Semiconductor process equipment, log processing method thereof and storage medium

Abstract

The invention discloses semiconductor process equipment, a log processing method thereof and a storage medium. The method comprises the steps that log data of semiconductor process equipment are recorded, and the log data comprise process parameter data and log information; performing data analysis on the process parameter data to obtain a data analysis result; performing window display on the log information needing to be displayed; and generating a log file according to the log information and the data analysis result. According to the method, recording, analysis and display are integrated, automatic data analysis of the technological parameter data can be achieved, manual secondary processing is not needed, a large amount of manpower is saved, errors are not prone to occurring, the efficiency of data analysis and troubleshooting is improved, meanwhile, user interface display of log information can be achieved, a user can conveniently check the log information, and the user experience is improved. And the efficiency of user data analysis and troubleshooting is further improved.

Description

Technical Field

[0001] The present application belongs to the field of data processing technology, and in particular, relates to a log processing method for semiconductor process equipment, semiconductor process equipment, and a storage medium. Background Art

[0002] A horizontal furnace is a heating device used to produce semiconductor devices. Currently, the horizontal furnace has achieved automated production, but during the production process, the horizontal furnace has high requirements for the production environment and needs to analyze process temperature, gas pressure, torque and other parameter data to judge the process performance.

[0003] In the related technology, manual analysis is used. Due to the large amount of statistical data, a lot of manpower is needed to do the corresponding process data analysis, which is not only prone to errors, but also reduces the efficiency of data analysis and problem troubleshooting. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a log processing method for semiconductor process equipment, semiconductor process equipment and storage medium, so as to solve the problem in the related art that analyzing process data consumes a lot of manpower, is prone to errors and reduces the efficiency of data analysis and problem troubleshooting.

[0005] To achieve the above objectives, the present application embodiment adopts the following technical solutions:

[0006] In a first aspect, an embodiment of the present application provides a log processing method for semiconductor process equipment, comprising: recording log data of semiconductor process equipment, wherein the log data includes process parameter data and log information; performing data analysis on the process parameter data to obtain data analysis results; displaying the log information that needs to be displayed in a window; and generating a log file based on the log information and the data analysis results.

[0007] In a second aspect, an embodiment of the present application provides a semiconductor process equipment, comprising: a processor, a memory, and a program or instruction stored in the memory and executable on the processor, wherein when the program or instruction is executed by the processor, the steps of the log processing method for the semiconductor process equipment as described in the embodiment of the first aspect of the present application are implemented.

[0008] In a third aspect, an embodiment of the present application provides a readable storage medium, on which a program or instruction is stored. When the program or instruction is executed by a processor, the steps of the log processing method for semiconductor process equipment as described in the embodiment of the first aspect of the present application are implemented.

[0009] At least one of the above technical solutions adopted in the embodiments of the present application can achieve the following beneficial effects:

[0010] When processing log data, the embodiment of the present application first records the log data of the semiconductor process equipment, the log data includes process parameter data and log information, and then performs data analysis on the process parameter data to obtain data analysis results, generates a log file based on the log information and the data analysis results, and displays the log information to be displayed in a window. The embodiment of the present application integrates recording, analysis and display, and can realize automatic data analysis of process parameter data without manual secondary processing, saving a lot of manpower, not prone to errors, and improving the efficiency of data analysis and troubleshooting. At the same time, it can realize the user interface display of log information, which is convenient for users to view, and further improves the efficiency of user data analysis and troubleshooting. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0012] Figure 1 A flow chart of a log processing method for semiconductor process equipment provided by one embodiment of the present application;

[0013] Figure 2 A flow chart of a log processing method for semiconductor process equipment provided in another embodiment of the present application;

[0014] Figure 3 A schematic diagram of log information displayed on an interface provided by an embodiment of the present application;

[0015] Figure 4 A flow chart of a log processing method for semiconductor process equipment provided in another embodiment of the present application;

[0016] Figure 5 A flow chart of a log processing method for semiconductor process equipment provided in another embodiment of the present application;

[0017] Figure 6 A schematic diagram of a data table and a data curve provided for an embodiment of the present application;

[0018] Figure 7 A schematic diagram of generating a log sub-file according to a log file provided in an embodiment of the present application;

[0019] Figure 8 An overall flow chart of a log processing method for semiconductor process equipment provided by one embodiment of the present application;

[0020] Fig. 9A schematic structural diagram of a semiconductor process equipment provided for one embodiment of the present application. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0022] The terms "first", "second", etc. in this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here. In addition, the "and / or" in this application represents at least one of the connected objects, and the character " / " generally represents that the front and back associated objects are in an "or" relationship. It should be noted that the data involved in this application are all obtained on the premise of obtaining user authorization.

[0023] In order to judge the process performance of semiconductor process equipment such as horizontal furnace, it is necessary to analyze parameter data such as process temperature, gas pressure, torque, etc. In the related art, the method of manual analysis is adopted. Due to the large amount of statistical data, a large amount of manpower is needed to do the corresponding process data analysis, which is not only prone to errors, but also reduces the efficiency of data analysis and problem troubleshooting. To this end, the present application proposes a log processing method, equipment and storage medium for semiconductor process equipment. When the present application performs log (Log) data processing, the log data of the semiconductor process equipment is first recorded, and the log data includes process parameter data and log information, and then the process parameter data is analyzed to obtain the data analysis result, and a log file is generated according to the log information and the data analysis result, and the log information to be displayed is displayed in a window. The present application integrates recording, analysis and display, and can realize automatic data analysis of process parameter data, without manual secondary processing, saving a lot of manpower, not prone to errors, and improving the efficiency of data analysis and problem troubleshooting. At the same time, the user interface display of the log information can be realized, which is convenient for users to view, and further improves the efficiency of user data analysis and problem troubleshooting.

