressure value according to the system pressure data. The control unit determines the relative size of the current system pressure value and a first preset pressure upper limit value and a first preset pressure lower limit value respectively. The control unit adjusts the opening degree of the pressure regulating unit according to the current system pressure value and a preset target pressure value to regulate the pressure of the circulating liquid in the temperature control system in the case that the current system pressure value is greater than or equal to the first preset pressure upper limit value or the current system pressure value is less than or equal to the first preset pressure lower limit value. The first preset pressure upper limit value is obtained by increasing a first pressure value on the basis of the preset target pressure value. The first preset pressure lower limit value is obtained by decreasing a second pressure value on the basis of the preset target pressure value. The first preset pressure lower limit value < the preset target pressure value < the first preset pressure upper limit value < a system pressure upper limit value.

[0009] According to some embodiments, the control unit determines the relative size of the current system pressure value and a second preset pressure upper limit value and a second preset pressure lower limit value respectively. The control unit adjusts the working frequency of the liquid pump and adjusts the opening degree of the pressure regulating unit to regulate the pressure of the circulating liquid in the temperature control system in the case that the system pressure value is greater than or equal to the second preset pressure upper limit value or the system pressure value is less than or equal to the second preset pressure lower limit value. The second preset pressure upper limit value is obtained by increasing a third pressure value on the basis of the preset target pressure value. The second preset pressure lower limit value is obtained by decreasing a fourth pressure value on the basis of the preset target pressure value. The system pressure lower limit value < the second preset pressure lower limit value < the first preset pressure lower limit value < the preset target pressure value < the first preset pressure upper limit value < the second preset pressure upper limit value < the system pressure upper limit value.

[0010] According to some embodiments, the control unit controls the liquid pump to operate in a first preset manner when the current system pressure value is greater than or equal to the second preset upper pressure value, until the current system pressure value is less than the second preset upper pressure value, the first preset manner being a manner in which the working frequency of the liquid pump decreases by a first preset frequency value per second. The control unit controls the liquid pump to operate in a second preset manner according to the current frequency of the liquid pump and a preset target frequency when the current system pressure value is between the second preset upper pressure value and a second preset lower pressure value, until the working frequency of the liquid pump reaches the preset target frequency, the second preset manner being a manner in which the working frequency of the liquid pump changes by a second preset frequency value per second. The first preset frequency value is greater than the second preset frequency value.

[0011] According to some embodiments, the control unit controls the liquid pump to operate in a third preset manner when the system pressure value is less than or equal to the second preset lower pressure value, until the current system pressure value is greater than the second preset lower pressure value, the third preset manner being a manner in which the working frequency of the liquid pump increases by a third preset frequency value per second. The third preset frequency value is greater than the second preset frequency value.

[0012] According to some embodiments, the circulating liquid supply unit includes a liquid tank, a liquid level detector, a liquid supplementing regulating valve, a main path electromagnetic valve, and a backup electromagnetic valve.

[0013] The liquid tank includes a first liquid inlet, a second liquid inlet, a circulating liquid inlet, and a liquid outlet, and contains circulating liquid. The circulating liquid inlet is connected to the other end of the pressure regulating unit to receive circulating liquid. The liquid outlet is connected to the liquid pump to output the circulating liquid in the liquid tank. The liquid level detector is arranged in the liquid tank to detect the liquid level of the circulating liquid in the liquid tank and output a liquid level signal. The liquid supplementing regulating valve is arranged outside the liquid tank, one end of the liquid supplementing regulating valve being in communication with the first liquid inlet. The main path electromagnetic valve is arranged outside the liquid tank, one end of the main path electromagnetic valve being in communication with the other end of the liquid supplementing regulating valve, and the other end of the main path electromagnetic valve being in communication with the external circulating liquid supply device to receive the circulating liquid delivered by the external circulating liquid supply device. The backup electromagnetic valve is arranged outside the liquid tank, one end of the backup electromagnetic valve being in communication with the second liquid inlet, and the other end of the backup electromagnetic valve being in communication with one end of the main path electromagnetic valve. The control unit is further electrically connected to the liquid level detector, the liquid supplementing regulating valve, the main path electromagnetic valve, and the backup electromagnetic valve, and controls the opening and closing states of the liquid supplementing regulating valve, the main path electromagnetic valve, and the backup electromagnetic valve according to the liquid level signal to regulate the liquid level of the liquid tank.

[0014] According to another aspect of the present application, a pressure regulating method of a temperature control system is provided. The temperature control system can be the temperature control system described in the above aspect. The pressure regulating method includes regulating the opening degree of the pressure regulating unit and the working frequency of the liquid pump according to the system pressure data output by the pressure detecting unit to regulate the system pressure.

[0015] According to some embodiments, the opening degree of the pressure regulating unit and the working frequency of the liquid pump are adjusted according to the system pressure data output by the pressure detection unit to regulate the system pressure, including determining the current system pressure value according to the system pressure data. In the case that the system pressure value is greater than or equal to a first preset upper pressure limit value, or in the case that the system pressure value is less than or equal to a first preset lower pressure limit value, the opening degree of the pressure regulating unit is adjusted according to the system pressure value and a preset target pressure value to regulate the pressure of the circulating liquid of the temperature control system. In the case that the system pressure value is greater than or equal to a second preset upper pressure limit value, or in the case that the system pressure value is less than or equal to a second preset lower pressure limit value, the working frequency of the liquid pump is adjusted, and the opening degree of the pressure regulating unit is adjusted to regulate the pressure of the circulating liquid of the temperature control system.

