Detachable slit coating die head and coating equipment

Abstract

The invention relates to the technical field of coating, in particular to a detachable slit coating die head and coating equipment. The detachable slit coating die head comprises a cover plate, a first runner plate and a supporting plate which are stacked from top to bottom, the cover plate, the first runner plate and the supporting plate are detachably connected; a plurality of liquid supply pipes are arranged at the bottom of the first runner plate; a lip coating assembly is arranged below the supporting plate; a liquid inlet groove or a plurality of liquid inlet holes are formed in the lip coating assembly; the liquid supply pipe is inserted into the liquid inlet groove or the liquid inlet hole; a first shunting pipeline is arranged on the top surface or the bottom surface of the first runner plate; the cover plate is connected with a liquid inlet pipe; and the liquid outlet end of the first runner plate is respectively communicated with a plurality of liquid supply pipes. The slit coating die head disclosed by the invention is detachable, the flow dividing pipeline is convenient to clean, the uniformity of feeding of liquid to slits is good, the overall size and weight are smaller, and the controllability is stronger.

Description

Technical Field

[0001] The invention relates to the technical field of coating, and in particular to a decomposable slit coating die head and coating equipment. Background Art

[0002] Slit coating equipment and technology are widely used in the fields of TFT photolithography, OLED (organic light-emitting diode) display flexible substrates, LCD color filter films, thin-film solar cells, etc. Slit coating is to coat various liquid materials on a hard and flat substrate, and then make the materials into film layers through processes such as drying and hardening. These film layers can be used to make thin-film devices and components such as TFT using photolithography, or they can be the substrate of flexible devices, or they can be the functional layer of devices. This technology is one of the important manufacturing processes for components such as LCDs, OLED displays, and thin-film solar cells.

[0003] Taking TFT substrate production as an example, under atmospheric environment, liquid photoresist is injected into the die from the liquid inlet of the die of the slit coating equipment, squeezed out from the slit of the die after passing through the liquid flow channel, and coated on the surface of the glass substrate. The substrate is then transferred to the heating station for heating to form a solid thin film of photoresist.

[0004] A cavity is generally provided in the slit coating die to accumulate liquid coating material. The liquid coating material is squeezed onto the substrate through a slit, and the liquid material is coated on the surface of the substrate through the relative movement of the die and the substrate. The uniformity of the liquid discharge from the die slit largely determines the coating uniformity on the substrate in the length direction of the die slit, and will also determine the uniformity of the solid film finally formed on the surface of the glass substrate. The coating uniformity in the direction perpendicular to the slit length is determined by the relative scanning movement of the die and the substrate, and is relatively easy to control. Therefore, the control of the uniformity of the liquid discharge from the die slit is of great importance. There are at least two key factors affecting the uniform discharge of liquid from the die slit: one is the uniformity of the liquid feeding to the slit, and the other is the uniformity of the slit width.

[0005] The current prior art has the following problems: 1. Most existing die heads use one-point feeding for liquid supply. In order to ensure that all parts of the entire slit can be evenly supplied, a large buffer cavity is required to accumulate liquid. With this arrangement, the volume and weight of the die head will become very large, which increases the difficulty of controlling the movement of the heavy die head. For a few die heads that use multi-point feeding, it is difficult to clean because most of the feeding channels are set inside the die head.

[0006] 2. The die is usually made into two parts. When the two parts of the die are combined, a gasket is added in the middle. The thickness of the gasket controls the width of the slit between the two parts of the die to control the amount of liquid discharge. In order to ensure the uniformity of the discharge, the two walls of the slit must be kept parallel and the predetermined slit gap. Since the two parts of the die are fixed by screws on three sides, and the fourth side, which is the slit discharge end, is not tightened, the material deformation and other reasons make it difficult to ensure the parallelism of the two walls of the slit and the predetermined slit gap.

[0007] 3. In order to ensure that the two walls of the slit do not deform, the prior art usually uses special hard materials to make the above two parts of the die head, and the large volume of the die head will further increase the manufacturing cost.

[0008] As the generation of the coated substrate increases, the width of the die head needs to be further widened, and the above problems will become more serious.

[0009] It can be seen that the existing technology still needs to be improved and enhanced. Summary of the invention

[0010] In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a decomposable slit coating die and coating equipment, aiming to solve the technical problem that the multi-point feeding die in the prior art is difficult to clean and to improve the uniformity of supply.

