Performance evaluation method for resonant gyro assembly manufacturing link

Abstract

The present application relates to the technical field of resonant gyro manufacturing, and particularly relates to a performance evaluation method for resonant gyro assembly manufacturing links, comprising the following steps: S1: assembly and parameter setting, electrically connecting a to-be-tested resonant gyro semi-finished product and a measurement and control device, setting a direct current bias voltage variation range and a frequency split variation rate threshold value based on structure parameters of the to-be-tested resonant gyro semi-finished product K f* and a main shaft azimuth angle variation rate threshold value K θ* ; S2: basic measurement, setting a direct current bias voltage of the to-be-tested resonant gyro semi-finished product as an initial direct current bias voltage U 0, measuring a frequency split △ f 0 and a main shaft azimuth angle θ ω0 of the to-be-tested resonant gyro semi-finished product; S3: auxiliary measurement; S4: calculating variation rates; S5: calculating frequency split average variation rates K f and main shaft azimuth angle average variation rates K θ ; S6: performance evaluation, when K f ≤ K f* , and K θ ≤ K θ* , the performance evaluation is qualified. The present application has the advantages of simple and fast operation, lossless detection process and making up for the shortcomings of the existing evaluation system.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of resonant gyroscope manufacturing, and particularly relates to a performance evaluation method for a resonant gyroscope manufacturing and assembling link. BACKGROUND

[0002] The resonant gyroscope is a kind of inertial level solid wave gyroscope, and its working principle is based on the precession effect of resonator vibration standing wave to sense the angle or angular velocity of the outside world. The resonant gyroscope has unique advantages of high precision, small size, strong anti-impact ability, long service life and high reliability, and has broad application prospects in precise guidance, aviation, aerospace, navigation, consumer electronics and other military and civilian fields. It is recognized by the inertial technology circles at home and abroad as a revolutionary inertial device in the 21st century.

[0003] At present, the Nog Corporation of the United States and the Safran Company of France have mastered most of the core technologies of the resonant gyroscope and have realized batch production applications. The resonant gyroscope with a two-piece planar electrode structure developed by the Safran Company of France has greatly reduced the assembly difficulty and production cost, and the annual output can reach 25000, the precision covers 0.1° / h to 0.0001° / h, and has very strong market competitiveness. However, due to technical limitations, although the domestic resonant gyroscope has developed an experimental prototype, there is still a long way to go to the engineering prototype and model application. In addition, the precision of the resonant gyroscope reported in the domestic public report still has a gap of 2-3 orders of magnitude from the international highest level. Among them, the precise assembly of the resonant gyroscope and the assembly performance evaluation in the assembly link are key problems to be solved.

[0004] The development of the resonant gyroscope involves resonator processing, chemical etching, film plating, leveling and precise assembly, planar electrode processing and electrode etching, circuit design, manufacturing and testing, and vacuum packaging of the table head and other process links. At present, the industry needs to wait until all the above process links are completed to obtain the gyroscope table head prototype, and then the gyroscope table head performance evaluation can be carried out. After that, the final performance precision indexes such as zero bias stability and zero bias repeatability of the gyroscope can be obtained, and then the assembly performance of the gyroscope can be evaluated.

[0005] However, waiting until the gyroscope completes all the manufacturing processes and develops a table head prototype to evaluate the performance of the gyroscope table head is not conducive to timely screening of "problem" table heads in the assembly and manufacturing process, and it is difficult to improve the assembly efficiency and stability of the gyroscope. In the assembly process, there is a lack of relatively comprehensive and accurate performance evaluation method, so it is difficult to screen out the gyroscope table heads with poor performance in the assembly and manufacturing process and select them out to avoid unnecessary resource waste. SUMMARY

[0006] The technical problem solved by the present application is to overcome the deficiencies of the prior art, and to provide a performance evaluation method for resonant gyro assembly and manufacturing links, which has high evaluation accuracy, simple and fast operation, no loss in the detection process, high efficiency of evaluation result output, and can effectively supplement the existing evaluation index system.

