Temperature adjustment device

Abstract

The present application relates to the technical field of coating equipment, and discloses a temperature adjustment device, including: a cylinder body, including a cylindrical cylinder wall and plate-shaped first and second side walls; wherein, at least two liquid flow channels are arranged along the cylinder wall, and the liquid inlet of a part of the liquid flow channels is arranged on the first side wall or the cylinder wall adjacent to the first side wall, and its liquid outlet is arranged on the second side wall or the cylinder wall adjacent to the second side wall; the liquid inlet of the other part of the liquid flow channels is arranged on the second side wall or the cylinder wall adjacent to the second side wall, and its liquid outlet is arranged on the first side wall or the cylinder wall adjacent to the first side wall; a shaft core, connected to the cylinder body and capable of driving the cylinder body to rotate; the shaft core is provided with a liquid inlet channel and a liquid return channel that are isolated from each other; wherein, the liquid inlet channel is respectively communicated with the liquid inlets of the liquid flow channels, and the liquid return channel is respectively communicated with the liquid outlets of the liquid flow channels. In this way, while ensuring uniform temperature adjustment, the temperature adjustment efficiency is improved, and the temperature can be controlled more precisely.

Description

Technical Field

[0001] This application relates to the technical field of coating equipment, and particularly relates to a temperature adjustment device. Background Art

[0002] Currently, in coating technology, semiconductor devices such as conductive films can be prepared by magnetron sputtering or evaporation plating. Among them, it is necessary to ensure that the substrate maintains a certain temperature. In this way, the stability and uniformity of the reaction can be ensured, thereby improving the quality and consistency of the coating.

[0003] The heating methods of coating equipment are generally divided into radiation heating and contact heating. Among them, the heater of the radiation heating method is usually not in direct contact with the substrate, and the temperature of the substrate is controlled by the radiation heat of the heater, and its heating area is relatively large. The heater of the contact heating method is usually in direct contact with the substrate, and the heat of the heater can be directly transferred to the substrate, and its heating efficiency is relatively high.

[0004] In the process of implementing the embodiments of the present disclosure, it is found that there are at least the following problems in the related art:

[0005] In the case of coating a substrate with a relatively large area, if the radiation heating method is used, the temperature difference between the heater and the substrate temperature is relatively large, resulting in inaccurate temperature control and low heating efficiency, leading to slow heating. If the contact heating method is used, the heating uniformity is relatively poor.

[0006] It should be noted that the information disclosed in the above background art section is only used to enhance the understanding of the background of this application, and thus may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Invention

[0007] To have a basic understanding of some aspects of the disclosed embodiments, a simple summary is given below. The summary is not a general review, nor is it intended to identify key / important elements or delineate the protection scope of these embodiments, but rather serves as a preface to the subsequent detailed description.

[0008] The embodiments of the present disclosure provide a temperature adjustment device, which can improve the temperature adjustment efficiency while ensuring uniform temperature adjustment, and can also control the temperature more precisely.

[0009] In some embodiments, the temperature regulating device includes a cylinder body and a shaft core. The cylinder body includes a cylindrical barrel wall and plate-shaped first and second side walls; wherein, at least two liquid flow channels are provided along the barrel wall, and the liquid inlet of a part of the liquid flow channels is arranged on the first side wall or the barrel wall adjacent to the first side wall, and its liquid outlet is arranged on the second side wall or the barrel wall adjacent to the second side wall; the liquid inlet of another part of the liquid flow channels is arranged on the second side wall or the barrel wall adjacent to the second side wall, and its liquid outlet is arranged on the first side wall or the barrel wall adjacent to the first side wall; the shaft core is connected to the cylinder body and can drive the cylinder body to rotate; the shaft core is provided with a liquid inlet channel and a liquid return channel that are isolated from each other; wherein, the liquid inlet channel is respectively communicated with the liquid inlets of each liquid flow channel, and the liquid return channel is respectively communicated with the liquid outlets of each liquid flow channel.

[0010] In some embodiments, each liquid flow channel is spirally arranged along the barrel wall.

[0011] In some embodiments, each liquid flow channel is arranged in sequence along the axial direction of the cylinder body.

[0012] In some embodiments, the spacing between each liquid flow channel is equal.

[0013] In some embodiments, the liquid inlets and liquid outlets of multiple liquid flow channels arranged on the same side are evenly staggered with each other.

[0014] In some embodiments, there is a set included angle between the liquid inlet and the liquid outlet of adjacent liquid flow channels arranged on the same side, and the range of the set included angle is 45° to 180°.

[0015] In some embodiments, the liquid flowing into the liquid flow channel includes oil, water or a refrigerant medium.