[0024] The technical solutions provided by various embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0025] Figure 1 A flow chart of a log processing method for semiconductor process equipment provided by an embodiment of the present application. Figure 1As shown, the log processing method of the semiconductor process equipment in the embodiment of the present application may specifically include the following steps:

[0026] S101, recording log data of semiconductor process equipment, where the log data includes process parameter data and log information.

[0027] In an embodiment of the present application, the execution subject of the log processing method of the semiconductor process equipment in the embodiment of the present application is semiconductor process equipment, such as a horizontal furnace used to produce semiconductor devices such as photovoltaic cells.

[0028] During the operation of semiconductor process equipment, log data will be continuously output, which may include but not limited to process parameter data and log information.

[0029] The process parameter data refers to the parameter data related to process performance output by the semiconductor process equipment during operation, such as process temperature, gas pressure, torque and other parameter data.

[0030] Log information refers to some information of semiconductor process equipment during operation, such as user-defined information, information about system exit due to serious errors, error information at the error location, alarm information, important process information during system operation (such as user login information), information generated during the development process, port input and output information, and lower computer information.

[0031] You can pre-deploy multiple macros in the interface layer, and call the corresponding macros to record (i.e. print) process parameter data, log information to be recorded in the log file, and log information to be displayed in the window (i.e. interface display). The macro method is convenient for users to remember and use, simple to deploy, and improves development efficiency.

[0032] It should be noted here that the log information output by the semiconductor process equipment must be recorded in the log file. As for whether it needs to be displayed in the window, it depends on whether the function of displaying the log information through the window is turned on. If the function of displaying the log information through the window is turned on, there is log information that needs to be displayed in the window, and the corresponding macro needs to be called for recording. If the function of displaying the log information through the window is not turned on, there is no log information that needs to be displayed in the window, and there is no need to call the corresponding macro for recording.

[0033] Those skilled in the art can understand that when the function of displaying log information through a window is enabled, the log information to be recorded in the log file and the log information to be displayed in the window (ie, displayed on the interface) are consistent.

[0034] S102, performing data analysis on the process parameter data to obtain data analysis results.

[0035] In the embodiment of the present application, the process parameter data recorded in step S101 can be automatically analyzed by the data processing module in the functional layer to obtain the data analysis result.

[0036] Data analysis results, that is, the analysis results of the system stability of semiconductor process equipment obtained through data analysis of process parameter data, such as "operating parameters are low, there are out-of-bounds values, and timely correction is required." The more stable the system, the more stable the process, and the more reliable the product quality.

[0037] S103, displaying the log information to be displayed in a window.

[0038] In the embodiment of the present application, the log information to be displayed recorded in step S101 can be controlled to be displayed in the window of the host computer (i.e., the interface of the host computer) through the interface processing module in the functional layer, so that the user can view these log information more intuitively and quickly locate the problem. In addition, these log information to be displayed can be matched with the user interface (UserInterface, referred to as UI) to form a scrolling log information display list.

[0039] S104, generating a log file according to the log information and the data analysis result.

[0040] In the embodiment of the present application, the text processing module in the functional layer can generate a final log file based on the log information to be recorded in the log file recorded in step S101 and the data analysis results obtained in step S102. The user can find improvement points for process parameters based on the data analysis results in the log file, and then optimize the process performance and improve production capacity.

[0041] It should be noted here that log files support multiple formats, including but not limited to any of the following formats: txt, doc, xlsx, html and csv.

[0042] In summary, the log processing method of the semiconductor process equipment of the embodiment of the present application, when performing log data processing, first records the log data of the semiconductor process equipment, the log data includes process parameter data and log information, and then performs data analysis on the process parameter data therein to obtain data analysis results, generates a log file according to the log information and the data analysis results, and displays the log information to be displayed in a window. The embodiment of the present application integrates recording, analysis and display, and can realize automatic data analysis of process parameter data, without manual secondary processing, saving a lot of manpower, not prone to error, and improves the efficiency of data analysis and troubleshooting, and can realize user interface display of log information at the same time, which is convenient for users to view, and further improves the efficiency of user data analysis and troubleshooting. Users can quickly find process parameter improvement points based on the data analysis results in the log file, and then optimize the process performance and improve production capacity.

[0043] Figure 2 A flow chart of a log processing method for semiconductor process equipment provided by another embodiment of the present application. Figure 2 As shown, in Figure 1 Based on the illustrated embodiment, the log processing method of the semiconductor process equipment of the embodiment of the present application may specifically include the following steps:

[0044] In the above embodiment, step S101 “recording log data of semiconductor process equipment, wherein the log data includes process parameter data and log information” may specifically include the following steps S201 - S203 .

[0045] S201, calling a preset first macro to record process parameter data.

[0046] In the embodiment of the present application, the first macro is a macro for recording process parameter data. When the process parameter data of the semiconductor process equipment needs to be recorded, the first macro preset in the interface layer can be called to transfer the process parameter data to the interface layer, and pass it to the function layer for data analysis and other operations. The first macro can be expressed as: LOG_DATA(...), for example, it is necessary to record the flow meter flow (MassFlowController, referred to as MFC) data, the first macro can be expressed as:

[0047] LOG_DATA("MFC value:%f", value).

[0048] S202, calling a preset second macro to record log information.

[0049] In the embodiment of the present application, the second macro is a macro used to record the log information that needs to be recorded in the log file on a daily basis. When the log information of the semiconductor process equipment needs to be recorded in the log file, the second macro preset in the interface layer can be called to pass the log information into the interface layer and pass it to the function layer for subsequent operations. Different scenarios can use different second macros to record log information, and the second macro can be expressed as:

[0050] LOG_OUTPUT(...): prints all information in the system;

[0051] LOG_USER(...): Print user-defined information;

[0052] LOG_FATAL(...): Prints information about serious errors that caused the system to exit;

[0053] LOG_ERROR(...): prints the error information of the error location;

[0054] LOG_WARNING(…): print warning information;

[0055] LOG_INFO(...): Prints some important process information during system operation;

[0056] LOG_DEBUG(...): Prints information generated during the development process;

[0057] LOG_DIDO(...): Print port input and output information;

[0058] LOG_LOW(…): Print the lower computer information.

