Sealing structure and sealing method of high-temperature furnace tube

Abstract

The invention provides a sealing structure and a sealing method of a high-temperature furnace tube. The high-temperature furnace tube comprises a process tube and a base, the sealing structure of the high-temperature furnace tube comprises an annular convex rib arranged on the top surface of the base, and the top surface of the annular convex rib is in contact with the bottom surface of the process tube and supports the process tube; and the annular convex rib is made of quartz and is suitable for being adhered to the bottom surface of the process pipe after being softened and deformed at a preset temperature. By utilizing the characteristic of high-temperature softening of quartz, the internal temperature of the process pipe is increased, so that the strength of the annular convex rib of the quartz is reduced, small deformation occurs, the process pipe is adhered to the base under the action of gravity, and sealing between the process pipe and the base is realized.

Description

Technical Field

[0001] The invention relates to the field of semiconductor manufacturing equipment, and in particular to a sealing structure and a sealing method for a high-temperature furnace tube. Background Art

[0002] High temperature furnace tubes are mostly used in vapor deposition, oxidation annealing and other processes in semiconductor processes. At present, the temperature of traditional semiconductor vapor deposition processes is between 800℃ and 1100℃. However, with the development of semiconductor power devices and more advanced semiconductor process devices, the process temperature requirements for high temperature furnace tubes are getting higher and higher, and the traditional process temperature of 800℃ to 1100℃ can no longer meet the demand.

[0003] In semiconductor processing, in order to increase the diffusion rate of doping atoms in silicon wafers and to increase the deposition rate of oxide films, thereby increasing the output of equipment, the process temperature needs to reach around 1300°C, which is an ultra-high temperature process.

[0004] Usually, high-temperature furnace tubes include process tubes made of silicon carbide and bases made of quartz. However, it is difficult to ensure the sealing between the two materials, which easily leads to the leakage of chemical gases inside the process tube. In addition, due to the good thermal conductivity of silicon carbide, the temperature of the contact part between the process tube and the base quickly reaches 1000℃, so conventional sealing rings cannot be used in ultra-high temperature processes. Summary of the invention

[0005] The object of the present invention is to provide a sealing structure and a sealing method for a high-temperature furnace tube, so as to solve the problem in the prior art that the process tube and the base cannot be sealed in an ultra-high temperature process.

[0006] To achieve the above-mentioned purpose and other related purposes, the present invention provides a sealing structure for a high-temperature furnace tube, wherein the high-temperature furnace tube comprises a process tube and a base, and the sealing structure comprises an annular convex rib arranged on the top surface of the base, wherein the top surface of the annular convex rib contacts with the bottom surface of the process tube and supports the process tube; the material of the annular convex rib is quartz, which is suitable for adhering to the bottom surface of the process tube after softening and deforming at a preset temperature.

[0007] Furthermore, there are two annular ribs, and a gap is left between the two annular ribs to form an annular groove, which is used to form an annular channel with the bottom surface of the process pipe after the annular rib is softened and deformed.

[0008] Furthermore, an air inlet hole is provided at the bottom of the annular groove for providing protective gas at a first temperature into the annular channel, and the first temperature is lower than a temperature at which the annular rib of the quartz material can soften and deform.

[0009] Furthermore, the two annular ribs have the same height.

[0010] Furthermore, the bottom areas of the two annular ribs are both larger than the top areas.

[0011] Furthermore, the cross-sections of the two annular ribs in the longitudinal direction are both trapezoidal.

[0012] Furthermore, the annular groove also includes a depression formed downwardly between the two annular ribs.

[0013] Furthermore, the longitudinal cross section of the annular groove consists of two parts, the upper half is trapezoidal, and the lower half is rectangular or semicircular.

[0014] Furthermore, the contact area S between the two annular ribs and the bottom surface of the process tube is calculated based on the weight M of the process tube and the maximum yield strength σ of quartz:

[0015]

[0016] Among them, g is the gravity coefficient, σ is the maximum yield strength of quartz, and n is the safety factor.