[0016] According to some embodiments, adjusting the working frequency of the liquid pump includes, in the case that the system pressure value is greater than or equal to the second preset upper pressure limit value, controlling the liquid pump to operate in a first preset manner until the current system pressure value is less than the second preset upper pressure limit value, the first preset manner being that the working frequency of the liquid pump decreases by a first preset frequency value per second. In the case that the system pressure value is between the second preset upper pressure limit value and the second preset lower pressure limit value, controlling the liquid pump to operate in a second preset manner according to the current frequency of the liquid pump and a preset target frequency until the working frequency of the liquid pump reaches the preset target frequency, the second preset manner being that the working frequency of the liquid pump changes by a second preset frequency value per second. In the case that the system pressure value is less than or equal to the second preset lower pressure limit value, controlling the liquid pump to operate in a third preset manner until the current system pressure value is greater than the second preset lower pressure limit value, the third preset manner being that the working frequency of the liquid pump increases by a third preset frequency value per second. Wherein the first preset frequency value is greater than the second preset frequency value. The third preset frequency value is greater than the second preset frequency value.

[0017] According to another aspect of the present application, a semiconductor process system is provided. The semiconductor process system includes the temperature control system described in the above aspect and a semiconductor process equipment. The semiconductor process equipment is connected to the temperature regulating output end of the temperature regulating unit of the temperature control system to receive the circulating liquid after being regulated by the temperature regulating unit to perform the manufacturing of the semiconductor process.

[0018] Advantages

[0019] The present application can regulate the system pressure to be within a normal range through the detection of the system pressure by the pressure detection unit and the regulation and control of the pressure regulating unit and the liquid pump by the control unit according to the system pressure data detected by the pressure detection unit. This can effectively prevent the system pressure from being too high, and on the other hand, the temperature control system of the present application does not use a safety valve, but uses the pressure regulating unit and the liquid pump to adjust the opening degree of the pressure regulating unit and the working frequency of the liquid pump, thus solving the problem that the frequent opening and closing of the safety valve makes the system pressure regulation unreliable. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiment description will be briefly introduced as follows. Obviously, the drawings in the following description only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained without creative labor on the basis of these drawings.

[0021] Figure 1 The system structure schematic diagram of the temperature control system of the embodiment of the present application

[0022] Figure 2 The flowchart of the pressure regulating method of the embodiment of the present application

[0023] Figure 3 The flowchart of step S210 of the embodiment of the present application

[0024] Figure 4 The flowchart of the working frequency of the liquid pump of step S213 of the embodiment of the present application.

[0025] Explanation of reference signs:

[0026] 1, circulating liquid supply unit; 11, liquid tank; 12, liquid level detector; 13, liquid supplement regulating valve; 14, main road electromagnetic valve; 15, standby electromagnetic valve; 2, liquid pump; 3, temperature regulating unit; 31, refrigeration device; 32, heater; 4, pressure regulating unit; 5, pressure detecting unit; 51, pressure sensor; 52, temperature sensor; 53, flow sensor. DETAILED DESCRIPTION

[0027] Example embodiments now will be described more fully hereinafter with reference to the accompanying drawings. Example embodiments, however, can be implemented in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of example embodiments to those skilled in the art. Like reference numerals refer to like elements throughout the description. Repetitive descriptions of like elements will be omitted for sake of brevity.

[0028] The described features, structures, or characteristics can be combined in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the techniques described can be practiced without one or more of the specific details, or with other methods, components, materials, and so forth. In these instances, well-known structures, methods, devices, implementations, materials, and operations are not shown or described in detail.

[0029] Furthermore, the terms "comprise", "comprising", "include", "including", and "has", "having", and any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or apparatus that comprises a list of steps or units is not necessarily limited to the listed steps or units, but can optionally include additional steps or units not expressly listed or inherent to such process, method, product, or apparatus.

[0030] The terms "first", "second", and the like in the description and in the claims of the present application and above drawings are used to distinguish different objects, rather than to describe a particular sequential order.

[0031] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative efforts fall within the scope of protection of the present application.

[0032] According to an aspect of the present application, an embodiment of the present application provides a temperature control system. Figure 1 The system architecture of the temperature control system of the embodiment of the present application is shown. Referring to Figure 1 The temperature control system comprises a circulating liquid supply unit 1, a liquid pump 2, a temperature regulating unit 3, a pressure regulating unit 4, a pressure detecting unit 5, and a control unit.

[0033] According to an example embodiment, the circulating liquid supply unit 1 is configured to supply circulating liquid.

[0034] The liquid pump 2 comprises an input end and an output end. The temperature regulating unit 3 comprises a temperature regulating input end and a temperature regulating output end. The input end of the liquid pump 2 is connected with the circulating liquid supply unit 1, and the output end of the liquid pump 2 is connected with the temperature regulating input end of the temperature regulating unit 3. The temperature regulating output end of the temperature regulating unit 3 is configured to be connected with an external liquid device.

[0035] The liquid pump 2 draws circulating liquid from the circulating liquid supply unit 1 and outputs to the temperature regulating unit 3. The temperature regulating unit 3 regulates the temperature of the circulating liquid, and the temperature-regulated circulating liquid can be output to the external liquid device. The external liquid device can use the temperature-regulated circulating liquid to regulate the temperature, thereby performing corresponding work.

[0036] According to some embodiments, the temperature regulating unit 3 can comprise a refrigerating device 31 and a heater 32. The refrigerating device 31 is configured to lower the temperature of the circulating liquid, and the heater 32 is configured to raise the temperature of the circulating liquid.

[0037] Exemplarily, the circulating liquid can be water, and the liquid pump 2 can be a water pump. The circulating liquid can also be other cooling liquids such as oil, which is not described here.