[0059] For example, to record user login information, the second macro can be expressed as:

[0060] LOG_INFO("%s Login success." UserName).

[0061] The log levels corresponding to the above multiple second macros decrease from top to bottom. After setting the log level, by calling the second macro, only log information with a log level higher than the set log level can be recorded. For example, if the log level is set to ERROR, only log information of ERROR, FATAL, USER and OUTPUT levels will be recorded, and log information of WARNING, INFO and other levels below ERROR will not be recorded, avoiding the waste of resources caused by recording all log information.

[0062] It should be noted here that the log level can be set through the interface function in the interface layer. The interface function can be pre-set in the interface layer. The interface function, that is, the initialization deployment function, only needs to be used once in the system initialization in the entire semiconductor process equipment host system. The interface function can be expressed as:

[0063] Set_Mode(const TCHAR*filename, int level)

[0064] OpenMessage(HWND handle)

[0065] CloseMessage().

[0066] The Set_Mode(const TCHAR*filename, int level) function in the interface function is used to set the file directory, file name, file format and log level of the final generated log file. For example: Set LOG Mode("D:\\Log\\SSMI.txt", LOG_LVL_DEBUG) means setting the file directory corresponding to the log file to "D:\\Log", the file name to "SSMI", the file format to "txt", and the log level to "DEBUG".

[0067] The OpenMessage (HWND handle) and CloseMessage () functions in the interface function are used to open or close the function of printing log information to the host computer interface. Its parameters are the window handle (that is, the interface handle).

[0068] S203, calling the preset third macro to record the log information to be displayed.

[0069] In an embodiment of the present application, the third macro, that is, the macro used when the log information that needs to be displayed in the host computer window needs to be recorded. By judging whether the interface function called by the user is a function to open or close the interface display function, it is determined whether the function of printing log information to the host computer interface is turned on. When the function of printing log information to the host computer interface is turned on, the third macro preset in the interface layer can be called to pass the log information into the interface layer, and pass it to the function layer for subsequent operations. Different scenarios can use different third macros to record log information, and the third macro can be expressed as:

[0070] LOG_OUTPUT_MSG(...): prints all information in the system;

[0071] LOG_USER_MSG(…): Prints user-defined information;

[0072] LOG_FATAL_MSG(...): Prints information about a serious error that caused the system to exit;

[0073] LOG_ERROR_MSG(...): prints the error message of the error location;

[0074] LOG_WARNING_MSG(…): print warning information;

[0075] LOG_INFO_MSG(…): Prints some important process information during system operation;

[0076] LOG_DEBUG_MSG(…): Prints information generated during the development process;

[0077] LOG_DIDO_MSG(…): Print port input and output information;

[0078] LOG_LOW_MSG(…): Print the lower computer information.

[0079] For example, to record the change of boat information position, the third macro can be expressed as:

[0080] LOG_INFO_MSG("Boat(%s)Pos change%s→%s", BoatID, PosForm, posTo).

[0081] The log levels corresponding to the above-mentioned multiple third macros decrease from top to bottom. After setting the log level, by calling the third macro, only the log information with a log level higher than the set log level and that needs to be displayed in the host computer window can be recorded. For example, if the log level is set to the ERROR level, only the ERROR, FATAL, USER and OUTPUT levels will be recorded, and the log information that needs to be displayed in the host computer window will not be recorded, such as WARNING, INFO and other log information below the ERROR level, thus avoiding the waste of resources caused by recording all the log information that needs to be displayed.

[0082] S204, performing critical section locking processing on the shared data in the log data to ensure that only one thread is allowed to access the shared data at the same time.

[0083] In an embodiment of the present application, the log data includes shared data and non-shared data. The shared data can be accessed and edited by multiple threads, while the non-shared data is only allowed to be accessed and edited by one thread.

[0084] For shared data, multi-thread protection can be performed through the multi-thread processing module in the functional layer to prevent data from being destroyed. Multi-thread protection is to lock the critical area of ​​shared data, allowing only one thread to access at the same time, and other threads wait in line to ensure the correctness of the data.

[0085] For example, when a thread writes log data, it needs to enter the critical section at the beginning of the write function and lock the critical section object defined by the multi-thread processing module, which can be achieved by using EnterCriticalSection(). At this time, if other threads also want to write log data, they need to queue outside the function and release the critical section after the current thread completes writing. LeaveCriticalSection() can be used to achieve this. After the current thread exits, other waiting threads can enter and continue writing. It should be noted here that the critical section object can be a critical section object customized by the multi-thread processing module, or it can be a critical section object pointer introduced into the multi-thread processing module by a critical section object defined by other external modules. If it is a critical section object customized by the multi-thread processing module, the log records the log data of all threads in the entire system. When recording log data, multi-thread protection is supported, and the log data of all threads is recorded. If it is a pointer introduced into the multi-thread processing module for a critical section object customized for a certain thread, the log records the exclusive log data of the thread and is not interfered by other threads.

[0086] In the above embodiment, step S102 of “performing data analysis on process parameter data to obtain data analysis results” may specifically include the following steps S205-S207.

[0087] S205, calculating the average value and standard deviation of the process parameter data.

[0088] In the embodiment of the present application, after the data processing module in the functional layer receives the process parameter data transmitted by the first macro in the interface layer, it calculates the average value μ and the standard deviation for multiple process parameter data with the same data name.

[0089] It should be noted here that the average value μ is also the process average value and the sample average value, and the calculation formula is as follows:

[0090]

[0091] Among them, x i is the i-th sample value, and n is the number of samples.

[0092] The standard deviation can be the process standard deviation (i.e., the overall standard deviation) σ, or the sample standard deviation s, which can be determined according to the type of index to be calculated in step S207 (process capability index and / or process performance index). The calculation formula of the standard deviation is as follows:

[0093]

[0094]

[0095] S206, obtaining preset maximum and minimum values ​​corresponding to the process parameter data.