[0011] In order to achieve the above object, the present invention adopts the following technical solutions: The first aspect of the present invention provides a decomposable slit coating die head, comprising a cover plate, a first flow channel plate and a support plate stacked from top to bottom; the cover plate, the first flow channel plate and the support plate are detachably connected; a plurality of liquid supply pipes are arranged at the bottom of the first flow channel plate; a lip coating assembly is arranged below the support plate; a liquid inlet groove or a plurality of liquid inlet holes are arranged in the lip coating assembly; the liquid supply pipe is inserted into the liquid inlet groove or the liquid inlet hole; a first diversion pipe is arranged on the top surface or the bottom surface of the first flow channel plate, and the first diversion pipe is arranged on the top surface or the bottom surface of the first flow channel plate in the form of a groove; a liquid inlet pipe is connected to the cover plate; the liquid inlet pipe passes through the cover plate and is connected to the liquid inlet end of the first flow channel plate; the liquid outlet end of the first flow channel plate is respectively connected to a plurality of liquid supply pipes.

[0012] The decomposable slit coating die head, wherein the top surface or the bottom surface of the first flow channel plate is provided with a first diversion pipe; the liquid inlet pipe passes through the cover plate and is connected to the liquid inlet end of the first diversion pipe; the liquid outlet end of the first diversion pipe is respectively connected to multiple liquid supply pipes.

[0013] The decomposable slit coating die head, wherein a plurality of second diversion pipes are arranged on the bottom surface or the top surface of the first flow channel plate relative to the first diversion pipe; a plurality of liquid outlet ends of the first diversion pipes are respectively connected to the liquid inlet ends of a plurality of second diversion pipes; and a plurality of liquid outlet ends of the plurality of second diversion pipes are respectively connected to a plurality of liquid supply pipes.

[0014] The decomposable slit coating die head, wherein the first branch pipe and the second branch pipe include multi-stage two-branch pipes; multiple liquid outlet ends of the two-branch pipes at the upper stage are respectively connected to the liquid inlet ends of multiple two-branch pipes at the lower stage.

[0015] The decomposable slot coating die head further comprises a first gasket and a second gasket; the first gasket is arranged between the cover plate and the first flow channel plate; the second gasket is arranged between the first flow channel plate and the support plate.

[0016] The decomposable slit coating die head further comprises at least one second flow channel plate; the second flow channel plate is arranged between the first flow channel plate and the support plate.

[0017] The decomposable slit coating die head further includes at least one third gasket, which is arranged at least one of between the cover plate and the first flow channel plate, between the first flow channel plate and the second flow channel plate, between two adjacent second flow channel plates, or between the second flow channel plate and the support plate.

[0018] The decomposable slit coating die head, wherein the bottom of the cover plate is provided with a mounting cavity, the first flow channel plate is arranged in the mounting cavity; the bottom surface of the cavity wall of the mounting cavity is connected to the support plate.

[0019] The decomposable slit coating die head, wherein the lip coating assembly includes a first coating lip and a second coating lip arranged vertically; the first coating lip and the second coating lip are detachably connected; the liquid inlet groove or liquid inlet hole is arranged in the first coating lip; a fourth gasket is vertically arranged between the first coating lip and the second coating lip; the fourth gasket is used to form a slit between the first coating lip and the second coating lip.

[0020] The decomposable slit coating die head, wherein a buffer cavity is further provided in the lip coating assembly; the buffer cavity is provided between the liquid inlet groove and the slit, or between the liquid inlet hole and the slit.

[0021] The decomposable slit coating die head, wherein an exhaust duct is arranged above the support plate; the air inlet end of the exhaust duct is connected to the liquid inlet groove or the liquid inlet hole; an exhaust pipe is arranged on the support plate; the air inlet end of the exhaust pipe is connected to the air outlet end of the exhaust duct.

[0022] The decomposable slit coating die head, wherein a spoiler is arranged in the liquid inlet tank.

[0023] The decomposable slot coating die head, wherein the cover plate is made of marble.

[0024] The decomposable slot coating die head, wherein the first flow channel plate is made of plastic, ceramic or metal.

[0025] The decomposable slit coating die head, wherein the hardness of the material of which the first flow channel plate is made is less than the hardness of the material of which the cover plate and the support plate are made.

[0026] The decomposable slot coating die head, wherein the liquid surface contact angle of the materials making the first flow channel plate and the second flow channel plate is greater than 30°.