[0038] According to an example embodiment, one end of the pressure regulating unit 4 is also connected to the temperature regulating output end of the temperature regulating unit 3, and the other end of the pressure regulating unit 4 is connected to the circulating liquid supply unit 1.

[0039] Exemplarily, part of the circulating liquid that has been temperature regulated by the temperature regulating unit 3 flows into the external liquid device to be used by the external liquid device, and the circulating liquid that has not been used by the external liquid device can flow into the circulating liquid supply unit 1 through the pressure regulating unit 4, so that the circulating liquid can continue to be used and waste can be reduced.

[0040] Exemplarily, the pressure regulating unit 4 can be a pressure regulating valve, and the opening degree of the pressure regulating valve can be adjusted to adjust the flow rate of the circulating liquid per unit time flowing through the pressure regulating unit 4. The greater the opening degree, the greater the flow rate.

[0041] According to an example embodiment, the pressure detecting unit 5 is arranged at the temperature regulating output end of the temperature regulating unit 3, and is used to detect the pressure of the circulating liquid at the temperature regulating output end to output system pressure data.

[0042] Exemplarily, the pressure detecting unit 5 can specifically include a pressure sensor 51.

[0043] According to some embodiments, the pressure detecting unit 5 can further include a temperature sensor 52 to measure the temperature of the circulating liquid at the temperature regulating output end to output circulating liquid temperature data, which is not limited herein.

[0044] According to some embodiments, the pressure detecting unit 5 can further include a flow sensor 53 to measure the flow rate of the circulating liquid output by the temperature regulating output end to the external liquid device.

[0045] According to an example embodiment, the control unit is electrically connected with the pressure detecting unit 5, the pressure regulating unit 4 and the liquid pump 2, respectively, to regulate the opening degree of the pressure regulating unit 4 and the working frequency of the liquid pump 2 according to the system pressure data measured by the pressure detecting unit 5, so as to adjust the pressure of the circulating liquid in the temperature control system.

[0046] Exemplarily, in the case that the system pressure is large, the control unit can increase the opening degree of the pressure regulating unit 4 to accelerate the circulation of the circulating liquid, so as to relieve the system pressure. In addition, in the case that the system pressure is large, the control unit can also reduce the working frequency of the liquid pump 2 to reduce the flow rate of the circulating liquid in the system, so as to reduce the system pressure.

[0047] Similarly, in the case that the system pressure is relatively small, the control unit can also reduce the opening degree of the pressure regulating unit 4 to reduce the flow rate of the circulating liquid, so as to regulate the system pressure to the normal level. And in the case that the system pressure is relatively small, the control unit can also increase the working frequency of the liquid pump 2 to increase the flow of the circulating liquid of the system, so as to regulate the system pressure to the normal level.

[0048] Through the above embodiment, the system pressure can be regulated to the normal level range by the pressure detection unit 5 detecting the system pressure, and the control unit regulating the pressure regulating unit 4 and the liquid pump 2 according to the system pressure data detected by the pressure detection unit 5. In this way, on the one hand, the system pressure can be effectively prevented from being too large, and on the other hand, the temperature control system of the present application does not use a safety valve, but uses the pressure regulating unit 4 and the liquid pump 2 to regulate the opening degree of the pressure regulating unit 4, which also solves the problem that the safety valve frequently opens and closes to make the system pressure regulation unreliable.

[0049] According to some embodiments, when controlling the opening degree of the pressure regulating unit 4, the control unit can first determine the current system pressure value according to the received system pressure data.

[0050] For example, when the pressure detection unit 5, i.e. the pressure sensor 51, currently measures the pressure of the temperature-regulating output end to be 20 pa, the current system pressure value is 20 pa.

[0051] Then the control unit determines the relative size of the current system pressure value and the first preset upper pressure limit value and the first preset lower pressure limit value.

[0052] The first preset upper pressure limit value and the first preset lower pressure limit value are determined by the user according to the preset target pressure value. The preset target pressure value is the pressure value of the system expected by the user, for example, the target value is 5.

[0053] The first preset upper pressure limit value is obtained by increasing the first pressure value based on the preset target pressure value. For example, the first preset upper pressure limit value is 5.1.

[0054] The first preset lower pressure limit value is obtained by reducing the second pressure value based on the preset target pressure value. The first pressure value and the second pressure value can be equal or not equal, which is not limited here. For example, the first preset lower pressure limit value can be 4.9.

[0055] It is worth mentioning that the first preset pressure upper limit value should be less than the system pressure upper limit value. The system pressure upper limit value is an upper limit of the pressure of the circulating liquid in the temperature control system, and in the case that the pressure of the circulating liquid exceeds the system pressure upper limit value, the temperature control system will have a risk of damage, for example, there is a risk of damage to the circulating liquid flow pipeline and damage to the liquid pump 2.

[0056] And the first preset pressure lower limit value should be greater than the system pressure lower limit value. The system pressure lower limit value is a lower limit of the pressure of the circulating liquid in the temperature control system, and in the case that the pressure of the circulating liquid is lower than the system pressure lower limit value, the temperature control system will have a risk of not working properly.

[0057] That is, the system pressure lower limit value < the first preset pressure lower limit value < the preset target pressure value < the first preset pressure upper limit value < the system pressure upper limit value.

[0058] After the control unit determines the relative sizes of the current system pressure value and the first preset pressure upper limit value and the first preset pressure lower limit value. In the case that the current system pressure value is greater than or equal to the first preset pressure upper limit value, or in the case that the current system pressure value is less than or equal to the first preset pressure lower limit value, the control unit can adjust the opening of the pressure adjusting unit 4 to adjust the pressure of the circulating liquid in the temperature control system.