[0017] Furthermore, a gas outlet hole is provided at the bottom of the annular groove for discharging the gas in the annular groove.

[0018] Furthermore, the base is also provided with a gas inlet pipe and an outlet pipe, one end of the inlet pipe and the outlet pipe are respectively connected to the air inlet and the air outlet, and the other end extends to the annular groove and intersects with the bottom of the annular groove to form the air inlet hole and the air outlet hole.

[0019] Furthermore, a block is provided between the air inlet and the air outlet to prevent the gas entering from the air inlet from directly flowing out from the air outlet; the top surface of the block contacts the bottom surface of the process tube, and both ends of the block extend to the two annular ribs respectively.

[0020] Furthermore, the air inlet and the air outlet are also connected to a flow control device for detecting and controlling the flow of the gas.

[0021] Furthermore, the air inlet and the air outlet are also provided with valves for opening and closing the air inlet and the air outlet.

[0022] Furthermore, the protective gas is nitrogen or a rare gas.

[0023] Furthermore, there are three annular ribs, and a gap is left between two adjacent annular ribs to form two annular grooves, which are used to form two annular channels with the bottom surface of the process tube after the annular ribs are softened and deformed, wherein the annular channel of the inner circle is used to introduce protective gas, and the annular channel of the outer circle is used to evacuate gas.

[0024] Furthermore, it also includes an annular peripheral channel surrounding the outer side of the base, which is used to allow protective gas to pass through after the annular rib is softened and deformed.

[0025] The present invention also provides a sealing structure for a high-temperature furnace tube, the high-temperature furnace tube comprising a base and a process tube arranged on the base, the sealing structure comprising an annular convex rib arranged on the top surface of the base, the top surface of the annular convex rib contacts with the bottom surface of the process tube and supports the process tube; wherein the material of the annular convex rib is quartz, and the annular convex rib is softened and deformed to adhere to the bottom surface of the process tube.

[0026] The present invention also provides a high-temperature furnace tube, comprising the above-mentioned sealing structure.

[0027] The present invention also provides a sealing method for a high-temperature furnace tube, which adopts the above-mentioned sealing structure and comprises the following steps:

[0028] placing the process pipe on the base;

[0029] Raising the internal temperature of the process tube to a preset temperature, wherein the preset temperature is a temperature at which the annular rib of the quartz material can soften and deform;

[0030] After the annular convex rib is softened and deformed to adhere to the bottom surface of the process pipe, the internal temperature of the process pipe is reduced to a temperature lower than a preset temperature.

[0031] Furthermore, the preset temperature ranges from 1350°C to 1400°C.

[0032] Furthermore, when there are multiple annular ribs and a block is provided between the air inlet and the air outlet at the bottom of the annular groove between adjacent annular ribs, the method further includes: introducing a protective gas of a second temperature into the gap between two adjacent annular ribs to obtain the ratio of the gas flow rates of the air inlet and the air outlet; judging whether the ratio is within a preset range, and if so, it is considered that the annular rib is softened and deformed, and forms an annular channel with the bottom surface of the process tube; wherein the second temperature is greater than or equal to the temperature at which the annular rib of the quartz material can soften and deform.

[0033] Furthermore, the preset range of the ratio is 60% to 95%.

[0034] Furthermore, when the sealing structure has the annular channel, the method further comprises introducing a protective gas at a first temperature into the annular channel.

[0035] Furthermore, when the sealing structure has two annular channels, the method further comprises introducing a protective gas at a first temperature into the annular channel of the inner ring, and evacuating the annular channel of the outer ring.

[0036] Furthermore, the method also includes introducing protective gas into the peripheral channel outside the base after the annular rib is softened and deformed.

