Ventilation equipment control device and method
By designing temperature and test component sensors in the test system and automatically controlling the ventilation equipment, the problem of manual operation of ventilation equipment in the prior art is solved, the degree of automation is improved, and the stability and accuracy of the test are ensured.
Patent Information
- Application Number
- CN202311355942.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-10-16
- Filing Date
- 2023-10-19
- Publication Date
- 2025-04-18
AI Technical Summary
The ventilation equipment of the existing test system needs to be manually turned on and off, resulting in low automation and easy to affect the testing steps of semiconductor components due to human negligence.
A ventilation device control device is designed, including a temperature sensor, a test component sensor and a ventilation controller, which automatically turns on or off the ventilation device according to the reference temperature of the test system and whether the test component exists.
Automatically control the ventilation equipment according to the temperature and the presence of the test components to avoid moisture condensation caused by low temperature and accumulation of dust or damage to the object to be measured due to unnecessary ventilation.
Smart Images
Figure CN119847005A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a control device and method for air purge equipment, and more particularly to a control device and method for air purge equipment used in a test system. Background Art
[0002] After the semiconductor device is manufactured, it must undergo a testing step to ensure its quality. The testing step is usually achieved by using a testing system 16, such as Figure 1 The test system 16 includes a prober 10, a tester 11 and a probe card 12. The tester 11 is used to receive the probe card 12, and transmit the test signal to the wafer 15 to be tested placed on the suction carrier 14 through the probe card 12 and the probe 13, and then receive the feedback signal of the wafer 15 through the probe card 12 and the probe 13.
[0003] With the demand for automation in the mechanical industry and the increase in precision requirements, the accuracy of electromechanical integration will be an important key factor, among which temperature is an important factor affecting precision control. The probe tester may generate moisture when performing low-temperature testing, and the surface temperature of the probe card may be lower than the dew point temperature, causing the moisture to condense into water and cause electrical abnormalities. In order to maintain the stable operation of the test system 16, ventilation equipment can be set between the test machine 11 and the probe tester 10 to reduce the humidity during its operation. On the other hand, when there is no probe card 12 in the probe tester 10, even if the humidity standard has been reached, it is not necessary to turn on the ventilation equipment, and the ventilation equipment must even be turned off to avoid gas blowing into the inside of the probe tester to generate negative pressure and increase dust (particles), and to prevent the wafer from being blown off by the wind during loading or unloading and causing scratches or fragments.
[0004] The ventilation equipment of the current test system 16 is opened and closed manually and is not automated, so it is easy for human error to affect the test steps of the semiconductor device. Summary of the invention
[0005] To solve the above problems, the present invention provides a ventilation equipment control device for controlling the ventilation equipment of a test system, wherein the test system is used to test an object to be tested to verify the quality of the object to be tested, and the ventilation equipment is used to reduce the internal humidity of the test system. The ventilation equipment control device includes: a temperature sensor for sensing a reference temperature of the test system; a test element sensor for sensing whether a test element for testing the object to be tested exists in the test system; and a ventilation controller for deciding to turn on or off the ventilation equipment based on the reference temperature and whether the test element exists in the test system.
[0006] The present invention further provides a ventilation equipment control method for controlling the ventilation equipment of the above-mentioned test system, the ventilation equipment control method comprising: sensing the reference temperature of the test system; sensing whether there is a test element for testing the object to be tested in the test system; and deciding to turn on or off the ventilation equipment based on the reference temperature and whether the test element is present in the test system.
[0007] The present invention automatically opens or closes the ventilation equipment of the test system according to the temperature of the test system and whether the test element exists, so as to prevent the low temperature from causing moisture to condense into water and affect the test of the object to be tested, and to prevent unnecessary opening of the ventilation equipment, so as to prevent gas from being blown into the interior of the test system and accumulating dust or the object to be tested from being blown off by the wind during loading or unloading and causing damage. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Figure 1 A schematic diagram of an existing test system.
[0009] Figure 2 The present invention is a block diagram of a ventilation equipment control device.
[0010] Figure 3 The present invention is a flow chart of a ventilation equipment control method.