[0059] For example, in the case that the current system pressure value is greater than or equal to the first preset pressure upper limit value, the control unit can increase the opening of the pressure adjusting unit 4.

[0060] For example, in the case that the current system pressure value is less than or equal to the first preset pressure lower limit value, the control unit can decrease the opening of the pressure adjusting unit 4.

[0061] Specifically, the control unit can control the opening of the pressure adjusting unit 4 in the following manner: according to the current system pressure value and the preset target pressure value, performing a PID (Proportional-Integral-Derivative) calculation to obtain a target opening, and adjusting the opening of the pressure adjusting unit 4 to the target opening.

[0062] According to some embodiments, the control unit also determines the relative sizes of the current system pressure value and the second preset pressure upper limit value and the second preset pressure lower limit value, respectively.

[0063] The second preset pressure upper limit value and the second preset pressure lower limit value can be determined by the user according to the preset target pressure value.

[0064] The second preset pressure upper limit value can be obtained by increasing a third pressure value on the basis of the preset target pressure value.

[0065] The second preset pressure lower limit value can be obtained by reducing the fourth pressure value on the basis of the preset target pressure value.

[0066] It is worth noting that the third pressure value and the fourth pressure value can be equal or not equal, which is not limited here.

[0067] According to the example embodiment, the second preset pressure upper limit value should also be less than the system pressure upper limit value. The second preset pressure lower limit value should also be greater than the preset system pressure lower limit value.

[0068] And the second preset pressure upper limit value is greater than the first preset pressure upper limit value, and the second preset pressure lower limit value is less than the first preset pressure lower limit value.

[0069] For example, the second preset pressure upper limit value can be 5.4, and the second preset pressure lower limit value can be 4.6.

[0070] That is, the system pressure lower limit value < the second preset pressure lower limit value < the first preset pressure lower limit value < the preset target pressure value < the first preset pressure upper limit value < the second preset pressure upper limit value < the system pressure upper limit value.

[0071] According to the example embodiment, in the case where the current system pressure value is greater than the second preset pressure upper limit value, or the current system pressure value is less than the second preset pressure lower limit value, at this time the current system pressure value also exceeds the first preset pressure upper limit value, or the current system pressure value is also lower than the first preset pressure lower limit value.

[0072] In this case, the control unit controls the working frequency of the liquid pump 2 while controlling the opening degree of the pressure regulating unit 4, so as to realize the adjustment of the pressure of the circulating liquid by regulating the working frequency of the liquid pump 2.

[0073] For example, in the case where the current system pressure value is 5.2, the control unit adjusts the opening degree of the pressure regulating unit 4. If the control unit cannot effectively control the pressure of the circulating liquid by adjusting the pressure regulating unit 4, and the pressure of the circulating liquid is still rising. Assuming that in the case where the pressure of the circulating liquid rises to 5.4, the control unit controls the working frequency of the liquid pump 2 while adjusting the opening degree of the pressure regulating unit 4, so as to adjust the opening degree of the pressure regulating valve and the working frequency of the liquid pump 2 to reduce the pressure of the circulating liquid of the current system. In this way, the pressure of the circulating liquid can be effectively adjusted, so that the pressure of the circulating liquid of the temperature control system can be limited within the normal pressure range.

[0074] According to some embodiments, in the case that the current system pressure value is greater than or equal to the second preset upper pressure limit value, the control unit controls the operating frequency of the liquid pump 2 in a manner to adjust the pressure of the circulating liquid of the temperature control system, which can specifically include that the control unit controls the liquid pump 2 to operate in a first preset manner until the current system pressure value is less than the second preset upper pressure limit value.

[0075] The first preset manner is a manner in which the operating frequency of the liquid pump 2 is reduced by a first preset frequency value per second.

[0076] In the case that the pressure of the circulating liquid of the temperature control system is within the normal range, the operating frequency of the liquid pump 2 is usually a fixed value, i.e., a preset target frequency. For example, the preset target frequency is 50 Hz.

[0077] Exemplarily, in the case that the current system pressure value is 5.4, the control unit controls the operating frequency of the liquid pump 2 to be reduced by 5 Hz per second.

[0078] In the case that the current system pressure value is less than the second preset upper pressure limit value and greater than the second preset lower pressure limit value, i.e., the pressure of the circulating liquid of the current temperature control system is within the normal range, the operating frequency of the liquid pump 2 can be adjusted to the preset target frequency again in this case to continue to operate at the preset target frequency.

[0079] That is, in the case that the current system pressure value is between the second preset upper pressure limit value and the second preset lower pressure limit value, the control unit controls the liquid pump 2 to operate in a second preset manner according to the current frequency of the liquid pump 2 and the preset target frequency until the operating frequency of the liquid pump 2 reaches the preset target frequency.

[0080] The second preset manner is a manner in which the operating frequency of the liquid pump 2 is changed by a second preset frequency value per second. Moreover, the first preset frequency value is greater than the second preset frequency value.

[0081] Exemplarily, in the case that the operating frequency of the liquid pump 2 is reduced to 25 Hz, the control unit detects that the current system pressure value is less than the second preset upper pressure limit value and greater than the second preset lower pressure limit value. In this case, the control unit can control the liquid pump 2 to operate in a manner in which the frequency is increased by 2 Hz per second until the operating frequency of the liquid pump 2 is adjusted to 50 Hz.

