Sputtering target diffusion welding equipment and method thereof
By using a combination of mobile slide rails, sliding slide rails and push cylinders in the welding equipment, the welding gun automatically finds welding points and height adjustments, solving the problem of long welding time in the existing welding methods, improving welding efficiency and reducing energy consumption.
Patent Information
- Application Number
- CN202510140891.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-08
- Publication Date
- 2025-04-18
AI Technical Summary
In the existing welding methods, welding guns need to actively find welding points, resulting in an increase in welding time and affecting efficiency.
A sputtering target diffusion welding equipment is designed. Through the cooperation of moving slide rails, sliding slide rails and pushing cylinders, the mobile station automatically finds welding points and automatically adjusts the height of the welding gun.
Reduces operating steps, shortens welding time, improves welding efficiency, and reduces energy consumption by automatically venting air in the sealed box.
Smart Images
Figure CN119839419A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of welding processing, in particular to a sputtering target material diffusion welding device and a method thereof. Background Art
[0002] Sputtering target diffusion welding is an advanced solid-phase welding technology. It uses high temperature and pressure to cause atomic diffusion between the sputtering target and the substrate or backplane in the solid state to form a tight and high-strength bond, thereby improving the mechanical properties and thermal stability of the target. It is widely used in thin film deposition fields such as microelectronics, optics and solar energy.
[0003] In the diffusion welding process of sputtering targets, the control of the welding environment is crucial. Usually, welding is carried out under high vacuum or inert gas protection to prevent oxidation and impurity contamination. Accurate control of temperature and pressure, combined with surface treatment and equipment maintenance, ensures the quality and performance of the welded joint.
[0004] The current welding method is to install the welding gun on a manipulator or a three-axis electric slide, so the welding gun actively searches for welding points. However, the target material to be welded is placed on the welding platform, and the target material to be welded will not actively search for welding points. The welding gun only moves alone, which will inevitably increase the welding time and affect the welding efficiency. Therefore, it does not meet the existing needs. We propose a sputtering target diffusion welding device and method. Summary of the invention
[0005] The present invention provides a sputtering target diffusion welding device and method, which has the beneficial effect of recovering inert gas and exhausting air at the same time, and solves the problem that the current welding method mentioned in the above background technology is to install the welding gun on a manipulator or a three-axis electric slide, so that the welding gun actively searches for welding points, but the target material to be welded is placed on the welding platform, and the target material to be welded will not actively search for welding points. The welding gun only moves alone, which will inevitably increase the welding time and affect the welding efficiency.
[0006] The present invention provides the following technical solution: a sputtering target diffusion welding device, comprising a welding platform and a welding gun for welding the target material, a sealed box is installed on the upper side of the welding platform, a sealed door is arranged on the sealed box, a rotating shaft is movably arranged between the sealed door and the sealed box, a movable table for placing the target material is movably installed on the welding platform, a storage box for storing gas is installed on the upper side of the sealed box, a first ventilation structure for exhausting the air of the sealed box is arranged inside the sealed box, a placement area is opened on the upper side of the sealed box, a driving structure for driving the ventilation structure to operate is arranged on the placement area, and a ventilation fan for recovering the gas is arranged inside the sealed box.
[0007] As an optional solution of the sputtering target diffusion welding equipment described in the present invention, wherein: movable slide rails are symmetrically installed on the upper part of the welding platform, sliding blocks are slidably installed on two of the movable slide rails, a sliding rail is installed between the two sliding blocks, the movable platform is slidably installed on the upper side of the sliding rails, and a pushing cylinder for adjusting the height of the welding gun is installed inside the sealing box.