[0027] A second aspect of the present invention provides a coating device, comprising the decomposable slot coating die as described above.

[0028] Beneficial effects: The present invention provides a decomposable slit coating die head, which sets the main body of the first diversion pipe on the surface of the first flow channel plate, and then closes it through a detachably connected cover plate and a support plate. When cleaning is required, the first flow channel plate can be exposed by disassembly, thereby achieving the purpose of easy cleaning. In addition, the surface of the first flow channel plate is provided with the first diversion pipe in the form of a groove, which is not only convenient for cleaning, but also can effectively reduce the thickness required for making the first flow channel plate, compared with setting the diversion pipe inside, so that the volume and weight of the die head are reduced as a whole, and it is easier to control and more precise when the die head is coated.

[0029] Furthermore, the decomposable slit coating die head of the present invention can be flexibly expanded by adding a second flow channel plate as needed, thereby further improving the diversion effect without affecting cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A three-dimensional diagram of a decomposable slot coating die.

[0031] Figure 2 Explosion of the disassembled slot coating die Figure 1 .

[0032] Figure 3 Schematic diagram of the overall flow path of the liquid in the coating die head Figure 1 .

[0033] Figure 4 Explosion of the disassembled slot coating die Figure 2 .

[0034] Figure 5 A cross-sectional view of a decomposable slot coating die head Figure 1 .

[0035] Figure 6 A cross-sectional view of a decomposable slot coating die head Figure 2 .

[0036] Figure 7 Schematic diagram of the overall flow path of the liquid in the coating die head Figure 2 .

[0037] Figure 8 Explosion of the disassembled slot coating die Figure 3 .

[0038] Fig. 9 The first runner plate is viewed from above Figure 1 .

[0039] Fig.10 Schematic diagram of the overall flow path of the liquid in the coating die head Figure 3 .

[0040] Fig.11 Explosion of the disassembled slot coating die Figure 4 .

[0041] Fig.12 The first runner plate is viewed from above Figure 2 .

[0042] Fig.13 Schematic diagram of the overall flow path of the liquid in the coating die head Figure 4 .

[0043] Fig.14 Explosion of the disassembled slot coating die Figure 5 .

[0044] Fig.15 Explosion of the disassembled slot coating die Figure 6 .

[0045] Fig.16 A cross-sectional view of a decomposable slot coating die head Figure 3 .

[0046] Fig.17 A cross-sectional view of a decomposable slot coating die head Figure 4 .

[0047] Explanation of the main component symbols: 1-cover plate, 2-first flow channel plate, 3-support plate, 4-liquid inlet pipe, 5-lip coating assembly, 51-liquid inlet tank, 6-liquid supply pipe, 21-first diversion pipe, 22-second diversion pipe, 23-third diversion pipe, 7-first gasket, 8-second gasket, 9-second flow channel plate, 11-installation cavity, 52-first lip coating, 53-second lip coating, 54-fourth gasket, 55-buffer cavity, 56-slit, 57-spoiler, 24-exhaust duct, 31-exhaust pipe. DETAILED DESCRIPTION

[0048] The present invention provides a decomposable slit coating die and a coating device. In order to make the purpose, technical solution and effect of the present invention clearer and more specific, the present invention is further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0049] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, and a specific direction structure and operation, and therefore, cannot be understood as a limitation of the present invention. In addition, "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means more than two.

[0050] See also Figure 1-Figure 6 In a first aspect, the present invention provides a decomposable slit coating die head, comprising a cover plate 1, a first flow channel plate 2 and a support plate 3 stacked from top to bottom; the cover plate 1, the first flow channel plate 2 and the support plate 3 are detachably connected; a plurality of liquid supply pipes 6 are arranged at the bottom of the first flow channel plate 2; a lip coating assembly 5 is arranged below the support plate 3; a liquid inlet groove 51 or a plurality of liquid inlet holes are arranged in the lip coating assembly 5; the liquid supply pipe 6 is inserted into the liquid inlet groove 51 or the liquid inlet hole; a first diversion pipe 21 is arranged on the top surface or the bottom surface of the first flow channel plate 2; a liquid inlet pipe 4 is connected to the cover plate 1; the liquid inlet pipe 4 passes through the cover plate 1 and is connected to the liquid inlet end of the first flow channel plate 2; the liquid outlet ends of the first flow channel plate 2 are respectively connected to the plurality of liquid supply pipes 6.