[0007] To solve the above technical problems, the present application adopts the following technical solutions:

[0008] A performance evaluation method for resonant gyro assembly and manufacturing links, comprising the following steps,

[0009] S1: Assembling and parameter setting, electrically connecting the to-be-tested resonant gyro semi-finished product with the measurement and control device, adjusting and setting the measurement and control device so that it can measure the frequency splitting and the main shaft azimuth angle of the to-be-tested resonant gyro semi-finished product under different direct current bias voltages; setting the direct current bias voltage variation range and the frequency splitting variation rate threshold value based on the structure parameters of the to-be-tested resonant gyro semi-finished product K f* And the main shaft azimuth angle variation rate threshold value K θ* ;

[0010] S2: Basic measurement, setting the direct current bias voltage of the to-be-tested resonant gyro semi-finished product to the initial direct current bias voltage 0 based on the measurement and control device U 0, and measuring the frequency splitting △ f 0 and the main shaft azimuth angle θ ω0 ;

[0011] S3: Auxiliary measurement, selecting at least n direct current bias voltage values different from the initial direct current bias voltage 0 from small to large as auxiliary measurement voltages based on the direct current bias voltage variation range U 1, U 2, U , … U n}n is a positive integer and is not less than 2, setting the direct current bias voltage of the to-be-tested resonant gyro semi-finished product to the auxiliary measurement voltage based on the measurement and control device, and respectively measuring the corresponding auxiliary frequency splitting △ f 1,△ f 2,…,△ f n} and the auxiliary main shaft azimuth angle θ ω1 , θ ω2 under different auxiliary measurement voltages U 1, U 2, … , U n}​… , θ ωn};

[0012] S4: calculating the rate of change, according to the plurality of auxiliary frequency splits measured in step S3 f 1,△ f 2,…,△ f n}, based on formula (1) to calculate the plurality of frequency split rate of change of the resonator gyro semi-finished product to be measured K fi , according to the plurality of auxiliary principal axis azimuth angles measured in step S3 θ ω1 , θ ω2 , … , θ ωn}, based on formula (2) to calculate the plurality of principal axis azimuth angle rate of change of the resonator gyro semi-finished product to be measured K θi ;

[0013]

[0014] S5: calculating the average rate of change, according to the calculation results of step S4, based on formula (3) to calculate the frequency split average rate of change K f , based on formula (4) to calculate the principal axis azimuth angle average rate of change K θ ;

[0015]

[0016]

[0017] S6: performance evaluation, comparing the frequency split average rate of change K f with the frequency split rate of change threshold K f* , comparing the principal axis azimuth angle average rate of change K θ with the principal axis azimuth angle rate of change threshold K θ* , when K f ≤ K f* , and K θ ≤ K θ* , the performance evaluation of the evaluation index is qualified, otherwise, the performance evaluation of the evaluation index is unqualified.

[0018] In the step S3, a floating voltage value △ is selected in the direct current bias voltage variation range U The first auxiliary measurement voltage is set to U 1= U 0-△ U The second auxiliary measurement voltage is set to U 2= U 0+△ U The first auxiliary frequency split under the first auxiliary measurement voltage is measured as △ f 1, the first auxiliary main shaft azimuth angle is θ ω1 The second auxiliary frequency split under the second auxiliary measurement voltage is measured as △ f 2, the second auxiliary main shaft azimuth angle is θ ω2 .

[0019] In the step S4, the frequency split variation rate is calculated based on formula (1) K f1 and K f2 The main shaft azimuth angle variation rate is calculated based on formula (2) K θ1 and K θ2 ,

[0020]

[0021]

[0022] In the step S5, the average frequency split variation rate is calculated based on formula (3) K f The average main shaft azimuth angle variation rate is calculated based on formula (4) K θ ;

[0023]

[0024]

[0025] In the step S3, the value range of △ U is: △ U =a* U 0, a=0.01~1.

[0026] The frequency split variation rate threshold K f* is: 0.1~0.001mHz / V, the main shaft azimuth angle variation rate threshold Kθ* is: 1~0.01° / V.

[0027] Compared with the prior art, the application has the advantages that:

[0028] The performance evaluation method for the resonant gyro assembly manufacturing link of the application can be used for all resonant gyros (such as cylindrical resonant gyros, micro hemispherical resonant gyros, etc.) of different sizes based on the electrostatic detection driving principle, and the semi-finished products thereof are evaluated for the performance in the assembly process. The application evaluates the semi-finished products for the performance in the assembly process based on two groups of series parameters of frequency splitting and main shaft azimuth angle closely related to the processing precision and assembly precision of the resonant gyro, and the evaluation result has strong correlation with the performance in the assembly process of the semi-finished product, so the accuracy of the evaluation result is very high; the two groups of series parameters of frequency splitting and main shaft azimuth angle are connected to the measuring and controlling device on the semi-finished product, and accurate results can be obtained by using conventional detection methods, which is simple and fast, the detection process has no loss, and the output efficiency of the evaluation result is also very high; by changing the direct current bias voltage, a plurality of groups of auxiliary frequency splitting and auxiliary main shaft azimuth angle are measured, and the change rate and average change rate are further calculated, and the average change rate is compared with the preset change rate threshold, so as to evaluate the performance of the semi-finished product, not only the qualitative evaluation result of whether the semi-finished product is qualified can be obtained, but also the quality grading of the qualified semi-finished product can be assisted; the two evaluation indexes of frequency splitting average change rate and main shaft azimuth angle average change rate are first proposed in the application, which is an effective supplement to the existing evaluation index system of the quality factor, quality factor non-uniformity, frequency splitting, etc. of the resonant gyro, the two indexes of frequency splitting average change rate and main shaft azimuth angle change rate are affected by many factors such as non-uniformity of the assembly gap, angle between the rigid shaft, damping shaft and driving shaft, etc., and then the quality of the resonant gyro and its assembly semi-finished product can be more comprehensively evaluated by combining the indexes, especially when the semi-finished product is evaluated in the resonant gyro assembly manufacturing link, it is beneficial to timely screen out the "problem" table head in the assembly manufacturing process, so as to avoid the "problem" table head from entering the later process and causing unnecessary resource waste. BRIEF DESCRIPTION OF DRAWINGS

[0029] The accompanying drawings, which form a part of this application, are included to provide a further understanding of the application and are incorporated in and constitute a part of this application. The embodiments of these drawings illustrate the preferred aspects of the present application and, together with the description, serve to explain the principles of the application.

[0030] Figure 1 is a flowchart of the evaluation method for the resonant gyro assembly performance of the application. DETAILED DESCRIPTION

[0031] The embodiments of the application are described in detail below with reference to the accompanying drawings, but the application can be implemented in many different ways limited and covered by the claims.

[0032] As Figure 1 shown, a performance evaluation method for resonant gyro assembly manufacturing links comprises the following steps,

[0033] S1: assembly and parameter setting, electrically connecting the resonant gyro semi-finished product to be measured and the measurement and control device, adjusting the measurement and control device to measure the frequency splitting and the principal axis azimuth angle of the resonant gyro semi-finished product to be measured under different direct current bias voltages; based on the structural parameters of the resonant gyro semi-finished product to be measured, setting the direct current bias voltage variation range and the frequency splitting variation rate threshold K f* and the principal axis azimuth angle variation rate threshold K θ* ; in this embodiment, the frequency splitting variation rate threshold K f* is 0.1~0.001mHz / V, and the principal axis azimuth angle variation rate threshold K θ* is 1~0.01° / V, in other embodiments, the frequency splitting variation rate threshold K f* and the principal axis azimuth angle variation rate threshold K θ* can be adjusted according to the category of the resonant gyro, the manufacturing difficulty, and the production and processing capacity and other factors.

[0034] S2: basic measurement, based on the measurement and control device, setting the direct current bias voltage of the resonant gyro semi-finished product to be measured as the initial direct current bias voltage U 0, and measuring the frequency splitting △ f 0 and the principal axis azimuth angle θ ω0 of the resonant gyro semi-finished product to be measured;

[0035] S3: auxiliary measurement, based on the direct current bias voltage variation range, selecting at least n different direct current bias voltage values U 0 from small to large as auxiliary measurement voltages, n is a positive integer and not less than 2, based on the measurement and control device, setting the direct current bias voltage of the resonant gyro semi-finished product to be measured as the auxiliary measurement voltage, and measuring the corresponding auxiliary frequency splitting U 1, U 2, … , U n of the resonant gyro semi-finished product to be measured under different auxiliary measurement voltages U 1, U 2, … , U n , respectively, n is a positive integer and not less than 2, based on the measurement and control device, setting the direct current bias voltage of the resonant gyro semi-finished product to be measured as the auxiliary measurement voltage, and measuring the corresponding auxiliary frequency splitting f 1, f 2, fn} and auxiliary main shaft azimuth angle θ ω1 , θ ω2 , … , θ ωn};

[0036] S4: Calculate the rate of change, according to the plurality of auxiliary frequency split measured in step S3 {△ f 1,△ f 2,…,△ f n}, based on formula (1) to calculate the plurality of frequency split rate of change of the resonator gyro semi-finished product to be measured K fi , according to the plurality of auxiliary main shaft azimuth angle measured in step S3 {△ θ ω1 , θ ω2 , … , θ ωn}, based on formula (2) to calculate the plurality of main shaft azimuth angle rate of change of the resonator gyro semi-finished product to be measured K θi ;