[0016] In some embodiments, the number of liquid flow channels is three to ten.

[0017] In some embodiments, the shaft core further includes an inner core cylinder and an outer core cylinder. The inner core cylinder has a first channel constructed inside it; the outer core cylinder, the inner core cylinder is arranged inside the outer core cylinder, and there is a set distance between the outer wall of the inner core cylinder and the inner wall of the outer core cylinder to form a second channel; wherein, one of the first channel and the second channel is the liquid inlet channel, and the other of the first channel and the second channel is the liquid return channel.

[0018] In some embodiments, the inner core cylinder and the outer core cylinder are thermally insulated from each other to prevent heat exchange between the first channel and the second channel.

[0019] In some embodiments, the temperature regulating device further includes: a rotating connector rotatably and sealingly connected to the shaft core, and the shaft core can rotate relative to the rotating connector; wherein, the rotating connector can be connected to an external liquid storage device, and the liquid at the first temperature in the external liquid storage device can be transported to the liquid inlet passage through the rotating connector, and the liquid at the second temperature in the liquid return passage flows back to the external liquid storage device through the rotating connector.

[0020] In some embodiments, the rotating connector includes a housing and a rotating member. The housing has a first connector and a second connector connected to the external liquid storage device; the rotating member is disposed inside the housing; wherein, the shaft core is inserted into the rotating member, and the first passage communicates with the first connector of the housing, and the second passage communicates with the second connector of the housing.

[0021] In some embodiments, the rotating connector further includes: an elastic sealing assembly disposed at the connection position between the rotating member and the shaft core.

[0022] In some embodiments, an installation groove is formed inside the housing, the rotating member is disposed in the installation groove and has a set distance from the bottom of the installation groove; the elastic sealing assembly includes a first sealing member, a second sealing member and a sealing member. The first sealing member is disposed at the bottom of the installation groove, and the end of the inner core cylinder abuts against the first sealing member; the second sealing member is disposed between the outer wall of the rotating member and the wall of the installation groove; the elastic member is sleeved on the shaft core, and its first end abuts against the rotating member and the other end abuts against the first sealing member.

[0023] The temperature regulating device provided by the embodiments of the present disclosure can achieve the following technical effects:

[0024] A plurality of liquid flow channels are arranged along the barrel wall of the barrel, and the liquid inlets of a part of the liquid flow channels are arranged on the first side wall or the barrel wall adjacent to the first side wall, and their liquid outlets are arranged on the second side wall or the barrel wall adjacent to the second side wall; the liquid inlets of the other part of the liquid flow channels are arranged on the second side wall or the barrel wall adjacent to the second side wall, and their liquid outlets are arranged on the first side wall or the barrel wall adjacent to the first side wall. In this way, the liquid inlet passage in the shaft core can allow the corresponding temperature liquid to enter each liquid flow channel. Under the cooperative temperature control of different liquid flow channels, the temperature of the entire area of the barrel can be made closer, thereby ensuring the uniformity of the temperature control of the base material. At the same time, by controlling the liquid temperature, the temperature of the barrel can be controlled more precisely, and then the temperature required by the base material can be ensured. On this basis, since the base material is wrapped around the barrel wall of the barrel, that is, the base material and the barrel wall are in contact for temperature control, the heat transfer efficiency is relatively high.

[0025] The above general description and the following description are only exemplary and explanatory and are not used to limit this application. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] One or more embodiments are exemplarily illustrated by corresponding drawings. These exemplary illustrations and the drawings do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements. The drawings do not constitute a scale limitation, and wherein:

[0027] Figure 1 is a schematic structural diagram of a heating device provided by an embodiment of the present disclosure;

[0028] Figure 2 is a schematic structural diagram of another heating device provided by an embodiment of the present disclosure;

[0029] Figure 3 is a schematic structural diagram of another heating device provided by an embodiment of the present disclosure;

[0030] Figure 4 is a schematic structural diagram of another heating device provided by an embodiment of the present disclosure;

[0031] Figure 5 is a schematic cross-sectional view of a heating device provided by an embodiment of the present disclosure;

[0032] Figure 6 is Figure 5 an enlarged schematic view of part A in

[0033] Figure 7 is a liquid flow diagram inside the heating device provided by an embodiment of the present disclosure.