[0011] Main component symbols
[0012] 10-pin tester
[0013] 11 Testing Machine
[0014] 12 Probe Card
[0015] 13 Probe
[0016] 14 Adsorption type carrier plate
[0017] 15 Wafer
[0018] 16 Test System
[0019] 20 Ventilation equipment controls
[0020] 21 Temperature setting interface
[0021] 22. Temperature Controller
[0022] 23 Temperature sensor
[0023] 24 Test Component Sensors
[0024] 25 Ventilation Controller
[0025] 26 Ventilation equipment
[0026] 27 Test System
[0027] Steps 31 to 35. DETAILED DESCRIPTION
[0028] The following describes the implementation of the present invention through specific embodiments. Those skilled in the art can easily understand other advantages and technical effects of the present invention from the contents disclosed in this specification.
[0029] Figure 2 2 is a block diagram of a ventilation equipment control device 20 of the present invention. The ventilation equipment control device 20 includes a temperature setting interface 21, a temperature controller 22, a temperature sensor 23, a test element sensor 24, and a ventilation controller 25. The temperature setting interface 21 is electrically connected to the temperature controller 22, the temperature controller 22 is electrically connected to the temperature sensor 23, and the ventilation controller 25 is electrically connected to the temperature sensor 23, the test element sensor 24, and the ventilation equipment 26.
[0030] The ventilation device control device 20 is used to control the ventilation device 26 of the test system 27, for example, to turn on or off the ventilation device 26. The test system 27 may be Figure 1 The test system 16 or other semiconductor component test system shown is used to test the object to be tested placed in the test system 27 to verify the quality of the object to be tested. The object to be tested may be a semiconductor component, such as a wafer, a package or an electronic component. The ventilation device 26 is used to reduce the internal humidity of the test system 27 to prevent the low temperature from causing moisture to condense into water and affect the test of the object to be tested.
[0031] Please also refer to Figure 3 , is a flow chart of a ventilation equipment control method of the present invention, which can be executed by the ventilation equipment control device 20. Figure 3 The method flow is shown.
[0032] First, in step 31, the temperature setting interface 21 receives the temperature limit condition set by the user. For example, the temperature setting interface 21 may include an input device such as a button or a key, or include a remote control signal receiver to receive the temperature limit condition set by the user.
[0033] In step 32, the temperature controller 22 controls the temperature of the space where the test system 27 is located according to the temperature limit condition. For example, the temperature limit condition may be a target temperature, and the temperature controller 22 may control the air conditioning equipment (not shown) of the space to make the temperature of the space approach the target temperature.
[0034] In step 33 , the temperature sensor 23 senses a reference temperature of the test system 27 . The reference temperature is a surface temperature or an internal temperature of the test system 27 .
[0035] In step 34, the test element sensor 24 senses whether there is a test element in the test system 27. The test element is used to test the aforementioned object under test. In detail, the test element is used to input a test signal into an electrical test point (such as a pad or an electrode) of the object under test, and receive a feedback signal generated by the object under test after receiving the test signal from the electrical test point. The test element may be Figure 1 The probe card 12 or other electronic components with the same function as shown. The test component sensor 24 can convert the existence information of the test component into an electrical signal, and the test component sensor 24 can read the electrical signal to determine whether the test component exists in the test system 27.
[0036] In step 35, the ventilation controller 25 decides to turn on or off the ventilation device 26 according to the reference temperature and whether the test element exists in the test system 27. In detail, if the reference temperature is lower than or equal to the first critical temperature and the test element exists in the test system 27, the ventilation controller 25 turns on the ventilation device 26 to reduce the internal humidity of the test system 27. If the reference temperature is higher than the second critical temperature or the test element does not exist in the test system 27, the ventilation controller 25 turns off the ventilation device 26. The second critical temperature is higher than or equal to the first critical temperature.
[0037] In one embodiment, the ventilation controller 25 may be a logic circuit, a control circuit, a micro-controller unit (MCU), an embedded controller or a processor.
[0038] In one embodiment, the first critical temperature and the second critical temperature are both 5° C. Therefore, the logic judgment of the ventilation controller 25 to decide whether to open or close the ventilation device 26 is as shown in the following table.
[0039] Temperature ≤ 5℃ Test if a component exists Ventilation equipment yes yes Open yes no closure no yes closure no no closure
[0040] It can be seen from the above table that the ventilation controller 25 turns on the ventilation device 26 only when the reference temperature is lower than or equal to 5°C and the test element exists in the test system 27. When the reference temperature is higher than 5°C or the test element does not exist in the test system 27, the ventilation controller 25 turns off the ventilation device 26.