[0096] In the embodiment of the present application, for different process parameter data, the maximum value and the minimum value corresponding to each process parameter data can be pre-set.

[0097] After receiving the process parameter data transmitted by the first macro in the interface layer, the data processing module in the functional layer searches for the corresponding preset maximum value and preset minimum value according to the data name of the process parameter data (eg butterfly valve pressure), and performs the subsequent calculation step S206.

[0098] If the corresponding preset maximum value and preset minimum value cannot be found, the default maximum value is 9999 and the minimum value is 0, and the subsequent calculation step S207 is not performed. That is, for the process parameter data for which the corresponding preset maximum value and preset minimum value cannot be found, only the average value and standard deviation are calculated through step S205, so that the text processing module in the subsequent functional layer can generate the corresponding text file.

[0099] S207, calculating a process capability index and / or a process performance index according to the process parameter data, the maximum value and the minimum value.

[0100] In the embodiment of the present application, the process capability index (CPK) and the process performance index (PPK) are two statistical indicators in quality control, which are used to measure the capability of the production process. In practical applications, any one or two of them can be selected and calculated as needed.

[0101] CPK refers to the degree to which process capability meets the requirements of product quality standards. CPK is an indicator for evaluating process capability, which can measure the variability of the production process and whether the production process is within the specification range. The calculation of CPK depends on the average value of the production process, the standard deviation of the production process, and the specification range of the production process. If the CPK value is higher, it means that the controllable time of the production process is longer and the quality of the product is more reliable.

[0102] The calculation formula of CPK is:

[0103] CPK=Min[(USL-μ) / 3σ, (μ-LSL) / 3σ].

[0104] Among them, USL is the process upper limit specification, that is, the process maximum value, LSL is the process lower limit specification, that is, the process minimum value, μ is the process mean, and σ is the process standard deviation.

[0105] PPK, also known as the potential process capability index, is an indicator for evaluating potential process capability. It can measure the actual performance of a production process and the degree to which the quality level of the products it can produce is close to the design value. The calculation of PPK depends on the sample mean, sample standard deviation and sample specification range.

[0106] The calculation formula of PPK is:

[0107] PPK=Min[(USL-X double-bar) / 3s, (X double-bar-LSL) / 3s].

[0108] Among them, USL is the sample upper limit specification, that is, the sample maximum value, LSL is the sample lower limit specification, that is, the sample minimum value, Xdouble-bar is the sample mean, and s is the sample standard deviation.

[0109] Here are some examples:

[0110] Semiconductor process equipment will detect butterfly valve pressure during operation. If the flow pressure in the process deviates from the specification requirements due to factors such as the use of different butterfly valves or the environment, an alarm will be generated.

[0111] The pressure range of the butterfly valve is preset to be: USL=10, LSL=6, and the sampling data is as follows:

[0112] 7.8, 8.2, 8.4, 8.7, 9.1, 9.2, 9.3, 9.4, 9.6, 10.4, 10.5, 10.6.

[0113] First, calculate the mean μ, process standard deviation σ, and sample standard deviation:

[0114] μ=(7.8+8.2+...+10.6) / 12≈9.26667;

[0115] σ=0.87114;

[0116] s = 0.90988;

[0117] Then, calculate the CPK value:

[0118] CPK=Min[(USL-μ) / 3σ, (μ-LSL) / 3σ]

[0119] =Min[(10 -9.26667) / 3(0.87114), (9.26667-6) / 3(0.87114)]

[0120] =Min[0.2806,1.24996]

[0121] =0.2806

[0122] Then, calculate the PPK value:

[0123] PPK=Min[(USL-X double-bar) / 3s, (X double-bar-LSL) / 3s]

[0124] =Min[(10 -9.26667) / 3(0.90988), (9.26667-6) / 3(0.90988)]

[0125] =Min[0.2687,1.1967]

[0126] =0.2687

[0127] S208, generating data analysis results according to the process capability index and / or the potential process capability index.

[0128] In the embodiment of the present application, the analysis result of the system stability of the semiconductor process equipment, i.e., the data analysis result, is generated according to the CPK value and / or the PPK value. It should be noted here that a more complete data analysis result can also be generated according to whether the process parameter data exceeds the specification range.

[0129] For example, CPK and PPK are generally required to be ≥ 1.67. In the above example, CPK = 0.2806, indicating that the process is relatively weak within the allowable deviation range, and PPK = 0.2687, indicating that the long-term performance of the process is poor, and there may be process variations caused by special factors. If the value of the process parameter data exceeds USL = 10, it means that there are out-of-bounds values. Therefore, the data analysis result "the operating parameters are low, there are out-of-bounds values, and timely correction is required" can be generated.

[0130] S209: Correlate the log information with the time according to a preset time format to obtain the time-correlated log information.

[0131] In the embodiment of the present application, the log time output format of the log information recorded in step S202 can be edited by the format processing module in the functional layer, that is, the log information and time are associated according to the preset time format to obtain the time-associated log information. The preset time format can be defined by the user according to the scene requirements to meet the user's personalized needs for the time format.

[0132] For example, if the time format is defined as: "%04d-%02d-%02d%02d:%02d:%02d:%03d", the time-associated log information obtained after format processing is as follows:

[0133] 2023-05-20 16:45:06:178USER:TBoatServer::TBoatServer 220.

[0134] In the above embodiment, step S103 of “displaying the log information to be displayed in a window” may specifically include the following steps S210 - S211 .

[0135] S210, sending the log information to be displayed to a preset window handle, the window handle aligns the log information to be displayed according to the log level, and sets the text color of the log information to be displayed according to the log level.