[0037]

[0038] S5: Calculate the average rate of change, according to the calculation results of step S4, based on formula (3) to calculate the average rate of change of the frequency split K f , based on formula (4) to calculate the average rate of change of the main shaft azimuth angle K θ ;

[0039]

[0040]

[0041] S6: Performance evaluation, compare the average rate of change of the frequency split K f With the frequency split rate of change threshold K f* , compare the average rate of change of the main shaft azimuth angle K θ With the main shaft azimuth angle rate of change threshold K θ* When K f ≤ K f* , and Kθ ≤ K θ* When the performance evaluation is qualified, otherwise, the performance evaluation is unqualified.

[0042] The performance evaluation method for the resonant gyro assembly manufacturing link can be used for all resonant gyros (such as cylindrical resonant gyros, micro hemispherical resonant gyros and the like) of different sizes based on the electrostatic detection driving principle, and the performance of the semi-finished product is evaluated in the assembly process. The present application evaluates the performance of the semi-finished product in the assembly process based on the frequency splitting and the main shaft azimuth angle two groups of series parameters closely related to the processing precision and the assembly precision of the resonant gyro, and the evaluation result has strong correlation with the assembly process performance of the semi-finished product, so the accuracy of the evaluation result is very high; and the frequency splitting and the main shaft azimuth angle two groups of series parameters are connected to the measuring and controlling device on the semi-finished product, and the accurate result can be obtained by using the conventional detection method, which is simple and fast, and the detection process has no loss, and the output efficiency of the evaluation result is also very high; by changing the direct current bias voltage, the multiple auxiliary frequency splitting and the auxiliary main shaft azimuth angle are measured, and the change rate and the average change rate are further calculated, and the average change rate is compared with the preset change rate threshold, so as to evaluate the performance of the semi-finished product, which can not only obtain the qualitative evaluation result of whether the semi-finished product is qualified, but also assist the qualified semi-finished product in quality grading; the two evaluation indexes of the frequency splitting average change rate and the main shaft azimuth angle average change rate are first proposed in the present application, which is an effective supplement to the existing resonant gyro quality factor, quality factor non-uniformity, frequency splitting and other evaluation index system, and the two indexes of the frequency splitting average change rate and the main shaft azimuth angle change rate are affected by many factors such as the non-uniformity of the assembly gap, the angle between the rigid shaft, the damping shaft and the driving shaft and the like, and then the quality of the resonant gyro and the assembly semi-finished product can be more comprehensively evaluated by combining the index, especially when the semi-finished product is evaluated in the resonant gyro assembly manufacturing link, it is beneficial to timely screen out the "problem" table head in the assembly manufacturing process, which can avoid the "problem" table head entering the later process and causing unnecessary resource waste.

[0043] In the embodiment, when step S2 is performed, the initial direct current bias voltage is set to 0=212V, and the frequency splitting △ U 0 and the main shaft azimuth angle f under the initial direct current bias voltage are measured. θ ω0 When step S3 is performed, a floating voltage value △ U is selected in the direct current bias voltage change range, the value range of △ U is: △ U =a* U 0, a=0.01~1, a=0.5 in the embodiment, and two values different from the initial direct current bias voltage are selected from small to large based on the direct current bias voltage change range.U 0 of the direct current bias voltage value U 1, U 2} as the auxiliary measurement voltage, wherein the first auxiliary measurement voltage is set to U 1=112V, the second auxiliary measurement voltage is set to U 2=257V, and the first auxiliary frequency split under the first auxiliary measurement voltage is measured as △ f 1, the first auxiliary principal axis azimuth is θ ω1 , the second auxiliary frequency split under the second auxiliary measurement voltage is measured as △ f 2, the second auxiliary principal axis azimuth is θ ω2 .