[0008] As an optional scheme of a sputtering target diffusion welding device described in the present invention, wherein: the first ventilation structure includes a rotating chamber opened inside the sealed box, and an air inlet and an air outlet opened at both ends of the rotating chamber, and a rotating shaft rotatably installed inside the rotating chamber, the rotating shaft is eccentrically arranged inside the rotating chamber, three groups of rotating cross plates are hinged on the side of the rotating shaft, the inner wall of the rotating chamber is provided with a track groove, and sliding columns are installed at the ends of the three groups of rotating cross plates, the sliding columns are slidably matched with the track groove, the air inlet is communicated with the interior of the sealed box, and the air outlet is communicated with the outside.
[0009] As an optional scheme of a sputtering target diffusion welding device described in the present invention, a rotating ring table is rotatably installed on the placement area, the driving structure includes a tooth groove integrally opened on the upper side of the rotating ring table, and a support shaft rotatably installed on the placement area, and a connecting rod rotatably installed inside the support shaft, limiting ring blocks are installed at both ends of the connecting rod, a tooth block is installed on the bottom side of the limiting ring block, the support shaft and the rotating ring table are clearance-matched, a driving ring block is rotatably installed on the placement area, a first gear is installed on the driving ring block, and a spiral spring is installed between the driving ring block and the rotating ring table.
[0010] As an optional solution of a sputtering target diffusion welding device described in the present invention, a transmission belt group is installed between the support shaft and the rotating shaft, and the transmission belt group includes pulleys rotatably installed on the rotating shaft and the support shaft respectively, and a transmission belt rotatably matched on the two pulleys.
[0011] As an optional solution of the sputtering target diffusion welding device described in the present invention, wherein: a first bevel gear is installed at the end of the rotating shaft, and the first bevel gear is meshed with the first gear;
[0012] After the sealing door is closed, the rotating shaft rotates inside the rotating chamber, so that the three groups of rotating transverse plates rotate and form negative pressure, so that the air inside the sealing box is discharged.
[0013] As an optional solution of the sputtering target diffusion welding equipment described in the present invention, a connecting column is installed on the side of the welding gun, and a pressing plate is installed on the connecting column.
[0014] As an optional solution of the sputtering target diffusion welding equipment described in the present invention, wherein: a placement frame is installed inside the sealed box, a movable window is opened on the side of the placement frame, a first rack is slidably installed inside the movable window, a second rack is movably installed inside the placement frame, a second gear and a third gear are meshed between the first rack and the second rack, and a support plate is installed on the side of the first rack;
[0015] When the pushing cylinder is extended and retracted, the bottom side of the supporting plate contacts the connecting column, the second rack is configured as a double-sided rack, and one side of the second rack is meshed with the first bevel gear.
[0016] As an optional scheme of the sputtering target diffusion welding equipment described in the present invention, wherein: an air suction cavity is opened on the inner wall of the sealed box, an air suction fan is rotatably installed inside the air suction cavity, a second bevel gear is installed at the output end of the air suction fan, the second bevel gear is meshed with the second rack, an air inlet pipe and an air outlet pipe are respectively opened at both ends of the air suction cavity, and the air inlet pipe and the air outlet pipe are respectively installed with a one-way valve to avoid the leakage of inert gas as much as possible when the air suction fan is stationary, the air outlet pipe is communicated with the inside of the storage box, and the air inlet pipe is communicated with the sealed box.
[0017] The present invention also provides a sputtering target diffusion welding method, comprising the following specific steps:
[0018] S1. Clean the target and back plate welding surface;
[0019] S1. Add 60%-70% by weight of silver powder or 70%-80% by weight of activated carbon particles to the epoxy resin glue, and evenly apply it on the target and backplane welding surface and both sides of the copper mesh;
[0020] S3. Place the copper mesh and target material on the backing plate in sequence and position them, and perform welding at the same time.
[0021] The present invention has the following beneficial effects:
[0022] 1. The sputtering target diffusion welding equipment and method thereof realize the lateral and longitudinal position adjustment of the mobile platform through the cooperation of the mobile slide rail, the sliding slide rail and the sliding block, so that the mobile platform drives the material to automatically find the point that needs to be welded; not only that, through the cooperation of the pushing cylinder, the height of the welding gun can be automatically adjusted when the pushing cylinder is running, so that the material on the mobile platform contacts the welding gun and welds. This solution simultaneously performs the lowering of the welding gun and the movement of the mobile platform, reduces the operating steps, shortens the welding time, and improves the welding efficiency.