[0136] In the embodiment of the present application, after the interface processing module in the functional layer receives the log information to be displayed from the third macro in the interface layer, the log information to be displayed is passed into the message mechanism, and the log information to be displayed is sent to the preset window handle in the interface function through the message mechanism. The window handle integrates the received log information, aligns the log information to be displayed according to the log level of the log information to be displayed, and sets the text color of the log information to be displayed according to the log level. For example, the text color of the error log information is set to red, the text color of the alarm log information is set to yellow, the text color of the normal log information is set to black, and the upper and lower computer log information is displayed in blue, etc.

[0137] It should be noted here that the window handle can save developers the trouble of deploying message mechanisms, greatly improving development efficiency.

[0138] S211, displaying the log information to be displayed in the window according to the text color.

[0139] In the embodiment of the present application, based on the text color determined in step S210, the log information to be displayed is displayed in the window, and a scrolling log printing effect is formed in the window, such as Figure 3 As shown, the 1st and 2nd log information are log information recording error information, and the text should be displayed in red. The 3rd log information is the log information recording upper and lower computer information, and the text should be displayed in blue. The 4th log information is the normal log information, and the text should be displayed in black. Figure 3 The actual text color of the log information cannot be displayed in the log file. Match it with the UI, for example, by using different background colors for adjacent log information ( Figure 3The grayscale is different in the image), showing the scrolling log printing effect.

[0140] In the above embodiment, step S104 “generating a log file according to the log information and the data analysis result” may specifically include the following steps S212 - S213 .

[0141] S212: Generate a first text file according to the log information.

[0142] In the embodiment of the present application, the log information can be output to a text display format through a text processing module in the functional layer.

[0143] It should be noted that the first text file supports multiple formats, including but not limited to any of the following formats: txt, doc, xlsx, html and csv. The format of the first text file can be the same as the format of the log file finally generated, or it can be different from the format of the log file finally generated, that is, the format of the first text file can be the same as the text format set in the interface function of the interface layer, or it can be different from the text format set in the interface function.

[0144] In some embodiments, Figure 4 As shown, the step S212 "generating a first text file according to log information" may specifically include the following steps:

[0145] S401 : For log information repeated within a set time period, the earliest log information, the latest log information and the number of repetitions of the log information are recorded in a first text file.

[0146] In an embodiment of the present application, if the log information transmitted to the text processing module within a time period is the same, the text processing module will merge the log information and only record the log information with the earliest recording time and the log information with the latest recording time in the first text file, that is, the starting log information and the ending log information, and mark the number of repetitions of the log information. This can avoid the problem of printing the same log information in a whole article, resulting in excessive text data and inconvenience for users to view.

[0147] Specifically, each time a log message is passed in, the text processing module will automatically compare it with the last log message passed in. If the log message passed in this time is the same as the last log message passed in, it will be determined to be the same log message and will not be printed in the text. However, an information string "Repetition Count: XXX" will be added after the log message to mark the number of repetitions. The log message passed in this time will be temporarily stored in the cache. Subsequent log messages passed in will continue to be compared with the log message recorded in the cache this time. If they are the same, the count in the information string in the cache will be "+1". If they are different, the information in the cache will be printed out first and then destroyed. Then the last log message and the information string used to mark the number of repetitions will be printed in the text.

[0148] For example, at 2023-06-29 11:03:21:489, the log information of reading the PLC status is printed for the first time. In the subsequent time period from 489 to 492, the log information of reading the PLC status is printed 1029 times. After text processing, the information output to the text is:

[0149] 2023-06-29 11:03:21:489INFO:PLC(TCP,127.0.0.1:1503)Run Status:1.

[0150] 2023-06-29 11:03:21:492INFO:PLC(TCP,127.0.0.1:1503)Run Status:1.(Repetition Count:1029)

[0151] S402: For log information for recording error information of an error location, record the file, function, and line information where the error occurs in a first text file.

[0152] In an embodiment of the present application, when an error occurs, the text processing module can print out which specific file, function, and line the error occurs in, that is, record the file, function, and line information where the error occurs in the first text file.

[0153] For example, the error information at the error location is recorded by calling the second macro LOG_ERROR(...) in the interface layer and passed to the text processing module. After the text processing, the information output to the text is:

[0154] 2023-05-19 11:17:25:402ERROR:set bake boat status fail vError:0 inl52line from TBoatServer::SetWarferSataus()in E:\Code\UpCode\BoatServer.cpp

[0155] It records that the error occurred in the file "E:\Code\UpCode\BoatServer", function "TBoatServer::SetWarferSataus()", line "l52 line". The error information recorded in the text is clear at a glance, which helps users quickly locate the specific file, function, and line where the problem occurs, greatly improving the efficiency of user fault diagnosis.

[0156] S213, generating a second text file according to the data analysis result.

[0157] In the embodiment of the present application, the data analysis results may be output to a text display format for processing by a text processing module in the functional layer.

[0158] It should be noted that the second text file supports multiple formats, including but not limited to any of the following formats: txt, doc, xlsx, html and csv. The format of the second text file can be the same as the format of the log file finally generated, or it can be different from the format of the log file finally generated, that is, the format of the second text file can be the same as the text format set in the interface function of the interface layer, or it can be different from the text format set in the interface function.

[0159] In some embodiments, Figure 5 As shown, the step S213 "generating a second text file according to the data analysis result" may specifically include the following steps:

[0160] S501, generating a data table according to process parameter data, maximum value, minimum value, process capability index and / or process performance index and data analysis results.

[0161] In the embodiments of the present application, Figure 6As shown on the left side, the table properties can be set based on the programming language (Visual Basic for Applications, VBA for short), the meaning of each column of the table data (the name of the process parameter data, the minimum value of the process parameter data, the value of the process parameter data, and the maximum value of the process parameter data) can be defined, and the corresponding process parameter data name MFC_1, the minimum value 6, the value of the process parameter data 7.8~10.6 and the maximum value 10 can be filled in, and the relevant parameter columns required for calculating μ, σ, s, CPK, and PPK are defined. The data in each column are imported according to their respective calculation formulas, and the calculation results 9.26667, 0.87114, 0.90988, 0.2806 and 0.2687 are output to the last row of the form (Sheet) page, and the data analysis result Analysis "<1 operating parameters are low, there are out-of-bounds values, and timely correction is required" is output to the last row of the Sheet page to obtain a data table.