[0082] In this way, when the pressure of the circulating liquid of the current temperature control system is not in the normal range, the pressure of the circulating liquid of the current temperature control system can be quickly adjusted to be in the normal range by quickly adjusting the working frequency of the liquid pump 2. When the pressure of the circulating liquid of the current temperature control system is adjusted to be in the normal range, the working frequency of the liquid pump 2 can be gradually stabilized to the preset target frequency by slowly adjusting the working frequency of the liquid pump 2. This abnormal fast adjustment and normal slow adjustment mode is beneficial to improve the stability of the temperature control system.

[0083] According to some embodiments, when the current system pressure value is less than or equal to the second preset lower pressure limit value, the control unit controls the liquid pump 2 to operate in a third preset manner until the current system pressure value is greater than the second preset lower pressure limit value.

[0084] According to an example embodiment, the third preset manner is that the working frequency of the liquid pump 2 is increased by a third preset frequency value per second, and the third preset frequency value is also greater than the second preset frequency value.

[0085] It is worth noting that the third preset frequency value can be equal to or not equal to the first preset frequency value, which is not limited here.

[0086] For example, when the pressure of the circulating liquid of the current temperature control system is 4.5, the current system pressure value is less than the second preset lower pressure limit value 4.6, and the control unit controls the working frequency of the liquid pump 2 to start increasing by 5Hz per second to increase the pressure of the circulating liquid of the current temperature control system, so that the pressure of the circulating liquid of the current temperature control system is restored to the normal range.

[0087] According to some embodiments, when the pressure of the circulating liquid of the current temperature control system is restored to the normal range, that is, when the current system pressure value is between the second preset lower pressure limit value and the second preset upper pressure limit value, the control unit can continue to control the working frequency of the liquid pump 2 to operate in a manner that changes by a second preset frequency value per second until the working frequency of the liquid pump 2 reaches the preset target frequency.

[0088] For example, when the current system pressure value is between the second preset lower pressure limit value and the second preset upper pressure limit value, the control unit can determine the relative size of the current frequency of the liquid pump 2 and the preset target frequency. When the current frequency of the liquid pump 2 is greater than the preset target frequency, the control unit controls the working frequency of the liquid pump 2 to operate in a manner that increases by the second preset frequency value per second. When the current frequency of the liquid pump 2 is less than the preset target frequency, the control unit controls the working frequency of the liquid pump 2 to operate in a manner that decreases by the second preset frequency value per second until the working frequency of the liquid pump 2 reaches the preset target frequency.

[0089] Through the above embodiment, in the case that the pressure of the circulating liquid is lower than the lower limit value of the second preset pressure, the control unit adjusts the opening of the pressure regulating unit 4, and at the same time adjusts the working frequency of the liquid pump 2. And in the case that the pressure of the circulating liquid is lower than the lower limit value of the second preset pressure, the control unit controls the working frequency of the liquid pump 2 to rise rapidly, so as to adjust the pressure of the circulating liquid to the normal range rapidly. And in the case that the pressure of the circulating liquid is between the lower limit value and the upper limit value of the second preset pressure, the control unit controls the working frequency of the liquid pump 2 to decrease slowly, so as to adjust the working frequency of the liquid pump 2 to the preset target frequency for working. Through the mode of abnormally fast adjustment and normal slow adjustment, the stability of the temperature control system is beneficial.

[0090] According to some embodiments, the circulating liquid supply unit 1 can specifically include a liquid tank 11, a liquid level detector 12 arranged in the liquid tank 11, a liquid supplement adjusting valve 13 arranged outside the liquid tank 11, a main road electromagnetic valve 14 arranged outside the liquid tank 11, and a standby electromagnetic valve 15 arranged outside the liquid tank 11.

[0091] The liquid tank 11 includes a first liquid inlet, a second liquid inlet, a circulating liquid inlet, and a liquid outlet. The liquid tank 11 is used to hold the circulating liquid.

[0092] The circulating liquid inlet is connected with the other end of the pressure regulating unit 4, so as to receive the circulating liquid circulated through the pressure regulating unit 4.

[0093] The first liquid inlet is communicated with one end of the liquid supplement adjusting valve 13, and the other end of the liquid supplement adjusting valve 13 is connected with one end of the main road electromagnetic valve 14. The other end of the main road electromagnetic valve 14 is communicated with an external liquid supply device. The external liquid supply device is used to deliver the circulating liquid into the liquid tank 11.

[0094] The second liquid inlet is communicated with one end of the standby electromagnetic valve 15, and the other end of the standby electromagnetic valve 15 is communicated with one end of the main road electromagnetic valve 14.

[0095] The liquid outlet is connected with the liquid pump 2. The liquid pump 2 can draw the circulating liquid from the liquid tank 11 through the liquid outlet.

[0096] According to the example embodiment, the circulating liquid delivered by the external liquid supply device can flow into the liquid tank 11 through the main road electromagnetic valve 14 and the liquid supplement adjusting valve 13 in sequence, and can also flow into the liquid tank 11 through the main road electromagnetic valve 14 and the standby electromagnetic valve 15. The liquid pump 2 can draw the circulating liquid from the liquid tank 11, and deliver the circulating liquid to the temperature regulating unit 3 for temperature regulation and then to the external liquid using device.

[0097] According to an example embodiment, the main electromagnetic valve 14 and the backup electromagnetic valve 15 are both electromagnetic valves, in a first state when energized and in a second state when not energized. For example, the main electromagnetic valve 14 is opened when energized and is closed when not energized.

[0098] According to an example embodiment, the makeup regulating valve 13 is an electric regulating valve, and the opening degree is adjustable. By adjusting the opening degree of the makeup regulating valve 13, the flow rate of the circulating liquid flowing through the makeup regulating valve 13 can be adjusted.