[0034] Reference numerals:

[0035] 10: Cylinder body; 11: Cylinder wall; 12: First side wall; 13: Second side wall; 14: Liquid flow channel; 141: Liquid inlet; 142: Liquid outlet;

[0036] 20: Axial core;

[0037] 21: Inner core cylinder; 211: First channel; 212: First pipeline;

[0038] 22: Outer core cylinder; 221: Second channel; 222: Second pipeline;

[0039] 30: Rotating connector; 31: Housing; 32: Rotating part;

[0040] 33: Elastic sealing assembly; 331: First seal; 332: Second seal; 333: Elastic member. Detailed implementation manners

[0041] In order to understand the features and technical content of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for reference and illustration only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the sake of explanation, numerous details are provided to give a thorough understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be shown in a simplified manner to simplify the drawings.

[0042] In the description of the embodiments of the present disclosure, the terms "first", "second", etc. in the specification, claims and the above-mentioned drawings are used to distinguish similar objects and do not necessarily have to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so as to implement the embodiments of the present disclosure described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion.

[0043] In the embodiments of the present disclosure, the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "middle", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the embodiments of the present disclosure and their implementations, and are not used to limit that the indicated devices, elements or components must have a specific orientation or be constructed and operated in a specific orientation. Moreover, in addition to being able to represent an orientation or positional relationship, some of the above terms may also be used to represent other meanings. For example, the term "upper" may also be used to represent a certain attachment relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0044] In addition, the terms "arranged", "connected", "fixed" should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or there can be internal communication between two devices, elements or components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0045] Unless otherwise specified, the term "plurality" means two or more.

[0046] In the embodiments of the present disclosure, the character " / " indicates that the objects before and after are in an "or" relationship. For example, A / B means: A or B.

[0047] The term "and / or" is an associative relationship describing an object and indicates that three relationships can exist. For example, A and / or B means: A or B, or, A and B, these three relationships.

[0048] It should be noted that, without conflict, the embodiments in the present disclosure and the features in the embodiments may be combined with each other.

[0049] Currently, in a vacuum coating device, a substrate is generally heated by radiation heating or contact heating. Among them, the characteristic of radiation heating is a large heating area and uniform heating. However, during the mass production coating process of the substrate, sensors cannot be directly set on the substrate for temperature measurement, and only sensors can be set on the heater for temperature measurement, so as to indirectly control the temperature of the substrate; in addition, due to the low radiation heating efficiency, there may also be problems such as a large difference between the temperature of the heater itself and the temperature of the substrate and slow heating. The characteristic of contact heating is fast heating speed and high heating efficiency. Since the heater is in close contact with the substrate, the temperature measurement sensor set on the heater is basically the same as the substrate temperature. However, limited by the structure and flow channel design, its heating uniformity is poor.

[0050] Combined with Figures 1 to 5 As shown, the embodiments of the present disclosure provide a temperature regulating device, including a cylinder body 10 and a shaft core 20. The cylinder body 10 includes a cylindrical cylinder wall 11 and plate-shaped first side wall 12 and second side wall 13; wherein, at least two liquid flow channels 14 are arranged along the cylinder wall 11, and the liquid inlet 141 of a part of the liquid flow channels 14 is arranged on the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12, and its liquid outlet 142 is arranged on the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13; the liquid inlet 141 of the other part of the liquid flow channels 14 is arranged on the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13, and its liquid outlet 142 is arranged on the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12; the shaft core 20 is connected to the cylinder body 10 and can drive the cylinder body 10 to rotate; the shaft core 20 is provided with a liquid inlet channel and a liquid return channel that are isolated from each other; wherein, the liquid inlet channel is respectively communicated with the liquid inlet 141 of each liquid flow channel 14, and the liquid return channel is respectively communicated with the liquid outlet 142 of each liquid flow channel 14.

[0051] Adopt the temperature regulation device provided by the embodiments of the present disclosure. A plurality of liquid flow channels 14 are arranged along the barrel wall 11 of the barrel body 10, and the liquid inlets 141 of a part of the liquid flow channels 14 are arranged on the first side wall 12 or the barrel wall 11 adjacent to the first side wall 12, and the liquid outlets 142 thereof are arranged on the second side wall 13 or the barrel wall 11 adjacent to the second side wall 13; the liquid inlets 141 of the other part of the liquid flow channels 14 are arranged on the second side wall 13 or the barrel wall 11 adjacent to the second side wall 13, and the liquid outlets 142 thereof are arranged on the first side wall 12 or the barrel wall 11 adjacent to the first side wall 12. In this way, the liquid inlet channels in the shaft core 20 can allow the corresponding temperature liquid to flow into each liquid flow channel 14. It can be understood that the liquid flows from both ends of the barrel body 10 towards the middle and then flows out towards the other end, changing the previous liquid flow direction of entering from one end and returning from the other end. During the flow of the liquid in the flow channel, with heat transfer, the temperature of the liquid will gradually decrease. The method of arranging liquid inlets and outlets at both ends can enable heat to radiate from both ends to the center, and the reverse liquid flow channels can compensate for each other in the area where the temperature of the liquid in a single flow channel decreases due to heat transfer. Under the collaborative temperature control of different liquid flow channels 14, the temperature of the entire area of the barrel body 10 can be made closer, thereby ensuring the uniformity of the temperature control of the substrate. At the same time, by controlling the liquid temperature, the temperature of the barrel body 10 can be controlled more precisely, and then the required temperature of the substrate can be ensured. On this basis, since the substrate is wrapped around the barrel wall 11 of the barrel body 10, that is, the substrate is in contact with the barrel wall 11 of the barrel body 10 for temperature control, and its heat transfer efficiency is relatively high.