[0162] S502, generating a data curve according to the process parameter data.

[0163] In the embodiment of the present application, the process parameter data of each column is summarized, and the chart control provided by the Excel table can be called based on VBA, with the sampling number as the horizontal axis and the value of the process parameter data as the vertical axis, and the process parameter data is output as a data curve, such as Figure 6 Shown on the right.

[0164] S503: Generate a second text file according to the data table and the data curve.

[0165] In the embodiment of the present application, a second text file is generated according to the data table generated in step S501 and the data curve generated in step S502.

[0166] It should be noted here that if the data table and the data curve are generated in the same text, such as the same Excel text, a second text file is generated based on the text, and the format of the second text file can be Excel or other formats, such as doc, etc. If the data table and the data curve are generated in different texts, or even in texts of different formats, the data table and the data curve are integrated into the same text, and a second text file is generated based on the text.

[0167] It should be noted here that data tables and data curves are generated based on process parameter data, so that users can view the analysis results of process parameter data more intuitively and locate problems more quickly.

[0168] S214: Generate a log file according to the first text file and the second text file.

[0169] In the embodiment of the present application, a log file is generated according to the first text file generated in step S212 and the second text file generated in step S213.

[0170] It should be noted here that if the first text file and the second text file are text files of the same format, for example, both are Excel text files, then the contents of the first text file and the second text file are integrated into the same Excel text file; if the format of the log file set in the interface function of the interface layer is also an Excel text file, then the integrated Excel text file is used as the log file and is named according to the file name set in the interface function of the interface layer; if the format of the log file set in the interface function of the interface layer is not an Excel text file, then the integrated Excel text file is converted into the format of the set log file and is named according to the file name set in the interface function of the interface layer.

[0171] If the first text file and the second text file are text files of two different formats, for example, one is in Excel format and the other is in TXT format, then determine whether the two formats are consistent with the format of the log file set in the interface function of the interface layer; if one format is consistent with the format of the set log file, for example, the format of the set log file is also in Excel format, then integrate the contents of the first text file and the second text file into the same Excel text file, and use the integrated Excel text file as the log file, and name it according to the file name set in the interface function of the interface layer; if both formats are inconsistent with the format of the set log file, for example, the format of the set log file is in doc format, then integrate the contents of the first text file and the second text file into the same doc text file, and use the integrated doc text file as the log file, and name it according to the file name set in the interface function of the interface layer.

[0172] S215, when a system failure of the semiconductor process equipment is detected, a dump file is generated, and the dump file includes the currently recorded log information.

[0173] In the embodiment of the present application, the exception handling module in the functional layer can be used to deal with the situation where the semiconductor process equipment has a system abnormal crash. Specifically, when the semiconductor process equipment is started, an exception listener can be started at the same time. When it is detected that the semiconductor process equipment has a system abnormal crash, that is, an abnormal exit, the exception handling module will automatically generate a dump file and store the currently recorded log information, that is, the last system operation information, in the dump file. The dump file is a system error memory dump file, which can be regarded as a snapshot of the software at a certain moment.

[0174] S216, when it is detected that the semiconductor process equipment restarts the system, the dump file is scanned and the log information in the dump file is output.

[0175] In an embodiment of the present application, when it is detected that the semiconductor process equipment restarts the system, the exception handling module will automatically scan the previously generated dump file and print out the log information of the last abnormal exit, thereby helping the user to quickly locate the location of the abnormal exit and solve related problems.

[0176] S217, generating a log sub-file according to the log file.

[0177] In the embodiment of the present application, the corresponding log sub-files can be automatically generated according to the generated log files and process results (process success and process failure) through the output layer, which can facilitate users to classify and view different data or results.

[0178] The log sub-file may specifically include but is not limited to at least one of the following: a log sub-file of process success, a log sub-file of process failure, and a log sub-file of a summary table of process parameter data.

[0179] like Figure 7 As shown, based on the log file Debug File, a log sub-file Pass File for successful process, a log sub-file Fail File for failed process, and a log sub-file Excel File for summary table of process parameter data can be generated.

[0180] Among them, Debug File is the most comprehensive log file, which saves all operation data.

[0181] Pass File is a log file of successful process, which saves the main process step information and process parameter data.

[0182] Fail File is the log file of process failure, which saves the main process step information and process parameter data.

[0183] The Excel File is a summary table of process parameter data, recording the generated CPK, PPK results, data analysis results and corresponding data curve graphs.

[0184] S218, storing the log file and the log sub-file in a disk.

[0185] In the embodiment of the present application, the generated log files and log sub-files can be saved by the output layer. In order to prevent the risk of losing data due to power failure, the log files and log sub-files can be directly stored to the disk without using a cache.