[0099] According to some embodiments, in order to meet the demand of the external liquid device for the circulating liquid, the liquid level of the circulating liquid in the liquid tank 11 should be maintained within a preset liquid level range. In the case that the liquid level of the circulating liquid is too high, the circulating liquid in the liquid tank 11 is prone to overflow.

[0100] In the case that the liquid level of the circulating liquid is too low, the circulating liquid in the liquid tank 11 can be difficult to meet the demand of the external liquid device for the liquid. Moreover, in the case that the liquid level of the circulating liquid is too low, the liquid pump 2 is prone to be empty when pumping the circulating liquid from the liquid tank 11, and thus the liquid pump 2 is prone to be damaged.

[0101] Therefore, the liquid level detector 12 is further arranged in the liquid tank 11, which is used to detect the liquid level of the circulating liquid in the liquid tank 11 and output the liquid level information.

[0102] The control unit is further electrically connected with the liquid level detector 12, the makeup regulating valve 13, the main electromagnetic valve 14 and the backup electromagnetic valve 15, and controls the opening and closing states of the makeup regulating valve 13, the main electromagnetic valve 14 and the backup electromagnetic valve 15 according to the liquid level information, so as to adjust the liquid level of the liquid tank 11.

[0103] For example, the control unit can determine the liquid level of the circulating liquid in the liquid tank 11 according to the liquid level information. In the case that the liquid level is lower than a preset minimum alarm limit, the control unit can control the main electromagnetic valve 14, the backup electromagnetic valve 15 and the makeup regulating valve 13 to be all closed, and output a shutdown alarm instruction to alarm, so as to make the liquid pump 2 and the like shut down, and reduce the probability of damage caused by the liquid level being too low to the liquid pump 2.

[0104] In the case that the liquid level is between the preset minimum alarm limit and a preset minimum running limit, the control unit can control the main electromagnetic valve 14 and the backup electromagnetic valve 15 to be opened, and control the opening degree of the makeup regulating valve 13 to be maximum, so as to supplement the circulating liquid in the liquid tank 11 in time.

[0105] When the liquid level is between the preset low operating limit and the preset high operating limit, the control unit can control the main electromagnetic valve 14 to open, control the standby electromagnetic valve 15 to close, and control the opening of the liquid supplementing valve 13 according to the real-time liquid level, so as to maintain the liquid level of the circulating liquid in the liquid tank 11 between the preset low operating limit and the preset high operating limit.

[0106] When the liquid level is higher than the preset high operating limit, the control unit can control the main electromagnetic valve 14 to close, control the standby electromagnetic valve 15 to close, and control the liquid supplementing valve 13 to close, so as to prevent the liquid level of the circulating liquid in the liquid tank 11 from overflowing.

[0107] Exemplarily, the preset minimum alarm limit is less than the preset low operating limit, which is less than the preset high operating limit.

[0108] By controlling the opening of the liquid supplementing valve 13, the main electromagnetic valve 14 and the standby electromagnetic valve 15 according to the liquid level of the circulating liquid in the liquid tank 11 detected by the liquid level detector 12, the liquid level of the circulating liquid in the liquid tank 11 can be timely supplemented when the liquid level is too low and stopped when the liquid level is too high, so that the liquid level of the circulating liquid in the liquid tank 11 is within the preset range, the liquid demand of the external liquid device is met, and the adverse effects of the liquid level of the circulating liquid in the liquid tank 11 being too low or too high on the temperature control system are reduced.

[0109] According to another aspect of the present application, the embodiments of the present application further provide a pressure regulation method of a temperature control system. The temperature control system can be the temperature control system described in the above embodiments. The pressure regulation method can be performed by the control unit of the temperature control system.

[0110] Figure 2 The steps of the pressure regulation method are shown. Referring to Figure 2 , the pressure regulation method comprises step S210.

[0111] In step S210, the control unit regulates the opening of the pressure regulation unit and the working frequency of the liquid pump according to the system pressure data output by the pressure sensor, so as to regulate the pressure of the circulating liquid of the temperature control system.

[0112] The system pressure data is obtained by the pressure detection unit in the temperature control system detecting the system pressure. In step S210, the control unit can regulate the opening of the pressure regulation unit and the working frequency of the liquid pump according to the system pressure data detected by the pressure detection unit, so as to regulate the system pressure to be within the normal range.

[0113] For example, in the case of high system pressure, the control unit can control the opening of the pressure regulating unit to increase, and also can control the working frequency of the liquid pump to decrease at the same time, so as to reduce the pressure of the circulating liquid of the temperature control system, so as to adjust the pressure of the circulating liquid of the temperature control system to the normal range.

[0114] Correspondingly, in the case of low system pressure, the control unit can control the opening of the pressure regulating unit to decrease, and also can control the working frequency of the liquid pump to increase at the same time, so as to increase the pressure of the circulating liquid of the temperature control system, so as to adjust the pressure of the circulating liquid of the temperature control system to the normal range.

[0115] In this way, on the one hand, the system pressure can be effectively prevented from being too high, and on the other hand, the temperature control system of the present application does not use a safety valve, but uses a pressure regulating unit and a liquid pump, and adjusts the opening of the pressure regulating unit and the frequency of the liquid pump, so that the problem of unreliable system pressure regulation caused by frequent opening and closing of the safety valve is also solved.

[0116] According to some embodiments, with reference to Figure 3 In step S210, the control unit adjusts the opening of the pressure regulating unit and the working frequency of the liquid pump according to the system pressure data output by the pressure sensor, so as to adjust the pressure of the circulating liquid of the temperature control system, which can specifically include steps S211, S212 and S213.