[0037] Furthermore, when the sealing structure has the annular channel and a block is provided between the air inlet and the air outlet at the bottom of the annular groove, the method also includes: introducing a protective gas of a second temperature into the annular channel, obtaining the ratio of the gas flow rates of the air inlet and the air outlet, and judging whether the ratio is within a preset range; if so, it is considered that the sealing structure has good sealing performance.

[0038] As described above, the present invention provides a sealing structure and a sealing method for a high-temperature furnace tube, which have the following beneficial effects: a quartz annular rib is arranged on the base, which contacts the bottom surface of the process tube and supports the process tube, and the internal temperature of the process tube is increased to reduce the strength of the quartz annular rib and cause a slight deformation. The process tube is adhered to the base under the action of gravity, thereby achieving sealing between the process tube and the base. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 Shown is a schematic diagram of a high temperature furnace tube in one embodiment of the present invention;

[0040] Figure 2 A schematic diagram showing a sealing structure of a high-temperature furnace tube according to an embodiment of the present invention;

[0041] Figure 3 Another schematic diagram showing a sealing structure of a high-temperature furnace tube according to an embodiment of the present invention;

[0042] Figure 4 Shown is a schematic diagram of a base in one embodiment of the present invention;

[0043] Figure 5 Shown is a top view of a base in one embodiment of the present invention;

[0044] Figure 6 Display as Figure 5 A partial enlarged view of the circled portion of the middle base;

[0045] Figure 7 Another schematic diagram showing a sealing structure of a high-temperature furnace tube according to an embodiment of the present invention;

[0046] Figure 8 Shown is a cross-sectional view of a base according to an embodiment of the present invention. DETAILED DESCRIPTION

[0047] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0048] It should be noted that the illustrations provided in this embodiment are only schematic illustrations of the basic concept of the present invention. Although the illustrations only show components related to the present invention and are not drawn according to the number, shape and size of components in actual implementation, the form, quantity and proportion of each component in actual implementation can be changed arbitrarily, and the component layout form may also be more complicated. In addition, the parts with the same reference numerals in multiple drawings represent the same or equivalent parts or components.

[0049] The embodiment of the present invention provides a sealing structure of a high temperature furnace tube, such as Figure 1 As shown, the high temperature furnace tube comprises a process tube 11 and an annular base 12. The material of the process tube 11 is silicon carbide, and the material of the base 12 is quartz. Figure 1 The circled C portion is a sealing structure between the process tube 11 and the base 12. The sealing structure includes an annular convex rib arranged on the top surface of the base 12, the top surface of the annular convex rib contacts the bottom surface of the process tube 11 and supports the process tube 11. The material of the annular convex rib is quartz, which adheres to the bottom of the process tube 11 after softening and deforming in a high temperature environment. Specifically, the temperature in the process tube 11 is heated to a temperature that can soften the quartz, such as a temperature between 1350°C and 1400°C. The process tube 11 adheres to the base 12 under the action of gravity, ensuring a good sealing effect of the process tube during the process.

[0050] In some embodiments, the number of the annular ribs may be 2, including a first annular rib 121 and a second annular rib 122. Figure 2 , the first annular rib 121 and the second annular rib 122 are arranged at the part of the top surface of the base 12 that contacts the process tube 11. The first annular rib 121 and the second annular rib 122 are of equal height. The second annular rib 122 is arranged on the outside of the first annular rib 121. The process tube 11 is placed on the base 12 and supported by the first annular rib 121 and the second annular rib 122 arranged on the base 12. The materials of the first annular rib 121 and the second annular rib 122 are both quartz. The bottom area of ​​the first annular rib 121 and the second annular rib 122 are both larger than the top area. In some embodiments, the first annular rib 121 and the second annular rib 122 are both trapezoidal in cross section in the longitudinal direction.