[0186] In summary, the log processing method of the semiconductor process equipment of the embodiment of the present application integrates recording, analysis and display, can realize automatic data analysis of process parameter data, does not need manual secondary processing, saves a lot of manpower, is not prone to errors, and improves the efficiency of data analysis and troubleshooting. At the same time, the user interface display of the log information can be realized, which is convenient for users to view, and further improves the efficiency of user data analysis and troubleshooting. Users can quickly find process parameter improvement points based on the data analysis results in the log file, and then optimize the process performance and improve production capacity. The log data is recorded by the preset macro, which is convenient for users to remember and use, and the deployment is simple, which improves the development efficiency. By setting the log level, when recording log information, only log information with a log level higher than the set log level can be recorded, avoiding the waste of resources caused by all log information being recorded. By calculating the process capability index and / or the process performance index, the analysis of the process parameter data can be realized, and then the analysis of the process stability can be realized. According to the preset time format, the log information and time are associated, and the format processing of the time of the log information can be realized, which can meet the personalized needs of the user for the time format. Through the window handle, the cumbersomeness of the developer to deploy the message mechanism can be saved, greatly improving the development efficiency. For the log information that needs to be displayed, it is displayed in the window according to the text color, which can achieve the scrolling log printing effect, facilitate users to view, and quickly locate the problem. For repeated log information, by only recording the earliest and latest log information and the number of repetitions, it can avoid the problem that the same log information is printed in a piece, resulting in too large text data and inconvenient for users to view. By recording the file, function and line information where the error occurs, it can effectively improve the speed of users to consult log information, help users to quickly locate problems, and greatly improve the efficiency of user fault diagnosis. According to the process parameter data, data tables and data curves are generated, which is convenient for users to view the analysis results of process parameter data more intuitively and locate problems more quickly. By locking the critical area of ​​the shared data in the log data to ensure that only one thread is allowed to access the shared data at the same time, multi-thread protection can be achieved to ensure the correctness of the printed data. By generating a dump file when the system fails and scanning the dump file when the system restarts, it can deal with the situation of abnormal system crash, help users quickly locate the location of abnormal exit, and solve related problems. Generating log sub-files according to log files and process results can facilitate users to view different data or results by category. Storing log files and log subfiles on disk instead of in cache can prevent the risk of data loss due to power outages.

[0187] To clearly illustrate the log processing method of the semiconductor process equipment in the embodiment of the present application, Figure 8 The overall process of the log processing method of the semiconductor process equipment in the embodiment of the present application is described in detail. Figure 8As shown, the log processing method of the semiconductor process equipment of the embodiment of the present application may specifically include the following steps: the semiconductor process equipment outputs log data during operation, calls the interface layer in the semiconductor process equipment to record the log data, and the interface layer transmits the log data to the functional layer. The functional layer performs data analysis on the process parameter data in the log data to obtain the data analysis results, and generates a log file based on the log information and the data analysis results, and transmits it to the output layer. The functional layer also displays the log information that needs to be displayed in a window. The output layer generates a log sub-file based on the log file and the process results, and stores the log file and the log sub-file to the disk.

[0188] Among them, the interface layer includes interface functions, first macros, second macros and third macros. The interface function is used to set the file directory, file name, file format and log level corresponding to the final generated log file, as well as to turn on or off the function of printing log information to the interface. The function function of turning on the printing of log information to the interface includes the window handle. The first macro is used to record the process parameter data in the log data. The second macro is used to record the log information in the log data. The third macro is used to record the log information that needs to be displayed.

[0189] Among them, the functional layer includes a multi-thread processing module, a format processing module, a data processing module, a text processing module, an interface processing module and an exception handling module. The multi-thread processing module is used to perform multi-thread protection on the log data, and only one thread is allowed to access the shared data in the log data at the same time. The format processing module is used to associate the log information with the time according to the preset time format, and realize the editing of the time format of the log information. The data processing module is used to perform data analysis on the process parameter data and generate data analysis results. The text processing module is used to generate a log file according to the log information and data analysis results after format processing. The interface processing module is used to display the log information to be displayed in the window through the window handle in the interface function. The exception handling module is used to deal with the system crash of the semiconductor process equipment. When a system failure is detected in the semiconductor process equipment, a log information dump file including the current record is generated. When it is detected that the semiconductor process equipment restarts the system, the dump file is scanned and the log information in the dump file is output.

[0190] Among them, the output layer is used to generate log sub-files according to log files and process results. The log sub-files include log sub-files of successful processes, log sub-files of failed processes, and log sub-files of summary tables of process parameter data. The log files and log sub-files are stored on disk.

[0191] The present application also provides a semiconductor process equipment. Fig. 9As shown, the semiconductor process equipment 900 may have relatively large differences due to different configurations or performances, and may include one or more processors 901 and memory 902, and the memory 902 may store one or more storage applications or data. Among them, the memory 902 may be a short-term storage or a persistent storage. The application stored in the memory 902 may include one or more modules (not shown in the figure), and each module may include a series of computer executable instructions in the semiconductor process equipment 900. Furthermore, the processor 901 may be configured to communicate with the memory 902 to execute a series of computer executable instructions in the memory 902 on the semiconductor process equipment 900. The semiconductor process equipment 900 may also include one or more power supplies 903, one or more wired or wireless network interfaces 904, one or more input and output interfaces 905, and one or more keyboards 906.

[0192] Specifically in this embodiment, the semiconductor process equipment includes a memory and one or more programs, wherein the one or more programs are stored in the memory, and the one or more programs may include one or more modules, and each module may include a series of computer executable instructions for the semiconductor process equipment, and the one or more programs are configured to be executed by one or more processors, including computer executable instructions for performing the following:

[0193] Recording log data of semiconductor process equipment, including process parameter data and log information;

[0194] Perform data analysis on process parameter data to obtain data analysis results;

[0195] Display the log information that needs to be displayed in a window;

[0196] Generate a log file based on the log information and data analysis results.

[0197] The semiconductor process equipment of the embodiment of the present application, when processing log data, first records the log data of the semiconductor process equipment, the log data includes process parameter data and log information, and then performs data analysis on the process parameter data therein to obtain data analysis results, generates a log file according to the log information and the data analysis results, and displays the log information to be displayed in a window. The embodiment of the present application integrates recording, analysis and display, and can realize automatic data analysis of process parameter data, without manual secondary processing, saving a lot of manpower, not prone to error, and improving the efficiency of data analysis and troubleshooting, and can realize user interface display of log information at the same time, which is convenient for users to view, and further improves the efficiency of user data analysis and troubleshooting. Users can quickly find process parameter improvement points based on the data analysis results in the log file, and then optimize the process performance and improve production capacity.