[0023] 2. The sputtering target diffusion welding equipment and method, after closing the sealing door, utilizes the cooperation of the rotating shaft, the supporting shaft, the first gear, the spiral spring, the driving ring block and the first bevel gear to rotate the rotating shaft. During the rotation of the rotating shaft, the air is squeezed by utilizing the cooperation of the rotating cross plate and the rotating chamber. By eccentrically setting the rotating shaft, one corner of the rotating shaft contacts the inside of the rotating chamber during the rotation of the rotating shaft, and at the same time, the inclination angle of the rotating cross plate changes, so that the chamber becomes smaller, so that the squeezed gas flows out from the air outlet. Through the continuous movement of the rotating shaft, the cooperation of the rotating cross plate and the rotating chamber will continuously squeeze the air in the chamber, so that the air is continuously discharged from the air outlet, thereby realizing the continuous discharge of the air inside the sealed box. This solution does not require an independent vacuum pump, reduces energy consumption, and realizes the automatic discharge of air by closing the sealing door.
[0024] 3. The sputtering target diffusion welding equipment and method thereof, through the cooperation of the first rack, the second rack, the second gear and the third gear, the first rack moves downward while the cylinder drives the welding gun to move, so the first rack drives the second gear and the third gear to rotate, and drives the second rack to move during the rotation process; the second rack meshes with the second bevel gear during the movement, so that the second bevel gear drives the rotating shaft to rotate, and the gas inside the storage box is absorbed during the rotation of the rotating shaft, and the absorbed gas enters the sealed box, and the gas inside the sealed box is replenished;
[0025] Moreover, through the setting of the second gear and the third gear, the moving distance of the second rack is greater than that of the first rack in the same time, so the number of rotations of the rotating shaft increases, so that more gas is absorbed into the inside of the sealed box, so that the inert gas quickly replaces the air in the sealed box, thereby improving the welding environment and the welding effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 It is a schematic diagram of the matching structure of the welding platform sealing box of the present invention.
[0027] Figure 2 For the present invention Figure 1 A in the figure is an enlarged structural diagram.
[0028] Figure 3 It is a schematic diagram of the tooth block and tooth socket structure of the present invention.
[0029] Figure 4 It is a schematic diagram of the half-cut structure of the sealing box of the present invention.
[0030] Figure 5 It is a schematic diagram of the first ventilation structure and the cutaway structure of the first ventilation structure of the present invention.
[0031] Figure 6 For the present invention Figure 4The enlarged structural diagram at B in FIG.
[0032] Figure 7 It is a schematic diagram of the transmission matching structure between the first rack and the second rack of the present invention.
[0033] Figure 8 It is a schematic diagram of the cross-section structure of the rotating ring table of the present invention.