[0051] like Figure 2As shown, in order to further ensure the sealing of the process tube, a gap is left between the first annular rib 121 and the second annular rib 122 to form an annular groove 123. When the quartz is softened at high temperature, a sealed annular channel is formed between the annular groove 123 and the bottom surface of the process tube 11, and the annular channel is used to fill the protective gas. The protective gas can be nitrogen or a rare gas. The temperature of the protective gas is lower than the temperature at which the annular rib of the quartz material can soften and deform, preferably room temperature, such as about 25°C, to prevent the protective gas temperature from being too high so that the annular rib continues to soften and destroy the stability of the sealing structure. In some embodiments, the longitudinal cross-section of the annular groove 123 is a trapezoid.

[0052] In another embodiment, the annular groove 123 may also include a depression formed downward between the first annular rib 121 and the second annular rib 122. Figure 3 As shown, the cross section of the annular groove 123 in the longitudinal direction consists of two parts, the upper part is the gap between the first annular rib 121 and the second annular rib 122, which can be trapezoidal, and the lower part is the aforementioned depression, which can be rectangular or semicircular. When the quartz is softened at high temperature, the annular groove 123 can form a larger annular channel with the bottom surface of the process tube 11, which can be filled with more protective gas.

[0053] The contact area between the first annular rib 121 and the second annular rib 122 and the bottom surface of the process tube 11 is within a preset range, which is calculated based on the weight of the process tube 11 and the maximum yield strength of quartz. Specifically, the range of the contact area S can be obtained according to the following formula:

[0054]

[0055] Where M is the weight of the process tube, g is the gravity coefficient, σ is the maximum yield strength of quartz, and n is the safety factor.

[0056] The width of the top circular rings of the first annular convex rib 121 and the second annular convex rib 122 can be obtained according to the contact area between the first annular convex rib 121 and the second annular convex rib 122 and the bottom surface of the process tube 11 .

[0057] In other embodiments, only one annular rib may be provided without an annular channel. More than three annular ribs may also be provided, and an annular channel may be provided between two adjacent annular ribs. Preferably, when there are three annular ribs, Figure 7 As shown, a third annular rib 128 is further provided on the outer side of the second annular rib 122, and an outer annular groove 129 is formed between the two, and a gas extraction device is connected to the outer annular groove 129. In the subsequent process, when the protective gas is introduced into the annular groove 123, the outer annular groove 129 is evacuated to prevent the chemical gas and protective gas inside the process tube 11 from leaking out of the furnace tube.

[0058] Reference Figures 4 to 6 , an air inlet pipe 124 and an air outlet pipe 125 for protective gas are provided on the side of the base 12. One end of the two pipes are connected to the air inlet 126 and the air outlet 127 of the protective gas, respectively, and the other end extends to the annular groove 123, intersecting with the bottom of the annular groove 123 to form an air inlet hole 1231 and an air outlet hole 1232. A stopper 1233 is provided on the annular groove 123 between the air inlet hole 1231 and the air outlet hole 1232, which is used to prevent the protective gas entering from the air inlet 126 from flowing out directly from the air outlet 127, but flowing through the annular channel. The top surface of the stopper 1233 contacts the bottom surface of the process tube 11, and the two ends of the stopper 1233 extend to the first annular rib 121 and the second annular rib 122 respectively. The material of the stopper 1233 is also quartz. Furthermore, the height of the stopper 1233 is consistent with the height of the first annular rib 121 and the second annular rib 122.

[0059] The gas flow path in the present invention is: enter the air inlet pipe 124 from the air inlet 126, flow into the annular channel through the air inlet hole 1231 at the bottom of the annular groove, then flow in the annular channel, then enter the air outlet pipe 125 through the air outlet hole 1232, and finally be discharged from the air outlet 127.