[0052] In some embodiments, the liquid flowing into the liquid flow channel 14 includes oil, water or refrigerant medium. In this way, the outer wall surface temperature of the barrel wall 11 can be effectively improved through the above medium. Here, the liquid flowing into the liquid flow channel 14 can heat up the substrate or cool down the substrate. It can be adjusted according to the actual application scenario and is not limited here. Among them, in the embodiments of the present disclosure, taking the liquid flowing into the liquid flow channel 14 as oil and heating up the substrate as an example.

[0053] In the embodiments of the present disclosure, the barrel body 10 is of a cylindrical structure, and plate-shaped first side wall 12 and second side wall 13 are arranged on both sides of the cylindrical barrel wall 11. Here, the flexible substrate can be wrapped around the barrel wall 11 of the barrel body 10, and the outer wall surface of the barrel wall 11 is smooth and has a uniform curvature. During the rotation of the barrel body 10, the flexible substrate can be driven to rotate synchronously. In this way, the barrel body 10 and the flexible substrate rotate synchronously and are relatively stationary, thereby reducing the possibility of the barrel body 10 scratching the flexible substrate.

[0054] Here, the cylinder body in the related art generally has a single liquid flow channel design, which makes the path of the liquid flow channel relatively long, resulting in a large difference between the inlet temperature and the outlet temperature of the liquid flow channel. At the same time, due to the relatively long path of the liquid flow channel, there may also be a possibility of air mixing into the liquid flow channel, thereby affecting the uniformity of the substrate temperature.

[0055] In the embodiments of the present disclosure, at least two liquid flow channels 14 are provided on the cylinder wall 11. Each liquid flow channel 14 is evenly laid on the cylinder wall 11. Among them, when the inlet 141 of a part of the liquid flow channels 14 is provided on the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12, its outlet 142 is provided on the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13; when the inlet 141 of another part of the liquid flow channels 14 is provided on the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13, its outlet 142 is provided on the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12. The specific setting method is not limited herein. The inlet is provided on the side wall or the cylinder wall adjacent to the side wall here to enable the liquid to enter from the cylinder wall area near the side wall, that is, to enter from one end or the end of the cylinder wall, and flow out from the cylinder wall area near the other side wall after heat exchange through the cylinder wall. In other words, the inlet of a part of the liquid flow channels can be provided at the end of the first side wall or the cylinder wall near the first side wall, and its outlet can be provided at the end of the second side wall or the cylinder wall near the second side wall; the setting method of the other part of the liquid flow channels is opposite, and will not be elaborated here.

[0056] In the embodiments of the present disclosure, both the inlet 141 and the outlet 142 of the liquid flow channel 14 are provided inside the cylinder body 10, that is, on the inner wall surface of the cylinder wall 11.

[0057] In this way, the heating oil can flow in from the first side wall 12 side and the second side wall 13 side respectively, and flow out from the second side wall 13 side and the first side wall 12 side respectively, that is, the temperature of the heating oil in one liquid flow channel 14 gradually decreases from the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12 to the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13; the temperature of the heating oil in the other liquid flow channel 14 gradually increases from the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12 to the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13. Thus, the purpose of mutual heat compensation is achieved, and further the temperature of each area is ensured to be more uniform.

[0058] Therefore, in the case of inletting liquid through both ends, the heat dissipated by the heating oil in the two liquid flow channels 14 can compensate each other for heating, making the temperature of the entire cylinder body more uniform, and thus further improving the uniformity of heating the substrate.

[0059] In the embodiments of the present disclosure, the barrel wall 11 of the barrel body 10 may have a certain thickness. In this way, by forming a groove on the barrel wall 11, a liquid flow channel 14 can be formed. Alternatively, a liquid flow channel 14 is separately provided and attached to the inner wall surface of the barrel wall 11; or, the barrel wall 11 is provided with a sandwich layer, and a liquid flow channel 14 is provided in the sandwich layer. This is not limited herein.