[0034] In the figure: 10, welding platform; 110, welding gun; 111, sealing box; 112, sealing door; 113, rotating shaft; 114, moving platform; 115, storage box; 120, first ventilation structure; 121, rotating chamber; 122, air inlet; 123, air outlet; 124, rotating shaft; 125, rotating horizontal plate; 126, track groove; 127, sliding column; 130, placement area; 140, driving structure; 150, ventilation fan; 160, moving slide rail; 161, sliding block; 162, sliding slide rail; 163, pushing cylinder; 170, rotating ring platform; 171, first gear; 173, tooth Groove; 174, support shaft; 175, connecting rod; 180, limiting ring block; 181, tooth block; 190, transmission belt group; 191, pulley; 192, transmission belt; 210, first bevel gear; 213, connecting column; 220, pressing plate; 221, placement frame; 222, first rack; 223, second rack; 230, movable window; 231, support plate; 240, second gear; 241, third gear; 250, driving ring block; 251, scroll spring; 260, suction chamber; 261, suction fan; 262, second bevel gear; 263, air inlet pipe; 264, air outlet pipe. DETAILED DESCRIPTION
[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0036] Embodiment 1: This embodiment is intended to promote the solution of the current welding method that the welding gun 110 is installed on a manipulator or a three-axis electric slide, so the welding gun 110 actively searches for welding points. However, the target material to be welded is placed on the welding platform 10, and the target material to be welded will not actively search for welding points. The welding gun 110 is only moved in a single movement, which will inevitably increase the welding time and affect the welding efficiency. Please refer to Figure 1-Figure 8A sputtering target diffusion welding device and method thereof include a welding platform 10 and a welding gun 110 for welding the target material, a sealed box 111 is installed on the upper side of the welding platform 10, a sealed door 112 is arranged on the sealed box 111, a rotating shaft 113 is movably arranged between the sealed door 112 and the sealed box 111, a movable table 114 for placing the target material is movably installed on the welding platform 10, a storage box 115 for storing gas is installed on the upper side of the sealed box 111, an inert gas is stored in the storage box 115, a first ventilation structure 120 for discharging the air of the sealed box 111 is arranged inside the sealed box 111, a placement area 130 is opened on the upper side of the sealed box 111, a driving structure 140 for driving the ventilation structure to operate is arranged on the placement area 130, and a ventilation fan 150 for recovering gas is arranged inside the sealed box 111.
[0037] See Figure 1 and Figure 4 In a specific implementation, movable rails 160 are symmetrically installed on the upper side of the welding platform 10, sliding blocks 161 are slidably installed on the two movable rails 160, a sliding rail 162 is installed between the two sliding blocks 161, the movable platform 114 is slidably installed on the upper side of the sliding rail 162, and a pushing cylinder 163 for adjusting the height of the welding gun 110 is installed inside the sealing box 111.
[0038] See Figure 1 and Figure 4 By moving the slide rail 160 and the sliding rail 162, the sliding block 161 can slide freely on the moving slide rail 160 and can slide freely on the sliding rail 162, thereby realizing the lateral and longitudinal position adjustment of the moving platform 114, so that the welding gun 110 can be accurately positioned to the point that needs to be welded; not only that, by cooperating with the pushing cylinder 163, the height of the welding gun 110 can be automatically adjusted when the pushing cylinder 163 is in operation, so that the welding gun 110 can be accurately aligned with the welding point at different heights, thereby improving the flexibility and accuracy of welding.
[0039] It should be noted that the movable slide rail 160 and the sliding slide rail 162 are respectively configured as electric slide rails. The electric slide rail is a common transportation device. In the material transmission or handling system, the electric slide rail can move the workpiece or material quickly and smoothly to improve production efficiency. Its specific model, working principle and usage are well known to technical personnel in this field and will not be elaborated here.
[0040] In this embodiment: through the cooperation of the moving rail 160, the sliding rail 162 and the sliding block 161, the lateral and longitudinal position adjustment of the moving platform 114 is realized, so that the moving platform 114 drives the material to automatically find the point that needs to be welded; not only that, through the cooperation of the pushing cylinder 163, the height of the welding gun 110 can be automatically adjusted when the pushing cylinder 163 is running, so that the material on the moving platform 114 and the welding gun 110 are in contact and welded. This solution simultaneously performs the descent of the welding gun 110 and the movement of the moving platform 114, thereby reducing the operating steps, shortening the welding time, and improving the welding efficiency.
[0041] Embodiment 2: This embodiment is intended to promote the solution of the problem that the environment required for welding the target is relatively strict, and welding is usually performed in a high vacuum environment. However, the existing method is to achieve this through a vacuum pump, so a new power source is required, thereby increasing the cost of welding. This embodiment is an improvement made on the basis of Embodiment 1. For details, please refer to Figure 1-Figure 8 A transmission belt set 190 is installed between the support shaft 174 and the rotating shaft 113. The transmission belt set 190 includes pulleys 191 rotatably installed on the rotating shaft 113 and the support shaft 174 respectively, and a transmission belt 192 rotatably matched on the two pulleys 191.