[0060] A flow control device (not shown in the figure) is also connected to the air inlet 126 and the air outlet 127, which is used to detect and control the flow of gas, and then verify the softening degree and sealing effect of the quartz convex ribs through the gas flow of the air outlet 127 and the air inlet 126. Among them, the gas flow of the air inlet 126 can be controlled at about 50LPM (liters / minute) by the flow control device. Specifically, the method for verifying the sealing effect is as follows: obtain the ratio of the gas flow of the air outlet 127 and the air inlet 126, and determine whether the ratio is within a preset range. If so, it is considered that the sealing effect is good. In some embodiments, the preset range of the ratio is 60% to 95%. In the subsequent process, this method can be continuously used to detect the sealing effect. After the protective gas is introduced, the air outlet 127 and the air inlet 126 are closed by closing the valves at the air outlet 127 and the air inlet 126, so that the protective gas in the annular channel is retained.

[0061] In other embodiments, the protective gas may be introduced before the process begins, and the protective gas may be continuously delivered during the process. When the protective gas is introduced, the valves at the gas outlet 127 and the gas inlet 126 may be opened to allow the protective gas to be discharged, thereby preventing the gas from impacting and damaging the softened annular ribs in the annular channel.

[0062] A metal plate is also provided at the bottom of the base 12, with a sealing ring between the two for sealing the process chamber. When the temperature inside the process tube 11 rises, the heat is easily transferred to the bottom of the base 12, causing the sealing ring to melt. Figure 8As shown, a ring-shaped peripheral channel 120 is provided around the outside of the base 12. The peripheral channel 120 is used to pass protective gas after the annular rib softens and deforms and in the subsequent process to prevent the heat in the process pipe 11 from being transferred to the bottom of the base 12 and to prevent the sealing ring between the bottom of the base 12 and the metal plate from melting. The temperature of the protective gas is usually room temperature, such as about 25°C. Figure 6 As shown, the peripheral channel 120 is connected with an air inlet 1201 and an air outlet 1202 for the air intake and outlet of the protective gas.

[0063] The present invention also provides a sealing method for a high-temperature furnace tube, which adopts the sealing structure in the above embodiment. The sealing method comprises the following steps:

[0064] The process pipe is placed on the base. The structures of the two are as follows Figure 1 As shown, at this time, the top surface of the annular convex rib contacts the bottom surface of the process tube and supports the process tube.

[0065] The temperature inside the process tube is raised to a preset temperature, which is a temperature at which quartz can soften and deform. In this process, the annular rib softens and deforms, and adheres to the bottom surface of the process tube that is kept pressed down by gravity.

[0066] After the annular convex rib is softened and deformed to adhere to the bottom surface of the process pipe, the internal temperature of the process pipe is reduced to a temperature lower than a preset temperature.

[0067] In some embodiments, the preset temperature may range from 1350°C to 1400°C.

[0068] After the annular rib softens and deforms to adhere to the bottom surface of the process pipe, the internal temperature of the process pipe is lowered to below the preset temperature to prevent the annular rib from continuing to soften and destroying the stability of the sealing structure.

[0069] In the case where the sealing structure has an annular channel, the annular rib is bonded to the bottom surface of the process tube to form a sealed annular channel. This method further introduces protective gas into the annular channel formed between the annular groove and the bottom surface of the process tube to further isolate the chemical gas inside the process tube from the external air to achieve a sealing effect.

[0070] In some embodiments, the method further includes introducing a protective gas at room temperature into the peripheral channel outside the base after the annular rib softens and deforms, so as to prevent heat in the process tube from being transferred to the bottom of the base.

[0071] In the example with multiple annular ribs, the method further includes: introducing a protective gas of a second temperature into the gap between two adjacent annular ribs, obtaining the ratio of the gas flow rates of the gas inlet and the gas outlet, and judging whether the ratio is within a preset range. If so, it is considered that the annular rib is softened and deformed, and forms an annular channel with the bottom surface of the process tube. The preset range of the ratio is 60% to 95%. The second temperature is greater than or equal to the temperature at which the annular rib of the quartz material can soften and deform, preferably 1500°C. In the subsequent process, this method can be continuously used to detect the sealing effect.