[0051] When a plurality of liquid inlet holes are provided in the lip coating assembly 5 , the plurality of liquid inlet holes correspond to the plurality of liquid supply tubes 6 one by one.

[0052] Specifically, the first flow channel plate 2 is used to divert the liquid so as to evenly supply the liquid to the liquid outlet at the bottom of the slot coating die. The present invention adopts a decomposable structure, which can expose the various flow channels or pipes in the die to a large extent during cleaning, thereby improving cleaning efficiency and cleanliness.

[0053] Preferably, a first diversion pipe 21 is provided on the top surface or bottom surface of the first flow channel plate 2; a liquid inlet pipe 4 is connected to the cover plate 1; the liquid inlet pipe 4 passes through the cover plate 1 and is connected to the liquid inlet end of the first diversion pipe 21; the liquid outlet end of the first diversion pipe 21 is respectively connected to multiple liquid supply pipes 6.

[0054] The first flow distribution pipe 21 is provided in the form of a groove on the top surface or the bottom surface of the first flow channel plate 2. When the first flow distribution pipe 21 is provided on the bottom surface of the first flow channel plate 2, a vertical hole is provided in the middle of the first flow channel plate 2 for connecting the liquid inlet end of the first flow distribution pipe 21 and the liquid inlet pipe 4. After assembly, the first flow distribution pipe 21 is covered by the cover plate 1 or the support plate 3 to form a directional flow pipe.

[0055] The edges of the cover plate 1, the first flow channel plate 2 and the support plate 3 of the present invention are respectively provided with a plurality of fixing holes for fixing and connecting by nuts and screws. When cleaning is required, the three are disassembled, and the first diversion pipe 21 on the surface of the first flow channel plate 2 will be fully exposed, so that it is easy to clean. At the same time, since the vertical hole penetrates the first flow channel plate 2 and connects the upper and lower parts of the first flow channel plate 2, there is no curved pipe inside the first flow channel plate 2, making cleaning easier.

[0056] See also Figure 7-Figure 12 Preferably, a plurality of second shunt pipes 22 are provided on the bottom surface or the top surface of the first flow channel plate 2 relative to the first shunt pipe 21; the plurality of liquid outlet ends of the first shunt pipe 21 are respectively connected to the liquid inlet ends of the plurality of second shunt pipes 22; the liquid outlet ends of the plurality of second shunt pipes 22 are respectively connected to the plurality of liquid supply pipes 6.

[0057] In this embodiment, the second flow distribution pipe 22 is arranged opposite to the first flow distribution pipe 21. When the first flow distribution pipe 21 is on the top surface of the first flow channel plate 2, the second flow distribution pipe 22 is located on the bottom surface of the first flow channel plate 2, so that they will not affect each other when the flow channels are distributed.

[0058] See also Figure 7-Figure 9 In this embodiment, the first shunt pipe 21 is arranged on the bottom surface of the first flow channel plate 2, and the second shunt pipe 22 is arranged on the top surface of the first flow channel plate 2; the liquid in the liquid inlet pipe 4 sequentially passes through the vertical holes penetrating the cover plate 1 and the first flow channel plate 2 to reach the liquid inlet end of the first shunt pipe 21, and after being diverted by the first shunt pipe 21, it passes through multiple vertical holes to reach multiple second shunt pipes 22 located above, and after being diverted by the second shunt pipe 22, it reaches the liquid supply pipe 6 below through the vertical pipe extending downward at the liquid outlet end of the second shunt pipe 22.

[0059] See also Figure 10-12In this embodiment, the first shunt pipe 21 is arranged on the top surface of the first flow channel plate 2, and the second shunt pipe 22 is arranged on the bottom surface of the first flow channel plate 2; the liquid in the liquid inlet pipe 4 reaches the liquid inlet end of the first shunt pipe 21 through the vertical hole penetrating the cover plate 1, and after being diverted by the first shunt pipe 21, it reaches the multiple second shunt pipes 22 located below through multiple vertical holes, and then enters the liquid supply pipe 6 at the liquid outlet end of the second shunt pipe 22 after being diverted by the second shunt pipe 22.