[0117] In step S211, the control unit determines the current system pressure value according to the system pressure data.

[0118] In step S212, the control unit adjusts the opening of the pressure regulating unit according to the system pressure value and the preset target pressure value in the case that the system pressure value is greater than or equal to the first preset upper pressure limit value, or the system pressure value is less than or equal to the first preset lower pressure limit value, so as to adjust the pressure of the circulating liquid of the temperature control system.

[0119] In step S213, the control unit adjusts the working frequency of the liquid pump and the opening of the pressure regulating unit in the case that the system pressure value is greater than or equal to the second preset upper pressure limit value, or the system pressure value is less than or equal to the second preset lower pressure limit value, so as to adjust the pressure of the circulating liquid of the temperature control system.

[0120] According to some embodiments, with reference to Figure 4 In step S213, the control unit adjusts the working frequency of the liquid pump, which can be implemented through steps S2131, S2132 and S2133.

[0121] In step S2131, the control unit controls the liquid pump to operate in a first preset manner when the system pressure value is greater than or equal to the second preset upper pressure limit value, until the current system pressure value is less than the second preset upper pressure limit value.

[0122] In step S2132, the control unit controls the liquid pump to operate in a second preset manner according to the current frequency of the liquid pump and a preset target frequency when the system pressure value is between the second preset upper pressure limit value and a second preset lower pressure limit value, until the operating frequency of the liquid pump reaches the preset target frequency.

[0123] In step S2132, the control unit controls the liquid pump to operate in a third preset manner when the system pressure value is less than or equal to the second preset lower pressure limit value, until the current system pressure value is greater than the second preset lower pressure limit value.

[0124] The third preset manner is that the operating frequency of the liquid pump increases by a third preset frequency value per second, the first preset manner is that the operating frequency of the liquid pump decreases by a first preset frequency value per second, and the second preset manner is that the operating frequency of the liquid pump changes by a second preset frequency value per second.

[0125] The first preset frequency value is greater than the second preset frequency value, and the third preset frequency value is greater than the second preset frequency value.

[0126] It should be noted that those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the pressure regulation method performed by the control unit described above can refer to the corresponding process in the foregoing temperature control system embodiments, which will not be described here.

[0127] According to another aspect of the present application, the embodiments of the present application also provide a semiconductor process system, which comprises a semiconductor process device and the temperature control system described above.

[0128] The semiconductor process device is connected with the temperature adjusting output end of the temperature adjusting unit of the temperature control system, receives the circulating liquid after temperature adjustment of the temperature adjusting unit, and performs semiconductor process manufacturing.

[0129] It should be clearly understood that the present application describes how to form and use specific examples, but the present application is not limited to any details of these examples. On the contrary, based on the teachings of the disclosure of the present application, these principles can be applied to many other embodiments.

[0130] Finally, it should be noted that the above are only preferred embodiments of the present application and are not intended to limit the present application. Although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions of the foregoing embodiments or make equivalent replacements to some technical features thereof. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A temperature control system, characterized by, The temperature control system comprises: a circulating liquid supply unit for supplying circulating liquid; a liquid pump having an input end in communication with the circulating liquid supply unit for drawing the circulating liquid from the circulating liquid supply unit; a temperature regulating unit having a temperature regulating input end connected to an output end of the liquid pump for regulating the temperature of the circulating liquid output by the liquid pump, and a temperature regulating output end connected to an external liquid device for supplying the external liquid device with the temperature-regulated circulating liquid; a pressure regulating unit having one end connected to the temperature regulating output end and the other end connected to the circulating liquid supply unit for circulating unused circulating liquid into the circulating liquid supply unit; a pressure detecting unit for detecting the pressure of the circulating liquid at the temperature regulating output end and outputting system pressure data; a control unit electrically connected to the pressure detecting unit, the pressure regulating unit and the liquid pump, and configured to regulate the opening degree of the pressure regulating unit and the working frequency of the liquid pump according to the system pressure data received from the pressure detecting unit, so as to regulate the pressure of the circulating liquid in the temperature control system.

2. The temperature control system of claim 1, wherein, The control unit determines a current system pressure value according to the system pressure data. The control unit determines the relative sizes of the current system pressure value, a first preset upper pressure limit value and a first preset lower pressure limit value. The control unit adjusts the opening degree of the pressure regulating unit according to the current system pressure value and a preset target pressure value, so as to regulate the pressure of the circulating liquid in the temperature control system, when the current system pressure value is greater than or equal to the first preset upper pressure limit value or less than or equal to the first preset lower pressure limit value. The first preset upper pressure limit value is obtained by adding a first pressure value to the preset target pressure value. The first preset lower pressure limit value is obtained by subtracting a second pressure value from the preset target pressure value. The first preset lower pressure limit value < the preset target pressure value < the first preset upper pressure limit value < a system upper pressure limit value.

3. The temperature control system according to claim 2, wherein: The control unit determines the relative sizes of the current system pressure value, a second preset upper pressure limit value and a second preset lower pressure limit value. The control unit adjusts the working frequency of the liquid pump and the opening degree of the pressure regulating unit, so as to regulate the pressure of the circulating liquid in the temperature control system, when the current system pressure value is greater than or equal to the second preset upper pressure limit value or less than or equal to the second preset lower pressure limit value. The second preset upper pressure limit value is obtained by adding a third pressure value to the preset target pressure value. The second preset lower pressure limit value is obtained by subtracting a fourth pressure value from the preset target pressure value. The system lower pressure limit value < the second preset lower pressure limit value < the first preset lower pressure limit value < the preset target pressure value < the first preset upper pressure limit value < the second preset upper pressure limit value < the system upper pressure limit value.