[0072] In the example where the sealing structure has two annular channels, the method further includes: introducing a protective gas at a first temperature into the annular channel of the inner ring, and evacuating the annular channel of the outer ring.

[0073] In some embodiments, the method further includes introducing protective gas into the peripheral channel outside the base after the annular rib is softened and deformed to adhere to the bottom surface of the process tube. The temperature of the protective gas can be room temperature, such as about 25°C.

[0074] This sealing method is applied to the installation stage of high-temperature furnace tubes. After the quartz ribs soften and deform, the process tube adheres to the base under the action of gravity, and a sealed annular channel is formed between the annular groove and the bottom surface of the process tube. Then, the protective gas is introduced into the annular channel to isolate the chemical gas inside the process tube from the external air. During the process, there is no need to heat the process tube to soften the quartz ribs, and the process can be carried out directly. In addition, the ultra-high temperature process temperature is usually 1300℃, which is lower than the temperature that softens and deforms quartz, so the stability of the structure and good sealing effect can be maintained at all times.

[0075] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A sealing structure for a high-temperature furnace tube, the high-temperature furnace tube comprising a base and a process tube suitable for being arranged on the base, characterized in that: The sealing structure includes an annular convex rib arranged on the top surface of the base, the top surface of the annular convex rib contacts the bottom surface of the process tube and supports the process tube; the material of the annular convex rib is quartz, which is suitable for adhering to the bottom surface of the process tube after softening and deforming at a preset temperature.

2. The sealing structure of the high temperature furnace tube according to claim 1, characterized in that: There are two annular convex ribs, and a gap is left between the two annular convex ribs to form an annular groove, which is used to form an annular channel with the bottom surface of the process pipe after the annular convex rib is softened and deformed.

3. The sealing structure of the high temperature furnace tube according to claim 2, characterized in that: The bottom of the annular groove is also provided with an air inlet hole for providing a protective gas at a first temperature into the annular channel. The first temperature is lower than the temperature at which the annular rib of the quartz material can soften and deform.

4. The sealing structure of the high temperature furnace tube according to claim 2, characterized in that: The two annular ribs have the same height.

5. The sealing structure of the high temperature furnace tube according to claim 2, characterized in that: The bottom areas of the two annular convex ribs are both larger than the top areas.

6. The sealing structure of the high temperature furnace tube according to claim 5, characterized in that: The two annular ribs have trapezoidal cross sections in the longitudinal direction.

7. The sealing structure of a high temperature furnace tube according to claim 5, characterized in that: The annular groove also includes a depression formed downwardly between the two annular ribs.

8. The sealing structure of the high temperature furnace tube according to claim 7, characterized in that: The cross section of the annular groove in the longitudinal direction consists of two parts, the upper half is trapezoidal, and the lower half is rectangular or semicircular.

9. The sealing structure of a high temperature furnace tube according to claim 2, characterized in that: The contact area S between the two annular ribs and the bottom surface of the process tube is calculated based on the weight M of the process tube and the maximum yield strength σ of quartz: Among them, g is the gravity coefficient, σ is the maximum yield strength of quartz, and n is the safety factor.

10. The sealing structure of a high temperature furnace tube according to claim 3, characterized in that: The bottom of the annular groove is also provided with an air outlet hole for discharging the gas in the annular groove.

11. The sealing structure of a high temperature furnace tube according to claim 10, characterized in that: The base is also provided with a gas inlet pipe and an outlet pipe, one end of which is connected to an air inlet and an air outlet respectively, and the other end extends to the annular groove and intersects with the bottom of the annular groove to form the air inlet hole and the air outlet hole.

12. The sealing structure of a high temperature furnace tube according to claim 11, characterized in that: A block is also provided between the air inlet and the air outlet to prevent the gas entering from the air inlet from directly flowing out from the air outlet; the top surface of the block contacts the bottom surface of the process tube, and the two ends of the block extend to the two annular ribs respectively.