[0060] In the embodiments of the present disclosure, to further ensure the transfer of heat in the liquid flow channel 14 to the flexible substrate side, a heat insulation layer may be provided on the inner side (towards the axis core 20 side) of the barrel wall 11 of the barrel body 10, and the outer side (towards the flexible substrate side) of the barrel wall 11 of the barrel body 10 is a heat conduction layer. Among them, the heat conduction layer can be made of materials with good heat conductivity and stable chemical properties, such as copper and silicon carbide.

[0061] In the embodiments of the present disclosure, the axis core 20 is connected to the barrel body 10, and the axis core 20 can drive the barrel body 10 to rotate. Here, the axis core 20 is connected to the first side wall 12 and the second side wall 13 of the barrel body 10. Among them, if the lengths of the barrel body 10 and the axis core 20 are relatively long, a reinforcing rib can also be provided, and the reinforcing rib is connected to the middle positions of the barrel body 10 and the axis core 20.

[0062] In the embodiments of the present disclosure, a liquid inlet channel and a liquid return channel that are isolated from each other are provided in the axis core 20. Among them, the liquid inlet channels are respectively communicated with the liquid inlet ports 141 of the respective liquid flow channels 14, and the liquid return channels are respectively communicated with the liquid outlet ports 142 of the respective liquid flow channels 14. In this way, heating oil is transported to the liquid flow channel 14 through the liquid inlet channel. After the heat in the liquid flow channel 14 is transferred to the substrate, the oil in the liquid flow channel 14 will flow from the liquid outlet port 142 to the liquid return channel.

[0063] In some embodiments, to enable the respective liquid flow channels 14 to be evenly laid on the barrel wall 11, here the respective liquid flow channels 14 are spirally arranged along the barrel wall 11. In this way, not only can the heating area be effectively increased, but also the flow of the heating oil is facilitated.

[0064] In addition, the position setting of the respective liquid flow channels 14 will also affect the uniformity of heating the substrate. Therefore, in some embodiments, the respective liquid flow channels 14 are arranged in sequence along the axial direction of the barrel body 10. In this way, the respective liquid flow channels 14 can form a more intensive heating area, thereby further increasing the heating area of the barrel body 10, and thus improving the uniformity of heating the substrate.

[0065] Meanwhile, the spacing between the liquid channels 14 also affects the uniformity of heating the substrate. Therefore, in some embodiments, the spacing between the liquid channels 14 is equal. In this way, the liquid heating temperature is made more uniform, avoiding the situation where the spacing in some areas is too small, resulting in too high a heating temperature; or the spacing in some areas is too large, resulting in too low a heating temperature. Here, the spacing can be set according to the thermal conductivity of the cylinder wall, based on the heat transfer between the liquid channels 14. In some embodiments, the liquid channels 14 are arranged in a spiral manner. Multiple spiral channels are nested with each other, and the spacing between the spiral channels in the axial direction of the axis is equal to further improve the uniformity of heating the substrate.

[0066] On this basis, the number of the liquid channels 14 also affects the uniformity and heating efficiency of heating the substrate. Therefore, in some embodiments, there are two, three, four, five, six, seven, eight, nine or ten liquid channels 14. There is no limitation here.

[0067] In some embodiments, the liquid inlets and outlets of multiple liquid channels 14 arranged on the same side are evenly staggered with each other. In this way, when the number of the liquid channels 14 increases, the heating uniformity can be further improved.

[0068] In some specific applications, there are four liquid channels 14. Among them, the liquid inlets 141 of two liquid channels 14 are arranged on the cylinder wall 11 adjacent to the first side wall 12, and the liquid inlets 141 of the other two liquid channels 14 are arranged on the cylinder wall 11 adjacent to the second side wall 13.

[0069] To further ensure the heating uniformity, there is a set angle between the liquid inlet 141 and the liquid outlet 142 of adjacent liquid flow channels 14 arranged on the same side, and the range of the set angle is from 45° to 180°. In this way, the temperature difference of the heating temperatures on different curved surfaces can be reduced, and the temperatures of the regions on each curved surface are close to each other, thereby further improving the heating uniformity. In the embodiments of the present disclosure, the fact that there is a set angle between the liquid inlet 141 and the liquid outlet 142 of adjacent liquid flow channels 14 arranged on the same side means: the included angle between the first connection line of the liquid inlet 141 of the adjacent liquid flow channels 14 arranged on the same side and the axis core 20 and the second connection line of the liquid outlet 142 of another adjacent liquid flow channel 14 and the axis core 20. In the case of two liquid flow channels 14, the included angle between the liquid inlet of one liquid flow channel arranged on the first side wall 12 of the cylinder body 10 or the end of the cylinder wall 11 close to the first side wall 12 and the liquid outlet of the other liquid flow channel with respect to the axis core 20 is 180°. In the case of four liquid flow channels 14, the liquid inlets and outlets arranged at the first side wall 12 of the cylinder body 10 or the end of the cylinder wall 11 close to the first side wall 12 are alternately arranged along the circumferential direction of the cylinder wall 11, and the included angle between adjacent two liquid inlets 141 and liquid outlets 142 with respect to the axis core 20 is 90°. And so on, and no more examples will be listed here.