[0042] See Figure 1 , Figure 2 , Figure 3 and Figure 8 A rotating ring table 170 is rotatably installed on the placement area 130, and the driving structure 140 includes a tooth groove 173 integrally opened on the upper side of the rotating ring table 170, and a support shaft 174 rotatably installed on the placement area 130, and a connecting rod 175 rotatably installed inside the support shaft 174, and limiting ring blocks 180 are installed at both ends of the connecting rod 175, and a tooth block 181 is installed on the bottom side of the limiting ring block 180. The support shaft 174 and the rotating ring table 170 are clearance-matched, and a driving ring block 250 is rotatably installed on the placement area 130, and a first gear 171 is installed on the driving ring block 250, and a volute spring 251 is installed between the driving ring block 250 and the rotating table.
[0043] See Figure 1 , Figure 2 , Figure 3 and Figure 8In specific implementation, during the process of closing the sealing door 112, the rotating shaft 113 rotates, and the support shaft 174 rotates by utilizing the cooperation of the pulley 191 group. During the rotation of the support shaft 174, the connecting rod 175 is utilized to drive the limiting ring block 180 to rotate, thereby limiting the engagement of the tooth block 181 on the bottom side of the ring block 180 with the tooth groove 173, so that the rotating ring platform 170 can be driven to rotate during the rotation of the rotating shaft 113. During the rotation, the rotating ring platform 170 winds up the volute spring 251, so that the volute spring 251 gradually accumulates force. When the sealing door 112 is closed, the rotating ring platform 170 no longer rotates, so the wound volute spring 251 is released, and drives the driving ring block 250 to rotate during the release process.
[0044] Moreover, in the process of opening the sealing door 112, since the first gear 171 will not rotate in the opposite direction, and at the same time, through the rotation coordination of the connecting rod 175 and the support shaft 174, when the rotating shaft 113 is reversed, the tooth groove 173 will resist the tooth block 181, so that the tooth groove 173 and the tooth block 181 are staggered, so that the rotating shaft 113 can rotate smoothly as much as possible.
[0045] See Figure 1 and Figure 3 The first ventilation structure 120 includes a rotating chamber 121 provided inside the sealed box 111, an air inlet 122 and an air outlet 123 provided at both ends of the rotating chamber 121, and a rotating shaft 124 rotatably installed inside the rotating chamber 121. The rotating shaft 124 is eccentrically rotated and arranged inside the rotating chamber 121. Three groups of rotating horizontal plates 125 are hingedly connected to the side of the rotating shaft 124. A track groove 126 is provided on the inner wall of the rotating chamber 121. Sliding columns 127 are installed at the ends of the three groups of rotating horizontal plates 125. The sliding columns 127 are slidably matched with the track groove 126. The air inlet 122 is communicated with the inside of the sealed box 111, and the air outlet 123 is communicated with the outside. The ventilation fan 150 has the same specifications as the first ventilation structure 120. A first bevel gear 210 is installed at the end of the rotating shaft 124, and the first bevel gear 210 is meshed with the first gear 171.