13. The sealing structure of a high temperature furnace tube according to claim 11, characterized in that: The air inlet and the air outlet are also connected with a flow control device for detecting and controlling the flow of the gas.

14. The sealing structure of a high temperature furnace tube according to claim 11, characterized in that: The air inlet and the air outlet are also provided with valves for opening and closing the air inlet and the air outlet.

15. The sealing structure of a high temperature furnace tube according to claim 3, characterized in that: The protective gas is nitrogen or a rare gas.

16. The sealing structure of a high temperature furnace tube according to claim 1, characterized in that: There are three annular ribs, and a gap is left between two adjacent annular ribs to form two annular grooves, which are used to form two annular channels with the bottom surface of the process pipe after the annular ribs soften and deform, wherein the inner annular channel is used to introduce protective gas, and the outer annular channel is used to evacuate gas.

17. The sealing structure of a high temperature furnace tube according to claim 1, characterized in that: It also includes a ring-shaped peripheral channel surrounding the outer side of the base, which is used to allow protective gas to flow in after the annular rib softens and deforms.

18. A sealing structure for a high-temperature furnace tube, the high-temperature furnace tube comprising a base and a process tube arranged on the base, characterized in that: The sealing structure includes an annular convex rib arranged on the top surface of the base, the top surface of the annular convex rib contacts the bottom surface of the process tube and supports the process tube; wherein the material of the annular convex rib is quartz, and the annular convex rib is softened and deformed to adhere to the bottom surface of the process tube.

19. A high-temperature furnace tube, comprising the sealing structure according to any one of claims 1 to 18.

20. A sealing method for a high temperature furnace tube, using the sealing structure according to any one of claims 1 to 17, characterized in that: The following steps are involved: placing the process pipe on the base; Raising the internal temperature of the process tube to a preset temperature, wherein the preset temperature is a temperature at which the annular rib of the quartz material can soften and deform; After the annular convex rib is softened and deformed to adhere to the bottom surface of the process pipe, the internal temperature of the process pipe is reduced to a temperature lower than a preset temperature.

21. The sealing method of a high temperature furnace tube according to claim 20, characterized in that: The preset temperature ranges from 1350°C to 1400°C.

22. The sealing method of a high temperature furnace tube according to claim 20, characterized in that: When there are multiple annular ribs and a block is provided between the air inlet and the air outlet at the bottom of the annular groove between adjacent annular ribs, the method further includes: introducing a protective gas of a second temperature into the gap between two adjacent annular ribs to obtain the ratio of the gas flow rates of the air inlet and the air outlet; judging whether the ratio is within a preset range, and if so, it is considered that the annular rib is softened and deformed, and forms an annular channel with the bottom surface of the process tube; wherein the second temperature is greater than or equal to the temperature at which the annular rib of the quartz material can soften and deform.

23. The sealing method of a high temperature furnace tube according to claim 22, characterized in that: The preset range of the ratio is 60% to 95%.

24. The sealing method of a high temperature furnace tube according to claim 20, characterized in that: When the sealing structure has the annular channel, the method further comprises introducing a protective gas at a first temperature into the annular channel.

25. The sealing method of a high temperature furnace tube according to claim 20, characterized in that: When the sealing structure has two annular channels, the method further comprises introducing a protective gas at a first temperature into the annular channel of the inner ring, and evacuating the annular channel of the outer ring.

26. The sealing method of a high temperature furnace tube according to claim 20, characterized in that: The method further comprises introducing protective gas into the peripheral channel outside the base after the annular convex rib is softened and deformed.

27. The sealing method of a high temperature furnace tube according to claim 20, characterized in that: When the sealing structure has the annular channel and a block is provided between the air inlet and the air outlet at the bottom of the annular groove, the method further includes: introducing a protective gas of a second temperature into the annular channel, obtaining the ratio of the gas flow rates of the air inlet and the air outlet, and judging whether the ratio is within a preset range; if so, it is considered that the sealing structure has good sealing performance.

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