[0044] Further, when step S4 is performed, the frequency split change rate K f1 and K f2 , the principal axis azimuth change rate K θ1 and K θ2 ,

[0045]

[0046] Further, when step S5 is performed, the average frequency split change rate K f , the average principal axis azimuth change rate K θ is calculated based on formula (4);

[0047]

[0048]

[0049] In this embodiment, each preset parameter, measurement parameter, calculation result and evaluation result is specifically shown in Table 1:

[0050]

[0051] Table 1: Each preset parameter, measurement parameter, calculation result and evaluation result

[0052] Although the present application has been disclosed with reference to the preferred embodiments, it is not intended to limit the present application. Any person skilled in the art, without departing from the technical scope of the present application, can make many possible changes and modifications to the disclosed technical content of the present application, or modify equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments without departing from the technical content of the present application, according to the technical essence of the present application, shall fall within the scope of protection of the present application.

Claims

1. A performance evaluation method for the assembly and manufacturing process of a resonant gyroscope, characterized in that: including the following steps, S1: Assembly and parameter setting: electrically connect the resonant gyro semi-finished product to be tested to the measurement and control device, and adjust the measurement and control device so that it can measure the frequency cracking and main axis azimuth of the resonant gyro semi-finished product under different DC bias voltages; set the DC bias voltage variation range and the frequency cracking change rate threshold based on the structural parameters of the resonant gyro semi-finished product to be tested. K f* and the spindle azimuth angle change rate threshold K θ* ; S2: Basic measurement, using the measurement and control device to set the DC bias voltage of the resonant gyroscope semi-finished product to the initial DC bias voltage U 0, and the frequency cracking of the semi-finished resonant gyroscope to be tested is measured f 0 and the main axis azimuth i ω0 ; S3: Auxiliary measurement, based on the DC bias voltage variation range, select at least n DC bias voltages different from the initial DC bias voltage in descending order. U 0 DC bias voltage value { U 1, U 2, … , U n } as the auxiliary measurement voltage, n is a positive integer and not less than 2, based on the measurement and control device, the DC bias voltage of the semi-finished resonant gyroscope to be measured is set to the auxiliary measurement voltage, and different auxiliary measurement voltages { U 1, U 2, … , U n The auxiliary frequency cracking corresponding to the semi-finished resonant gyroscope under test is {△ f 1,△ f 2,…,△ f n } and auxiliary spindle azimuth { i ω1 , i ω2 , … , i ωn }; S4: Calculate the rate of change, based on the multiple auxiliary frequency cracking {△ f 1,△ f 2,…,△ f n }, based on formula (1), calculate the multiple frequency cracking change rates of the resonant gyroscope semi-finished product to be tested K fi , according to the multiple auxiliary spindle azimuths { i ω1 , i ω2 , … , i ωn }, based on formula (2), calculate the azimuth angle change rate of multiple main axes of the semi-finished resonant gyroscope to be tested K θi ; S5: Calculate the average change rate. According to the calculation result of step S4, the average change rate of frequency cracking is calculated based on formula (3): K f , calculate the average change rate of the main axis azimuth based on formula (4) K θ ; S6: Performance evaluation, the frequency cracking average change rate K f Frequency cracking rate threshold K f* For comparison, the average change rate of the main axis azimuth is K θ Threshold value of the rate of change of the main axis azimuth angle K θ* For comparison, when K f ≤ K f* ,and K θ ≤ K θ* , the performance evaluation of the evaluation index is qualified; otherwise, the performance evaluation of the evaluation index is unqualified.

2. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to claim 1, characterized in that: When performing step S3, a floating voltage value Δ is selected within the DC bias voltage variation range. U , set the first auxiliary measurement voltage to U 1= U 0-△ U , set the second auxiliary measurement voltage to U 2= U 0+△ U , and the first auxiliary frequency splitting under the first auxiliary measurement voltage is measured to be △ f 1. The azimuth angle of the first auxiliary spindle is i ω1 , the second auxiliary frequency splitting under the second auxiliary measurement voltage is △ f 2. The azimuth angle of the second auxiliary spindle is i ω2 .

3. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to claim 2, characterized in that: When performing step S4, the frequency cracking change rate is calculated based on formula (1): K f1 and K f2 , based on formula (2), the main axis azimuth angle change rate is calculated K θ1 and K θ2 , 4. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to claim 3, characterized in that: When performing step S5, the average change rate of frequency cracking is calculated based on formula (3): K f , calculate the average change rate of the main axis azimuth based on formula (4) K θ ; 5. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to claim 2, 3 or 4, characterized in that: In step S3, U The value range of is: U =a* U 0, a=0.01~1.

6. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to any one of claims 1 to 5, characterized in that: The frequency cracking change rate threshold K f* The spindle azimuth angle change rate threshold is: 0.1~0.001mHz / V K θ* It is: 1~0.01° / V.

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