[0046] In a specific implementation, after the sealing door 112 is closed, the first gear 171 is rotated through the cooperation of the driving structure 140 and the driving pulley assembly 190. During the rotation of the first gear 171, the first gear 171 meshes with the first bevel gear 210, so that the first bevel gear 210 drives the rotating shaft 124 to rotate, thereby driving the rotating transverse plate 125 to rotate during the rotation process. During the rotation of the rotating transverse plate 125, the sliding column 127 and the track groove 126 pull the end of the rotating transverse plate 125 to fit the inner wall of the rotating chamber 121. Thus, independent chambers are formed between the three groups of rotating cross plates 125, and the gas is driven during the rotation of the rotating shaft 124. Since the rotating shaft 124 is eccentrically arranged, one corner of the rotating shaft 124 contacts the inside of the rotating chamber 121 during the rotation of the rotating shaft 124. At the same time, the angle of the rotating cross plate 125 gradually changes from an inclined surface to a flat surface, so that the chamber becomes smaller, thereby squeezing the gas to the air outlet 123, and the air inside the sealing box 111 is discharged through the continuous rotation movement, so as to reduce the air inside the sealing box 111 as much as possible and improve the welding effect.
[0047] In this embodiment: after closing the sealing door 112, the rotating shaft 124 is rotated by utilizing the cooperation of the rotating shaft 113, the supporting shaft 174, the first gear 171, the spiral spring 251, the driving ring block 250 and the first bevel gear 210. During the rotation of the rotating shaft 124, the air is squeezed by utilizing the cooperation of the rotating cross plate 125 and the rotating chamber 121. By eccentrically setting the rotating shaft 124, one corner of the rotating shaft 124 contacts the inside of the rotating chamber 121 during the rotation of the rotating shaft 124. At the same time, the inclination angle of the rotating cross plate 125 changes, making the chamber smaller. Therefore, the squeezed gas flows out from the air outlet 123. Through the continuous movement of the rotating shaft 124, the cooperation of the rotating cross plate 125 and the rotating chamber 121 will continuously squeeze the air in the chamber, so that the air is continuously discharged from the air outlet 123, thereby realizing the continuous discharge of the air inside the sealing box 111. This solution does not require an independent vacuum pump, reduces energy consumption, and realizes the automatic discharge of air by closing the sealing door 112.
[0048] Embodiment 3: This embodiment is intended to promote the solution of the problem that all the air cannot be exhausted by closing the door, thereby affecting the welding effect. This embodiment is an improvement made on the basis of embodiment 2. For details, please refer to Figure 1-Figure 8 A connecting column 213 is installed between the welding guns 110, a pressing plate 220 is installed on the connecting column 213, a placing frame 221 is installed inside the sealing box 111, a movable window 230 is opened on the side of the placing frame 221, a first rack 222 is slidably installed inside the movable window 230, a second rack 223 is movably installed inside the placing frame 221, a second gear 240 and a third gear 241 are meshed between the first rack 222 and the second rack 223, and a supporting plate 231 is installed on the side of the first rack 222;
[0049] The second rack gear 223 is configured as a double-sided rack gear, and one side of the second rack gear 223 is meshed with the first bevel gear 210 .
[0050] An air intake chamber 260 is provided on the inner wall of the sealed box 111, and an air intake fan 261 is rotatably installed inside the air intake chamber 260. A second bevel gear 262 is installed on the output end of the air intake fan 261, and the second bevel gear 262 is meshed with the second rack 223. An air inlet pipe 263 and an air outlet pipe 264 are respectively provided at both ends of the air intake chamber 260, and the air outlet pipe 264 is communicated with the interior of the storage box 115, and the air inlet pipe 263 is communicated with the sealed box 111.
[0051] See Figure 1 , Figure 4 , Figure 6 and Figure 7 In a specific implementation, after the sealing door 112 is closed, the welding gun 110 is driven to move by pushing the cylinder 163, and the pressing plate 220 moves downward. Since the pressing plate 220 contacts the support plate 231 and supports the support plate 231 at the same time, when the support plate 231 loses its restriction, the first rack 222 installed on the side of the support plate 231 moves downward. While the first rack 222 moves downward, the second gear 240 and the third gear 241 rotate, and the second rack 223 is driven to move during the rotation. During the movement of the second rack 223, it meshes with the second bevel gear 262, so that the second bevel gear 262 rotates and drives the suction fan 261 to rotate, so that the gas inside the storage box 115 enters the sealed box 111 to replenish the gas inside the sealed box 111;
[0052] At the same time, due to the rolling stroke of the second gear 240 and the third gear 241, the actual moving distance of the second gear 240 and the third gear 241 will be greater than the moving distance of the first rack 222. Therefore, this amplified moving distance is transmitted to the second rack 223, so that in the same time, the moving distance of the second rack 223 will be longer than the first rack 222, so that the number of rotations of the rotating shaft 124 becomes more, so that more gas is sucked into the sealed box 111.