[0060] Preferably, the first branch pipe 21 and the second branch pipe 22 include a multi-stage two-branch pipe; the two liquid outlet ends of the two-branch pipe at the upper stage are respectively connected to the liquid inlet ends of the two next-stage two-branch pipes. Specifically, the two liquid outlet channels of the two-branch pipe are symmetrically arranged on both sides of the liquid inlet end to ensure that the flow of the two branches is uniform.

[0061] In a multi-stage two-way split pipe, the directions of the two-way split pipes at each stage can be the same or opposite. Figure 2 and Figure 3 In the embodiment, the first diversion pipe 21 is provided with four-stage two-diversion pipes, and the directions of the two-diversion pipes of the next stage are opposite to those of the previous stage, so that the width of the first diversion pipe 21 can be smaller, and accordingly, the volume of the first flow channel plate 2 is also smaller, and the overall volume and weight of the die head can also be correspondingly smaller.

[0062] Figure 7 and Fig.10 In the embodiment of the present invention, the first flow diversion pipeline 21 is provided with three-stage two-flow diversion pipelines, and the second flow diversion pipeline 22 is provided with two-stage two-flow diversion pipelines.

[0063] Preferably, the multiple liquid outlet ends of the first branch pipe 21 and the second branch pipe 22 are linearly equidistantly arranged.

[0064] Preferably, the decomposable slot coating die head further comprises a first gasket 7 and a second gasket 8; the first gasket 7 is arranged between the cover plate 1 and the first flow channel plate 2; the second gasket 8 is arranged between the first flow channel plate 2 and the support plate 3. The first gasket 7 and the second gasket 8 are used to improve the sealing performance.

[0065] Specifically, the first gasket 7 and the second gasket 8 are provided with through holes and through grooves corresponding to the liquid inlet end and the liquid outlet end of the first flow channel plate 2 respectively.

[0066] See also Figure 13-Figure 15 In one embodiment, the decomposable slot coating die head further includes at least one second flow channel plate 9 ; the second flow channel plate 9 is disposed between the first flow channel plate 2 and the support plate 3 .

[0067] The second flow channel plate 9 can adopt a design similar to that of the first flow channel plate 2, that is, at least one of the top and bottom surfaces is provided with a shunt pipe to further achieve shunt to improve the uniformity of liquid supply. The multiple liquid outlets of the first flow channel plate 2 correspond to the multiple liquid inlet ends of the next-level second flow channel plate 9. The number of second flow channel plates 9 can be one or more, which can be adjusted according to production requirements.

[0068] In a specific embodiment, the top surface and the bottom surface of the first flow channel plate 2 are respectively provided with a flow distribution pipeline, and the top surface or the bottom surface of the second flow channel plate 9 is provided with a flow distribution pipeline.

[0069] In another embodiment, the top surface or the bottom surface of the first flow channel plate 2 is respectively provided with a flow distribution pipeline, and the top surface or the bottom surface of the second flow channel plate 9 is respectively provided with a flow distribution pipeline.

[0070] In another embodiment, the top surface and the bottom surface of the first flow channel plate 2 are respectively provided with flow distribution pipes, and the top surface and the bottom surface of the second flow channel plate 9 are also respectively provided with flow distribution pipes.

[0071] See also Figure 13-Figure 15 In this embodiment, a plurality of third shunt pipes 23 are provided on the bottom surface of the second flow channel plate 9; the third shunt pipe 23 is a two-shunt pipe; the liquid inlet ends of the plurality of third shunt pipes 23 are respectively connected to the plurality of liquid outlet ends of the second shunt pipe 22 through a plurality of vertical pipes penetrating the second flow channel plate 9. The liquid in this embodiment is sequentially shunted through the first shunt pipe 21, the second shunt pipe 22 and the third shunt pipe 23, which can form more liquid supply ports and further improve the uniformity of liquid supply.

[0072] See also Figure 4 In one embodiment, a mounting cavity 11 is provided at the bottom of the cover plate 1, and the first flow channel plate 2 is disposed in the mounting cavity 11; the bottom surface of the cavity wall of the mounting cavity 11 is connected to the support plate 3. In this embodiment, by wrapping the first flow channel plate 2 between the cover plate 1 and the support plate 3, better sealing can be obtained.

[0073] See also Figure 6 In one embodiment, the lip coating assembly 5 includes a first coating lip 52 and a second coating lip 53 which are vertically arranged; the first coating lip 52 and the second coating lip 53 are detachably connected; the liquid inlet groove 51 or the liquid inlet hole is arranged in the first coating lip 52; a fourth gasket 54 is vertically arranged between the first coating lip 52 and the second coating lip 53; the fourth gasket 54 is used to form a slit 56 between the first coating lip 52 and the second coating lip 53.