4. The temperature control system of claim 2, wherein: the control unit controls the liquid pump to operate in a first preset mode when the current system pressure value is greater than or equal to a second preset upper pressure limit value, until the current system pressure value is less than the second preset upper pressure limit value, the first preset mode being a mode in which the operating frequency of the liquid pump is decreased by a first preset frequency value per second; the control unit controls the liquid pump to operate in a second preset mode according to the current frequency of the liquid pump and a preset target frequency when the current system pressure value is between the second preset upper pressure limit value and a second preset lower pressure limit value, until the operating frequency of the liquid pump reaches the preset target frequency, the second preset mode being a mode in which the operating frequency of the liquid pump is changed by a second preset frequency value per second; and the first preset frequency value is greater than the second preset frequency value.

5. The temperature control system of claim 4, wherein: the control unit controls the liquid pump to operate in a third preset mode when the current system pressure value is less than or equal to the second preset lower pressure limit value, until the current system pressure value is greater than the second preset lower pressure limit value, the third preset mode being a mode in which the operating frequency of the liquid pump is increased by a third preset frequency value per second; and the third preset frequency value is greater than the second preset frequency value.

6. The temperature control system of any one of claims 1-5, wherein: the circulation liquid supply unit comprises: a liquid tank comprising a first liquid inlet, a second liquid inlet, a circulation liquid inlet, and a liquid outlet, the liquid tank containing circulation liquid; the circulation liquid inlet is connected to the other end of the pressure regulating unit to receive circulation liquid; the liquid outlet is connected to the liquid pump to output the circulation liquid in the liquid tank; a liquid level detector disposed in the liquid tank to detect the liquid level of the circulation liquid in the liquid tank and output a liquid level signal; a liquid supplement regulating valve disposed outside the liquid tank, one end of the liquid supplement regulating valve being in communication with the first liquid inlet; a main electromagnetic valve disposed outside the liquid tank, one end of the main electromagnetic valve being in communication with the other end of the liquid supplement regulating valve, the other end of the main electromagnetic valve being in communication with an external liquid supply device to receive circulation liquid delivered by the external liquid supply device; and a standby electromagnetic valve disposed outside the liquid tank, one end of the standby electromagnetic valve being in communication with the second liquid inlet, the other end of the standby electromagnetic valve being in communication with one end of the main electromagnetic valve; and the control unit is further electrically connected to the liquid level detector, the liquid supplement regulating valve, the main electromagnetic valve, and the standby electromagnetic valve, and controls the opening and closing states of the liquid supplement regulating valve, the main electromagnetic valve, and the standby electromagnetic valve according to the liquid level signal to regulate the liquid level of the liquid tank.

7. The temperature control system of any one of claims 1-6, wherein the pressure regulating method comprises: regulating the opening degree of the pressure regulating unit and the operating frequency of the liquid pump according to the system pressure data output by the pressure detection unit to regulate the pressure of the circulation liquid of the temperature control system. ​ ​ ​ 6. The temperature control system of claim 1, wherein, ​ ​ ​ ​ ​ ​ ​ ​ ​ 7. A pressure regulating method for a temperature control system, characterized by, ​ ​ 8. The pressure regulating method of claim 7, wherein, The system pressure data outputted by the pressure detection unit is used to adjust the opening of the pressure regulating unit and the working frequency of the liquid pump to regulate the pressure of the circulating liquid of the temperature control system, comprising: determining the current system pressure value according to the system pressure data; in the case that the current system pressure value is greater than or equal to the first preset upper limit pressure value, or in the case that the current system pressure value is less than or equal to the first preset lower limit pressure value, adjusting the opening of the pressure regulating unit according to the current system pressure value and the preset target pressure value to regulate the pressure of the circulating liquid of the temperature control system; in the case that the current system pressure value is greater than or equal to the second preset upper limit pressure value, or in the case that the current system pressure value is less than or equal to the second preset lower limit pressure value, adjusting the working frequency of the liquid pump and the opening of the pressure regulating unit to regulate the pressure of the circulating liquid of the temperature control system.

9. The pressure regulating method of claim 8, wherein, The adjustment of the working frequency of the liquid pump comprises: in the case that the current system pressure value is greater than or equal to the second preset upper limit pressure value, controlling the liquid pump to run in a first preset manner until the current system pressure value is less than the second preset upper limit pressure value, the first preset manner being that the working frequency of the liquid pump decreases by a first preset frequency value per second; in the case that the current system pressure value is between the second preset upper limit pressure value and the second preset lower limit pressure value, controlling the liquid pump to run in a second preset manner according to the current frequency of the liquid pump and the preset target frequency until the working frequency of the liquid pump reaches the preset target frequency, the second preset manner being that the working frequency of the liquid pump changes by a second preset frequency value per second; in the case that the current system pressure value is less than or equal to the second preset lower limit pressure value, controlling the liquid pump to run in a third preset manner until the current system pressure value is greater than the second preset lower limit pressure value, the third preset manner being that the working frequency of the liquid pump increases by a third preset frequency value per second; wherein the first preset frequency value is greater than the second preset frequency value; the third preset frequency value is greater than the second preset frequency value.

10. A semiconductor processing system, comprising: comprising: the temperature control system of any one of claims 1-6; semiconductor process equipment connected to the temperature regulating output end of the temperature regulating unit of the temperature control system to receive the circulating liquid after temperature regulation of the temperature regulating unit to manufacture semiconductor processes.

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