[0053] Moreover, when welding is not in progress, the cylinder 163 is pushed to drive the welding gun 110 to return to its original position. During the return process, the welding gun 110 drives the pressing plate 220 to move upward, and during the movement, the pressing plate 220 contacts the support plate 231, so that the first rack 222 moves upward together. At the same time, the second gear 240, the third gear 241, and the second rack 223 cooperate to make the suction fan 261 reverse, thereby recovering the inert gas inside the sealing box 111 and saving costs.
[0054] It should be noted that in the process of pushing the cylinder 163 to drive the welding gun 110 to move upward, the first rack 222 has a certain height through the setting of the placement frame 221. Since the thickness of the sputtering target is relatively thin, the up and down movement of the welding gun 110 during the welding process will not drive the first rack 222 to move, and therefore will not disturb the inert gas.
[0055] In this embodiment, through the cooperation of the first rack 222, the second rack 223, the second gear 240 and the third gear 241, the first rack 222 moves downward while the cylinder 163 drives the welding gun 110 to move, so the first rack 222 drives the second gear 240 and the third gear 241 to rotate, and drives the second rack 223 to move during the rotation process; the second rack 223 is meshed with the second bevel gear 262 during the movement, so that the second bevel gear 262 drives the rotating shaft 124 to rotate, and during the rotation of the rotating shaft 124 During the process, the gas inside the storage box 115 is sucked, and the sucked gas enters the sealed box 111, and the gas inside the sealed box 111 is replenished; not only that, through the setting of the second gear 240 and the third gear 241, the moving distance of the second rack 223 is greater than the distance of the first rack 222 in the same time, so the number of rotations of the rotating shaft 124 is increased, so that more gas is sucked into the sealed box 111, and the inert gas quickly replaces the air in the sealed box 111, thereby improving the welding environment and the welding effect.
[0056] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.
[0057] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.
Claims
1. A sputtering target diffusion welding device, comprising a welding platform (10) and a welding gun (110) for welding the target, wherein a sealing box (111) is installed on the upper side of the welding platform (10), a sealing door (112) is arranged on the sealing box (111), and a rotating shaft (113) is movably arranged between the sealing door (112) and the sealing box (111), characterized in that: A movable table (114) for placing a target material is movably mounted on the welding platform (10); a storage box (115) for storing gas is mounted on the upper side of the sealed box (111); a first ventilation structure (120) for discharging air from the sealed box (111) is arranged inside the sealed box (111); a placement area (130) is provided on the upper side of the sealed box (111); a driving structure (140) for driving the first ventilation structure (120) to operate is arranged on the placement area (130); and a ventilation fan (150) for recovering gas is arranged inside the sealed box (111).
2. The sputtering target diffusion welding device according to claim 1, characterized in that: The upper side of the welding platform (10) is symmetrically mounted with movable rails (160), two sliding blocks (161) are slidably mounted on the two movable rails (160), a sliding rail (162) is mounted between the two sliding blocks (161), the movable platform (114) is slidably mounted on the upper side of the sliding rails (162), and a pushing cylinder (163) for adjusting the height of the welding gun (110) is installed inside the sealing box (111).