[0198] The embodiment of the present application further proposes a readable storage medium, on which one or more computer programs are stored. The one or more computer programs include instructions. When the program or instruction is executed by a processor in a semiconductor process device including multiple application programs, the processor in the semiconductor process device can execute each process of the embodiment of the log processing method for the semiconductor process device, and is specifically used to execute:

[0199] Recording log data of semiconductor process equipment, including process parameter data and log information;

[0200] Perform data analysis on process parameter data to obtain data analysis results;

[0201] Display the log information that needs to be displayed in a window;

[0202] Generate a log file based on the log information and data analysis results.

[0203] The readable storage medium of the embodiment of the present application, when processing log data, first records the log data of the semiconductor process equipment, the log data includes process parameter data and log information, and then performs data analysis on the process parameter data therein to obtain data analysis results, generates a log file according to the log information and the data analysis results, and displays the log information to be displayed in a window. The embodiment of the present application integrates recording, analysis and display, and can realize automatic data analysis of process parameter data, without manual secondary processing, saving a lot of manpower, not prone to error, and improving the efficiency of data analysis and troubleshooting, and can realize user interface display of log information at the same time, which is convenient for users to view, and further improves the efficiency of user data analysis and troubleshooting. Users can quickly find process parameter improvement points based on the data analysis results in the log file, and then optimize the process performance and improve production capacity.

[0204] The systems, devices, modules or units described in the above embodiments may be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0205] For the convenience of description, the above device is described in various units according to their functions. Of course, when implementing the present application, the functions of each unit can be implemented in the same or multiple software and / or hardware.

[0206] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment in combination with software and hardware. Moreover, the present application may adopt the form of a computer program product implemented in one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) that include computer-usable program code.

[0207] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0208] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0209] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0210] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0211] The memory may include non-permanent storage in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. The memory is an example of a computer-readable medium.

[0212] Computer readable media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer readable media does not include temporary computer readable media (transitory media), such as modulated data signals and carrier waves.

[0213] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0214] The present application may be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present application may also be practiced in distributed computing environments where tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, program modules may be located in local and remote computer storage media, including storage devices.

[0215] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0216] The above are only embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included within the scope of the claims of the present application.

Claims

1. A log processing method for semiconductor process equipment, characterized in that: include: Recording log data of semiconductor process equipment, wherein the log data includes process parameter data and log information; Performing data analysis on the process parameter data to obtain data analysis results; Displaying the log information that needs to be displayed in a window; A log file is generated according to the log information and the data analysis result.

2. The method according to claim 1, characterized in that The log data of semiconductor process equipment includes: Calling a preset first macro to record the process parameter data; Calling a preset second macro to record the log information; The preset third macro is called to record the log information to be displayed.

3. The method according to claim 2, characterized in that The calling of the preset second macro to record the log information includes: Calling the second macro to record the log information whose log level is higher than the set log level; The calling of the preset third macro to record the log information to be displayed includes: The third macro is called to record the log information whose log level is higher than the set log level and needs to be displayed.

4. The method according to claim 1, characterized in that: The performing of data analysis on the process parameter data to obtain data analysis results includes: Calculate the mean value and standard deviation of the process parameter data; Obtaining preset maximum and minimum values ​​corresponding to the process parameter data; Calculate a process capability index and / or a process performance index according to the process parameter data, the average value, the standard deviation, the maximum value and the minimum value; The data analysis result is generated according to the process capability index and / or the process performance index.

5. The method according to claim 1, characterized in that Before displaying the log information to be displayed in a window, the method further includes: According to a preset time format, the log information is associated with the time to obtain the time-associated log information.

6. The method according to claim 1, characterized in that The step of displaying the log information to be displayed in a window includes: The log information to be displayed is sent to a preset window handle, and the window handle performs an alignment operation on the log information to be displayed according to the log level, and sets the text color of the log information to be displayed according to the log level; The log information that needs to be displayed is displayed in the window according to the text color.

7. The method according to claim 4, characterized in that The generating a log file according to the log information and the data analysis result includes: Generate a first text file according to the log information; Generate a second text file according to the data analysis result; A log file is generated according to the first text file and the second text file.

8. The method according to claim 7, characterized in that The step of generating a first text file according to the log information includes: For the log information repeated within a set time period, the earliest log information, the latest log information and the number of repetitions of the log information are recorded in the first text file; and / or, For the log information used to record error information of the error location, the file, function and line information where the error occurs are recorded in the first text file.

9. The method according to claim 7, characterized in that: The step of generating a second text file according to the data analysis result comprises: Generate a data table according to the process parameter data, the maximum value, the minimum value, the process capability index and / or the process performance index and the data analysis result; generating a data curve according to the process parameter data; The second text file is generated according to the data table and the data curve.

10. The method according to claim 1, characterized in that Before performing data analysis on the process parameter data to obtain the data analysis results, the method further includes: The shared data in the log data is subjected to critical section locking processing to ensure that only one thread is allowed to access the shared data at the same time.

11. The method according to claim 1, characterized in that Also includes: When a system failure of the semiconductor process equipment is detected, a dump file is generated, wherein the dump file includes the currently recorded log information; When it is detected that the semiconductor process equipment restarts the system, the dump file is scanned, and the log information in the dump file is output.

12. The method according to claim 1, characterized in that Also includes: A log sub-file is generated according to the log file, and the log sub-file includes at least one of the following: a log sub-file of process success, a log sub-file of process failure, and a log sub-file of a summary table of the process parameter data.

13. The method according to claim 12, characterized in that Also includes: The log file and the log sub-file are stored in a disk.

14. A semiconductor process equipment, characterized in that: The method comprises a processor, a memory, and a program or instruction stored in the memory and executable on the processor, wherein the program or instruction, when executed by the processor, implements the steps of the method according to any one of claims 1 to 13.

15. A readable storage medium, characterized in that: The readable storage medium stores a program or instruction, and when the program or instruction is executed by a processor, the steps of the method according to any one of claims 1 to 13 are implemented.

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