[0074] Specifically, the first coating lip 52 can be fixedly connected to the support plate 3 and can be manufactured by integral processing. The liquid inlet groove 51 is disposed in the first coating lip 52 .

[0075] See also Figure 6 In one embodiment, a buffer cavity 55 is further provided in the lip coating assembly 5; the buffer cavity 55 is provided between the liquid inlet groove 51 and the slit 56. The liquid inlet groove 51 can also be replaced by a plurality of liquid inlet holes. The buffer cavity 55 is used to improve the stability of the liquid discharge. Specifically, a concave cavity can be provided on at least one of the two inner side surfaces of the first coating lip 52 and the second coating lip 53 opposite to each other, and the buffer cavity 55 can be formed after the first coating lip 52 and the second coating lip 53 are connected.

[0076] See also Fig.16 Preferably, a spoiler 57 is provided in the liquid inlet groove 51.

[0077] See also Figure 6 and Fig.16 In one embodiment, an exhaust duct 24 is provided above the support plate 3; the air inlet end of the exhaust duct 24 is connected to the liquid inlet tank 51; an exhaust pipe 31 is provided on the support plate 3; the air inlet end of the exhaust pipe 31 is connected to the air outlet end of the exhaust duct 24.

[0078] See also Figure 4 In one embodiment, a plurality of exhaust grooves are provided on the bottom surface of the first flow channel plate 2, respectively corresponding to the plurality of liquid supply pipes 6. The exhaust grooves are covered by the support plate 3 to form an exhaust channel 24.

[0079] When the liquid inlet groove 51 is replaced by a plurality of liquid inlet holes, the plurality of exhaust grooves are respectively connected to the plurality of liquid inlet holes.

[0080] In another embodiment, when the decomposable slot coating die includes a first flow channel plate 2 and a second flow channel plate 9 , the exhaust groove is disposed on the bottom surface of the second flow channel plate 9 instead of the bottom surface of the first flow channel plate 2 .

[0081] See also Figure 6 and Figure 8 In another embodiment, for a decomposable slot coating die equipped with a second gasket 8 , the exhaust passage 24 is disposed on the second gasket 8 .

[0082] One or more exhaust pipes 31 may be provided on the support plate 3. The outlet ends of the multiple exhaust channels 24 may be converged through a confluence groove, and then connected to one or more exhaust pipes 31 through the confluence groove. The uniformity of exhaust will also affect the uniformity during coating.

[0083] Specifically, the liquid supply pipe 6 and the first flow channel plate 2 are detachably connected or formed in one piece.

[0084] See also Fig.16 and Fig.17In the case where a shunt pipe is provided on the bottom surface of the first flow channel plate 2 and the shunt pipe on the bottom surface is connected to the liquid supply pipe 6, it is difficult to form the liquid supply pipe 6 and the first flow channel plate 2 as one piece, so it is appropriate to use a method of connecting them after separate processing. The detachable connection method is also convenient for cleaning the bend connection between the liquid supply pipe 6 and the bottom shunt pipe.

[0085] In the case where the liquid supply pipe 6 is not connected to the bottom flow distribution pipe, it is suitable to be manufactured by integral processing and molding.

[0086] Preferably, the first flow channel plate 2 and the second flow channel plate 9 may be made of a material having a liquid surface contact angle greater than 30°.

[0087] Preferably, the first flow channel plate 2 and the second flow channel plate 9 are made of plastic (such as polytetrafluoroethylene), ceramic or metal; the hardness of the material of the first flow channel plate 2 and the second flow channel plate 9 is less than the hardness of the material of the cover plate 1 and the support plate 3; the cover plate 1 can be made of marble, ceramic or metal.

[0088] Among them, the flow channel plate made of polytetrafluoroethylene is lighter, which can greatly reduce the overall weight of the die head. At the same time, the use of polytetrafluoroethylene can achieve a good sealing effect. The polytetrafluoroethylene material has a large liquid surface contact angle, which is easy for liquid to flow and easier to clean.

[0089] A second aspect of the present invention provides a coating device, which includes the decomposable slot coating die as described above.