[0070] Combined Figures 2 to 4 As shown, in some embodiments, the axis core 20 further includes an inner core cylinder 21 and an outer core cylinder 22. The inner core cylinder 21 has a first channel 211 constructed inside it; the outer core cylinder 22, the inner core cylinder 21 is arranged inside the outer core cylinder 22, and there is a set distance between the outer wall of the inner core cylinder 21 and the inner wall of the outer core cylinder 22 to form a second channel 221; wherein, one of the first channel 211 and the second channel 221 is a liquid inlet channel, and the other of the first channel 211 and the second channel 221 is a liquid return channel.

[0071] In the embodiments of the present disclosure, by the rotation of the axis core 20, the cylinder body 10 is driven to rotate. Among them, in order to enable the axis core 20 to transport heating oil, two channels are provided in the axis core 20, including the first channel 211 in the inner core cylinder 21 and the second channel 221 formed between the outer wall of the inner core cylinder 21 and the inner wall of the outer core cylinder 22.

[0072] Here, when the diameter of the axis core 20 remains unchanged, the double channels formed by the mutually sleeved outer core cylinder 22 and inner core cylinder 21 can have a larger liquid flow rate passing through them compared with the double channels arranged in parallel while ensuring that the volume of the axis core remains unchanged. In this way, the temperature of the cylinder body can be adjusted quickly.

[0073] In an embodiment of the present disclosure, when the first channel 211 is a liquid inlet channel, the second channel 221 is a liquid return channel. Specifically, the first channel 211 is communicated with the liquid inlet 141 of the liquid flow channel 14 through the first pipeline 212, and the second channel 221 is communicated with the liquid outlet 142 of the liquid flow channel 14 through the second pipeline 222. Here, the flow direction diagram of the liquid can be referred to Figure 7 .

[0074] In an embodiment of the present disclosure, since the temperatures of the liquids in the liquid inlet channel and the liquid return channel are different, in order to avoid mutual temperature influence. In some embodiments, the inner core cylinder 21 and the outer core cylinder 22 are thermally insulated from each other to prevent heat exchange between the first channel 211 and the second channel 221. Here, the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 can be made of a heat-insulating material, such as polyurethane.

[0075] Optionally, the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 can also be set as a vacuum structure. Specifically, the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 is a double-layer structure, and the air inside it is pumped out through a pumping device so that the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 is a vacuum structure. Here, the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 can be made of stainless steel material, and stainless steel has the characteristics of being resistant to corrosion by weak corrosive media such as air, steam, and water.

[0076] In an embodiment of the present disclosure, the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 has a certain thickness, or a corresponding support structure is provided inside the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 to prevent the pumping device from pumping out the air inside it and causing the deformation of its cylinder wall.

[0077] Combined with Figure 5 and Figure 6 As shown, in some embodiments, the temperature adjustment device further includes: a rotary connector 30, which is rotationally and hermetically connected to the shaft core 20, and the shaft core 20 can rotate relative to the rotary connector 30; wherein, the rotary connector 30 can be connected to an external liquid storage device, and the liquid at the first temperature in the external liquid storage device can be transported to the liquid inlet channel through the rotary connector 30, and the liquid at the second temperature in the liquid return channel flows back to the external liquid storage device through the rotary connector 30.

[0078] In an embodiment of the present disclosure, since the cylinder 10 needs to rotate. Therefore, it is necessary to transport the liquid into the liquid flow channel 14 of the cylinder 10 through the rotary connector 30. Here, the rotary connector 30 and the shaft core 20 are rotationally and hermetically connected, the rotary connector 30 is in a fixed state, its shaft core 20 can rotate relative to the rotary connector 30, and the rotary connector 30 can also ensure the sealing performance to prevent the liquid from flowing out.