3. The sputtering target diffusion welding device according to claim 2, characterized in that: The first ventilation structure (120) comprises a rotating chamber (121) provided inside the sealing box (111), an air inlet (122) and an air outlet (123) provided at two ends of the rotating chamber (121), and a rotating shaft (124) rotatably installed inside the rotating chamber (121); the rotating shaft (124) is eccentrically arranged inside the rotating chamber (121); three groups of rotating transverse plates (125) are hingedly connected to the side of the rotating shaft (124); a track groove (126) is provided on the inner wall of the rotating chamber (121); sliding columns (127) are installed at the ends of the three groups of rotating transverse plates (125); the sliding columns (127) are slidably matched with the track groove (126); the air inlet (122) is communicated with the inside of the sealing box (111), and the air outlet (123) is communicated with the outside.
4. The sputtering target diffusion welding device according to claim 3, characterized in that: A rotating ring platform (170) is rotatably mounted on the placement area (130); the driving structure (140) comprises a tooth groove (173) integrally opened on the upper side of the rotating ring platform (170), a support shaft (174) rotatably mounted on the placement area (130), and a connecting rod (175) rotatably mounted inside the support shaft (174); limiting ring blocks (180) are mounted on both ends of the connecting rod (175); a tooth block (181) is mounted on the bottom side of the limiting ring block (180); the support shaft (174) and the rotating ring platform (170) are clearance-matched; a driving ring block (250) is rotatably mounted on the placement area (130); a first gear (171) is mounted on the driving ring block (250); and a volute spring (251) is mounted between the driving ring block (250) and the rotating ring platform (170).
5. The sputtering target diffusion welding device according to claim 4, characterized in that: A transmission belt group (190) is installed between the support shaft (174) and the rotating shaft (113), and the transmission belt group (190) includes pulleys (191) rotatably installed on the rotating shaft (113) and the support shaft (174), and a transmission belt (192) rotatably engaged with the two pulleys (191).
6. The sputtering target diffusion welding device according to claim 5, characterized in that: A first bevel gear (210) is installed at the end of the rotating shaft (124), and the first bevel gear (210) is meshed with the first gear (171); After the sealing door (112) is closed, the rotating shaft (124) rotates inside the rotating chamber (121), causing the three groups of rotating transverse plates (125) to rotate and form negative pressure, so that the air inside the sealing box (111) is discharged.
7. The sputtering target diffusion welding equipment according to claim 2, characterized in that: A connecting column (213) is installed on the side of the welding gun (110), and a pressing plate (220) is installed on the connecting column (213).
8. The sputtering target diffusion welding device according to claim 7, characterized in that: A placement frame (221) is installed inside the sealing box (111), a movable window (230) is opened on the side of the placement frame (221), a first rack (222) is slidably installed inside the movable window (230), a second rack (223) is movably installed inside the placement frame (221), a second gear (240) and a third gear (241) are meshed between the first rack (222) and the second rack (223), and a support plate (231) is installed on the side of the first rack (222); The second rack (223) is configured as a double-sided rack, and one side of the second rack (223) is meshed with the first bevel gear (210).
9. The sputtering target diffusion welding device according to claim 8, characterized in that: An air intake chamber (260) is provided on the inner wall of the sealed box (111), an air intake fan (261) is rotatably installed inside the air intake chamber (260), a second bevel gear (262) is installed at the output end of the air intake fan (261), the second bevel gear (262) is meshed with the second rack (223), an air inlet pipe (263) and an air outlet pipe (264) are respectively provided at both ends of the air intake chamber (260), the air outlet pipe (264) is communicated with the inside of the storage box (115), and the air inlet pipe (263) is communicated with the sealed box (111).
10. A sputtering target diffusion welding method, comprising the sputtering target diffusion welding device according to any one of claims 1 to 9, characterized in that: The method comprises the following specific steps: S1. Clean the target and back plate welding surface; S1. Add 60%-70% by weight of silver powder or 70%-80% by weight of activated carbon particles to the epoxy resin glue, and evenly apply it on the target and backplane welding surface and both sides of the copper mesh; S3. Place the copper mesh and target material on the backing plate in sequence and position them, and perform welding at the same time.