[0090] In summary, the present invention provides a decomposable slot coating die head and arranges the diversion pipe on the top or bottom surface of the flow channel plate, so that the exposed diversion pipe can be easily cleaned after disassembly. The flow channel plate design of the present invention not only ensures the uniformity of supply, but also makes the die head smaller in size and weight, and easier to control.

[0091] It is understandable that those skilled in the art can make equivalent substitutions or changes based on the technical solution and inventive concept of the present invention, and all these changes or substitutions should fall within the protection scope of the claims attached to the present invention.

Claims

1. A decomposable slot coating die head, characterized in that: It comprises a cover plate, a first flow channel plate and a support plate which are stacked from top to bottom; the cover plate, the first flow channel plate and the support plate are detachably connected; a plurality of liquid supply pipes are arranged at the bottom of the first flow channel plate; a lip coating assembly is arranged below the support plate; a liquid inlet groove or a plurality of liquid inlet holes are arranged in the lip coating assembly; the liquid supply pipe is inserted into the liquid inlet groove or the liquid inlet hole; a first shunt pipe is arranged on the top surface or the bottom surface of the first flow channel plate, and the first shunt pipe is arranged on the top surface or the bottom surface of the first flow channel plate in the form of a groove; a liquid inlet pipe is connected to the cover plate; the liquid inlet pipe passes through the cover plate and is connected to the liquid inlet end of the first flow channel plate; the liquid outlet end of the first flow channel plate is respectively connected to a plurality of liquid supply pipes.

2. The decomposable slot coating die according to claim 1, characterized in that: A plurality of second shunt pipes are arranged on the bottom or top surface of the first flow channel plate relative to the first shunt pipe; the plurality of liquid outlet ends of the first shunt pipes are respectively connected to the liquid inlet ends of the plurality of second shunt pipes; the liquid outlet ends of the plurality of second shunt pipes are respectively connected to the plurality of liquid supply pipes.

3. The decomposable slot coating die according to claim 2, characterized in that: The first branch pipe and the second branch pipe include multiple stages of two branch pipes; multiple liquid outlets of the two branch pipes at the previous stage are respectively connected to the liquid inlet ends of multiple two branch pipes at the next stage.

4. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: It also includes a first gasket and a second gasket; the first gasket is arranged between the cover plate and the first flow channel plate; the second gasket is arranged between the first flow channel plate and the support plate.

5. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: It also includes at least one second flow channel plate; the second flow channel plate is arranged between the first flow channel plate and the support plate.

6. The decomposable slot coating die according to claim 5, characterized in that: It also includes at least one third gasket, which is arranged at least one of between the cover plate and the first flow channel plate, between the first flow channel plate and the second flow channel plate, between two adjacent second flow channel plates, or between the second flow channel plate and the support plate.

7. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: The bottom of the cover plate is provided with a mounting cavity, and the first flow channel plate is arranged in the mounting cavity; the bottom surface of the cavity wall of the mounting cavity is connected to the support plate.

8. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: The lip smear assembly includes a first lip smear and a second lip smear; the first lip smear and the second lip smear are detachably connected; the liquid inlet groove or the liquid inlet hole is arranged in the first lip smear; a fourth gasket is vertically arranged between the first lip smear and the second lip smear; the fourth gasket is used to form a slit between the first lip smear and the second lip smear.

9. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: A buffer cavity is also arranged in the lip coating assembly; the buffer cavity is arranged between the liquid inlet groove and the slit, or between the liquid inlet hole and the slit.

10. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: An exhaust duct is arranged above the support plate; the air inlet end of the exhaust duct is communicated with the liquid inlet groove or the liquid inlet hole; an exhaust pipe is arranged on the support plate; the air inlet end of the exhaust pipe is communicated with the air outlet end of the exhaust duct.

11. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: A spoiler is arranged in the liquid inlet tank.

12. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: The cover plate is made of marble.

13. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: The first flow channel plate is made of plastic, ceramic or metal.

14. The decomposable slot coating die according to any one of claims 1 to 3, characterized in that: The hardness of the material of which the first flow channel plate is made is smaller than the hardness of the material of which the cover plate and the support plate are made.

15. The decomposable slot coating die according to claim 5, characterized in that: The liquid surface contact angle of the materials used to make the first flow channel plate and the second flow channel plate is greater than 30°.

16. A coating device, characterized in that: It comprises the decomposable slot coating die as described in any one of claims 1 to 15.

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