[0079] In an embodiment of the present disclosure, during the heating process, the liquid at the first temperature in the external liquid storage device can be transported to the liquid inlet channel through the rotary connector 30, and the liquid at the second temperature in the liquid return channel flows back to the external liquid storage device through the rotary connector 30. Here, the first temperature is higher than the second temperature. In this way, the heat of the liquid at the first temperature can be transferred to the cylinder body 10.

[0080] Combined Figure 5 with Figure 6 As shown, in some embodiments, the rotary connector 30 includes a housing 31 and a rotating member 32. The housing 31 has a first connector and a second connector connected to the external liquid storage device; the rotating member 32 is disposed inside the housing 31; wherein, the shaft core 20 is inserted into the rotating member, and the first channel 211 communicates with the first connector of the housing 31, and the second channel 221 communicates with the second connector of the housing 31.

[0081] In an embodiment of the present disclosure, the rotary connector 30 includes a housing 31 and a rotating member 32. Among them, the housing 31 is provided with a first connector and a second connector, the first connector can be connected to the liquid outlet of the external liquid storage device, and the second connector can be connected to the liquid return port of the external liquid storage device.

[0082] In an embodiment of the present disclosure, a connection space for inserting the shaft core 20 is provided inside the housing 31, and this connection space is a circular installation groove structure. Among them, the bottom of the installation groove can communicate with the first connector, and the groove wall of the installation groove communicates with the second connector. Here, the rotating member 32 is disposed in this installation groove, and after the shaft core 20 is inserted into the housing 31, the shaft core 20 can be connected to the rotating member 32.

[0083] Optionally, the rotating member 32 is a bearing structure, and the shaft core 20 is connected to the inner ring of the bearing structure. Among them, the end face of the bearing structure facing the bottom of the groove is a sealing structure, so as to prevent the heating oil from flowing out from the side of the bearing structure.

[0084] In an embodiment of the present disclosure, the rotating member 32 has a set distance from the bottom of the installation groove, and the end of the inner core cylinder 21 is longer than the end of the outer core cylinder 22. In this way, after the shaft core 20 is inserted into the connection space, the end of the inner core cylinder 21 abuts against the bottom of the installation groove, so that the first channel 211 communicates with the first connector of the housing 31; the end of the outer core cylinder 22 is flush with or exceeds the sealing end face of the rotating member 32, so as to communicate with the second connector of the housing 31 through the space with the set distance. Here, the connection channel between the first channel 211 and the first connector and the connection channel between the second channel 221 and the second connector are hermetically isolated from each other.

[0085] In some embodiments, the rotating connector 30 further includes an elastic sealing assembly 33 disposed at the connection position between the rotating member 32 and the shaft core 20. By providing the elastic sealing assembly 33, it is possible to prevent oil leakage at the connection between the rotating connector 30 and the shaft core 20, and also prevent the shaft core 20 from being misaligned with the rotating member 32 during rotation.

[0086] In some embodiments, the elastic sealing assembly 33 includes a first seal 331, a second seal 332, and an elastic member 333. The first seal 331 is disposed at the bottom of the installation groove, and the end of the inner core cylinder 21 abuts against the first seal 331. The second seal 332 is disposed between the rotating member 32 and the wall of the installation groove. The elastic member 333 is sleeved on the shaft core 20, with one end abutting against the rotating member 32 and the other end abutting against the first seal 331.

[0087] In the embodiments of the present disclosure, the first seal 331 is disposed within the housing 31 and is located on the first joint side. In this way, when the shaft core 20 is connected to the housing 31, the end of the inner core cylinder 21 abuts against the first seal 331 to ensure the sealing performance between the first joint and the first channel 211. Here, both the first seal 331 and the second seal 332 are dynamic seal ring structures.

[0088] In the embodiments of the present disclosure, the second seal 332 is disposed between the rotating member 32 and the wall of the installation groove. Here, the second seal 332 is disposed at the position where the rotating member 32 and the wall of the installation groove rotate, and the elastic member 333 is sleeved on the inner core cylinder 21 and abuts against the end face of the rotating member 32. In this way, the sealing performance of the space between the rotating member 32 and the installation groove can be ensured, so that the heating oil in the second channel 221 can flow into the space with a set spacing and thus communicate with the second joint of the housing 31.

[0089] In the embodiments of the present disclosure, the elastic member 333 is a spring structure disposed between the rotating member 32 and the first seal 331. In this way, it is possible to prevent the shaft core 20 from being axially offset from the rotating member 32 during rotation. Here, the elastic member 333 adopts a spring structure, and the heating oil in the second channel 221 can flow into the second joint through the gaps between the coils of the spring.