[0041] In one embodiment, the first critical temperature is 5° C., and the second critical temperature is 7° C. Therefore, the ventilation controller 25 of this embodiment turns on the ventilation device 26 only when the reference temperature is lower than or equal to 5° C. and the test element exists in the test system 27. When the reference temperature is higher than 7° C. or the test element does not exist in the test system 27, the ventilation controller 25 turns off the ventilation device 26.
[0042] In summary, the present invention automatically opens or closes the ventilation device according to the temperature of the test system and whether the test element exists, so as to prevent the low temperature from causing moisture to condense into water and affect the test of the object to be tested, and to prevent unnecessary opening of the ventilation device to prevent gas from being blown into the interior of the test system and accumulating dust or the object to be tested from being blown off by the wind during loading or unloading and causing damage.
[0043] The above embodiments are only illustrative of the principles and technical effects of the present invention, and are not intended to limit the present invention. Any person skilled in the art may make modifications and equivalent substitutions to the above embodiments without violating the inventive concept and scope of the present invention. Therefore, the scope of protection of the present invention shall be as set forth in the claims.
Claims
1. A ventilation equipment control device, used to control ventilation equipment of a test system, the test system is used to test an object to be tested to verify the quality of the object to be tested, the ventilation equipment is used to reduce the internal humidity of the test system, the ventilation equipment control device comprising: A temperature sensor, used for sensing a reference temperature of the test system; A test element sensor, used for sensing whether there is a test element for testing the object under test in the test system; as well as The ventilation controller is used for determining whether to open or close the ventilation device according to the reference temperature and whether the test element exists in the test system.
2. The ventilation equipment control device according to claim 1, wherein: The testing element is used for inputting a testing signal into an electrical testing point of the object under test, and receiving a feedback signal generated by the object under test after receiving the testing signal from the electrical testing point.
3. The ventilation equipment control device according to claim 1, wherein: The reference temperature is the surface temperature or the internal temperature of the test system.
4. The ventilation equipment control device according to claim 1, wherein: If the reference temperature is lower than or equal to the first critical temperature and the test element exists in the test system, the ventilation controller turns on the ventilation device.
5. The ventilation equipment control device according to claim 4, wherein: If the reference temperature is higher than the second critical temperature, or the test element does not exist in the test system, the ventilation controller turns off the ventilation device.
6. The ventilation equipment control device according to claim 5, wherein: The second critical temperature is higher than or equal to the first critical temperature.
7. The ventilation equipment control device according to claim 5, wherein: The first critical temperature is 5°C, and the second critical temperature is 5°C or 7°C.
8. The ventilation equipment control device according to claim 1, wherein: The device also includes: A temperature setting interface, used to receive temperature limit conditions set by a user; and The temperature controller is used to adjust the temperature of the space where the test system is located according to the temperature limit condition.
9. A ventilation equipment control method for controlling ventilation equipment of a test system, the test system being used to test an object to be tested to verify the quality of the object to be tested, the ventilation equipment being used to reduce the internal humidity of the test system, the ventilation equipment control method comprising: sensing a reference temperature of the test system; Sensing whether there is a test element for testing the object under test in the test system; as well as The ventilation device is turned on or off according to the reference temperature and whether the test element exists in the test system.
10. The ventilation equipment control method according to claim 9, wherein: The testing element is used for inputting a testing signal into an electrical testing point of the object under test, and receiving a feedback signal generated by the object under test after receiving the testing signal from the electrical testing point.
11. The ventilation equipment control method according to claim 9, wherein: The reference temperature is the surface temperature or the internal temperature of the test system.
12. The ventilation equipment control method according to claim 9, wherein: The method further includes: If the reference temperature is lower than or equal to the first critical temperature and the test element exists in the test system, the ventilation device is turned on.
13. The ventilation equipment control method according to claim 12, wherein: The method further includes: If the reference temperature is higher than the second critical temperature, or the test element does not exist in the test system, the ventilation device is turned off.
14. The ventilation equipment control method according to claim 13, wherein: The second critical temperature is higher than or equal to the first critical temperature.
15. The ventilation equipment control method according to claim 13, wherein: The first critical temperature is 5°C, and the second critical temperature is 5°C or 7°C.
16. The ventilation equipment control method according to claim 9, wherein: The method further includes: receiving temperature limit conditions set by a user; and The temperature of the space where the test system is located is regulated according to the temperature limit condition.