[0090] The foregoing description and drawings sufficiently illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural as well as other changes. Embodiments represent merely possible variations. Unless explicitly required, individual components and functions are optional, and the order of operations may vary. Parts and features of some embodiments may be included in or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures already described and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A temperature regulating device, characterized in that: include: A cylinder body, comprising a cylindrical cylinder wall and a plate-shaped first side wall and a second side wall; wherein at least two liquid flow channels are arranged along the cylinder wall, and a liquid inlet of a part of the liquid flow channels is arranged on the first side wall or the cylinder wall adjacent to the first side wall, and a liquid outlet thereof is arranged on the second side wall or the cylinder wall adjacent to the second side wall; a liquid inlet of another part of the liquid flow channels is arranged on the second side wall or the cylinder wall adjacent to the second side wall, and a liquid outlet thereof is arranged on the first side wall or the cylinder wall adjacent to the first side wall; a heat-insulating layer is arranged on the inner side of the cylinder wall of the cylinder body, and a heat-conducting layer is arranged on the outer side of the cylinder wall, wherein heating is performed by using a flexible substrate as the outer wall surface of the cylinder wall; The shaft core is connected to the cylinder body and can drive the cylinder body to rotate; the shaft core is provided with a liquid inlet channel and a liquid return channel which are isolated from each other; wherein the liquid inlet channel is respectively connected to the liquid inlet of each liquid flow channel, and the liquid return channel is respectively connected to the liquid outlet of each liquid flow channel; the shaft core also includes: An inner core tube, the interior of which is provided with a first passage; The outer core barrel is provided inside the inner core barrel, and the outer wall of the inner core barrel and the inner wall of the outer core barrel have a set distance to form a second channel; wherein one of the first channel and the second channel is a liquid inlet channel, and the other of the first channel and the second channel is a liquid return channel; the first channel is connected to the liquid inlet of the liquid flow channel through a first pipeline located inside the barrel, and the second channel is connected to the liquid outlet of the liquid flow channel through a second pipeline located inside the barrel; the pipe openings of the first pipeline and the second pipeline are connected to the axial side wall of the shaft core adjacent to the first side wall; the inner core barrel and the outer core barrel are thermally insulated from each other to avoid heat exchange between the first channel and the second channel; The rotating connector is rotatably sealed and connected to the shaft core, and the shaft core can rotate relative to the rotating connector; wherein the rotating connector can be connected to an external liquid storage device, and the liquid at a first temperature in the external liquid storage device can be transported to the liquid inlet channel through the rotating connector, and the liquid at a second temperature in the liquid return channel flows back to the external liquid storage device through the rotating connector; the rotating connector includes: A housing having a first connector and a second connector connected to an external liquid storage device; The rotating member is arranged in the housing, wherein the shaft core is inserted into the rotating member so that the first channel is communicated with the first joint of the housing; and the second channel is communicated with the second joint of the housing; The elastic sealing component is arranged at the connection position between the rotating part and the shaft core.

2. The temperature adjustment device according to claim 1, characterized in that: Each liquid flow channel is spirally arranged along the cylinder wall.

3. The temperature regulating device according to claim 2, characterized in that And the liquid flow channels are arranged in sequence along the axial direction of the cylinder.

4. The temperature adjustment device according to claim 3, characterized in that: The spacing between each liquid flow channel is equal.

5. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: The liquid inlets and liquid outlets of the plurality of liquid flow channels arranged on the same side are evenly staggered with each other.

6. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: There is a set angle between the liquid inlets and liquid outlets of adjacent liquid flow channels arranged on the same side, and the range of the set angle is 45° to 180°.

7. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: The liquid flowing into the liquid flow channel includes oil, water or a cooling medium.

8. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: The number of liquid flow channels is from three to ten.

9. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: An installation groove is constructed inside the shell, the bottom of the installation groove is connected to the first joint, and the groove wall of the installation groove is connected to the second joint; the rotating part is arranged in the installation groove of the shell, and has a set distance with the bottom of the installation groove; the shaft core is inserted into the rotating part, and the end of the inner core tube abuts against the bottom of the installation groove, so that the first channel is connected to the first joint of the shell; the end of the outer core tube is flush with or exceeds the sealing end face of the rotating part, and is connected to the second joint of the shell through a space with a set distance.

10. The temperature adjustment device according to claim 9, characterized in that: The elastic sealing assembly includes: A first sealing member is arranged at the bottom of the installation groove, and the end of the inner core tube abuts against the first sealing member; A second sealing member is disposed between the rotating member and the groove wall of the mounting groove; The elastic member is sleeved on the shaft core, and a first end thereof abuts against the rotating member, and the other end thereof abuts against the first sealing member.

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